JPWO2023188488A1 - - Google Patents
Info
- Publication number
- JPWO2023188488A1 JPWO2023188488A1 JP2024511183A JP2024511183A JPWO2023188488A1 JP WO2023188488 A1 JPWO2023188488 A1 JP WO2023188488A1 JP 2024511183 A JP2024511183 A JP 2024511183A JP 2024511183 A JP2024511183 A JP 2024511183A JP WO2023188488 A1 JPWO2023188488 A1 JP WO2023188488A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B23/00—Pumping installations or systems
- F04B23/04—Combinations of two or more pumps
- F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/20—Filtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0402—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Coating Apparatus (AREA)
- Details Of Reciprocating Pumps (AREA)
- Nozzles (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022056396 | 2022-03-30 | ||
| PCT/JP2022/039529 WO2023188488A1 (ja) | 2022-03-30 | 2022-10-24 | 液体供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023188488A1 true JPWO2023188488A1 (https=) | 2023-10-05 |
| JPWO2023188488A5 JPWO2023188488A5 (https=) | 2024-12-09 |
Family
ID=88200605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024511183A Pending JPWO2023188488A1 (https=) | 2022-03-30 | 2022-10-24 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2023188488A1 (https=) |
| KR (1) | KR20240165345A (https=) |
| CN (1) | CN118871669A (https=) |
| TW (1) | TW202337568A (https=) |
| WO (1) | WO2023188488A1 (https=) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4011210B2 (ja) | 1998-10-13 | 2007-11-21 | 株式会社コガネイ | 薬液供給方法および薬液供給装置 |
| JP4124712B2 (ja) | 2003-09-11 | 2008-07-23 | 株式会社コガネイ | 薬液供給用の可撓性チューブ |
| JP4566955B2 (ja) * | 2006-07-11 | 2010-10-20 | 株式会社コガネイ | 薬液供給装置および薬液供給方法 |
| JP5038378B2 (ja) * | 2009-11-11 | 2012-10-03 | 株式会社コガネイ | 薬液供給装置および薬液供給方法 |
| JP2014001663A (ja) * | 2012-06-18 | 2014-01-09 | Koganei Corp | 液体供給装置 |
| JP7030631B2 (ja) * | 2018-06-28 | 2022-03-07 | 株式会社コガネイ | 液体供給装置および液体供給方法 |
-
2022
- 2022-10-24 KR KR1020247030410A patent/KR20240165345A/ko active Pending
- 2022-10-24 CN CN202280093537.XA patent/CN118871669A/zh active Pending
- 2022-10-24 WO PCT/JP2022/039529 patent/WO2023188488A1/ja not_active Ceased
- 2022-10-24 JP JP2024511183A patent/JPWO2023188488A1/ja active Pending
- 2022-11-01 TW TW111141506A patent/TW202337568A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023188488A1 (ja) | 2023-10-05 |
| KR20240165345A (ko) | 2024-11-22 |
| TW202337568A (zh) | 2023-10-01 |
| CN118871669A (zh) | 2024-10-29 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20241121 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250527 |