CN118871669A - 液体供给装置 - Google Patents

液体供给装置 Download PDF

Info

Publication number
CN118871669A
CN118871669A CN202280093537.XA CN202280093537A CN118871669A CN 118871669 A CN118871669 A CN 118871669A CN 202280093537 A CN202280093537 A CN 202280093537A CN 118871669 A CN118871669 A CN 118871669A
Authority
CN
China
Prior art keywords
pump
liquid
flow path
discharge
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280093537.XA
Other languages
English (en)
Chinese (zh)
Inventor
村冈裕之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
Original Assignee
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Publication of CN118871669A publication Critical patent/CN118871669A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/20—Filtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Nozzles (AREA)
CN202280093537.XA 2022-03-30 2022-10-24 液体供给装置 Pending CN118871669A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-056396 2022-03-30
JP2022056396 2022-03-30
PCT/JP2022/039529 WO2023188488A1 (ja) 2022-03-30 2022-10-24 液体供給装置

Publications (1)

Publication Number Publication Date
CN118871669A true CN118871669A (zh) 2024-10-29

Family

ID=88200605

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280093537.XA Pending CN118871669A (zh) 2022-03-30 2022-10-24 液体供给装置

Country Status (5)

Country Link
JP (1) JPWO2023188488A1 (https=)
KR (1) KR20240165345A (https=)
CN (1) CN118871669A (https=)
TW (1) TW202337568A (https=)
WO (1) WO2023188488A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4011210B2 (ja) 1998-10-13 2007-11-21 株式会社コガネイ 薬液供給方法および薬液供給装置
JP4124712B2 (ja) 2003-09-11 2008-07-23 株式会社コガネイ 薬液供給用の可撓性チューブ
JP4566955B2 (ja) * 2006-07-11 2010-10-20 株式会社コガネイ 薬液供給装置および薬液供給方法
JP5038378B2 (ja) * 2009-11-11 2012-10-03 株式会社コガネイ 薬液供給装置および薬液供給方法
JP2014001663A (ja) * 2012-06-18 2014-01-09 Koganei Corp 液体供給装置
JP7030631B2 (ja) * 2018-06-28 2022-03-07 株式会社コガネイ 液体供給装置および液体供給方法

Also Published As

Publication number Publication date
WO2023188488A1 (ja) 2023-10-05
KR20240165345A (ko) 2024-11-22
TW202337568A (zh) 2023-10-01
JPWO2023188488A1 (https=) 2023-10-05

Similar Documents

Publication Publication Date Title
EP2270334B1 (en) Metering pump and its driving device
JP4566955B2 (ja) 薬液供給装置および薬液供給方法
JP5038378B2 (ja) 薬液供給装置および薬液供給方法
KR102591031B1 (ko) 액체공급장치 및 액체공급방법
JP7578535B2 (ja) 液体供給装置
US5807085A (en) Liquid medicine supplying system with valve devices
JP5114527B2 (ja) 液体供給装置
JP4422040B2 (ja) 弁装置
CN118871669A (zh) 液体供给装置
JP3619616B2 (ja) 薬液供給装置の駆動方法
WO2005089955A1 (ja) 薬液供給装置
JPH1054368A (ja) ベローズポンプ
JPH03111675A (ja) プランジャポンプ
JP7527669B2 (ja) ダイアフラムポンプ
CN221373812U (zh) 单缸活塞式恒流系统
EP1446339B1 (en) Continuous positive displacement metering valve
RU2180052C2 (ru) Насос-дозатор
CN121296412A (zh) 活塞式恒流泵系统及方法
JP2001234849A (ja) 往復動型ポンプ
JP2002357178A (ja) 高粘度流体用ポンプ
JPWO2005088129A1 (ja) 薬液供給装置
JPH1193830A (ja) 超磁歪式液体ポンプ
JP2005147095A (ja) 薬液供給装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination