CN101471274B - 基板搬运系统及利用其的半导体制造装置 - Google Patents

基板搬运系统及利用其的半导体制造装置 Download PDF

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Publication number
CN101471274B
CN101471274B CN2008101765895A CN200810176589A CN101471274B CN 101471274 B CN101471274 B CN 101471274B CN 2008101765895 A CN2008101765895 A CN 2008101765895A CN 200810176589 A CN200810176589 A CN 200810176589A CN 101471274 B CN101471274 B CN 101471274B
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China
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roller
sealing belt
peristome
pillar
opening
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Expired - Fee Related
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CN2008101765895A
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English (en)
Chinese (zh)
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CN101471274A (zh
Inventor
田中谦太郎
末吉智
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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CN2008101765895A 2007-12-27 2008-12-25 基板搬运系统及利用其的半导体制造装置 Expired - Fee Related CN101471274B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007336296 2007-12-27
JP2007336296 2007-12-27
JP2007-336296 2007-12-27
JP2008297260A JP5245757B2 (ja) 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置
JP2008297260 2008-11-20
JP2008-297260 2008-11-20

Publications (2)

Publication Number Publication Date
CN101471274A CN101471274A (zh) 2009-07-01
CN101471274B true CN101471274B (zh) 2010-08-18

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CN2008101765895A Expired - Fee Related CN101471274B (zh) 2007-12-27 2008-12-25 基板搬运系统及利用其的半导体制造装置

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JP (1) JP5245757B2 (enExample)
CN (1) CN101471274B (enExample)
TW (1) TW200944459A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5304601B2 (ja) * 2009-11-10 2013-10-02 株式会社安川電機 アーム機構およびそれを備えた真空ロボット
JP5480605B2 (ja) * 2009-12-01 2014-04-23 東京エレクトロン株式会社 基板搬送装置および基板処理システム
KR101477835B1 (ko) * 2010-07-15 2014-12-30 현대중공업 주식회사 랙-피니언 구동형 로봇용 승강 조립체의 오염 정화 유닛
JP2013153108A (ja) * 2012-01-26 2013-08-08 Yaskawa Electric Corp 基板位置決め装置
JP5663638B2 (ja) * 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置
JP6220197B2 (ja) * 2013-09-09 2017-10-25 川崎重工業株式会社 ロボット
KR101773169B1 (ko) * 2016-02-12 2017-08-31 현대로보틱스주식회사 기판 반송용 로봇
JP6839993B2 (ja) * 2017-02-09 2021-03-10 日本電産サンキョー株式会社 搬送システム
CN112147133A (zh) * 2019-06-28 2020-12-29 尤妮佳股份有限公司 评价湿片材是否会发生黄变的评价方法
CN115818254B (zh) * 2023-02-16 2023-05-02 秦皇岛市奥晶玻璃制品有限公司 一种电磁屏蔽玻璃加工上料装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04300194A (ja) * 1991-03-28 1992-10-23 Yamaha Corp 直動機構の防塵装置
JP3113411B2 (ja) * 1992-03-18 2000-11-27 東京エレクトロン株式会社 洗浄装置
JPH08279545A (ja) * 1995-04-06 1996-10-22 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP2007303523A (ja) * 2006-05-10 2007-11-22 Nsk Ltd アクチュエータ

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Publication number Publication date
TW200944459A (en) 2009-11-01
CN101471274A (zh) 2009-07-01
TWI369330B (enExample) 2012-08-01
JP2009173444A (ja) 2009-08-06
JP5245757B2 (ja) 2013-07-24

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Granted publication date: 20100818

Termination date: 20161225