TWM636146U - Heavy grille floor - Google Patents

Abstract

A heavy grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 50% ventilation. Therefore, the heavy grille floor can meet the needs of cleanliness of semiconductor process.

Description

Heavy duty grid floor

This work relates to a floor, especially a heavy grille floor with a high ventilation rate.

Known raised floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, etc., can be used in the semiconductor manufacturing process of the building area, as well as the factory The ventilated floor in the process area, but its ventilation rate is less than 20%, which cannot meet the demand for ventilation rate.

However, the grid floor used for the gutter cover is currently manufactured by welding, such as the TW536257 patent, which is prone to deformation, defects and fractures during the welding forming process.

Furthermore, the ventilation rate of the existing grid floor is too small, so that the return air volume is not enough, so that the cleanliness requirement of the semiconductor manufacturing process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so when the grid floor carries heavy equipment in the semiconductor manufacturing process, the grid floor is prone to cracking.

On the other hand, the existing grid floor also has the problem of being too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the various problems of the above-mentioned conventional technologies has become a difficult problem to be overcome urgently in the industry at present.

In view of the various deficiencies of the above-mentioned conventional technologies, this creation provides a heavy-duty grid floor, which includes: a top plate with opposite ground sides and honeycomb sides, wherein a plurality of holes connecting the ground side and the honeycomb side are formed on the top plate. perforation to form more than 50% of the ventilation; and multiple rib structures, which are integrally molded and cast with the top plate using aluminum alloy, and form multiple recesses on the honeycomb side of the top plate, so that each of the recesses There are three perforations, wherein, the rib structure is defined in sequence from the edge of the top plate to the middle with the first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib. ribs, and the first to seventh ribs are main ribs, the height of which is at least 25 mm relative to the sides of the honeycomb.

In the aforementioned heavy-duty grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb.

In the aforementioned heavy-duty grid floor, the first ribs are formed on the edge of the top plate to become the side ribs of the heavy-duty grid floor, so as to serve as the frame of the heavy-duty grid floor.

In the aforementioned heavy-duty grid floor, the sum of the thicknesses of the first rib relative to the honeycomb side and the top plate is 59.5 mm, and the thickness of the top plate is 2 mm.

In the aforementioned heavy grid floor, the width of the first rib is 7 to 9.5 mm.

In the aforementioned heavy-duty grid floor, the heights of the first to seventh ribs relative to the side of the honeycomb are 50 to 57.5 mm.

In the aforementioned heavy-duty grid floor, the widths of the second to seventh ribs are 3.5 to 7 mm.

In the aforementioned heavy-duty grid floor, the rib structure forms a well-shaped rib with two seventh ribs in the longitudinal and horizontal directions, so as to divide the heavy-duty grid floor into four areas, and the adjacent four areas 25 subregions are formed between the second rib, third rib, fourth rib, fifth rib and sixth rib, each of which has a concave part, and the well-shaped rib formed on the seventh rib Another concave part is formed in the central part, and each sub-region has three elongated perforations to form more than 50% of the ventilation, and a wing plate is formed around the top plate, so that the wing plate The thickness is greater than the thickness of the top plate.

In the aforementioned heavy-duty grid floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the main rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that two of the auxiliary ribs are arranged in a single recess. rib. For example, the height of the auxiliary rib relative to the side of the honeycomb is 25 mm, and the width is 3 mm.

In the aforementioned heavy-duty grid floor, the widths of the first rib, the second rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the first rib, the second rib at the middle part of the honeycomb side. The width of the second rib and the seventh rib is to reduce the weight of the heavy grid floor.

In the aforementioned heavy-duty grid floor, the first rib and the second rib are connected to the four corners of the heavy-duty grid floor to form feet, and the feet are fixed on the supporting legs.

It can be seen from the above that in the heavy-duty grid floor of this creation, the top plate and the plurality of rib structures are integrally cast with aluminum alloy, so that no deformation will occur during the production of the heavy-duty grid floor, and it is not easy to produce defects and Therefore, compared with the conventional technology, the heavy-duty grille floor of this creation has excellent reliability.

Furthermore, through the design of these perforations, more than 50% of the ventilation rate can be formed, so the ventilation rate can be increased to meet the cleanliness requirement of the semiconductor manufacturing process.

In addition, the height of the main ribs of the rib structure relative to the side of the honeycomb is at least 25 mm to improve the structural strength of the heavy grid floor (for example, it can carry at least 3000 kg of machine equipment), so compared with According to the conventional technology, the heavy-duty grid floor can withstand heavy machine equipment in the semiconductor manufacturing process, so as to avoid the problem that the heavy-duty grid floor is broken during use.

The implementation of this creation is described below through specific specific examples, and those who are familiar with the art can easily understand other advantages and effects of this creation from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this manual are only used to match the content disclosed in the manual, for the understanding and reading of those familiar with this technology, and are not used to limit the implementation of this creation Therefore, it has no technical substantive meaning. Any modification of structure, change of proportional relationship or adjustment of size shall still fall within the scope of this creation without affecting the effect and purpose of this creation. The technical content revealed by the creation must be within the scope covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" quoted in this manual are only for the convenience of description, and are not used to limit the scope of implementation of this creation. The scope, the change or adjustment of its relative relationship, without substantive changes in the technical content, should also be regarded as the scope of the creation that can be implemented.

1A to 1E are schematic diagrams of the heavy-duty grid floor 1 of the present invention. The heavy-duty grid floor 1 of the present embodiment is used for bearing heavier loads, and its bearing load is greater than 3000 kilograms.

The heavy-duty grid floor 1 has a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally cast with aluminum alloy for production The heavy-duty grid floor 1 will not be deformed during operation, and problems such as defects and fractures will not easily occur.

Said top plate 10 has opposite ground side 10a and honeycomb side 10b, and said honeycomb side 10b is respectively provided with said rib structure 1a in longitudinal and transverse direction, so as to form between the plural rib structures 1a in longitudinal and transverse direction. The plurality of recesses S, wherein, Fig. 1C and Fig. 1D only show the longitudinal rib structure 1a, and the horizontal rib structure 1a is arranged in the same manner as the longitudinal rib structure 1a to be symmetrical, so the section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, its length L is 600mm and thickness t0 is 2mm, and a wing plate 1d is formed around the top plate 10 (thickness t1 is 6mm, It is greater than the thickness t0 of the top plate 10), and a foot 1b is formed on the four corners of the heavy grid floor 1, the bottom of which is L-shaped convex (also can be L-shaped concave), the foot 1b are respectively fixed on the four supporting tripods (not shown). For example, the feet 1b are used to adjust the total height H of the heavy grid floor 1 so that multiple heavy grid floors 1 can be located at the same level when spliced.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a plurality of thimble positions 1c (approximately in a square area formed by every four recesses S) on the honeycomb side 10b. The corner of the above) honeycomb structure.

The rib structure 1a is defined in sequence from the edge of the top plate 10 to the middle (or from the left and right side to the middle as shown in Figure 1C and Figure 1D ) with a first rib 11, a second rib 12, and a third rib 13. The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the heights h1~h7 of the first rib 11 to the seventh rib 17 relative to the honeycomb side 10b are at least 25 mm (mm), so the first rib 11 to the seventh rib 17 are used as main ribs, wherein the first to sixth ribs 11 to 16 are left-right symmetrical with the seventh rib 17 as a benchmark (or as shown in Figure 1B symmetrical up and down) so that the distance w between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first ribs 11 are formed at the edge of the top plate 10 to become the side ribs of the heavy grid floor 1, and serve as the frame of the heavy grid floor 1 for fixing the feet 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 57.5mm (equal to the height h2, h7 of the second and seventh ribs 12, 17 relative to the honeycomb side 10b) is greater than the third to sixth The heights h3-h7 of the ribs 13-16 relative to the honeycomb side 10b, and the sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b of the present embodiment and the thickness t0 of the top plate 10 is 59.5mm ( That is, T=h1+t0), and the total height H of the height of the foot seat 1b, the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 is the foot of the heavy grid floor 1 High, and the total height H of the present embodiment is 60mm.

Furthermore, the heights h2-h7 of the second to seventh ribs of the rib structure 1a can be the same or different according to requirements, and the main ribs between the first rib 11 and the recess S in the middle (ie the second to the seventh ribs) The arrangement of the seventh ribs (12~17) is shown in Figure 1C. For example, the height h2 of the first rib 11 and the second rib 12 relative to the honeycomb side 10b is 57.5mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 50mm, and the height h3 of the fourth rib 14 relative to the honeycomb The height h4 of the side 10b is 50mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 50mm, the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 50mm, and the seventh rib 17 is 50mm relative to the honeycomb side The height h7 of 10b is 57.5mm, wherein the two seventh ribs 17 in the longitudinal and transverse directions form a well-shaped rib to divide the heavy grid floor 1 into four areas, and the second ribs adjacent to each area 12. There are 25 sub-regions formed between the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16, each sub-region has a recess S, and another type of well-shaped rib is formed in the center of the well-shaped rib. The concave part R of the aspect. Further, the thickness of the top plate 10 in the recess R can be increased according to requirements or be the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are arranged in the recess R to improve the height of the heavy grid floor 1. The compressive strength in the middle. For example, because the height h2 of the second rib 12 relative to the honeycomb side 10b is equal to the height h1 of the first rib 11 relative to the honeycomb side 10b, when the heavy-duty grid floor 1 is fixed on a stand for an elevated floor, the The four feet of the heavy grid floor 1 are supported by the bottoms of the first rib 11 and the second rib 12 .

In addition, the widths d1-d7 of the ribs can be the same or different according to requirements, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 9.5 mm, the width d2 of the second rib 12 is 7 mm, the width d3 of the third rib 13 is 3.5 mm, the width d4 of the fourth rib 14 is 3.5 mm, and the width d4 of the fifth rib 15 is The width d5 is 3.5 mm, the width d6 of the sixth rib 16 is 3.5 mm, and the width d7 of the seventh rib 17 is 6 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1, d2, and d7 of partial ribs can be adjusted, such as the width d1 of the first rib 11, the second rib 12, and the seventh rib 17 on the opposite sides of the honeycomb side 10b as shown in FIG. 1D , d2, d7 are smaller, wherein, the width d1 of the first rib 11 is 7mm, the width d2 of the second rib 12 is 4mm, and the width d7 of the seventh rib 17 is 4.2mm, which are smaller than those shown in Fig. 1C respectively The widths d1, d2, and d7 of the first rib 11, the second rib 12, and the seventh rib 17 in the middle of the honeycomb side 10b are used to reduce the weight of the heavy grid floor 1, while the third, fourth, and seventh ribs The widths d3, d4, d5, and d6 of the fifth and sixth ribs 13, 14, 15, and 16 remain unchanged.

In addition, the rib structure 1a can add a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than the main rib, as shown in Figure 1C, the height h8 (eg at least 25mm) of the rib structure 1a relative to the honeycomb side 10b is lower than the main rib The heights h1-h7 of the ribs relative to the honeycomb side 20b, and the width d8 thereof are 3mm. For example, the auxiliary ribs 18 are correspondingly formed in each of the recesses S, and extend along a single direction without crossing each other. A single recess S as shown in FIG. 1C is provided with two parallel auxiliary ribs 18 .

Furthermore, the heavy-duty grid floor 1 forms a plurality of perforations 100 connecting the ground side 10a and the honeycomb side 10b on the top plate 10, and is formed by the seventh ribs 17 (two seventh ribs 17 in the vertical and horizontal directions). form the well-shaped ribs) divide the honeycomb side 10b into four areas (four corner areas), and each area forms 25 sub-areas (corresponding to the position of the concave part S), and the outward extension of the well-shaped ribs (cross region), by which ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16) can be separated into another 21 sub-regions (corresponding to the recess R, S position), so that each sub-region has three strip-shaped perforations 100 to form more than 50% of the ventilation.

In this embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R, S. For example, three perforations 100 are formed on each recess R, S, and the three perforations 100 are spaced side by side, and each perforation 100 is separated by the auxiliary ribs 17a, 18; in addition, the first and second ribs 11, The recess S between 12 has only one perforation 100 , ie no auxiliary rib 18 is provided.

Therefore, the design of the perforation 100 on the heavy-duty grid floor 1 can not only increase the ventilation rate, but also help to save materials and reduce weight, and can also increase the bearing weight.

Also, the thickness t0 of the top plate 10 of the heavy-duty grid floor 1 is relatively small, which is beneficial to save material and reduce weight.

In addition, a concave surface is formed between the seventh rib 17 and the first rib 11 to reduce the weight of the heavy grid floor 1 .

To sum up, the heavy-duty grid floor 1 of this creation is mainly because the top plate 10 and the plurality of rib structures 1a are integrally cast with aluminum alloy, and the horizontal ribs and the longitudinal ribs are arranged in the same way to be symmetrical, so as to The heavy-duty grid floor 1 will not be deformed, and it is not easy to cause problems such as defects and fractures. Therefore, compared with the conventional technology, the heavy-duty grid floor of this creation is not only excellent in reliability, but also conducive to improving the yield rate. Save production cost.

Furthermore, through the design of the perforation 100, more than 50% of the ventilation volume can be formed, so the ventilation volume can be increased, which can meet the demand for higher return air volume around the semiconductor process equipment and the shower room, so as to improve the efficiency of the semiconductor process. cleanliness.

Moreover, the heights h1-h7 of the ribs of the rib structure 1a relative to the honeycomb side 10b are all at least 25 mm to enhance the structural strength of the heavy grid floor 1, and the adjacent first ribs 11 and The heights h1 and h2 of the two second ribs 12 relative to the honeycomb side 10b are both 57.5mm, so that the heavy-duty grid floor 1 can be supported on the tripod at the same time, so the heavy-duty grid floor 1 can withstand the relatively high pressure in the semiconductor manufacturing process. Heavy machine equipment is used to avoid the problem that the heavy grid floor 1 is broken during use. Further, the heights h1-h7 and widths d1-d7 of the ribs are adjusted according to the bearing load of the heavy-duty grid floor 1, thereby saving the material and weight of the heavy-duty grid floor 1.

In addition, through the design of the auxiliary ribs 17a, 18, the structural strength of the heavy grid floor 1 can be further improved.

The above-mentioned embodiments are used to illustrate the principle and effect of the invention, but not to limit the invention. Any person familiar with this art can modify the above-mentioned embodiments without departing from the spirit and scope of this creation. Therefore, the scope of protection of the rights of this creation should be listed in the scope of the patent application described later.

1: Heavy grid floor 1a: Rib structure 1b: foot seat 1c: thimble position 1d: wing plate 10:Top plate 10a: Ground side 10b: Honeycomb side 100: perforation 11: First rib 12: Second rib 13: Third rib 14: Fourth rib 15: Fifth rib 16: Sixth rib 17: seventh rib 17a,18: Auxiliary ribs d1~d8: width H: total height h1~h8: height L: Length R, S: concave part T: sum t0, t1: thickness w: interval distance

Fig. 1A is the three-dimensional schematic diagram of the heavy-duty grid floor of this creation.

FIG. 1B is a front plan view of FIG. 1A.

Fig. 1C is a sectional view of Fig. 1B along line C-C.

FIG. 1D is a cross-sectional view of FIG. 1B along line D-D.

FIG. 1E is a three-dimensional schematic diagram of another viewing angle of FIG. 1A .

1: Heavy grid floor

1a: Rib structure

1d: wing plate

10:Top plate

10a: Ground side

10b: Honeycomb side

100: perforation

11: First rib

12: Second rib

13: Third rib

14: Fourth rib

15: Fifth rib

16: Sixth rib

17: seventh rib

17a,18: Auxiliary ribs

d1~d8: width

H: total height

h1~h8: height

R, S: concave part

T: sum

t0, t1: thickness

Claims (12)

A heavy duty grating floor comprising: The top plate has opposite ground side and honeycomb side, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate to form more than 50% of the ventilation rate; and A plurality of rib structures are integrally molded and cast with the top plate using aluminum alloy, and a plurality of recesses are formed on the honeycomb side of the top plate, so that each recess has three perforations, wherein the rib structure is formed by The edge of the top plate defines the first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib in sequence, and the first to seventh ribs are used as the main Ribs whose height relative to the side of the comb is at least 25 mm. The heavy-duty grid floor according to claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb. The heavy-duty grid floor according to claim 1, wherein the first rib is formed on the edge of the top plate to become a side rib of the heavy-duty grid floor, and serves as a frame of the heavy-duty grid floor. The heavy-duty grid floor as claimed in claim 1, wherein the sum of the thicknesses of the first rib relative to the side of the honeycomb and the top plate is 59.5 mm, and the thickness of the top plate is 2 mm. The heavy-duty grid floor as claimed in claim 1, wherein the width of the first rib is 7 to 9.5 mm. The heavy-duty grid floor according to claim 1, wherein the heights of the first to seventh ribs relative to the side of the honeycomb are 50 to 57.5 mm. The heavy-duty grid floor according to Claim 1, wherein the widths of the second to seventh ribs are 3.5 to 7 mm. The heavy-duty grid floor as claimed in claim 1, wherein, the rib structure forms a well-shaped rib with two seventh ribs in the vertical and horizontal directions, so as to divide the heavy-duty grid floor into four regions, the 25 subregions are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the four regions, and each of the subregions has a concave portion, and is placed on the seventh rib. Another concave part is formed in the central part of the well-shaped ribs, and each sub-region has three elongated perforations to form more than 50% of the ventilation, and a wing plate is formed around the top plate , so that the thickness of the wing plate is greater than the thickness of the top plate. The heavy-duty grid floor according to claim 1, wherein the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the main rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that a single recess The system is equipped with two auxiliary ribs. The heavy-duty grid floor according to claim 9, wherein the height of the auxiliary rib relative to the side of the honeycomb is 25 mm, and the width is 3 mm. The heavy-duty grid floor as claimed in claim 1, wherein the widths of the first rib, the second rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the widths of the middle part of the honeycomb side The width of the first rib, the second rib and the seventh rib to reduce the weight of the heavy grid floor. The heavy-duty grid floor according to claim 1, wherein the first rib and the second rib are connected to the four corners of the heavy-duty grid floor to form feet, and the feet are fixed on the supporting legs.

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