TWM625267U - Standard raised floor - Google Patents

Abstract

A raised floor includes a top plate and a rib structure, wherein the rib structure has a plurality of main ribs with a height of at least 25 mm formed on the top plate to enhance the structural strength of the raised floor. Therefore, when the raised floor carries the heavier equipment in the semiconductor manufacturing process, the problem of the raised floor cracking can be avoided.

Description

Standard Raised Floor

This work relates to a floor structure, especially a standard raised floor with a rib structure.

At present, semiconductor factories are equipped with raised floors with multiple micro-perforations to purify the air quality of the environment and ensure the specifications of clean rooms.

At present, the raised floor is made by die casting. In the die-casting process, the desired product is often produced by a die, and before the die-casting process, a release layer is applied to the die to facilitate subsequent demoulding operations.

However, the structural strength of the conventional raised floor is often insufficient, so when the raised floor carries heavy equipment in the semiconductor process, the raised floor is prone to breakage. On the other hand, there is also the problem that the raised floor is too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the above-mentioned problems of the prior art has actually become an urgent problem to be overcome in the current industry.

In view of the above-mentioned deficiencies in the prior art, the present invention provides a standard type of raised floor, which includes: a ceiling plate, which has an opposite ground side and a honeycomb side; and a rib structure, which is arranged on the honeycomb side of the ceiling plate to form a a plurality of recesses, wherein the rib structure defines a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib in order from the edge of the ceiling to the middle, and The height of the first rib, the third rib and the seventh rib with respect to the honeycomb side is at least 25 mm as the main rib, and the second rib, the fourth rib, the fifth rib and the The height of the sixth rib relative to the side of the honeycomb is less than 25 mm to serve as the middle rib.

In the aforementioned standard raised floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforesaid standard raised floor, the first rib is formed on the edge of the top plate to become a side rib of the standard raised floor, used as a frame of the standard raised floor for fixing the feet.

In the aforementioned standard raised floor, the height of the first rib relative to the honeycomb side is greater than the height of the second rib to the seventh rib relative to the honeycomb side, and the height of the first rib and the ceiling is greater than The system is 47 mm, and the thickness of the top plate is 3 mm.

In the aforementioned standard raised floor, the width of the first rib is 7 mm.

In the aforementioned standard raised floor, the height of the third and seventh ribs relative to the honeycomb side is 34.5 mm.

In the aforementioned standard raised floor, the width of the third and seventh ribs is 3 to 4 mm.

In the aforementioned standard raised floor, the height of the second rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side is 6 to 19 mm.

In the aforementioned standard raised floor, the widths of the second rib, the fourth rib, the fifth rib and the sixth rib are all 3.2 mm.

In the aforementioned standard raised floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the concave portions, so that a plurality of the auxiliary ribs are arranged in a single concave portion. . For example, the plurality of auxiliary ribs extend in multiple directions and are staggered. Alternatively, the height of the auxiliary rib relative to the honeycomb side is 2 mm, and the width is 3 mm.

In the aforementioned standard raised floor, a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations correspond to the plurality of recesses.

In the aforementioned standard raised floor, the rib structure is tied with two seventh ribs in the longitudinal and transverse directions to form a well-shaped rib, so as to divide the standard raised floor into four areas, and the four areas are adjacent to each other. 25 sub-regions are formed between the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib, each of the sub-regions has a concave part, and the well-shaped rib formed by the seventh rib Another concave part is formed in the central part of the rib, and a cross-shaped rib is arranged in it, and a wing plate is formed around the top plate, so that the height of the cross-shaped rib and the thickness of the wing plate are greater than the thickness of the top plate, so as to Increase the strength of this standard raised floor in the middle. For example, the first to sixth ribs are symmetrically distributed based on the well-shaped rib, and the well-shaped rib forms a slope at the place where the first rib is connected, so as to reduce the impact of the standard raised floor. weight. Or, the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib are separated into 21 other sub-regions in the well-shaped rib, and each of the sub-regions has nine perforations , but the perforation is not formed in the sub-region of the central part of the well-shaped rib.

As can be seen from the above, in the standard raised floor of this creation, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm to improve the structural strength of the standard raised floor (if at least The standard raised floor can bear the heavier machine equipment in the semiconductor process, so as to avoid the problem of the standard raised floor being broken during use. .

The following specific embodiments are used to illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings in this specification are only used to cooperate with the contents disclosed in the specification for the understanding and reading of those who are familiar with the art, and are not intended to limit the implementation of this creation. Therefore, it has no technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, shall still fall within the scope of this work without affecting the effect and purpose of this creation. The technical content disclosed by the creation must be within the scope of coverage. At the same time, the terms such as "up", "down", "left", "right" and "one" quoted in this specification are only for the convenience of description and are not used to limit the implementation of this creation. The change or adjustment of the scope and its relative relationship shall also be regarded as the scope of the implementation of this creation, provided that there is no substantial change in the technical content.

1A , FIG. 1B , FIG. 1C , FIG. 1D and FIG. 1E are schematic views of the first embodiment of the standard raised floor 1 created by the present invention. The standard raised floor 1 of this embodiment is used for carrying a relatively light load, and the carrying load is about 700 kg.

The standard raised floor 1 has a ceiling 10 and a rib structure 1 a provided on the ceiling 10 .

The top plate 10 has an opposite ground side 10a and a honeycomb side 10b, and the honeycomb side 10b is provided with the rib structure 1a in the longitudinal direction and the transverse direction, respectively, so as to form between the longitudinal and transverse rib structures 1a. A plurality of recesses S, wherein FIG. 1C shows the rib structure 1a in the transverse direction, and FIG. 1D shows the rib structure 1a in the longitudinal direction.

In this embodiment, the top plate 10 is substantially rectangular, such as a square plate, the length L is 600 mm and the thickness t0 is 3.0 mm, and a wing plate 1d (the thickness t1 is 3.0 mm) is formed around the top plate 10. 6.25mm, which is greater than the thickness t0 of the top plate 10), and feet 1b are formed on the four corners of the top plate 10, the bottom of which is convex (or concave) for Fix a support tripod (figure omitted). For example, the feet 1b are used to adjust the total height H of the standard raised floor 1 so that a plurality of standard raised floors 1 are located on the same level.

Furthermore, the ground side 10a is a flat surface, and the concave portions S are arranged in an array to form a plurality of ejector positions 1c (about a square area formed by every four concave portions S) on the honeycomb side 10b. on the corner of ) the honeycomb structure.

The rib structure 1a is defined by the first rib 11, the second rib 12, the third rib 13, the first rib 11, the second rib 12, the third rib 13, the first rib 11, the second rib 12, the third rib 13, the third rib The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the heights h1, h3, h7 of the first, third and seventh ribs 11, 13, 17 relative to the honeycomb side 10b are at least is 25 mm (mm), and the heights h2, h4, h5, h6 of the second, fourth to sixth ribs 12, 14, 15, 16 relative to the honeycomb side 10b are lower than 25 mm, so the The first, third and seventh ribs 11, 13, 17 serve as main ribs, and the second, fourth to sixth ribs 12, 14, 15, 16 serve as middle ribs, wherein the first to sixth ribs The ribs 11 to 16 are distributed symmetrically (or up and down as shown in FIG. 1B ) based on the seventh rib 17 (the well-shaped rib), so that the second rib 12 , the third rib 13 , and the fourth rib 14. The distance w between the fifth rib 15, the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first rib 11 is formed on the edge of the top plate 10 to become the side rib of the standard elevated floor 1 , serving as a frame of the standard elevated floor 1 for fixing the foot base 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 44 mm, which is greater than the heights h2-h7 of the second to seventh ribs 12-17 relative to the honeycomb side 10b, and the first rib The height of 11 and the ceiling 10 and T (that is, the height of the first rib 11 relative to the ground side 10a) is 47 mm (that is, T=h1+t0), and the foot 1b, the first rib 11 and the The total height H of the top plate 10 (ie the foot height of the standard raised floor 1 ) is 55 mm.

Furthermore, the heights h2 to h7 of the second to seventh ribs 12 to 17 of the rib structure 1a may be the same or different according to requirements, as shown in FIG. 1C . For example, the height h3 of the third rib 13 relative to the honeycomb side 10b is 34.5 mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 34.5 mm, and the height h2 of the second rib 12 relative to the honeycomb side 10b is 19mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 6mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 19mm, and the height of the sixth rib 16 relative to the honeycomb side 10b h6 is 6 mm, wherein the two longitudinal and transverse seventh ribs 17 form a well-shaped rib, so as to divide the standard raised floor 1 into four areas, each area is adjacent to the second ribs 12, Twenty-five sub-regions are formed between the third rib 13 , the fourth rib 14 , the fifth rib 15 and the sixth rib 16 , each sub-region has a concave portion S, and is formed in the central part of the well-shaped rib of the seventh rib 17 Another aspect of the concave portion R. Further, the thickness of the top plate 10 at the recess R is the same as the thickness t0 at other places (or can be thicker at the recess R, such as about 1-3 mm greater than the thickness t0 of the top plate 10 at other places), And the concave portion R is provided with a cross-shaped rib 17a, and its height h0 relative to the honeycomb side 10b is 8 mm (which is greater than the thickness t0 of the top plate 10), so as to improve the resistance of the standard raised floor 1 in the middle. compressive strength.

In addition, the widths d1 to d7 of the ribs can be the same or different according to requirements, as shown in FIG. 1C . For example, the width d1 of the first rib 11 is 7 mm, the width d2 of the second rib 12 is 3.2 mm, the width d3 of the third rib 13 is 3 mm, the width d4 of the fourth rib 14 is 3.2 mm, and the fifth rib 15 The width d5 is 3.2 mm, the width d6 of the sixth rib 16 is 3.2 mm, and the width d7 of the seventh rib 17 is 4 mm.

In addition, the rib structure 1a can be provided with a plurality of auxiliary ribs 18 whose volume is much smaller than that of other ribs, and the height h8 (eg 2 mm) relative to the honeycomb side 10b is lower than the height of the middle rib relative to the honeycomb side 10b. h2, h4, h5, h6, and its width d8 is 3 mm. For example, the auxiliary ribs 18 are correspondingly formed in the concave portions S, and extend in two directions to be staggered. As shown in FIG. 1B , a single concave portion S is provided with two cross-shaped auxiliary ribs 18 .

Further, the heights h4 to h6 of the fourth to sixth ribs 14 to 16 of the standard raised floor 1 are low/high/low in sequence, so the rib structure 1a is in another direction (left and right as shown in FIG. 1B ). direction), as shown in FIG. 1D, except that the fourth to sixth ribs 14a~16a are different, the other ribs are all the same size, so the heights h4~h6 of the fourth to sixth ribs 14a~16a can be adjusted . For example, the height h4 of the fourth rib 14a relative to the honeycomb side 10b is 19 mm, the height h5 of the fifth rib 15a relative to the honeycomb side 10b is 34.5 mm, and the height h6 of the sixth rib 16a relative to the honeycomb side 10b It is 19 mm, so that the heights h4~h6 of the fourth to sixth ribs 14a~16a are still arranged in the order of low/high/low, but the fifth rib 15a becomes the main rib, and the width d5 of the fifth rib is 3 ㎜.

It can be seen from the above that the thickness t0 of the ceiling 10 of the standard raised floor 1 is relatively small, and the heights h2, h4, h5 and h6 of most of the rib structure 1a are also relatively small, that is, the middle rib (the second, the first 4. The heights h2, h4, h5, and h6 of the fifth and sixth ribs (12, 14, 15, 16) are higher than the heights of the main ribs (the first rib 11, the third rib 13, and the seventh rib 17), h1, h3, The h7 is much smaller to save material and reduce weight.

Furthermore, the well-shaped rib formed by the seventh rib 17 forms an inclined plane at the place where the first rib 11 is connected, so as to reduce the weight of the standard raised floor 1 .

FIG. 2A , FIG. 2B , FIG. 2C and FIG. 2D are schematic diagrams of the second embodiment of the standard raised floor 2 of the present creation. The difference between this embodiment and the above-mentioned embodiment is that a new perforation is added, so the same points will not be repeated below.

As shown in FIGS. 2A , 2B, 2C and 2D, the standard raised floor 2 is formed on the top plate 10 with a plurality of through holes 20 connecting the ground side 10a and the honeycomb side 10b, and the seventh rib 17 (Tic-shaped rib) The honeycomb side 10b is divided into four regions, and each region forms 25 sub-regions (the concave portion S), the ribs (the second rib 12, the third The rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16) can be separated by 21 other sub-regions (the recesses R, S), so that each sub-region has nine perforations 20, but in this The through hole 20 is not formed in the sub-region of the central portion of the well-shaped rib (the recess R).

In this embodiment, the positions of the through holes 20 correspond to the concave portions S. For example, each recess S is formed with nine through holes 20 , and the nine through holes 20 are arranged in an array, so that each row has three through holes 20 , and each row of through holes 20 is symmetrically arranged relative to the cross-shaped auxiliary rib 18 .

To sum up, the standard raised floors 1 and 2 of the present invention are mainly improved by the height h1, h3, h7 of the main rib of the rib structure 1a relative to the honeycomb side 10b being at least 25 mm. Due to the structural strength of the raised floor 1, 2, the standard raised floor 1, 2 can withstand the heavy equipment in the semiconductor process, so as to avoid the problem of the standard raised floor 1, 2 being broken during use. Further, the height h1~h7 and width d1~d7 of the rib shall be adjusted according to the bearing load of the standard raised floor 1 and 2, that is, the height h1~h7 and the width d1~d7 of the rib shall be adjusted if the bearing load is small. Also smaller to save material and weight for standard raised floors 1,2.

Furthermore, by the design of the auxiliary rib 18, the structural strength of the standard raised floors 1, 2 can be further enhanced.

The above-mentioned embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Anyone skilled in the art can make modifications to the above embodiments without departing from the spirit and scope of the present creation. Therefore, the protection scope of the rights of this creation should be listed in the patent application scope mentioned later.

1,2: Standard Raised Floor 1a: Rib structure 1b: Foot seat 1c: Ejector position 1d: wing plate 10: top plate 10a: Ground side 10b: Hive side 11: First Rib 12: Second Rib 13: Third Rib 14,14a: Fourth rib 15,15a: Fifth rib 16,16a: Sixth Rib 17: Seventh Rib 17a: Cross Ribs 18: Auxiliary Ribs 20: perforation d1~d7: width H: total height h0~h7: height L: length R, S: Recess T: height and t0, t1: thickness w: separation distance

FIG. 1A is a three-dimensional schematic diagram of the first embodiment of the standard raised floor created by the present invention.

FIG. 1B is a front plan view of FIG. 1A .

FIG. 1C is a cross-sectional view of FIG. 1B taken along the line C-C in one of the directions.

FIG. 1D is a cross-sectional view of FIG. 1B taken along the line D-D in another direction.

FIG. 1E is a schematic perspective view of FIG. 1A from another perspective.

FIG. 2A is a three-dimensional schematic diagram of the second embodiment of the standard raised floor of the present creation.

FIG. 2B is a front plan view of FIG. 2A.

FIG. 2C is a cross-sectional view of FIG. 2B along the C-C line in one of the directions.

FIG. 2D is a schematic three-dimensional view of FIG. 2A from another viewing angle.

1: Standard Raised Floor

1a: Rib structure

1b: Foot seat

1d: wing plate

10: top plate

10a: Ground side

10b: Hive side

11: First Rib

12: Second Rib

13: Third Rib

14: Fourth Rib

15: Fifth rib

16: Sixth Rib

17: Seventh Rib

17a: Cross Ribs

18: Auxiliary Ribs

d1~d8: width

H: total height

h0~h8: height

T: height and

t0, t1: thickness

R, S: Recess

Claims (16)

A standard type of raised floor comprising: a top plate having opposing ground and honeycomb sides; and The rib structure is arranged on the honeycomb side of the top plate to form a plurality of concave parts, wherein the rib structure is defined by the first rib, the second rib, the third rib, the fourth rib and the fourth rib in sequence from the edge of the top plate to the middle. The rib, the fifth rib, the sixth rib and the seventh rib, and the height of the first rib, the third rib and the seventh rib relative to the honeycomb side is at least 25 mm, as the main rib, and the The height of the second rib, the fourth rib, the fifth rib, and the sixth rib relative to the honeycomb side is lower than 25 mm to serve as the middle rib. The standard raised floor as claimed in claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side. The standard raised floor as claimed in claim 1, wherein the first rib is formed on the edge of the ceiling to become a side rib of the standard raised floor, used as a frame of the standard raised floor for fixing feet seat. The standard raised floor as claimed in claim 1, wherein the height of the first rib relative to the honeycomb side is greater than the heights of the second rib to the seventh rib relative to the honeycomb side, and the first rib is different from the honeycomb side. The sum of the heights of the top plate is 47 mm, and the thickness of the top plate is 3 mm. The standard raised floor according to claim 1, wherein the width of the first rib is 7 mm. The standard raised floor as claimed in claim 1, wherein the height of the third rib and the seventh rib relative to the honeycomb side is 34.5 mm. The standard raised floor as claimed in claim 1, wherein the width of the third rib and the seventh rib is 3 to 4 mm. The standard raised floor as claimed in claim 1, wherein the height of the second, fourth, fifth and sixth ribs relative to the honeycomb side is 6 to 19 mm. The standard raised floor according to claim 1, wherein the widths of the second rib, the fourth rib, the fifth rib and the sixth rib are all 3.2 mm. The standard raised floor as claimed in claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the concave portions, so that a single concave portion The plurality of auxiliary ribs are arranged. The standard raised floor as claimed in claim 10, wherein the plurality of auxiliary ribs extend in multiple directions and are staggered with each other. The standard raised floor of claim 10, wherein the height of the auxiliary rib relative to the honeycomb side is 2 mm, and the width is 3 mm. The standard raised floor according to claim 1, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations correspond to the plurality of recesses. The standard raised floor as claimed in claim 1, wherein the rib structure is longitudinally and laterally tied with two of the seventh ribs to form a well-shaped rib, so as to divide the standard raised floor into four areas, the 25 sub-regions are formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib in the four regions, and each of the sub-regions has a concave portion and is located in the seventh rib. Another concave part is formed in the central part of the formed well-shaped rib, and a cross-shaped rib is arranged in it, and a wing plate is formed around the top plate, so that the height of the cross-shaped rib and the thickness of the wing plate are greater than the thickness of the The thickness of the top plate to improve the strength of the standard raised floor in the middle. The standard raised floor as claimed in claim 14, wherein the first to sixth ribs are symmetrically distributed on the basis of the well-shaped rib, and the well-shaped rib is formed where the first rib is connected sloped to reduce the weight of this standard raised floor. The standard raised floor of claim 14, wherein 21 other sub-areas are separated from the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib in the well-shaped rib , and each of the sub-regions has nine through holes, but the through-holes are not formed in the sub-region of the central part of the well-shaped rib.

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