KR20240165345A - 액체 공급 장치 - Google Patents

액체 공급 장치 Download PDF

Info

Publication number
KR20240165345A
KR20240165345A KR1020247030410A KR20247030410A KR20240165345A KR 20240165345 A KR20240165345 A KR 20240165345A KR 1020247030410 A KR1020247030410 A KR 1020247030410A KR 20247030410 A KR20247030410 A KR 20247030410A KR 20240165345 A KR20240165345 A KR 20240165345A
Authority
KR
South Korea
Prior art keywords
pump
liquid
path
discharge
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247030410A
Other languages
English (en)
Korean (ko)
Inventor
무라오카 히로유키
Original Assignee
가부시키가이샤 고가네이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 고가네이 filed Critical 가부시키가이샤 고가네이
Publication of KR20240165345A publication Critical patent/KR20240165345A/ko
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/20—Filtering
    • H01L21/67017—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Nozzles (AREA)
KR1020247030410A 2022-03-30 2022-10-24 액체 공급 장치 Pending KR20240165345A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022056396 2022-03-30
JPJP-P-2022-056396 2022-03-30
PCT/JP2022/039529 WO2023188488A1 (ja) 2022-03-30 2022-10-24 液体供給装置

Publications (1)

Publication Number Publication Date
KR20240165345A true KR20240165345A (ko) 2024-11-22

Family

ID=88200605

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247030410A Pending KR20240165345A (ko) 2022-03-30 2022-10-24 액체 공급 장치

Country Status (5)

Country Link
JP (1) JPWO2023188488A1 (https=)
KR (1) KR20240165345A (https=)
CN (1) CN118871669A (https=)
TW (1) TW202337568A (https=)
WO (1) WO2023188488A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000120530A (ja) 1998-10-13 2000-04-25 Koganei Corp 薬液供給方法および薬液供給装置
JP2005083337A (ja) 2003-09-11 2005-03-31 Koganei Corp 薬液供給用の可撓性チューブ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4566955B2 (ja) * 2006-07-11 2010-10-20 株式会社コガネイ 薬液供給装置および薬液供給方法
JP5038378B2 (ja) * 2009-11-11 2012-10-03 株式会社コガネイ 薬液供給装置および薬液供給方法
JP2014001663A (ja) * 2012-06-18 2014-01-09 Koganei Corp 液体供給装置
JP7030631B2 (ja) * 2018-06-28 2022-03-07 株式会社コガネイ 液体供給装置および液体供給方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000120530A (ja) 1998-10-13 2000-04-25 Koganei Corp 薬液供給方法および薬液供給装置
JP2005083337A (ja) 2003-09-11 2005-03-31 Koganei Corp 薬液供給用の可撓性チューブ

Also Published As

Publication number Publication date
WO2023188488A1 (ja) 2023-10-05
TW202337568A (zh) 2023-10-01
JPWO2023188488A1 (https=) 2023-10-05
CN118871669A (zh) 2024-10-29

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PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

A201 Request for examination
P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000