TWI369330B - - Google Patents

Info

Publication number
TWI369330B
TWI369330B TW097148771A TW97148771A TWI369330B TW I369330 B TWI369330 B TW I369330B TW 097148771 A TW097148771 A TW 097148771A TW 97148771 A TW97148771 A TW 97148771A TW I369330 B TWI369330 B TW I369330B
Authority
TW
Taiwan
Application number
TW097148771A
Other languages
Chinese (zh)
Other versions
TW200944459A (en
Inventor
Kentaro Tanaka
Satoshi Sueyoshi
Original Assignee
Yaskawa Denki Seisakusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Denki Seisakusho Kk filed Critical Yaskawa Denki Seisakusho Kk
Publication of TW200944459A publication Critical patent/TW200944459A/en
Application granted granted Critical
Publication of TWI369330B publication Critical patent/TWI369330B/zh

Links

TW97148771A 2007-12-27 2008-12-15 Substrate conveying system and semiconductor manufacturing apparatus using the same TW200944459A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007336296 2007-12-27
JP2008297260A JP5245757B2 (en) 2007-12-27 2008-11-20 Substrate transfer apparatus and system provided with dustproof mechanism, and semiconductor manufacturing apparatus using them

Publications (2)

Publication Number Publication Date
TW200944459A TW200944459A (en) 2009-11-01
TWI369330B true TWI369330B (en) 2012-08-01

Family

ID=40828586

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97148771A TW200944459A (en) 2007-12-27 2008-12-15 Substrate conveying system and semiconductor manufacturing apparatus using the same

Country Status (3)

Country Link
JP (1) JP5245757B2 (en)
CN (1) CN101471274B (en)
TW (1) TW200944459A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5304601B2 (en) * 2009-11-10 2013-10-02 株式会社安川電機 Arm mechanism and vacuum robot equipped with the same
JP5480605B2 (en) * 2009-12-01 2014-04-23 東京エレクトロン株式会社 Substrate transfer apparatus and substrate processing system
KR101477835B1 (en) * 2010-07-15 2014-12-30 현대중공업 주식회사 Purification Unit of Air Pollution for Clean Robot With the Rack-Pinion Moving Assembly
JP2013153108A (en) * 2012-01-26 2013-08-08 Yaskawa Electric Corp Substrate positioning device
JP5663638B2 (en) * 2012-10-11 2015-02-04 株式会社ティーイーエス Substrate transfer device
JP6220197B2 (en) * 2013-09-09 2017-10-25 川崎重工業株式会社 robot
KR101773169B1 (en) * 2016-02-12 2017-08-31 현대로보틱스주식회사 Robot for transferring substrate
JP6839993B2 (en) * 2017-02-09 2021-03-10 日本電産サンキョー株式会社 Transport system
CN115818254B (en) * 2023-02-16 2023-05-02 秦皇岛市奥晶玻璃制品有限公司 Electromagnetic shielding glass processing loading attachment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04300194A (en) * 1991-03-28 1992-10-23 Yamaha Corp Dust protective device for direct acting mechanism
JP3113411B2 (en) * 1992-03-18 2000-11-27 東京エレクトロン株式会社 Cleaning equipment
JPH08279545A (en) * 1995-04-06 1996-10-22 Dainippon Screen Mfg Co Ltd Wafer transfer device
JP2007303523A (en) * 2006-05-10 2007-11-22 Nsk Ltd Actuator

Also Published As

Publication number Publication date
TW200944459A (en) 2009-11-01
JP5245757B2 (en) 2013-07-24
JP2009173444A (en) 2009-08-06
CN101471274B (en) 2010-08-18
CN101471274A (en) 2009-07-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees