CN117738413A - Light grille floor - Google Patents

Light grille floor Download PDF

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Publication number
CN117738413A
CN117738413A CN202211110459.8A CN202211110459A CN117738413A CN 117738413 A CN117738413 A CN 117738413A CN 202211110459 A CN202211110459 A CN 202211110459A CN 117738413 A CN117738413 A CN 117738413A
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CN
China
Prior art keywords
rib
ribs
grid floor
lightweight grid
honeycomb side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202211110459.8A
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Chinese (zh)
Inventor
黄建德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huiya Science & Technology Suzhou Co ltd
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Huiya Science & Technology Suzhou Co ltd
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Filing date
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Application filed by Huiya Science & Technology Suzhou Co ltd filed Critical Huiya Science & Technology Suzhou Co ltd
Priority to CN202211110459.8A priority Critical patent/CN117738413A/en
Publication of CN117738413A publication Critical patent/CN117738413A/en
Pending legal-status Critical Current

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Abstract

A light grille floor comprises a top plate and a rib structure, wherein the rib structure and the top plate are integrally molded and cast by adopting aluminum alloy, and a plurality of penetrating through holes are formed on the top plate to form ventilation volume of more than 56%, so that the requirement of the semiconductor system Cheng Qing on the purity can be met.

Description

Light grille floor
Technical Field
The present invention relates to a floor, and more particularly, to a light grille floor having a high ventilation rate.
Background
Existing raised floors, such as the TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent, and TWM596253 patent, may be used for the ventilation floor of a process area in addition to the factory floor for a semiconductor process, but the ventilation rate is less than twenty percent, and may not meet the ventilation rate requirement.
However, the grid floor for ditch covers is manufactured by welding, such as the TW536257 patent, and is easy to deform and easily cause defects and breakage due to the welding forming process.
Furthermore, the ventilation rate of the existing grid floor is too small, so that the air return rate is insufficient, and the requirements of the semiconductor system Cheng Qing on the purity cannot be met.
In addition, the existing grid floor often has insufficient structural strength, so that the grid floor is easy to crack when carrying heavy machine equipment in the semiconductor manufacturing process.
On the other hand, the existing grid floor has the problem of being too heavy, not only wasting materials, but also increasing the manufacturing cost.
Therefore, how to overcome the above problems in the prior art has become a major challenge in the industry.
Disclosure of Invention
In view of the foregoing deficiencies of the prior art, the present invention provides a lightweight grid floor that at least partially addresses the problems of the prior art.
The light-duty grille floor of the invention comprises: a ceiling plate having a ground side and a honeycomb side opposite to each other, wherein the ceiling plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to form a ventilation amount of 56% or more; and a plurality of rib structures which are integrally molded with the antenna plate by adopting aluminum alloy and are arranged on the honeycomb side of the antenna plate to form a plurality of concave parts so as to enable two through holes to be formed in each concave part, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna plate to the middle, the heights of the first rib, the fifth rib and the seventh rib relative to the honeycomb side are at least 25 mm to be used as main ribs, and the heights of the second rib, the third rib, the fourth rib and the sixth rib relative to the honeycomb side are lower than 25 mm to be used as middle ribs.
In the light-weight grid floor, the plurality of concave parts are arranged in an array to form a honeycomb structure on the honeycomb side.
In the foregoing lightweight grid floor, the first rib is formed on the edge of the ceiling plate to form a side rib of the lightweight grid floor, so as to serve as a frame of the lightweight grid floor.
In the foregoing lightweight grid floor, the sum of the thickness of the first ribs and the ceiling relative to the honeycomb side is 43mm, and the thickness of the ceiling is 3mm.
In the foregoing lightweight grid floor, the first ribs have a width of 3 to 8mm.
In the foregoing lightweight grid floor, the heights of the fifth ribs and the seventh ribs with respect to the honeycomb side are 30 to 34 mm.
In the light grille floor, the width of the fifth rib and the seventh rib is 3 to 4.8mm.
In the lightweight grid floor, the heights of the second ribs, the third ribs, the fourth ribs and the sixth ribs are 16 to 24mm relative to the honeycomb side.
In the light grid floor, the widths of the second rib, the third rib, the fourth rib and the sixth rib are all 3mm.
In the foregoing light grille floor, the rib structure forms a groined rib with two seventh ribs in the longitudinal direction and the transverse direction, so as to divide the light grille floor into four regions, wherein 25 subregions are formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib in the four regions, each subregion is provided with a concave part, another concave part is formed in the central part of the groined rib formed by the seventh rib, each subregion is provided with two strip-shaped perforations so as to form ventilation volume of more than 56%, and a wing plate is formed around the ceiling, so that the thickness of the wing plate is greater than that of the ceiling.
In the foregoing light-weight grid floor, the rib structure further includes a plurality of auxiliary ribs having a height lower than the middle rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, such that a single auxiliary rib is disposed in a single recess. For example, the auxiliary rib has a height of 10 to 11 mm with respect to the honeycomb side and a width of 3.2 mm.
In the foregoing light-weight grille floor, the widths of the first ribs and the seventh ribs at the opposite sides of the honeycomb side are respectively smaller than the widths of the first ribs and the seventh ribs at the middle part of the honeycomb side, so as to reduce the weight of the light-weight grille floor.
In the foregoing light-weight grille floor, the first ribs are formed with pedestals at four corners of the light-weight grille floor, and the pedestals are fixed to the supporting legs.
Therefore, in the light-weight grille floor, the antenna plate and the rib structures are integrally molded and cast by adopting aluminum alloy, so that the light-weight grille floor cannot deform and is not easy to cause defects, fracture and other problems when being manufactured, and the light-weight grille floor has excellent reliability compared with the prior art.
Furthermore, the ventilation volume is increased by more than 56% through the design of the through holes, so as to meet the requirement of the semiconductor Cheng Qing on the purity.
In addition, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm so as to improve the structural strength of the light grille floor, so that compared with the prior art, the light grille floor can bear heavier machine equipment in the semiconductor manufacturing process, and the problem that the light grille floor is cracked in use is avoided.
Drawings
Fig. 1A is a schematic perspective view of a lightweight grill floor according to the present invention.
Fig. 1B is a front plan view of fig. 1A.
FIG. 1C is a cross-sectional view of FIG. 1B taken along line C-C.
FIG. 1D is a cross-sectional view of FIG. 1B taken along line D-D.
Fig. 1E is a schematic perspective view of the other view of fig. 1A.
Wherein reference numerals are as follows:
1 light grille floor
1a rib structure
1b foot stand
1c thimble position
1d wing plate
10-day board
10a floor side
10b honeycomb side
100 perforations
11 first rib
12 second rib
13 third rib
14 fourth rib
15 fifth rib
16 sixth rib
17 seventh rib
17a,18 auxiliary ribs
d1 to d8 width
height of h0 to h8
L length
R, S recess
Sum of T
t0, t1 thickness
Distance w of interval
Detailed Description
Other advantages and effects of the present invention will become readily apparent to those skilled in the art from the following disclosure, wherein the following detailed description illustrates the embodiments of the invention.
It should be understood that the structures, proportions, sizes, etc. shown in the drawings are shown only in connection with the present disclosure for the understanding and reading by those skilled in the art, and are not intended to limit the scope of the invention, which is defined by the claims, so that any structural modifications, proportional changes, or dimensional adjustments should not be made in the essential significance of the invention, and should still fall within the scope of the present disclosure without affecting the efficacy or achievement of the present invention. Also, the terms such as "upper", "lower", "left", "right" and "a" and the like are used in the present specification for convenience of description, but are not intended to limit the scope of the present invention, and the relative changes or modifications thereof are considered to be within the scope of the present invention without substantial modification of the technical content.
Fig. 1A to 1E are schematic views of a lightweight grill floor 1 of the present invention. The light-duty grille floor 1 of the present embodiment is intended to carry a relatively light load, which carries a load of about 500 kg.
The light grille floor 1 is provided with a ceiling 10 and a plurality of rib structures 1a arranged on the ceiling 10, so that the ceiling 10 and the rib structures 1a are integrally molded and cast by adopting aluminum alloy, and the light grille floor 1 is not deformed, and is not easy to cause defects, cracks and the like when being manufactured.
The antenna board 10 has opposite ground sides 10a and honeycomb sides 10b, and the honeycomb sides 10b are respectively provided with a plurality of rib structures 1a in the longitudinal direction and the transverse direction to form a plurality of concave portions S between the longitudinal rib structures 1a and the transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a and the longitudinal rib structures 1a are arranged in the same manner to be symmetrical, so that the cross section of the transverse rib structures 1a is omitted.
In this embodiment, the top board 10 is a rectangular body, such as a square plate, with a length L of 600mm and a thickness t0 of 3mm, and a wing plate 1d (with a thickness t1 of 4.5mm, greater than the thickness t0 of the top board 10) is formed around the top board 10, and the bottom of the top board 10 is in an L-shaped concave shape (or may be in an L-shaped convex shape), and the bottom of the top board 1 is fixed on a supporting foot stand (not shown). For example, the footstand 1b is used to adjust the overall height of the lightweight grid floor 1 so that a plurality of lightweight grid floors 1 can be positioned at the same level when they are spliced.
Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a honeycomb structure having a plurality of ejector pins 1c (at about the corners of the square area formed by every four recesses S) on the honeycomb side 10 b.
The rib structure 1a is defined with a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17 sequentially from the edge of the antenna board 10 to the middle (or from the left to the right to the middle as shown in fig. 1C and 1D), and the heights h1, h5 and h7 of the first, fifth and seventh ribs 11, 15 and 17 relative to the honeycomb side 10B are at least 25 millimeters (mm), and the heights h2, h3, h4 and h6 of the second, third, fourth and sixth ribs 12, 13, 14 and 16 relative to the honeycomb side 10B are lower than 25 millimeters, so that the first, fifth and seventh ribs 11, 15 and 17 are used as main ribs, and the second, third, fourth and sixth ribs 12, 13, 14 and 16 are used as middle ribs, wherein the first to the sixth ribs 11 to 16 are symmetrically distributed on the left and right with respect to the seventh rib 17 as a reference (or from the upper to the lower of fig. 1B) and the fourth ribs are symmetrically distributed at the distances of the fifth ribs 12, 15 and 16 w and 17 relative to the fifth ribs 12, 16 are symmetrically distributed between the fifth ribs and 16 w and 15 and 17.
In this embodiment, the first rib 11 is formed at the edge of the ceiling board 10 to form a side rib of the light grille floor 1, so as to serve as a frame of the light grille floor 1 for fixing the foot stand 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 40mm, which is greater than the heights h2 to h7 of the second to seventh ribs 12 to 17 relative to the honeycomb side 10b, and the sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the ceiling 10 in this embodiment is 43mm (i.e., t=h1+t0), and the foot rest 1b is flush with the end surface of the first rib 11, so that the height of the foot rest 1b, the height h1 of the first rib 11 relative to the honeycomb side 10b and the total height of the thickness T0 of the ceiling 10 (i.e., the foot height of the lightweight grid floor 1) are 43mm.
Furthermore, the heights h2 to h7 of the second to seventh ribs 12 to 17 of the rib structure 1a may be the same or different as required, and the arrangement of the second to seventh ribs 12 to 17 between the first rib 11 and the recess R, S in the middle is shown in fig. 1C. For example, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 30mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 34mm, the height h2 of the second rib 12 relative to the honeycomb side 10b is 16mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 24mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 16mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 16mm, wherein the two seventh ribs 17 in the longitudinal and transverse directions form a # -shaped rib to divide the lightweight grid floor 1 into four regions, 25 sub-regions are formed between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16 adjacent to each region, each sub-region has a recess S, and the recess R of another embodiment is formed at the central portion of the # -shaped rib. Further, the thickness of the ceiling board 10 in the recess R may be increased or the same as the thickness t0 of the ceiling board 10 as required, and an auxiliary rib 17a is disposed in the recess R to increase the compressive strength of the light grille floor 1 at the middle. For example, since the height h2 of the second rib 12 with respect to the honeycomb side 10b is lower than the height h1 of the first rib 11 with respect to the honeycomb side 10b, when the lightweight grid floor 1 is fixed to a foot stand for an elevated floor, the four foot lands of the lightweight grid floor 1 are supported by the bottoms of the first ribs 11.
In addition, the widths d 1-d 7 of the ribs may be the same or different as desired, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7 to 8mm (e.g., 7.5 mm), the width d2 of the second rib 12 is 3mm, the width d3 of the third rib 13 is 3mm, the width d4 of the fourth rib 14 is 3mm, the width d5 of the fifth rib 15 is 3mm, the width d6 of the sixth rib 16 is 3mm, and the width d7 of the seventh rib 17 is 4.8mm.
Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions of its extension, as desired. For example, the widths D1, D5, D7 of the partial ribs can be adjusted, as shown in fig. 1D, the widths D1, D7 of the first rib 11 and the seventh rib 17 at the opposite sides of the honeycomb side 10b are smaller, wherein the width D1 of the first rib 11 is 3.5mm, the width D7 of the seventh rib 17 is 4.26mm, and the widths D1, D7 of the first rib 11 and the seventh rib 17 at the middle of the honeycomb side 10b are smaller than those shown in fig. 1C, respectively, so as to reduce the weight of the light-weight grid floor 1; alternatively, the width d5 of the fifth rib 15 is larger, and the width d5 of the fifth rib 15 is 3.15mm, which is slightly larger than the width d5 of the fifth rib 15 in the middle portion of the honeycomb side 10b shown in fig. 1C. The widths d2, d3, d4, d6 of the second, third, fourth and sixth ribs 12, 13, 14, 16 are unchanged.
In addition, the rib structure 1a may be additionally provided with a plurality of auxiliary ribs 17a,18 with a volume far smaller than that of other ribs, as shown in fig. 1C, wherein the heights h0, h8 (e.g. 10 mm) of the auxiliary ribs relative to the honeycomb side 10b are lower than the heights h2, h3, h4, h6 of the middle ribs relative to the honeycomb side 10b, and the width d8 is 3.2 mm. For example, the auxiliary ribs 17a,18 are formed in the recesses R, S, respectively, and extend in a single direction without being staggered with each other, and one auxiliary rib 17a,18 is disposed in a single recess R, S as shown in fig. 1C. Further, the height h8 of the auxiliary rib 18 in the recess S can be adjusted as required, as shown in fig. 1D for 11 mm.
Furthermore, the lightweight grid floor 1 forms a plurality of through holes 100 on the ceiling 10, which are connected to the ground side 10a and the honeycomb side 10b, and the seventh rib 17 (the cross rib formed by the two longitudinal and transverse seventh ribs 17) divides the honeycomb side 10b into four areas (four corner areas), each of which forms 25 sub-areas (corresponding to the recess S), and the cross rib extends outwards (cross area), and 21 other sub-areas (corresponding to the recess R, S) are separated by the ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16), so that each sub-area has two elongated through holes 100 with more hollow areas to form ventilation volume of 56% or more.
In the present embodiment, the positions of the through holes 100 are configured corresponding to the recesses R, S. For example, two through holes 100 are formed in each recess R, S, and the two through holes 100 are spaced apart from each other and are separated from each other by the auxiliary ribs 17a, 18. In addition, the recess S between the first and second ribs 11, 12 has only one perforation 100, i.e. no auxiliary rib 18 is arranged.
Thus, the light grille floor 1 can not only increase ventilation, but also facilitate saving materials and weight, and increase load-bearing weight by the design of the through holes 100.
In addition, the thickness t0 of the ceiling 10 of the lightweight grid floor 1 is smaller, and the heights h2, h3, h4, h6 of the majority of the rib structures 1a are also smaller, i.e., the heights h2, h3, h4, h6 of the middle ribs (second, third, fourth, and sixth ribs 12, 13, 14, 16) are smaller than the heights h1, h5, h7 of the main ribs (first rib 11, fifth rib 15, and seventh rib 17), so as to facilitate saving materials and reducing weight.
In summary, the light grille floor 1 of the present invention is mainly cast by integrally molding the top plate 10 and the rib structures 1a with aluminum alloy, and the arrangement of the transverse ribs and the longitudinal ribs is the same and symmetrical, so that the light grille floor 1 will not deform and will not easily cause defects and breakage when being manufactured, and therefore, compared with the prior art, the light grille floor 1 of the present invention has excellent reliability, is beneficial to improving yield and saving manufacturing cost.
Furthermore, the ventilation rate is increased by more than 56% through the design of the through hole 100, so that the requirement of higher air return rate on the periphery of semiconductor processing equipment and shower rooms can be met, and the cleanliness of the semiconductor processing can be improved.
In addition, the heights h1, h5 and h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b are at least 25 mm, so as to improve the structural strength of the light-weight grille floor 1, so that the light-weight grille floor 1 can bear heavier machine equipment in the semiconductor manufacturing process, and the problem of cracking of the light-weight grille floor 1 in use is avoided. Further, the heights h1 to h7 and the widths d1 to d7 of the ribs are adjusted according to the load of the light grille floor 1, so that the materials of the light grille floor 1 are saved and the weight is reduced.
In addition, the structural strength of the lightweight grid floor 1 can be further improved by the design of the auxiliary ribs 17a, 18.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications to the above would be obvious to those of ordinary skill in the art, without departing from the spirit and scope of the present invention. The scope of the invention is therefore intended to be indicated by the appended claims.

Claims (12)

1. A lightweight grille floor comprising:
a ceiling plate having a ground side and a honeycomb side opposite to each other, wherein the ceiling plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to form a ventilation amount of 56% or more; and
the rib structures are formed by integrally molding and casting aluminum alloy with the top plate, and a plurality of concave parts are formed on the honeycomb side of the top plate, so that two through holes are formed in each concave part, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the top plate to the middle, the heights of the first rib, the fifth rib and the seventh rib relative to the honeycomb side are at least 25 mm to serve as main ribs, and the heights of the second rib, the third rib, the fourth rib and the sixth rib relative to the honeycomb side are lower than 25 mm to serve as middle ribs.
2. The lightweight grid floor according to claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.
3. The lightweight grid floor according to claim 1, wherein the first ribs are formed on the edge of the ceiling to be side ribs of the lightweight grid floor as rims of the lightweight grid floor.
4. The lightweight grid floor according to claim 1, wherein the sum of the height of the first ribs relative to the honeycomb side and the thickness of the ceiling is 43mm and the thickness of the ceiling is 3mm.
5. The lightweight grid floor according to claim 1, wherein the first ribs have a width of 3 to 8 millimeters.
6. The lightweight grid floor according to claim 1, wherein the fifth and seventh ribs have a height of 30 to 34 millimeters relative to the honeycomb side and a width of 3 to 4.8 millimeters relative to the honeycomb side.
7. The lightweight grid floor according to claim 1, wherein the second, third, fourth and sixth ribs are 16 to 24 millimeters in height relative to the honeycomb side, and the second, third, fourth and sixth ribs are 3 millimeters in width.
8. The lightweight grid floor according to claim 1, wherein the rib structure is formed with two of the seventh ribs in the longitudinal and transverse directions to divide the lightweight grid floor into four regions, 25 sub-regions are formed between the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each of the sub-regions has a recess, and another recess is formed at the central portion of the # -shaped rib formed by the seventh rib, and each sub-region has two elongated through holes to form more than 56% ventilation, and a wing plate is formed around the ceiling plate to make the thickness of the wing plate greater than the thickness of the ceiling plate.
9. The lightweight grid floor according to claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than the center rib, and each of the auxiliary ribs is formed in each of the recesses such that a single one of the auxiliary ribs is disposed in a single one of the recesses.
10. The lightweight grid floor as set forth in claim 9, wherein the auxiliary rib has a height of 10 to 11 millimeters with respect to the honeycomb side and a width of 3.2 millimeters.
11. The lightweight grid floor according to claim 1, wherein the widths of the first ribs and the seventh ribs at opposite sides of the honeycomb side are smaller than the widths of the first ribs and the seventh ribs at the middle of the honeycomb side, respectively, to reduce the weight of the lightweight grid floor.
12. The lightweight grid floor according to claim 1, wherein the first ribs are formed with pedestals at four corners of the lightweight grid floor, the pedestals being fixed to support legs.
CN202211110459.8A 2022-09-13 2022-09-13 Light grille floor Pending CN117738413A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211110459.8A CN117738413A (en) 2022-09-13 2022-09-13 Light grille floor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211110459.8A CN117738413A (en) 2022-09-13 2022-09-13 Light grille floor

Publications (1)

Publication Number Publication Date
CN117738413A true CN117738413A (en) 2024-03-22

Family

ID=90259632

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211110459.8A Pending CN117738413A (en) 2022-09-13 2022-09-13 Light grille floor

Country Status (1)

Country Link
CN (1) CN117738413A (en)

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