CN117738415A - Light grille floor - Google Patents

Abstract

A light grille floor comprises a top plate and a rib structure, wherein the rib structure and the top plate are integrally molded and cast by adopting aluminum alloy, and a plurality of penetrating through holes are formed on the top plate to form ventilation quantity of more than 50%, so that the requirement of semiconductor process cleanliness can be met.

Description

Light grille floor

Technical Field

The present invention relates to a floor, and more particularly, to a light grill floor having a high ventilation rate.

Background

Existing raised floors, such as the TWM626914 patent, the TWM626915 patent, the TWM626017 patent, the TWM626032 patent, the TWM625241 patent, the TWM625242 patent, the TWM625267 patent, the TWM625270 patent, the TWM625289 patent, and the TWM596253 patent, can be used for ventilation floors of process areas in addition to factory floor floors for semiconductor processes, but the ventilation rate is less than twenty percent, and the ventilation rate requirement cannot be met.

However, the grid floor for ditch covers is currently manufactured by welding, such as the TW536257 patent, and is easily deformed and easily defective and broken due to the welding molding process.

Furthermore, the ventilation quantity of the existing grid floor is too small, so that the return air quantity is insufficient, and the requirement of the semiconductor process cleanliness cannot be met.

In addition, the existing grid floor often has insufficient structural strength, so that the grid floor is easy to crack when carrying heavy machine equipment in the semiconductor process.

On the other hand, the existing grid floor has the problem of being too heavy, not only wasting materials, but also increasing the manufacturing cost.

Therefore, how to overcome the above problems in the prior art has become a major challenge in the industry.

Disclosure of Invention

In view of the above-mentioned shortcomings of the prior art, the present invention provides a lightweight grid floor that at least partially addresses the problems of the prior art.

The light-duty grille floor of the invention comprises: a ceiling plate having a ground side and a honeycomb side opposite to each other, wherein the ceiling plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to form a ventilation amount of 50% or more; and a plurality of rib structures which are integrally molded with the antenna plate by adopting aluminum alloy and are arranged on the honeycomb side of the antenna plate to form a plurality of concave parts so as to enable three through holes to be formed in each concave part, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna plate to the middle, the heights of the first rib, the second rib and the seventh rib relative to the honeycomb side are at least 25 mm to be used as main ribs, and the heights of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side are lower than 25 mm to be used as middle ribs.

In the light-weight grid floor, the plurality of concave parts are arranged in an array to form a honeycomb structure on the honeycomb side.

In the foregoing lightweight grid floor, the first rib is formed on the edge of the ceiling plate to form a side rib of the lightweight grid floor, so as to serve as a frame of the lightweight grid floor.

In the foregoing lightweight grid floor, the sum of the height of the first ribs relative to the honeycomb side and the thickness of the ceiling is 50mm, and the thickness of the ceiling is 2 mm.

In the foregoing lightweight grid floor, the first ribs have a width of 7 to 8 millimeters.

In the foregoing lightweight grid floor, the second ribs and the seventh ribs have a height of 48mm with respect to the honeycomb side.

In the foregoing lightweight grid floor, the second ribs and the seventh ribs have a width of 3.12 to 4.3mm.

In the lightweight grid floor, the heights of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side are 12 to 22 mm.

In the lightweight grid floor, the widths of the third rib, the fourth rib, the fifth rib and the sixth rib are 3.5 to 3.8 mm.

In the foregoing light grille floor, the rib structure forms a groined rib with two seventh ribs in the longitudinal direction and the transverse direction, so as to divide the light grille floor into four regions, wherein 25 subregions are formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib in the four regions, each subregion is provided with a concave part, another concave part is formed in the central part of the groined rib formed by the seventh rib, each subregion is provided with three strip-shaped perforations so as to form ventilation volume of more than 50%, and a wing plate is formed around the ceiling, so that the thickness of the wing plate is greater than that of the ceiling.

In the foregoing light grille floor, the rib structure further includes a plurality of auxiliary ribs having a height lower than the main ribs, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that two of the auxiliary ribs are disposed in a single recess. For example, the auxiliary rib has a height of 8mm with respect to the honeycomb side and a width of 3mm.

In the foregoing light-weight grille floor, the widths of the first ribs and the seventh ribs at the opposite sides of the honeycomb side are respectively smaller than the widths of the first ribs and the seventh ribs at the middle part of the honeycomb side, so as to reduce the weight of the light-weight grille floor.

In the foregoing light-weight grille floor, the first ribs are formed with pedestals at four corners of the light-weight grille floor, and the pedestals are fixed to the supporting legs.

Therefore, in the light-weight grille floor, the antenna plate and the rib structures are integrally molded and cast by adopting aluminum alloy, so that the light-weight grille floor cannot deform and is not easy to cause defects, fracture and other problems when being manufactured, and the light-weight grille floor has excellent reliability compared with the prior art.

Furthermore, the ventilation quantity is increased by more than 50% through the design of the plurality of through holes, so that the requirement of the semiconductor process cleanliness can be met.

In addition, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm so as to improve the structural strength of the light grille floor, so that compared with the prior art, the light grille floor can bear heavier machine equipment in the semiconductor process, and the problem that the light grille floor is cracked in use is avoided.

Drawings

Fig. 1A is a schematic perspective view of a lightweight grill floor according to the present invention.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B taken along line C-C.

FIG. 1D is a cross-sectional view of FIG. 1B taken along line D-D.

Fig. 1E is a schematic perspective view of the other view of fig. 1A.

The reference numerals are as follows:

1. light grille floor

1a rib structure

1b foot stand

1c thimble position

1d wing plate

10. Ceiling board

10a floor side

10b honeycomb side

100. Perforation

11. First rib

12. Second rib

13. Third rib

14. Fourth rib

15. Fifth rib

16. Sixth rib

17. Seventh rib

17a,18 auxiliary ribs

d1 to d8 width

height of h1 to h8

L length

R, S recess

Sum of T

t0, t1 thickness

Distance w of interval

Detailed Description

Other advantages and effects of the present invention will become readily apparent to those skilled in the art from the present disclosure, as illustrated by the following specific examples.

It should be understood that the structures, proportions, sizes, etc. shown in the drawings attached hereto are for the purpose of understanding and reading only and are not intended to limit the scope of the invention, which is defined by the appended claims, but rather by the appended claims. Also, the terms such as "upper", "lower", "left", "right" and "a" and the like are used in the present specification for convenience of description, but are not intended to limit the scope of the present invention, and the relative changes or modifications thereof are considered to be within the scope of the present invention without substantial modification of the technical content.

Fig. 1A to 1E are schematic views of a lightweight grill floor 1 of the present invention. The light-duty grille floor 1 of the present embodiment is intended to carry a relatively light load, which carries a load of about 500 kg.

The light grille floor 1 is provided with a ceiling 10 and a plurality of rib structures 1a arranged on the ceiling 10, so that the ceiling 10 and the rib structures 1a are integrally molded and cast by adopting aluminum alloy, and the light grille floor 1 is not deformed, and is not easy to cause defects, cracks and the like when being manufactured.

The antenna board 10 has opposite ground sides 10a and honeycomb sides 10b, and the honeycomb sides 10b are respectively provided with a plurality of rib structures 1a in the longitudinal direction and the transverse direction to form a plurality of concave portions S between the longitudinal rib structures 1a and the transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a and the longitudinal rib structures 1a are arranged in the same manner to be symmetrical, so that the cross section of the transverse rib structures 1a is omitted.

In this embodiment, the top board 10 is a rectangular body, such as a square plate, with a length L of 600mm and a thickness t0 of 2mm, and a wing board 1d (with a thickness t1 of 6mm, greater than the thickness t0 of the top board 10) is formed around the top board 10, and the four corners of the light grille floor 1 are formed with feet 1b with openings (the openings may be concave or convex) at the bottoms thereof, and the feet 1b are fixed on supporting legs (not shown). For example, the foot stand 1b is used to adjust the overall height H of the lightweight grid floor 1 so that a plurality of lightweight grid floors 1 can be positioned on the same horizontal plane when they are spliced.

Furthermore, the ground side 10a is a flat surface, and a plurality of recesses S are arranged in an array to form a honeycomb structure having a plurality of ejector pins 1c (at about the corners of the square area formed by every four recesses S) on the honeycomb side 10 b.

The rib structure 1a is defined with a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17 sequentially from the edge of the ceiling 10 to the middle (or from the left to the right to the middle as shown in fig. 1C and 1D), and the heights h1, h2, h7 of the first, second and seventh ribs 11,12,17 relative to the honeycomb side 10B are at least 25 millimeters (mm), and the heights h3, h4, h5, h6 of the third, fourth, fifth and sixth ribs 13,14,15,16 relative to the honeycomb side 10B are lower than 25 millimeters, so that the first, second and seventh ribs 11,12,17 are used as main ribs, and the third, fourth, fifth and sixth ribs 13,14,15,16 are used as middle ribs, wherein the first to the sixth ribs 11 to 16 are symmetrically distributed with respect to the seventh rib 17 as a reference (or from the upper to the lower of fig. 1B) and the fourth ribs are symmetrically distributed with the distances of the fifth ribs 13, 12, 16 and 17 being equal to the fifth ribs 15, 15 w and 17 are symmetrically distributed between the fourth ribs and the fifth ribs 13, 16 and 17.

In this embodiment, the first rib 11 is formed at the edge of the ceiling board 10 to form a side rib of the light grille floor 1, so as to serve as a frame of the light grille floor 1 for fixing the foot stand 1b. For example, the height H1 of the first rib 11 relative to the honeycomb side 10b is 48mm, which is equal to the heights of the second and seventh ribs 12,17, and is greater than the heights H3 to H6 of the third to sixth ribs 13 to 16 relative to the honeycomb side 10b, and the sum T of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 in this embodiment is 50mm (i.e., t=h1+t0), and the foot rest 1b is flush with the end surface of the first rib 11, so that the total height H of the foot rest 1b, the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 (i.e., the foot height of the lightweight grid floor 1) is 50 mm.

Furthermore, the heights h 2-h 7 of the second to seventh ribs 12-17 of the rib structure 1a may be the same or different as required, and the arrangement of the second to seventh ribs 12-17 between the first rib 11 and the recess R, S in the middle is shown in fig. 1C. For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 48mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 48mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 22mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 12mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 22mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 12mm, wherein the two seventh ribs 17 in the longitudinal and transverse directions form a groined rib to divide the lightweight grid floor 1 into four regions, 25 sub-regions are formed between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16 adjacent to each other, each sub-region has a recess S, and a recess R of another embodiment is formed at the central portion of the groined rib. Further, the thickness of the top board 10 in the recess R may be increased or the same as the thickness t0 of the top board 10 as required, and two parallel auxiliary ribs 17a are disposed in the recess R to increase the compressive strength of the light grille floor 1 at the middle. It should be understood that the heights h3 to h6 of the third to sixth ribs 13 to 16 (mid ribs) are regularly designed. For example, since the height h2 of the second rib 12 relative to the honeycomb side 10b is lower than the height h1 of the first rib 11 relative to the honeycomb side 10b, when the light grille floor 1 is fixed to a foot stand for an elevated floor, the four foot drops of the light grille floor 1 are supported by the bottom of the first rib 11

In addition, the widths d 1-d 7 of the ribs may be the same or different as desired, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7 to 8mm (for example, 7.5 mm), the width d2 of the second rib 12 is 3.8mm, the width d3 of the third rib 13 is 3.8mm, the width d4 of the fourth rib 14 is 3.5mm, the width d5 of the fifth rib 15 is 3.8mm, the width d6 of the sixth rib 16 is 3.5mm, and the width d7 of the seventh rib 17 is 4.3mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions of its extension, as desired. For example, the widths D1, D2, D7 of the partial ribs can be adjusted, as shown in fig. 1D, the widths D1, D2, D7 of the first rib 11, the second rib 12 and the seventh rib 17 at the opposite sides of the honeycomb side 10b are smaller, wherein the width D1 of the first rib 11 is 3.8mm, the width D2 of the second rib 12 is 3.12mm and the width D7 of the seventh rib 17 is 3.6mm, which are respectively smaller than the widths D1, D2, D7 of the first rib 11, the second rib 12 and the seventh rib 17 at the middle of the honeycomb side 10b shown in fig. 1C, so as to reduce the weight of the lightweight grid floor 1, and the widths D3, D4, D5, D6 of the third, fourth, fifth and sixth ribs 13,14,15,16 are unchanged.

In addition, the rib structure 1a may be additionally provided with a plurality of auxiliary ribs 17a,18 with a volume far smaller than that of other ribs, as shown in fig. 1C, wherein the height h8 (e.g. 8 mm) of the auxiliary ribs relative to the honeycomb side 10b is lower than the heights h3, h4, h5, h6 of the middle ribs relative to the honeycomb side 10b, and the width d8 is 3mm. For example, a plurality of auxiliary ribs 17a,18 are formed in each of the recesses R, S so as to extend in a single direction without being staggered with each other, and two parallel auxiliary ribs 17a,18 are arranged in a single recess R, S as shown in fig. 1C.

Furthermore, the lightweight grid floor 1 forms a plurality of through holes 100 on the ceiling 10, which are connected to the ground side 10a and the honeycomb side 10b, and the seventh rib 17 (the cross rib formed by the two longitudinal and transverse seventh ribs 17) divides the honeycomb side 10b into four areas (four corner areas), each of which forms 25 sub-areas (corresponding to the recess S position), and the cross rib extends outwards (cross area), and 21 other sub-areas (corresponding to the recess R, S position) are separated by a plurality of ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16), so that each sub-area has three elongated through holes 100 to form ventilation volume of 50% or more.

In the present embodiment, the positions of the plurality of through holes 100 are configured corresponding to the plurality of recesses R, S. For example, three through holes 100 are formed in each recess R, S, and the three through holes 100 are spaced apart from each other and are separated from each other by the auxiliary ribs 17a, 18; in addition, the recess S between the first and second ribs 11,12 has only one perforation 100, i.e. no auxiliary rib 18 is arranged.

Thus, the light grille floor 1 can not only increase ventilation, but also facilitate saving materials and weight, and increase load-bearing weight by the design of the through holes 100.

In addition, the thickness t0 of the ceiling 10 of the lightweight grid floor 1 is smaller, and the heights h3, h4, h5, h6 of the majority of the rib structures 1a are also smaller, i.e., the heights h3, h4, h5, h6 of the middle ribs (third, fourth, fifth and sixth ribs 13,14,15, 16) are smaller than the heights h1, h2, h7 of the main ribs (first rib 11, second rib 12 and seventh rib 17), so as to facilitate saving materials and reducing weight.

In summary, the light grille floor 1 of the present invention is mainly cast by integrally molding the top plate 10 and the rib structures 1a with aluminum alloy, and the arrangement of the transverse ribs and the longitudinal ribs is the same and symmetrical, so that the light grille floor 1 will not deform and will not easily cause defects and breakage when being manufactured, and therefore, compared with the prior art, the light grille floor 1 of the present invention has excellent reliability, is beneficial to improving yield and saving manufacturing cost.

Furthermore, the ventilation volume is increased by more than 50% through the design of the through hole 100, so that the ventilation volume can be increased, and the requirements of high air return volume on the periphery of semiconductor process equipment and shower rooms can be met, thereby improving the cleanliness of the semiconductor process.

In addition, the heights h1, h2, h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b are at least 25 mm, so as to improve the structural strength of the light-weight grille floor 1, so that the light-weight grille floor 1 can bear heavier machine equipment in the semiconductor process, and the problem of cracking of the light-weight grille floor 1 in use is avoided. Further, the heights h1 to h7 and the widths d1 to d7 of the ribs are adjusted according to the load of the light grille floor 1, so that the materials of the light grille floor 1 are saved and the weight is reduced.

In addition, the structural strength of the lightweight grill floor 1 can be further improved by the design of the auxiliary ribs 17a,18.

The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications to the above would be obvious to those of ordinary skill in the art, without departing from the spirit and scope of the present invention. The scope of the invention is therefore intended to be indicated by the appended claims.

Claims (12)

1. A lightweight grille floor comprising:

a ceiling plate having a ground side and a honeycomb side opposite to each other, wherein the ceiling plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to form a ventilation amount of 50% or more; and

the rib structures are formed by integrally molding and casting aluminum alloy with the top plate, and are arranged on the honeycomb side of the top plate to form a plurality of concave parts, so that three through holes are formed in each concave part, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the top plate to the middle, the heights of the first rib, the second rib and the seventh rib relative to the honeycomb side are at least 25 mm to serve as main ribs, and the heights of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side are lower than 25 mm to serve as middle ribs.

2. The lightweight grid floor according to claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

3. The lightweight grid floor according to claim 1, wherein the first ribs are formed on the edge of the ceiling to be side ribs of the lightweight grid floor as rims of the lightweight grid floor.

4. The lightweight grid floor according to claim 1, wherein the sum of the height of the first ribs relative to the honeycomb side and the thickness of the ceiling is 50 millimeters and the thickness of the ceiling is 2 millimeters.

5. The lightweight grid floor according to claim 1, wherein the first ribs have a width of 7 to 8 millimeters.

6. The lightweight grid floor according to claim 1, wherein the second and seventh ribs have a height of 48mm relative to the honeycomb side and a width of 3.12 to 4.3mm.

7. The lightweight grid floor according to claim 1, wherein the third, fourth, fifth and sixth ribs have a height of 12 to 22 millimeters with respect to the honeycomb side, and the third, fourth, fifth and sixth ribs have a width of 3.5 to 3.8 millimeters.

8. The lightweight grid floor according to claim 1, wherein the rib structure is formed with two of the seventh ribs in the longitudinal and transverse directions to divide the lightweight grid floor into four regions, 25 sub-regions are formed between the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each of the sub-regions has a recess, and another recess is formed at the central portion of the # -shaped rib formed by the seventh rib, and each sub-region has three elongated through holes to form ventilation of 50% or more, and a wing plate is formed around the ceiling plate to make the thickness of the wing plate greater than the thickness of the ceiling plate.

9. The lightweight grid floor according to claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than the main ribs, and each of the auxiliary ribs is formed in each of the recesses such that two of the auxiliary ribs are disposed in a single of the recesses.

10. The lightweight grid floor as set forth in claim 9, wherein the auxiliary rib has a height of 8 millimeters with respect to the honeycomb side and a width of 3 millimeters.

11. The lightweight grid floor according to claim 1, wherein the widths of the first ribs and the seventh ribs at opposite sides of the honeycomb side are smaller than the widths of the first ribs and the seventh ribs at the middle of the honeycomb side, respectively, to reduce the weight of the lightweight grid floor.

12. The lightweight grid floor according to claim 1, wherein the first ribs are formed with pedestals at four corners of the lightweight grid floor, the pedestals being fixed to support legs.