JP2005083337A - 薬液供給用の可撓性チューブ - Google Patents
薬液供給用の可撓性チューブ Download PDFInfo
- Publication number
- JP2005083337A JP2005083337A JP2003319671A JP2003319671A JP2005083337A JP 2005083337 A JP2005083337 A JP 2005083337A JP 2003319671 A JP2003319671 A JP 2003319671A JP 2003319671 A JP2003319671 A JP 2003319671A JP 2005083337 A JP2005083337 A JP 2005083337A
- Authority
- JP
- Japan
- Prior art keywords
- flexible tube
- chemical solution
- elastic deformation
- elastically
- circumferential direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 title claims description 41
- 230000005489 elastic deformation Effects 0.000 claims abstract description 54
- 239000007788 liquid Substances 0.000 claims abstract description 34
- 230000008602 contraction Effects 0.000 claims abstract description 20
- 238000007599 discharging Methods 0.000 abstract description 2
- 208000028659 discharge Diseases 0.000 description 35
- 239000000243 solution Substances 0.000 description 24
- 239000004065 semiconductor Substances 0.000 description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000013459 approach Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000008155 medical solution Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
- F04B43/10—Pumps having fluid drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
- F04B43/0072—Special features particularities of the flexible members of tubular flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
- F04B43/09—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/04—PTFE [PolyTetraFluorEthylene]
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
- Coating Apparatus (AREA)
Abstract
【解決手段】 可撓性チューブ20は流入側の固定端部21と流出側の固定端部22とを有し、これらの間には弾性変形部23が設けられている。弾性変形部23には凸形弧状部42が設けられ、この凸形弧状部42は円周方向にほぼ等間隔に設けられた3つの頂点部41をそれぞれ変形中心とし頂点部41に接する仮想円Sの曲率よりも小さい曲率で外方に向けて凸状に湾曲している。それぞれの凸形弧状部42の円周方向相互間には凹形弧状部43が連なっており、凹形弧状部43は外方に向けて凹状に湾曲している。弾性変形部の膨張収縮時にはそれぞれの凸形弧状部42が円周方向に弾性変形し、凹形弧状部43が半径方向に弾性変形する。
【選択図】 図3
Description
11 円筒
12,13 ジョイント
14 供給側流路
15 薬液タンク
16 流出側流路
17 塗布ノズル
18,19 開閉弁
20 可撓性チューブ
21,22 固定端部
23 弾性変形部
24 膨張収縮室
25 加圧室
26 供給ポート
31,32 固定ディスク
33 大型ベローズ部
34 小型ベローズ部
35 作動ディスク
40 テーパー部
41 頂点部
42 凸形弧状部
43 凹形弧状部
45 軸方向変形部
Claims (4)
- 薬液供給装置に組み込まれ、内側の膨張収縮室と外側の加圧室とを区画する薬液供給用の可撓性チューブであって、
前記薬液供給装置に固定される筒状の流入側の固定端部と、前記薬液供給装置に固定される筒状の流出側の固定端部と、前記流入側と流出側の固定端部の間の弾性変形部とを前記可撓性チューブに設け、
円周方向にほぼ等間隔の3つの頂点部をそれぞれ変形中心とし前記頂点部に接する仮想円の曲率よりも小さい曲率で外方に向けて凸状に湾曲した凸形弧状部と、それぞれの前記凸形弧状部の円周方向相互間に連なって外方に向けて凹状に湾曲した凹形弧状部とを前記弾性変形部に形成し、
前記弾性変形部の膨張収縮時にそれぞれの前記凸形弧状部が前記頂点部を中心に円周方向に弾性変形し、前記凹形弧状部が半径方向に弾性変形することを特徴とする薬液供給用の可撓性チューブ。 - 薬液供給装置に組み込まれ、内側の膨張収縮室と外側の加圧室とを区画する薬液供給用の可撓性チューブであって、
前記薬液供給装置に固定される筒状の流入側の固定端部と、前記薬液供給装置に固定される筒状の流出側の固定端部と、前記流入側と流出側の固定端部の間の弾性変形部とを前記可撓性チューブに設け、
径方向に湾曲し周方向に延びて形成され軸方向に弾性変形する軸方向変形部を前記弾性変形部に形成し、
前記弾性変形部の膨張収縮時に前記軸方向変形部を弾性変形させることを特徴とする薬液供給用の可撓性チューブ。 - 請求項2記載の薬液供給用の可撓性チューブにおいて、前記軸方向変形部を前記弾性変形部の全周に形成することを特徴とする薬液供給用の可撓性チューブ。
- 請求項2記載の薬液供給用の可撓性チューブにおいて、前記軸方向変形部を前記弾性変形部の両端部に形成することを特徴とする薬液供給用の可撓性チューブ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003319671A JP4124712B2 (ja) | 2003-09-11 | 2003-09-11 | 薬液供給用の可撓性チューブ |
CNB2004800259595A CN100425836C (zh) | 2003-09-11 | 2004-01-30 | 用于供应化工液体的软管 |
KR1020067004962A KR100751657B1 (ko) | 2003-09-11 | 2004-01-30 | 케미컬 리퀴드 공급용 플렉시블 튜브 |
US10/571,550 US7806668B2 (en) | 2003-09-11 | 2004-01-30 | Flexible tube for supplying chemical liquid |
PCT/JP2004/000946 WO2005026549A1 (ja) | 2003-09-11 | 2004-01-30 | 薬液供給用の可撓性チューブ |
TW093103870A TWI243877B (en) | 2003-09-11 | 2004-02-18 | Flexible tube for applying chemical solution |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003319671A JP4124712B2 (ja) | 2003-09-11 | 2003-09-11 | 薬液供給用の可撓性チューブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005083337A true JP2005083337A (ja) | 2005-03-31 |
JP4124712B2 JP4124712B2 (ja) | 2008-07-23 |
Family
ID=34308576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003319671A Expired - Lifetime JP4124712B2 (ja) | 2003-09-11 | 2003-09-11 | 薬液供給用の可撓性チューブ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7806668B2 (ja) |
JP (1) | JP4124712B2 (ja) |
KR (1) | KR100751657B1 (ja) |
CN (1) | CN100425836C (ja) |
TW (1) | TWI243877B (ja) |
WO (1) | WO2005026549A1 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006239600A (ja) * | 2005-03-04 | 2006-09-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置および処理液供給方法 |
US7708880B2 (en) * | 2001-12-28 | 2010-05-04 | Koganel Corporation | Chemical liquid supply apparatus and a chemical liquid supply method |
WO2012042955A1 (ja) * | 2010-09-28 | 2012-04-05 | 株式会社コガネイ | 薬液供給装置 |
KR101279692B1 (ko) | 2011-11-04 | 2013-06-27 | 블루 젠티안 엘엘씨 | 팽창 및 수축가능한 호스 |
JP2016084803A (ja) * | 2014-10-23 | 2016-05-19 | 東京エレクトロン株式会社 | ポンプ、ポンプ装置及び液供給システム |
JP2018096252A (ja) * | 2016-12-12 | 2018-06-21 | 株式会社リコー | 流体搬送装置、流体搬送システム、画像形成装置及び流体搬送方法 |
KR20190095878A (ko) | 2018-02-07 | 2019-08-16 | 코가네이 코포레이션 | 액체공급장치 |
JP2020033995A (ja) * | 2018-08-24 | 2020-03-05 | 学校法人 中央大学 | ポンプユニット及びポンプ |
KR20220142921A (ko) | 2021-04-15 | 2022-10-24 | 코가네이 코포레이션 | 액체공급장치 |
Families Citing this family (14)
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EP1962943A2 (en) * | 2005-11-28 | 2008-09-03 | Biomedinnovations, LLC | Pulse generating device |
ES2302644B1 (es) * | 2007-01-08 | 2009-05-25 | Hynergreen Technologies, S.A. | Sistema para impulsion de un fluido por recirculacion desde un medio a baja presion a un medio a alta presion. |
US8678299B2 (en) | 2008-10-29 | 2014-03-25 | Korea Institute Of Machinery & Materials | Hollow actuator-driven droplet dispensing apparatus |
US8118572B2 (en) * | 2009-02-09 | 2012-02-21 | Klein Jeffrey A | Peristaltic pump tubing with stopper and cooperative roller assembly housing having no moving parts |
US20100135798A1 (en) * | 2009-02-10 | 2010-06-03 | General Electric Company | Wind turbine noise controls |
CN101539134A (zh) * | 2009-04-23 | 2009-09-23 | 西南石油大学 | 一种隔膜式液力抽油泵 |
JP5114527B2 (ja) * | 2010-04-20 | 2013-01-09 | 株式会社コガネイ | 液体供給装置 |
NL1038329C2 (en) * | 2010-10-25 | 2012-04-26 | Lely Patent Nv | Milking installation with milk pump. |
JP2013174139A (ja) * | 2012-02-23 | 2013-09-05 | Chuo Univ | ポンプユニット |
JP5991608B2 (ja) * | 2012-02-23 | 2016-09-14 | 学校法人 中央大学 | ポンプユニット |
US9739274B2 (en) * | 2013-03-15 | 2017-08-22 | Integrated Designs, L.P. | Pump system and method having a quick change motor drive |
CN105736329B (zh) * | 2016-01-29 | 2018-03-27 | 上海飞舟博源石油装备技术有限公司 | 双腔交替供油式潜油电动隔膜泵 |
CN106051330A (zh) * | 2016-07-21 | 2016-10-26 | 中山市庆谊金属制品企业有限公司 | 一种新型水管 |
JP2021105392A (ja) * | 2019-12-27 | 2021-07-26 | 学校法人 中央大学 | ポンプユニット及びポンプ並びに搬送物の特性検出方法 |
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-
2003
- 2003-09-11 JP JP2003319671A patent/JP4124712B2/ja not_active Expired - Lifetime
-
2004
- 2004-01-30 US US10/571,550 patent/US7806668B2/en active Active
- 2004-01-30 CN CNB2004800259595A patent/CN100425836C/zh not_active Expired - Fee Related
- 2004-01-30 KR KR1020067004962A patent/KR100751657B1/ko active IP Right Grant
- 2004-01-30 WO PCT/JP2004/000946 patent/WO2005026549A1/ja active Application Filing
- 2004-02-18 TW TW093103870A patent/TWI243877B/zh not_active IP Right Cessation
Cited By (12)
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US7708880B2 (en) * | 2001-12-28 | 2010-05-04 | Koganel Corporation | Chemical liquid supply apparatus and a chemical liquid supply method |
JP2006239600A (ja) * | 2005-03-04 | 2006-09-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置および処理液供給方法 |
JP4541190B2 (ja) * | 2005-03-04 | 2010-09-08 | 大日本スクリーン製造株式会社 | 基板処理装置および処理液供給方法 |
WO2012042955A1 (ja) * | 2010-09-28 | 2012-04-05 | 株式会社コガネイ | 薬液供給装置 |
JP2012071230A (ja) * | 2010-09-28 | 2012-04-12 | Koganei Corp | 薬液供給装置 |
KR101279692B1 (ko) | 2011-11-04 | 2013-06-27 | 블루 젠티안 엘엘씨 | 팽창 및 수축가능한 호스 |
JP2016084803A (ja) * | 2014-10-23 | 2016-05-19 | 東京エレクトロン株式会社 | ポンプ、ポンプ装置及び液供給システム |
JP2018096252A (ja) * | 2016-12-12 | 2018-06-21 | 株式会社リコー | 流体搬送装置、流体搬送システム、画像形成装置及び流体搬送方法 |
KR20190095878A (ko) | 2018-02-07 | 2019-08-16 | 코가네이 코포레이션 | 액체공급장치 |
JP2020033995A (ja) * | 2018-08-24 | 2020-03-05 | 学校法人 中央大学 | ポンプユニット及びポンプ |
JP7343897B2 (ja) | 2018-08-24 | 2023-09-13 | 学校法人 中央大学 | ポンプユニット及びポンプ |
KR20220142921A (ko) | 2021-04-15 | 2022-10-24 | 코가네이 코포레이션 | 액체공급장치 |
Also Published As
Publication number | Publication date |
---|---|
CN1849453A (zh) | 2006-10-18 |
JP4124712B2 (ja) | 2008-07-23 |
US7806668B2 (en) | 2010-10-05 |
TWI243877B (en) | 2005-11-21 |
CN100425836C (zh) | 2008-10-15 |
KR100751657B1 (ko) | 2007-08-23 |
KR20060087553A (ko) | 2006-08-02 |
TW200510638A (en) | 2005-03-16 |
US20070031273A1 (en) | 2007-02-08 |
WO2005026549A1 (ja) | 2005-03-24 |
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