CN218149483U - Light grid floor - Google Patents

Abstract

A light grid floor comprises a top plate and a rib structure, wherein the rib structure and the top plate are integrally cast by aluminum alloy, a plurality of through holes are formed in the top plate to form ventilation of over 56%, and therefore the requirement of semiconductor manufacturing process cleanliness can be met.

Description

Light grid floor

Technical Field

The present application relates to a floor, and more particularly, to a light-weight grid floor having a high ventilation rate.

Background

The existing elevated floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent, TWM596253 patent and the like, can be used for the ventilation floors of the process area besides the floor of the plant area of the semiconductor process, but the ventilation rate is less than twenty percent, and the requirement of the ventilation rate cannot be met.

However, the grid floor for the gutter cover is manufactured by welding, such as the TW536257 patent, which is easily deformed and easily generates defects and cracks during the welding process.

Furthermore, the air flow of the conventional grid floor is too small, so that the air return is insufficient, and the requirement of the cleanliness of the semiconductor manufacturing process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so that the grid floor is easily broken when heavy equipment in a semiconductor manufacturing process is carried on the grid floor.

On the other hand, the conventional grid floor also has the problem of overweight, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the above problems of the prior art has become a problem to be overcome in the industry.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned deficiencies of the prior art, the present application provides a lightweight grid floor that at least partially addresses the problems of the prior art.

The light-duty grid floor of this application includes: an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to provide a ventilation amount of 56% or more; and a plurality of rib structures which are cast integrally with the antenna plate by aluminum alloy and are arranged on the honeycomb side of the antenna plate to form a plurality of recesses, so that each recess is provided with two through holes, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna plate to the middle, the heights of the first rib, the fifth rib and the seventh rib relative to the honeycomb side are at least 25 mm to serve as main ribs, and the heights of the second rib, the third rib, the fourth rib and the sixth rib relative to the honeycomb side are lower than 25 mm to serve as middle ribs.

In the light-weight grid floor, the plurality of concave portions are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforementioned light-weight grille floor, the first rib is formed at the edge of the ceiling to become the edge rib of the light-weight grille floor, so as to serve as the frame of the light-weight grille floor.

In the aforementioned light-weight grille floor, the sum of the thickness of the first rib and the thickness of the top plate relative to the honeycomb side is 43mm, and the thickness of the top plate is 3mm.

In the aforementioned light-weight grating floor, the width of the first rib is 3 to 8mm.

In the light-weight grating floor, the height of the fifth rib and the seventh rib with respect to the honeycomb side is 30 to 34 mm.

In the aforementioned light grille floor, the width of the fifth rib and the seventh rib is 3 to 4.8mm.

In the aforementioned light grille floor, the height of the second rib, the third rib, the fourth rib and the sixth rib with respect to the honeycomb side is 16 to 24 mm.

In the light-weight grating floor, the widths of the second rib, the third rib, the fourth rib and the sixth rib are all 3mm.

In the light-weight grating floor, the rib structure forms a # -shaped rib by two seventh ribs in the longitudinal direction and the transverse direction to divide the light-weight grating floor into four regions, 25 sub-regions are formed between the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region has a recess, another recess is formed in the center of the # -shaped rib formed by the seventh rib, each sub-region has two strip-shaped through holes to form a ventilation amount of more than 56%, and a wing plate is formed around the ceiling plate, so that the thickness of the wing plate is larger than that of the ceiling plate.

In the aforementioned light grille floor, the rib structure further includes a plurality of auxiliary ribs having a height lower than that of the middle rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that a single auxiliary rib is disposed in a single recess. For example, the height of the auxiliary rib with respect to the honeycomb side is 10 to 11 mm, and the width is 3.2 mm.

In the aforementioned light-weight grille floor, the widths of the first rib and the seventh rib at the two opposite sides of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at the middle of the honeycomb side, so as to reduce the weight of the light-weight grille floor.

In the light grille floor, the first ribs form foot seats at four corners of the light grille floor, and the foot seats are fixed on the supporting foot frames.

Therefore, in the light-duty grid floor of this application, mainly adopt aluminum alloy integrated into one piece casting through this day board and these a plurality of rib structures to can not produce the deformation when making this light-duty grid floor, and difficult defect and fracture scheduling problem that produces, so compare prior art, the reliability on the light-duty grid floor of this application is splendid.

Furthermore, the design of the through holes can form more than 56% of ventilation volume, so that the ventilation volume can be increased to meet the requirement of the cleanness of the semiconductor process.

In addition, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm to improve the structural strength of the light grid floor, so compared with the prior art, the light grid floor can bear heavier equipment in a semiconductor manufacturing process to avoid the problem of cracking of the light grid floor in use.

Drawings

Fig. 1A is a perspective view of a lightweight grid floor of the present application.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view taken along line C-C of FIG. 1B.

FIG. 1D is a cross-sectional view taken along line D-D of FIG. 1B.

Fig. 1E is a perspective view of fig. 1A from another viewing angle.

Wherein the reference numerals are as follows:

1 light grid floor

1a Rib Structure

1b foot stool

1c thimble position

1d wing plate

10 day board

10a ground side

10b Honeycomb side

100 perforation

11 first Rib

12 second Rib

13 third Rib

14 fourth Rib

15 fifth Rib

16 sixth Rib

17 seventh Rib

17a,18 auxiliary Ribs

Width of d1 to d8

h 0-h 8 height

Length of L

R, S concave part

Sum of T

t0, t1 thickness

w distance of separation

Detailed Description

The following description of the embodiments of the present application is provided by way of specific examples, and other advantages and effects of the present application will be readily apparent to those skilled in the art from the disclosure herein.

It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for understanding and reading the contents disclosed in the specification, and are not used for limiting the conditions that the present application can implement, so the present invention has no technical significance, and any structural modification, ratio relationship change or size adjustment should still fall within the scope of the technical content disclosed in the present application without affecting the efficacy and the achievable purpose of the present application. In addition, the terms "upper", "lower", "left", "right" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present application, and changes or modifications in the relative relationship may be made without substantial technical changes.

Fig. 1A to 1E are schematic views of a light-weight grid floor 1 of the present application. The light-weight grid floor 1 of the present embodiment is used to carry a light load, which is about 500 kg.

The light grid floor 1 is provided with a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the rib structures 1a are integrally cast by aluminum alloy, the light grid floor 1 cannot be deformed and is not easy to generate defects, fracture and other problems when being manufactured.

The antenna panel 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with a plurality of rib structures 1a in the longitudinal and transverse directions, respectively, to form a plurality of recesses S between the longitudinal and transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a are arranged in the same manner as the longitudinal rib structures 1a to be symmetrical, so that the cross-section of the transverse rib structures 1a is omitted.

In the present embodiment, the top plate 10 is substantially rectangular, such as a square plate, the length L of the top plate is 600mm and the thickness t0 of the top plate is 3mm, a wing plate 1d (the thickness t1 of the wing plate is 4.5mm, which is greater than the thickness t0 of the top plate 10) is formed around the top plate 10, and feet 1b are formed at four corners of the top plate 10, the bottom of the base is L-shaped concave (or L-shaped convex), and the feet 1b of the light grille floor 1 are fixed on supporting feet (not shown). For example, the foot seats 1b are used to adjust the total height of the light-weight grating floor 1 so that a plurality of light-weight grating floors 1 are positioned at the same level when they are spliced.

Furthermore, the ground side 10a is a flat surface and the recesses S are arranged in an array to form a honeycomb structure having a plurality of pin locations 1c (approximately at the corners of a square area formed by every four recesses S) on the honeycomb side 10 b.

The rib structure 1a is defined by a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17 in sequence from the edge of the top plate 10 to the middle (or in the left-right lateral direction as shown in fig. 1C and fig. 1D), wherein the heights h1, h5 and h7 of the first, fifth and seventh ribs 11, 15 and 17 relative to the honeycomb side 10B are at least 25 millimeters (mm), and the heights h2, h3, h4 and h6 of the second, third, fourth and sixth ribs 12, 13, 14 and 16 relative to the honeycomb side 10B are lower than 25 mm, so that the first, fifth and seventh ribs 11, 15 and 17 are used as main ribs, and the second, third, fourth and sixth ribs 12, 13, 14 and 16 are used as middle ribs, wherein the first to sixth ribs 11 to 16 are distributed symmetrically left and right (as shown in fig. 1B) with the seventh rib 17 as a reference, and the distances between the fourth ribs 12, 13, 14 and 16 are symmetric about the seventh ribs 12, 13, and the sixth ribs 12 w as reference ribs, wherein the seventh ribs 11 to the seventh ribs 17 are distributed symmetrically as vertical distances between the sixth ribs 12, 13, 17, and the sixth ribs 12, 17.

In the present embodiment, the first rib 11 is formed at the edge of the ceiling 10 to become the edge rib of the light-weight grille floor 1, so as to serve as the frame of the light-weight grille floor 1 for fixing the foot seat 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 40mm, which is greater than the heights h 2-h 7 of the second to seventh ribs 12-17 relative to the honeycomb side 10b, and the sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 of the present embodiment is 43mm (i.e., T = h1+ T0), and the pedestal 1b is flush with the end surface of the first rib 11, so that the total height of the pedestal 1b, the height h1 of the first rib 11 relative to the honeycomb side 10b, and the thickness T0 of the antenna board 10 (i.e., the height of the light weight grille floor 1) is 43mm.

Furthermore, the heights h 2-h 7 of the second to seventh ribs 12-17 of the rib structure 1a may be the same or different according to the requirement, and the arrangement of the second to seventh ribs 12-17 between the first rib 11 and the middle recesses R, S is shown in fig. 1C. For example, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 30mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 34mm, the height h2 of the second rib 12 relative to the honeycomb side 10b is 16mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 24mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 16mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 16mm, wherein two seventh ribs 17 in the longitudinal and transverse directions form a cross shape to divide the lightweight louver floor 1 into four regions, 25 sub-regions are formed between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15, and the sixth rib 16 adjacent to each region, each sub-region has a recess S, and a recess R of another embodiment is formed at the central portion of the cross shape rib. Further, the thickness of the ceiling 10 in the recess R may be increased as required or the same as the thickness t0 of the ceiling 10, and an auxiliary rib 17a is provided in the recess R to improve the compression strength of the light-weight grating floor 1 at the center. For example, since the height h2 of the second rib 12 with respect to the honeycomb side 10b is lower than the height h1 of the first rib 11 with respect to the honeycomb side 10b, when the light weight grating floor 1 is fixed to a foot rest for an elevated floor, the four feet of the light weight grating floor 1 are supported by the bottom of the first rib 11.

In addition, the widths d 1-d 7 of the ribs may be the same or different as required, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7 to 8mm (e.g., 7.5 mm), the width d2 of the second rib 12 is 3mm, the width d3 of the third rib 13 is 3mm, the width d4 of the fourth rib 14 is 3mm, the width d5 of the fifth rib 15 is 3mm, the width d6 of the sixth rib 16 is 3mm, and the width d7 of the seventh rib 17 is 4.8mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions where it extends, as desired. For example, the widths D1, D5, D7 of the local ribs may be adjusted, and the widths D1, D7 of the first rib 11 and the seventh rib 17 at two opposite sides of the honeycomb side 10b shown in fig. 1D are smaller, wherein the width D1 of the first rib 11 is 3.5mm, the width D7 of the seventh rib 17 is 4.26mm, and are respectively smaller than the widths D1, D7 of the first rib 11 and the seventh rib 17 at the middle of the honeycomb side 10b shown in fig. 1C, so as to reduce the weight of the light weight grating floor 1; alternatively, the width d5 of the fifth ribs 15 is larger, and the width d5 of the fifth ribs 15 is 3.15mm, which is slightly larger than the width d5 of the fifth ribs 15 at the middle part of the honeycomb side 10b shown in fig. 1C. The widths d2, d3, d4, d6 of the second, third, fourth and sixth ribs 12, 13, 14, 16 are constant.

In addition, a plurality of auxiliary ribs 17a and 18 having a volume much smaller than that of other ribs may be added to the rib structure 1a as required, as shown in fig. 1C, heights h0 and h8 (e.g., 10 mm) of the auxiliary ribs relative to the honeycomb side 10b are lower than heights h2, h3, h4 and h6 of the middle rib relative to the honeycomb side 10b, and a width d8 of the auxiliary ribs is 3.2 mm. For example, the auxiliary ribs 17a,18 are formed in the respective recesses R, S and extend in a single direction without being staggered with each other, and one auxiliary rib 17a,18 is disposed in the single recess R, S as shown in fig. 1C. Further, the height h8 of the auxiliary rib 18 in the concave portion S can be adjusted as required, such as 11 mm shown in fig. 1D.

Furthermore, the light-weight grid floor 1 forms a plurality of through holes 100 communicating the ground side 10a and the honeycomb side 10b on the ceiling 10, and the honeycomb side 10b is divided into four regions (four corner regions) by the seventh ribs 17 (the vertical and horizontal two seventh ribs 17 form a cross-shaped rib), each region forms 25 sub-regions (corresponding to the position of the recess S), and the cross-shaped ribs extend outward (cross region), 21 other sub-regions (corresponding to the positions of the recesses R and S) can be separated by the ribs (the second ribs 12, the third ribs 13, the fourth ribs 14, the fifth ribs 15 and the sixth ribs 16), so that each sub-region has two strip-shaped through holes 100 with more hollow areas to form ventilation volume of more than 56%.

In the present embodiment, the through holes 100 are disposed corresponding to the recesses R and S. For example, two through holes 100 are formed in each of the recesses R and S, and the two through holes 100 are spaced side by side, and the auxiliary ribs 17a and 18 separate the through holes 100. In addition, the recess S between the first and second ribs 11, 12 has only one through-hole 100, i.e. no auxiliary rib 18 is provided.

Therefore, the light-weight grid floor 1 not only can increase ventilation, but also can save materials and reduce weight and increase bearing weight by the design of the through holes 100.

In addition, the thickness t0 of the ceiling 10 of the light-weight grille floor 1 is smaller, and the heights h2, h3, h4, h6 of most of the rib structures 1a are also smaller, i.e., the heights h2, h3, h4, h6 of the middle ribs (second, third, fourth and sixth ribs 12, 13, 14, 16) are smaller than the heights h1, h5, h7 of the main ribs (first rib 11, fifth rib 15 and seventh rib 17), so as to save materials and reduce weight.

To sum up, light-duty grid floor 1 of this application adopts aluminum alloy integrated into one piece casting with these a plurality of rib structures 1a mainly through this day board 10, and horizontal rib is the same and be the symmetry formula with the arrangement mode of vertical rib to can not produce the deformation when making this light-duty grid floor 1, and difficult defect and fracture scheduling problem of producing, so compare prior art, light-duty grid floor 1 of this application not only the reliability is splendid, and is favorable to promoting the yield and saves the cost of manufacture.

Furthermore, the design of the through hole 100 can form more than 56% of ventilation volume, thus increasing the ventilation volume, meeting the requirement of higher air return volume around the semiconductor processing equipment and in a shower room, and improving the cleanliness of the semiconductor processing.

In addition, the heights h1, h5, h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b are at least 25 mm to improve the structural strength of the light grille floor 1, so that the light grille floor 1 can bear heavy equipment in a semiconductor manufacturing process to avoid the problem of cracking of the light grille floor 1 in use. Furthermore, the height h 1-h 7 and the width d 1-d 7 of the ribs are adjusted according to the load of the light grille floor 1, thereby saving the material of the light grille floor 1 and reducing the weight.

In addition, the structural strength of the light-weight grid floor 1 can be further improved by the design of the auxiliary ribs 17a, 18.

The above embodiments are provided merely for illustrating the principles and efficacy of the present application and are not intended to limit the present application. Any person skilled in the art can modify the above-described embodiments without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application should be as set forth in the claims.

Claims (12)

1. A lightweight grid flooring, comprising:

an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to provide a ventilation amount of 56% or more; and

a plurality of rib structures, which are cast integrally with the top plate by aluminum alloy, and a plurality of recesses are formed on the honeycomb side of the top plate, so that each recess has two through holes, wherein the rib structure is defined by a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the top plate to the middle in sequence, the height of the first rib, the height of the fifth rib and the height of the seventh rib relative to the honeycomb side are at least 25 mm to serve as main ribs, and the height of the second rib, the third rib, the height of the fourth rib and the height of the sixth rib relative to the honeycomb side are lower than 25 mm to serve as middle ribs.

2. The light-weight grid floor of claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

3. The light-weight grill floor of claim 1, wherein the first rib is formed at the edge of the ceiling to become a side rib of the light-weight grill floor, serving as a rim of the light-weight grill floor.

4. The light-weight grid floor of claim 1, wherein the sum of the height of the first rib with respect to the honeycomb side and the thickness of the top plate is 43mm, and the thickness of the top plate is 3mm.

5. The light-weight grid floor of claim 1, wherein the width of the first ribs is 3 to 8mm.

6. The light-weight grid floor of claim 1, wherein the height of the fifth and seventh ribs relative to the honeycomb side is 30 to 34mm, and the width of the fifth and seventh ribs relative to the honeycomb side is 3 to 4.8mm.

7. The light-weight grill floor of claim 1, wherein the height of the second, third, fourth and sixth ribs relative to the honeycomb side is 16 to 24mm, and the width of the second, third, fourth and sixth ribs is 3mm.

8. The light-weight grill floor according to claim 1, wherein the rib structure forms a # -shaped rib with two seventh ribs in longitudinal and transverse directions to divide the light-weight grill floor into four regions, 25 sub-regions are formed among the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each of the sub-regions has a concave portion, another concave portion is formed at a central portion of the # -shaped rib formed by the seventh rib, and each of the sub-regions has two elongated through holes to form a ventilation amount of more than 56%, and a wing plate is formed around the ceiling plate so that a thickness of the wing plate is larger than that of the ceiling plate.

9. The light-weight grill floor of claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than the middle rib, and each of the auxiliary ribs is formed in each of the recesses, so that a single auxiliary rib is disposed in a single recess.

10. The light-weight grid floor of claim 9, wherein the height of the auxiliary ribs with respect to the honeycomb side is 10 to 11 mm and the width is 3.2 mm.

11. The light-weight grill floor of claim 1, wherein the widths of the first rib and the seventh rib at opposite side portions of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at a middle portion of the honeycomb side, so as to reduce the weight of the light-weight grill floor.

12. The light-weight grating floor of claim 1, wherein the first ribs are formed with foot seats at four corners of the light-weight grating floor, the foot seats being fixed to supporting legs.

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