TWI805483B - Special grille floor - Google Patents

Abstract

A special grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 50% ventilation. Therefore, the heavy grille floor can meet the needs of cleanliness of semiconductor process.

Description

Special grid floor

The present invention relates to a floor, especially a special grid floor with high ventilation rate.

Known elevated floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, etc., except for semiconductor It can also be used outside the floor of the factory floor of the manufacturing process The ventilated floor in the process area, but its ventilation rate is less than 20%, which cannot meet the demand for ventilation rate.

However, the grid floor used for the gutter cover is currently manufactured by welding, such as the TW536257 patent, which is prone to deformation, defects and fractures during the welding forming process.

Furthermore, the ventilation rate of the existing grid floor is too small, so that the return air volume is not enough, so that the cleanliness requirement of the semiconductor manufacturing process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so when the grid floor carries heavy equipment in the semiconductor manufacturing process, the grid floor is prone to cracking.

On the other hand, the existing grid floor also has the problem of being too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the various problems of the above-mentioned conventional technologies has become a difficult problem to be overcome urgently in the industry at present.

In view of the various deficiencies of the above-mentioned conventional technologies, the present invention provides a special grid floor, which includes: a top plate with opposite ground sides and honeycomb sides, wherein a plurality of holes connecting the ground side and the honeycomb side are formed on the top plate. perforation to form more than 60% of ventilation; and multiple rib structures, which are integrally molded and cast with the top plate using aluminum alloy, and are set on the honeycomb side of the top plate to form multiple recesses, so that each There are two perforations in the concave portion, wherein, the rib structure is defined in sequence from the edge of the top plate to the middle with a first rib, a second rib, a third rib, a fourth rib, a fifth rib and a sixth rib, and the height of the first rib, second rib, fourth rib and sixth rib relative to the side of the hive is at least 25 mm to serve as main ribs, and the height of the third rib and fifth rib relative to the side of the hive The height is less than 25 mm to serve as the middle rib.

In the aforementioned special grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb.

In the above-mentioned special grid floor, the first rib is formed on the edge of the top plate to become the side rib of the special grid floor, which is used as the frame of the special grid floor for fixing the feet.

In the above-mentioned special grid floor, the height of the first rib relative to the honeycomb side is 30.5 mm, and the height sum of the first rib and the top plate is 33.5 mm, and the thickness of the top plate is 3 mm.

In the aforementioned special grid floor, the height of the second rib, the fourth rib and the sixth rib relative to the side of the honeycomb is 25 to 30.5 mm.

In the aforementioned special grid floor, the height of the third rib and the fifth rib relative to the side of the honeycomb is 15 to 18 mm.

In the aforementioned special grid floor, the width of the first rib is 4 to 7 mm.

In the aforementioned special grid floor, the width of the second rib, the fourth rib and the sixth rib is 3 to 8 mm.

In the aforementioned special grid floor, the width of the third rib and the fifth rib is 3 to 3.2 mm.

In the above-mentioned special grid floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the recesses, so that a single auxiliary rib is arranged in a single recess . For example, the plurality of auxiliary ribs extend along a single direction without interlacing each other. Alternatively, the height of the auxiliary rib relative to the side of the honeycomb is at least 8 mm, and its width is 3 to 3.2 mm.

In the aforementioned special grid floor, the rib structure is longitudinally and horizontally connected with two sixth ribs to form a well-shaped rib, so as to divide the special grid floor into four areas, and the adjacent four areas 16 sub-regions are formed between the second rib, third rib, fourth rib and fifth rib, and each sub-region has a concave part. The first to fifth ribs are based on the well-shaped rib Symmetrical distribution, and another recess formed in the central part of the well-shaped rib formed by the sixth rib, in which an auxiliary rib is arranged, and a wing plate is formed around the top plate, so that the height of the auxiliary rib and The thickness of the wing plate is greater than that of the top plate, so as to improve the strength of the special grid floor in the middle.

In the above-mentioned special grid floor, 17 other sub-regions are separated in the well-shaped ribs by the second rib, the third rib, the fourth rib and the fifth rib, and there are two sub-regions in each sub-region. The perforation is used to form more than 60% of the ventilation.

In the above-mentioned special grid floor, the rib structure forms a cross-shaped rib with one sixth rib in the longitudinal and transverse directions, so as to divide the special grid floor into four areas, and the adjacent sixth rib in the four areas 16 sub-regions are formed between the second rib, the third rib, the fourth rib and the fifth rib, each of which has a concave portion, and the first to fifth ribs are symmetrically distributed based on the well-shaped rib , and the thimble position is formed in the central part of the well-shaped rib formed by the sixth rib.

In the aforesaid special grid floor, the first rib is used to support the foot frame on which the special grid floor is fixed.

In the aforementioned special grid floor, the first rib and the second rib are connected to four corners of the special grid floor to form feet, and the feet are fixed on the supporting legs.

It can be seen from the above that in the special grid floor of the present invention, the top plate and the plurality of rib structures are integrally cast with aluminum alloy, so that no deformation will occur when the special grid floor is manufactured, and defects and defects are not easy to occur. Therefore, compared with the conventional technology, the reliability of the special grid floor of the present invention is excellent.

Furthermore, through the design of these perforations, more than 60% of the ventilation rate can be formed, so the ventilation rate can be increased to meet the cleanliness requirements of the semiconductor manufacturing process.

Moreover, the height of the main ribs of the rib structure relative to the side of the honeycomb is at least 25 mm to enhance the structural strength of the special grid floor, so compared with the prior art, the special grid floor can withstand Heavy machine equipment in the semiconductor manufacturing process to avoid the problem of cracking of the special grid floor during use.

The implementation of the present invention is described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for the understanding and reading of those familiar with this technology, and are not used to limit the implementation of the present invention Therefore, it has no technical substantive meaning. Any modification of structure, change of proportional relationship or adjustment of size shall still fall within the scope of this invention without affecting the effect and purpose of the present invention. The technical content disclosed by the invention must be within the scope covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the implementation of the present invention. Changes or adjustments in the scope, and their relative relationships, without substantial changes in the technical content, should also be regarded as the scope of the present invention that can be implemented.

1A to 1E are schematic views of the first embodiment of the special grid floor 1 of the present invention. The special specification grid floor 1 of the present embodiment is used for bearing heavier loads, and its bearing load is about 500 kilograms.

The special grid floor 1 has a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally cast with aluminum alloy for production. The special grid floor 1 will not be deformed during operation, and problems such as defects and fractures will not easily occur.

Said top plate 10 has opposite ground side 10a and honeycomb side 10b, and said honeycomb side 10b is respectively provided with said rib structure 1a on longitudinal and transverse direction, so as to form between said longitudinal and transverse rib structure 1a The plurality of recesses S, wherein, Fig. 1C and Fig. 1D only show the longitudinal rib structure 1a, and the horizontal rib structure 1a is arranged in the same manner as the longitudinal rib structure 1a to be symmetrical, so the section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, its length L is 500mm (or 450mm) and its thickness t0 is 3mm, and a wing plate 1d is formed around the top plate 10 (its thickness t1 is 6mm, which is greater than the thickness t0 of the top plate 10), and there are feet 1b formed on the four corners of the special grid floor 1, the bottom of which is L-shaped convex (or L-shaped Concave shape), the feet 1b are respectively fixed on the four supporting tripods (figure omitted). For example, the foot 1 b is used to adjust the total height H of the special grid floor 1 , so that a plurality of special grid floors 1 can be located at the same level when spliced.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a plurality of thimble positions 1c (approximately in a square area formed by every four recesses S) on the honeycomb side 10b. The corner of the above) honeycomb structure.

The rib structure 1a is defined in sequence from the edge of the top plate 10 to the middle (or from the left and right sides to the middle as shown in Figure 1B and Figure 1C ) with a first rib 11, a second rib 12, and a third rib 13. The fourth rib 14, the fifth rib 15 and the sixth rib 16, and the heights h1-h2 of the first to second, fourth and sixth ribs 11-12, 14, 16 relative to the honeycomb side 10b, h4, h6 are at least 25 millimeters (㎜), and the height h3, h5 of the third and fifth ribs 13, 15 relative to the honeycomb side 10b is less than 25 millimeters, so the first to second, The fourth and sixth ribs 11~12,14,16 are the main ribs, and the third and fifth ribs 13,15 are the middle ribs, wherein the first to fifth ribs 11~15 are the sixth The ribs 16 are distributed symmetrically (or up and down as shown in FIG. 1B ) as a reference, so that the interval between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16 The distance w is 48 mm.

In this embodiment, the first ribs 11 are formed on the edge of the top plate 10 to become the side ribs of the special grid floor 1, and serve as the frame of the special grid floor 1 for fixing the feet 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 30.5 mm (equal to the height h6 of the sixth rib 16 relative to the honeycomb side 10b), which are greater than the relative height of the second to fifth ribs 12-15 The height h2~h5 on the honeycomb side 10b, and the sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b of this embodiment and the thickness t0 of the top plate 10 is 33.5 mm (ie T=h1+t0 ), and the total height H of the height of the foot seat 1b, the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 is the foot height of the special grid floor 1, which is 38mm .

Moreover, the heights h2-h6 of the second to sixth ribs of the rib structure 1a can be the same or different according to requirements, and the main ribs between the first rib 11 and the recess R and S in the middle (that is, the first rib 11 The arrangement of the second to sixth ribs (12~16) is shown in Figure 1C. For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 29mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 25mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 30.5㎜, the heights h3 and h5 of the third and fifth ribs 13 and 15 relative to the honeycomb side 10b are both 15㎜, and the two sixth ribs 16 in the longitudinal and transverse directions form a well-shaped rib to The special grid floor 1 is divided into four areas, and 16 sub-areas are formed between the second rib 12, the third rib 13, the fourth rib 14 and the fifth rib 15 adjacent to each area, and each sub-area has a recess S, and form another kind of recess R in the central part of the well-shaped rib. Further, the thickness of the top plate 10 in the recess R can be greater than the thickness t0 of the top plate 10 in other places or the same as the thickness t0 of the top plate 10 according to requirements, and a single auxiliary rib 17a is arranged in the recess R to Improve the compressive strength of the special grid floor 1 in the middle. For example, because the height h2 of the second rib 12 relative to the honeycomb side 10b is lower than the height h1 of the first rib 11 relative to the honeycomb side 10b, when the special grid floor 1 is fixed on a stand for an elevated floor, The bottoms of the first ribs 11 are used as supports for the four feet of the special grid floor 1 .

Also, the widths d1-d6 of the ribs can be the same (such as the third to fifth ribs 13-15) or different according to requirements, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7 mm, the width d2 of the second rib 12 is 3.6 mm, the width d3 of the third rib 13 is 3 mm, the width d4 of the fourth rib 14 is 3 mm, and the width d4 of the fifth rib 15 The width d5 of the sixth rib 16 is 3mm, and the width d6 of the sixth rib 16 is 3.6mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the width d1 of the local ribs can be adjusted. The width d1 of the first rib 11 on the opposite sides of the honeycomb side 10b as shown in FIG. 1D is relatively small, wherein the width d1 of the first rib 11 is 4 mm. , is less than the width d1 of the first rib 11 of the middle part of the honeycomb side 10b shown in Figure 1C, to reduce the weight of the special grid floor 1, and the second, third, fourth, fifth and sixth The widths d2, d3, d4, d5, d6 of the ribs 12, 13, 14, 15, 16 remain unchanged.

In addition, the rib structure 1a can add a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than other ribs, as shown in Figure 1C, the height h0, h8 (such as 8 mm) of the rib structure 1a relative to the honeycomb side 10b is lower than the The height h3, h5 of the middle rib relative to the honeycomb side 10b, and its width d8 is 3mm. For example, the auxiliary ribs 17a, 18 are correspondingly formed in each of the recesses R, S, and extend along a single direction. A single auxiliary rib 17a, 18 is configured in a single recess R, S as shown in FIG. 1C.

Further, the special grid floor 1 forms a plurality of perforations 100 connecting the ground side 10a and the honeycomb side 10b on the top plate 10, and is formed by the sixth rib 16 (two sixth ribs 16 in the longitudinal and transverse directions) Well-shaped ribs) divide the honeycomb side 10b into four areas (four corner areas), and each area forms 16 sub-areas (corresponding to the position of the concave part S), and the outward extension of the well-shaped ribs (cross area ), through these ribs (the second rib 12, the third rib 13, the fourth rib 14 and the fifth rib 15), 17 other sub-regions (corresponding to the position of the recess R, S) can be separated, so that Each sub-region has two elongated perforations 100 to form a ventilation rate of more than 60%.

In this embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R, S. For example, two perforations 100 are formed on each recess R, S, and the two perforations 100 are spaced side by side, and each row of perforations 100 is separated by the auxiliary ribs 17a, 18; in addition, the first and second ribs The recess S between 11 , 12 has only one perforation 100 , ie no auxiliary rib 18 is provided.

Therefore, through the design of the perforation 100, the special grid floor 1 can not only increase the ventilation volume, but also help to save material and reduce weight, and can also increase the bearing weight.

Also, the thickness t0 of the top plate 10 of the special grid floor 1 is small, and the partial heights h3 and h5 of the rib structure 1a are also small, that is, the height of the middle ribs (third and fifth ribs 13, 15) h3, h5 are much smaller than the height h1, h2, h4, h6 of the main ribs (the first, second, fourth and sixth ribs 11, 12, 14, 16), so as to save material and reduce weight.

2A to 2E are schematic views of the second embodiment of the special grid floor 2 of the present invention. The bearing load of the special grid floor 2 of this embodiment is greater than 500 kilograms, and its difference from the first embodiment lies in the change of the local height of the rib structure 2a, so the same parts will not be repeated below.

As shown in Fig. 2A to Fig. 2E, the single sixth rib 26 in the vertical and horizontal directions forms a cross-shaped rib, so that the special grid floor 1 is divided into four regions, and the second rib 22, the second rib 22 adjacent to each region, Sixteen sub-regions are formed between the third rib 23, the fourth rib 24 and the fifth rib 25, each sub-region has a recess S, and a thimble position 2c is formed at the center of the cross-shaped rib.

In this embodiment, the thickness t0 of the top plate 20 is 3mm, the height h1 of the first rib 21 relative to the honeycomb side 20b is 30.5mm, and the height h1 of the first rib 21 relative to the honeycomb side 20b The sum T of the thickness t0 of the top plate 20 is 33.5mm, and the total height H of the height of the foot 2b, the height h1 of the first rib 21 relative to the honeycomb side 20b and the thickness t0 of the top plate 20 is 38㎜, wherein, the thickness t1 of the wing plate 2d is 6㎜, the first rib 21 is formed on the edge of the top plate 20 to become the side rib of the special grid floor 2, as the edge of the special grid floor 2 frame, and the first to fifth ribs 21-25 are distributed symmetrically (or symmetrically up and down as shown in FIG. 2B ) based on the sixth rib 26 .

Furthermore, in the rib structure 2a, as shown in FIG. 2C, the height h2 of the second rib 22 relative to the honeycomb side 20b is 30.5 mm, the height h4 of the fourth rib 24 relative to the honeycomb side 20b is 26 mm, and the height h4 of the fourth rib 24 relative to the honeycomb side 20b is 26 mm. The height h6 of the six ribs 26 relative to the honeycomb side 20b is 30.5 mm, and the heights h3 and h5 of the third and fifth ribs 23 and 25 relative to the honeycomb side 20b are both 18 mm. For example, because the height h2 of the second rib 22 relative to the honeycomb side 20b is equal to the height h1 of the first rib 21 relative to the honeycomb side 20b, when the special grid floor 2 is fixed on a stand for a raised floor, the The bottoms of the first rib 21 and the second rib 22 are used as supports for the four feet of the special grid floor 2 .

Moreover, the widths d1~d6 of the ribs can be the same or different according to requirements, as shown in FIG. 2C. For example, the width d1 of the first rib 21 is 7 mm, the width d2 of the second rib 22 is 4 mm, the width d3 of the third rib 23 is 3.2 mm, the width d4 of the fourth rib 24 is 3.6 mm, and the width d4 of the fifth rib 25 The width d5 of the sixth rib 26 is 3.2 mm, and the width d6 of the sixth rib 26 is 8 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1, d2, and d6 of partial ribs can be adjusted, such as the widths d1, d2 of the first, second, and sixth ribs 21, 22, and 26 on the opposite sides of the honeycomb side 20b as shown in FIG. 2D , d6 is smaller, wherein, the width d1 of the first rib 21 is 5.24mm, the width d2 of the second rib 22 is 3.2mm, and the width d6 of the sixth rib 26 is 6.91mm, which are smaller than those shown in Fig. 2C respectively The widths d1, d2, and d6 of the first rib 21, the second rib 22, and the sixth rib 26 in the middle of the honeycomb side 20b are used to reduce the weight of the special grid floor 2, while the third, fourth, and sixth ribs The widths d3, d4, and d5 of the five ribs 13, 14, and 15 remain unchanged.

In addition, the height h8 of the auxiliary rib 28 relative to the honeycomb side 20b is lower than the height of the middle rib, and its width d8 is 3.2 mm, and these auxiliary ribs 28 are formed correspondingly in each of the recesses S, as shown in Figure 2C The single recess S shown is configured with an auxiliary rib 28 so that each sub-region has two elongated perforations 200 to form a ventilation rate of more than 60%. In this embodiment, the recess S between the first and second ribs 21 , 22 has only one through hole 200 (as shown in FIG. 2C ), that is, no auxiliary rib 18 is provided.

Therefore, through the design of the perforation 200, the special grid floor 2 can not only increase the ventilation volume, but also help save materials and reduce weight, and can also increase the bearing weight.

Also, the partial heights h3 and h5 of the rib structure 2a are also smaller, that is, the height h3 and h5 of the middle ribs (the third and fifth ribs 23, 25) are higher than that of the main ribs (the first, second, fourth and third ribs). The heights h1, h2, h4, and h6 of the six ribs (21, 22, 24, 26) are much smaller, so as to save material and reduce weight.

To sum up, the special grid floor 1, 2 of the present invention is mainly formed by integral casting of the top plate 10, 20 and the plurality of rib structures 1a, 2a using aluminum alloy, and the arrangement of the transverse ribs and the longitudinal ribs is the same. It is symmetrical, so that it will not deform when making the special grid floor 1, 2, and it is not easy to cause problems such as defects and fractures. Therefore, compared with the conventional technology, the special grid floor 1, 2 of the present invention is not only reliable Excellent performance, and it is beneficial to improve the yield rate and save the production cost.

Furthermore, through the design of the perforations 100,200, more than 60% of the ventilation volume can be formed, so the ventilation volume can be increased, which can meet the demand for higher return air volume around the semiconductor process equipment and the shower room, so as to improve the efficiency of the semiconductor process. cleanliness.

Also, the heights h1, h2, h4, h6 of the main ribs of the rib structures 1a, 2a relative to the honeycomb sides 10b, 20b are all at least 25 mm, so as to enhance the structural strength of the special grid floor 1, 2 , so the special grid floor 1, 2 can bear the heavier machine equipment in the semiconductor manufacturing process, so as to avoid the problem that the special grid floor 1, 2 breaks during use. Further, the height h1~h6 and the width d1~d6 of the ribs are adjusted according to the bearing load of the special grid floor 1, 2, thereby saving the material and weight of the special grid floor 1, 2.

In addition, through the design of the auxiliary ribs 17a, 18, 28, the structural strength of the special grid floor 1, 2 can be further improved.

The above-mentioned embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Any person skilled in the art can modify the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of the patent application described later.

1,2:Special grid floor 1a, 2a: Rib structure 1b, 2b: feet 1c, 2c: thimble position 1d, 2d: wing plate 10,20: top plate 10a, 20a: ground side 10b,20b: Honeycomb side 100,200: perforation 11,21: First rib 12,22: Second rib 13,23: Third rib 14,24: Fourth rib 15,25: Fifth rib 16,26: Sixth rib 17a,18,28: Auxiliary ribs d1~d6,d8: width H: total height h0~h6, h8: height L: Length R, S: concave part T: sum t0, t1: thickness w: interval distance

FIG. 1A is a schematic perspective view of the first embodiment of the special grid floor of the present invention.

FIG. 1B is a front plan view of FIG. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B along line C-C in one of the directions.

FIG. 1D is a cross-sectional view of FIG. 1B along a line D-D in one of the directions.

FIG. 1E is a three-dimensional schematic diagram of another viewing angle of FIG. 1A .

Fig. 2A is a schematic perspective view of the second embodiment of the special grid floor of the present invention.

FIG. 2B is a front plan view of FIG. 2A.

FIG. 2C is a cross-sectional view along line C-C of FIG. 2B along one of the directions.

FIG. 2D is a cross-sectional view of FIG. 2B along a line D-D in one of the directions.

FIG. 2E is a three-dimensional schematic diagram of another viewing angle of FIG. 2A .

1:Special grid floor

1a: Rib structure

1b: foot seat

1d: wing plate

10:Top plate

10a: Ground side

10b: Honeycomb side

100: perforation

11: First rib

12: Second rib

13: Third rib

14: Fourth rib

15: Fifth rib

16: Sixth rib

17a,18: Auxiliary ribs

H: total height

h0~h6, h8: height

d1~d6,d8: width

T: sum

t0, t1: thickness

R, S: concave part

Claims (17)

A special grid floor, including: The top plate has opposite ground side and honeycomb side, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate to form more than 60% of the ventilation rate; and A plurality of rib structures are integrally molded and cast with the top plate using aluminum alloy, and are arranged on the honeycomb side of the top plate to form a plurality of recesses, so that each recess has two perforations, wherein the rib structure The first rib, the second rib, the third rib, the fourth rib, the fifth rib, and the sixth rib are defined in sequence from the edge of the top plate to the middle, and the first rib, the second rib, and the fourth rib and the height of the sixth rib relative to the side of the hive is at least 25 mm to serve as the main rib, and the height of the third and fifth ribs relative to the side of the hive is less than 25 mm to serve as the middle rib . The special grid floor according to claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb. The special grid floor according to claim 1, wherein the first rib is formed on the edge of the top plate to become the side rib of the special grid floor, and serves as a frame of the special grid floor. The special grid floor as described in Claim 1, wherein the height of the first rib relative to the side of the honeycomb is 30.5 mm, and the sum of the heights of the first rib and the top plate is 33.5 mm, and the The thickness of the top plate is 3mm. The special grid floor according to claim 1, wherein the height of the second rib, the fourth rib and the sixth rib relative to the side of the honeycomb is 25 to 30.5 mm. The special grid floor according to claim 1, wherein the height of the third rib and the fifth rib relative to the side of the honeycomb is 15 to 18 mm. The special grid floor as claimed in claim 1, wherein the width of the first rib is 4 to 7 mm. The special grid floor as described in Claim 1, wherein the width of the second rib, the fourth rib and the sixth rib is 3 to 8 mm. The special grid floor as described in Claim 1, wherein the width of the third rib and the fifth rib is 3 to 3.2 mm. The special grid floor according to claim 1, wherein the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the recesses, so that a single recess A single auxiliary rib is configured. The special grid floor according to claim 10, wherein the plurality of auxiliary ribs extend along a single direction without interlacing each other. The special grid floor according to claim 10, wherein the height of the auxiliary rib relative to the side of the honeycomb is at least 8 mm, and the width thereof is 3 to 3.2 mm. The special grid floor according to claim 1, wherein, the rib structure forms a well-shaped rib with two sixth ribs in the longitudinal and transverse directions, so as to divide the special grid floor into four regions, the 16 subregions are formed between the adjacent second ribs, third ribs, fourth ribs and fifth ribs in the four regions, and each of the subregions has a recess, and the first to fifth ribs are connected with the The well-shaped ribs are distributed symmetrically on the basis, and another concave part is formed in the central part of the well-shaped ribs formed by the sixth rib, in which auxiliary ribs are arranged, and a wing plate is formed around the top plate, so that The height of the auxiliary rib and the thickness of the wing plate are greater than the thickness of the top plate, so as to improve the strength of the special grid floor in the middle. The special grid floor as described in claim 13, wherein, 17 other sub-regions are separated by the second rib, the third rib, the fourth rib and the fifth rib in the well-shaped rib, and each of the There are two perforations in each sub-region to form a ventilation rate of more than 60%. The special grid floor as described in claim 13, wherein, the rib structure forms a cross-shaped rib with a sixth rib in the longitudinal and horizontal directions, so as to divide the special grid floor into four areas, and the four Between the second rib, the third rib, the fourth rib and the fifth rib adjacent in the area, 16 sub-areas are formed, and each of the sub-areas has a concave portion. The ribs are distributed symmetrically, and the thimble position is formed in the center of the well-shaped ribs formed by the sixth rib. The special grid floor according to claim 1, wherein the first rib is used to support the foot frame on which the special grid floor is fixed. The special grid floor as claimed in claim 1, wherein the first rib and the second rib are connected to four corners of the special grid floor to form feet, and the feet are fixed on the supporting legs.

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