CN218149478U - Comprehensive grid floor - Google Patents

Abstract

A comprehensive grid floor comprises a top plate and a rib structure, wherein the rib structure and the top plate are integrally cast by aluminum alloy, a plurality of through holes are formed in the top plate to form ventilation of more than 48% or more than 50%, and therefore the requirement of semiconductor process cleanliness can be met.

Description

Comprehensive grid floor

Technical Field

The utility model relates to a floor especially relates to a comprehensive grid floor with high ventilation rate.

Background

The existing elevated floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent, TWM596253 patent and the like, can be used for the ventilation floors of process areas besides the factory floor of semiconductor process, but the ventilation rate is less than twenty percent, and the requirement of the ventilation rate cannot be met.

However, the grid floor for the gutter cover is manufactured by welding, such as the TW536257 patent, which is prone to deformation, defects and fracture due to the welding process.

Moreover, the air volume of the existing grid floor is too small, so that the air return volume is insufficient, and the requirement of the cleanliness of a semiconductor process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so that the grid floor is easily broken when heavy equipment in a semiconductor process is carried on the grid floor.

On the other hand, the conventional grid floor also has the problem of overweight, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the above problems of the prior art has become a problem to be overcome in the industry.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned drawbacks of the prior art, the present invention provides a comprehensive grid floor, which can at least partially solve the problems of the prior art.

The utility model discloses a generalized type grid floor, include: an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to provide a ventilation amount of 48% or more or 50% or more; and a plurality of rib structures disposed on the honeycomb side of the antenna board to form a plurality of recesses, each of the recesses having three or four through holes therein, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib, and a seventh rib from the edge of the antenna board to the middle, and the first rib, the second rib, the fourth rib, the fifth rib, and the seventh rib have a height of at least 25 mm with respect to the honeycomb side to serve as main ribs, and the third rib and the sixth rib have a height of less than 25 mm with respect to the honeycomb side to serve as middle ribs.

In the above-mentioned integrated grid floor, the plurality of concave portions are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforementioned integrated grating floor, the first rib is formed at the edge of the ceiling to become a side rib of the integrated grating floor, so as to serve as a frame of the integrated grating floor.

In the above-mentioned integrated grid floor, the sum of the height of the first rib with respect to the honeycomb side and the thickness of the top plate is 50 to 59.5 mm, and the thickness of the top plate is 2 to 3 mm.

In the above-mentioned integrated grid floor, the height of the second, fourth, fifth and seventh ribs with respect to the honeycomb side is 35 to 52.5 mm.

In the above-described integrated grid floor, the height of the third rib and the sixth rib with respect to the honeycomb side is 17 to 22 mm.

In the aforementioned integrated grid floor, the width of the first rib is 4.8 to 8 mm.

In the above-mentioned integrated grid floor, the width of the second rib, the fourth rib, the fifth rib and the seventh rib is 3 to 5.5 mm.

In the above-mentioned integrated grid floor, the width of the third rib and the sixth rib is 3 to 3.5 mm.

In the aforementioned integrated grid floor, the rib structure forms a # -shaped rib by two seventh ribs in the longitudinal and transverse directions to divide the integrated grid floor into four regions, 25 sub-regions are formed between the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region has a concave portion, another concave portion is formed at the central portion of the # -shaped rib formed by the seventh rib, each sub-region has three strip-shaped through holes to form ventilation of more than 48% or more than 50%, and a wing plate is formed around the ceiling plate to make the thickness of the wing plate greater than that of the ceiling plate.

In the aforementioned integrated grid floor, the rib structure further comprises a plurality of auxiliary ribs having a height lower than the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the recesses, so that the plurality of auxiliary ribs are disposed in a single recess. For example, the height of the auxiliary rib with respect to the honeycomb side is 10 to 15 mm, and the width thereof is 3 to 3.5 mm.

In an embodiment, the width of the first rib, the width of the second rib, and the width of the seventh rib at two opposite sides of the honeycomb side are respectively less than the width of the first rib, the width of the second rib, and the width of the seventh rib at the middle of the honeycomb side, so as to reduce the weight of the integrated grille floor.

In the above-mentioned integrated grid floor, the first rib is used for supporting the foot stool fixed on the integrated grid floor.

In the above-mentioned integrated grid floor, the first and second ribs are formed with foot seats at four corners of the integrated grid floor, and the foot seats are fixed on the supporting foot frames.

Therefore, the utility model discloses an among the integrated grid floor, mainly adopt aluminum alloy integrated into one piece casting through this day board and these a plurality of rib structures to can not produce the deformation when making this integrated grid floor, and be difficult for producing defect and fracture scheduling problem, so compare in prior art, the utility model discloses an integrated grid floor's reliability is splendid.

Furthermore, through the design of a plurality of through holes, the ventilation volume of more than 48% or more than 50% is formed, so that the ventilation volume can be increased to meet the requirement of the cleanliness of the semiconductor process.

In addition, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm so as to improve the structural strength of the comprehensive grid floor, so compared with the prior art, the comprehensive grid floor can bear heavier machine equipment in a semiconductor process so as to avoid the problem that the comprehensive grid floor is cracked in use.

Drawings

Fig. 1A is a schematic perspective view of a first embodiment of the integrated grid floor of the present invention.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B taken along line C-C in one direction.

FIG. 1D is a cross-sectional view of FIG. 1B taken along line D-D in one direction.

Fig. 1E is a perspective view of fig. 1A from another viewing angle.

Fig. 2A is a schematic perspective view of a second embodiment of the integrated grid floor of the present invention.

Fig. 2B is a front plan view of fig. 2A.

FIG. 2C is a cross-sectional view of FIG. 2B taken along line C-C in one direction.

FIG. 2D is a cross-sectional view of FIG. 2B taken along line D-D in one direction.

Fig. 2E is a perspective view of fig. 2A from another view angle.

Fig. 3A is a schematic perspective view of a third embodiment of the integrated grid floor of the present invention.

Fig. 3B is a front plan view of fig. 3A.

FIG. 3C is a cross-sectional view of FIG. 3B taken along line C-C in one direction.

FIG. 3D is a cross-sectional view of FIG. 3B taken along line D-D in one direction.

Fig. 3E is a perspective view of the other viewing angle of fig. 3A.

Fig. 4A is a schematic perspective view of a fourth embodiment of the integrated grid floor of the present invention.

Fig. 4B is a front plan view of fig. 4A.

FIG. 4C is a cross-sectional view of FIG. 4B taken along line C-C in one direction.

FIG. 4D is a cross-sectional view of the cross-section taken along line D-D of FIG. 4B in one direction.

Fig. 4E is a perspective view of fig. 4A from another angle.

Fig. 5A is a schematic perspective view of a fifth embodiment of the integrated grid floor of the present invention.

Fig. 5B is a front plan view of fig. 5A.

FIG. 5C is a cross-sectional view of FIG. 5B taken along line C-C in one direction.

FIG. 5D is a cross-sectional view of FIG. 5B taken along line D-D in one direction.

Fig. 5E is a perspective view of another view angle of fig. 5A.

Fig. 6A is a schematic perspective view of a sixth embodiment of the integrated grid floor of the present invention.

Fig. 6B is a front plan view of fig. 6A.

Fig. 6C is a cross-sectional view of fig. 6B taken along line C-C in one direction.

Fig. 6D is a cross-sectional view of fig. 6B taken along line D-D in one direction.

Fig. 6E is a perspective view of another view angle of fig. 6A.

Description of the main Components

1,2,3,4,5,6 comprehensive grid floor

1a,2a,3a,4a,5a,6a rib structure

1b,2b,3b,4b,5b,6b footstand

1c thimble position

1d,2d,3d,4d,5d,6d wing plate

10,20,30,40,50,60 day board

10a,20a,30a,40a,50a,60a ground side

10b,20b,30b,40b,50b,60b on the honeycomb side

100,200,300,400,500,600 perforations

11,21,31,41,51,61 first rib

12,22,32,42,52,62 second Rib

13,23,33,43,53,63 third Rib

14,24,34,44,54,64 fourth rib

15,25,35,45,55,65 fifth Rib

16,26,36,46,56,66 sixth rib

17,27,37,47,57,67 seventh Rib

17a,18,27a,28,37a,38,47a,48,57a,58,67a,68 auxiliary ribs

Width of d1 to d8

Total height of H

h 0-h 8 height

Length of L

R, S concave part

Sum of T

t0, t1 thickness

w separation distance

Detailed Description

The following description of the embodiments of the present invention is provided by way of specific examples, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure of the present invention.

It should be understood that the structure, proportion, size and the like shown in the attached drawings are only used for matching with the content disclosed in the specification, so as to be understood and read by those skilled in the art, and are not used for limiting the limit conditions which can be implemented by the present invention, so that the present invention has no technical essential meaning, and any structure modification, proportion relation change or size adjustment should still fall within the scope which can be covered by the technical content disclosed in the present invention without affecting the function and achievable purpose of the present invention. Meanwhile, the terms "upper", "lower", "left", "right" and "one" used in the present specification are for convenience of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the modifications may be changed or adjusted without substantial technical changes.

Fig. 1A to 1E are schematic views of a first embodiment of the integrated grid floor 1 of the present invention. The integrated grating floor 1 of the present embodiment is used to carry a heavy load, which carries about 1000 kg.

The integrated grid floor 1 is provided with a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally cast by aluminum alloy, deformation is avoided when the integrated grid floor 1 is manufactured, and the problems of defects, breakage and the like are avoided.

The antenna panel 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with a plurality of rib structures 1a in the longitudinal and transverse directions, respectively, so as to form a plurality of recesses S between the longitudinal and transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a are arranged in the same manner as the longitudinal rib structures 1a in a symmetrical manner, so that the cross-section of the transverse rib structures 1a is omitted.

In the present embodiment, the top board 10 is substantially rectangular, such as a square board, the length L of the top board is 600 mm and the thickness t0 of the top board is 2 mm, a wing plate 1d (the thickness t1 of which is 8 mm and is greater than the thickness t0 of the top board 10) is formed around the top board 10, and foot seats 1b are formed at four corners of the comprehensive grid floor board 1, the bottom of the comprehensive grid floor board is L-shaped convex (or L-shaped concave), and the foot seats 1b are fixed on supporting foot frames (not shown). For example, the foot seat 1b is used to adjust the total height H of the integrated grating floor 1 so that a plurality of integrated grating floors 1 can be positioned at the same level when they are spliced.

Furthermore, the ground side 10a is a flat surface and a plurality of recesses S are arranged in an array to form a honeycomb structure having a plurality of pin locations 1c (approximately at the corners of a square area consisting of every four recesses S) on the honeycomb side 10 b.

The rib structure 1a is defined by a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17 in sequence from the edge of the top plate 10 to the middle (or in the left-right lateral direction as shown in fig. 1B and 1C), wherein the heights h1 to h3, h5 and h7 of the first to second, fourth to fifth and seventh ribs 11 to 12,14 to 15,17 with respect to the honeycomb side 10B are at least 25 millimeters (mm), and the heights h4 of the third and sixth ribs 13,16 with respect to the honeycomb side 10B, h6 is less than 25 mm, the first to second, fourth to fifth and seventh ribs 11 to 12,14 to 15 and 17 serve as main ribs, and the third and sixth ribs 13 and 16 serve as middle ribs, wherein the first to sixth ribs 11 to 16 are distributed in a left-right symmetrical manner (or in a vertically symmetrical manner as shown in fig. 1B) with the seventh rib 17 as a reference, so that the spacing distance w between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17 is 48 mm.

In the embodiment, the first rib 11 is formed at the edge of the top plate 10 to become the edge rib of the integrated grid floor 1, so as to be used as the frame of the integrated grid floor 1 for fixing the foot seat 1b. For example, the height H1 of the first rib 11 relative to the honeycomb side 10b is 48 mm (equal to the height H2 of the second rib 12 relative to the honeycomb side 10 b), which is greater than the heights H3 to H7 of the third to seventh ribs 13 to 17 relative to the honeycomb side 10b, and the sum T of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness of the antenna board 10 of the embodiment is 50 mm (i.e., T = H1+ T0), and the total height H of the height of the base 1b, the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 is the leg height of the composite type grid floor 1, which is 60 mm.

Furthermore, the heights h 2-h 7 of the second to seventh ribs of the rib structure 1a may be the same or different according to the requirement, and the arrangement of the main ribs (i.e., the second to seventh ribs 12-17) between the first rib 11 and the middle recesses R, S is as shown in fig. 1C. For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 48 mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 35 mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 35 mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 45 mm, and the heights h3 and h6 of the third and sixth ribs 13 and 16 relative to the honeycomb side 10b are both 18 mm, wherein the two longitudinal and transverse seventh ribs 17 form a grid pattern so as to divide the composite grid floor 1 into four regions, each region forms 25 sub-regions between the adjacent second rib 12, third rib 13, fourth rib 14, fifth rib 15 and sixth rib 16, each sub-region has a recess S, and a recess R according to another embodiment is formed in a central portion of the grid pattern. Further, the thickness of the top plate 10 in the recess R may be larger than the thickness t0 of the top plate 10 at other positions or the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are disposed in the recess R to improve the compressive strength of the integrated grid floor 1 at the middle position. For example, since the height h2 of the second rib 12 with respect to the honeycomb side 10b is equal to the height h1 of the first rib 11 with respect to the honeycomb side 10b, when the integrated grid floor 1 is fixed to a foot stand for an elevated floor, the four feet of the integrated grid floor 1 are supported by the bottoms of the first rib 11 and the second rib 12.

In addition, the widths d 1-d 7 of the ribs may be the same (e.g., the second to sixth ribs 12-16) or different, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7 mm, the width d2 of the second rib 12 is 4.42 mm, the width d3 of the third rib 13 is 3.5mm, the width d4 of the fourth rib 14 is 3.5mm, the width d5 of the fifth rib 15 is 3.5mm, the width d6 of the sixth rib 16 is 3.5mm, and the width d7 of the seventh rib 17 is 5 mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions where it extends, as desired. For example, the widths D1, D2, D7 of the local ribs can be adjusted, such that the widths D1, D2, D7 of the first, second and seventh ribs 11,12, 17 at opposite sides of the honeycomb side 10b shown in fig. 1D are smaller, wherein the width D1 of the first rib 11 is 5mm, the width D2 of the second rib 12 is 3.5mm and the width D7 of the seventh rib 17 is 4mm, which are respectively smaller than the widths D1, D2, D7 of the first, second and seventh ribs 11,12, 17 at the middle portion of the honeycomb side 10b shown in fig. 1C, to reduce the weight of the integrated grid floor 1, and the widths D3, D4, D5, D6 of the third, fourth, fifth and sixth ribs 13,14,15,16 are not changed.

In addition, a plurality of auxiliary ribs 17a and 18 with a volume much smaller than that of other ribs may be added to the rib structure 1a as required, as shown in fig. 1C, wherein the heights h0 and h8 (e.g., 10 mm) of the auxiliary ribs relative to the honeycomb side 10b are lower than the heights h3 and h6 of the middle rib relative to the honeycomb side 10b, and the width d8 is 3 mm. For example, a plurality of auxiliary ribs 17a,18 are formed in each of the recesses R, S to extend in a single direction without being staggered with respect to each other, and two parallel auxiliary ribs 17a,18 are arranged in a single recess R, S as shown in fig. 1C.

Furthermore, the integrated grid floor 1 forms a plurality of through holes 100 on the ceiling 10 to connect the ground side 10a and the honeycomb side 10b, and the seventh ribs 17 (the two vertical and horizontal seventh ribs 17 form the # -shaped ribs) divide the honeycomb side 10b into four regions (four corner regions), each region forms 25 sub-regions (corresponding to the recess S position), and the # -shaped ribs extend outward (cross region), and 21 other sub-regions (corresponding to the recess R and S positions) can be separated by a plurality of ribs (the second ribs 12, the third ribs 13, the fourth ribs 14, the fifth ribs 15 and the sixth ribs 16) to form three elongated through holes 100 in each sub-region, so as to form a ventilation amount of 50% or more.

In the present embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R and S. For example, three through holes 100 are formed in each of the recesses R, S, and the three through holes 100 are spaced side by side, and the auxiliary ribs 17a,18 separate the through holes 100 of each row; in addition, the recess S between the first and second ribs 11,12 has only one through-hole 100, i.e. no auxiliary rib 18 is provided.

Therefore, the integrated grid floor 1 can increase the ventilation amount, save materials, reduce the weight and increase the bearing weight by the design of the through holes 100.

In addition, the thickness t0 of the top plate 10 of the integrated grid floor 1 is smaller, and the heights h3, h6 of the rib structures 1a are also smaller, i.e. the heights h3, h6 of the middle ribs (third and sixth ribs 13, 16) are much smaller than the heights h1, h2, h4, h5, h7 of the main ribs (the first to second, fourth to fifth and seventh ribs 11 to 12,14 to 15, 17), so as to save materials and reduce weight.

Fig. 2A to 2E are schematic views of a second embodiment of the integrated grid floor 2 according to the present invention. The load of the integrated grid floor 2 of this embodiment is about 1000 kg, and the difference from the first embodiment is the change of the local height of the rib structure 2a, so the same description is omitted below.

In this embodiment, the thickness T0 of the antenna board 20 is 2 mm, the height H1 of the first rib 21 relative to the honeycomb side 20B is 48 mm, the sum T of the height H1 of the first rib 21 relative to the honeycomb side 20B and the thickness T0 of the antenna board 20 is 50 mm, the height of the foot seat 2B, the height H1 of the first rib 21 relative to the honeycomb side 20B and the thickness T0 of the antenna board 20 is 55 mm, the thickness T1 of the wing plate 2d is 6mm, the first rib 21 is formed at the edge of the antenna board 20 to become the side rib of the composite type grid floor 2, and is used as the frame of the composite type grid floor 2, and the total heights of the first to sixth ribs 21 to 26 are distributed in a left-right symmetrical manner (or in a vertical symmetrical manner as shown in fig. 2B) based on the seventh rib 27.

Furthermore, in the rib structure 2a, as shown in fig. 2C, the height h2 of the second rib 22 relative to the honeycomb side 20b is 48 mm, the height h4 of the fourth rib 24 relative to the honeycomb side 20b is 35 mm, the height h5 of the fifth rib 25 relative to the honeycomb side 20b is 35 mm, the height h7 of the seventh rib 27 relative to the honeycomb side 20b is 45 mm, and the heights h3 and h6 of the third and sixth ribs 23 and 26 relative to the honeycomb side 20b are both 18 mm. For example, since the height h2 of the second rib 22 relative to the honeycomb side 20b is equal to the height h1 of the first rib 21 relative to the honeycomb side 20b, when the integrated grid floor 2 is fixed on a foot stand for an elevated floor, the four feet of the integrated grid floor 2 are supported by the bottoms of the first rib 21 and the second rib 22.

In addition, the widths d 1-d 7 of the ribs may be the same or different as required, as shown in FIG. 2C. For example, the width d1 of the first rib 21 is 7 mm, the width d2 of the second rib 22 is 4.42 mm, the width d3 of the third rib 23 is 3.5mm, the width d4 of the fourth rib 24 is 3.5mm, the width d5 of the fifth rib 25 is 3.5mm, the width d6 of the sixth rib 26 is 3.5mm, and the width d7 of the seventh rib 27 is 5 mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions where it extends, as desired. For example, the widths D1, D2, D7 of the local ribs can be adjusted, as shown in fig. 2D, the widths D1, D2, D7 of the first, second and seventh ribs 21,22, 27 at opposite sides of the honeycomb side 20b are smaller, wherein the width D1 of the first rib 21 is 5mm, the width D2 of the second rib 22 is 3.5mm and the width D7 of the seventh rib 27 is 4mm, which are respectively smaller than the widths D1, D2, D7 of the first, second and seventh ribs 21,22, 27 at the middle of the honeycomb side 20b shown in fig. 2C, so as to reduce the weight of the integrated grid floor 2, and the widths D3, D4, D5, D6 of the third, fourth, fifth and sixth ribs 23,24,25,26 are not changed.

In addition, the heights h0 and h8 (e.g., 10 mm) of the auxiliary ribs 27a and 28 relative to the honeycomb side 20b are lower than the height of the middle rib, and the width d8 is 3 mm, and a plurality of auxiliary ribs 27a and 28 are correspondingly formed in the recesses R and S and extend along a single direction without being staggered with each other, such that two parallel auxiliary ribs 27a and 28 are disposed in the single recess R and S shown in fig. 2C, so that each sub-region has three elongated through holes 200 to form a ventilation amount of 50% or more. In addition, the recess S between the first and second ribs 21,22 has only one perforation 200.

Therefore, the integrated grid floor 2 can not only increase the ventilation amount, but also save material and weight and increase the bearing weight by the design of the through holes 200.

In addition, the heights h3, h6 of the rib structures 2a are also smaller, i.e., the heights h3, h6 of the middle ribs (the third and sixth ribs 23, 26) are much smaller than the heights h1, h2, h4, h5, h7 of the main ribs (the first to second, fourth to fifth and seventh ribs 21-22, 24-25, 27), so as to save materials and reduce weight.

Fig. 3A to 3E are schematic views of a third embodiment of the integrated grid floor 3 of the present invention. The load of the integrated grid floor 3 of this embodiment is about 1500 kg, and the difference from the first embodiment is the change of the local height of the rib structure 3a, so the same parts will not be described again.

In the embodiment, the thickness T0 of the antenna board 30 is 2 mm, the height H1 of the first rib 31 relative to the honeycomb side 30B is 57.5 mm, the sum T of the height H1 of the first rib 31 relative to the honeycomb side 30B and the thickness T0 of the antenna board 30 is 59.5 mm, the height of the foot seat 3B, the height H1 of the first rib 31 relative to the honeycomb side 30B and the total height H of the thickness T0 of the antenna board 30 are 60 mm, wherein the thickness T1 of the wing plate 3d is 7 mm, the first rib 31 is formed at the edge of the antenna board 30 to serve as the edge of the composite type grid floor 3 to serve as the frame of the composite type grid floor 3, and the first to sixth ribs 31 to 36 are distributed in a left-right symmetrical manner (or in a vertically symmetrical manner as shown in fig. 3B) based on the seventh rib 37.

In the rib structure 3a, as shown in fig. 3C, the height h2 of the second rib 32 relative to the honeycomb side 30b is 52.5 mm, the height h4 of the fourth rib 34 relative to the honeycomb side 30b is 48 mm, the height h5 of the fifth rib 35 relative to the honeycomb side 30b is 48 mm, the height h7 of the seventh rib 37 relative to the honeycomb side 30b is 48 mm, and the heights h3 and h6 of the third and sixth ribs 33 and 36 relative to the honeycomb side 30b are both 22 mm. For example, since the height h2 of the second rib 32 with respect to the honeycomb side 30b is lower than the height h1 of the first rib 31 with respect to the honeycomb side 30b, when the integrated grating floor 3 is fixed to a foot stand for an elevated floor, the four feet of the integrated grating floor 3 are supported by the bottoms of the first ribs 31.

In addition, the widths d 1-d 7 of the ribs may be the same or different as required, as shown in FIG. 3C. For example, the width d1 of the first rib 31 is 7.5 mm, the width d2 of the second rib 32 is 4.5 mm, the width d3 of the third rib 33 is 3.5mm, the width d4 of the fourth rib 34 is 3.5mm, the width d5 of the fifth rib 35 is 3.5mm, the width d6 of the sixth rib 36 is 3.5mm, and the width d7 of the seventh rib 37 is 5.5 mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions where it extends, as desired. For example, the widths D1, D2, D7 of the local ribs can be adjusted, as shown in fig. 3D, the widths D1, D2, D7 of the first rib 31, the second rib 32 and the seventh rib 37 at two opposite sides of the honeycomb side 30b are smaller, wherein the width D1 of the first rib 31 is 5mm, the width D2 of the second rib 32 is 3.6mm and the width D7 of the seventh rib 37 is 4mm, which are respectively smaller than the widths D1, D2, D7 of the first rib 31, the second rib 32 and the seventh rib 37 at the middle of the honeycomb side 30b shown in fig. 3C, so as to reduce the weight of the integrated grid floor 3, and the widths D3, D4, D5, D6 of the third, fourth, fifth and sixth ribs 33,34,35,36 are not changed.

In addition, the heights h0, h8 (e.g., 15 mm) of the auxiliary ribs 37a,38 relative to the honeycomb side 30b are lower than the height of the middle rib, and the width d8 thereof is 3.5mm, and a plurality of auxiliary ribs 37a,38 are correspondingly formed in the recesses R, S and extend in a single direction without being staggered with each other, as shown in fig. 3C, two parallel auxiliary ribs 37a,38 are disposed in the single recess R, S, so that each sub-region has three elongated through holes 300 to form a ventilation amount of 50% or more. In addition, the recess S between the first and second ribs 31,32 has only one perforation 300.

Therefore, the integrated grid floor 3 can not only increase ventilation volume, but also save material and weight and increase bearing weight by the design of the through holes 300.

In addition, the heights h3, h6 of the rib structures 3a are also smaller, i.e., the heights h3, h6 of the middle ribs (the third and sixth ribs 33, 36) are much smaller than the heights h1, h2, h4, h5, h7 of the main ribs (the first to second, fourth to fifth and seventh ribs 31-32, 34-35, 37), so as to save materials and reduce weight.

Fig. 4A to 4E are schematic views of a fourth embodiment of the integrated grid floor 4 of the present invention. The load-bearing capacity of the integrated grid floor 4 of this embodiment is light, about 700 kg, and the difference from the first embodiment is the change of the local height of the rib structure 4a, so the same will not be described in detail below.

In this embodiment, the thickness T0 of the antenna board 40 is 2 mm, the height H1 of the first rib 41 relative to the honeycomb side 40B is 48 mm, the sum T of the height H1 of the first rib 41 relative to the honeycomb side 40B and the thickness T0 of the antenna board 40 is 50 mm, the height H of the foot seat 4B, the height H1 of the first rib 41 relative to the honeycomb side 40B and the thickness T0 of the antenna board 40 is 55 mm, the thickness T1 of the wing plate 4d is 6mm, the first rib 41 is formed at the edge of the antenna board 40 to become the side rib of the composite type grid floor 4, so as to serve as the frame of the composite type grid floor 4, and the total heights of the first to sixth ribs 41 to 46 are distributed in a left-right symmetrical manner (or in a vertical symmetrical manner as shown in fig. 4B) based on the seventh rib 47.

In the rib structure 4a, as shown in fig. 4C, the height h2 of the second rib 42 relative to the honeycomb side 40b is 48 mm, the height h4 of the fourth rib 44 relative to the honeycomb side 40b is 35 mm, the height h5 of the fifth rib 45 relative to the honeycomb side 40b is 35 mm, the height h7 of the seventh rib 47 relative to the honeycomb side 40b is 45 mm, the height h3 of the third rib 43 relative to the honeycomb side 40b is 22 mm, and the height h6 of the sixth rib 46 relative to the honeycomb side 40b is 18 mm. For example, since the height h2 of the second rib 42 relative to the honeycomb side 40b is equal to the height h1 of the first rib 41 relative to the honeycomb side 40b, when the integrated grid floor 4 is fixed on a foot stand for an elevated floor, the four feet of the integrated grid floor 4 are supported by the bottoms of the first rib 41 and the second rib 42.

In addition, the widths d 1-d 7 of the ribs may be the same or different as required, as shown in FIG. 4C. For example, the width d1 of the first rib 41 is 8 mm, the width d2 of the second rib 42 is 4.42 mm, the width d3 of the third rib 43 is 3.5mm, the width d4 of the fourth rib 44 is 3.5mm, the width d5 of the fifth rib 45 is 3.5mm, the width d6 of the sixth rib 46 is 3.5mm, and the width d7 of the seventh rib 47 is 5 mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions where it extends, as desired. For example, the widths D1, D2, D7 of the local ribs can be adjusted, as shown in fig. 4D, the widths D1, D2, D7 of the first, second and seventh ribs 41,42, 47 at two opposite sides of the honeycomb side 40b are smaller, wherein the width D1 of the first rib 41 is 5mm, the width D2 of the second rib 42 is 3.5mm and the width D7 of the seventh rib 47 is 4mm, which are respectively smaller than the widths D1, D2, D7 of the first, second and seventh ribs 41,42, 47 at the middle portion of the honeycomb side 40b shown in fig. 4C, so as to reduce the weight of the integrated grid floor 4, and the widths D3, D4, D5, D6 of the third, fourth, fifth and sixth ribs 43,44,45,46 are not changed.

In addition, the heights h0 and h8 (e.g., 10 mm) of the auxiliary ribs 47a and 48 relative to the honeycomb side 40b are lower than the height of the middle rib, and the width d8 is 3 mm, and a plurality of the auxiliary ribs 47a and 48 are correspondingly formed in the recesses R and S and extend in a single direction without being staggered with each other, and as shown in fig. 4C, two parallel auxiliary ribs 47a and 48 are arranged in the single recesses R and S, so that each sub-region has three elongated through holes 400 to form a ventilation amount of 50% or more. In addition, the recess S between the first and second ribs 41,42 may have only one perforation 400 (as shown in FIG. 4C) or two perforations 400 (as shown in FIG. 4D).

Therefore, the integrated grid floor 4 can increase the ventilation amount, save materials, reduce the weight and increase the bearing weight by the design of the through holes 400.

In addition, the heights h3, h6 of the rib structures 4a are also smaller, i.e., the heights h3, h6 of the middle ribs (the third and sixth ribs 43, 46) are much smaller than the heights h1, h2, h4, h5, h7 of the main ribs (the first to second, fourth to fifth and seventh ribs 41 to 42,44 to 45, 47), so as to save materials and reduce weight.

Fig. 5A to 5E are schematic views of a fifth embodiment of the integrated grid floor 5 of the present invention. The load of the integrated grid floor 5 of this embodiment is about 1000 kg, and the difference from the first embodiment is the change of the local height of the rib structure 5a, so the same description is omitted below.

In this embodiment, the thickness T0 of the antenna board 50 is 2 mm, the height H1 of the first rib 51 relative to the honeycomb side 50B is 48 mm, the sum T of the height H1 of the first rib 51 relative to the honeycomb side 50B and the thickness T0 of the antenna board 50 is 50 mm, the height of the foot seat 5B, the height H1 of the first rib 51 relative to the honeycomb side 50B and the thickness T0 of the antenna board 50 is 55 mm, the thickness T1 of the wing plate 5d is 6mm, the first rib 51 is formed at the edge of the antenna board 50 to become the side rib of the composite type grid floor 5, and is used as the frame of the composite type grid floor 5, and the total heights of the first to sixth ribs 51 to 56 are distributed in a left-right symmetrical manner (or in a vertical symmetrical manner as shown in fig. 5B) based on the seventh rib 57.

In the rib structure 5a, as shown in fig. 5C, the height h2 of the second rib 52 relative to the honeycomb side 50b is 48 mm, the height h4 of the fourth rib 54 relative to the honeycomb side 50b is 35 mm, the height h5 of the fifth rib 55 relative to the honeycomb side 50b is 35 mm, the height h7 of the seventh rib 57 relative to the honeycomb side 50b is 45 mm, the height h3 of the third rib 53 relative to the honeycomb side 50b is 22 mm, and the height h6 of the sixth rib 56 relative to the honeycomb side 50b is 18 mm. For example, since the height h2 of the second rib 52 with respect to the honeycomb side 50b is equal to the height h1 of the first rib 51 with respect to the honeycomb side 50b, when the integrated type grating floor 5 is fixed to a foot stand for an elevated floor, the four feet of the integrated type grating floor 5 are supported by the bottoms of the first rib 51 and the second rib 52.

In addition, the widths d 1-d 7 of the ribs can be the same or different according to requirements, as shown in FIG. 5C. For example, the width d1 of the first rib 51 is 8 mm, the width d2 of the second rib 52 is 4.42 mm, the width d3 of the third rib 53 is 3.5mm, the width d4 of the fourth rib 54 is 3.5mm, the width d5 of the fifth rib 55 is 3.5mm, the width d6 of the sixth rib 56 is 3.5mm, and the width d7 of the seventh rib 57 is 5 mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions of its extension as required. For example, the widths D1, D2, D7 of the local ribs can be adjusted, as shown in fig. 5D, the widths D1, D2, D7 of the first, second and seventh ribs 51,52, 57 at two opposite sides of the honeycomb side 50b are smaller, wherein the width D1 of the first rib 51 is 5mm, the width D2 of the second rib 52 is 3.5mm and the width D7 of the seventh rib 57 is 4mm, which are respectively smaller than the widths D1, D2, D7 of the first, second and seventh ribs 51,52, 57 at the middle portion of the honeycomb side 50b shown in fig. 5C, so as to reduce the weight of the integrated grid floor 5, and the widths D3, D4, D5, D6 of the third, fourth, fifth and sixth ribs 53,54,55,56 are not changed.

In addition, the heights h0 and h8 (e.g., 10 mm) of the auxiliary ribs 57a and 58 relative to the honeycomb side 50b are lower than the height of the middle rib, and the width d8 is 3 mm, and a plurality of auxiliary ribs 57a and 58 are correspondingly formed in the recesses R and S and extend along a single direction without being staggered with each other, such that two parallel auxiliary ribs 57a and 58 are arranged in the single recess R and S shown in fig. 5C, so that each sub-region has three elongated through holes 500 to form a ventilation amount of 48% or more. In addition, the recess S between the first and second ribs 51,52 may have only one perforation 500 (as shown in FIG. 5C) or two perforations 500 (as shown in FIG. 5D).

Therefore, the integrated grid floor 5 can not only increase the ventilation amount, but also save materials and reduce weight and increase the bearing weight by the design of the through holes 500.

In addition, the heights h3, h6 of the rib structures 5a are also smaller, i.e., the heights h3, h6 of the middle ribs (the third and sixth ribs 53, 56) are much smaller than the heights h1, h2, h4, h5, h7 of the main ribs (the first to second, fourth to fifth and seventh ribs 51-52, 54-55, 57), so as to save materials and reduce weight.

Fig. 6A to 6E are schematic views of a sixth embodiment of the integrated grid floor 6 according to the present invention. The load of the integrated grid floor 6 of this embodiment is about 1000 kg, and the difference from the first embodiment is the change of the local height of the rib structure 6a, so the same description is omitted below.

In this embodiment, the thickness T0 of the antenna board 60 is 3 mm, the height H1 of the first rib 61 relative to the honeycomb side 60B is 48 mm, the sum T of the height H1 of the first rib 61 relative to the honeycomb side 60B and the thickness T0 of the antenna board 60 is 51 mm, the height H of the foot seat 6B, the height H1 of the first rib 61 relative to the honeycomb side 60B and the thickness T0 of the antenna board 60 is 55 mm, wherein the thickness T1 of the wing plate 6d is 7 mm, the first rib 61 is formed at the edge of the antenna board 60 to serve as the side rib of the composite type grid floor 6 to serve as the total height of the composite type grid floor 6, and the first to sixth ribs 61 to 66 are distributed in a left-right symmetrical manner (or in an up-down symmetrical manner as shown in fig. 6B) based on the seventh rib 67.

Furthermore, in the rib structure 6a, as shown in fig. 6C, the height h2 of the second rib 62 relative to the honeycomb side 60b is 45 mm, the height h4 of the fourth rib 64 relative to the honeycomb side 60b is 35 mm, the height h5 of the fifth rib 65 relative to the honeycomb side 60b is 35 mm, the height h7 of the seventh rib 67 relative to the honeycomb side 60b is 45 mm, the height h3 of the third rib 63 relative to the honeycomb side 60b is 17 mm, and the height h6 of the sixth rib 66 relative to the honeycomb side 60b is 17 mm. For example, since the height h2 of the second rib 62 with respect to the honeycomb side 60b is lower than the height h1 of the first rib 61 with respect to the honeycomb side 60b, the bottom of the first rib 61 is supported at the four feet of the integrated type grating floor 6 when the integrated type grating floor 6 is fixed to a foot stand for an elevated floor.

In addition, the widths d 1-d 7 of the ribs can be the same or different according to requirements, as shown in FIG. 6C. For example, the width d1 of the first rib 61 is 7 mm, the width d2 of the second rib 62 is 4mm, the width d3 of the third rib 63 is 3 mm, the width d4 of the fourth rib 64 is 3 mm, the width d5 of the fifth rib 65 is 3 mm, the width d6 of the sixth rib 66 is 3 mm, and the width d7 of the seventh rib 67 is 5 mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions where it extends, as desired. For example, the widths D1, D2, D7 of the local ribs can be adjusted, as shown in fig. 6D, the widths D1, D2, D7 of the first, second and seventh ribs 61,62, 67 on opposite sides of the honeycomb side 60b are smaller, wherein the width D1 of the first rib 61 is 6mm, the width D2 of the second rib 62 is 2.74mm and the width D7 of the seventh rib 67 is 4mm, which are respectively smaller than the widths D1, D2, D7 of the first, second and seventh ribs 61,62, 67 on the middle portion of the honeycomb side 60b shown in fig. 6C, so as to reduce the weight of the integrated grid floor 6, and the widths D3, D4, D5, D6 of the third, fourth, fifth and sixth ribs 63,64,65,66 are not changed.

In addition, the heights h0 and h8 (e.g., 13 mm) of the auxiliary ribs 67a and 68 relative to the honeycomb side 60b are lower than the height of the middle rib, and the width d8 is 3 mm, and a plurality of auxiliary ribs 67a and 68 are correspondingly formed in the recesses R and S and extend along a single direction without being staggered with each other, such that three parallel auxiliary ribs 67a and 68 are arranged in the single recess R and S shown in fig. 6C, so that each sub-region has four elongated through holes 600 with small hollow areas, thereby forming a ventilation amount of 48% or more. In addition, the recess S between the first and second ribs 61,62 may have only one perforation 600 (as shown in FIG. 6C) or two perforations 600 (as shown in FIG. 6D).

Therefore, the integrated grid floor 6 not only can increase the ventilation amount, but also can save materials and reduce weight and increase the bearing weight by the design of the through holes 600.

In addition, the heights h3 and h6 of the rib structures 6a are also smaller, that is, the heights h3 and h6 of the middle ribs (the third and sixth ribs 63 and 66) are much smaller than the heights h1, h2, h4, h5 and h7 of the main ribs (the first to second, fourth to fifth and seventh ribs 61 to 62,64 to 65 and 67), so as to save materials and reduce weight.

In summary, the integrated grid floor 1,2,3,4,5,6 of the present invention is integrally cast with the rib structures 1a,2a,3a,4a,5a,6a through the top plates 10,20,30,40,50,60, and the transverse ribs and the longitudinal ribs are arranged in the same manner and are symmetrical, so that the integrated grid floor 1,2,3,4,5,6 does not deform and is not easy to cause defects and fracture, compared with the prior art, the integrated grid floor 1,2,3,4,5,6 of the present invention has excellent reliability and is beneficial to improving yield and saving manufacturing cost.

Furthermore, the design of the through holes 100,200,300,400,500,600 can form more than 50% of ventilation volume, so that the ventilation volume can be increased, the requirement of higher air return volume in the periphery of semiconductor process equipment and a shower room can be met, and the cleanliness of the semiconductor process is improved.

In addition, the heights h1, h2, h4, h5, h7 of the main ribs of the rib structures 1a,2a,3a,4a,5a,6a relative to the honeycomb sides 10b,20b,30b,40b,50b,60b are at least 25 mm to improve the structural strength of the integrated grid floors 1,2,3,4,5,6, so that the integrated grid floors 1,2,3,4,5,6 can bear heavier machine equipment in a semiconductor process, and the problem that the integrated grid floors 1,2,3,4,5,6 are cracked in use is avoided. Furthermore, the height h 1-h 7 and the width d 1-d 7 of the ribs can be adjusted according to the load bearing capacity of the integrated grid floors 1,2,3,4,5,6, thereby saving the materials of the integrated grid floors 1,2,3,4,5,6 and reducing the weight.

In addition, the structural strength of the integrated type grating floor 1,2,3,4,5,6 can be further improved by the design of the auxiliary ribs 17a,18,27a,28,37a,38,47a,48,57a,58,67a, 68.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Those skilled in the art can modify the above embodiments without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be as set forth in the claims.

Claims (13)

1. A composite grid flooring, comprising:

an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to provide a ventilation amount of 48% or more or 50% or more; and

a plurality of rib structures, which are integrally cast with the antenna plate by aluminum alloy and are arranged on the honeycomb side of the antenna plate to form a plurality of recesses, so that each recess has three or four through holes, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna plate to the middle, the heights of the first rib, the second rib, the fourth rib, the fifth rib and the seventh rib relative to the honeycomb rib side are at least 25 mm to serve as main ribs, and the heights of the third rib and the sixth rib relative to the honeycomb side are lower than 25 mm to serve as middle ribs.

2. The integrated grid flooring of claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

3. The integrated grid floor of claim 1, wherein the first rib is formed at an edge of the ceiling to become a side rib of the integrated grid floor, serving as a rim of the integrated grid floor.

4. The integrated grid floor of claim 1, wherein the sum of the height of the first rib with respect to the honeycomb side and the thickness of the top plate is 50 to 59.5 mm, and the thickness of the top plate is 2 to 3 mm.

5. The integrated grid floor of claim 1, wherein the height of the second, fourth, fifth and seventh ribs relative to the honeycomb side is 35 to 52.5 mm, and the width of the second, fourth, fifth and seventh ribs is 3 to 5.5 mm.

6. The integrated grid floor of claim 1, wherein the height of the third and sixth ribs relative to the honeycomb side is 17 to 22 mm, and the width of the third and sixth ribs is 3 to 3.5 mm.

7. The integrated grid floor of claim 1, wherein the width of the first rib is 4.8 to 8 mm.

8. The integrated grid floor of claim 1, wherein the rib structure forms a # -shaped rib with two seventh ribs in longitudinal and transverse directions to divide the integrated grid floor into four regions, 25 sub-regions are formed between adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region has a recess, and another recess is formed at a central portion of the # -shaped rib formed by the seventh rib, and each sub-region has three elongated through holes to form ventilation of 48% or more or 50% or more, and a wing plate is formed around the ceiling plate to make a thickness of the wing plate larger than that of the ceiling plate.

9. The integrated grid floor of claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than the middle rib, and the plurality of auxiliary ribs are formed in the respective recesses, such that the plurality of auxiliary ribs are disposed in a single recess.

10. The integrated grid flooring of claim 9, wherein the auxiliary ribs have a height of 10 to 15 mm with respect to the honeycomb side and a width of 3 to 3.5 mm.

11. The integrated grid floor of claim 1, wherein the widths of the first, second and seventh ribs at opposite sides of the honeycomb side are respectively smaller than the widths of the first, second and seventh ribs at the middle of the honeycomb side to reduce the weight of the integrated grid floor.

12. The integrated grid floor of claim 1, wherein the first rib is used to support a foot stool to which the integrated grid floor is fixed.

13. The integrated grid floor of claim 1, wherein the first and second ribs have footstands formed at four corners of the integrated grid floor, the footstands being fixed to supporting footstands.

Images