JP2015145046A - blade cover device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a blade cover device which prevents the occurence of failure which results from contact with a scattering end material etc.SOLUTION: A blade cover device (38) is disposed at a spindle housing (36) and covers a cutting blade (34) attached to a spindle. The blade cover device includes a nozzle block (56) which is disposed at the opposite side of a scattering direction of cutting water and jets the cutting water to an outer peripheral end surface of the cutting blade. The nozzle block includes: a cutting water jet port (56b) which supplies the cutting water to the outer peripheral end surface of the cutting blade; and a pair of auxiliary cutting water jet ports (56d) which are disposed sandwiching the cutting water jet port and jet the cutting water to both side surfaces of the cutting blade.

Description

  The present invention relates to a blade cover device that covers an annular cutting blade mounted on a cutting device.

  A workpiece such as a semiconductor wafer having a device such as an IC formed on the surface or a package substrate in which a plurality of device chips are resin-sealed is, for example, a cutting device (dicing device) provided with a rotating annular cutting blade. It is cut and divided into a plurality of chips. A blade cover device that covers a cutting blade of the cutting device is usually provided with a nozzle that supplies cutting water for cooling and cleaning the workpiece and the cutting blade.

  By the way, when the above-described package substrate is divided, for example, it is efficient to suck and hold only the region corresponding to the divided chip with a chuck table and remove unnecessary end materials and the like simultaneously with cutting.

  Therefore, a blade having a pipe-like nozzle that supplies cutting water from the front (or the rear) of the cutting blade in order to promote scattering of the end material generated by cutting and to prevent contact between the scattered end material and the cutting blade. A cover device has been proposed (see, for example, Patent Document 1).

JP 2009-285769 A

  However, when the scattered end material or the like comes into contact with the nozzle of the blade cover device described above, the impact of the contact causes problems such as dropping, deformation, or misalignment of the nozzle. The present invention has been made in view of such problems, and an object of the present invention is to provide a blade cover device capable of preventing the occurrence of problems associated with contact with scattered end materials and the like.

  According to the present invention, there is provided a blade cover device that is disposed at the tip of a spindle housing that rotatably supports a spindle and covers a cutting blade mounted on the spindle, and the cutting water supplied to the cutting blade is A nozzle block is provided on the side opposite to the side scattered by the rotation of the cutting blade and jets cutting water so as to face the outer peripheral end surface of the cutting blade, and the nozzle block is disposed on the outer peripheral end surface of the cutting blade. A cutting water spout for supplying cutting water and a pair of auxiliary cutting water spouts disposed on both sides of the cutting blade for injecting the cutting water are provided. A blade cover device is provided.

  In the present invention, it further includes a base portion fixed to the tip of the spindle housing, and the nozzle block is movably attached to the base portion, and the nozzle block moves in the vertical direction with respect to the base portion. It is preferable that a position adjusting means for allowing the above is provided.

  In the present invention, the position adjusting means includes a through-hole penetrating the base portion in the vertical direction, and is inserted into the through-hole, the head is engaged with the upper end of the through-hole, and the lower end is the nozzle block. An adjustment screw that is screwed into the screw hole, and a rotation restricting portion that restricts the nozzle block from rotating about the adjustment screw with respect to the base portion, and rotating the adjustment screw. The nozzle block is preferably moved in the vertical direction with respect to the base portion.

  The blade cover device of the present invention is a nozzle block in which a cutting water jet for supplying cutting water to the outer peripheral end surface of the cutting blade and an auxiliary cutting water jet for injecting cutting water on both side surfaces of the cutting blade are integrally formed. Thus, unlike the case where a pipe-shaped nozzle is provided separately from the cover member, there is no problem such as dropping, deformation, or misalignment of the nozzle due to contact with the scattered end material. Thus, according to the present invention, it is possible to provide a blade cover device that can prevent the occurrence of problems associated with contact with scattered end materials and the like.

It is a perspective view showing typically an example of composition of a cutting device provided with a blade cover device concerning this embodiment. It is a perspective view which shows typically the peripheral structure of a blade cover apparatus. 3A is a side view schematically showing the structure of the second base portion and the nozzle block of the blade cover device, and FIG. 3B is a schematic view of the structure of the second base portion and the nozzle block. FIG. It is a rear view which shows the structure of a nozzle block typically.

  Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing a configuration example of a cutting device provided with a blade cover device according to the present embodiment. As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each component.

  A rectangular opening 4 a that is long in the front-rear direction (X-axis direction, machining feed direction) is formed on the upper surface of the base 4. In the opening 4a, an X-axis moving table 6, an X-axis moving mechanism (not shown) for moving the X-axis moving table 6 in the X-axis direction, and a waterproof cover 8 that covers the X-axis moving mechanism are provided.

  The X-axis movement mechanism includes a pair of X-axis guide rails (not shown) parallel to the X-axis direction, and an X-axis movement table 6 is slidably installed on the X-axis guide rails. A nut portion (not shown) is fixed to the lower surface side of the X-axis moving table 6, and an X-axis ball screw (not shown) parallel to the X-axis guide rail is screwed to the nut portion.

  An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw. By rotating the X-axis ball screw with the X-axis pulse motor, the X-axis moving table 6 moves in the X-axis direction along the X-axis guide rail.

  On the X-axis moving table 6, a chuck table 10 for sucking and holding the workpiece 11 is provided. The workpiece 11 is, for example, a rectangular package substrate in which a plurality of device chips are sealed with resin, and the lower surface side is sucked and held by the chuck table 10.

  The chuck table 10 is connected to a rotation mechanism (not shown) such as a motor, and rotates around a rotation axis extending in the vertical direction (Z-axis direction). Further, the chuck table 10 is moved in the X-axis direction by the above-described X-axis moving mechanism.

  A rectangular upper surface of the chuck table 10 serves as a holding surface 10 a for sucking and holding the workpiece 11. The holding surface 10 a is connected to a suction source (not shown) through a flow path (not shown) formed inside the chuck table 10.

  On the upper surface of the base 4, a gate-type support structure 14 that supports the cutting unit 12 is disposed so as to straddle the opening 4 a. A cutting unit moving mechanism 16 that moves the cutting unit 12 in the Y-axis direction (index feed direction) and the Z-axis direction is provided on the upper front surface of the support structure 14.

  The cutting unit moving mechanism 16 includes a pair of Y-axis guide rails 18 arranged on the front surface of the support structure 14 and parallel to the Y-axis direction. A Y-axis moving table 20 constituting the cutting unit moving mechanism 16 is slidably installed on the Y-axis guide rail 18.

  A nut portion (not shown) is fixed to the rear surface side (rear surface side) of the Y-axis moving table 20, and a Y-axis ball screw 22 parallel to the Y-axis guide rail 18 is screwed to the nut portion. Yes. A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 22. If the Y-axis ball screw 22 is rotated by the Y-axis pulse motor, the Y-axis moving table 20 moves in the Y-axis direction along the Y-axis guide rail 18.

  A pair of Z-axis guide rails 24 parallel to the Z-axis direction are provided on the front surface (front surface) of the Y-axis moving table 20. A Z-axis moving table 26 is slidably installed on the Z-axis guide rail 24.

  A nut portion (not shown) is fixed to the rear surface side (rear surface side) of the Z-axis moving table 26, and a Z-axis ball screw 28 parallel to the Z-axis guide rail 24 is screwed to the nut portion. Yes. A Z-axis pulse motor 30 is connected to one end of the Z-axis ball screw 28. When the Z-axis ball screw 28 is rotated by the Z-axis pulse motor 30, the Z-axis moving table 26 moves in the Z-axis direction along the Z-axis guide rail 24.

  A cutting unit 12 for cutting the workpiece 11 is provided below the Z-axis moving table 26. A camera 32 that captures an image of the processed surface of the workpiece 11 is installed at a position adjacent to the cutting unit 12. By moving the Y-axis moving table 20 and the Z-axis moving table 26 as described above, the cutting unit 12 and the camera 32 move in the Y-axis direction and the Z-axis direction.

  The cutting unit 12 includes an annular cutting blade 34 attached to one end of a spindle (not shown) that rotates about the Y axis. A motor (not shown) is connected to the other end of the spindle, and rotates the cutting blade 34 attached to the spindle. The spindle and motor are accommodated in a spindle housing 36 fixed to the lower part of the Z-axis moving table 26.

  A blade cover device 38 that covers the cutting blade 34 is provided on one end (tip) side of the spindle housing 36. FIG. 2 is a perspective view schematically showing the peripheral structure of the blade cover device 38.

  As shown in FIG. 2, the cutting blade 34 is mounted so as to be sandwiched between a flange (not shown) attached to the tip portion of the spindle and the fixing nut 40, and moves the lower end portion from the front to the rear. Rotate to let That is, the rotation direction of the cutting blade 34 is the rotation direction R shown in FIG. However, the cutting direction of the workpiece 11 may be any of the front and rear directions.

  The cutting blade 34 is a so-called hub blade, and a ring-shaped cutting blade 44 for cutting the workpiece 11 is fixed to an outer peripheral portion of a disk-shaped support base 42. In addition, as the cutting blade 34, you may use the washer blade comprised only with the cutting blade.

  The blade cover device 38 that covers the cutting blade 34 includes a base portion 46 that is fixed to one end side of the spindle housing 36. The base portion 46 includes a first base portion 48 positioned on the rear side of the cutting blade 34 and a second base portion 50 positioned on the front side of the cutting blade 34. Covering.

  A pair of substantially L-shaped nozzles 52 that cover the rear side of the cutting blade 34 and sandwich the lower portion of the cutting blade 34 are attached to the lower rear portion of the first base portion 48. Cutting water (pure water or the like) is supplied to each nozzle 52 through a connecting portion 54 provided at the upper end (base end).

  A plurality of slits (not shown) facing the side surface of the cutting blade 34 are formed on the tip side of the nozzle 52. The cutting blade 34 is cooled and cleaned by the cutting water ejected through the plurality of slits.

  On the other hand, a nozzle block 56 that covers the front side of the cutting blade 34 and ejects cutting water toward the rear cutting blade 34 is attached to the lower front portion of the second base portion 50.

  FIG. 3A is a side view schematically showing the structure of the second base portion 50 and the nozzle block 56 of the blade cover device 38, and FIG. 3B is a side view of the second base portion 50 and the nozzle block 56. It is a rear view which shows a structure typically. FIG. 4 is a rear view schematically showing the structure of the nozzle block 56.

  As shown in FIGS. 2 to 4, the nozzle block 56 has a notch (rotation restriction) in which a rear upper part is cut out in accordance with a guide part (rotation restriction part) 50 a located at the front lower part of the second base part 50. Part) 56a is formed. The nozzle block 56 is attached to the second base portion 50 in a state where the notch portion 56a is engaged with the guide portion 50a.

  A circular cutting water ejection port 56 b opened toward the cutting blade 34 is formed at the lower portion of the rear surface of the nozzle block 56 (the surface on the cutting blade 34 side). The cutting water ejection port 56 b is connected to a connecting portion 58 disposed on the upper surface of the nozzle block 56 via a supply path 56 c formed inside the nozzle block 56, and the cutting water is supplied to the outer peripheral end surface of the cutting blade 34. Inject toward

  A pair of rectangular auxiliary cutting water jets 56d sandwiching the cutting water jets 56b in the Y-axis direction are formed in the lower portion of the rear surface of the nozzle block 56. The auxiliary cutting water jet 56 d is connected to a connecting portion 60 disposed on the upper surface of the nozzle block 56 via a supply path 56 e formed inside the nozzle block 56, and the cutting water is supplied to both sides of the cutting blade 34. Spray toward the surface.

  As described above, since the cutting blade 34 rotates in the rotation direction R, the cutting water supplied from the nozzle block 56 to the cutting blade 34 also rotates in the rotation direction R together with the cutting blade 34. It scatters toward the first base portion 48. That is, the nozzle block 56 is disposed on the opposite side (front side) to the side (rear side) where cutting water mainly scatters due to the rotation of the cutting blade 34.

  The nozzle block 56 configured in this manner is attached to the second base portion 50 via a position adjusting mechanism (position adjusting means) 62 that moves the nozzle block 56 in the Z-axis direction. The position adjusting mechanism 62 includes a through hole 50b that penetrates the second base portion 50 in the vertical direction, and a screw hole 56f that is formed at a position corresponding to the through hole 50b in the cutout portion 56a of the nozzle block 56. . A predetermined screw groove is formed on the inner peripheral surface of the screw hole 56f.

  An adjustment screw 64 having a thread corresponding to the screw groove of the screw hole 56f is inserted into the through hole 50b. The total length of the adjustment screw 64 is longer than the total length of the through hole 50b. Therefore, when the adjustment screw 64 is inserted into the through hole 50b and the head portion 64a of the adjustment screw 64 is engaged with the enlarged diameter portion 50c formed at the upper end of the through hole 50b, the lower end portion of the adjustment screw 64 becomes the through hole 50b. Projects downward from the lower end of.

  The lower end portion of the adjustment screw 64 protruding downward from the through hole 50 b is screwed into the screw hole 56 f of the nozzle block 56. Since the hexagonal hole is formed in the head portion 64a of the adjustment screw 64, the tightening amount of the adjustment screw 64 can be adjusted by arbitrarily rotating it with a tool such as a hexagon wrench. The screw hole 56f is formed so deep that the lower end of the adjustment screw 64 and the bottom of the screw hole 56f do not interfere with each other when the tightening amount of the adjustment screw 64 is maximized.

  On the upper surface of the second base portion 50, a retaining plate 66 that prevents the adjustment screw 64 from coming off upward is fixed at a position corresponding to the through hole 50b. The retaining plate 66 is fixed to the second base portion 50 with two fixing screws 68 and 70.

  An opening 66a that is smaller than the head 64a of the adjustment screw 64 and larger than the hexagonal hole of the head 64a is formed at a position corresponding to the through hole 50b in the retaining plate 66. Therefore, by inserting a tool such as a hexagon wrench from the opening 66a, the adjustment screw 64 can be rotated while preventing upward removal.

  In the blade cover device 38 configured as described above, the adjustment screw 64 that constitutes the position adjustment mechanism 62 is rotated to change the tightening amount of the adjustment screw 64 with respect to the screw hole 56f. The position in the direction can be adjusted.

  For example, if the tightening amount of the adjusting screw 64 with respect to the screw hole 56f is increased, the nozzle block 56 moves up with respect to the second base portion 50 (approaches the second base portion 50). On the contrary, if the tightening amount of the adjusting screw 64 with respect to the screw hole 56f is reduced, the nozzle block 56 is lowered with respect to the second base portion 50 (away from the second base portion 50).

  Here, since the nozzle block 56 is attached to the second base portion 50 with the notch portion 56a engaged with the guide portion 50a, the nozzle block 56 remains in the first position even if the adjustment screw 64 is rotated. 2 There is no rotation with respect to the base portion 50.

  As described above, the guide portion 50a of the second base portion 50 and the cutout portion 56a of the nozzle block 56 restrict the nozzle block 56 from rotating with respect to the second base portion 50 about the adjustment screw 64 as a rotation axis. It functions as a rotation restricting part.

  As described above, the blade cover device 38 according to the present embodiment includes the cutting water jet 56 b that supplies cutting water to the outer peripheral end surface of the cutting blade 34, and the auxiliary cutting that injects cutting water to both side surfaces of the cutting blade 34. Since the nozzle block 56 integrally formed with the water jet 56d is provided, the nozzle falls, deforms, and the like by contact with the scattered end material, etc., as in the case where a pipe-shaped nozzle is provided separately from the cover member. There will be no problems such as misalignment. Thus, according to the present embodiment, it is possible to provide the blade cover device 38 that can prevent the occurrence of problems associated with contact with scattered end materials and the like.

  Further, in the blade cover device 38 according to the present embodiment, the position of the cutting water jet 56b and the pair of auxiliary cutting water jets 56d in the Z-axis direction can be adjusted at a time by rotating the adjustment screw 64. The adjustment of the nozzle becomes easy and the time required for the adjustment of the nozzle can be shortened.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above embodiment, the blade cover device 38 is applied to the cutting device 2 for cutting a rectangular package substrate or the like, but the blade cover device of the present invention is applied to a general cutting device for cutting a semiconductor wafer or the like. May be applied.

  Moreover, the shape of the guide part 50a and the notch part 56a which function as a rotation control part can also be changed. For example, if the contact surface between the guide portion 50a and the cutout portion 56a is formed perpendicular to the direction in which the adjustment screw 64 extends, the guide portion 50a and the cutout portion 56a can function as a rotation restricting portion. .

  In addition, the configurations, methods, and the like according to the above-described embodiments can be changed as appropriate without departing from the scope of the object of the present invention.

2 Cutting device 4 Base 4a Opening 6 X axis moving table 8 Waterproof cover 10 Chuck table 10a Holding surface 12 Cutting unit 14 Support structure 16 Cutting unit moving mechanism 18 Y axis guide rail 20 Y axis moving table 22 Y axis ball screw 24 Z axis Guide rail 26 Z-axis moving table 28 Z-axis ball screw 30 Z-axis pulse motor 32 Camera 34 Cutting blade 36 Spindle housing 38 Blade cover device 40 Fixing nut 42 Support base 44 Cutting blade 46 Base part 48 First base part 50 Second base 50a Guide part (rotation restricting part)
50b Through hole 50c Expanded diameter portion 52 Nozzle 54 Connection portion 56 Nozzle block 56a Notch portion (rotation restricting portion)
56b Cutting water spout 56c Supply path 56d Auxiliary cutting water spout 56e Supply path 56f Screw hole 58 Connection part 60 Connection part 62 Position adjustment mechanism (position adjustment means)
64 Adjustment screw 64a Head 66 Retaining plate 66a Opening 68 Fixing screw 70 Fixing screw 11 Workpiece R Rotating direction

Claims (3)

A blade cover device that is disposed at a tip of a spindle housing that rotatably supports the spindle and covers a cutting blade mounted on the spindle,
A nozzle block which is disposed on the side opposite to the side where the cutting water supplied to the cutting blade is scattered by the rotation of the cutting blade and which jets the cutting water facing the outer peripheral end surface of the cutting blade;
The nozzle block is
A cutting water outlet for supplying the cutting water to the outer peripheral end surface of the cutting blade;
A blade cover device provided with a pair of auxiliary cutting water jets disposed on both sides of the cutting blade and jetting the cutting water on both side surfaces of the cutting blade. A base portion fixed to the tip of the spindle housing;
The nozzle block is movably attached to the base portion,
2. The blade cover device according to claim 1, further comprising a position adjusting means for allowing the nozzle block to move in a vertical direction with respect to the base portion. The position adjusting means includes
A through hole penetrating the base portion in the vertical direction;
An adjustment screw that is inserted into the through hole, the head engages with the upper end of the through hole, and the lower end engages with the screw hole of the nozzle block;
A rotation restricting portion for restricting the nozzle block from rotating about the adjusting screw as a rotation axis with respect to the base portion;
The blade cover device according to claim 2, wherein the nozzle block moves in a vertical direction with respect to the base portion by rotating the adjusting screw.

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