TWI831369B - Heavy grille floor - Google Patents

Abstract

A heavy grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 50% ventilation. Therefore, the heavy grille floor can meet the needs of cleanliness of semiconductor process.

Description

Heavy duty grating floor

The present invention relates to a floor, in particular to a heavy-duty grille floor with high ventilation rate.

Known raised floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, etc., in addition to being used for factory floors in semiconductor manufacturing processes, they can also be used There is a ventilated floor in the process area, but its ventilation rate is less than 20%, which cannot meet the ventilation rate requirements.

However, the grating floor currently used for ditch covers is made by welding, as shown in the TW536257 patent. Due to the welding forming process, it is easy to deform, and is prone to defects and fractures.

Furthermore, the ventilation volume of the existing grille floor is too small, resulting in insufficient return air volume, which cannot meet the cleanliness requirements of the semiconductor manufacturing process.

In addition, it is known that the structural strength of the conventional grid floor is often insufficient. Therefore, when the heavier equipment used in the semiconductor manufacturing process is carried on the grid floor, the grid floor is prone to breakage.

On the other hand, existing grille floors also have the problem of being too heavy, which not only wastes materials but also increases manufacturing costs.

Therefore, how to overcome the various problems of the above-mentioned conventional technologies has become an urgent problem that the industry needs to overcome.

In view of the shortcomings of the above-mentioned conventional technologies, the present invention provides a heavy-duty grille floor, which includes: a top plate with an opposite ground side and a honeycomb side, wherein a plurality of holes are formed on the top plate to connect the ground side and the honeycomb side. perforations to form more than 50% of the ventilation volume; and a plurality of rib structures, which are integrally cast with aluminum alloy with the ceiling plate, and a plurality of recesses are formed on the honeycomb side of the ceiling plate to allow the inside of each recess to There are three such perforations, wherein the rib structure is defined sequentially from the edge of the floor plate to the middle with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib. Ribs, and the first to seventh ribs are used as main ribs, and their height relative to the side of the honeycomb is at least 25 mm.

In the aforementioned heavy-duty grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforementioned heavy-duty grille floor, the first rib is formed on the edge of the ceiling to become an edge rib of the heavy-duty grille floor and serves as a frame of the heavy-duty grille floor.

In the aforementioned heavy-duty grille floor, the sum of the thickness of the first rib relative to the honeycomb side and the top plate is 59.5 mm, and the thickness of the top plate is 2 mm.

In the aforementioned heavy-duty grille floor, the width of the first rib is 7 to 9.5 mm.

In the aforementioned heavy-duty grille floor, the heights of the first to seventh ribs relative to the honeycomb side are 50 to 57.5 mm.

In the aforementioned heavy-duty grille floor, the width of the second rib to the seventh rib is 3.5 to 7 mm.

In the aforementioned heavy-duty grille floor, the rib structure uses two seventh ribs to form a tic-tac-shape rib in the longitudinal and transverse directions, so as to divide the heavy-duty grille floor into four areas, with adjacent areas in the four areas. There are 25 sub-regions formed between the second rib, third rib, fourth rib, fifth rib and sixth rib. Each sub-region has a recess, and the tic-tac-toe rib formed by the seventh rib Another recess is formed in the central part of the ceiling, and each sub-area has three long strips of the perforations to form more than 50% of the ventilation volume, and a wing is formed around the ceiling to make the wing The thickness is greater than the thickness of the top plate.

In the aforementioned heavy-duty grille floor, the rib structure includes a plurality of auxiliary ribs with a height lower than the main rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that two of the auxiliary ribs are configured in a single recess. rib. For example, the height of the auxiliary rib relative to the honeycomb side is 25 mm, and the width is 3 mm.

In the aforementioned heavy grille floor, the widths of the first rib, the second rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the width of the first rib and the seventh rib at the middle part of the honeycomb side. The width of the second rib and the seventh rib is to reduce the weight of the heavy grille floor.

In the aforementioned heavy-duty grille floor, the first rib and the second rib are formed with feet on the four corners of the heavy-duty grille floor, and the feet are fixed on the support legs.

It can be seen from the above that in the heavy-duty grille floor of the present invention, the top plate and the plurality of rib structures are mainly made of aluminum alloy to be integrally molded and cast, so that deformation will not occur during the production of the heavy-duty grille floor, and defects will not easily occur. There are problems such as breakage, so compared with the conventional technology, the heavy-duty grating floor of the present invention has excellent reliability.

Furthermore, through the design of these perforations, more than 50% of the ventilation volume can be formed, so the ventilation volume can be increased to meet the cleanliness requirements of the semiconductor process.

In addition, the height of the main ribs of the rib structure relative to the honeycomb side is at least 25 mm to enhance the structural strength of the heavy-duty grille floor (for example, it can carry at least 3,000 kilograms of machine equipment). Therefore, compared with According to the conventional technology, the heavy-duty grid floor can withstand the heavier equipment used in the semiconductor manufacturing process, thereby preventing the heavy-duty grid floor from breaking during use.

The following describes the implementation of the present invention through specific embodiments. Those familiar with the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to coordinate with the content disclosed in the specification for the understanding and reading of those familiar with the art, and are not used to limit the implementation of the present invention. Therefore, it has no technical substantive significance. Any structural modifications, changes in proportions, or adjustments in size shall still fall within the scope of this invention without affecting the effects that can be produced and the purposes that can be achieved. The technical content disclosed by the invention must be within the scope that can be covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" cited in this specification are only for convenience of description and are not used to limit the implementation of the present invention. Changes or adjustments in scope and relative relationships shall also be regarded as the scope within which the present invention can be implemented, provided there is no substantial change in the technical content.

1A to 1E are schematic diagrams of the heavy-duty grille floor 1 of the present invention. The heavy-duty grille floor 1 of this embodiment is used to carry heavier loads, and its load-bearing load is greater than 3,000 kilograms.

The heavy-duty grille floor 1 has a top plate 10 and a plurality of rib structures 1a provided on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally molded and cast with aluminum alloy for easy production. The heavy-duty grille floor 1 will not deform at any time and is not prone to defects, breakage and other problems.

The top plate 10 has an opposite ground side 10a and a honeycomb side 10b, and the honeycomb side 10b is respectively provided with the rib structure 1a in the longitudinal and transverse directions to form between the plurality of rib structures 1a in the longitudinal and transverse directions. A plurality of recessed portions S, among which, Figure 1C and Figure 1D only show the longitudinal rib structure 1a, and the transverse rib structure 1a is arranged in the same manner as the longitudinal rib structure 1a to form a symmetry, so the cross-section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, with a length L of 600 mm and a thickness t0 of 2 mm, and a wing plate 1d (thickness t1 of 6 mm) is formed around the top plate 10. is greater than the thickness t0 of the top plate 10), and feet 1b are formed on the four corners of the heavy-duty grille floor 1, the bottom of which is L-shaped convex (it can also be L-shaped concave). 1b are respectively fixed on four supporting tripods (not shown). For example, the foot base 1b is used to adjust the total height H of the heavy-duty grille floor 1 so that the plurality of heavy-duty grille floors 1 can be located on the same level when spliced together.

Furthermore, the ground side 10a is a flat surface, and the recessed portions S are arranged in an array to form a square area with a plurality of ejector positions 1c (approximately every four recessed portions S) on the honeycomb side 10b. (corner above) honeycomb structure.

The rib structure 1a is defined with a first rib 11, a second rib 12, and a third rib in sequence from the edge of the ceiling 10 to the middle (or the left and right middle direction as shown in Figure 1C and Figure 1D). 13. The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the heights h1~h7 of the first rib 11 to the seventh rib 17 relative to the honeycomb side 10b are all at least 25 mm. (mm), so the first to seventh ribs 11 to 17 serve as main ribs, in which the first to sixth ribs 11 to 16 are symmetrical with the seventh rib 17 as the basis (or as shown in Figure 1B (symmetrical up and down) distribution, so that the distance w between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first ribs 11 are formed on the edge of the ceiling 10 to become side ribs of the heavy-duty grille floor 1 and serve as the frame of the heavy-duty grille floor 1 for fixing the foot base 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 57.5mm (equal to the height h2, h7 of the second and seventh ribs 12, 17 relative to the honeycomb side 10b), which is greater than the height h1 of the third to sixth ribs 12 and 17 relative to the honeycomb side 10b. The heights h3~h7 of the ribs 13~16 relative to the honeycomb side 10b, and the sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 in this embodiment is 59.5 mm ( That is, T=h1+t0), and the total height H of the height of the foot base 1b, the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 is the foot of the heavy grille floor 1 high, and the total height H of this embodiment is 60mm.

Furthermore, the heights h2 to h7 of the second to seventh ribs of the rib structure 1a can be the same or different as required, and the main ribs between the first rib 11 and the recess S in the middle (i.e., the second to seventh ribs) The seventh rib (12~17) is arranged as shown in Figure 1C. For example, the height h2 of the first rib 11 and the second rib 12 relative to the honeycomb side 10b is 57.5mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 50mm, and the height h2 of the fourth rib 14 relative to the honeycomb side 10b is 50mm. The height h4 of the side 10b is 50mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 50mm, the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 50mm, and the seventh rib 17 relative to the honeycomb side The height h7 of 10b is 57.5mm, in which the two longitudinal and transverse seventh ribs 17 form a tic-tac-shape rib to divide the heavy-duty grille floor 1 into four areas, each area is adjacent to the second rib 12. 25 sub-regions are formed between the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16. Each sub-region has a recess S, and another tic-tac-toe rib is formed in the center of the rib. The concave part R of the form. Furthermore, the thickness of the top plate 10 in the recessed portion R can be increased as required or be the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are arranged in the recessed portion R to increase the thickness of the heavy-duty grille floor 1. Compressive strength in the middle. For example, since the height h2 of the second rib 12 relative to the honeycomb side 10b is equal to the height h1 of the first rib 11 relative to the honeycomb side 10b, when the heavy grille floor 1 is fixed on a tripod for a raised floor, the The four foot positions of the heavy-duty grille floor 1 are supported by the bottoms of the first rib 11 and the second rib 12 .

In addition, the widths d1 to d7 of each rib can be the same or different according to requirements, as shown in Figure 1C. For example, the width d1 of the first rib 11 is 9.5mm, the width d2 of the second rib 12 is 7mm, the width d3 of the third rib 13 is 3.5mm, the width d4 of the fourth rib 14 is 3.5mm, and the width d4 of the fifth rib 15 is 3.5mm. The width d5 is 3.5 mm, the width d6 of the sixth rib 16 is 3.5 mm, and the width d7 of the seventh rib 17 is 6 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different extending positions as required. For example, the widths d1, d2, and d7 of the local ribs can be adjusted, such as the width d1 of the first rib 11, the second rib 12, and the seventh rib 17 at the opposite sides of the honeycomb side 10b as shown in Figure 1D. , d2 and d7 are smaller. Among them, the width d1 of the first rib 11 is 7mm, the width d2 of the second rib 12 is 4mm, and the width d7 of the seventh rib 17 is 4.2mm, which are respectively smaller than those shown in Figure 1C The widths d1, d2, and d7 of the first rib 11, the second rib 12, and the seventh rib 17 in the middle part of the honeycomb side 10b are used to reduce the weight of the heavy grille floor 1, and the third, fourth, and fourth ribs are The widths d3, d4, d5, and d6 of the fifth and sixth ribs 13, 14, 15, and 16 remain unchanged.

In addition, the rib structure 1a can add a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than the main rib according to the needs. As shown in Figure 1C, its height h8 (such as at least 25mm) relative to the honeycomb side 10b is lower than the main rib. The ribs have heights h1 to h7 relative to the honeycomb side 10b, and their width d8 is 3 mm. For example, the auxiliary ribs 18 are correspondingly formed in each recess S and extend in a single direction without intersecting with each other. As shown in FIG. 1C , a single recess S is equipped with two parallel auxiliary ribs 18 .

Furthermore, the heavy-duty grille floor 1 is formed on the ceiling 10 with a plurality of perforations 100 connecting the ground side 10a and the honeycomb side 10b, and is connected with the seventh rib 17 (two seventh ribs 17 in the longitudinal and transverse directions). The honeycomb side 10b is divided into four areas (four corner areas) to form a tic-tac-toe rib), and each area forms 25 sub-areas (corresponding to the position of the recess S), and the tic-tac-toe rib extends outward (cross area), 21 other sub-areas (corresponding to the recess R, can be separated by the ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16)) S position), so that each sub-area has three long strips of perforations 100 to form more than 50% of the ventilation volume.

In this embodiment, the positions of the through holes 100 are configured corresponding to the recesses R and S. For example, three through holes 100 are formed on each recess R, S, and the three through holes 100 are spaced side by side, and the auxiliary ribs 17a, 18 separate each through hole 100; in addition, the first and second ribs 11, The recess S between 12 has only one through hole 100 , that is, no auxiliary rib 18 is provided.

Therefore, the heavy-duty grille floor 1 can not only increase ventilation through the design of the perforations 100, but also help save materials and reduce weight, and can also increase the load-bearing weight.

In addition, the thickness t0 of the top plate 10 of the heavy-duty grille floor 1 is small, which is beneficial to saving materials and reducing weight.

In addition, a concave surface is formed between the seventh rib 17 and the first rib 11 to reduce the weight of the heavy-duty grille floor 1 .

To sum up, the heavy-duty grille floor 1 of the present invention mainly uses aluminum alloy to integrally mold the top plate 10 and the plurality of rib structures 1a, and the transverse ribs and the longitudinal ribs are arranged in the same manner to form a symmetrical structure. There will be no deformation when making the heavy-duty grating floor 1, and it is less likely to cause problems such as defects and breaks. Therefore, compared with the conventional technology, the heavy-duty grating floor 1 of the present invention not only has excellent reliability, but is also conducive to improving the yield rate. Save production costs.

Furthermore, through the design of the perforations 100, more than 50% of the ventilation volume can be formed, so the ventilation volume can be increased, which can meet the demand for higher return air volume around the semiconductor processing equipment and the shower room, so as to improve the efficiency of the semiconductor manufacturing process. Purity.

In addition, the heights h1~h7 of the ribs of the rib structure 1a relative to the honeycomb side 10b are all at least 25 mm to enhance the structural strength of the heavy-duty grille floor 1, and the adjacent first ribs 11 and The heights h1 and h2 of the second ribs 12 relative to the honeycomb side 10b are both 57.5mm, so that the heavy-duty grille floor 1 can be supported on the tripod at the same time, so the heavy-duty grille floor 1 can withstand heavy loads in the semiconductor manufacturing process. Heavy machine equipment to avoid the problem of the heavy-duty grating floor 1 being broken during use. Furthermore, the heights h1 to h7 and the widths d1 to d7 of the ribs are adjusted according to the load-carrying load of the heavy-duty grille floor 1, thereby saving the material and weight of the heavy-duty grille floor 1.

In addition, through the design of the auxiliary ribs 17a, 18, the structural strength of the heavy-duty grille floor 1 can be further improved.

The above embodiments are used to illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can make modifications to the above embodiments without departing from the spirit and scope of the invention. Therefore, the scope of rights protection of the present invention should be as listed in the patent application scope described below.

1:Heavy duty grating floor

1a: Rib structure

1b: Foot base

1c: thimble position

1d:wing plate

10:Top plate

10a: Ground side

10b: hive side

100: perforation

11:First rib

12:Second rib

13:Third rib

14:Fourth rib

15:Fifth rib

16:Sixth rib

17:Seventh rib

17a,18: Auxiliary ribs

d1~d8: width

H: total height

h1~h8: height

L: length

R,S: concave part

T: sum

t0,t1:Thickness

w: separation distance

Figure 1A is a three-dimensional schematic view of the heavy-duty grille floor of the present invention.

Figure 1B is a front plan view of Figure 1A.

Figure 1C is a cross-sectional view along line C-C of Figure 1B.

Figure 1D is a cross-sectional view along line D-D of Figure 1B.

FIG. 1E is a perspective view of FIG. 1A from another perspective.

1:Heavy duty grating floor

1a: Rib structure

1d:wing plate

10:Top plate

10a: Ground side

10b: hive side

100: perforation

11:First rib

12:Second rib

13:Third rib

14:Fourth rib

15:Fifth rib

16:Sixth rib

17:Seventh rib

17a,18: Auxiliary ribs

d1~d8: width

H: total height

h1~h8: height

R,S: concave part

T: sum

t0,t1:Thickness

Claims (11)

A heavy-duty grille floor includes: a ceiling plate with an opposite ground side and a honeycomb side, wherein the ceiling plate is formed with a plurality of perforations connecting the ground side and the honeycomb side to form a ventilation volume of more than 50%; And a plurality of rib structures, which are integrally molded and cast with the top plate using aluminum alloy, and a plurality of recessed portions are formed on the honeycomb side of the top plate, so that each of the recessed portions has three such perforations, wherein the rib structure is The first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib are defined in sequence from the edge of the floor to the middle, and the first to seventh ribs are The height of the main rib relative to the side of the honeycomb is at least 25 mm, wherein the widths of the first rib, the second rib and the seventh rib on opposite sides of the honeycomb side are respectively smaller than the width of the honeycomb. The width of the first rib, the second rib and the seventh rib in the middle part of the side are increased to reduce the weight of the heavy grille floor. The heavy-duty grille floor as claimed in claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side. The heavy-duty grille floor as claimed in claim 1, wherein the first rib is formed on the edge of the ceiling to become an edge rib of the heavy-duty grille floor to serve as a frame of the heavy-duty grille floor. The heavy-duty grille floor as claimed in claim 1, wherein the sum of the thickness of the first rib relative to the honeycomb side and the floor plate is 59.5 mm, and the thickness of the floor plate is 2 mm. The heavy-duty grille floor as claimed in claim 1, wherein the width of the first rib is 7 to 9.5 mm. The heavy-duty grille floor as claimed in claim 1, wherein the heights of the first to seventh ribs relative to the honeycomb side are 50 to 57.5 mm. The heavy-duty grille floor as claimed in claim 1, wherein the widths of the second to seventh ribs are 3.5 to 7 mm. The heavy-duty grille floor as claimed in claim 1, wherein the rib structure uses two seventh ribs to form a tic-tac-shape rib in the longitudinal and transverse directions, so as to divide the heavy-duty grille floor into four areas. Among the four regions, 25 sub-regions are formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib. Each sub-region has a recess, and is located at the seventh rib. Another recess is formed in the center of the tic-shaped rib, and each sub-area has three elongated perforations to form more than 50% of the ventilation volume, and a wing is formed around the ceiling. , so that the thickness of the wing panels is greater than the thickness of the top panel. The heavy-duty grille floor as claimed in claim 1, wherein the rib structure includes a plurality of auxiliary ribs with a height lower than that of the main rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that in a single recess The system is equipped with two auxiliary ribs. The heavy-duty grille floor as claimed in claim 9, wherein the height of the auxiliary rib relative to the honeycomb side is 25 mm and the width is 3 mm. The heavy-duty grille floor as claimed in claim 1, wherein the first rib and the second rib are formed with feet at four corners of the heavy-duty grille floor, and the feet are fixed on the support legs.