CN218149481U - Light grid floor - Google Patents

Abstract

A light grid floor comprises a top plate and a rib structure, wherein the rib structure and the top plate are integrally cast by aluminum alloy, a plurality of through holes are formed in the top plate to form ventilation of more than 50%, and therefore the requirement of semiconductor process cleanliness can be met.

Description

Light grid floor

Technical Field

The utility model relates to a floor especially relates to a light-duty grid floor with high ventilation rate.

Background

The existing elevated floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent, TWM596253 patent and the like, can be used for the ventilation floors of process areas besides the factory floor of semiconductor process, but the ventilation rate is less than twenty percent, and the requirement of the ventilation rate cannot be met.

However, the grid floor for the gutter cover is manufactured by welding, such as the TW536257 patent, which is prone to deformation, defects and fracture due to the welding process.

Moreover, the ventilation quantity of the existing grid floor is too small, so that the air return quantity is insufficient, and the requirement of the cleanliness of a semiconductor process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so that the grid floor is easily broken when heavy equipment in a semiconductor process is carried on the grid floor.

On the other hand, the conventional grid floor also has the problem of overweight, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the above problems in the prior art has become a difficult problem to be overcome in the present industry.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned deficiencies of the prior art, the present invention provides a light-weight grid floor that at least partially solves the problems of the prior art.

The utility model discloses a light-duty grid floor includes: an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate has a plurality of through holes formed therein to communicate the ground side with the honeycomb side, thereby forming a ventilation amount of 50% or more; and a plurality of rib structures which are integrally cast with the antenna plate by using an aluminum alloy and are arranged on the honeycomb side of the antenna plate to form a plurality of recesses, so that each recess is provided with three through holes, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna plate to the middle, the height of the first rib, the second rib and the seventh rib relative to the honeycomb side is at least 25 mm to serve as a main rib, and the height of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side is lower than 25 mm to serve as a middle rib.

In the light-weight grid floor, the plurality of concave portions are arranged in an array to form a honeycomb structure on the honeycomb side.

In the light-weight grating floor, the first rib is formed at the edge of the ceiling to become the edge rib of the light-weight grating floor, so as to serve as the frame of the light-weight grating floor.

In the light-weight grating floor, the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 50mm, and the thickness of the top plate is 2 mm.

In the aforementioned light-weight grating floor, the width of the first rib is 7 to 8 mm.

In the aforementioned light grille floor, the height of the second rib and the seventh rib with respect to the honeycomb side is 48 mm.

In the light-weight grating floor, the width of the second rib and the seventh rib is 3.12 to 4.3mm.

In the aforementioned light grille floor, the height of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side is 12 to 22 mm.

In the light weight grill floor, the width of the third rib, the fourth rib, the fifth rib and the sixth rib is 3.5 to 3.8 mm.

In the light grille floor, the rib structure forms a # -shaped rib by two seventh ribs in the longitudinal direction and the transverse direction so as to divide the light grille floor into four regions, 25 sub-regions are formed among the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region is provided with a concave portion, another concave portion is formed at the central part of the # -shaped rib formed by the seventh rib, each sub-region is provided with three strip-shaped through holes so as to form ventilation quantity of more than 50%, and a wing plate is formed around the ceiling plate, so that the thickness of the wing plate is larger than that of the ceiling plate.

In the aforementioned light grille floor, the rib structure further includes a plurality of auxiliary ribs having a height lower than that of the main rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that two auxiliary ribs are disposed in a single recess. For example, the height of the auxiliary rib with respect to the honeycomb side is 8mm, and the width is 3mm.

In the aforementioned light-weight grille floor, the widths of the first rib and the seventh rib at the two opposite sides of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at the middle of the honeycomb side, so as to reduce the weight of the light-weight grille floor.

In the light grille floor, the first ribs form foot seats at four corners of the light grille floor, and the foot seats are fixed on the supporting foot frames.

Therefore, the utility model discloses an in the light-duty grid floor, mainly adopt aluminum alloy integrated into one piece casting through this day board and these a plurality of rib structures to can not produce the deformation when making this light-duty grid floor, and be difficult for producing defect and fracture scheduling problem, so compare in prior art, the utility model discloses a reliability on light-duty grid floor is splendid.

Furthermore, through the design of a plurality of through holes, the ventilation volume is more than 50%, so that the ventilation volume can be increased to meet the requirement of the cleanliness of the semiconductor process.

In addition, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm to improve the structural strength of the light-weight grating floor, so compared with the prior art, the light-weight grating floor can bear heavier equipment in a semiconductor process to avoid the problem of cracking of the light-weight grating floor in use.

Drawings

Fig. 1A is a schematic perspective view of the light-weight grille floor of the present invention.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view taken along line C-C of FIG. 1B.

FIG. 1D is a cross-sectional view taken along line D-D of FIG. 1B.

Fig. 1E is a perspective view of fig. 1A from another viewing angle.

The reference numbers are as follows:

1. light grid floor

1a Rib Structure

1b foot stool

1c thimble position

1d wing plate

10. Top board

10a ground side

10b Honeycomb side

100. Perforation

11. First rib

12. Second rib

13. The third rib

14. The fourth rib

15. Fifth Rib

16. Sixth Rib

17. Seventh Rib

17a,18 auxiliary Ribs

Width of d1 to d8

h 1-h 8 height

Length of L

R, S concave part

Sum of T

t0, t1 thickness

w separation distance

Detailed Description

The following description of the embodiments of the present invention is provided by way of specific examples, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure of the present invention.

It should be understood that the structure, proportion, size, etc. shown in the attached drawings are only used for matching with the content disclosed in the specification, so as to be understood and read by those skilled in the art, and are not used for limiting the limit conditions that the present invention can be implemented, so that the present invention has no technical essential meaning, and any modification of the structure, change of the proportion relation or adjustment of the size should still fall within the scope that the technical content disclosed in the present invention can cover without affecting the function that the present invention can produce and the purpose that the present invention can achieve. Meanwhile, the terms "upper", "lower", "left", "right" and "one" used in the present specification are for convenience of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the modifications may be changed or adjusted without substantial technical changes.

Fig. 1A to 1E are schematic views of a light-weight grating floor 1 according to the present invention. The light-weight grid floor 1 of the present embodiment is used to carry a light load, which is about 500 kg.

The light grid floor 1 is provided with a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the rib structures 1a are integrally cast by aluminum alloy, the light grid floor 1 cannot be deformed and is not easy to generate defects, fracture and other problems when being manufactured.

The antenna panel 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with a plurality of rib structures 1a in the longitudinal and transverse directions, respectively, to form a plurality of recesses S between the longitudinal and transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a are arranged in the same manner as the longitudinal rib structures 1a to be symmetrical, so that the cross-section of the transverse rib structures 1a is omitted.

In the present embodiment, the top plate 10 is substantially rectangular, such as a square plate, the length L of the square plate is 600mm and the thickness t0 of the square plate is 2mm, a wing plate 1d (the thickness t1 of the wing plate is 6mm, which is greater than the thickness t0 of the top plate 10) is formed around the top plate 10, and foot seats 1b are formed on four corners of the light grille floor 1, the bottom of the light grille floor 1 is in a mouth shape (the mouth shape may be concave or convex), and the foot seats 1b are fixed on support foot seats (not shown). For example, the foot seat 1b is used to adjust the total height H of the light-weight grating floor 1 so that a plurality of light-weight grating floors 1 are positioned at the same level when they are spliced.

Furthermore, the ground side 10a is a flat surface and a plurality of recesses S are arranged in an array to form a honeycomb structure having a plurality of pin locations 1c (approximately at the corners of a square area consisting of every four recesses S) on the honeycomb side 10 b.

The rib structure 1a is defined by a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17 in sequence from the edge of the top plate 10 to the middle (or in the left-right lateral direction as shown in fig. 1C and 1D), wherein the heights h1, h2 and h7 of the first, second and seventh ribs 11,12 and 17 relative to the honeycomb side 10B are at least 25 mm, and the heights h3, h4, h5 and h6 of the third, fourth, fifth and sixth ribs 13,14,15 and 16 relative to the honeycomb side 10B are lower than 25 mm, so that the first, second and seventh ribs 11,12 and 17 serve as main ribs, and the third, fourth, fifth and sixth ribs 13,14,15 and 16 serve as middle ribs, wherein the first to sixth ribs 11 to 16 are arranged symmetrically with the seventh rib 17 as a left-right reference rib (or a left-right reference rib 17), and the fourth rib 14, and sixth ribs 13, 15 and 16 are arranged symmetrically with the distance w between the fifth ribs 13, 12 and the sixth ribs 13 w as vertical reference ribs, 48, and the sixth ribs 13 w, and 16.

In the present embodiment, the first rib 11 is formed at the edge of the ceiling 10 to become the side rib of the light grille floor 1, so as to be the frame of the light grille floor 1 for fixing the foot seat 1b. For example, the height H1 of the first rib 11 relative to the honeycomb side 10b is 48mm, and the height of the first rib 11 is equal to the height H3-H6 of the third to sixth ribs 13-16 relative to the honeycomb side 10b, which are all greater than the heights H3-H6 of the second and seventh ribs 12,17, and the sum T of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 of the present embodiment is 50mm (i.e., T = H1+ T0), and the base 1b is flush with the end surface of the first rib 11, so that the total height H of the height of the base 1b, the height H1 of the first rib 11 relative to the honeycomb side 10b, and the thickness T0 of the antenna board 10 (i.e., the height of the light weight grille floor 1) is 50 mm.

Furthermore, the heights h 2-h 7 of the second to seventh ribs 12-17 of the rib structure 1a may be the same or different according to the requirement, and the arrangement of the second to seventh ribs 12-17 between the first rib 11 and the middle recesses R, S is shown in fig. 1C. For example, the height h2 of the second ribs 12 with respect to the cell side 10b is 48mm, the height h7 of the seventh ribs 17 with respect to the cell side 10b is 48mm, the height h3 of the third ribs 13 with respect to the cell side 10b is 22mm, the height h4 of the fourth ribs 14 with respect to the cell side 10b is 12mm, the height h5 of the fifth ribs 15 with respect to the cell side 10b is 22mm, and the height h6 of the sixth ribs 16 with respect to the cell side 10b is 12mm, wherein two seventh ribs 17 in the longitudinal and transverse directions form a grid pattern to divide the lightweight grid floor 1 into four regions, 25 regions are formed between the adjacent second ribs 12, third ribs 13, fourth ribs 14, fifth ribs 15, and sixth ribs 16 in each region, each region has a recess S, and a recess R of another embodiment is formed in the central portion of the grid pattern. Further, the thickness of the top plate 10 in the recess R may be increased as required or the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are disposed in the recess R to improve the compressive strength of the light-weight grating floor 1 at the middle. It should be understood that the heights h 3-h 6 of the third to sixth ribs 13-16 (middle ribs) are regularly designed. For example, since the height h2 of the second rib 12 with respect to the honeycomb side 10b is lower than the height h1 of the first rib 11 with respect to the honeycomb side 10b, when the light-weight grating floor 1 is fixed to a foot rest for an elevated floor, the four feet of the light-weight grating floor 1 are supported by the bottom of the first rib 11

In addition, the widths d 1-d 7 of the ribs may be the same or different as required, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7 to 8mm (e.g., 7.5 mm), the width d2 of the second rib 12 is 3.8mm, the width d3 of the third rib 13 is 3.8mm, the width d4 of the fourth rib 14 is 3.5mm, the width d5 of the fifth rib 15 is 3.8mm, the width d6 of the sixth rib 16 is 3.5mm, and the width d7 of the seventh rib 17 is 4.3mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions of its extension as required. For example, the widths D1, D2, D7 of the local ribs can be adjusted, and the widths D1, D2, D7 of the first, second and seventh ribs 11,12,17 at two opposite sides of the honeycomb side 10b shown in fig. 1D are smaller, wherein the width D1 of the first rib 11 is 3.8mm, the width D2 of the second rib 12 is 3.12mm and the width D7 of the seventh rib 17 is 3.6mm, which are respectively smaller than the widths D1, D2, D7 of the first, second and seventh ribs 11,12,17 at the middle portion of the honeycomb side 10b shown in fig. 1C, so as to reduce the weight of the light weight grating floor 1, and the widths D3, D4, D5, D6 of the third, fourth, fifth and sixth ribs 13,14,15,16 are not changed.

In addition, a plurality of auxiliary ribs 17a and 18 with a volume much smaller than that of other ribs may be added to the rib structure 1a as required, as shown in fig. 1C, a height h8 (e.g., 8 mm) of the rib structure relative to the honeycomb side 10b is lower than heights h3, h4, h5, and h6 of the middle rib relative to the honeycomb side 10b, and a width d8 of the rib structure is 3mm. For example, a plurality of auxiliary ribs 17a,18 are formed in each of the recesses R, S to extend in a single direction without being staggered with respect to each other, and two parallel auxiliary ribs 17a,18 are arranged in a single recess R, S as shown in fig. 1C.

Furthermore, the light-weight grid floor 1 forms a plurality of through holes 100 on the ceiling 10 to connect the ground side 10a and the honeycomb side 10b, and the seventh ribs 17 (the two vertical and horizontal seventh ribs 17 form a cross-shaped rib) divide the honeycomb side 10b into four regions (four corner regions), each region further forms 25 sub-regions (corresponding to the recess S position), and the cross-shaped ribs extend outward (cross region), so that 21 other sub-regions (corresponding to the recess R and S positions) can be separated by a plurality of ribs (the second ribs 12, the third ribs 13, the fourth ribs 14, the fifth ribs 15 and the sixth ribs 16) to form three elongated through holes 100 for each sub-region, thereby forming a ventilation volume of 50% or more.

In the present embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R and S. For example, three through holes 100 are formed in each of the recesses R, S, and the three through holes 100 are spaced side by side, and the auxiliary ribs 17a,18 separate the through holes 100; in addition, the recess S between the first and second ribs 11,12 has only one through-hole 100, i.e. no auxiliary rib 18 is provided.

Therefore, the light-weight grid floor 1 not only can increase ventilation amount, but also is beneficial to saving materials and reducing weight and can increase bearing weight by the design of the through holes 100.

In addition, the thickness t0 of the ceiling 10 of the light-weight grille floor 1 is smaller, and the heights h3, h4, h5, h6 of most of the rib structures 1a are also smaller, i.e., the heights h3, h4, h5, h6 of the middle ribs (third, fourth, fifth and sixth ribs 13,14,15, 16) are smaller than the heights h1, h2, h7 of the main ribs (first rib 11, second rib 12 and seventh rib 17), so as to save materials and reduce weight.

To sum up, the utility model discloses a light-duty grid floor 1 mainly adopts aluminum alloy integrated into one piece casting through this day board 10 and these a plurality of rib structure 1a, and horizontal rib is the same and be symmetrical formula with the arrangement of vertical rib to can not produce the deformation when making this light-duty grid floor 1, and be difficult for producing defect and fracture scheduling problem, so compare in prior art, the utility model discloses a light-duty grid floor 1 not only the reliability is splendid, and is favorable to promoting the yield and saves the cost of manufacture.

Furthermore, the design of the through hole 100 can form more than 50% of ventilation volume, thereby increasing the ventilation volume, meeting the requirement of higher air return volume around the semiconductor process equipment and in a shower room, and improving the cleanliness of the semiconductor process.

In addition, the heights h1, h2, h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b are at least 25 mm, so as to improve the structural strength of the light-weight grating floor 1, and therefore the light-weight grating floor 1 can bear heavier equipment in a semiconductor process, so that the problem that the light-weight grating floor 1 is broken in use is avoided. Furthermore, the height h 1-h 7 and the width d 1-d 7 of the ribs can be adjusted according to the load of the light grille floor 1, thereby saving the material of the light grille floor 1 and reducing the weight.

In addition, the structural strength of the light-weight grid floor 1 can be further improved by the design of the auxiliary ribs 17a,18.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Those skilled in the art can modify the above embodiments without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be as set forth in the claims.

Claims (12)

1. A lightweight grid flooring, comprising:

an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to provide a ventilation amount of 50% or more; and

a plurality of rib structures, which are integrally cast with the antenna plate by aluminum alloy, and are disposed on the honeycomb side of the antenna plate to form a plurality of recesses, so that each recess has three through holes therein, wherein the rib structures are sequentially defined by a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna plate to the middle, the height of the first rib, the second rib and the seventh rib relative to the honeycomb side is at least 25 mm to serve as a main rib, and the height of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side is less than 25 mm to serve as a middle rib.

2. The light-weight grid floor of claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

3. The light-weight grill floor of claim 1, wherein the first rib is formed at the edge of the ceiling to become a side rib of the light-weight grill floor, serving as a rim of the light-weight grill floor.

4. The light-weight grid floor of claim 1, wherein the sum of the height of the first rib with respect to the honeycomb side and the thickness of the top plate is 50mm, and the thickness of the top plate is 2 mm.

5. The light-weight grid floor of claim 1, wherein the width of the first ribs is 7 to 8 mm.

6. The light-weight grid floor of claim 1, wherein the height of the second and seventh ribs relative to the honeycomb side is 48mm, and the width of the second and seventh ribs is 3.12 to 4.3mm.

7. The light-weight grid floor of claim 1, wherein the third, fourth, fifth and sixth ribs have a height of 12 to 22mm relative to the honeycomb side, and the third, fourth, fifth and sixth ribs have a width of 3.5 to 3.8 mm.

8. The light weight grill floor of claim 1, wherein the rib structure forms a # -shaped rib with two seventh ribs in longitudinal and transverse directions to divide the light weight grill floor into four regions, 25 sub-regions are formed between adjacent second, third, fourth, fifth and sixth ribs among the four regions, each of the sub-regions has a recess, and another recess is formed at a central portion of the # -shaped rib formed by the seventh rib, and each of the sub-regions has three elongated through holes to form a ventilation amount of more than 50%, and a wing plate is formed around the ceiling plate so that a thickness of the wing plate is greater than a thickness of the ceiling plate.

9. The light-weight grid floor of claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than the main rib, and each of the auxiliary ribs is formed in each of the recesses, so that two auxiliary ribs are disposed in a single recess.

10. The light-weight grid floor of claim 9, wherein the auxiliary ribs have a height of 8mm and a width of 3mm with respect to the honeycomb side.

11. The light-weight grid floor of claim 1, wherein the widths of the first and seventh ribs at opposite lateral portions of the honeycomb side are respectively smaller than the widths of the first and seventh ribs at the middle portion of the honeycomb side, so as to reduce the weight of the light-weight grid floor.

12. The light-weight grating floor of claim 1, wherein the first ribs are formed with foot seats at four corners of the light-weight grating floor, the foot seats being fixed to supporting legs.

Images