TW201907454A - 奈米間隙電極及其製造方法 - Google Patents
奈米間隙電極及其製造方法 Download PDFInfo
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- TW201907454A TW201907454A TW107115826A TW107115826A TW201907454A TW 201907454 A TW201907454 A TW 201907454A TW 107115826 A TW107115826 A TW 107115826A TW 107115826 A TW107115826 A TW 107115826A TW 201907454 A TW201907454 A TW 201907454A
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Classifications
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/117—Shapes of semiconductor bodies
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- H10D62/119—Nanowire, nanosheet or nanotube semiconductor bodies
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- C12Q2565/00—Nucleic acid analysis characterised by mode or means of detection
- C12Q2565/60—Detection means characterised by use of a special device
- C12Q2565/607—Detection means characterised by use of a special device being a sensor, e.g. electrode
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
- G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
- G01N27/3275—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
- G01N27/3278—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles
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- Chemical Kinetics & Catalysis (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Proteomics, Peptides & Aminoacids (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Biophysics (AREA)
- General Physics & Mathematics (AREA)
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- Wood Science & Technology (AREA)
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- General Chemical & Material Sciences (AREA)
- Hematology (AREA)
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- Urology & Nephrology (AREA)
- General Engineering & Computer Science (AREA)
- Microbiology (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Biotechnology (AREA)
- Genetics & Genomics (AREA)
- Electrochemistry (AREA)
- Inorganic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Electrodes Of Semiconductors (AREA)
- Cold Cathode And The Manufacture (AREA)
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| CA (1) | CA2922600A1 (enExample) |
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Cited By (1)
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| TWI753317B (zh) * | 2019-10-31 | 2022-01-21 | 錼創顯示科技股份有限公司 | 電極結構、微型發光元件以及顯示面板 |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US9194838B2 (en) | 2010-03-03 | 2015-11-24 | Osaka University | Method and device for identifying nucleotide, and method and device for determining nucleotide sequence of polynucleotide |
| US9535033B2 (en) | 2012-08-17 | 2017-01-03 | Quantum Biosystems Inc. | Sample analysis method |
| JP6282036B2 (ja) | 2012-12-27 | 2018-02-21 | クオンタムバイオシステムズ株式会社 | 物質の移動速度の制御方法および制御装置 |
| EP3578987A1 (en) | 2013-09-18 | 2019-12-11 | Quantum Biosystems Inc. | Biomolecule sequencing devices, systems and methods |
| JP2015077652A (ja) | 2013-10-16 | 2015-04-23 | クオンタムバイオシステムズ株式会社 | ナノギャップ電極およびその製造方法 |
| US10438811B1 (en) | 2014-04-15 | 2019-10-08 | Quantum Biosystems Inc. | Methods for forming nano-gap electrodes for use in nanosensors |
| WO2015170782A1 (en) | 2014-05-08 | 2015-11-12 | Osaka University | Devices, systems and methods for linearization of polymers |
| KR101489154B1 (ko) * | 2014-06-26 | 2015-02-03 | 국민대학교산학협력단 | 잔류응력을 이용한 나노갭 센서의 제조방법 및 이에 의해 제조되는 나노갭 센서 |
| US20160177383A1 (en) * | 2014-12-16 | 2016-06-23 | Arizona Board Of Regents On Behalf Of Arizona State University | Nanochannel with integrated tunnel gap |
| KR20180072717A (ko) * | 2015-10-08 | 2018-06-29 | 퀀텀 바이오시스템즈 가부시키가이샤 | 핵산 시퀀싱을 위한 장치, 시스템 및 방법 |
| ES2877193T3 (es) | 2016-04-27 | 2021-11-16 | Quantum Biosystems Inc | Sistemas y métodos para la medición y secuenciación de biomoléculas |
| US10168299B2 (en) * | 2016-07-15 | 2019-01-01 | International Business Machines Corporation | Reproducible and manufacturable nanogaps for embedded transverse electrode pairs in nanochannels |
| WO2018025887A1 (en) * | 2016-08-02 | 2018-02-08 | Quantum Biosystems Inc. | Devices and methods for creation and calibration of a nanoelectrode pair |
| US10739299B2 (en) * | 2017-03-14 | 2020-08-11 | Roche Sequencing Solutions, Inc. | Nanopore well structures and methods |
| US11740226B2 (en) | 2017-10-13 | 2023-08-29 | Analog Devices International Unlimited Company | Designs and fabrication of nanogap sensors |
| EP3572104A1 (de) * | 2018-05-25 | 2019-11-27 | Berlin Heart GmbH | Bauteil zum führen eines fluids mit einem sensor |
| WO2024181927A1 (en) * | 2023-03-02 | 2024-09-06 | Agency For Science, Technology And Research | A nanogap electrode device, a method of making a nanogap electrode device, and a sensor for detecting a target analyte |
| CN120348906A (zh) * | 2025-06-24 | 2025-07-22 | 中国人民解放军国防科技大学 | 一种金属纳米缝隙阵列的制备方法 |
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| JPS62194673A (ja) * | 1986-02-20 | 1987-08-27 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPH04302151A (ja) * | 1991-03-29 | 1992-10-26 | Toshiba Corp | 電荷結合装置の製造方法 |
| JP3560990B2 (ja) * | 1993-06-30 | 2004-09-02 | 株式会社東芝 | 固体撮像装置 |
| US6905586B2 (en) * | 2002-01-28 | 2005-06-14 | Ut-Battelle, Llc | DNA and RNA sequencing by nanoscale reading through programmable electrophoresis and nanoelectrode-gated tunneling and dielectric detection |
| JP2003332555A (ja) * | 2002-05-09 | 2003-11-21 | Fuji Film Microdevices Co Ltd | 固体撮像素子およびその製造方法 |
| US7410564B2 (en) * | 2003-01-27 | 2008-08-12 | Agilent Technologies, Inc. | Apparatus and method for biopolymer identification during translocation through a nanopore |
| JP3787630B2 (ja) * | 2003-02-14 | 2006-06-21 | 独立行政法人情報通信研究機構 | ナノギャップ電極の製造方法 |
| TWI273237B (en) * | 2004-12-13 | 2007-02-11 | Nat Applied Res Laboratories | Coulomb blockade device operated under room temperature |
| AU2006336262B2 (en) * | 2005-04-06 | 2011-10-13 | President And Fellows Of Harvard College | Molecular characterization with carbon nanotube control |
| TWI287041B (en) * | 2005-04-27 | 2007-09-21 | Jung-Tang Huang | An ultra-rapid DNA sequencing method with nano-transistors array based devices |
| JP4869985B2 (ja) * | 2006-03-06 | 2012-02-08 | 株式会社Ｊｖｃケンウッド | 液晶表示装置及びその製造方法 |
| JP2010500559A (ja) * | 2006-08-11 | 2010-01-07 | エージェンシー フォー サイエンス，テクノロジー アンド リサーチ | ナノワイヤセンサ、ナノワイヤセンサアレイ、及び当該センサ及びセンサアレイを形成する方法 |
| GB0625070D0 (en) * | 2006-12-15 | 2007-01-24 | Imp Innovations Ltd | Characterization of molecules |
| JP2008186975A (ja) * | 2007-01-30 | 2008-08-14 | Renesas Technology Corp | 半導体装置の製造方法 |
| TWI383144B (zh) * | 2008-09-23 | 2013-01-21 | Univ Nat Chiao Tung | 感測元件、製造方法及其生物檢測系統 |
| TWI424160B (zh) * | 2009-06-17 | 2014-01-21 | 國立交通大學 | 結合矽奈米線閘極二極體之感測元件、製造方法及其檢測系統 |
| US9194838B2 (en) * | 2010-03-03 | 2015-11-24 | Osaka University | Method and device for identifying nucleotide, and method and device for determining nucleotide sequence of polynucleotide |
| EP2573554A1 (en) * | 2011-09-21 | 2013-03-27 | Nxp B.V. | Apparatus and method for bead detection |
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2014
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- 2014-08-26 JP JP2016537398A patent/JP2016536599A/ja active Pending
- 2014-08-26 WO PCT/IB2014/002143 patent/WO2015028886A2/en not_active Ceased
- 2014-08-26 KR KR1020167008057A patent/KR20160086320A/ko not_active Withdrawn
- 2014-08-26 EP EP14839260.8A patent/EP3042187A4/en not_active Withdrawn
- 2014-08-26 CN CN201480047572.3A patent/CN105593673A/zh active Pending
- 2014-08-27 TW TW107115826A patent/TW201907454A/zh unknown
- 2014-08-27 TW TW103129615A patent/TWI632599B/zh not_active IP Right Cessation
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2016
- 2016-02-19 US US15/048,810 patent/US20160245789A1/en not_active Abandoned
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI753317B (zh) * | 2019-10-31 | 2022-01-21 | 錼創顯示科技股份有限公司 | 電極結構、微型發光元件以及顯示面板 |
Also Published As
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| TW201523710A (zh) | 2015-06-16 |
| WO2015028886A3 (en) | 2015-05-14 |
| CA2922600A1 (en) | 2015-03-05 |
| EP3042187A4 (en) | 2017-09-13 |
| JP2016536599A (ja) | 2016-11-24 |
| WO2015028886A2 (en) | 2015-03-05 |
| US20160245789A1 (en) | 2016-08-25 |
| EP3042187A2 (en) | 2016-07-13 |
| CN105593673A (zh) | 2016-05-18 |
| KR20160086320A (ko) | 2016-07-19 |
| TWI632599B (zh) | 2018-08-11 |
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