TWI833349B - Standard grille floor - Google Patents

Abstract

A standard grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 50% ventilation. Therefore, the standard grille floor can meet the needs of cleanliness of semiconductor process.

Description

Standard grille floor

The present invention relates to a floor, in particular to a standard grille floor with high ventilation rate.

Known raised floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, etc., in addition to being used for factory floors in semiconductor manufacturing processes, they can also be used There is a ventilated floor in the process area, but its ventilation rate is less than 20%, which cannot meet the ventilation rate requirements.

However, the grating floor currently used for ditch covers is made by welding, as shown in the TW536257 patent. Due to the welding forming process, it is easy to deform, and is prone to defects and fractures.

Furthermore, the ventilation volume of the existing grille floor is too small, resulting in insufficient return air volume, which cannot meet the cleanliness requirements of the semiconductor process.

In addition, it is known that the structural strength of the conventional grid floor is often insufficient. Therefore, when the heavier equipment used in the semiconductor manufacturing process is carried on the grid floor, the grid floor is prone to breakage.

On the other hand, existing grille floors also have the problem of being too heavy, which not only wastes materials but also increases manufacturing costs.

Therefore, how to overcome the various problems of the above-mentioned conventional technologies has become an urgent problem that the industry needs to overcome.

In view of the shortcomings of the above-mentioned conventional technologies, the present invention provides a standard grille floor, which includes: a top plate with an opposite ground side and a honeycomb side, wherein a plurality of holes are formed on the top plate to connect the ground side and the honeycomb side. Perforations on the side to form more than 50% of the ventilation volume; and a plurality of rib structures, which are integrally cast with the top plate using aluminum alloy, and are provided on the honeycomb side of the top plate to form a plurality of recesses to allow each There are three perforations in the recess, wherein the rib structure is defined sequentially from the edge of the ceiling to the middle with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, and a sixth rib. and the seventh rib, and the height of the first rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side is at least 25 mm as the main rib, and the second rib, The height of the fourth rib and the sixth rib relative to the side of the honeycomb is less than 25 mm, serving as the middle rib.

In the aforementioned standard grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforementioned standard grille floor, the first rib is formed on the edge of the ceiling to become an edge rib of the standard grille floor and serves as a frame of the standard grille floor.

In the aforementioned standard grille floor, the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 50 mm, and the thickness of the top plate is 2 mm.

In the aforementioned standard grille floor, the width of the first rib is 4.36 to 7.5 mm.

In the aforementioned standard grille floor, the height of the third rib, the fifth rib and the seventh rib relative to the honeycomb side is 32 to 45 mm.

In the aforementioned standard grille floor, the width of the third rib, the fifth rib and the seventh rib is 3.2 to 5 mm.

In the aforementioned standard grille floor, the height of the second rib, the fourth rib and the sixth rib relative to the honeycomb side is 16 to 18 mm.

In the aforementioned standard grille floor, the widths of the second rib, the fourth rib and the sixth rib are all 3.2 mm.

In the aforementioned standard grille floor, the rib structure uses two seventh ribs to form a tic-tac-toe rib in the longitudinal and transverse directions, so as to divide the standard grille floor into four areas. Among the four areas There are 25 sub-regions formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib. Each sub-region has a recess, and the tic-tac-toe formed by the seventh rib Another recess is formed in the central part of the molded rib, and each sub-area has three elongated perforations to form more than 50% of the ventilation volume, and a wing is formed around the ceiling to make the wing The thickness of the board is greater than the thickness of the top board.

In the aforementioned standard grille floor, the rib structure includes a plurality of auxiliary ribs with a height lower than the middle rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that two of the recesses are configured in a single recess. Auxiliary ribs. For example, the height of the auxiliary rib relative to the honeycomb side is 10 mm, and the width is 3 mm.

In the aforementioned standard grille floor, the width of the first rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the width of the first rib and the seventh rib at the middle part of the honeycomb side. , to reduce the weight of the standard grille floor.

In the aforementioned standard grille floor, the first rib is formed with feet at four corners of the standard grille floor, and the feet are fixed on the support legs.

It can be seen from the above that in the standard grille floor of the present invention, the top plate and the plurality of rib structures are mainly made of aluminum alloy to be integrally molded and cast, so that deformation will not occur during the production of the standard grille floor, and it will not easily occur. Problems such as defects and breaks, therefore, compared with the conventional technology, the standard grille floor of the present invention has excellent reliability.

Furthermore, through the design of these perforations, more than 50% of the ventilation volume can be formed, so the ventilation volume can be increased to meet the cleanliness requirements of the semiconductor process.

In addition, the height of the main ribs of the rib structure relative to the honeycomb side is at least 25 mm to enhance the structural strength of the standard grille floor. Therefore, compared with the conventional technology, the standard grille floor can withstand Heavier equipment in the semiconductor manufacturing process to avoid the problem of chipping of the standard grille floor during use.

The following describes the implementation of the present invention through specific embodiments. Those familiar with the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to coordinate with the content disclosed in the specification for the understanding and reading of those familiar with the art, and are not used to limit the implementation of the present invention. Therefore, it has no technical substantive significance. Any structural modifications, changes in proportions, or adjustments in size shall still fall within the scope of this invention without affecting the effects that can be produced and the purposes that can be achieved. The technical content disclosed by the invention must be within the scope that can be covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" cited in this specification are only for convenience of description and are not used to limit the implementation of the present invention. Changes or adjustments in scope and relative relationships shall also be regarded as the scope within which the present invention can be implemented, provided there is no substantial change in the technical content.

1A to 1E are schematic diagrams of the standard grille floor 1 of the present invention. The standard grille floor 1 of this embodiment is used to carry general loads, and its carrying load is about 1,000 kilograms.

The standard grille floor 1 has a top plate 10 and a plurality of rib structures 1a disposed on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally molded and cast from aluminum alloy. There will be no deformation when making the standard grille floor 1, and it will not easily cause problems such as defects and breakage.

The ceiling 10 has an opposite ground side 10a and a honeycomb side 10b, and the honeycomb side 10b is respectively provided with a plurality of rib structures 1a in the longitudinal and transverse directions, between the longitudinal and transverse rib structures 1a. A plurality of recessed portions S are formed. Figures 1C and 1D only show the longitudinal rib structure 1a. The transverse rib structure 1a is arranged in the same manner as the longitudinal rib structure 1a to form a symmetrical structure, so the cross-section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, with a length L of 600 mm and a thickness t0 of 2 mm, and a wing plate 1d (thickness t1 of 6 mm) is formed around the top plate 10. is greater than the thickness t0 of the top plate 10), and feet 1b are formed on the four corners of the standard grille floor 1, the bottom of which is L-shaped convex (it can also be L-shaped concave). The base 1b is fixed on the support bracket (not shown). For example, the foot base 1b is used to adjust the total height H of the standard grille floor 1 so that when multiple standard grille floors 1 are spliced together, they can be located on the same level.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a square area with a plurality of ejector positions 1c (approximately every four recesses S) on the honeycomb side 10b. (corner above) honeycomb structure.

The rib structure 1a is defined with a first rib 11, a second rib 12, and a third rib in sequence from the edge of the ceiling 10 to the middle (or the left and right middle direction as shown in Figure 1C and Figure 1D). 13. The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the first, third, fifth and seventh ribs 11, 13, 15 and 17 are relative to the honeycomb side 10b. The heights h1, h3, h5 and h7 are at least 25 millimeters (mm), and the heights h2, h4 and h6 of the second, fourth and sixth ribs 12, 14 and 16 relative to the honeycomb side 10b are less than 25 mm, so the first, third, fifth and seventh ribs 11,13,15,17 are used as main ribs, and the second, fourth and sixth ribs 12,14,16 are used as middle ribs , wherein the first to sixth ribs 11 to 16 are distributed symmetrically (or symmetrically up and down as shown in Figure 1B) based on the seventh rib 17, so that the second rib 12, the third rib 13, The distance w between the fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first rib 11 is formed on the edge of the ceiling 10 to become an edge rib of the standard grille floor 1 , and serves as the frame of the standard grille floor 1 for fixing the foot base. 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 48 mm, which is greater than the heights h2 ~ h7 of the second to seventh ribs 12 to 17 relative to the honeycomb side 10b, and the height h1 of the first rib 11 relative to the honeycomb side 10b is 48 mm. The sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness to of the top plate 10 is 50 mm (ie T=h1+t0), and the height of the foot base 1b and the height of the first rib 11 relative to The total height H of the height h1 of the honeycomb side 10b and the thickness t0 of the top plate 10 is the foot height of the standard grille floor 1, which is 60 mm.

Furthermore, the heights h2 ~ h7 of the second to seventh ribs 12 ~ 17 of the rib structure 1a can be the same or different according to requirements, as shown in Figure 1C. For example, the height h3 of the third rib 13 relative to the honeycomb side 10b is 32mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 32mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 45mm, The height h2 of the second rib 12 relative to the honeycomb side 10b is 18 mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 16 mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 16 mm, where , the two longitudinal and transverse seventh ribs 17 form a tic-tac-shape rib, so as to divide the standard grille floor 1 into four areas. Each area is adjacent to the second rib 12, the third rib 13, and the third rib. Twenty-five sub-regions are formed between the fourth rib 14, the fifth rib 15 and the sixth rib 16. Each sub-region has a recess S, and another type of recess R is formed in the center of the tic-tac-toe rib. Furthermore, the thickness of the top plate 10 in the recessed portion R can be increased as required or be the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are arranged in the recessed portion R to improve the standard grille floor 1 Compressive strength in the middle. For example, since the height h2 of the second rib 12 relative to the honeycomb side 10b is lower than the height h1 of the first rib 11 relative to the honeycomb side 10b, when the standard grille floor 1 is fixed on a tripod for a raised floor , the four feet of the standard grille floor 1 are supported by the bottom of the first rib 11 .

In addition, the widths d1 to d7 of each rib can be the same or different according to requirements, as shown in Figure 1C. For example, the width d1 of the first rib 11 is 7.5mm, the width d2 of the second rib 12 is 3.2mm, the width d3 of the third rib 13 is 3.2mm, the width d4 of the fourth rib 14 is 3.2mm, and the width d4 of the fifth rib 15 is 3.2mm. The width d5 of the rib is 3.2mm, the width d6 of the sixth rib 16 is 3.2mm, and the width d7 of the seventh rib 17 is 5mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different extending positions as required. For example, the widths d1 and d7 of the local ribs can be adjusted. As shown in FIG. 1D , the widths d1 and d7 of the first rib 11 and the seventh rib 17 on the opposite sides of the honeycomb side 10b are smaller, wherein, The width d1 of the first rib 11 is 4.36 mm, and the width d7 of the seventh rib 17 is 3.6 mm, which are respectively smaller than the widths of the first rib 11 and the seventh rib 17 in the middle of the honeycomb side 10b shown in Figure 1C d1, d7, to reduce the weight of the standard grille floor 1, and the widths d2, d3, d4, d5 of the second, third, fourth, fifth and sixth ribs 12, 13, 14, 15, 16 ,d6 remains unchanged.

In addition, the rib structure 1a can add a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than other ribs as needed. As shown in Figure 1C, its height h8 (such as 10mm) relative to the honeycomb side 10b is lower than that of the middle rib. The heights h2, h4, and h6 of the honeycomb side 10b are 3 mm, and the width d8 is 3 mm. For example, the auxiliary ribs 17a, 18 are correspondingly formed in each of the recesses R, S, and extend in a single direction without intersecting with each other. As shown in Figure 1C, the single recess R, S is equipped with two parallel auxiliary ribs 17a. ,18.

Furthermore, the standard grille floor 1 forms a plurality of perforations 100 on the ceiling 10 connecting the ground side 10a and the honeycomb side 10b, and uses the seventh rib 17 (two seventh ribs 17 in the longitudinal and transverse directions). The formed tic-tac-shaped rib) divides the honeycomb side 10b into four areas (four corner areas), each area forms 25 sub-areas (corresponding to the position of the recess S), and the tic-tac-shaped rib extends outward ( cross area), 21 other sub-areas (corresponding to the recess R) can be separated by these ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16). , S position), so that each sub-area has three long strips of perforations 100 to form more than 50% of the ventilation volume.

In this embodiment, the positions of the through holes 100 are configured corresponding to the recesses R and S. For example, three through holes 100 are formed on each recess R, S, and the three through holes 100 are spaced side by side, and the auxiliary ribs 17a, 18 separate each through hole 100; in addition, the first and second ribs 11, The recess S between 12 has only one through hole 100 , that is, no auxiliary rib 18 is provided.

Therefore, the standard grille floor 1 can not only increase ventilation through the design of the perforations 100, but also help save materials and reduce weight, and can also increase the load-bearing weight.

In addition, the thickness t0 of the top plate 10 of the standard grille floor 1 is small, and the heights h2, h4, h6 of most of the rib structure 1a are also small, that is, the middle ribs (the second, fourth and fourth ribs) The heights h2, h4, and h6 of the sixth rib (12, 14, and 16) are smaller than the heights h1, h3, h5, and h7 of the main ribs (the first rib 11, the third rib 13, the fifth rib 15, and the seventh rib 17). In order to save materials and reduce weight.

To sum up, the standard grille floor 1 of the present invention is mainly formed by the top plate 10 and the plurality of rib structures 1a being integrally molded and cast from aluminum alloy, and the transverse ribs and the longitudinal ribs are arranged in the same manner to form a symmetrical structure. There will be no deformation when making the standard grille floor 1, and it is less likely to cause problems such as defects and breaks. Therefore, compared with the conventional technology, the standard grille floor 1 of the present invention not only has excellent reliability, but also is beneficial to Improve yield and save production costs.

Furthermore, through the design of the perforations 100, more than 50% of the ventilation volume can be formed, so the ventilation volume can be increased, which can meet the demand for higher return air volume around the semiconductor processing equipment and the shower room, so as to improve the efficiency of the semiconductor manufacturing process. Purity.

In addition, the standard grille floor 1 of the present invention mainly improves the standard grille by having the heights h1, h3, h5 and h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b being at least 25 mm. Due to the structural strength of the floor 1, the standard grille floor 1 can withstand the heavier equipment used in the semiconductor manufacturing process to avoid the problem of the standard grille floor 1 breaking during use. Furthermore, the height h1~h7 and width d1~d7 of the ribs are adjusted according to the load-bearing size of the standard grille floor 1. That is, if the load-bearing load is small, the height h1~h7 and width d1~d7 of the ribs are also Smaller to save material and weight of the standard grille floor 1.

Furthermore, through the design of the auxiliary ribs 17a, 18, the structural strength of the standard grille floor 1 can be further improved.

The above embodiments are used to illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can make modifications to the above embodiments without departing from the spirit and scope of the invention. Therefore, the scope of rights protection of the present invention should be as listed in the patent application scope described below.

1: Standard grille floor 1a: Rib structure 1b: Foot base 1c: thimble position 1d:wing plate 10:Top plate 10a: Ground side 10b: hive side 100: perforation 11:First rib 12:Second rib 13:Third rib 14:Fourth rib 15:Fifth rib 16:Sixth rib 17:Seventh rib 17a,18: Auxiliary ribs d1~d8: width H: total height h1~h8: height L: length R,S: concave part T: sum t0,t1:Thickness w: separation distance

Figure 1A is a schematic three-dimensional view of the standard grille floor of the present invention.

Figure 1B is a front plan view of Figure 1A.

Figure 1C is a cross-sectional view along line C-C of Figure 1B.

Figure 1D is a cross-sectional view along line D-D of Figure 1B.

FIG. 1E is a perspective view of FIG. 1A from another perspective.

1: Standard grille floor

1a: Rib structure

1d:wing plate

10:Top plate

10a: Ground side

10b: hive side

100: perforation

11:First rib

12:Second rib

13:Third rib

14:Fourth rib

15:Fifth rib

16:Sixth rib

17:Seventh rib

17a,18: Auxiliary ribs

H: total height

h1~h8: height

d1~d8: width

T: sum

t0,t1:Thickness

R,S: concave part

Claims (11)

A standard grille floor includes: a ceiling plate, which has an opposite ground side and a honeycomb side, wherein the ceiling plate is formed with a plurality of perforations connecting the ground side and the honeycomb side to form a ventilation volume of more than 50% ; and a plurality of rib structures, which are integrally molded and cast with the top plate using aluminum alloy, and are provided on the honeycomb side of the top plate to form a plurality of recessed portions, so that each recessed portion has three such perforations, wherein the The rib structure is defined in order from the edge of the floor to the middle, with the first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib, and the first rib, the The height of the third rib, the fifth rib and the seventh rib relative to the honeycomb side is at least 25 mm as the main rib, and the height of the second rib, the fourth rib and the sixth rib relative to the honeycomb side is at least 25 mm. The height of the honeycomb side is less than 25 mm, serving as the middle rib, wherein the width of the first rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the width of the middle portion of the honeycomb side. The width of the first rib and the seventh rib is to reduce the weight of the standard grille floor. The standard grille floor as claimed in claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side. The standard grille floor as claimed in claim 1, wherein the first rib is formed on the edge of the ceiling to become an edge rib of the standard grille floor and serves as a frame of the standard grille floor. The standard grille floor as claimed in claim 1, wherein the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 50 mm, and the thickness of the top plate is 2 mm. . The standard grille floor as claimed in claim 1, wherein the width of the first rib is 4.36 to 7.5 mm. The standard grille floor as described in claim 1, wherein the height of the third rib, the fifth rib and the seventh rib relative to the honeycomb side is 32 to 45 mm. The width of the ribs and seventh rib is 3.2 to 5 mm. The standard grille floor as described in claim 1, wherein the height of the second rib, the fourth rib and the sixth rib relative to the honeycomb side is 16 to 18 mm, and the height of the second rib, the fourth rib The width of the sixth rib and the sixth rib are both 3.2 mm. The standard grille floor as claimed in claim 1, wherein the rib structure uses two seventh ribs to form a tic-tac-shape rib in the longitudinal and transverse directions, so as to divide the standard grille floor into four areas. , 25 sub-regions are formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib in the four regions, each of the sub-regions has a recess, and in the seventh rib Another recess is formed in the center of the tic-tac-shaped rib formed by the ribs, and has three long strip-shaped perforations in each sub-area to form more than 50% of the ventilation volume, and is formed around the ceiling. A wing plate, such that the thickness of the wing plate is greater than the thickness of the top plate. The standard grille floor as claimed in claim 1, wherein the rib structure includes a plurality of auxiliary ribs with a height lower than the middle rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that a single recess The middle series is equipped with two of these auxiliary ribs. The standard grille floor as claimed in claim 9, wherein the height of the auxiliary rib relative to the honeycomb side is 10 mm and the width is 3 mm. The standard grille floor as claimed in claim 1, wherein the first rib is formed with feet on four corners of the standard grille floor, and the feet are fixed on the support legs.