TWI806765B - Light grille floor - Google Patents

Abstract

A light grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 56% ventilation. Therefore, the light grille floor can meet the needs of cleanliness of semiconductor process.

Description

Light grid floor

The invention relates to a floor, especially a light grid floor with high ventilation rate.

Known elevated floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, etc., except for semiconductor It can also be used outside the floor of the factory floor of the manufacturing process The ventilated floor in the process area, but its ventilation rate is less than 20%, which cannot meet the demand for ventilation rate.

However, the grid floor used for the gutter cover is currently manufactured by welding, such as the TW536257 patent, which is prone to deformation, defects and fractures during the welding forming process.

Furthermore, the ventilation rate of the existing grid floor is too small, so that the return air volume is not enough, so that the cleanliness requirement of the semiconductor manufacturing process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so when the grid floor carries heavy equipment in the semiconductor manufacturing process, the grid floor is prone to cracking.

On the other hand, the existing grid floor also has the problem of being too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the various problems of the above-mentioned conventional technologies has become a difficult problem to be overcome urgently in the industry at present.

In view of the various deficiencies of the above-mentioned prior art, the present invention provides a light grid floor, which includes: a top plate with opposite ground sides and honeycomb sides, wherein a plurality of holes connecting the ground side and the honeycomb side are formed on the top plate. perforation to form more than 56% of ventilation; and multiple rib structures, which are integrally molded and cast with the top plate using aluminum alloy, and are set on the honeycomb side of the top plate to form multiple recesses, so that each There are two perforations in the concave portion, wherein, the rib structure is defined in sequence from the edge of the top plate to the middle with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and The seventh rib, and the height of the first rib, the fifth rib, and the seventh rib relative to the side of the hive is at least 25 mm to serve as the main rib, and the second rib, the third rib, the The height of the fourth rib and the sixth rib relative to the side of the honeycomb is lower than 25 mm to serve as middle ribs.

In the aforementioned lightweight grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb.

In the aforementioned lightweight grid floor, the first ribs are formed on the edge of the top plate to become the side ribs of the lightweight grid floor, and serve as the frame of the lightweight grid floor.

In the aforementioned lightweight grid floor, the sum of the thicknesses of the first rib relative to the honeycomb side and the top plate is 43 mm, and the thickness of the top plate is 3 mm.

In the aforementioned light grid floor, the width of the first rib is 3 to 8 mm.

In the aforementioned light grid floor, the height of the fifth rib and the seventh rib relative to the side of the honeycomb is 30 to 34 mm.

In the aforementioned light grid floor, the fifth rib and the seventh rib have a width of 3 to 4.8 mm.

In the aforementioned light grid floor, the height of the second rib, the third rib, the fourth rib and the sixth rib relative to the side of the honeycomb is 16 to 24 mm.

In the aforementioned light grid floor, the widths of the second rib, the third rib, the fourth rib and the sixth rib are all 3 mm.

In the above-mentioned light grid floor, the rib structure forms a well-shaped rib with two seventh ribs in the longitudinal and transverse directions, so as to divide the light grid floor into four areas, and the adjacent four areas 25 subregions are formed between the second rib, third rib, fourth rib, fifth rib and sixth rib, each of which has a concave part, and the well-shaped rib formed on the seventh rib Another concave part is formed in the central part, and each sub-area has two elongated perforations to form a ventilation rate of more than 56%, and a wing plate is formed around the top plate, so that the wing plate The thickness is greater than the thickness of the top plate.

In the aforementioned lightweight grid floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and each auxiliary rib is correspondingly formed in each of the recesses, so that a single auxiliary rib is arranged in a single recess . For example, the height of the auxiliary rib relative to the side of the honeycomb is 10 to 11 mm, and the width is 3.2 mm.

In the aforementioned lightweight grid floor, the widths of the first rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at the middle part of the honeycomb side, To reduce the weight of the light grid floor.

In the aforementioned light grid floor, the first rib is formed with feet on the four corners of the light grid floor, and the feet are fixed on the supporting legs.

It can be seen from the above that in the light grid floor of the present invention, the top plate and the plurality of rib structures are integrally casted with aluminum alloy, so that no deformation will occur during the production of the light grid floor, and defects and defects are less likely to occur. Therefore, compared with the conventional technology, the reliability of the lightweight grid floor of the present invention is excellent.

Furthermore, through the design of these perforations, more than 56% of the ventilation rate can be formed, so the ventilation rate can be increased to meet the cleanliness requirements of the semiconductor manufacturing process.

In addition, the height of the main ribs of the rib structure relative to the side of the honeycomb is at least 25 mm to enhance the structural strength of the light grid floor, so compared with the conventional technology, the light grid floor can withstand semiconductor manufacturing processes Medium and heavy machine equipment to avoid the problem of cracking of the light grid floor during use.

The implementation of the present invention is described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for the understanding and reading of those familiar with this technology, and are not used to limit the implementation of the present invention Therefore, it has no technical substantive meaning. Any modification of structure, change of proportional relationship or adjustment of size shall still fall within the scope of this invention without affecting the effect and purpose of the present invention. The technical content disclosed by the invention must be within the scope covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the implementation of the present invention. Changes or adjustments in the scope, and their relative relationships, without substantial changes in the technical content, should also be regarded as the scope of the present invention that can be implemented.

1A to 1E are schematic diagrams of the lightweight grid floor 1 of the present invention. The light grid floor 1 of the present embodiment is used for carrying lighter loads, and its carrying load is about 500 kilograms.

The light grid floor 1 has a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally cast with an aluminum alloy for manufacturing The light grid floor 1 will not be deformed during operation, and problems such as defects and fractures will not easily occur.

Said top plate 10 has opposite ground side 10a and honeycomb side 10b, and said honeycomb side 10b is respectively provided with a plurality of said rib structures 1a in longitudinal and transverse directions, so as to form between the longitudinal and transverse rib structures 1a The plurality of recesses S, wherein, Fig. 1C and Fig. 1D only show the longitudinal rib structure 1a, and the horizontal rib structure 1a is arranged in the same manner as the longitudinal rib structure 1a to be symmetrical, so the section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, its length L is 600mm and thickness t0 is 3mm, and a wing plate 1d is formed around the top plate 10 (its thickness t1 is 4.5mm , is greater than the thickness t0 of the top plate 10), and a foot seat 1b is formed on the four corners of the top plate 10, the bottom of which is L-shaped concave (also can be L-shaped convex), the light grid The base 1b of the floor 1 is fixed on the support tripod (not shown). For example, the foot 1b is used to adjust the overall height of the light grid floor 1 so that multiple light grid floors 1 can be located at the same level when spliced.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a plurality of thimble positions 1c (approximately in a square area formed by every four recesses S) on the honeycomb side 10b. The corner of the above) honeycomb structure.

The rib structure 1a is defined in sequence from the edge of the top plate 10 to the middle (or from the left and right side to the middle as shown in Figure 1C and Figure 1D ) with a first rib 11, a second rib 12, and a third rib 13. The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the height h1, h5 of the first, fifth and seventh ribs 11, 15, 17 relative to the honeycomb side 10b, h7 is at least 25 millimeters (mm), and the height h2, h3, h4, h6 of the second, third, fourth and sixth ribs 12, 13, 14, 16 relative to the honeycomb side 10b is less than 25 mm, so the first, fifth and seventh ribs 11, 15, 17 are the main ribs, and the second, third, fourth and sixth ribs 12, 13, 14, 16 are the middle ribs , wherein, the first to sixth ribs 11-16 are symmetrically distributed on the basis of the seventh rib 17 (or symmetrical up and down as shown in Figure 1B), so that the second rib 12, the third rib 13, The distance w between the fourth rib 14 , the fifth rib 15 , the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first ribs 11 are formed on the edge of the top plate 10 to become the side ribs of the light grid floor 1, and serve as the frame of the light grid floor 1 for fixing the foot 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 40mm, which is greater than the height h2-h7 of the second to seventh ribs 12-17 relative to the honeycomb side 10b, and the The sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 is 43mm (that is, T=h1+t0), and the foot 1b is flush with the end surface of the first rib 11 , make the total height of the height of the base 1b, the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 (ie the foot height of the light grid floor 1) be 43mm.

Furthermore, the heights h2-h7 of the second to seventh ribs 12-17 of the rib structure 1a can be the same or different according to requirements, and the second rib 11 between the first rib 11 and the recess R, S in the middle The arrangement to the seventh ribs 12-17 is shown in Figure 1C. For example, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 30mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 34mm, the height h2 of the second rib 12 relative to the honeycomb side 10b is 16mm, The height h3 of the third rib 13 relative to the honeycomb side 10b is 24mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 16mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 16mm, wherein , the two seventh ribs 17 in the longitudinal and transverse directions form a well-shaped rib, so that the light grid floor 1 is divided into four areas, and the second rib 12, the third rib 13, and the fourth rib adjacent to each area Between the rib 14, the fifth rib 15 and the sixth rib 16, 25 sub-regions are formed, each sub-region has a concave portion S, and another type of concave portion R is formed at the center of the well-shaped rib. Further, the thickness of the top plate 10 in the recess R can be increased according to requirements or be the same as the thickness t0 of the top plate 10, and an auxiliary rib 17a is arranged in the recess R to improve the height of the light grid floor 1 in the middle. compressive strength. For example, because the height h2 of the second rib 12 relative to the honeycomb side 10b is lower than the height h1 of the first rib 11 relative to the honeycomb side 10b, when the lightweight grid floor 1 is fixed on a stand for an elevated floor, The four feet of the light grid floor 1 are supported by the bottom of the first rib 11 .

Moreover, the widths d1-d7 of the ribs can be the same or different according to requirements, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7 to 8 mm (for example, 7.5 mm), the width d2 of the second rib 12 is 3 mm, the width d3 of the third rib 13 is 3 mm, and the width d4 of the fourth rib 14 is 3 mm. The width d5 of the fifth rib 15 is 3 mm, the width d6 of the sixth rib 16 is 3 mm, and the width d7 of the seventh rib 17 is 4.8 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1, d5, and d7 of the local ribs can be adjusted. The widths d1, d7 of the first rib 11 and the seventh rib 17 on the opposite sides of the honeycomb side 10b shown in FIG. 1D are smaller, wherein The width d1 of the first rib 11 is 3.5 mm, and the width d7 of the seventh rib 17 is 4.26 mm, which are respectively smaller than the widths of the first rib 11 and the seventh rib 17 in the middle of the honeycomb side 10b shown in FIG. 1C d1, d7, to reduce the weight of the light grid floor 1; or, the width d5 of the fifth rib 15 is larger, and the width d5 of the fifth rib 15 is 3.15mm, which is slightly larger than the honeycomb side 10b shown in Figure 1C The width d5 of the fifth rib 15 in the middle part. The widths d2, d3, d4, d6 of the second, third, fourth and sixth ribs 12, 13, 14, 16 remain unchanged.

In addition, the rib structure 1a can add a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than other ribs, as shown in Figure 1C. The height h2, h3, h4, h6 of the middle rib relative to the honeycomb side 10b, and its width d8 is 3.2 mm. For example, the auxiliary ribs 17a, 18 are correspondingly formed in each of the recesses R, S, and extend along a single direction without crossing each other. A single auxiliary rib 17a, 18 is configured in a single recess R, S as shown in FIG. 1C. Further, the height h8 of the auxiliary rib 18 in the concave portion S can be adjusted according to requirements, as shown in FIG. 1D to 11 mm.

Furthermore, the light grid floor 1 forms a plurality of perforations 100 connecting the ground side 10a and the honeycomb side 10b on the top plate 10, and is formed by the seventh ribs 17 (two seventh ribs 17 in the vertical and horizontal directions). form the well-shaped ribs) divide the honeycomb side 10b into four areas (four corner areas), and each area forms 25 sub-areas (corresponding to the position of the concave part S), and the outward extension of the well-shaped ribs (cross region), by which ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16) can be separated into another 21 sub-regions (corresponding to the recess R, S position), so that each sub-region has two elongated perforations 100 with a larger hollow area to form a ventilation rate of more than 56%.

In this embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R, S. For example, two through holes 100 are formed on each recess R, S, and the two through holes 100 are spaced and side by side, and each through hole 100 is separated by the auxiliary rib 17 a, 18 . In addition, the recess S between the first and second ribs 11 , 12 has only one through hole 100 , that is, no auxiliary rib 18 is provided.

Therefore, the design of the perforation 100 on the lightweight grid floor 1 can not only increase the ventilation volume, but also help to save materials and reduce weight, and can also increase the bearing weight.

Also, the thickness t0 of the top plate 10 of the light grid floor 1 is small, and the heights h2, h3, h4, and h6 of most of the rib structure 1a are also small, that is, the middle ribs (second, third, The heights h2, h3, h4, h6 of the fourth and sixth ribs (12, 13, 14, 16) are smaller than the heights h1, h5, h7 of the main ribs (the first rib 11, the fifth rib 15 and the seventh rib 17) , in order to save material and reduce weight.

To sum up, the lightweight grid floor 1 of the present invention is mainly because the top plate 10 and the plurality of rib structures 1a are integrally cast with aluminum alloy, and the horizontal ribs and the longitudinal ribs are arranged in the same way to be symmetrical, so as to The lightweight grid floor 1 will not be deformed, and it is not easy to produce defects and fractures. Therefore, compared with the conventional technology, the light grid floor 1 of the present invention not only has excellent reliability, but also helps to improve the yield And save production cost.

Furthermore, through the design of the perforation 100, more than 56% of the ventilation volume can be formed, so the ventilation volume can be increased, which can meet the demand for higher return air volume around the semiconductor processing equipment and the shower room, so as to improve the efficiency of the semiconductor manufacturing process. cleanliness.

Moreover, the heights h1, h5, and h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b are all at least 25 mm to enhance the structural strength of the light grid floor 1, so the light grid floor 1 It can withstand heavy machine equipment in the semiconductor manufacturing process, so as to avoid the problem that the light grid floor 1 breaks during use. Further, the heights h1-h7 and widths d1-d7 of the ribs are adjusted according to the bearing load of the light grid floor 1, thereby saving the material and weight of the light grid floor 1.

In addition, through the design of the auxiliary ribs 17a, 18, the structural strength of the light grid floor 1 can be further improved.

The above-mentioned embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Any person skilled in the art can modify the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of the patent application described later.

1: Light grid floor 1a: Rib structure 1b: foot seat 1c: thimble position 1d: wing plate 10:Top plate 10a: Ground side 10b: Honeycomb side 100: perforation 11: First rib 12: Second rib 13: Third rib 14: Fourth rib 15: Fifth rib 16: Sixth rib 17: seventh rib 17a,18: Auxiliary ribs d1~d8: width h0~h8: height L: Length R, S: concave part T: sum t0, t1: thickness w: interval distance

Fig. 1A is a three-dimensional schematic view of the lightweight grid floor of the present invention.

FIG. 1B is a front plan view of FIG. 1A.

Fig. 1C is a sectional view of Fig. 1B along line C-C.

FIG. 1D is a cross-sectional view of FIG. 1B along line D-D.

FIG. 1E is a three-dimensional schematic diagram of another viewing angle of FIG. 1A .

1: Light grid floor

1a: Rib structure

1b: foot seat

1d: wing plate

10:Top plate

10a: Ground side

10b: Honeycomb side

100: perforation

11: First rib

12: Second rib

13: Third rib

14: Fourth rib

15: Fifth rib

16: Sixth rib

17: seventh rib

17a,18: Auxiliary ribs

h0~h8: height

d1~d8: width

T: sum

t0, t1: thickness

R, S: concave part

Claims (12)

A light grid floor, comprising: The top plate has opposite ground side and honeycomb side, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate to form more than 56% of the ventilation rate; and A plurality of rib structures are integrally cast with the top plate using aluminum alloy, and a plurality of recesses are formed on the honeycomb side of the top plate, so that each recess has two perforations, wherein the rib structure is The first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib are defined sequentially from the edge of the top plate to the middle, and the first rib, the fifth rib and the height of the seventh rib relative to the side of the hive is at least 25 mm as the main rib, and the height of the second rib, the third rib, the fourth rib and the sixth rib relative to the side of the hive The height is less than 25 mm for the middle rib. The lightweight grid floor according to claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb. The lightweight grid floor according to claim 1, wherein the first rib is formed on the edge of the top plate to become the side rib of the lightweight grid floor, and serves as a frame of the lightweight grid floor. The light grid floor according to claim 1, wherein the sum of the height of the first rib relative to the side of the honeycomb and the thickness of the top plate is 43 mm, and the thickness of the top plate is 3 mm. The lightweight grid floor according to claim 1, wherein the width of the first rib is 3 to 8 mm. The light grid floor as described in claim 1, wherein, the height of the fifth rib and the seventh rib relative to the side of the honeycomb is 30 to 34 mm, and the height of the fifth rib and the seventh rib relative to the side of the honeycomb The width is 3 to 4.8 mm. The light grid floor according to claim 1, wherein the height of the second rib, the third rib, the fourth rib and the sixth rib relative to the side of the honeycomb is 16 to 24 mm, the second rib, The width of the third rib, the fourth rib and the sixth rib is 3mm. The light grid floor as claimed in claim 1, wherein, the rib structure forms a well-shaped rib with two seventh ribs in the longitudinal and transverse directions, so as to divide the light grid floor into four regions, the 25 subregions are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the four regions, and each of the subregions has a concave portion, and is placed on the seventh rib. Another concave part is formed in the central part of the well-shaped ribs, and each sub-region has two elongated perforations to form a ventilation rate of more than 56%, and a wing plate is formed around the top plate , so that the thickness of the wing plate is greater than the thickness of the top plate. The light grid floor according to claim 1, wherein the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that a single recess A single auxiliary rib is configured. The light grid floor according to claim 9, wherein the height of the auxiliary rib relative to the side of the honeycomb is 10 to 11 mm, and the width is 3.2 mm. The lightweight grid floor according to claim 1, wherein the widths of the first rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the first rib and the seventh rib at the middle of the honeycomb side The width of the seventh rib to reduce the weight of the light grid floor. The lightweight grid floor according to Claim 1, wherein the first ribs are connected to the four corners of the lightweight grid floor to form feet, and the feet are fixed on the supporting legs.

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