200944459 九、發明說明 【發明所屬之技術領域】 本發明是關於一種具備用以防塵的機構的基板用搬運 系統及半導體裝置。 【先前技術】 對於所謂液晶基板或晶圓的工件進行所定處理而在製 〇 造半導體的半導體製造裝置，爲了該處理，使用著將基板 搬運至目的位置的基板搬運裝置。基板搬運裝置是也稱爲 搬運機器人。在基板搬運裝置有各種形態，惟尤其是在潔 淨室等的清洗環境下進行搬運基板者，將載置基板所用的 把手安裝於以連桿所構成的可伸縮的臂，藉由伸縮臂而將 基板搬運至所期望的位置者較多被看到。又，近年來，對 應於基板的大型化，與基板搬運裝置的省壓印化，爲了將 基板最適當搬運的基板搬運裝置被開發（例如專利文獻1 〇 、專利文獻2)。此些習知的基板搬運裝置的主要特徵爲 一特徵，爲將支撐把手與支撐於臂的臂支撐構件被支撐於 支柱，而有構成把手、臂、臂支撐構件的這些臂部沿著支 柱進行上下。如此地，在沿著支柱而使臂部上下的構成， 是在其支柱的內部，配置有所謂稱爲齒條與小齒輪（或球 形螺絲）或線性導件的直線引導機構。又，也可配置設於 把手的感測器或處理來自存在於臂內的馬達的配線所用的 電纜導件。 但是，在依此些習知的基板搬運裝置的構成，物理性 -5- 200944459 地連接有臂支撐構件與支柱內的直線引導機構之故，因而 臂支撐構件上下於支柱側面的範圍，成爲需要開口部。 專利文獻1:日本特開2001-274218號公報 專利文獻2:日本特開2005-150575號公報 【發明內容】 然而，在半導體裝置中必須將微細處理施在基板之故 ，因而在基板搬運裝置，當然將基板正確地定位於目的位 〇 置，被要求不會將粉塵（也稱爲粒子）附著於基板。但是 ，自上述直線引線機構或電纜導件的可動部，會有多數的 發塵之故，因而若未將上述開口部作成適當構成，而發生 將經開口部所放出的粉塵附著於把手上的基板的問題。 本發明是鑑於此些問題點，其目的是在於提供一種在 具備沿著上下的臂部的搬運裝置中，防塵效果高，臂部成 爲複數也可對稱，且不會有外部污損的防塵機構。[Technical Field] The present invention relates to a substrate transport system and a semiconductor device including a mechanism for dust prevention. [Prior Art] A semiconductor manufacturing apparatus for manufacturing a semiconductor in which a workpiece of a liquid crystal substrate or a wafer is subjected to predetermined processing uses a substrate transfer apparatus that transports the substrate to a target position for the processing. The substrate transfer device is also referred to as a transfer robot. There are various types of substrate transfer devices. However, in particular, in a cleaning environment such as a clean room, a handle for mounting a substrate is attached to a telescopic arm formed of a link, and the telescopic arm is used. The substrate is transported to a desired position and is often seen. In addition, in recent years, in order to increase the size of the substrate, the substrate transfer device for transporting the substrate to the substrate has been developed (for example, Patent Document 1 and Patent Document 2). The main feature of the conventional substrate transfer device is that the support handle and the arm support member supported on the arm are supported by the support, and the arms constituting the handle, the arm and the arm support member are carried along the support. up and down. As described above, the arm portion is vertically arranged along the support, and a linear guide mechanism called a rack and pinion (or a ball screw) or a linear guide is disposed inside the pillar. Further, it is also possible to arrange a sensor provided on the handle or a cable guide for processing wiring from a motor existing in the arm. However, in the configuration of the conventional substrate transfer device, the arm support member and the linear guide mechanism in the support are connected to the physical -5 - 200944459, and thus the range of the arm support member up and down on the side surface of the support is required. Opening. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2005-150575 (Patent Document 2) However, in the semiconductor device, it is necessary to apply fine processing to the substrate, and thus, in the substrate transfer device, Of course, the substrate is correctly positioned at the destination, and it is required that dust (also referred to as particles) is not attached to the substrate. However, since the movable portion of the linear lead mechanism or the cable guide has a large amount of dust, if the opening is not properly formed, the dust discharged through the opening is attached to the handle. The problem with the substrate. The present invention has been made in view of the above problems, and an object of the present invention is to provide a dustproof mechanism which has a high dustproof effect and a symmetrical portion in which the arm portion is plural and which does not have external stains in a conveying device having an arm portion along the upper and lower sides. .
爲了解決上述問題，本發明是如下地構成。 G 申請專利範圍第1項所述的發明，一種基板搬運裝置 ，其特徵爲：具備：支撐裝載基板的臂部，而且經由設於 支柱外面的直線狀的開口部連接至設於上述支柱內的引導 機構，依照上述引導機構，移動上述開口部的開口的支撐 構件，及密封上述開口部，隔離上述支柱內部與外部的密 封皮帶，藉由上述引導機構即使移動上述支撐構件，構成 藉由上述密封皮帶也不會把上述支柱的內部露出於外部， 上述密封皮帶爲將其兩端固定於上述支柱內部，而且捲裝 -6- 200944459 於可旋轉地支撐於上述支撐構件的滾子，設置架設成密封 上述開口部。 又，申請專利範圍第2項所述的發明，上述滾子是由 :對於上述開口部隔著大約均勻的間隙，配置於上述密封 皮帶的一端，而且設置架設上述密封皮帶的位置的第一滾 子，及配置於從上述開口部觀看配置於比上述第一滚子還 內部，而且將捲裝於上述第一滾子而折回的上述密封皮帶 〇 折回於上述密封皮帶的一端側的方式捲裝有上述密封皮帶 的第二滾子，及對上述第二滾子朝上述支柱的長度方向具 有一定角度且配置成將來自上述第二滾子的密封皮帶折回 於上述開口部側的第三滾子，及配置成對上述第三滾子平 行且將上述密封皮帶對於上述開口部的長度方向具有一定 角度折回的第四滾子，及配置成平行於上述第四滾子且將 上述密封皮帶折回於上述開口部的內部側的第五滾子，及 配置於平行於上述第五滾子且比上述第五滾子還內部，而 〇 且捲裝成朝上述密封皮帶的一端a的方向折回上述密封皮 帶的第六滾子，及對上述第六滾子朝上述支柱的長度方向 具有一定角度且配置成將來自上述第六滾子的上述密封皮 帶折回於上述開口部側的第七滾子，及捲裝成折回來自上 述第七滾子的上述密封皮帶，而且對於上述開口部隔著大 約均勻的間隙，配置於上述密封皮帶的另一端，而且設置 架設上述密封皮帶的位置的第八滾子。 又’申請專利範圍第3項所述的發明，在從上述第一 滾子至第四滾子及從上述第五滾子至第八滾子中，藉由螺 200944459 旋狀捲裝上述密封皮帶，僅將上述密封皮帶的一面經常地 從上述第一滾子接觸於上述第八滾子。 又，申請專利範圍第4項所述的發明，上述間隙是設 置成即使移動上述支撐構件，也不會使上述密封皮帶與上 述開口部接觸。 又，申請專利範圍第5項所述的發明’上述開口部是 互相地並行於上述支柱外面而被設置的3個開口所構成’ 在上述3個開口中的1個開口，通過依照上述引導機構旋 ® 轉驅動上述支撐構件的驅動部的輸出軸，而在剩餘的兩個 開口，通過被連接於上述引導機構的上述支撐構件所構成 〇 又，申請專利範圍第6項所述的發明是，上述密封皮 帶設於上述3個的各個開口。 又，申請專利範圍第7項所述的發明，對於上述引導 機構連接有複數上述支撐構件，上述密封皮帶爲將兩端被 固定於上述支柱內部，而且捲裝於可旋轉地分別被支撐於 〇 上述複數的支撐構件的滾子，而被設置架設成封閉上述開 口部。 又，申請專利範圍第8項所述的發明是，一種基板搬 運系統，其特徵爲：具備申請專利範圍第1項的基板搬運 裝置，及控制上述基板搬運裝置的控制器。 又，申請專利範圍第9項所述的發明是，一種半導體 製造裝置，其特徵爲：具備申請專利範圍第8項所述的基 板搬運系統。 -8 - 200944459 依照申請專利範圍第1項至第3項所述的發明，密封 皮帶是由：其兩端被固定於支柱內部，而且被捲裝於具備 施加支撐構件的移動構件的滾子而密封開口部所構成之故 ，因而即使支撐構件有移動，也很難將發生在支柱內部的 粉塵，從密封皮帶與開口部的間隙飛散。又，沒有如習知 地旋轉密封皮帶全體之情形，使得在支柱內部附著於密封 皮帶的粉塵，不會暴露於支柱的外部而有飛散的情形。又 © ，密封皮帶的外側面不會與滾子接觸，且密封皮帶不會通 過齒條與小齒輪機構的小齒輪的正下方，因此不會有依摩 耗及潤滑劑等的密封皮帶外側面的污損。 依照申請專利範圍第4項所述的發明，則可構成具有 密封皮帶與開口部不會接觸程度的間隙之故，因而與習知 地旋轉密封皮帶全體時相比較，成爲微小間隙，可更減低 排出粉塵的排出。 依照申請專利範圍第5項所述的發明，則一面確保支 〇 撐構件的剛性，一面可構成支撐構件的移動機構。 依照申請專利範圍第6項所述的發明，即使成爲3個 開口，在各個開口可簡單地設置密封皮帶。 依照申請專利範圍第7項所述的發明，即使支撐構件 成爲複數，也可簡單地增設依密封皮帶所致的防塵機構。 依照申請專利範圍第8項及第9項所述的發明，在基 板搬運系統或半導體製造裝置具備依本發明所致的基板搬 運裝置之故，因而可作成發塵少的基板搬運系統，而在半 導體製造上可提高良率。 -9- 200944459 【實施方式】 以下參照圖式來說明本發明的實施形態。 (實施例1 ) 第1圖是表示具備本發明的防塵機構的基板搬運裝置 1的全體圖。說明基板搬運裝置1的槪略構成。在圖中’ 2是把手，在此載置有未圖示的基板。臂3是連桿式臂’ © 以前端支撐把手2而朝圖的a方向（水平方向）可進行伸 縮。臂3的另一端是被連接於支撐構件4。又’匯集把手 2、臂3、支撐構件4也可稱爲臂部6。在此’例中，支撐 構件4是如圖所示地形成C形狀，將所準備的2支臂3的 各個，連接於C形狀的上段或下段。支撐構件4是被支撐 於被豎設在垂直方向（天地的方向）的支柱9，而藉由未 圖示的移動機構可朝圖的b方向（上下方向）移動。在該 例中，兩件臂3是藉由支撐構件4同時地上下移動。針對 G 於支撐構件4與支柱9的連接將詳述於下面。12是支柱 的開口部，在該例子中，朝支柱的延伸方向設有3個開口 部。3個開口部中，將中央的開口作爲12a，而將其左右 的開口作爲12b。又，堵住各個開口部12的方式所設置 者爲密封皮帶5。又’在支柱9的最下部，連接有迴旋平 台10。迴旋平台10是對於台座n以圖的c方向可進行 旋轉。因此’臂部6與支柱9的全體藉由迴旋平台1〇可 進行旋轉。又’雖未特別地圖示，惟視需要，也可安裝將 -10- 200944459 台座11朝圖的d方向移動的行走機構。依照該行走機構 ，就可藉由d方向進行行走臂部6及支柱9及迴旋平台 10及台座11所構成的基板搬運裝置1的全體，而對於設 於基板搬運裝置1近旁的例如收納基板的多數收納盒，成 爲基板搬運裝置可更自由地存取。又，基板搬運裝置1是 與圖中控制器1 3以電纜相連接而進行以上的動作，一面 再生事先所示範操作的位置一面進行所定搬運。一般，組 〇 合控制器13與基板搬運裝置1被利用作爲基板輸送系統 〇 第2圖是表示支柱9的內部構成。第2圖是表示第1 圖中從A方向觀看的側斷面圖，表示開口部12a的斷面。 在第2圖中，4是臂部6的支撐構件。在支撐構件4設有 旋轉電動機31及減速機32，而減速機32的輸出軸是連 接有小齒輪33。又，設置於支柱9的內部的齒條34與小 齒輪33嚙合而構成齒條與齒輪機構21，而藉由旋轉電動 G 機31的旋轉及齒條與齒輪機構21的作用，支撐構件4是 上下地可移動。又，在支柱9的內部配置有複數支直線滑 動軸承22成爲朝上下方向延伸，而連接有可行走該直線 滑動軸承22的複數導塊22a與支撐構件4。因此，藉由 直線滑動軸承22的作用，支撐構件4是成爲行走精度優 異而可上下移動。 如此，如第2圖所示地，在本發明中，密封皮帶5的 兩端被固定在支柱9內部的上下（頂部與底部），設置成 可跨設皮帶。又’將密封皮帶5與開口部12之間隙23, -11 - 200944459 設置成皮帶不會與開口部相擦程度地作成較小。在密封皮 帶5使用聚氨基甲酯或聚酯的原材料者。 以下，使用第3圖至第5圖詳述支撐構件4與支柱9 的連接部分的詳細構成。第3(a)圖是表示在第2圖中 從B方向觀看支撐構件4的局部圖。第3(b)圖是表示 第3(a)圖的C-C斷面圖。亦即，第3(b)圖是表示從 支撐構件4的正上方的支柱9的上方所觀看的斷面圖。又 ，第4圖是表示第3(b)圖的D-D斷面圖。又，第5圖 Q 是表示第3(b)圖的E-E斷面圖。又，在第3圖至第5 圖的各圖中，針對於與第1圖或第2圖相同部附與相同號 碼。 如第5圖所示地，在支撐構件4，設有上述所說明的 旋轉電動機31。在旋轉電動機31連接有減速機32，而在 其輸出軸連接有小齒輪33。小齒輪33是與支柱9內部的 齒條34相嚙合。輸出軸是從開口部12a插入至支柱9的 內部。又，如第3(b)圖所示地，在支柱9的內部對於 〇 支撐構件4，設有經由開口部12a、12b所固定的引導構 件4a。引導構件4a是對於支撐構件4完全地被拘束之故 ，因而實質上爲同一構件。上述的減速機32的輸出軸及 小齒輪33，是經由設於引導構件4a的貫通穴，而朝與支 撐構件4相反側的一面突出，且與齒條34相嚙合。相同 地，在與引導構件4a的支撐構件4相反的一面，沿著支 柱9的延伸方向般地設置有線性導件22，且連接有該線 性導件22的導塊22a與引導構件4a。亦即，依照以上構 -12- 200944459 成’開口部12a爲用以減速機32或旋轉電動機31等的動 力進行上下的開口，而左右的12b是一面把支撐構件4連 接於線性塊22a而被支撐，一面施以上下的開口。 以下，詳述密封皮帶5的構成。如第3(b)圖所示 地在支柱9的3個開口部12，存在著3支密封皮帶5成 爲從其內部能覆蓋。首先，針對於覆蓋3個開口部12中 的左右開口部12b的密封皮帶5b加以說明。左右兩個開 Ο 口部12b的密封皮帶5b的構成是相同。如先前所說明地 ’密封皮帶5b的一端是被固定於支柱9內部的頂面，由 該處垂下成爲覆蓋開口部12b的密封皮帶5b，是如第4 圖所示地折回地捲裝於旋轉自如地設於引導構件4a的第 1滾子35。又，密封皮帶5b是在第一滾子35的更接近直 線滑動軸承22側相同，被旋轉自如地設於引導構件4a的 第二滾子36被捲裝成朝垂上方地折回。在第二滾子36的 垂上方向’對於第二滾子36’旋轉自如地設置於具有一 © 定角度的第三滾子37朝相同引導構件4a的上部，密封皮 帶5b是一面扭轉一面被捲裝於第三滾子37，而朝開口部 12b的方向被折回。又，密封皮帶5b是與第三滾子37平 行，且藉由旋轉自如地設於相同引導構件4a的第四滾子 38再朝垂下方向折回。密封皮帶5b是藉由各自捲裝於上 述第一滾子35至第四滾子38’成爲採用螺旋狀路徑的構 成’而朝垂下方向通過引導構件4a的旁邊。又，此時， 密封皮帶5b是對於開口部12b具有一定角度。引導構件 4a的下部，是與上部的第四滾子38相對地有第五滾子39 -13- 200944459 旋轉自如地設於引導構件4a’密封皮帶5b是捲裝成折回 於第五滾子39。在第五滾子39的更接近直線滑動軸承22 側，同樣設有旋轉自如於引導構件4a且與第三滾子3 7相 對的第六滾子40，密封皮帶5a是藉由第六滾子40捲裝 成朝垂上方向折回。在第六滾子的垂上方向與第二滾子 36相對的第七滾子41同樣旋轉自如地設於引導構件4a， 而密封皮帶5b是一面再被扭轉一面被捲裝於第七滾子41 ，折回到開口部12b。又，密封皮帶5b是平行於第七滾 @ 子41，且被捲裝成在與第一滾子35相對的第八滾子42 捲裝成折回，而再垂下成覆蓋開口部12b。引導構件5b 是分別被捲裝於上述第五滾子39至第八滾子42，由此， 與被捲裝於第一滾子35至第四滾子38時同樣地成爲採用 螺旋狀路徑的構成。又，如上述地，密封皮帶5b的另一 . 端是被固定於支柱9內部的底面。 以下，針對於3個開口部12中覆蓋中央的開口部 12a的密封皮帶5a加以說明。密封皮帶5a對於滾子的捲 || 裝構成，是與上述密封皮帶5b實質上同一。但是，如第 4圖及第5圖所示地，在引導構件4a的大約中央從支撐 構件4側通過貫通穴43突出有旋轉電動機31的輸出軸與 減速機32與小齒輪33。亦即，旋轉電動機31的輸出軸 與引導構件4a同樣地存在於圍繞著被捲裝於第一滾子35 至第八滾子42的密封皮帶5a的範圍。 以上，依照所說明的本發明的密封皮帶的防塵機構， 將對於開口部12近接而固定於支柱5下垂於支柱9內部 -14- 200944459 的上下之故，因而對於開口部12不必具有大間隙就可下 垂皮帶。因而，很難從密封皮帶與開口部之間隙飛散出在 支柱9內部所發生的粉塵。 又，密封皮帶5對滾子螺旋狀地被捲裝之故，因而引 導構件的內面朝支柱9的內側的一面經常與滾子接觸，因 此，可防止藉由摩耗及捲入附著於密封皮帶5的外面的異 物所發生的密封皮帶5外面的污損。又，覆蓋支柱9的中 © 央部的開口部12a的密封皮帶5a不會通過小齒輪33正下 方的構成，因此，可防止潤滑小齒輪33與齒條34的潤滑 劑的滴下所致的對於密封皮帶5a的附著等的污損。 又，如第4圖所示地，設置上下地移動的複數臂部， 欲將此些構成互相自由地上下移動時，依照本發明，如第 6圖所示地，若多段地連接同一構成的支撐構件4(引導 構件4〇 ，就容易地可構成。 〇 【圖式簡單說明】 第1圖是表示具備本發明的防塵機構的基板搬運裝置 的外視圖。 第2圖是表示本發明的支柱的內部構成的斷面圖。 第3(a)圖及第3(b)圖是表示本發明的支撐構件 與支柱的連接構成的前視圖及上斷面圖。 第4圖是表示本發明的支撐構件與支柱的連接構成的 斷面圖。 第5圖是表示本發明的支撐構件與支柱的連接構成的 -15- 200944459 斷面圖。 第6圖是表示本發明其他實施例的側斷面圖。 【主要元件符號說明】 1 :基板搬運裝置 2 :把手 3 :臂 4 :支撐構件 © 4a :引導構件 5 :密封皮帶 6 :臂部 9 :支柱 1 〇 :迴旋平台 1 1 :台座 12 :開口部In order to solve the above problems, the present invention is constructed as follows. The invention according to claim 1, wherein the substrate transporting device includes: an arm portion that supports the mounting substrate, and is connected to the pillar provided in the pillar via a linear opening provided on an outer surface of the pillar The guiding mechanism moves the support member that opens the opening in accordance with the guiding mechanism, and seals the opening to isolate the sealing belt inside and outside the pillar, and the guiding mechanism is configured to seal by the moving member. The belt does not expose the inside of the pillar to the outside, and the sealing belt has its both ends fixed to the inside of the pillar, and the package -6-200944459 is rotatably supported by the support member. The opening is sealed. According to the invention of claim 2, in the roller, the roller is disposed at one end of the sealing belt with a substantially uniform gap therebetween, and is provided with a first roller that positions the sealing belt. And a package that is disposed inside the first roller and that is folded back from the first roller and that is folded back on the one end side of the sealing belt a second roller having the sealing belt, and a third roller having a certain angle to the longitudinal direction of the pillar and configured to fold the sealing belt from the second roller back to the opening side And a fourth roller disposed in parallel with the third roller and having the sealing belt folded back at a certain angle with respect to a longitudinal direction of the opening, and disposed parallel to the fourth roller and folding the sealing belt back a fifth roller on the inner side of the opening, and a fifth roller that is parallel to the fifth roller and that is further inside than the fifth roller The direction of the one end a of the sealing belt is folded back to the sixth roller of the sealing belt, and the sixth roller is angled toward the longitudinal direction of the pillar and configured to fold the sealing belt from the sixth roller back The seventh roller on the side of the opening and the package are folded back to the sealing belt from the seventh roller, and the opening is disposed at the other end of the sealing belt with a substantially uniform gap therebetween, and is provided with the erection The eighth roller that seals the position of the belt. Further, in the invention of claim 3, in the first roller to the fourth roller and from the fifth roller to the eighth roller, the sealing belt is spirally wound by a screw 200944459 Only one side of the above-mentioned sealing belt is often brought into contact with the eighth roller from the first roller. Further, in the invention of claim 4, the gap is such that the sealing belt does not come into contact with the opening portion even if the support member is moved. Further, the invention according to claim 5, wherein the opening is formed by three openings that are provided in parallel with each other on the outer surface of the pillar, and one of the three openings is opened in accordance with the guiding mechanism. The invention discloses that the output shaft of the driving portion of the support member is driven to rotate, and the remaining two openings are formed by the support member connected to the guiding mechanism, and the invention described in claim 6 is The sealing belt is provided in each of the three openings. Further, in the invention according to claim 7, the plurality of support members are connected to the guide mechanism, and the seal belt is fixed to the inside of the support post, and the package is rotatably supported by the support member. The rollers of the plurality of support members are provided to be arranged to close the opening. Further, the invention of claim 8 is a substrate transporting system comprising: a substrate transporting device according to claim 1; and a controller for controlling the substrate transporting device. Further, the invention of claim 9 is the semiconductor manufacturing apparatus characterized by comprising the substrate transportation system according to claim 8 of the patent application. -8 - 200944459 According to the invention of claim 1 to 3, the sealing belt is such that both ends thereof are fixed to the inside of the pillar and are wound around a roller having a moving member to which the supporting member is applied. Since the sealing opening is formed, even if the supporting member moves, it is difficult to scatter the dust generated inside the pillar from the gap between the sealing belt and the opening. Further, in the case where the entire sealing belt is rotated as is conventionally known, the dust adhering to the sealing belt inside the pillar is not exposed to the outside of the pillar and is scattered. Also ©, the outer side of the sealing belt will not contact the roller, and the sealing belt will not pass directly under the pinion of the rack and pinion mechanism, so there will be no outer side of the sealing belt according to friction and lubricant. Defaced. According to the invention of the fourth aspect of the invention, it is possible to form a gap having a degree that the sealing belt does not come into contact with the opening portion, and thus it is smaller than the conventional rotation of the sealing belt, and can be further reduced. The discharge of dust is discharged. According to the invention of claim 5, the movement mechanism of the support member can be formed while ensuring the rigidity of the support member. According to the invention of claim 6, the sealing belt can be easily provided in each opening even if it is three openings. According to the invention of the seventh aspect of the patent application, even if the supporting members are plural, the dustproof mechanism by the sealing belt can be simply added. According to the invention described in the eighth and ninth aspects of the invention, the substrate transfer system or the semiconductor manufacturing apparatus includes the substrate transfer device according to the present invention, so that the substrate transfer system with less dust generation can be used. Semiconductor manufacturing can increase yield. -9- 200944459 [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. (First Embodiment) Fig. 1 is a general view showing a substrate transfer device 1 including a dustproof mechanism of the present invention. A schematic configuration of the substrate transfer device 1 will be described. In the figure, '2' is a handle, and a substrate (not shown) is placed thereon. The arm 3 is a link arm ' © which supports the handle 2 at the front end and can be extended in the a direction (horizontal direction) of the drawing. The other end of the arm 3 is connected to the support member 4. Further, the collection handle 2, the arm 3, and the support member 4 may also be referred to as an arm portion 6. In this example, the support member 4 is formed in a C shape as shown, and each of the prepared two arms 3 is connected to the upper or lower portion of the C shape. The support member 4 is supported by the stay 9 which is vertically disposed in the vertical direction (the direction of the heaven and the earth), and is movable in the b direction (up and down direction) of the drawing by a moving mechanism not shown. In this example, the two arms 3 are simultaneously moved up and down by the support member 4. The connection of the support member 4 to the strut 9 for G will be described in detail below. Reference numeral 12 denotes an opening portion of the pillar. In this example, three opening portions are provided in the extending direction of the pillar. Among the three openings, the center opening is 12a, and the left and right openings are 12b. Further, the manner in which the respective opening portions 12 are blocked is provided as the sealing belt 5. Further, at the lowermost portion of the support 9, a swing platform 10 is connected. The gyroscopic platform 10 is rotatable with respect to the pedestal n in the c direction of the figure. Therefore, the entire arm portion 6 and the struts 9 can be rotated by the gyroscopic platform 1 。. Further, although not specifically illustrated, a traveling mechanism that moves the -10-200944459 pedestal 11 in the d direction of the drawing may be installed as needed. According to the traveling mechanism, the entire substrate transporting device 1 including the traveling arm portion 6 and the strut 9 and the revolving platform 10 and the pedestal 11 can be carried out in the d direction, and for example, the storage substrate is provided in the vicinity of the substrate transfer device 1. Many storage boxes are more freely accessible as a substrate transfer device. Further, the substrate transfer device 1 performs the above operations in connection with the controller 13 in the figure by a cable, and performs the predetermined conveyance while reproducing the position of the exemplary operation. In general, the combination controller 13 and the substrate transfer device 1 are used as a substrate transfer system. Fig. 2 is a view showing the internal structure of the support 9. Fig. 2 is a side sectional view showing the first view in the direction of the A, showing a section of the opening 12a. In Fig. 2, 4 is a support member of the arm portion 6. The support member 4 is provided with a rotary motor 31 and a reduction gear 32, and the output shaft of the reduction gear 32 is connected with a pinion 33. Further, the rack 34 provided inside the support post 9 meshes with the pinion gear 33 to constitute the rack and pinion mechanism 21, and by the rotation of the rotary electric G machine 31 and the action of the rack and pinion mechanism 21, the support member 4 is Move up and down. Further, a plurality of linear slide bearings 22 are disposed inside the support post 9 so as to extend in the vertical direction, and a plurality of guide blocks 22a and support members 4 that can travel the linear slide bearing 22 are connected. Therefore, by the action of the linear sliding bearing 22, the support member 4 is excellent in traveling accuracy and can be moved up and down. Thus, as shown in Fig. 2, in the present invention, both ends of the seal belt 5 are fixed to the upper and lower sides (top and bottom) of the inside of the stay 9, and are provided so as to be able to straddle the belt. Further, the gap 23, -11 - 200944459 of the seal belt 5 and the opening portion 12 is set to be small so that the belt does not rub against the opening portion. A raw material of polyurethane or polyester is used for the sealing tape 5. Hereinafter, the detailed configuration of the connecting portion of the support member 4 and the stay 9 will be described in detail using Figs. 3 to 5 . Fig. 3(a) is a partial view showing the support member 4 viewed from the B direction in Fig. 2; Fig. 3(b) is a cross-sectional view taken along line C-C of Fig. 3(a). That is, Fig. 3(b) is a cross-sectional view as seen from above the support column 9 directly above the support member 4. Further, Fig. 4 is a cross-sectional view taken along line D-D of Fig. 3(b). Further, Fig. 5 is a cross-sectional view taken along the line E-E of Fig. 3(b). Further, in each of the drawings of Figs. 3 to 5, the same reference numerals are attached to the same portions as those of Fig. 1 or Fig. 2 . As shown in Fig. 5, the support member 4 is provided with the above-described rotary electric motor 31. A reduction gear 32 is connected to the rotary motor 31, and a pinion 33 is connected to the output shaft. The pinion 33 meshes with the rack 34 inside the post 9. The output shaft is inserted into the inside of the stay 9 from the opening portion 12a. Further, as shown in Fig. 3(b), the guide member 4a fixed to the 支撑 support member 4 via the openings 12a and 12b is provided inside the support post 9. The guiding member 4a is completely restrained with respect to the supporting member 4, and thus is substantially the same member. The output shaft and the pinion gear 33 of the speed reducer 32 described above project through the through hole provided in the guide member 4a toward the opposite side of the support member 4, and mesh with the rack 34. Similarly, on the opposite side to the support member 4 of the guide member 4a, a linear guide 22 is provided along the extending direction of the support 9, and the guide block 22a of the linear guide 22 and the guide member 4a are connected. In other words, according to the above configuration, the opening portion 12a is an upper and lower opening for the power of the speed reducer 32 or the rotary electric motor 31, and the left and right 12b are connected to the linear block 22a by the support member 4 on one side. Support, apply the above opening on one side. Hereinafter, the configuration of the seal belt 5 will be described in detail. As shown in Fig. 3(b), in the three openings 12 of the support 9, three seal belts 5 are provided so as to be covered from the inside. First, the sealing belt 5b covering the right and left opening portions 12b of the three opening portions 12 will be described. The configuration of the seal belt 5b of the left and right opening portions 12b is the same. As described above, the one end of the seal belt 5b is a top surface fixed to the inside of the stay 9, and the seal belt 5b which is suspended from the portion to cover the opening portion 12b is wound up and rotated as shown in Fig. 4 The first roller 35 is provided freely on the guide member 4a. Further, the seal belt 5b is the same as the side closer to the linear slide bearing 22 of the first roller 35, and the second roller 36 rotatably provided on the guide member 4a is wound up and folded back upward. In the vertical direction of the second roller 36, the second roller 36' is rotatably disposed at an upper portion of the same guide member 4a having a third angle, and the seal belt 5b is twisted on one side. The package is wound around the third roller 37 and is folded back toward the opening portion 12b. Further, the seal belt 5b is parallel to the third roller 37, and is folded back in the downward direction by the fourth roller 38 which is rotatably provided to the same guide member 4a. The seal belt 5b passes through the guide member 4a in the downward direction by being wound around the first roller 35 to the fourth roller 38', respectively, in a configuration in which a spiral path is formed. Further, at this time, the seal belt 5b has a certain angle with respect to the opening portion 12b. The lower portion of the guiding member 4a is opposite to the upper fourth roller 38. The fifth roller 39-13-200944459 is rotatably provided to the guiding member 4a'. The sealing belt 5b is wound to be folded back to the fifth roller 39. . On the side of the fifth roller 39 closer to the linear sliding bearing 22, a sixth roller 40 that is rotatable from the guiding member 4a and opposed to the third roller 37 is also provided, and the sealing belt 5a is made of the sixth roller. 40 rolls are folded back in the direction of the vertical. The seventh roller 41 opposed to the second roller 36 in the vertical direction of the sixth roller is rotatably provided to the guide member 4a, and the seal belt 5b is wound on the one side and then wound on the seventh roller. 41, folded back to the opening portion 12b. Further, the seal belt 5b is parallel to the seventh roller 41, and is wound up so as to be wound up in the eighth roller 42 opposed to the first roller 35, and then hung down to cover the opening portion 12b. The guide members 5b are respectively wound around the fifth roller 39 to the eighth roller 42, and thus, in the same manner as when the first roller 35 to the fourth roller 38 are wound, the spiral path is adopted. Composition. Further, as described above, the other end of the seal belt 5b is a bottom surface fixed to the inside of the stay 9. Hereinafter, the seal belt 5a covering the central opening portion 12a of the three openings 12 will be described. The seal belt 5a is substantially identical to the seal belt 5b described above for the roll structure of the roller. However, as shown in Figs. 4 and 5, the output shaft of the rotary electric motor 31 and the reduction gear 32 and the pinion 33 protrude from the support member 4 side through the through hole 43 at the center of the guide member 4a. That is, the output shaft of the rotary electric motor 31 exists in the range surrounding the seal belt 5a wound around the first roller 35 to the eighth roller 42, similarly to the guide member 4a. As described above, according to the dustproof mechanism of the seal belt of the present invention described above, the opening portion 12 is closely attached to the support post 5 and is suspended from the upper and lower sides of the post 9 to the interior of the post 14 - 200944459. Therefore, it is not necessary for the opening portion 12 to have a large gap. The belt can be drooped. Therefore, it is difficult to fly out the dust generated inside the pillar 9 from the gap between the seal belt and the opening. Further, since the seal belt 5 is wound in a spiral shape with respect to the roller, the inner surface of the guide member is often in contact with the roller on the inner side of the support post 9, thereby preventing adhesion to the seal belt by abrasion and entrapment. The foreign matter on the outside of 5 causes the stain on the outside of the seal belt 5. Further, since the seal belt 5a covering the opening portion 12a of the middle portion of the pillar 9 does not pass through the pinion 33, it is possible to prevent the lubricant of the pinion gear 33 and the rack 34 from dripping. The stain of the adhesion of the seal belt 5a or the like. Further, as shown in Fig. 4, a plurality of arm portions that move up and down are provided, and when the components are to be moved up and down freely, according to the present invention, as shown in Fig. 6, the same configuration is connected in multiple stages. The support member 4 (the guide member 4A can be easily configured. 〇 [Simplified description of the drawings] Fig. 1 is an external view showing a substrate transfer device including the dustproof mechanism of the present invention. Fig. 2 is a view showing the support of the present invention 3(a) and 3(b) are front and top cross-sectional views showing the connection structure of the support member and the support of the present invention. Fig. 4 is a view showing the structure of the present invention. FIG. 5 is a cross-sectional view showing the connection structure of the support member and the support column of the present invention. FIG. 6 is a cross-sectional view showing another embodiment of the present invention. Fig. [Description of main component symbols] 1 : Substrate conveying device 2 : Handle 3 : Arm 4 : Support member © 4a : Guide member 5 : Sealing belt 6 : Arm 9 : Pillar 1 〇 : Cyclotron 1 1 : pedestal 12 : Opening
1 3 :控制器 G 2 1 :直線滑動軸承 22 :線性導件 2 2 a :線性塊 23 :間隙 3 1 :旋轉電動機 32 :減速機 3 3 :小齒輪 3 4 :齒條 -16- 200944459 3 5 :第一滾子 36 :第二滾子 37 :第三滾子 38 :第四滾子 39 :第五滾子 40 :第六滾子 41 :第七滾子 © 42 :第八滾子 43 :貫通穴1 3 : Controller G 2 1 : Linear plain bearing 22 : Linear guide 2 2 a : Linear block 23 : Clearance 3 1 : Rotary motor 32 : Reducer 3 3 : Pinion 3 4 : Rack-16 - 200944459 3 5: first roller 36: second roller 37: third roller 38: fourth roller 39: fifth roller 40: sixth roller 41: seventh roller © 42: eighth roller 43 :through hole
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