CN218149482U

CN218149482U - Light grid floor

Info

Publication number: CN218149482U
Application number: CN202222423701.9U
Authority: CN
Inventors: 黄建德
Original assignee: Shanghai Huiya Aluminum Alloy Products Co ltd
Current assignee: Shanghai Huiya Aluminum Alloy Products Co ltd
Priority date: 2022-09-13
Filing date: 2022-09-13
Publication date: 2022-12-27
Anticipated expiration: 2032-09-13

Abstract

A light grid floor comprises a top plate and a rib structure, wherein the rib structure and the top plate are integrally cast by aluminum alloy, a plurality of through holes are formed in the top plate to form ventilation of more than 50%, and therefore the requirement of semiconductor process cleanliness can be met.

Description

Light grid floor

Technical Field

The utility model relates to a floor especially relates to a light-duty grid floor with high ventilation rate.

Background

The existing elevated floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent, TWM596253 patent and the like, can be used for the ventilation floors of process areas besides the factory floor of semiconductor process, but the ventilation rate is less than twenty percent, and the requirement of the ventilation rate cannot be met.

However, the grid floor for the gutter cover is manufactured by welding, for example, the TW536257 patent is easy to deform, and is easy to have defects and break in the welding process.

Moreover, the ventilation quantity of the existing grid floor is too small, so that the air return quantity is insufficient, and the requirement of the cleanliness of a semiconductor process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so that when heavy equipment in a semiconductor process is carried on the grid floor, the grid floor is easily broken.

On the other hand, the conventional grid floor also has the problem of being too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the above problems in the prior art has become a difficult problem to be overcome in the present industry.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned shortcomings of the prior art, the present invention provides a light-weight grid floor that at least partially solves the problems of the prior art.

The utility model discloses a light-duty grid floor, include: an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to provide a ventilation amount of 50% or more; and a plurality of rib structures disposed on the honeycomb side of the antenna board to form a plurality of recesses, each of the recesses having three through holes, wherein the rib structures are defined by a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib, and a seventh rib sequentially from the edge of the antenna board to the middle, the first rib and the seventh rib have a height of at least 25 mm with respect to the honeycomb side to serve as main ribs, and the second rib to the sixth rib have a height of less than 25 mm with respect to the honeycomb side to serve as middle ribs.

In the light-weight grid floor, the plurality of concave portions are arranged in an array to form a honeycomb structure on the honeycomb side.

In the light-weight grating floor, the first rib is formed at the edge of the ceiling to become the edge rib of the light-weight grating floor, so as to serve as the frame of the light-weight grating floor.

In the aforementioned light-weight grille floor, the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 44 mm, and the thickness of the top plate is 2 mm.

In the aforementioned light-weight grating floor, the width of the first rib is 7 to 8 mm.

In the aforementioned lightweight grille floor, the height of the second to sixth ribs with respect to the honeycomb side is 12 to 22 mm.

In the aforementioned light-weight grill floor, the height of the seventh rib with respect to the honeycomb side is 25 to 38 mm.

In the light weight grill floor, the width of the second rib to the sixth rib is 3.5 to 3.8 mm.

In the aforementioned light-weight grating floor, the width of the seventh rib is 4 to 4.5 mm.

In the light-weight grating floor, the rib structure forms a # -shaped rib by two seventh ribs in the longitudinal direction and the transverse direction to divide the light-weight grating floor into four regions, 25 sub-regions are formed between the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region has a recess, another recess is formed in the center of the # -shaped rib formed by the seventh rib, each sub-region has three strip-shaped through holes to form ventilation of more than 50%, and a wing plate is formed around the ceiling plate, so that the thickness of the wing plate is larger than that of the ceiling plate.

In the light weight grill floor, the rib structure further includes a plurality of auxiliary ribs having a height lower than that of the main rib, and each of the auxiliary ribs is formed in each of the recesses, so that two auxiliary ribs are disposed in a single recess. For example, the height of the auxiliary rib with respect to the honeycomb side is 8 mm, and the width is 3 mm.

In the aforementioned light-weight grille floor, the widths of the first rib and the seventh rib at the two opposite sides of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at the middle of the honeycomb side, so as to reduce the weight of the light-weight grille floor.

In the light-weight grille floor, the first ribs are formed with the foot seats at four corners of the light-weight grille floor, and the foot seats are fixed on the supporting foot frames.

Therefore, the utility model discloses an in the light-duty grid floor, mainly adopt aluminum alloy integrated into one piece casting through this day board and these a plurality of rib structures to can not produce the deformation when making this light-duty grid floor, and be difficult for producing defect and fracture scheduling problem, so compare in prior art, the utility model discloses a reliability on light-duty grid floor is splendid.

Furthermore, through the design of a plurality of through holes, the ventilation volume is more than 50%, so that the ventilation volume can be increased to meet the requirement of the cleanliness of the semiconductor process.

In addition, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm to improve the structural strength of the light-weight grating floor, so compared with the prior art, the light-weight grating floor can bear heavier equipment in a semiconductor process to avoid the problem of cracking of the light-weight grating floor in use.

Drawings

Fig. 1A is a schematic perspective view of the light-weight grille floor of the present invention.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B taken along line C-C in one direction.

FIG. 1D is a cross-sectional view of FIG. 1B taken along line D-D in one direction.

Fig. 1E is a perspective view of fig. 1A from another perspective.

The reference numbers are as follows:

1. light grid floor

1a Rib Structure

1b foot stool

1c thimble position

1d wing plate

10. Top board

10a ground side

10b Honeycomb side

100. Piercing of holes

11. First rib

12. Second rib

13. Third rib

14. The fourth rib

15. Fifth Rib

16. Sixth Rib

17. Seventh Rib

17a,18 auxiliary Ribs

Width of d1 to d8

Total height of H

h 0-h 8 height

Sum of T

t0, t1 thickness

Length of L

R, S concave part

W separation distance

Detailed Description

The following description of the embodiments of the present invention is provided by way of specific examples, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure of the present invention.

It should be understood that the structure, proportion, size and the like shown in the attached drawings are only used for matching with the content disclosed in the specification, so as to be understood and read by those skilled in the art, and are not used for limiting the limit conditions which can be implemented by the present invention, so that the present invention has no technical essential meaning, and any structure modification, proportion relation change or size adjustment should still fall within the scope which can be covered by the technical content disclosed in the present invention without affecting the function and achievable purpose of the present invention. Meanwhile, the terms "upper", "lower", "left", "right" and "one" used in the present specification are for convenience of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the modifications may be changed or adjusted without substantial technical changes.

Fig. 1A to 1E are schematic views of a light-weight grating floor 1 according to the present invention. The light-weight grid floor 1 of the present embodiment is used to carry a light load, which is about 500 kg.

The light grid floor 1 is provided with a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the rib structures 1a are integrally cast by aluminum alloy, the light grid floor 1 cannot be deformed and is not easy to generate defects, fracture and other problems when being manufactured.

The antenna panel 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with a plurality of rib structures 1a in the longitudinal and transverse directions, respectively, to form a plurality of recesses S between the longitudinal and transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a are arranged in the same manner as the longitudinal rib structures 1a to be symmetrical, so that the cross-section of the transverse rib structures 1a is omitted.

In the present embodiment, the top plate 10 is substantially rectangular, like a square plate, the length L is 600 mm and the thickness t0 is 2mm, a wing plate 1d (the thickness t1 is 6mm, which is greater than the thickness t0 of the top plate 10) is formed around the top plate 10, and foot seats 1b are formed on four corners of the light-weight grid floor 1, the bottom portions thereof are L-shaped convex portions (or L-shaped concave portions), and the foot seats 1b are fixed to support foot frames (not shown). For example, the foot seat 1b is used to adjust the total height H of the light-weight grating floor 1 so that a plurality of light-weight grating floors 1 are positioned at the same level when they are spliced.

Furthermore, the ground side 10a is a flat surface and the plurality of recesses S are arranged in an array to form a honeycomb structure having a plurality of pin locations 1c (approximately at the corners of a square area formed by every four recesses S) on the honeycomb side 10 b.

The rib structure 1a is formed by sequentially defining a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17 from the edge of the antenna board 10 to the middle (or in the left-right lateral direction as shown in fig. 1B and fig. 1C), wherein the heights h1 and h7 of the first and

seventh ribs

11 and 17 relative to the honeycomb side 10B are at least 25 millimeters (mm), and the heights h2 to h6 of the second to sixth ribs 12 to 16 relative to the honeycomb side 10B are less than 25 mm, so that the first and

seventh ribs

11 and 17 serve as main ribs and the second to sixth ribs 12 to 16 serve as middle ribs, wherein the first to sixth ribs 11 to 16 are mm based on the seventh rib 17 and are symmetrically distributed left and right (or symmetrically up and down as shown in fig. 1B), so that the distance between the second, third, fourth, fifth and sixth ribs 12 to 16 is w.

In the present embodiment, the first rib 11 is formed at the edge of the ceiling 10 to become the side rib of the light grille floor 1, so as to be the frame of the light grille floor 1 for fixing the foot seat 1b. For example, the height H1 of the first rib 11 relative to the honeycomb side 10b is 42 mm, which is greater than the heights H2 to H7 of the second to seventh ribs 12 to 17 relative to the honeycomb side 10b, and the sum T of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 of the embodiment is 44 mm (i.e., T = H1+ T0), and the total height H of the height of the foot seat 1b, the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 is the foot height of the light weight grille floor 1, which is 55 mm.

Furthermore, the heights h 2-h 7 of the second to seventh ribs of the rib structure 1a may be the same or different according to the requirement, and the arrangement of the second to seventh ribs 12-17 between the first rib 11 and the middle concave portions R, S is shown in fig. 1C. For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 22 mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 22 mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 12 mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 22 mm, the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 12 mm, and the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 38 mm, wherein the two longitudinal and transverse seventh ribs 17 form a well-type rib so as to divide the lightweight grid floor 1 into four regions, 25 regions are formed between the adjacent second rib 12, third rib 13, fourth rib 14, fifth rib 15, and sixth rib 16, each sub-region has a recess S, and a recess R according to another embodiment is formed at the central portion of the well-type rib. Further, the thickness of the top plate 10 in the recess R may be increased as required or the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are disposed in the recess R to improve the compressive strength of the light-weight grating floor 1 at the middle. It should be understood that the heights h3 to h6 of the third to sixth ribs 13 to 16 (middle ribs) are regularly designed. For example, since the height h2 of the second rib 12 with respect to the honeycomb side 10b is lower than the height h1 of the first rib 11 with respect to the honeycomb side 10b, when the light weight grating floor 1 is fixed to a foot rest for an elevated floor, the four feet of the light weight grating floor 1 are supported by the bottom of the first rib 11.

In addition, the widths d 1-d 7 of the ribs may be the same or different as required, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7 to 8 mm (e.g., 7.5 mm), the width d2 of the second rib 12 is 3.8 mm, the width d3 of the third rib 13 is 3.8 mm, the width d4 of the fourth rib 14 is 3.5 mm, the width d5 of the fifth rib 15 is 3.8 mm, the width d6 of the sixth rib 16 is 3.5 mm, and the width d7 of the seventh rib 17 is 4.3 mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions of its extension as required. For example, the widths D1, D7 of the local ribs can be adjusted, and as shown in fig. 1D, the widths D1, D7 of the first rib 11 and the seventh rib 17 at the opposite sides of the honeycomb side 10b are smaller, wherein the width D1 of the first rib 11 is 4.2mm, the width D7 of the seventh rib 17 is 3.6mm, and are respectively smaller than the widths D1, D7 of the first rib 11 and the seventh rib 17 at the middle of the honeycomb side 10b shown in fig. 1C, so as to reduce the weight of the light weight grating floor 1, and the widths D2-D6 of the second to sixth ribs 12-16 are not changed.

In addition, a plurality of

auxiliary ribs

17a and 18 with a volume much smaller than that of other ribs may be added to the rib structure 1a as required, as shown in fig. 1C, wherein the heights h0 and h8 (e.g., 8 mm) of the auxiliary ribs relative to the honeycomb side 10b are lower than the heights h2 to h6 of the middle rib relative to the honeycomb side 10b, and the width d8 is 3 mm. For example, a plurality of

auxiliary ribs

17a,18 are formed in each of the recesses R, S in correspondence with each other, and extend in a single direction without being staggered with each other, and two parallel

auxiliary ribs

17a,18 are arranged in a single recess R, S as shown in fig. 1C.

Furthermore, the light-weight grid floor 1 forms a plurality of through holes 100 on the ceiling 10 to connect the ground side 10a and the honeycomb side 10b, and the seventh ribs 17 (the two vertical and horizontal seventh ribs 17 form a cross-shaped rib) divide the honeycomb side 10b into four regions (four corner regions), each region further forms 25 sub-regions (corresponding to the recess S position), and the cross-shaped ribs extend outward (cross region), so that 21 other sub-regions (corresponding to the recess R and S positions) can be separated by a plurality of ribs (the second ribs 12, the third ribs 13, the fourth ribs 14, the fifth ribs 15 and the sixth ribs 16) to form three elongated through holes 100 for each sub-region, thereby forming a ventilation volume of 50% or more.

In the present embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R and S. For example, three through holes 30 are formed in each of the recesses R, S, and the three through holes 100 are spaced side by side, and the

auxiliary ribs

17a,18 separate the rows of through holes 100; in addition, the recess S between the first and

second ribs

11,12 has only one perforation 100, i.e. no auxiliary rib 18 is provided.

Therefore, the light-weight grid floor 1 not only can increase ventilation amount, but also is beneficial to saving materials and reducing weight and can increase bearing weight by the design of the through holes 100.

In addition, the thickness t0 of the ceiling 10 of the light grille floor 1 is smaller, and the heights h2 to h6 of most of the rib structures 1a are also smaller, i.e., the heights h2 to h6 of the middle ribs (second to sixth ribs 12 to 16) are smaller than the heights h1 and h7 of the main ribs (first rib 11 and seventh rib 17), so as to save materials and reduce weight.

To sum up, the utility model discloses a light-duty grid floor 1 mainly adopts aluminum alloy integrated into one piece casting through this day board 10 and these a plurality of rib structure 1a, and horizontal rib is the same and be symmetrical formula with the arrangement of vertical rib to can not produce the deformation when making this light-duty grid floor 1, and be difficult for producing defect and fracture scheduling problem, so compare in prior art, the utility model discloses a light-duty grid floor 1 not only the reliability is splendid, and is favorable to promoting the yield and saves the cost of manufacture.

Furthermore, the design of the through hole 100 can form more than 50% of ventilation volume, thus increasing the ventilation volume, meeting the requirement of higher air return volume around the semiconductor process equipment and in shower rooms, and improving the cleanliness of the semiconductor process.

In addition, the heights h1 and h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b are at least 25 mm, so that the structural strength of the light grid floor 1 is improved, and the light grid floor 1 can bear heavier equipment in a semiconductor process, so that the problem that the light grid floor 1 is broken in use is avoided. Furthermore, the height h 1-h 7 and the width d 1-d 7 of the ribs are adjusted according to the load of the light grille floor 1, thereby saving the material of the light grille floor 1 and reducing the weight.

In addition, the structural strength of the light-weight grill floor 1 can be further improved by the design of the

auxiliary ribs

17a,18.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Those skilled in the art can modify the above embodiments without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be as set forth in the claims.

Claims

1. A lightweight grid flooring, comprising:

an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to provide a ventilation amount of 50% or more; and

a plurality of rib structures, which are cast integrally with the top plate by aluminum alloy and are arranged on the honeycomb side of the top plate to form a plurality of recesses, so that each recess has three through holes, wherein the rib structure is sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the top plate to the middle, the height of the first rib and the height of the seventh rib relative to the honeycomb side are at least 25 mm to serve as main ribs, and the height of the second rib to the sixth rib relative to the honeycomb side is lower than 25 mm to serve as middle ribs.

2. The light-weight grid floor of claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

3. The light-weight grid floor as recited in claim 1, wherein the first rib is formed at an edge of the ceiling to become an edge rib of the light-weight grid floor, serving as a border of the light-weight grid floor.

4. The light-weight grid floor of claim 1, wherein the sum of the height of the first ribs relative to the honeycomb side and the thickness of the top plate is 44 mm, and the thickness of the top plate is 2 mm.

5. The light-weight grid floor of claim 1, wherein the width of the first ribs is 7 to 8 mm.

6. The light-weight grill floor of claim 1, wherein the height of the second to sixth ribs with respect to the honeycomb side is 12 to 22 mm, and the width of the second to sixth ribs is 3.5 to 3.8 mm.

7. The light-weight grill floor of claim 1, wherein the height of the seventh rib is 25 to 38 mm with respect to the honeycomb side, and the width of the seventh rib is 4 to 4.5 mm.

8. The light weight grill floor of claim 1, wherein the rib structure forms a # -shaped rib with two seventh ribs in longitudinal and transverse directions to divide the light weight grill floor into four regions, 25 sub-regions are formed between adjacent second, third, fourth, fifth and sixth ribs among the four regions, each of the sub-regions has a recess, and another recess is formed at a central portion of the # -shaped rib formed by the seventh rib, and each of the sub-regions has three elongated through holes to form a ventilation amount of more than 50%, and a wing plate is formed around the ceiling plate so that a thickness of the wing plate is greater than a thickness of the ceiling plate.

9. The light-weight grid floor of claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than the main rib, and each of the auxiliary ribs is formed in each of the recesses, so that two auxiliary ribs are disposed in a single recess.

10. The light-weight grid floor of claim 9, wherein the height of the auxiliary ribs with respect to the honeycomb side is 8 mm and the width is 3 mm.

11. The light-weight grill floor of claim 1, wherein the widths of the first rib and the seventh rib at opposite side portions of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at a middle portion of the honeycomb side, so as to reduce the weight of the light-weight grill floor.

12. The light-weight grating floor of claim 1, wherein the first ribs are formed with foot seats at four corners of the light-weight grating floor, the foot seats being fixed to supporting legs.