TWM625241U - Complex raised floor - Google Patents

Abstract

A raised floor includes a top plate and a rib structure, wherein the rib structure has a plurality of main ribs with a height of at least 25 mm formed on the top plate to enhance the structural strength of the raised floor. Therefore, when the raised floor carries the heavier equipment in the semiconductor manufacturing process, the problem of the raised floor cracking can be avoided.

Description

Integrated Raised Floor

This work is about a floor, especially a comprehensive raised floor with a rib structure.

At present, semiconductor factories are equipped with raised floors with multiple micro-perforations to purify the air quality of the environment and ensure the specifications of clean rooms.

At present, the raised floor is made by die casting. In the die-casting process, the desired product is often produced by a die, and before the die-casting process, a release layer is applied to the die to facilitate subsequent demoulding operations.

However, the structural strength of the conventional raised floor is often insufficient, so when the raised floor carries heavy equipment in the semiconductor process, the raised floor is prone to breakage. On the other hand, there is also the problem that the raised floor is too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the above-mentioned problems of the prior art has actually become an urgent problem to be overcome in the current industry.

In view of various deficiencies in the above-mentioned prior art, the present invention provides a comprehensive raised floor, comprising: a ceiling plate having opposite ground side and honeycomb side; and a rib structure arranged on the honeycomb side of the ceiling plate to form a plurality of recesses, wherein the rib structure defines a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib in order from the edge of the ceiling to the middle, and The first, third, fifth and seventh ribs are used as main ribs, and their height relative to the honeycomb side is at least 25 mm, and the second, fourth and sixth ribs are used as middle ribs, which are The height relative to the honeycomb side is less than 25 mm.

In the aforementioned integrated raised floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

In the above-mentioned integrated elevated floor, the first rib is formed on the edge of the top plate to become a side rib of the integrated elevated floor, used as a frame of the integrated elevated floor for fixing the feet.

In the aforementioned integrated elevated floor, the height of the first rib relative to the honeycomb side is higher than the height of the second to seventh ribs relative to the honeycomb side, and the sum of the heights of the first rib and the ceiling is 47 to 58 mm, and the thickness of the top plate is 2.5 to 3.2 mm.

In the aforementioned integrated raised floor, the width of the first rib is 7 to 8 mm.

In the above-mentioned integrated raised floor, the height of the third rib relative to the honeycomb side is 25 to 38 mm, the height of the fifth rib relative to the honeycomb side is 32 to 38 mm, and the height of the seventh rib relative to the honeycomb side is 32 to 38 mm. The height on the side of the honeycomb is 34.5 to 45 mm.

In the aforementioned integrated raised floor, the width of the third rib is 2.5 to 3 mm, the width of the fifth rib is 2.5 to 3 mm, and the width of the seventh rib is 4 to 6 mm.

In the aforementioned integrated raised floor, the height of the second, fourth and sixth ribs relative to the honeycomb side is 8 to 20 mm.

In the aforementioned integrated raised floor, the widths of the second, fourth and sixth ribs are 2.5 to 3.2 mm.

In the aforementioned integrated raised floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the concave portions, so that a plurality of the auxiliary ribs are arranged in a single concave portion. . For example, the plurality of auxiliary ribs extend in multiple directions and are staggered. Alternatively, the plurality of auxiliary ribs extend in a single direction without interdigitating. Further, the height of the auxiliary rib relative to the honeycomb side is 2 to 6 mm, and the width thereof is 2.5 to 3 mm.

In the aforementioned integrated raised floor, a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations correspond to the plurality of recesses.

In the above-mentioned integrated raised floor, the rib structure is tied with two of the seventh ribs to form a well-shaped rib in the longitudinal and transverse directions, so as to divide the integrated raised floor into four areas, and the four areas are adjacent to each other. 25 sub-regions are formed between the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib. The rib is symmetrically distributed on the basis, and another concave part is formed in the central part of the well-shaped rib formed by the seventh rib, and a cross-shaped rib is arranged in it, and a wing plate is formed around the top plate, so that the The height of the cross-shaped rib and the thickness of the wing plate are larger than the thickness of the ceiling plate, so as to improve the strength of the integrated raised floor in the middle. For example, the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib are separated into 21 other sub-regions in the well-shaped rib, and each of the sub-regions has nine through holes , but the perforation is not formed in the sub-region of the central part of the well-shaped rib.

It can be seen from the above that in the integrated raised floor of this creation, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm, and the width and height of the middle rib will not be less than 25 mm. There are too many millimeters in order to improve the structural strength of the integrated raised floor (for example, it can carry at least 700 kg of machine equipment). Therefore, compared with the prior art, the integrated raised floor can withstand the heavier load in the semiconductor process. Machine equipment to avoid the problem of fragmentation of the integrated raised floor during use.

The following specific embodiments are used to illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings in this specification are only used to cooperate with the contents disclosed in the specification for the understanding and reading of those who are familiar with the art, and are not intended to limit the implementation of this creation. Therefore, it has no technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, shall still fall within the scope of this work without affecting the effect and purpose of this creation. The technical content disclosed by the creation must be within the scope of coverage. At the same time, the terms such as "up", "down", "left", "right" and "one" quoted in this specification are only for the convenience of description and are not used to limit the implementation of this creation. The change or adjustment of the scope and its relative relationship shall also be regarded as the scope of the implementation of this creation, provided that there is no substantial change in the technical content.

FIG. 1A , FIG. 1B , FIG. 1C , FIG. 1D and FIG. 1E are schematic diagrams of the first embodiment of the integrated raised floor 1 created by the present invention. The integrated raised floor 1 of this embodiment is a standard type, which is used to carry a relatively heavy load, such as a load of about 1000 kg.

The above-mentioned integrated raised floor 1 has a ceiling 10 and a rib structure 1 a provided on the ceiling 10 .

The top plate 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with the rib structure 1a in the longitudinal and transverse directions respectively, so as to form a plurality of recesses between the longitudinal and transverse rib structures 1a S, wherein, Fig. 1C shows the longitudinal rib structure 1a, and Fig. 1D shows the transverse rib structure 1a.

In this embodiment, the top plate 10 is substantially rectangular, such as a square plate, the length L is 600 mm and the thickness t0 is 3.2 mm, and a wing plate 1d (the thickness t1 is 3.2 mm) is formed around the top plate 10. 6mm, which is greater than the thickness t0 of the top plate 10), and feet 1b are formed on the four corners of the top plate 10, and the bottom of the feet 1b is L-shaped convex (or L-shaped concave) , for fixing a support tripod (figure omitted). For example, the feet 1b are used to adjust the total height H of the integrated raised floor 1 so that a plurality of integrated raised floors 1 are located on the same horizontal plane.

Furthermore, the ground side 10a is a flat surface, and the concave portions S are arranged in an array to form a plurality of ejector positions 1c (about a square area formed by every four concave portions S) on the honeycomb side 10b. on the corner of ) the honeycomb structure.

The rib structure 1a is defined by the first rib 11, the second rib 12, the third rib 13, the third rib 13, the first rib 11, the second rib 12, the third rib 13, the The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the height h1 of the first, third, fifth and seventh ribs 11, 13, 15, 17 relative to the honeycomb side 10b, h3, h5, h7 are at least 25 mm (mm), and the heights h2, h4, h6 of the second, fourth and sixth ribs 12, 14, 16 relative to the honeycomb side 10b are less than 25 mm , so the first, third, fifth and seventh ribs 11, 13, 15, 17 are used as main ribs, and the second, fourth and sixth ribs 12, 14, 16 are used as middle ribs, of which, The first to sixth ribs 11 to 16 are distributed symmetrically (or up and down as shown in FIG. 1B ) based on the seventh rib 17 (the well-shaped rib), so that the second rib 12 and the third The distance w between the ribs 13, the fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first rib 11 is formed on the edge of the top plate 10 to become the side rib of the integrated elevated floor 1 to serve as a frame of the integrated elevated floor 1 for fixing the feet 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 49 mm, which is greater than the heights h2-h7 of the second to seventh ribs 12-17 relative to the honeycomb side 10b, and the first rib 11 and the height of the top plate 10 and T (that is, the height of the first rib 11 relative to the ground side 10a) is 52.2 mm (that is, T=h1+t0), and the foot 1b, the first rib 11 and the The total height H of the top plate 10 (ie the foot height of the integrated raised floor 1 ) is 55 mm.

Furthermore, the heights h2 to h7 of the second to seventh ribs 12 to 17 of the rib structure 1a may be the same or different according to requirements, as shown in FIG. 1C . For example, the height h3 of the third rib 13 relative to the honeycomb side 10b is 36 mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 36 mm, and the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 36mm, the height h2 of the second rib 12 relative to the honeycomb side 10b is 20mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 20mm, and the height of the sixth rib 16 relative to the honeycomb side 10b h6 is 20 mm, wherein the two longitudinal and transverse seventh ribs 17 form a well-shaped rib, so that the integrated raised floor 1 is divided into four areas, and the adjacent second ribs 12, Twenty-five sub-regions are formed between the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16, each sub-region has a concave part S, and another shape is formed in the central part of the well-shaped rib The concave portion R. Further, the thickness of the top plate 10 in the concave portion R is 5.2 mm (which is greater than the thickness t0 of the top plate 10 ), and the concave portion R is provided with a cross-shaped rib 17a, and its height h0 relative to the honeycomb side 10b is 12mm (which is greater than the thickness t0 of the top plate 10), the thickness of the top plate 10 in the recess R can be greater than the thickness of the top plate 10 by 2mm according to the requirements, so as to improve the resistance of the integrated raised floor 1 in the middle. compressive strength. It should be understood that the thickness of the top plate 10 in the recess R can be the same as the thickness t0 of the top plate 10 according to requirements, and the heights h2 to h6 of the second to sixth ribs 12 to 16 are regularly designed.

In addition, the widths d1 to d7 of the ribs can be the same or different according to requirements, as shown in FIG. 1C . For example, the width d1 of the first rib 11 is 8 mm, the width d2 of the second rib 12 is 2.7 mm, the width d3 of the third rib 13 is 2.7 mm, the width d4 of the fourth rib 14 is 2.5 mm, and the width d4 of the fifth rib 15 is 2.5 mm. The width d5 is 2.7 mm, the width d6 of the sixth rib 16 is 2.7 mm, and the width d7 of the seventh rib 17 is 4.8 mm.

In addition, the design of the rib structure 1a in another direction (the up-down direction as shown in FIG. 1B ), as shown in FIG. 1D , except that the fourth rib 14a and the sixth rib 16a are different, the other ribs are all the same size, Therefore, the height h4, h6 of the fourth and sixth ribs 14a, 16a relative to the honeycomb side 10b can be adjusted to be 10 mm, and the width d4 of the fourth rib 14a is 2.7 mm.

It can be seen from the above that the thickness t0 of the top plate 10 of the integrated raised floor 1 is relatively small, and the partial heights h2, h4 and h6 of the rib structure 1a are also relatively small, that is, the middle ribs (the second, fourth and The heights h2, h4, h6 of the six ribs (12, 14, 16) are smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 11, 13, 15, 17) Many, in order to save material and reduce weight.

2A and 2B are schematic diagrams of the second embodiment of the integrated raised floor 2 of the present creation. The integrated raised floor 2 of this embodiment is a standard type, which is used to carry a relatively heavy load, such as a load of about 1000 kg, and the difference between it and the first embodiment is the change of the local height of the rib structure 2a, so the following The same points will not be repeated.

In this embodiment, the thickness t0 of the top plate 20 is 2.5 mm, the height h1 of the first rib 21 relative to the honeycomb side 20b is 50.5 mm, the height of the first rib 21 and the top plate 20 and T ( That is, the height of the first rib 21 relative to the ground side 20a) is 53 mm (ie T=h1+t0), and the total height H of the foot seat 2b, the first rib 21 and the top plate 20 (ie the combined height H) The foot height of the type raised floor 2) is 55 mm, wherein, the thickness t1 of the wing plate 2d is 6 mm, the first rib 21 is formed on the edge of the top plate 20 and becomes the side rib of the integrated raised floor 2, As the frame of the integrated raised floor 2, the first to sixth ribs 21-26 are distributed symmetrically (or up and down as shown in FIG. 2A) with the seventh rib 27 as a reference.

Furthermore, in the rib structure 2a, as shown in FIG. 2B, the height h3 of the third rib 23 relative to the honeycomb side 20b is 25 mm, the height h5 of the fifth rib 25 relative to the honeycomb side 20b is 32 mm, The height h7 of the seventh rib 27 relative to the honeycomb side 20b is 45mm, the height h2 of the second rib 22 relative to the honeycomb side 20b is 8mm, and the height h4 of the fourth rib 24 relative to the honeycomb side 20b is 8mm , and the height h6 of the sixth rib 26 relative to the honeycomb side 20b is 8 mm. On the other hand, the thickness of the top plate 20 at the recess R is increased to 5.5 mm (that is, about 3 mm larger than the thickness t0 of the top plate 20 at other places), and the recess R is provided with a cross-shaped rib 27a , its height h0 relative to the honeycomb side 20b is 10mm (which is greater than the thickness t0 of the top plate 20 ), so as to improve the compressive strength of the integrated raised floor 2 in the middle.

In addition, the widths d1 to d7 of the ribs can be the same or different according to requirements, as shown in FIG. 2B . For example, the width d1 of the first rib 21 is 7.5 mm, the width d2 of the second rib 22 is 2.5 mm, the width d3 of the third rib 23 is 2.5 mm, the width d4 of the fourth rib 24 is 2.5 mm, and the fifth rib 25 The width d5 is 2.5 mm, the width d6 of the sixth rib 26 is 2.5 mm, and the width d7 of the seventh rib 27 is 4.5 mm.

In addition, the design of the rib structure 2a in another direction (the up-down direction as shown in FIG. 2A ) is the same as that shown in FIG. 2B .

It can be seen from the above that the heights h2, h4, h6 of the rib structures 2a of the integrated raised floor 2 are relatively small, namely the heights h2 of the middle ribs (the second, fourth and sixth ribs 22, 24, 26), h4, h6 are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 21, 23, 25, 27), and even the thickness t0 of the top plate 20 ( For example, 2.5 mm) is smaller than the first embodiment, and the specifications of the foot base 2b, the length L of the top plate 20 are 600 mm, and the thickness t1 of the wing plate 2d is 6 mm, which are all the same as the first embodiment, so as to facilitate Save material and reduce weight.

3A, 3B, 3C and 3D are schematic diagrams of the third embodiment of the integrated raised floor 3 of the present creation. The integrated raised floor 3 of this embodiment is light, and it is used to carry a relatively light load, such as a load of about 700 kg, and the difference from the second embodiment is that the load is reduced by about 300 kg, so that most of the ribs are The height of the structure 3a is reduced, and an auxiliary rib 38 is added to the rib structure 3a, so the same points will not be repeated below.

As shown in FIGS. 3A , 3B and 3C, the rib structure 3a is provided with a plurality of auxiliary ribs 38 whose volume is much smaller than other ribs, and its height h8 (eg 2 mm) relative to the honeycomb side 30b is lower than the middle rib Relative to the height h2, h4, h6 of the honeycomb side 30b, and the width d8 is 3 mm. For example, the auxiliary ribs 38 are correspondingly formed in each of the recesses S, and extend in two directions to be staggered with each other. The single recess S shown in FIG. 3B is configured with two cross-shaped auxiliary ribs 38 .

In this embodiment, the thickness t0 of the top plate 30 is 3 mm, the bottom of the foot base 3b is convex (or concave), and the height of the first rib 31 relative to the honeycomb side 30b h1 is 44 mm, the height of the first rib 31 and the top plate 30 and T (that is, the height of the first rib 31 relative to the ground side 30a) is 47 mm (ie T=h1+t0), and the foot The total height H of the seat 3b, the first rib 31 and the top plate 30 is 55 mm, wherein the thickness t1 of the wing plate 3d is 6.25 mm, and the first rib 31 is formed on the edge of the top plate 30 to become the The side ribs of the integrated elevated floor 3 are used as the frame of the integrated elevated floor 3, and the first to sixth ribs 31 to 36 are symmetrical with respect to the seventh rib 37 (or as shown in FIG. 3B ). Symmetrically up and down) distribution.

Furthermore, in the rib structure 3a, as shown in FIG. 3C, the height h3 of the third rib 33 relative to the honeycomb side 30b is 34.5 mm, the height h5 of the fifth rib 35 relative to the honeycomb side 30b is 34.5 mm, The height h7 of the seventh rib 37 relative to the honeycomb side 30b is 34.5mm, the height h2 of the second rib 32 relative to the honeycomb side 30b is 19mm, and the height h4 of the fourth rib 34 relative to the honeycomb side 30b is 19mm , and the height h6 of the sixth rib 36 relative to the honeycomb side 30b is 19 mm. On the other hand, the thickness of the top plate 30 at the recess R is the same as the thickness t0 at other places (or the thickness at the recess R can be increased, such as being greater than the thickness t0 of the top plate 20 at other places by about 3 mm), And the concave portion R is provided with a cross-shaped rib 37a, and its height h0 relative to the honeycomb side 30b is 8 mm (which is greater than the thickness t0 of the top plate 30), so as to improve the resistance of the integrated raised floor 3 in the middle. compressive strength.

In addition, the widths d1 to d7 of the ribs can be the same or different according to requirements, as shown in FIG. 3C . For example, the width d1 of the first rib 31 is 7 mm, the width d2 of the second rib 32 is 3.2 mm, the width d3 of the third rib 33 is 3 mm, the width d4 of the fourth rib 34 is 3.2 mm, and the fifth rib 35 The width d5 is 3 mm, the width d6 of the sixth rib 36 is 3.2 mm, and the width d7 of the seventh rib 37 is 4 mm.

In addition, the heights h4-h6 of the fourth to sixth ribs 34, 35, 36 of the integrated raised floor 3 are low/high/low in sequence, so the rib structure 3a is designed in another direction, as shown in FIG. 3D As shown, the heights h4-h6 of the fourth to sixth ribs 34a, 35a, 36a can be adjusted. For example, the height h4 of the fourth rib 34a relative to the honeycomb side 30b is 6 mm, the height h5 of the fifth rib 35a relative to the honeycomb side 30b is 19 mm, and the height h6 of the sixth rib 36a relative to the honeycomb side 30b 6 mm, so that the heights h4~h6 of the fourth to sixth ribs 34a, 35a, 36a are still arranged in the order of low/high/low, but the fifth rib 35a becomes the middle rib, and the width of the fifth rib 35 d5 becomes 3.2mm.

It can be seen from the above that the heights h2, h4, h6 of the rib structures 3a of the integrated raised floor 3 are relatively small, namely the heights h2 of the middle ribs (the second, fourth and sixth ribs 32, 34, 36), h4, h6 are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 31, 33, 35, 37), and the length L of the top plate 30 is 600 ㎜ is the same as the first embodiment, in order to save material and reduce weight.

FIG. 4A , FIG. 4B and FIG. 4C are schematic diagrams of the fourth embodiment of the integrated raised floor 4 of the present creation. The integrated raised floor 4 of this embodiment is light, and is used to carry a relatively light load, such as a load of about 700 kg, and the difference from the third embodiment is the design of the auxiliary ribs 48, so the same will not be repeated below. place.

As shown in FIG. 4A , FIG. 4B and FIG. 4C , the auxiliary ribs 48 of the rib structure 4 a are correspondingly formed in each of the concave portions S, and extend in a single direction without interlacing with each other, so that two parallel ribs 48 are arranged in a single concave portion S Auxiliary ribs 48 .

In this embodiment, the thickness t0 of the top plate 40 is 3 mm, the bottom of the foot base 4b is convex (or concave), and the height of the first rib 41 relative to the honeycomb side 40b h1 is 44 mm, the height and T of the first rib 41 and the top plate 40 (that is, the height of the first rib 41 relative to the ground side 40a) is 47 mm, and the foot seat 4b, the first rib 41 The total height H with the top plate 40 is 55mm, wherein the thickness t1 of the wing plate 4d is 6mm, the first rib 41 is formed on the edge of the top plate 40 and becomes the side rib of the integrated elevated floor 4 , as the frame of the integrated raised floor 4 , and the first to sixth ribs 41 to 46 are distributed symmetrically from left to right (or up and down as shown in FIG. 4B ) based on the seventh rib 47 .

Furthermore, in the rib structure 4a, as shown in FIG. 4C, the height h3 of the third rib 43 relative to the honeycomb side 40b is 38 mm, the height h5 of the fifth rib 45 relative to the honeycomb side 40b is 38 mm, The height h7 of the seventh rib 47 relative to the honeycomb side 40b is 38mm, the height h2 of the second rib 42 relative to the honeycomb side 40b is 18mm, and the height h4 of the fourth rib 44 relative to the honeycomb side 40b is 18mm , and the height h6 of the sixth rib 46 relative to the honeycomb side 40b is 18 mm. On the other hand, the thickness of the top plate 40 at the recess R is 5 mm (about 3 mm greater than the thickness t0 at other places), and the recess R is provided with a cross-shaped rib 47a, which is opposite to the honeycomb side 40b The height h0 is 12mm (which is greater than the thickness t0 of the top plate 40 ), so as to improve the compressive strength of the integrated raised floor 4 in the middle.

In addition, the widths d1 to d7 of the ribs can be the same or different according to requirements, as shown in FIG. 4C . For example, the width d1 of the first rib 41 is 7.5 mm, the width d2 of the second rib 42 is 3 mm, the width d3 of the third rib 43 is 3 mm, the width d4 of the fourth rib 44 is 3 mm, and the fifth rib 45 The width d5 is 3 mm, the width d6 of the sixth rib 46 is 3 mm, and the width d7 of the seventh rib 47 is 5 mm. Further, in the design of the rib structure 4a in another direction (the up-down direction as shown in FIG. 4B ), except that the fourth rib 44a and the sixth rib 46a are different, the other ribs are all the same size, so the fourth rib 44a and the sixth rib 46a are different in size. The heights h4 and h6 of the sixth ribs 44a and 46a relative to the honeycomb side 40b are 8 mm, and the widths d4 and d6 of the fourth and sixth ribs 44a and 46a are adjusted to be 3.5 mm.

In addition, the height h8 of the auxiliary rib 48 relative to the honeycomb side 40b is 6 mm, and the width d8 thereof becomes 2.5 mm.

It can be seen from the above that the heights h2, h4 and h6 of the rib structure 4a of the integrated raised floor 4 are also smaller, that is, the height h2 of the middle rib (the second, fourth and sixth ribs 42, 44, 46) ,h4,h6 are much smaller than the heights h1,h3,h5,h7 of the main ribs (the first, third, fifth and seventh ribs 41,43,45,47), and the length L of the top plate 40 is 600mm is the same as the first embodiment, in order to save material and reduce weight.

5A and 5B are schematic views of the fifth embodiment of the integrated raised floor 5 of the present creation. The integrated raised floor 5 of this embodiment is a standard type, which is used to carry a relatively heavy load, such as a carrying load of about 1000-1200 kilograms, and the difference from the first embodiment is that the carrying load is increased by about 200 kilograms, so that the The local height of the rib structure 5a is changed, so the same points will not be repeated below.

In this embodiment, the thickness t0 of the top plate 50 is 2.5 mm, the height h1 of the first rib 51 relative to the honeycomb side 50b is 50.5 mm, the height of the first rib 51 and the top plate 50 and T ( That is, the height of the first rib 51 relative to the ground side 50a) is 53 mm, and the total height H of the foot seat 5b, the first rib 51 and the top plate 50 is 55 mm, and the height H of the wing plate 2d is 55 mm. The thickness t1 is 6 mm, the first rib 51 is formed on the edge of the top plate 50 and becomes the side rib of the integrated elevated floor 5 as the frame of the integrated elevated floor 5, and the first to sixth ribs 51 to 56 are distributed symmetrically from left to right (or symmetrically from top to bottom as shown in FIG. 5A ) based on the seventh rib 57 .

Furthermore, in the rib structure 5a, as shown in FIG. 5B, the height h3 of the third rib 53 relative to the honeycomb side 50b is 25 mm, the height h5 of the fifth rib 55 relative to the honeycomb side 50b is 32 mm, The height h7 of the seventh rib 57 relative to the honeycomb side 50b is 45mm, the height h2 of the second rib 52 relative to the honeycomb side 50b is 8mm, and the height h4 of the fourth rib 54 relative to the honeycomb side 50b is 8mm , and the height h6 of the sixth rib 56 relative to the honeycomb side 50b is 8 mm. On the other hand, the thickness of the top plate 50 at the recess R is increased to 5.5 mm (that is, about 3 mm greater than the thickness t0 of the top plate 50 at other places), and the recess R is provided with a cross-shaped rib 57a , the height h0 relative to the honeycomb side 50b is 10 mm (which is greater than the thickness t0 of the top plate 50 ), so as to improve the compressive strength of the integrated raised floor 5 in the middle.

In addition, the widths d1 to d7 of the ribs can be the same or different according to requirements, as shown in FIG. 5B . For example, the width d1 of the first rib 51 is 7.5 mm, the width d2 of the second rib 52 is 2.5 mm, the width d3 of the third rib 53 is 2.5 mm, the width d4 of the fourth rib 54 is 2.5 mm, and the width d4 of the fifth rib 55 The width d5 is 2.5 mm, the width d6 of the sixth rib 56 is 2.5 mm, and the width d7 of the seventh rib 57 is 6 mm. Further, the design of the rib structure 5a in another direction (the up-down direction as shown in FIG. 5A ) is the same as that shown in FIG. 5B .

In addition, the height h8 of the auxiliary rib 58 relative to the honeycomb side 50b is 3 mm, and the width d8 thereof is 2.5 mm.

It can be seen from the above that the heights h2, h4, h6 of the rib structures 5a of the integrated raised floor 5 are relatively small, that is, the heights h2 of the middle ribs (the second, fourth and sixth ribs 52, 54, 56), h4, h6 are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 51, 53, 55, 57), and the thickness t0 of the top plate 50 is 2.5 ㎜ and length L are 600 mm and thickness t1 of wing plate 5d is 6 mm, and even the specifications of the foot seat 5b are the same as the first embodiment, so as to save material and reduce weight.

6A and 6B are schematic views of the sixth embodiment of the integrated raised floor 6 of the present creation. The integrated raised floor 6 of this embodiment is a standard type, which is used to carry a relatively heavy load, such as a load of about 1000-1200 kg, and the difference between it and the fifth embodiment is the change of the local height of the rib structure 6a, Therefore, the same points will not be repeated below.

As shown in FIG. 6B , the height h8 of the auxiliary rib 68 relative to the honeycomb side 60b is 2.5 mm, and the width d8 is still 2.5 mm.

In this embodiment, the thickness t0 of the top plate 60 is 2.5 mm, the height h1 of the first rib 61 relative to the honeycomb side 60b is 50.5 mm, the height of the first rib 61 and the top plate 60 and T ( That is, the height of the first rib 61 relative to the ground side 60a) is still 53 mm, and the total height H of the foot seat 6b, the first rib 61 and the top plate 60 is still 55 mm, wherein the wing plate The thickness t1 of 6d is 6 mm, the first rib 61 is formed on the edge of the top plate 60 and becomes the side rib of the integrated elevated floor 6 to serve as the frame of the integrated elevated floor 6, and the first to the fourth The six ribs 61 to 66 are distributed symmetrically (or symmetrically up and down as shown in FIG. 6A ) on the basis of the seventh rib 67 .

Furthermore, in the rib structure 6a, the heights h1-h7 of the first to seventh ribs 61-67 relative to the honeycomb side 60b are the same as those of the fifth embodiment, and the widths d1-d7 thereof are also the same as those of the fifth embodiment. example. On the other hand, the thickness of the top plate 60 at the recess R is the same as that of the fifth embodiment (that is, greater than the thickness t0 of the top plate 60 at other places), and the recess R is provided with a cross-shaped rib 67a, which The height h0 relative to the honeycomb side 60b is 10 mm (which is greater than the thickness t0 of the top plate 60 ), so as to improve the compressive strength of the integrated raised floor 6 in the middle.

It can be seen from the above that the heights h2, h4, h6 of the rib structures 6a of the integrated raised floor 6 are relatively small, that is, the heights h2 of the middle ribs (the second, fourth and sixth ribs 62, 64, 66), h4, h6 are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 61, 63, 65, 67), and the thickness t0 of the top plate 60 is 2.5 The mm and the length L are 600 mm, the thickness t1 of the wing plate 6d is 6 mm, and even the specifications of the foot base 6b are the same as those of the fifth embodiment, so as to save materials and reduce weight.

7A and 7B are schematic views of the seventh embodiment of the integrated raised floor 7 of the present creation. The integrated raised floor 7 of this embodiment is a standard type, which is used to carry a relatively heavy load, such as a load of about 1000-1200 kg, and the difference between it and the fifth embodiment is the change of the local height of the rib structure 7a, Therefore, the same points will not be repeated below.

As shown in FIG. 7B , the height h8 of the auxiliary rib 78 relative to the honeycomb side 70b is 2.5 mm, and the width d8 thereof is 3 mm.

In this embodiment, the thickness t0 of the top plate 70 is 2.5 mm, the height h1 of the first rib 71 relative to the honeycomb side 70b is 55.5 mm, the height of the first rib 71 and the top plate 70 and T ( That is, the height of the first rib 71 relative to the ground side 70a) is 58 mm, and the total height H of the foot seat 7b, the first rib 71 and the top plate 70 is 60 mm, and the height H of the wing plate 4d is 60 mm. The thickness t1 is 6 mm, the first rib 71 is formed on the edge of the top plate 70 and becomes the side rib of the integrated elevated floor 7 as the frame of the integrated elevated floor 7, and the first to sixth ribs 71 to 76 are distributed symmetrically from left to right (or symmetrically from top to bottom as shown in FIG. 7A ) based on the seventh rib 77 .

Furthermore, in the rib structure 7a, as shown in FIG. 7B, the heights h1-h7 of the first to seventh ribs 71-77 relative to the honeycomb side 70b are the same as those of the fifth embodiment, and the first to sixth The widths d1 to d6 of the ribs 71 to 76 are also the same as those of the fifth embodiment, and the width d7 of the seventh rib 77 is 5.3 mm. On the other hand, the thickness of the top plate 70 at the recess R is the same as that of the fifth embodiment (that is, greater than the thickness t0 of the top plate 70 at other places), and the recess R is provided with a cross-shaped rib 77a, which The height h0 relative to the honeycomb side 70b is 10 mm (which is greater than the thickness t0 of the top plate 70 ), so as to improve the compressive strength of the integrated raised floor 7 in the middle.

It can be seen from the above that the heights h2, h4, h6 of the rib structures 7a of the integrated raised floor 7 are relatively small, that is, the heights h2 of the middle ribs (the second, fourth and sixth ribs 72, 74, 76), h4, h6 are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 71, 73, 75, 77), and the thickness t0 of the top plate 70 is 2.5 The mm and the length L are 600 mm and the thickness t1 of the wing plate 7d is 6 mm, and even the specifications of the feet 7b are the same as those of the fifth embodiment, so as to save materials and reduce weight.

8A , 8B, 8C and 8D are schematic diagrams of the eighth embodiment of the integrated raised floor 8 of the present creation. The difference between this embodiment and the above-mentioned embodiment is that a new perforation is added, so the same points will not be repeated below.

As shown in FIG. 8A and FIG. 8D, based on the first embodiment, the integrated raised floor 8 is formed on the ceiling 10 with a plurality of through holes 80 connecting the ground side 10a and the honeycomb side 10b, and the seventh rib 17 (Tic-shaped rib) The honeycomb side 10b is divided into four regions, and each region forms 25 sub-regions (the concave portion S), the ribs (the second rib 12, the third The rib 13, the fourth rib 14, the fifth rib 15, and the sixth rib 16) can be separated by 21 sub-regions (the recesses R, S), so that each sub-region has nine perforations 80, but in the well-shaped The perforation 80 is not formed in the sub-region of the central portion of the rib (the concave portion R).

In this embodiment, the positions of the through holes 80 correspond to the concave portions S. For example, each recess S is formed with nine through holes 80, and the nine through holes 80 are arranged in an array.

Therefore, the hole 80 may not be provided in the concave portion R of the central portion of the seventh rib 17 (the well-shaped rib), and the height h0 of the inner cross-shaped rib 17a relative to the honeycomb side 10b is greater than the thickness t0 of the top plate 10 , in order to improve the strength of the integrated raised floor 8 .

It should be understood that the through holes 80 can also be formed in the concave portions S of the integrated raised floors 2 to 7 of the second to seventh embodiments. For example, based on the third embodiment, the rows of perforations 80 are symmetrically arranged relative to the cross-shaped auxiliary ribs 38, as shown in FIG. 8B; or, based on the fourth embodiment, the rows of perforations 80 are separated by the auxiliary ribs 48 so that each row The tie has three perforations 80, as shown in Figure 8C.

To sum up, the heights h1, h3, h5 and h7 of the main ribs of the rib structures 1a to 7a relative to the honeycomb sides 10b to 70b are all at least 25 mm for the integrated raised floors 1 to 8 of this creation. , in order to improve the structural strength of the integrated elevated floor 1~8, so the integrated elevated floor 1~8 can withstand the heavier equipment in the semiconductor process, so as to avoid the integrated elevated floor 1~8 in use. Fragmentation problem. Further, the height h1~h7 and width d1~d7 of the rib are adjusted according to the bearing load of the integrated elevated floor 1~8, that is, the height h1~h7 and the width d1~d7 of the rib are small when the bearing load is small. It is also smaller in order to save the material of the integrated raised floor 1~8 and reduce the weight.

Furthermore, through the design of the auxiliary ribs 38-78, the structural strength of the integrated raised floor 3-7 can be further enhanced.

The above-mentioned embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Anyone skilled in the art can make modifications to the above embodiments without departing from the spirit and scope of the present creation. Therefore, the protection scope of the rights of this creation should be listed in the patent application scope mentioned later.

1,2,3,4,5,6,7,8: Integrated raised floor 1a, 2a, 3a, 4a, 5a, 6a, 7a: Rib structure 1b, 2b, 3b, 4b, 5b, 6b, 7b: feet 1c: Ejector position 1d, 2d, 3d, 4d, 5d, 6d, 7d: Wings 10, 20, 30, 40, 50, 60, 70: top plate 10a, 20a, 30a, 40a, 50a, 60a, 70a: Ground side 10b, 20b, 30b, 40b, 50b, 60b, 70b: Honeycomb side 11, 21, 31, 41, 51, 61, 71: First rib 12, 22, 32, 42, 52, 62, 72: Second rib 13, 23, 33, 43, 53, 63, 73: Third rib 14, 14a, 24, 34, 34a, 44, 44a, 54, 64, 74: Fourth rib 15, 25, 35, 35a, 45, 55, 65, 75: Fifth rib 16, 16a, 26, 36, 36a, 46, 46a, 56, 66, 76: Sixth Rib 17, 27, 37, 47, 57, 67, 77: Seventh Rib 17a, 27a, 37a, 47a, 57a, 67a, 77a: cruciform ribs 38, 48, 58, 68, 78: Auxiliary ribs 80: perforation d1~d8: width H: total height h0~h8: height L: length R, S: Recess T: height and t0, t1: thickness w: separation distance

FIG. 1A is a three-dimensional schematic diagram of the first embodiment of the integrated raised floor of the present invention.

FIG. 1B is a front plan view of FIG. 1A .

FIG. 1C is a cross-sectional view of FIG. 1B taken along the line C-C in one of the directions.

FIG. 1D is a cross-sectional view of FIG. 1B taken along the line D-D in another direction.

FIG. 1E is a schematic perspective view of FIG. 1A from another perspective.

FIG. 2A is a three-dimensional schematic diagram of the second embodiment of the integrated raised floor of the present invention.

FIG. 2B is a cross-sectional view of FIG. 2A along the X-X line in one of the directions.

FIG. 3A is a three-dimensional schematic diagram of the third embodiment of the integrated raised floor of the present invention.

FIG. 3B is a plan view from the front of FIG. 3A .

FIG. 3C is a cross-sectional view of FIG. 3B taken along the C-C line in one of the directions.

3D is a cross-sectional view of FIG. 3B taken along the D-D line in another direction.

FIG. 4A is a three-dimensional schematic diagram of the fourth embodiment of the integrated raised floor of the present invention.

FIG. 4B is a plan view from the front of FIG. 4A .

FIG. 4C is a cross-sectional view of FIG. 4B taken along the C-C line in one of the directions.

FIG. 5A is a three-dimensional schematic diagram of the fifth embodiment of the integrated raised floor of the present invention.

FIG. 5B is a cross-sectional view of FIG. 5A along the X-X line in one of the directions.

FIG. 6A is a three-dimensional schematic diagram of the sixth embodiment of the integrated raised floor of the present invention.

FIG. 6B is a cross-sectional view of FIG. 6A along the X-X line in one of the directions.

FIG. 7A is a three-dimensional schematic diagram of the seventh embodiment of the integrated raised floor of the present invention.

FIG. 7B is a cross-sectional view of FIG. 7A taken along the X-X line in one of the directions.

FIG. 8A is a front plan view of the eighth embodiment of the integrated raised floor of the present invention.

8B and 8C are front plan views of other aspects of FIG. 8A.

FIG. 8D is a perspective view of FIG. 8A from another perspective.

1: Integrated raised floor

1a: Rib structure

1b: Foot seat

1d: wing plate

10: top plate

10a: Ground side

10b: Hive side

11: First Rib

12: Second Rib

13: Third Rib

14: Fourth Rib

15: Fifth rib

16: Sixth Rib

17: Seventh Rib

17a: Cross Ribs

H: total height

h0~h7: height

d1~d7: width

T: height and

t0, t1: thickness

R, S: Recess

Claims (15)

An integrated raised floor, comprising: a top plate having opposing ground and honeycomb sides; and The rib structure is arranged on the honeycomb side of the top plate to form a plurality of concave parts, wherein the rib structure defines a first rib, a second rib, a third rib, a fourth rib and a fourth rib in sequence from the edge of the top plate to the middle. Ribs, fifth, sixth and seventh ribs, and the height of the first, third, fifth and seventh ribs with respect to the honeycomb side is at least 25 mm as the main ribs, and The height of the second rib, the fourth rib and the sixth rib with respect to the honeycomb side is lower than 25 mm to serve as the middle rib. The integrated raised floor of claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side. The integrated raised floor as claimed in claim 1, wherein the first rib is formed on the edge of the ceiling to become a side rib of the integrated elevated floor, used as a frame of the integrated elevated floor for fixing feet seat. The integrated raised floor of claim 1, wherein the height of the first rib relative to the honeycomb side is higher than the heights of the second rib to the seventh rib relative to the honeycomb side, and the first rib and the The sum of the heights of the top plate is 47 to 58 mm, and the thickness of the top plate is 2.5 to 3.2 mm. The integrated raised floor according to claim 1, wherein the width of the first rib is 7 to 8 mm. The integrated raised floor according to claim 1, wherein the height of the third rib relative to the honeycomb side is 25 to 38 mm, the height of the fifth rib relative to the honeycomb side is 32 to 38 mm, And the height of the seventh rib relative to the honeycomb side is 34.5 to 45 mm. The integrated raised floor of claim 1, wherein the width of the third rib is 2.5 to 3 mm, the width of the fifth rib is 2.5 to 3 mm, and the width of the seventh rib is 4 to 3 mm 6 mm. The integrated raised floor according to claim 1, wherein the height of the second rib, the fourth rib and the sixth rib relative to the honeycomb side is 8 to 20 mm. The integrated raised floor according to claim 1, wherein the width of the second rib, the fourth rib and the sixth rib is 2.5 to 3.2 mm. The integrated raised floor according to claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the concave portions, so that a single concave portion A plurality of the auxiliary ribs are arranged. The integrated raised floor as claimed in claim 10, wherein the plurality of auxiliary ribs extend in multiple directions and are staggered. The integrated raised floor according to claim 10, wherein the height of the auxiliary rib relative to the honeycomb side is 2 to 6 mm, and the width thereof is 2.5 to 3 mm. The integrated raised floor according to claim 1, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations correspond to the plurality of recesses. The integrated raised floor as claimed in claim 1, wherein the rib structure is longitudinally and laterally tied with two of the seventh ribs to form a well-shaped rib, so as to divide the integrated raised floor into four areas, the 25 sub-regions are formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib in the four regions, each of which has a recess, the first rib to sixth rib The ribs are symmetrically distributed on the basis of the well-shaped rib, and another concave portion is formed in the central part of the well-shaped rib formed by the seventh rib, and a cross-shaped rib is arranged in it, and is arranged around the ceiling. A wing plate is formed, so that the height of the cross-shaped rib and the thickness of the wing plate are greater than the thickness of the top plate, so as to improve the strength of the integrated elevated floor in the middle. The integrated raised floor of claim 14, wherein 21 other sub-areas are separated from the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib in the well-shaped rib , and each of the sub-regions has nine through holes, but the through-holes are not formed in the sub-region of the central part of the well-shaped rib.

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