CN117738417A - Special standard grid floor - Google Patents

Abstract

A special grid floor comprises a top plate and a rib structure, wherein the rib structure and the top plate are integrally molded and cast by adopting aluminum alloy, and a plurality of penetrating through holes are formed on the top plate to form ventilation quantity of more than 50%, so that the requirement of the semiconductor system Cheng Qing can be met.

Description

Special standard grid floor

Technical Field

The present invention relates to a floor, and more particularly to a special-sized grid floor with high ventilation rate.

Background

Existing raised floors, such as the TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent, and TWM596253 patent, may be used for the ventilation floor of a process area in addition to the factory floor for a semiconductor process, but the ventilation rate is less than twenty percent, and may not meet the ventilation rate requirement.

However, the grid floor for ditch covers is manufactured by welding, such as the TW536257 patent, and is easy to deform and easily cause defects and breakage due to the welding forming process.

Furthermore, the ventilation rate of the existing grid floor is too small, so that the air return rate is insufficient, and the requirements of the semiconductor system Cheng Qing on the purity cannot be met.

In addition, the existing grid floor often has insufficient structural strength, so that the grid floor is easy to crack when carrying heavy machine equipment in the semiconductor manufacturing process.

On the other hand, the existing grid floor has the problem of being too heavy, not only wasting materials, but also increasing the manufacturing cost.

Therefore, how to overcome the above problems in the prior art has become a major challenge in the industry.

Disclosure of Invention

In view of the foregoing drawbacks of the prior art, the present invention provides a special-sized grid floor that at least partially solves the problems of the prior art.

The special grid floor of the invention comprises: a ceiling plate having a ground side and a honeycomb side opposite to each other, wherein the ceiling plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to form a ventilation amount of 60% or more; and a plurality of rib structures which are integrally molded with the antenna plate by adopting aluminum alloy and are arranged on the honeycomb side of the antenna plate to form a plurality of concave parts so as to enable two through holes to be formed in each concave part, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib and a sixth rib from the edge of the antenna plate to the middle, the heights of the first rib, the second rib, the fourth rib and the sixth rib relative to the honeycomb side are at least 25 mm to be used as main ribs, and the heights of the third rib and the fifth rib relative to the honeycomb side are lower than 25 mm to be used as middle ribs.

In the specific grid floor, the plurality of concave portions are arranged in an array to form a honeycomb structure on the honeycomb side.

In the specific grid floor, the first rib is formed at the edge of the ceiling plate to form a side rib of the specific grid floor, so as to serve as a frame of the specific grid floor for fixedly connecting the foot stand.

In the specific grid floor, the height of the first rib relative to the honeycomb side is 30.5 mm, the sum of the heights of the first rib and the ceiling is 33.5 mm, and the thickness of the ceiling is 3 mm.

In the specific grid floor, the heights of the second rib, the fourth rib and the sixth rib relative to the honeycomb side are 25 to 30.5 mm.

In the specific grid floor, the height of the third rib and the fifth rib relative to the honeycomb side is 15 to 18 mm.

In the specific grid floor, the width of the first rib is 4 to 7 mm.

In the specific grid floor, the widths of the second rib, the fourth rib and the sixth rib are 3 to 8 mm.

In the specific grid floor, the width of the third rib and the fifth rib is 3 to 3.2 mm.

In the specific grid floor, the rib structure further comprises a plurality of auxiliary ribs lower than the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each concave part, so that a single auxiliary rib is arranged in a single concave part. For example, the plurality of auxiliary ribs extend in a single direction without being staggered with each other. Alternatively, the auxiliary rib has a height of at least 8 mm relative to the honeycomb side and a width of 3 to 3.2 mm.

In the specific grid floor, the rib structure forms a cross rib with two sixth ribs in the longitudinal direction and the transverse direction so as to divide the specific grid floor into four areas, 16 subregions are formed between the adjacent second ribs, third ribs, fourth ribs and fifth ribs in the four areas, each subregion is provided with a concave part, the first ribs to the fifth ribs are symmetrically distributed by taking the cross rib as a reference, the other concave part formed at the central part of the cross rib formed by the sixth ribs is internally provided with an auxiliary rib, and a wing plate is formed around the top plate so that the height of the auxiliary rib and the thickness of the wing plate are both larger than the thickness of the top plate, and the strength of the specific grid floor at the middle part is improved.

In the special grid floor, 17 other subregions are separated from each other in the cross ribs by the second ribs, the third ribs, the fourth ribs and the fifth ribs, and two through holes are formed in each subregion so as to form ventilation quantity of more than 60%.

In the specific grid floor, the rib structure forms a cross rib with one sixth rib in the longitudinal direction and the transverse direction so as to divide the specific grid floor into four areas, 16 sub-areas are formed between the adjacent second rib, third rib, fourth rib and fifth rib in the four areas, each sub-area is provided with a concave part, the first rib to the fifth rib are symmetrically distributed by taking the cross rib as a reference, and a thimble position is formed at the central part of the cross rib formed by the sixth rib.

In the specific grid floor, the first rib is used for supporting the foot rest fixed by the specific grid floor.

In the specific grid floor, the first rib and the second rib are formed with pedestals at four corners of the specific grid floor, and the pedestals are fixed on the supporting foot frames.

Therefore, in the special grid floor, the antenna plate and the rib structures are integrally molded and cast by adopting aluminum alloy, so that the special grid floor cannot deform and is not easy to cause defects, fracture and other problems when being manufactured, and the reliability of the special grid floor is excellent compared with the prior art.

Furthermore, the ventilation quantity is increased by more than 60% through the design of the through holes, so that the requirement of the semiconductor Cheng Qing on the purity can be met.

In addition, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm, so that the structural strength of the special grid floor is improved, and compared with the prior art, the special grid floor can bear heavier machine equipment in the semiconductor manufacturing process, so that the problem that the special grid floor is cracked in use is avoided.

Drawings

Fig. 1A is a schematic perspective view of a first embodiment of a special grid floor of the present invention.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B taken along line C-C in one direction.

FIG. 1D is a cross-sectional view of FIG. 1B taken along line D-D in one of the directions.

Fig. 1E is a schematic perspective view of the other view of fig. 1A.

Fig. 2A is a schematic perspective view of a second embodiment of a special grid floor of the present invention.

Fig. 2B is a front plan view of fig. 2A.

Fig. 2C is a cross-sectional view of fig. 2B taken along line C-C in one direction thereof.

Fig. 2D is a cross-sectional view of fig. 2B taken along line D-D in one direction thereof.

Fig. 2E is a schematic perspective view of the other view of fig. 2A.

Wherein reference numerals are as follows:

1,2 special specification grid floor

1a,2a rib structure

1b,2b foot stand

1c,2c thimble position

1d,2d wing plate

10 20 days plate

10a,20a floor side

10b,20b honeycomb side

100 200 perforations

11 First rib, 21

12 Second rib, 22

13 Third rib of 23

14 Fourth rib of 24

15 Fifth rib of 25

16 26 sixth rib

17a,18, 28 auxiliary ribs

d1 to d6, d8 width

H total height

h0 to h6, h8 height

L length

R, S recess

Sum of T

t0, t1 thickness

Distance w of interval

Detailed Description

Other advantages and effects of the present invention will become readily apparent to those skilled in the art from the following disclosure, wherein the following detailed description illustrates the embodiments of the invention.

It should be understood that the structures, proportions, sizes, etc. shown in the drawings are shown only in connection with the present disclosure for the understanding and reading by those skilled in the art, and are not intended to limit the scope of the invention, which is defined by the claims, so that any structural modifications, proportional changes, or dimensional adjustments should not be made in the essential significance of the invention, and should still fall within the scope of the present disclosure without affecting the efficacy or achievement of the present invention. Also, the terms such as "upper", "lower", "left", "right" and "a" and the like are used in the present specification for convenience of description, but are not intended to limit the scope of the present invention, and the relative changes or modifications thereof are considered to be within the scope of the present invention without substantial modification of the technical content.

Fig. 1A to 1E are schematic views of a first embodiment of a special grid floor 1 of the present invention. The special-sized grid floor board 1 of the present embodiment is used for carrying a heavy load, and the carrying load is about 500 kg.

The special grid floor 1 is provided with a day plate 10 and a plurality of rib structures 1a arranged on the day plate 10, so that the day plate 10 and the rib structures 1a are integrally molded and cast by adopting aluminum alloy, and the special grid floor 1 is not deformed, and is not easy to cause defects, fracture and other problems when being manufactured.

The antenna board 10 has opposite ground sides 10a and honeycomb sides 10b, and the honeycomb sides 10b are respectively provided with the rib structures 1a in the longitudinal direction and the transverse direction to form a plurality of concave portions S between the longitudinal rib structures 1a and the transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a and the longitudinal rib structures 1a are arranged in the same manner so as to be symmetrical, so that the cross section of the transverse rib structures 1a is omitted.

In this embodiment, the top plate 10 is a rectangular plate, such as a square plate, with a length L of 500 mm (or 450 mm) and a thickness t0 of 3 mm, a wing plate 1d (with a thickness t1 of 6 mm, greater than the thickness t0 of the top plate 10) is formed around the top plate 10, and the four corners of the specific grid floor 1 are formed with feet 1b, the bottoms of which are L-shaped (or L-shaped concave), and the feet 1b are respectively fixed on four support legs (not shown). For example, the foot stand 1b is used for adjusting the total height H of the special grid floor 1 so that a plurality of special grid floors 1 can be positioned on the same horizontal plane when being spliced.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a honeycomb structure having a plurality of ejector pins 1c (at about the corners of the square area formed by every four recesses S) on the honeycomb side 10 b.

The rib structure 1a is defined with a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15 and a sixth rib 16 sequentially from the edge of the ceiling 10 to the middle (or from the left to the right to the middle as shown in fig. 1B and 1C), wherein the heights h1 to h2, h4 and h6 of the first to the second, the fourth and the sixth ribs 11 to 12, 14 and 16 relative to the honeycomb side 10B are at least 25 mm (mm), and the heights h3 and h5 of the third and the fifth ribs 13 and 15 relative to the honeycomb side 10B are lower than 25 mm, so that the first to the second, the fourth and the sixth ribs 11 to 12, 14 and 16 are main ribs, and the third and the fifth ribs 13 and 15 are middle ribs, wherein the first to the fifth ribs 11 to 15 are symmetrically distributed from the left to the right (or from the top to the bottom as shown in fig. 1B) with the sixth ribs 16 as a reference, so that the distances w between the second to the fourth ribs 13, the fifth ribs 14 and the fifth ribs 15 are 48.

In this embodiment, the first rib 11 is formed at the edge of the top plate 10 to form a side rib of the specific grid floor 1, so as to serve as a frame of the specific grid floor 1 for fixing the foot stand 1b. For example, the height H1 of the first rib 11 relative to the honeycomb side 10b is 30.5 mm (equal to the height H6 of the sixth rib 16 relative to the honeycomb side 10 b) which is greater than the heights H2 to H5 of the second to fifth ribs 12 to 15 relative to the honeycomb side 10b, and the total T of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 of the present embodiment is 33.5 mm (i.e., t=h1+t0), and the height H of the foot rest 1b, the total height H of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 is 38 mm of the foot height of the specific grid floor 1.

Furthermore, the heights h2 to h6 of the second to sixth ribs of the rib structure 1a may be the same or different as required, and the arrangement of the main ribs (i.e. the second to sixth ribs 12 to 16) between the first rib 11 and the recess R, S in the middle is shown in fig. 1C. For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 29 mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 25 mm, the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 30.5 mm, and the heights h3, h5 of the third and fifth ribs 13, 15 relative to the honeycomb side 10b are 15 mm, wherein two sixth ribs 16 in the longitudinal direction and the transverse direction form a # -shaped rib to divide the specific grid floor 1 into four regions, 16 sub-regions are formed between the second rib 12, the third rib 13, the fourth rib 14 and the fifth rib 15 adjacent to each other, each sub-region has a concave portion S, and a concave portion R of another embodiment is formed at the central portion of the # -shaped rib. Further, the thickness of the top plate 10 in the recess R may be larger than the thickness t0 of the top plate 10 at other positions or the same as the thickness t0 of the top plate 10, and a single auxiliary rib 17a is disposed in the recess R to increase the compressive strength of the specific grid floor 1 at the middle position. For example, since the height h2 of the second rib 12 relative to the honeycomb side 10b is lower than the height h1 of the first rib 11 relative to the honeycomb side 10b, when the special grid floor 1 is fixed to a foot stand for an elevated floor, the four foot drops of the special grid floor 1 are supported by the bottoms of the first ribs 11.

In addition, the widths d 1-d 6 of the ribs may be the same (e.g., the third-fifth ribs 13-15) or different, as shown in fig. 1C. For example, the width d1 of the first rib 11 is 7 mm, the width d2 of the second rib 12 is 3.6 mm, the width d3 of the third rib 13 is 3 mm, the width d4 of the fourth rib 14 is 3 mm, the width d5 of the fifth rib 15 is 3 mm, and the width d6 of the sixth rib 16 is 3.6 mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions of its extension, as desired. For example, the width D1 of the partial rib can be adjusted, as shown in fig. 1D, the width D1 of the first rib 11 at two opposite sides of the honeycomb side 10b is smaller, wherein the width D1 of the first rib 11 is 4mm, which is smaller than the width D1 of the first rib 11 at the middle part of the honeycomb side 10b shown in fig. 1C, so as to reduce the weight of the specific grid floor 1, and the widths D2, D3, D4, D5, D6 of the second, third, fourth, fifth and sixth ribs 12, 13, 14, 15, 16 are unchanged.

In addition, the rib structure 1a may be additionally provided with a plurality of auxiliary ribs 17a,18 with a volume far smaller than that of other ribs, as shown in fig. 1C, wherein the height h0, h8 (e.g. 8 mm) of the auxiliary ribs relative to the honeycomb side 10b is lower than the heights h3, h5 of the middle ribs relative to the honeycomb side 10b, and the width d8 is 3 mm. For example, the auxiliary ribs 17a,18 are formed in the recesses R, S so as to extend in a single direction, and the single auxiliary ribs 17a,18 are arranged in a single recess R, S shown in fig. 1C.

Further, the special grid floor 1 forms a plurality of through holes 100 on the ceiling 10, which are communicated with the ground side 10a and the honeycomb side 10b, and the sixth ribs 16 (the cross ribs formed by the two longitudinal and transverse sixth ribs 16) divide the honeycomb side 10b into four areas (four corner areas), each area forms 16 sub-areas (corresponding to the concave S position), and the cross ribs extend outwards (cross areas), and 17 other sub-areas (corresponding to the concave R, S position) can be separated by the ribs (the second ribs 12, the third ribs 13, the fourth ribs 14 and the fifth ribs 15), so that each sub-area has two strip-shaped through holes 100 to form more than 60% ventilation.

In the present embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R, S. For example, two through holes 100 are formed in each recess R, S, and the two through holes 100 are spaced apart side by side, and the auxiliary ribs 17a,18 separate the through holes 100 in each row; in addition, the recess S between the first and second ribs 11, 12 has only one perforation 100, i.e. no auxiliary rib 18 is arranged.

Therefore, the design of the specific grid floor 1 through the through holes 100 not only increases ventilation, but also is beneficial to saving materials and reducing weight, and increases load-bearing weight.

In addition, the thickness t0 of the top plate 10 of the specific grid floor 1 is smaller, and the partial heights h3, h5 of the rib structures 1a are also smaller, i.e. the heights h3, h5 of the middle ribs (the third and fifth ribs 13, 15) are much smaller than the heights h1, h2, h4, h6 of the main ribs (the first, second, fourth and sixth ribs 11, 12, 14, 16), so as to facilitate saving materials and reducing weight.

Fig. 2A to 2E are schematic views of a second embodiment of a special grid floor 2 according to the present invention. The specific grid floor 2 of the present embodiment has a load greater than 500 kg, and the difference from the first embodiment is that the local height of the rib structure 2a is changed, so the same parts will not be described in detail below.

As shown in fig. 2A to 2E, a single sixth rib 26 in the longitudinal and transverse directions forms a cross rib to divide the specific grid floor 1 into four regions, 16 sub-regions are formed between the second rib 22, the third rib 23, the fourth rib 24 and the fifth rib 25 adjacent to each other, each sub-region has a recess S, and a thimble position 2c is formed at the central portion of the cross rib.

In the present embodiment, the thickness T0 of the top plate 20 is 3 mm, the height H1 of the first rib 21 relative to the honeycomb side 20B is 30.5 mm, the total T of the height H1 of the first rib 21 relative to the honeycomb side 20B and the thickness T0 of the top plate 20 is 33.5 mm, the height H1 of the foot stand 2B, the height H1 of the first rib 21 relative to the honeycomb side 20B and the total height H of the thickness T0 of the top plate 20 are 38 mm, wherein the thickness T1 of the wing plate 2d is 6 mm, the first rib 21 is formed at the edge of the top plate 20 to be a side rib of the specific grid floor 2 to be a frame of the specific grid floor 2, and the first to fifth ribs 21 to 25 are symmetrically distributed on the left and right (or vertically as shown in fig. 2B) based on the sixth rib 26.

In the rib structure 2a, as shown in fig. 2C, the height h2 of the second rib 22 relative to the honeycomb side 20b is 30.5 mm, the height h4 of the fourth rib 24 relative to the honeycomb side 20b is 26 mm, the height h6 of the sixth rib 26 relative to the honeycomb side 20b is 30.5 mm, and the heights h3 and h5 of the third and fifth ribs 23 and 25 relative to the honeycomb side 20b are 18 mm. For example, since the height h2 of the second rib 22 relative to the honeycomb side 20b is equal to the height h1 of the first rib 21 relative to the honeycomb side 20b, when the special grid floor 2 is fixed to a foot stand for an elevated floor, the four foot drops of the special grid floor 2 are supported by the bottoms of the first rib 21 and the second rib 22.

In addition, the widths d 1-d 6 of the ribs may be the same or different as desired, as shown in FIG. 2C. For example, the width d1 of the first rib 21 is 7 mm, the width d2 of the second rib 22 is 4mm, the width d3 of the third rib 23 is 3.2mm, the width d4 of the fourth rib 24 is 3.6 mm, the width d5 of the fifth rib 25 is 3.2mm, and the width d6 of the sixth rib 26 is 8 mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions of its extension, as desired. For example, the widths D1, D2, D6 of the partial ribs can be adjusted, as shown in fig. 2D, the widths D1, D2, D6 of the first, second and sixth ribs 21, 22, 26 at opposite sides of the honeycomb side 20b are smaller, wherein the width D1 of the first rib 21 is 5.24mm, the width D2 of the second rib 22 is 3.2mm, and the width D6 of the sixth rib 26 is 6.91mm, which are respectively smaller than the widths D1, D2, D6 of the first rib 21, the second rib 22 and the sixth rib 26 at the middle of the honeycomb side 20b shown in fig. 2C, so as to reduce the weight of the specific grid floor 2, while the widths D3, D4, D5 of the third, fourth and fifth ribs 13, 14, 15 are unchanged.

In addition, the height h8 of the auxiliary ribs 28 relative to the honeycomb side 20b is lower than the height of the middle rib, the width d8 thereof is 3.2mm, and the auxiliary ribs 28 are correspondingly formed in each of the recesses S, and one auxiliary rib 28 is disposed in a single recess S as shown in fig. 2C, so that each sub-region has two elongated perforations 200 to form a ventilation volume of 60% or more. In this embodiment, the recess S between the first and second ribs 21, 22 has only one through hole 200 (as shown in fig. 2C), i.e. no auxiliary rib 18 is provided.

Therefore, the design of the specific grid floor 2 through the through holes 200 can not only increase ventilation quantity, but also facilitate saving materials and weight, and increase bearing weight.

In addition, the partial heights h3, h5 of the rib structure 2a are also smaller, i.e. the heights h3, h5 of the middle ribs (third and fifth ribs 23, 25) are much smaller than the heights h1, h2, h4, h6 of the main ribs (first, second, fourth and sixth ribs 21, 22, 24, 26), so as to facilitate saving materials and reducing weight.

In summary, the special grid floor boards 1 and 2 of the present invention are mainly cast by integrally molding the top plates 10 and 20 and the rib structures 1a and 2a with aluminum alloy, and the arrangement modes of the transverse ribs and the longitudinal ribs are the same and symmetrical, so that the special grid floor boards 1 and 2 are not deformed and are not easy to generate defects and fracture, and compared with the prior art, the special grid floor boards 1 and 2 of the present invention have excellent reliability, and are favorable for improving the yield and saving the manufacturing cost.

Furthermore, the ventilation volume is increased by more than 60% through the design of the through holes 100 and 200, so that the requirement of high air return volume around the semiconductor processing equipment and in the shower room can be met, and the cleanliness of the semiconductor processing can be improved.

In addition, the heights h1, h2, h4, h6 of the main ribs of the rib structures 1a,2a relative to the honeycomb sides 10b,20b are at least 25 mm, so as to improve the structural strength of the specific grid floor boards 1,2, and the specific grid floor boards 1,2 can bear heavier machine equipment in the semiconductor manufacturing process, so that the problem of cracking of the specific grid floor boards 1,2 in use is avoided. Furthermore, the heights h 1-h 6 and the widths d 1-d 6 of the ribs are adjusted according to the bearing load of the special grid floors 1,2, so that the materials of the special grid floors 1,2 are saved and the weight is reduced.

In addition, by the design of the auxiliary ribs 17a,18, 28, the structural strength of the specific grid floor boards 1,2 can be further improved.

The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications to the above would be obvious to those of ordinary skill in the art, without departing from the spirit and scope of the present invention. The scope of the invention is therefore intended to be indicated by the appended claims.

Claims (17)

1. A special-sized grid floor, comprising:

a ceiling plate having a ground side and a honeycomb side opposite to each other, wherein the ceiling plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to form a ventilation amount of 60% or more; and

the rib structures are formed by integrally molding and casting aluminum alloy with the antenna plate and are arranged on the honeycomb side of the antenna plate to form a plurality of concave parts, so that two through holes are formed in each concave part, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib and a sixth rib from the edge of the antenna plate to the middle, the heights of the first rib, the second rib, the fourth rib and the sixth rib relative to the honeycomb side are at least 25 mm to serve as main ribs, and the heights of the third rib and the fifth rib relative to the honeycomb side are lower than 25 mm to serve as middle ribs.

2. The special purpose grid floor of claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

3. The special purpose grid floor as recited in claim 1, wherein the first rib is formed on the edge of the ceiling to be a side rib of the special purpose grid floor as a rim of the special purpose grid floor.

4. The special grid floor of claim 1, wherein the height of the first ribs relative to the honeycomb side is 30.5 millimeters, and the sum of the heights of the first ribs and the ceiling is 33.5 millimeters, and the thickness of the ceiling is 3 millimeters.

5. The special grid floor of claim 1, wherein the second, fourth and sixth ribs have a height of 25 to 30.5 millimeters relative to the honeycomb side.

6. The special grid floor of claim 1, wherein the third and fifth ribs have a height of 15 to 18 millimeters relative to the honeycomb side.

7. The special purpose grid floor of claim 1, wherein the first ribs have a width of 4 to 7 millimeters.

8. The special grid floor of claim 1, wherein the second, fourth and sixth ribs have a width of 3 to 8 millimeters.

9. The special grid floor of claim 1, wherein the third and fifth ribs have a width of 3 to 3.2 millimeters.

10. The special grid floor as recited in claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than the center rib, and the plurality of auxiliary ribs are correspondingly formed in each of the recesses such that a single auxiliary rib is disposed in a single recess.

11. The special grade grid floor of claim 10, wherein the plurality of auxiliary ribs extend in a single direction without interdigitating with one another.

12. The special grade grid flooring of claim 10, wherein the auxiliary ribs have a height of at least 8 millimeters relative to the honeycomb side and a width of 3 to 3.2 millimeters.

13. The special grid floor as claimed in claim 1, wherein the rib structure forms a cross rib with two sixth ribs in longitudinal and transverse directions to divide the special grid floor into four regions, 16 sub-regions are formed between the adjacent second, third, fourth and fifth ribs in the four regions, each sub-region has a concave portion, the first to fifth ribs are symmetrically distributed based on the cross rib, and another concave portion formed at a central portion of the cross rib formed by the sixth rib is configured with an auxiliary rib, and a wing plate is formed around the top plate to make the height of the auxiliary rib and the thickness of the wing plate larger than the thickness of the top plate, so as to improve the strength of the special grid floor at the middle.

14. The special grid floor as claimed in claim 13, wherein 17 other sub-areas are separated by the second, third, fourth and fifth ribs in the cross-shaped rib, and each sub-area has two through holes therein to form a ventilation amount of 60% or more.

15. The special grid floor as claimed in claim 13, wherein the rib structure forms a cross rib with one sixth rib in the longitudinal and transverse directions to divide the special grid floor into four regions, 16 sub-regions are formed between the adjacent second rib, third rib, fourth rib and fifth rib in the four regions, each sub-region has a concave portion, the first rib to the fifth rib are symmetrically distributed based on the cross rib, and a thimble is formed at the central portion of the cross rib formed by the sixth rib.

16. The special purpose grid floor of claim 1, wherein the first rib is configured to support a foot rest to which the special purpose grid floor is secured.

17. The special grid floor as recited in claim 1, wherein the first rib and the second rib are formed with pedestals at four corners of the special grid floor, the pedestals being fixed to a support frame.