JP6700800B2 - Blade cover - Google Patents

Description

  The present invention relates to a blade cover.

  A workpiece such as a semiconductor wafer having a device such as an IC formed on its surface or a package substrate in which a plurality of device chips are resin-sealed is, for example, a cutting device (dicing device) including a rotating annular cutting blade. It is cut and divided into multiple chips. The blade cover that covers the cutting blade of this cutting device has a nozzle that supplies cutting water for cooling and cleaning the workpiece and the cutting blade.

  By the way, when the package substrate is divided, for example, it is effective to suction and hold only a region corresponding to the divided chips with a chuck table and remove unnecessary scraps and the like simultaneously with cutting. Therefore, there is known a blade cover provided with a nozzle that supplies cutting water in order to prevent contact of scraps and the like generated and caused by cutting (see, for example, Patent Document 1).

JP, 2015-145046, A

  In the technique described in Patent Document 1, cutting water is jetted from the cutting water jet port and the auxiliary cutting water jet port to the outer peripheral end surface of the cutting blade, so a large amount of cutting water is required.

  The present invention has been made in view of the above, and an object thereof is to provide a blade cover capable of removing a scrap material and the like with a small amount of cutting water.

In order to solve the above-mentioned problems and to achieve the object, a blade cover of the present invention is provided at a tip of a spindle housing that rotatably supports a spindle, and a cutting blade mounted on the spindle via a flange. A blade cover for covering, wherein the cutting water supplied to the cutting blade is rotated by the rotation of the cutting blade to the side opposite to the side where the cutting water mainly scatters from the contact portion between the cutting blade and the workpiece. The nozzle block is provided with a nozzle block that faces both side surfaces of the cutting blade and jets cutting water, and the nozzle block has a gap along the shape of the flange on which the cutting blade is mounted and both side surfaces of the cutting blade. An inner wall formed with, a plurality of cutting water injection ports formed on the inner wall for injecting cutting water toward both side surfaces of the flange, and communicating with the inner wall radially outside the cutting blade. An annular groove formed along the outer peripheral shape of the cutting blade, and air is jetted toward both side surfaces of the cutting blade formed at the end of the cutting blade in the rotation direction downstream side in communication with the groove. When the cutting water is supplied from the cutting water injection port, the cutting water fills the gap and the groove with the inner wall as the cutting blade rotates, The cutting water is jetted from the groove at high speed by the centrifugal force due to the rotation, and the two fluids are jetted by being mixed with the high pressure air jetted from the high pressure air jet port.

  According to the blade cover of the present invention, it is possible to remove the scraps and the like with a small amount of cutting water.

FIG. 1 is a perspective view showing a cutting device including a blade cover according to an embodiment. FIG. 2 is a perspective view showing the blade cover according to the embodiment. FIG. 3 is a front view showing the blade cover according to the embodiment. FIG. 4 is a side view showing the blade cover according to the embodiment. FIG. 5 is a perspective view showing the blade cover according to the embodiment. FIG. 6 is a front view showing the inner wall of the blade cover according to the embodiment. FIG. 7 is a partially enlarged front view showing the inner wall of the blade cover according to the embodiment. FIG. 8 is a partially enlarged cross-sectional view showing the blade cover according to the embodiment. FIG. 9 is a partially enlarged view showing another example of the high pressure air injection port of the blade cover according to the embodiment.

  Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the embodiments below. Further, the constituent elements described below include those that can be easily conceived by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

  FIG. 1 is a perspective view showing a cutting device including a blade cover according to an embodiment. FIG. 2 is a perspective view showing the blade cover according to the embodiment. FIG. 3 is a front view showing the blade cover according to the embodiment. FIG. 4 is a side view showing the blade cover according to the embodiment. FIG. 5 is a perspective view showing the blade cover according to the embodiment. FIG. 6 is a front view showing the inner wall of the blade cover according to the embodiment. FIG. 7 is a partially enlarged front view showing the inner wall of the blade cover according to the embodiment. FIG. 8 is a partially enlarged cross-sectional view showing the blade cover according to the embodiment. FIG. 9 is a partially enlarged view showing another example of the high pressure air injection port of the blade cover according to the embodiment.

  The workpiece W is a plate-shaped processing target that is processed by the cutting device 1. In the present embodiment, the workpiece W is a rectangular package substrate. The workpiece W has a plurality of devices D partitioned by a plurality of planned dividing lines L.

  A cutting device 1 including a blade cover according to this embodiment will be described with reference to FIG. 1. The cutting device 1 cuts the workpiece W by relatively moving the cutting means 20 having the cutting blade 22 and the holding unit 10 holding the workpiece W. The cutting device 1 includes a holding unit 10 that suction-holds a workpiece W on a surface 11a, a cutting unit 20, an X-axis moving unit 30 that moves the holding unit 10 in the X-axis direction, and a cutting unit 20 in the X-axis direction. Y-axis moving means 40 for moving in the Y-axis direction orthogonal to, Z-axis moving means 50 for moving the cutting means 20 in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction, input means 100, and control means. 90 and. The cutting device 1 is provided with a gate-shaped pillar portion 3 on the device body 2.

  As shown in FIG. 1, the holding unit 10 is configured to include a holding table 11 having a surface 11a and a rotary table 19. The holding table 11 places the workpiece W on the front surface 11a and sucks the workpiece W through a suction hole (not shown) provided in the front surface 11a, so that the workpiece W is suction-held by negative pressure. The suction holes are provided in one-to-one correspondence with the device D of the workpiece W. On the surface 11a of the holding table 11, there are formed relief grooves (not shown) for the cutting blades 22 of the cutting means 20 corresponding to the respective planned dividing lines L. The cutting blade 22 is inserted into the clearance groove when the workpiece W is divided into the devices D. The rotary table 19 can rotate the holding table 11 around an axis (not shown) parallel to the Z-axis direction orthogonal to the surface 11a. Further, the holding unit 10 is provided so as to be movable in the X-axis direction by the X-axis moving unit 30. The operation of the holding unit 10 is controlled by the control unit 90.

  The cutting means 20 cuts the workpiece W held by the holder 10 with a cutting blade 22. The cutting means 20 is provided on the column portion 3 via the Y-axis moving means 40, the Z-axis moving means 50, and the like. The cutting means 20 is provided movably in the Y-axis direction by the Y-axis moving means 40 and movably in the Z-axis direction by the Z-axis moving means 50. The operation of the cutting means 20 is controlled by the control means 90.

  The cutting means 20 has a spindle 21 whose central axis coincides with the Y-axis direction (corresponding to the indexing direction), and a cutting blade 22 attached to the tip of the spindle 21. The spindle 21 is rotatably supported by a spindle housing (not shown) and is connected to a blade drive source (not shown) housed in the spindle housing. The blade drive source rotates the spindle 21 around the central axis by the electric power supplied from a power source (not shown).

  The cutting blade 22 shown in FIG. 2 is an extremely thin cutting grindstone having a substantially ring shape, and is detachably mounted on the spindle 21. The cutting blade 22 is rotationally driven by the rotational force generated by the blade drive source. In the present embodiment, the rotation direction of the cutting blade 22 is the rotation direction R shown in FIG. In the present embodiment, the cutting blade 22 has a ring-shaped cutting blade 222 for cutting the workpiece W fixed to the outer peripheral portion of the disk-shaped flange 221. The cutting blade 22 uses, for example, electroforming and electrodeposition bonding as a bonding agent, and abrasive grains such as diamond are fixed. The cutting blade 22 may use a washer blade composed of only a cutting blade.

  Returning to FIG. 1, the X-axis moving means 30 moves the holding unit 10 relative to the spindle 21 in a direction perpendicular to the central axis direction of the spindle 21 and parallel to the surface 11a of the holding unit 10. To move.

  The input means 100 is connected to the control means 90 and is arranged on the display means 101 for displaying the state of the machining operation. The display means 101 is composed of, for example, a display panel such as a liquid crystal display or an organic EL display. The display unit 101 displays information such as characters, figures, images, etc. according to the signal input from the control unit 90. The input unit 100 is operated by an operator by a key, and is composed of a touch panel or the like provided on the entire display surface of the display unit 101. The input unit 100 inputs a signal according to the received operation to the control unit 90.

  The control unit 90 controls each of the above-described components that make up the cutting device 1. The control unit 90 causes the cutting device 1 to perform a machining operation, that is, a cutting operation on the workpiece W. The control unit 90 is mainly composed of a microprocessor (not shown) including an arithmetic processing unit including a CPU and the like, ROM, RAM and the like. The control unit 90 is connected to the display unit 101, the input unit 100 used by the operator to register the processing content information, and the like.

  The blade cover 60 shown in FIGS. 2 to 4 supplies the cutting water F1 to the cutting blade 22. The blade cover 60 is arranged at the tip of a spindle housing that rotatably supports the spindle 21 of the cutting means 20, and covers the cutting blade 22 mounted on the spindle 21 via a flange 23. The blade cover 60 is fixed to the front end of the spindle housing of the cutting means 20 and covers the outer circumference of the cutting blade 22. The blade cover 60 has a support portion 61 fixed to the front end portion of the spindle housing, and a nozzle block 62 fixed to the support portion 61.

  The support portion 61 is fixed to the front end portion of the spindle housing of the cutting means 20. The support portion 61 has a plate-shaped base portion 611 along the front end portion of the spindle housing of the cutting means 20, and a cover portion 612 that covers a part of the outer periphery of the cutting blade 22. The base portion 611 has a through hole 613 and a through hole (not shown) formed in the front end portion of the spindle housing of the cutting means 20 and having an internal thread formed on the inner periphery thereof. It is fixed to the spindle housing. The cover part 612 projects from the base part 611 in the Y-axis direction. The cover portion 612 is arranged in a direction in which cutting water is scattered by the rotation of the cutting blade 22. The cover portion 612 is arranged so as to cover a portion of the outer periphery of the cutting blade 22 that is not covered by the nozzle block 62.

  The nozzle block 62 faces the both side surfaces of the cutting blade 22 of the cutting means 20 and sprays the cutting water F1. The nozzle block 62 covers a part of the outer circumference of the cutting blade 22 and jets the cutting water F1 and the high pressure air F2 to the cutting edge 222a of the cutting blade 222 of the cutting blade 22. The nozzle block 62 is fixed to the spindle housing via the support portion 61. The nozzle block 62 is arranged on the side opposite to the side on which cutting water is mainly scattered by the rotation of the cutting blade 22 in the rotation direction R. More specifically, the nozzle block 62 is opposite to the side (the left side in FIG. 3) on which the cutting water mainly scatters from the contact portion with the workpiece W by the rotation of the cutting blade 22 in the rotation direction R (FIG. 3). The right side in 3). As shown in FIG. 4, the nozzle block 62 includes a main body portion 63 having a flange 23 for mounting the cutting blade 22 and an inner wall 632 formed with a gap along the shapes of both side surfaces of the cutting blade 22, and an inner wall. A plurality of cutting water injection ports 64 that are formed in 632 and inject the cutting water F1 toward both side surfaces of the flange 221 of the cutting blade 22, and communicate with the inner wall 632 on the outer side in the radial direction of the cutting blade 22. The high-pressure air F2 is jetted toward both side surfaces of the annular groove 65 formed along the outer peripheral shape and the cutting blade 22 formed at the downstream end of the cutting blade 22 in the rotation direction in communication with the groove 65. High-pressure air jet port 66, cutting water feed port 67 to which cutting water F1 jetted from cutting water jet port 64 is supplied, and high-pressure air feed port 68 to which high-pressure air F2 jetted from high-pressure air jet port 66 is supplied. Have and.

  The body portion 63 covers a part of the outer circumference of the cutting blade 22. The main body portion 63 has a pair of wall portions 631 that are located with the flange 23 for mounting the cutting blade 22 and both side surfaces of the cutting blade 22 sandwiched therebetween. The pair of wall portions 631 are arranged to face each other so as to have a gap along the shapes of the flange 23 on which the cutting blade 22 is mounted and the both side surfaces of the cutting blade 22. The pair of wall portions 631 are assembled by inserting and fastening the male screw 69 in a state where the through holes 633 formed in the wall portion 631 are overlapped with each other. The inner wall 632 is a wall portion inside the pair of wall portions 631. During the cutting of the workpiece W, the gap between the pair of wall portions 631 and the flange 23 for mounting the cutting blade 22 and both side surfaces of the cutting blade 22 is filled with the cutting water F1. More specifically, as the cutting blade 22 rotates in the rotation direction R, the clearance between the inner wall 632, the flange 23 on which the cutting blade 22 is mounted, and both side surfaces of the cutting blade 22 is filled with the cutting water F1.

  The cutting water injection port 64 shown in FIGS. 5 to 7 is a cutting water supply unit that supplies the cutting water F1 toward the workpiece W by supplying the cutting water F1 toward the flange 221 of the cutting blade 22. is there. A plurality of cutting water injection ports 64 are formed on the inner wall 632. In the present embodiment, the three cutting water injection ports 64 are arranged on the inner wall 632 at equal distances from the central axis of the spindle 21 and at equal intervals in the circumferential direction. The cutting water injection port 64 opens toward the flange 221 of the cutting blade 22. The cutting water injection port 64 is arranged at a position facing the upper side of the flange 221 of the cutting blade 22. The cutting water injection ports 64 are arranged on both sides in the Y-axis direction with the flange 221 of the cutting blade 22 interposed therebetween. As a result, the cutting water injection port 64 supplies the cutting water F1 to both sides of the cutting blade 22. The cutting water injection port 64 is formed in a circular shape. In the present embodiment, the cutting water injection port 64 has a diameter of 1.5 to 2 mm, for example. The cutting water injection port 64 is connected to the cutting water supply port 67 via a first supply passage 641 formed in the wall 631. The cutting water injection port 64 injects the cutting water F1 supplied from the cutting water supply port 67.

  The groove 65 shown in FIGS. 7 and 8 collects the cutting water F<b>1 which has been sprayed from the cutting water spray port 64 and has reached the flange 221 of the cutting blade 22 on the radially outer side of the cutting blade 22. The groove 65 is formed on the inner wall 632 on the radially outer side of the cutting blade 22. The groove 65 forms a gap between the pair of wall portions 631 on the outer side in the radial direction of the cutting blade 22 in a state where the pair of wall portions 631 are opposed to each other. The groove 65 is formed in an arc shape along the outer peripheral shape of the cutting blade 22. More specifically, the groove 65 is formed in an arc shape having a diameter larger than that of the cutting blade 22. The groove 65 has a projecting portion 651 projecting radially outward of the cutting blade 22 in the direction of the central axis of the spindle 21. In other words, the groove 65 is deeply formed at the radially outer end of the cutting blade 22. The groove 65 is formed in such a size and shape that the cutting water F1 ejected from each cutting water ejection port 64 and contacting the flange 23 can flow into the groove 65. During the cutting of the workpiece W, the groove 65 is filled with the cutting water F1 as the cutting blade 22 rotates in the rotation direction R. The cutting water F1 filled in the groove 65 is jetted from the groove 65 at high speed by the centrifugal force generated by the rotation of the spindle 21.

  The high-pressure air injection port 66 shown in FIGS. 2 and 4 supplies the high-pressure air F2 toward the cutting edge 222a (see FIG. 2) of the cutting blade 222 of the cutting blade 22 during cutting of the workpiece W. The high pressure air injection port 66 is connected to the high pressure air supply port 68 via a second supply passage 661 formed in the wall portion 631. Further, the second supply passage 661 arranged on the upstream side of the high-pressure air injection port 66 communicates with the lower end of the groove 65. As a result, the high-pressure air jet port 66 mixes the cutting water F1 jetted at high speed from the groove 65 and the high-pressure air F2 supplied from the high-pressure air supply port 68 with a mixed fluid F3 containing two fluids. To jet. The high-pressure air injection port 66 blows the mixed fluid F3 toward the cutting edge 222a of the cutting blade 222 in parallel to both side surfaces of the cutting blade 22. The high-pressure air jet port 66 blows the mixed fluid F3 onto the cutting edge 222a of the cutting blade 222 to remove cutting chips from the cutting edge 222a. The high-pressure air jet port 66 faces the cutting edge 222a of the cutting blade 222. The high-pressure air jet port 66 is arranged below the nozzle block 62. The high-pressure air injection port 66 is formed in a rectangular shape. The width of the high-pressure air injection port 66 in the Y-axis direction is formed to be larger than the thickness of the cutting blade 22. In this embodiment, the high-pressure air injection port 66 has a width of 11 mm in the Y-axis direction and a width of 1.2 mm in the Z-axis direction, for example. In the present embodiment, the high-pressure air injection port 66 is formed in a flat shape so that the width in the Z-axis direction is smaller than the width of the high-pressure air injection port 66 in the Y-axis direction.

  Note that the high-pressure air jet ports 66 may be formed as a pair that sandwiches the cutting blade 22 in the Y-axis direction, as shown in FIG. 9. Thereby, the air can be more effectively jetted toward both side surfaces of the cutting blade 22.

  The second supply path 661 is formed in a flat shape inside the wall 631 and connects the high pressure air injection port 66 and the high pressure air supply port 68. The second supply passage 661 communicates with the lower end of the groove 65. As a result, in the second supply passage 661, the cutting fluid F1 flowing in from the groove 65 and the high-pressure air F2 supplied from the high-pressure air supply port 68 become a mixed fluid F3. The cutting water F1 jetted at high speed from the groove 65 and the high pressure air F2 supplied from the high pressure air supply port 68 are mixed to form a mixed fluid F3 containing two fluids. The mixed fluid F3 becomes faster than the cutting water F1 and the high-pressure air F2 because the cutting water F1 and the high-pressure air F2 are mixed in the flat second supply passage 661.

  The cutting water supply port 67 is arranged above the nozzle block 62. The cutting water F1 is supplied to the cutting water supply port 67 from a cutting water source (not shown). In this embodiment, the pressurized cutting water F1 of, for example, 2.5 L/min to 5 L/min, preferably 3 L/min is used.

  The high-pressure air supply port 68 is arranged below the nozzle block 62. The high pressure air supply port 68 is supplied with high pressure air F2 from an air supply source (not shown). In the present embodiment, pressurized high pressure air F2 of, for example, 0.2 MPa (gauge pressure) to 0.6 MPa (gauge pressure), preferably 0.3 MPa (gauge pressure) is used.

  Next, the processing operation of the cutting device 1 according to the present embodiment will be described.

  First, the operator registers the processing content information in the control means 90, places the workpiece W on the holding part 10 separated from the cutting means 20, and when the operator gives an instruction to start the processing operation, the cutting device 1 starts the machining operation. In the processing operation, the control unit 90 suction-holds the workpiece W placed on the holding unit 10, and moves the holding unit 10 suction-holding the workpiece W below the cutting unit 20.

  After performing the alignment, the control unit 90 relatively moves the holding unit 10 and the cutting blade 22 along the planned dividing line L while rotating the cutting blade 22 based on the processing content information, and thereby the workpiece. Cut W. During cutting, the control means 90 drives the cutting water source to supply the cutting water F1 to the cutting blade 22 from the cutting water jet port 64. Further, the control means 90 drives the air supply source during cutting to supply the high pressure air F2 to the cutting blade 22 from the high pressure air injection port 66.

  In this way, the cutting water F1 is jetted from the cutting water jet port 64 to the flange 221 of the cutting blade 22 during cutting. Then, the cutting water F1 supplied from the cutting water jet port 64 to the flange 221 of the cutting blade 22 fills the gap between the inner wall 632 and the groove 65 as the cutting blade 22 rotates in the rotation direction R. Then, the cutting water F1 is jetted from the groove 65 at high speed by the centrifugal force generated by the rotation of the spindle 21. Then, in the second supply passage 661, the cutting water F1 injected at high speed from the groove 65 and the high pressure air F2 supplied from the high pressure air supply port 68 are mixed to form a mixed fluid F3 containing two fluids, The mixed fluid F3 is jetted from the high pressure air jet port 66. Then, the mixed fluid F3 is sprayed from the high-pressure air jet port 66 onto the cutting edge 222a of the cutting blade 222 of the cutting blade 22. Then, the mixed fluid F3 is discharged to the outside of the cutting device 1 through a discharge port (not shown).

  When the control unit 90 determines that the cutting is completed, the control unit 90 separates the cutting unit 20 from the workpiece W by the Z-axis moving unit 50, and then separates the holding unit 10 from below the cutting unit 20 by the X-axis moving unit 30. Let When the holding unit 10 is separated from the lower side of the cutting unit 20, the control unit 90 releases the suction holding of the holding unit 10, and the operator removes the machined workpiece W on the holding unit 10 before cutting. The workpiece W is placed on the holding unit 10. The cutting apparatus 1 cuts the workpiece W by repeating such steps.

  As described above, according to the blade cover 60 according to the present embodiment, the cutting water F1 is jetted from the cutting water jet port 64 to the flange 221 of the cutting blade 22. Further, the cutting water F1 supplied from the cutting water injection port 64 to the flange 221 of the cutting blade 22 fills the gap with the inner wall 632 and the groove 65 as the cutting blade 22 rotates in the rotation direction R, and It is jetted at a high speed from the groove 65 by the centrifugal force generated by the rotation of 21. In the second supply passage 661, the cutting water F1 injected at high speed from the groove 65 and the high pressure air F2 supplied from the high pressure air supply port 68 are mixed to form a mixed fluid F3. The mixed fluid F3 is sprayed from the high-pressure air jet port 66 onto the cutting edge 222a of the cutting blade 222 of the cutting blade 22. Therefore, the mixed fluid F3, which has a higher speed than the cutting water F1 and the high-pressure air F2, is sprayed onto the cutting edge 222a of the cutting blade 222 of the cutting blade 22. That is, the mixed fluid F3 can remove the scraps and the like generated during cutting even with a small amount of cutting water F1. In this way, the blade cover 60 can remove the scraps and the like with a small amount of cutting water F1 without increasing the amount of cutting water.

  Since the groove 65 is formed in the blade cover 60 along the outer peripheral shape of the cutting blade 22, the cutting water F1 sprayed from the cutting water spray port 64 and contacting the flange 23 flows into the groove 65. As a result, the cutting water F1 flowing into the groove 65 can be reused together with the high-pressure air F2 supplied from the high-pressure air supply port 68 as a mixed fluid F3 that blows off scraps and the like. As described above, the blade cover 60 can obtain the water saving effect by reusing the cutting water F1.

  Moreover, since the blade cover 60 is formed in a flat shape so that the width of the high-pressure air jet port 66 in the Z-axis direction is smaller than the width of the high-pressure air jet port 66 in the Y-axis direction, cutting chips are generated. The mixed fluid F3 can be sprayed over a wider area with respect to the contact portion (cutting portion) between the cutting blade 22 and the workpiece W. As a result, the blade cover 60 can remove the scraps and the like with a small amount of cutting water F1.

  The blade cover 60 sprays the mixed fluid F3 from the high-pressure air injection port 66 onto the vicinity of the cutting edge 222a of the cutting blade 222 of the cutting blade 22, so that the cutting blade 22 and the workpiece W are washed with a small amount of cutting water F1. be able to.

  The blade cover 60 fills the gap between the cutting blade 22 and the inner wall 632 and the groove 65 with the cutting blade 22 and is in a state of being covered with the cutting water F1 flowing at a high speed in the groove 65, thereby providing high cleaning power. Obtainable. As a result, the blade cover 60 can clean the cutting blade 22 with a small amount of cutting water F1.

  The blade cover 60 can cool the cutting blade 22 by covering it with the cutting water F1 that fills the gap between the cutting blade 22 and the inner wall 632 and the groove 65. As described above, since the cutting blade 22 has a part of the outer periphery thereof covered with the cutting water F1, a higher cooling effect can be obtained as compared with the case where the cooling water is jetted from the nozzle to the cutting blade 22, for example. Obtainable.

  As described above, the blade cover 60 is used for cooling the cutting blade 22, removing the scraps, and cleaning the cutting blade 22 and the workpiece W with the cutting water F1 supplied from the cutting water source of one system. use. Thus, the blade cover 60, for example, compared to a configuration in which the cutting water F1 is supplied separately for cooling the cutting blade 22, removing scraps, and cleaning the cutting blade 22 and the workpiece W, respectively. The amount of cutting water F1 used can be suppressed.

  Further, since the blade cover 60 can remove the scraps and the like with the mixed fluid F3 as described above, the blade cover 60 itself may be damaged, deformed, or misaligned due to contact with the scraps and the like. Can be suppressed. In this way, the blade cover 60 can suppress the occurrence of defects due to the contact of scattered scraps and the like.

  The present invention is not limited to the above embodiment. That is, various modifications can be made without departing from the gist of the present invention. For example, in the above embodiment, the blade cover 60 is applied to the cutting device 1 for cutting a rectangular package substrate or the like, but the blade cover 60 is applied to a general cutting device for cutting a semiconductor wafer or the like. Good.

DESCRIPTION OF SYMBOLS 1 Cutting device 10 Holding part 20 Cutting means 21 Spindle 22 Cutting blade 221 Flange 222 Cutting blade 222a Blade edge 23 Flange 60 Blade cover 61 Support part 62 Nozzle block 63 Main part 632 Inner wall 64 Cutting water jet port 65 Groove 66 High pressure air jet port 67 Cutting water supply port 68 High pressure air supply port F1 Cutting water F2 High pressure air F3 Mixed fluid R Rotation direction W Workpiece

Claims (1)

A blade cover disposed at the tip of a spindle housing that rotatably supports a spindle and covering a cutting blade mounted on the spindle via a flange,
The cutting water supplied to the cutting blade is disposed on the side opposite to the side where the cutting water mainly scatters from the contact portion between the cutting blade and the workpiece by the rotation of the cutting blade. Equipped with a nozzle block that sprays cutting water facing both sides of the
The nozzle block includes an inner wall formed with a gap along the shape of the flange on which the cutting blade is mounted and the both side surfaces of the cutting blade, and cutting water directed to both side surfaces of the flange formed on the inner wall. A plurality of cutting water jetting ports, an annular groove formed along the outer peripheral shape of the cutting blade in communication with the inner wall on the outer side in the radial direction of the cutting blade, and in communication with the groove. A high-pressure air injection port for injecting air toward both side surfaces of the cutting blade, which is formed at the downstream end of the cutting blade in the rotational direction,
When cutting water is supplied from the cutting water jet port, the clearance between the inner wall and the groove is filled with the cutting water as the cutting blade rotates, and the centrifugal force generated by the rotation of the spindle causes the cutting water to flow at high speed. A blade cover in which the cutting fluid is jetted in and the two fluids are jetted by being mixed with the high pressure air jetted from the high pressure air jet port.

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