TW202337568A - 液體供給裝置 - Google Patents

液體供給裝置 Download PDF

Info

Publication number
TW202337568A
TW202337568A TW111141506A TW111141506A TW202337568A TW 202337568 A TW202337568 A TW 202337568A TW 111141506 A TW111141506 A TW 111141506A TW 111141506 A TW111141506 A TW 111141506A TW 202337568 A TW202337568 A TW 202337568A
Authority
TW
Taiwan
Prior art keywords
pump
liquid
channel
valve
discharge
Prior art date
Application number
TW111141506A
Other languages
English (en)
Chinese (zh)
Inventor
村岡裕之
Original Assignee
日商小金井股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商小金井股份有限公司 filed Critical 日商小金井股份有限公司
Publication of TW202337568A publication Critical patent/TW202337568A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/20—Filtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Nozzles (AREA)
TW111141506A 2022-03-30 2022-11-01 液體供給裝置 TW202337568A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-056396 2022-03-30
JP2022056396 2022-03-30

Publications (1)

Publication Number Publication Date
TW202337568A true TW202337568A (zh) 2023-10-01

Family

ID=88200605

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111141506A TW202337568A (zh) 2022-03-30 2022-11-01 液體供給裝置

Country Status (5)

Country Link
JP (1) JPWO2023188488A1 (https=)
KR (1) KR20240165345A (https=)
CN (1) CN118871669A (https=)
TW (1) TW202337568A (https=)
WO (1) WO2023188488A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4011210B2 (ja) 1998-10-13 2007-11-21 株式会社コガネイ 薬液供給方法および薬液供給装置
JP4124712B2 (ja) 2003-09-11 2008-07-23 株式会社コガネイ 薬液供給用の可撓性チューブ
JP4566955B2 (ja) * 2006-07-11 2010-10-20 株式会社コガネイ 薬液供給装置および薬液供給方法
JP5038378B2 (ja) * 2009-11-11 2012-10-03 株式会社コガネイ 薬液供給装置および薬液供給方法
JP2014001663A (ja) * 2012-06-18 2014-01-09 Koganei Corp 液体供給装置
JP7030631B2 (ja) * 2018-06-28 2022-03-07 株式会社コガネイ 液体供給装置および液体供給方法

Also Published As

Publication number Publication date
WO2023188488A1 (ja) 2023-10-05
KR20240165345A (ko) 2024-11-22
JPWO2023188488A1 (https=) 2023-10-05
CN118871669A (zh) 2024-10-29

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