TW200944459A - Substrate conveying system and semiconductor manufacturing apparatus using the same - Google Patents

Substrate conveying system and semiconductor manufacturing apparatus using the same Download PDF

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Publication number
TW200944459A
TW200944459A TW097148771A TW97148771A TW200944459A TW 200944459 A TW200944459 A TW 200944459A TW 097148771 A TW097148771 A TW 097148771A TW 97148771 A TW97148771 A TW 97148771A TW 200944459 A TW200944459 A TW 200944459A
Authority
TW
Taiwan
Prior art keywords
roller
opening
belt
sealing belt
substrate
Prior art date
Application number
TW097148771A
Other languages
English (en)
Chinese (zh)
Other versions
TWI369330B (enExample
Inventor
Kentaro Tanaka
Satoshi Sueyoshi
Original Assignee
Yaskawa Denki Seisakusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Denki Seisakusho Kk filed Critical Yaskawa Denki Seisakusho Kk
Publication of TW200944459A publication Critical patent/TW200944459A/zh
Application granted granted Critical
Publication of TWI369330B publication Critical patent/TWI369330B/zh

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Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
TW097148771A 2007-12-27 2008-12-15 Substrate conveying system and semiconductor manufacturing apparatus using the same TW200944459A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007336296 2007-12-27
JP2008297260A JP5245757B2 (ja) 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置

Publications (2)

Publication Number Publication Date
TW200944459A true TW200944459A (en) 2009-11-01
TWI369330B TWI369330B (enExample) 2012-08-01

Family

ID=40828586

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097148771A TW200944459A (en) 2007-12-27 2008-12-15 Substrate conveying system and semiconductor manufacturing apparatus using the same

Country Status (3)

Country Link
JP (1) JP5245757B2 (enExample)
CN (1) CN101471274B (enExample)
TW (1) TW200944459A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI506716B (zh) * 2009-12-01 2015-11-01 東京威力科創股份有限公司 Substrate handling device and substrate processing system
US10083851B2 (en) 2013-09-09 2018-09-25 Kawasaki Jukogyo Kabushiki Kaisha Robot with inner and outer belt sections

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5304601B2 (ja) * 2009-11-10 2013-10-02 株式会社安川電機 アーム機構およびそれを備えた真空ロボット
KR101477835B1 (ko) * 2010-07-15 2014-12-30 현대중공업 주식회사 랙-피니언 구동형 로봇용 승강 조립체의 오염 정화 유닛
JP2013153108A (ja) * 2012-01-26 2013-08-08 Yaskawa Electric Corp 基板位置決め装置
JP5663638B2 (ja) * 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置
KR101773169B1 (ko) * 2016-02-12 2017-08-31 현대로보틱스주식회사 기판 반송용 로봇
JP6839993B2 (ja) * 2017-02-09 2021-03-10 日本電産サンキョー株式会社 搬送システム
CN112147133A (zh) * 2019-06-28 2020-12-29 尤妮佳股份有限公司 评价湿片材是否会发生黄变的评价方法
CN115818254B (zh) * 2023-02-16 2023-05-02 秦皇岛市奥晶玻璃制品有限公司 一种电磁屏蔽玻璃加工上料装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04300194A (ja) * 1991-03-28 1992-10-23 Yamaha Corp 直動機構の防塵装置
JP3113411B2 (ja) * 1992-03-18 2000-11-27 東京エレクトロン株式会社 洗浄装置
JPH08279545A (ja) * 1995-04-06 1996-10-22 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP2007303523A (ja) * 2006-05-10 2007-11-22 Nsk Ltd アクチュエータ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI506716B (zh) * 2009-12-01 2015-11-01 東京威力科創股份有限公司 Substrate handling device and substrate processing system
US10083851B2 (en) 2013-09-09 2018-09-25 Kawasaki Jukogyo Kabushiki Kaisha Robot with inner and outer belt sections

Also Published As

Publication number Publication date
JP5245757B2 (ja) 2013-07-24
TWI369330B (enExample) 2012-08-01
CN101471274B (zh) 2010-08-18
CN101471274A (zh) 2009-07-01
JP2009173444A (ja) 2009-08-06

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