TW201532133A - Blade cover device - Google Patents

Abstract

The subject of this invention is to provide a blade cover device capable of preventing poor conditions caused by contact of dispersing remaining materials. The solution comprises a blade cover device arranged on a rotary shaft housing and covering the cutter mounted on the rotary shaft, having the following configuration: it comprises a nozzle set arranged on one side opposite to the dispersion direction of cutting water and ejecting cutting water toward the outer periphery of the cutter; the nozzle set comprises a cutting water ejection opening for supplying the cutting water toward the outer periphery of the cutter, and a pair of auxiliary cutting water ejection openings arranged by sandwiching the cutting water ejection opening and ejecting the cutting water on two sides of the cutter.

Description

Blade cover device Field of invention

The present invention relates to a blade cover device for covering an annular cutter disposed on a cutting device.

Background of the invention

A semiconductor wafer having an element such as an IC formed on the surface thereof or a workpiece such as a package substrate in which a plurality of element wafers are sealed with a resin can be cut by, for example, a cutting device (cutting device) having a rotatable annular cutter. And divided into a plurality of wafers. In the blade cover device that covers the cutter of the cutting device, a nozzle is usually provided to supply cutting water that can be used for cooling, washing, or cutting the workpiece.

However, in the case of dividing the above-mentioned package substrate, it is more effective to, for example, suck and hold only the region corresponding to the divided wafer by the chuck table, and to cut and remove unnecessary end materials.

Thus, there has been proposed a technical solution of a blade cover device having a tubular nozzle for causing the end material generated by the cutting to scatter and preventing the contact of the scattered end material from the cutting blade and from the cutting blade. The cutting water is supplied to the front (or the rear) (see, for example, Patent Document 1).

Prior technical literature Patent literature

Patent Document 1: Japanese Patent Laid-Open Publication No. 2009-285769

Summary of invention

However, when the scattered end material or the like comes into contact with the nozzle of the above-described blade cover device, problems such as drop, deformation, and positional deviation of the nozzle may occur due to the impact of the contact. The present invention has been made in view of the above problems, and an object thereof is to provide a blade cover device capable of preventing occurrence of a problem due to contact of an end material or the like due to scattering.

A blade cover device according to the present invention is a blade cover device disposed at a front end of a rotary shaft housing that rotatably supports a rotary shaft and covers a cutter mounted on the rotary shaft, and is characterized in that it has a nozzle group. The nozzle group is disposed on the side opposite to the side where the cutting water supplied to the cutting blade is scattered by the rotation of the cutting blade, and faces the outer peripheral end surface of the cutting blade to discharge the cutting water, and the nozzle group is provided with the cutting water. A cutting water discharge port for supplying the cutting water to the outer peripheral end surface of the cutter, and a pair of the cutting water discharge ports are disposed to sandwich the cutting water discharge port, and the auxiliary cutting water discharge port of the cutting water is sprayed to both side faces of the cutting blade.

Further, in the invention, it is preferable to further include a base fixed to a front end of the rotating shaft case, and the nozzle group is movably attached to the base, and is disposed to allow the nozzle group to be perpendicular to the base The position adjustment means of the movement.

Further, in the invention, it is preferable that the position adjusting means includes a through hole, an adjusting screw, and a rotation restricting portion that penetrates the base portion in a vertical direction, and the adjusting screw is inserted into the through hole and the head is stuck Cooperating with the upper end of the through hole, and screwing the lower end to the screw hole of the nozzle group, the rotation restricting portion can restrict the rotation of the nozzle group relative to the base portion by using the adjusting screw as a rotating shaft, and rotating the adjusting screw The nozzle set can be moved in a vertical direction relative to the base.

The blade cover device of the present invention includes a cutting water discharge port that supplies cutting water to the outer circumferential end surface of the cutting blade, and a nozzle group that is formed integrally with the auxiliary cutting water discharge port that sprays cutting water on both sides of the cutting blade, so that it does not There is a case where a tubular nozzle is provided in addition to the cover member, and contact with the scattered end material or the like causes a problem of nozzle drop, deformation, positional deviation, and the like. As described above, according to the present invention, it is possible to provide a blade cover device capable of preventing occurrence of a problem caused by contact with a flying end material or the like.

2‧‧‧Cutting device

4‧‧‧Abutment

4a, 66a‧‧‧ openings

6‧‧‧X-axis mobile station

8‧‧‧Waterproof cover

10‧‧‧ chuck table

10a‧‧‧ Keep face

11‧‧‧Processed objects

12‧‧‧Cutting unit

14‧‧‧Support structure

16‧‧‧Cutting unit moving mechanism

18‧‧‧Y-axis guide track

20‧‧‧Y-axis mobile station

22‧‧‧Y-axis mobile station

24‧‧‧Z-axis guided orbit

26‧‧‧Z-axis mobile station

28‧‧‧Z-axis ball screw

30‧‧‧Z-axis pulse motor

32‧‧‧ camera

34‧‧‧Cutter

36‧‧‧Shaft housing

38‧‧‧Blade cover device

40‧‧‧Fixed nuts

42‧‧‧Support abutment

44‧‧‧ cutting edge

46‧‧‧ base

48‧‧‧1st base

50‧‧‧2nd base

50a‧‧‧Guide

50b‧‧‧through hole

50c‧‧‧Extended section

52‧‧‧Nozzles

54, 58, 60‧‧‧ Linkage

56‧‧‧Nozzle set

56a‧‧‧cutting section

56b‧‧‧ cutting water spout

56c, 56e‧‧‧Supply

56d‧‧‧Auxiliary cutting water spout

56f‧‧‧ screw hole

62‧‧‧Location adjustment mechanism

64‧‧‧Adjustment screws

64a‧‧‧ head

66‧‧‧Preventing the board

68, 70‧‧‧ fixing screws

R‧‧‧Rotation direction

Fig. 1 is a perspective view schematically showing a configuration example of a cutting device including the blade cover device of the embodiment.

Fig. 2 is a perspective view schematically showing a peripheral structure of the blade cover device.

3(A) is a side view schematically showing the structure of the second base portion and the nozzle group of the blade cover device, and FIG. 3(B) is a rear view schematically showing the structure of the second base portion and the nozzle group.

Fig. 4 is a rear view schematically showing the configuration of a nozzle group.

Form for implementing the invention

Embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view schematically showing a configuration example of a cutting device including the blade cover device of the embodiment. As shown in Fig. 1, the cutting device 2 is provided with a base 4 that supports each structure.

A long rectangular opening 4a is formed on the upper surface of the base 4 in the front-rear direction (X-axis direction, processing conveyance direction). In the opening 4a, an X-axis moving table 6, an X-axis moving mechanism (not shown) for moving the X-axis moving table 6 in the X-axis direction, and a waterproof cover 8 covering the X-axis moving mechanism are provided.

The X-axis moving mechanism includes a pair of X-axis guiding rails (not shown) that are parallel in the X-axis direction, and the X-axis moving table 6 is slidable on the X-axis guiding rail. A nut portion (not shown) is fixed to the lower surface side of the X-axis moving table 6, and an X-axis ball screw (not shown) parallel to the X-axis guide rail is screwed into the nut portion.

An X-axis pulse motor (not shown) is coupled to one end of the X-axis ball screw. By rotating the X-axis ball screw with the X-axis pulse motor, the X-axis moving table 6 moves in the X-axis direction along the X-axis guide rail.

The X-axis moving table 6 is provided with a chuck table 10 that sucks and holds the workpiece 11. The workpiece 11 may be, for example, a rectangular package substrate in which a plurality of element wafers are sealed with a resin, and the lower surface side is sucked and held on the chuck stage 10.

The chuck table 10 is coupled to a rotating mechanism (not shown) such as a motor, and rotates around a rotating shaft extending in the vertical direction (Z-axis direction). Further, the chuck table 10 is moved in the X-axis direction by the above-described X-axis moving mechanism.

The rectangular upper surface of the chuck table 10 is a holding surface 10a formed to attract and hold the workpiece 11. The holding surface 10a is connected to a suction source (not shown) through a flow path (not shown) formed inside the chuck base 10.

On the upper surface of the base 4, the portal-type support structure 14 that supports the cutting unit 12 is disposed to span the opening 4a. A cutting unit moving mechanism 16 that moves the cutting unit 12 in the Y-axis direction (index transfer direction) and the Z-axis direction is provided on the upper front portion of the support structure 14.

The cutting unit moving mechanism 16 includes a pair of Y-axis guide rails 18 that are disposed in front of the support structure 14 and that are parallel to the Y-axis direction. On the Y-axis guide rail 18, the Y-axis moving table 20 constituting the cutting unit moving mechanism 16 is set to be slidable.

A nut portion (not shown) is fixed to the back side (rear side) of the Y-axis moving table 20, and a Y-axis ball screw 22 parallel to the Y-axis guide rail 18 is screwed to the nut portion. A Y-axis pulse motor (not shown) is coupled to one end portion of the Y-axis ball screw 22. By rotating the Y-axis ball screw 22 with the Y-axis pulse motor, the Y-axis moving table 20 can be moved in the Y-axis direction along the Y-axis guide rail 18.

On the surface (front surface) of the Y-axis moving table 20, a pair of Z-axis guiding rails 24 parallel to the Z-axis direction are provided. And on the Z-axis guide rail 24, the Z-axis moving table 26 is set to be slidable.

On the back side (rear side) of the Z-axis moving table 26, a nut portion (not shown) is fixed, and a Z-axis ball screw 28 parallel to the Z-axis guiding rail 24 is screwed on the nut portion. . A Z-axis pulse motor 30 is coupled to one end of the Z-axis ball screw 28. The Z-axis ball screw 28 is rotated by the Z-axis pulse motor 30, It is possible to move the Z-axis moving table 26 in the Z-axis direction along the Z-axis guiding track 24.

A cutting unit 12 that cuts the workpiece 11 is provided at a lower portion of the Z-axis moving table 26. Further, a camera 32 for photographing the processed surface of the workpiece 11 is provided at a position adjacent to the cutting unit 12. By moving the Y-axis moving table 20 and the Z-axis moving table 26 as described above, the cutting unit 12 and the camera 32 can be moved in the Y-axis direction and the Z-axis direction.

The cutting unit 12 includes an annular cutter 34 attached to one end side of a rotating shaft (not shown) that rotates around the Y-axis. A motor (not shown) is coupled to the other end side of the rotating shaft to rotate the cutting blade 34 mounted on the rotating shaft. The rotating shaft and the motor are housed in a rotating shaft housing 36 fixed to a lower portion of the Z-axis moving table 26.

A blade cover device 38 that covers the cutting blade 34 is provided on one end (front end) side of the rotary shaft 36. FIG. 2 is a perspective view schematically showing a peripheral structure of the blade cover device 38.

As shown in FIG. 2, the cutting blade 34 is mounted so as to be sandwiched between a flange (not shown) attached to the front end portion of the rotating shaft and the fixing nut 40, so that the lower end portion moves from the front to the rear. The way to rotate. That is, the rotation direction of the cutter 34 is the rotation direction R shown in FIG. However, the cutting direction of the workpiece 11 may be any one of the front and rear directions.

This cutter 34 is also a so-called hub blade, and an annular cutting edge 44 for cutting the workpiece 11 is fixed to the outer peripheral portion of the disk-shaped support base 42. Further, as the cutting blade 34, a washer blade formed of only a cutting edge may be used.

The blade cover device 38 that covers the cutter 34 includes a base portion 46 that is fixed to one end side of the spindle housing 36. The base portion 46 is composed of a first base portion 48 positioned on the rear side of the cutter blade 34 and a second base portion 50 positioned on the front side of the cutter blade 34, and covers the upper portion of the cutter blade 34.

A pair of nozzles 52 that substantially cover the lower side of the cutting blade 34 and that sandwich the lower portion of the cutting blade 34 are attached to the lower rear portion of the first base portion 48. In each of the nozzles 52, cutting water (pure water) is supplied through a joint portion 54 provided at the upper end (base end).

On the front end side of the nozzle 52, a plurality of slits (not shown) facing the side faces of the cutting blade 34 are formed. The cutting blade 34 is cooled and washed by the cutting water sprayed through the plurality of slits.

On the other hand, in the front lower portion of the second base portion 50, a front side that covers the cutting blade 34 is attached, and a nozzle group 56 that cuts water is ejected toward the cutting blade 34 on the rear side.

3(A) is a side view schematically showing the structure of the second base portion 50 and the nozzle group 56 of the blade cover device 38, and FIG. 3(B) is a rear view schematically showing the structure of the second base portion 50 and the nozzle group 56. . 4 is a rear view schematically showing the structure of the nozzle group 56.

As shown in FIG. 2 to FIG. 4, the nozzle group 56 is formed with a notch portion (rotation restricting portion) formed by cutting the rear upper portion corresponding to the guide portion (rotation restricting portion) 50a located at the front lower portion of the second base portion 50. ) 56a. The nozzle group 56 is attached to the second base portion 50 in a state in which the cutout portion 56a is engaged with the guide portion 50a.

Formed at the lower portion of the nozzle group 56 (the surface on the side of the cutting blade 34) There is a circular cutting water discharge port 56b that opens toward the cutting blade 34. This cutting water discharge port 56b is connected to the connecting portion 58 disposed on the upper surface of the nozzle group 56 through the supply passage 56c formed inside the nozzle group 56, and can spray the cutting water toward the outer peripheral end surface of the cutting blade 34.

Further, a pair of rectangular auxiliary cutting water discharge ports 56d that sandwich the cutting water discharge port 56b in the Y-axis direction are formed in the lower rear portion of the nozzle group 56. The auxiliary cutting water discharge port 56d is connected to the coupling portion 60 disposed on the upper surface of the nozzle group 56 through the supply passage 56e formed inside the nozzle group 56, and ejects the cutting water toward both side faces of the cutting blade 34.

As described above, since the cutting blade 34 rotates in the rotational direction R, the cutting water supplied from the nozzle group 56 to the cutting blade 34 also rotates together with the cutting blade 34 in the rotational direction R, and mainly faces the rear nozzle 52 and the first 1 base 48 is scattered. In other words, the nozzle group 56 is disposed on the opposite side (front) of the side (rear) where the cutting water mainly scatters due to the rotation of the cutter 34.

The nozzle group 56 configured as described above is attached to the second base portion 50 through a position adjusting mechanism (position adjusting means) 62 that allows the nozzle group 56 to move in the Z-axis direction. The position adjustment mechanism 62 includes a through hole 50b penetrating the second base portion 50 in the vertical direction, and a screw hole 56f formed at a position corresponding to the through hole 50b in the notch portion 56a of the nozzle group 56. A predetermined thread groove is formed in the inner circumferential surface of the screw hole 56f.

An adjustment screw 64 is provided in the through hole 50b, and the adjustment screw 64 is provided with a thread corresponding to the screw groove of the screw hole 56f. The entire length of the adjusting screw 64 is formed longer than the entire length of the through hole 50b. So when it will adjust When the screw 64 is inserted into the through hole 50b and the head portion 64a of the adjusting screw 64 is engaged with the enlarged diameter portion 50c formed at the upper end of the through hole 50b, the lower end portion of the adjusting screw 64 protrudes downward from the lower end of the through hole 50b.

The lower end portion of the adjusting screw 64 projecting downward from the through hole 50b is a screw hole 56f screwed to the nozzle group 56. Since the hexagonal socket is formed on the head portion 64a of the adjusting screw 64, the locking amount of the adjusting screw 64 can be adjusted by arbitrarily rotating with a tool such as a hexagonal wrench. In addition, the screw hole 56f is formed deep enough, and the lower end of the adjusting screw 64 does not interfere with the bottom of the screw hole 56f in a state where the locking amount of the adjusting screw 64 is maximized.

The upper surface of the second base portion 50 is fixed at a position corresponding to the through hole 50b with a separation preventing plate 66 that prevents the adjusting screw 64 from falling upward. This detachment prevention plate 66 is fixed to the second base portion 50 by two sets of fixing screws 68 and 70.

In the detachment preventing plate 66, an opening 66a which is smaller than the head portion 64a of the adjusting screw 64 and larger than the hex socket of the head portion 64a is formed at a position corresponding to the through hole 50b. Therefore, by inserting a tool such as a hex wrench from the opening 66a, the adjustment screw 64 can be rotated while preventing the upper side from falling off.

In the blade cover device 38 configured as described above, by adjusting the locking screw 64 constituting the position adjusting mechanism 62 to change the locking amount of the adjusting screw 64 with respect to the screw hole 56f, the nozzle group 56 can be adjusted in the Z-axis direction. The location on the top.

When, for example, the locking screw 64 is locked with respect to the screw hole 56f When increased, the nozzle group 56 rises relative to the second base portion 50 (near the second base portion 50). Conversely, when the amount of locking of the adjusting screw 64 with respect to the screw hole 56f is reduced, the nozzle group 56 is lowered (away from the second base portion 50) with respect to the second base portion 50.

Here, since the nozzle group 56 is attached to the second base portion 50 in a state in which the notch portion 56a is engaged with the guide portion 50a, even if the adjustment screw 64 is rotated, the nozzle group 56 does not have to be opposed to the second portion. The case where the base 50 is rotated.

In this manner, the guide portion 50a of the second base portion 50 and the notch portion 56a of the nozzle group 56 can function as a rotation restricting portion that restricts the nozzle group 56 from rotating the adjustment screw 64 as a rotation axis with respect to the second base portion 50.

As described above, the blade cover device 38 of the present embodiment includes the cutting water discharge port 56b that supplies the cutting water to the outer circumferential end surface of the cutting blade 34, and the auxiliary cutting water discharge port that discharges the cutting water to both side surfaces of the cutting water 34. Since the 56d is formed as an integral nozzle group 56, there is no case where a tubular nozzle is provided in addition to the cover member, and the nozzle is dropped, deformed, displaced, etc. due to contact with the scattered end material or the like. The situation of bad conditions. As described above, according to the present embodiment, it is possible to provide the blade cover device 38 capable of preventing the occurrence of a problem caused by the contact of the end material or the like due to scattering.

Further, in the blade cover device 38 of the present embodiment, by rotating the adjusting screw 64, the positions of the cutting water discharge port 56b and the pair of auxiliary cutting water discharge ports 56d in the Z-axis direction can be simultaneously adjusted. Therefore, the adjustment of the nozzle can be made easy, and the time required for the adjustment of the nozzle can be shortened.

Further, the present invention is not limited to the description of the above embodiments, and can be implemented in various modifications. For example, in the above-described embodiment, the blade cover device 38 is applied to the cutting device 2 such as a rectangular package substrate. However, the blade cover of the present invention can be applied to a cutting device such as a semiconductor wafer. Device.

Further, the shape of the guide portion 50a and the cutout portion 56a that function as the rotation restricting portion may be changed. For example, as long as the contact surface between the guide portion 50a and the notch portion 56a can be perpendicular to the extending direction of the adjusting screw 64, the guiding portion 50a and the notch portion 56a can function as the rotation restricting portion.

Other configurations, methods, and the like of the above-described embodiments can be appropriately modified without departing from the scope of the invention.

34‧‧‧Cutter

68, 70‧‧‧ fixing screws

36‧‧‧Shaft housing

52‧‧‧Nozzles

38‧‧‧Blade cover device

54, 58, 60‧‧‧ Linkage

40‧‧‧Fixed nuts

56‧‧‧Nozzle set

42‧‧‧Support abutment

56a‧‧‧cutting section

44‧‧‧ cutting edge

56b‧‧‧ cutting water spout

46‧‧‧ base

56d‧‧‧Auxiliary cutting water spout

48‧‧‧1st base

62‧‧‧Location adjustment mechanism

50‧‧‧2nd base

64a‧‧‧ head

50a‧‧‧Guide

66‧‧‧Preventing the board

66a‧‧‧ openings

R‧‧‧Rotation direction

Claims (3)

A blade cover device is a blade cover device disposed at a front end of a rotating shaft housing that supports a rotating shaft, and covers a cutting blade mounted on the rotating shaft, and is characterized in that: a nozzle group is disposed to be supplied to The cutting water of the cutting blade is opposite to the side on which the cutting water is scattered by the rotation of the cutting blade, and faces the outer peripheral end surface of the cutting blade to eject cutting water; the nozzle group is provided with the outer peripheral end surface of the cutting blade. The cutting water discharge port of the cutting water and a pair of the cutting water discharge ports are disposed, and the auxiliary cutting water discharge port of the cutting water is sprayed on both sides of the cutting blade. The blade cover device of claim 1, further comprising a base fixed to a front end of the rotating shaft housing, and movably mounting the nozzle group at the base, and configured to allow the nozzle group to be perpendicular to the base The position adjustment means of the movement. The blade cover device of claim 2, wherein the position adjusting means has a through hole, an adjusting screw, and a rotation restricting portion that penetrates the base portion in a vertical direction, the adjusting screw is inserted into the through hole and the head is engaged The rotation end restricting the rotation of the nozzle group relative to the base portion by the adjustment screw as a rotation axis, and rotating the adjustment screw by the upper end of the through hole, and screwing the lower end to the screw hole of the nozzle group The nozzle set can be moved in a vertical direction relative to the base.