TW201409937A - 振動片、振動元件、振盪器及電子機器 - Google Patents
振動片、振動元件、振盪器及電子機器 Download PDFInfo
- Publication number
- TW201409937A TW201409937A TW102126355A TW102126355A TW201409937A TW 201409937 A TW201409937 A TW 201409937A TW 102126355 A TW102126355 A TW 102126355A TW 102126355 A TW102126355 A TW 102126355A TW 201409937 A TW201409937 A TW 201409937A
- Authority
- TW
- Taiwan
- Prior art keywords
- vibrating
- vibrating piece
- width
- support arm
- width reducing
- Prior art date
Links
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- 241000251131 Sphyrna Species 0.000 description 5
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- 239000011229 interlayer Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
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- 238000005530 etching Methods 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000003405 preventing effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012166116A JP6094083B2 (ja) | 2012-07-26 | 2012-07-26 | 振動片、振動子、発振器および電子機器 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201409937A true TW201409937A (zh) | 2014-03-01 |
Family
ID=48874851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102126355A TW201409937A (zh) | 2012-07-26 | 2013-07-23 | 振動片、振動元件、振盪器及電子機器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9319022B2 (https=) |
| EP (1) | EP2690781A3 (https=) |
| JP (1) | JP6094083B2 (https=) |
| KR (1) | KR20140013994A (https=) |
| CN (1) | CN103580641B (https=) |
| TW (1) | TW201409937A (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014086933A (ja) * | 2012-10-25 | 2014-05-12 | Seiko Epson Corp | 振動片、振動子、発振器、電子機器及び移動体 |
| JP6013228B2 (ja) * | 2013-02-25 | 2016-10-25 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動子、発振器、電子機器及び電波時計 |
| JP6145288B2 (ja) * | 2013-03-15 | 2017-06-07 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計 |
| JP6519995B2 (ja) * | 2014-06-30 | 2019-05-29 | セイコーエプソン株式会社 | 振動素子、振動素子の製造方法、振動子、ジャイロセンサー、電子機器および移動体 |
| JP6627209B2 (ja) * | 2014-09-09 | 2020-01-08 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP6571339B2 (ja) * | 2015-01-26 | 2019-09-04 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片及び圧電振動子 |
| JP6552225B2 (ja) * | 2015-03-12 | 2019-07-31 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片及び圧電振動子 |
| JP7645104B2 (ja) | 2021-03-15 | 2025-03-13 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片及び圧電振動子 |
| CN118740098B (zh) * | 2024-06-04 | 2025-12-16 | 泰晶科技股份有限公司 | 石英晶片及其振动器件和电子设备 |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3462939A (en) * | 1965-02-12 | 1969-08-26 | Tokei Kk | Mechanical vibrator for timepiece |
| JPS547285A (en) * | 1977-06-20 | 1979-01-19 | Seiko Epson Corp | Tuning-fork-shaped crystal vibrator |
| JPS5919419A (ja) | 1982-07-23 | 1984-01-31 | Seiko Instr & Electronics Ltd | 音叉型振動子の支持構造 |
| JPS59138114A (ja) | 1983-01-28 | 1984-08-08 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
| US4540909A (en) | 1983-04-04 | 1985-09-10 | Seiko Instruments & Electronics Ltd. | Tuning fork type quartz crystal resonator with variable width base |
| JPS59183520A (ja) | 1983-04-04 | 1984-10-18 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
| JPS6021614A (ja) | 1983-07-18 | 1985-02-04 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子の支持構造 |
| JPS61187411A (ja) | 1985-02-14 | 1986-08-21 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
| JPH0310511A (ja) | 1989-06-08 | 1991-01-18 | Seiko Electronic Components Ltd | 音叉型屈曲水晶振動子 |
| DE19951288B4 (de) * | 1999-10-25 | 2013-05-29 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Präzisionsschwingungsantrieb |
| JP2002141770A (ja) | 2000-11-01 | 2002-05-17 | Citizen Watch Co Ltd | 小型振動子 |
| TW567664B (en) * | 2001-10-09 | 2003-12-21 | Ebauchesfabrik Eta Ag | Piezoelectric resonator and assembly comprising the same enclosed in a case |
| JP2005236563A (ja) | 2004-02-18 | 2005-09-02 | Seiko Epson Corp | 圧電振動片と圧電デバイスおよび圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| US7084556B1 (en) * | 2005-06-09 | 2006-08-01 | Eta Sa Manufacture Horlogere Suisse | Small-sized piezoelectric resonator |
| JP2007201936A (ja) | 2006-01-27 | 2007-08-09 | Epson Toyocom Corp | 圧電振動片と圧電デバイス |
| US20080201959A1 (en) * | 2007-02-28 | 2008-08-28 | Barry Leonard Kent | Eating utensil |
| EP2015449A1 (en) * | 2007-07-13 | 2009-01-14 | ETA SA Manufacture Horlogère Suisse | Packaging for piezoelectric resonator |
| ATE453954T1 (de) * | 2007-07-19 | 2010-01-15 | Eta Sa Mft Horlogere Suisse | Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten |
| US7939995B2 (en) * | 2007-12-13 | 2011-05-10 | ETA SA Manufacture Horlogére Suisse | Piezoelectric resonator in a small-sized package |
| JP2009164775A (ja) * | 2007-12-28 | 2009-07-23 | Nippon Dempa Kogyo Co Ltd | 圧電フレーム及び圧電デバイス |
| JP5348133B2 (ja) * | 2008-09-26 | 2013-11-20 | 株式会社大真空 | 音叉型圧電振動片、および音叉型圧電振動デバイス |
| JP5454134B2 (ja) | 2008-12-27 | 2014-03-26 | セイコーエプソン株式会社 | 振動片、振動子、センサー及び電子部品 |
| JP2010157933A (ja) | 2008-12-27 | 2010-07-15 | Epson Toyocom Corp | 屈曲振動片及び電子部品 |
| US8067880B2 (en) * | 2008-12-27 | 2011-11-29 | Seiko Epson Corporation | Flexural vibration element and electronic component |
| JP5350102B2 (ja) * | 2009-06-30 | 2013-11-27 | 京セラクリスタルデバイス株式会社 | 音叉型屈曲水晶振動子 |
| US20110001394A1 (en) * | 2009-07-02 | 2011-01-06 | Eta Sa | Piezoelectric thin-film tuning fork resonator |
| JP5482250B2 (ja) * | 2010-02-02 | 2014-05-07 | セイコーエプソン株式会社 | 振動体および振動デバイス |
| US8304968B2 (en) * | 2010-03-17 | 2012-11-06 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| US8368476B2 (en) * | 2010-03-19 | 2013-02-05 | Seiko Epson Corporation | Resonator element, resonator device and electronic device |
| CH703271B1 (fr) * | 2010-06-10 | 2015-02-27 | Swatch Group Res & Dev Ltd | Résonateur thermocompensé aux premier et second ordres. |
| US20120098389A1 (en) * | 2010-10-21 | 2012-04-26 | Micro Crystal Ag | Method for mounting a piezoelectric resonator in a case and packaged piezoelectric resonator |
| US8573057B2 (en) * | 2011-04-28 | 2013-11-05 | Custom Sensors & Technologies, Inc. | Sensor mount vibration reduction |
| JP2014135654A (ja) * | 2013-01-10 | 2014-07-24 | Sii Crystal Technology Inc | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
-
2012
- 2012-07-26 JP JP2012166116A patent/JP6094083B2/ja active Active
-
2013
- 2013-07-15 CN CN201310301816.3A patent/CN103580641B/zh active Active
- 2013-07-23 US US13/948,403 patent/US9319022B2/en active Active
- 2013-07-23 TW TW102126355A patent/TW201409937A/zh unknown
- 2013-07-24 EP EP13177768.2A patent/EP2690781A3/en not_active Withdrawn
- 2013-07-25 KR KR1020130087932A patent/KR20140013994A/ko not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| CN103580641B (zh) | 2017-11-28 |
| EP2690781A2 (en) | 2014-01-29 |
| EP2690781A3 (en) | 2016-08-24 |
| JP6094083B2 (ja) | 2017-03-15 |
| CN103580641A (zh) | 2014-02-12 |
| KR20140013994A (ko) | 2014-02-05 |
| JP2014027473A (ja) | 2014-02-06 |
| US9319022B2 (en) | 2016-04-19 |
| US20140029179A1 (en) | 2014-01-30 |
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