CN101471274A - Substrate conveying system and semiconductor manufacturing apparatus using the same - Google Patents
Substrate conveying system and semiconductor manufacturing apparatus using the same Download PDFInfo
- Publication number
- CN101471274A CN101471274A CNA2008101765895A CN200810176589A CN101471274A CN 101471274 A CN101471274 A CN 101471274A CN A2008101765895 A CNA2008101765895 A CN A2008101765895A CN 200810176589 A CN200810176589 A CN 200810176589A CN 101471274 A CN101471274 A CN 101471274A
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- roller
- sealing belt
- peristome
- pillar
- transfer apparatus
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Abstract
The present invention provides a substrate conveying system and a semiconductor manufacturing device using the substrate conveying system. The substrate conveying system has high dust proofing effect and can be corresponding with one another when becomes a plurality of arms. The substrate conveying system comprises the following components: a supporting component which supports the arm part of loading substrate and is connected with a guiding mechanism in the supporting block through a linear opening part installed outside the supporting block and moves according to the opening of guiding mechanism in the opening part; and a sealing belt which closes the opening part and insulates the inner part of supporting block from the outer part. The substrate conveying system is composed that the inner part of supporting block is not exposed to the outer part because of the sealing belt even the supporting component moves because of the guiding mechanism. When the two ends of sealing belt is fixed at the inner part of supporting block, the sealing belt is reeled on a trolley which is rotatablely supported on the supporting component and is installed for closing the opening part.
Description
Technical field
The present invention relates to a kind of substrate conveying system and semiconductor-fabricating device that is used for dustproof mechanism that possess.
Background technology
Workpiece such as crystal liquid substrate or wafer substrate are being carried out predetermined process and making in the semi-conductive semiconductor-fabricating device, handling, using the substrate transfer apparatus of board carrying to the target location in order to carry out it.Substrate transfer apparatus also is referred to as transfer robot.Though the substrate transfer apparatus of various forms is arranged, but particularly under cleaning ambients such as dust-free workshop in the device of carrying substrate, commonly on the telescopic arm that constitutes by connecting rod the hand that is used to place substrate is installed, is come board carrying to desirable position by the flexible of arm.And in recent years, the maximization of counterpart substrate is being developed and is being used for the substrate transfer apparatus of carrying substrate (for example, patent documentation 1, patent documentation 2) best when saving the occupied area of substrate transfer apparatus.One of principal character of these substrate transfer apparatus in the past is, the arm supporting member that supports hand and arm is supported by pillar, constitutes hand, arm, these arms of arm supporting member and moves up and down along pillar.In the formation up and down,, dispose so-called rack-and-pinion (perhaps ball-screw) or line slideway isoline guiding mechanism along pillar at such a arm in the inside of its pillar.In addition, also dispose and be used to handle from being arranged on transducer on hand or being present in the cable duct tube of the distribution of the motor in the arm.
But in the formation of these substrate transfer apparatus in the past, because the straight-line guidance mechanism in arm supporting member and the pillar is by physical connection, so in the side of pillar, the scope that moves up and down at the arm supporting member must have peristome.
Patent documentation 1: the spy of Japan opens the 2001-274218 communique
Patent documentation 2: the spy of Japan opens the 2005-150575 communique
Summary of the invention
But, in order in semiconductor-fabricating device, substrate to be implemented fine processing, substrate transfer apparatus is not only required substrate is properly positioned to the target location, and requires mustn't adhere to dust (also being referred to as particulate) substrate., because can produce a large amount of dust from above-mentioned straight-line guidance mechanism or the such movable part of cable duct tube, if therefore constitute described peristome inadequately, the problem of substrate on hand takes place then to be attached to by the dust that peristome is emitted.
The present invention is based on the problems referred to above and carries out, and its purpose is to be provided in the Handling device that possesses the arm that moves up and down along pillar, and dustproof effect height also can be corresponding even become a plurality of arms, and do not have outside stained dust-proof mechanism.
In order to address the above problem the present invention such as following formation.
Technical scheme 7 described inventions are, a kind of substrate transfer apparatus, it is, described guiding mechanism is connected a plurality of described supporting members, when the two ends of described sealing belt are fixed on described pillar inside, be wrapped on the roller that is supported in described a plurality of supporting members respectively rotationally, and open and put up the described peristome of sealing.
Technical scheme 8 described inventions are that a kind of substrate conveying system possesses the substrate transfer apparatus of technical scheme 1 and the controller of the described substrate transfer apparatus of control.
According to technical scheme 1 to 3 described invention, because the two ends that constitute the sealing belt are when being fixed on pillar inside, be wrapped in as on the roller that mobile member possessed of supporting member and sealed open portion, even therefore supporting member moves, also can make the dust that results from pillar inside be difficult for dispersing from the gap of sealing belt and peristome.In addition, unlike in the past, make to seal the whole rotation of belt, therefore do not disperse attached to the dust on the sealing belt can not be exposed to the pillar outside in pillar inside.In addition because sealing belt lateral surface contact with roller, and the pinion that the sealing belt can be by rack and pinion structure under, therefore can not produce owing to wear and tear and sealing belt lateral surface that lubricant etc. causes stained.
According to technical scheme 4 described inventions, can constitute by the gap of sealing belt and the discontiguous degree of peristome, therefore, when rotating with sealing belt in the past is whole mutually ratio gap become small, can reduce the discharge of dust more.
According to technical scheme 5 described inventions, constitute the travel mechanism of supporting member when can guarantee the rigidity of supporting member.
According to technical scheme 6 described inventions,, also can be arranged at each opening to the sealing belt simply even become 3 openings.
According to technical scheme 7 described inventions,, also can set up the dust-proof mechanism that forms by the sealing belt simply even become a plurality of supporting members.
According to technical scheme 8 and 9 described inventions, because in substrate conveying system or semiconductor-fabricating device, possess substrate transfer apparatus of the present invention, therefore can become dust and produce few substrate conveying system, can in the semiconductor manufacturing, improve rate of finished products.
Description of drawings
Fig. 1 is the outside drawing that expression possesses the substrate transfer apparatus of dust-proof mechanism of the present invention.
Fig. 2 is the inner cutaway view that constitutes of expression pillar of the present invention.
Fig. 3 is the front view that connects and composes and the vertical view cutaway drawing of expression supporting member of the present invention and pillar.
Fig. 4 is the cutaway view that connects and composes of expression supporting member of the present invention and pillar.
Fig. 5 is the cutaway view that connects and composes of expression supporting member of the present invention and pillar.
Fig. 6 is the side view cutaway drawing of expression other embodiment of the present invention.
Symbol description
The 1-substrate transfer apparatus; The 2-hand; The 3-arm; The 4-supporting member; The 4a-ways; 5-seals belt; The 6-arm; The 9-pillar; The 10-rotary table; The 11-pedestal; The 12-peristome; The 13-controller; The 21-rack and pinion structure; The 22-line slideway; 22a-line slideway slide block; The 23-gap; The 31-rotation motor; The 32-decelerator; The 33-pinion; The 34-tooth bar; 35-first roller; 36-second roller; 37-the 3rd roller; 38-the 4th roller; 39-the 5th roller; 40-the 6th roller; 41-the 7th roller; 42-the 8th roller; The 43-through hole.
Embodiment
Followingly embodiments of the present invention are described with reference to accompanying drawing.
Fig. 1 is the overall diagram that possesses the substrate transfer apparatus 1 of dust-proof mechanism of the present invention.The summary that substrate transfer apparatus 1 is described constitutes.In the drawings, 2 is hand, places not shown substrate thereon.Arm 3 is the link-type arm, can be flexible with apical support hand 2 (horizontal direction) on a of figure direction.The other end of arm 3 is connected on the supporting member 4.And handle 2, arm 3, supporting member 4 also are referred to as arm 6.In this example, supporting member 4 forms the コ word shape as figure, 2 arms 3 preparing is connected to the top and the bottom of コ word.Supporting member 4 quilts (directions of heaven and earth) upright column 9 of establishing in vertical direction support, and by not shown travel mechanism, can (above-below direction) move on the b of figure direction.In this example, 2 arms 3 move up and down simultaneously by supporting member 4.Being connected the back and will elaborating about supporting member 4 and pillar 9.The 12nd, the peristome on pillar in this example, is provided with 3 peristomes on the bearing of trend of pillar.In the middle of 3 peristomes, be 12a at the opening of central authorities, the opening about it is 12b.And be provided with the form of blocking peristome 12 respectively be the sealing belt 5.In addition, rotary table 10 is connected the foot of pillar 9.Rotary table 10 can rotate on the c of figure direction relative to pedestal 11.Therefore, arm 6 can rotate by rotary table 10 with the integral body of pillar 9.In addition, though specially do not illustrate, as required, the walking mechanism that pedestal 11 is moved is installed also sometimes on the d of figure direction.According to this walking mechanism, can make substrate transfer apparatus 1 integral body that constitutes by arm 6, pillar 9, rotary table 10, pedestal 11 according to the walking of d direction, make the substrate transfer apparatus can be with respect near a plurality of cassette memories access more freely of for example accommodating substrate that is arranged on the substrate transfer apparatus 1.And substrate transfer apparatus 1 is connected with controller 13 among the figure by cable and carries out above action, the carrying of stipulating in the time of the position of the teaching in advance of regenerating.Usually, combined controller 13 utilizes as substrate conveying system with substrate transfer apparatus 1.
Fig. 2 represents that the inside of pillar 9 constitutes.Fig. 2 is the side view cutaway drawing of observing from the A direction in Fig. 1, the cross section at expression peristome 12a place.4 is supporting members of arm 6 in Fig. 2.Be provided with rotation motor 31 and decelerator 32 on supporting member 4, pinion 33 is connected on the output shaft of decelerator 32.And be arranged on the tooth bar 34 and pinion 33 engagements of pillar 9 inside and constitute rack and pinion structure 21, supporting member 4 can move up and down by the rotation of rotation motor 31 and the effect of rack and pinion structure 21.In addition, in the inside of pillar 9, a plurality of line slideways 22 are configured to extend upward at upper and lower, and a plurality of line slideway slide block 22a that can walk on this line slideway 22 are connected with supporting member 4.Therefore, because the effect of line slideway 22, supporting member 4 can move up and down with excellent precision.
And, in the present invention, as shown in Figure 2, the sealing belt 5 two ends be fixed on pillar 9 inside about (ceiling and bottom surface), be set to tightening belt.In addition, the gap 23 of sealing belt 5 and peristome 12 does not take place frictionally to be provided with as small as possible in belt and peristome.Sealing belt 5 uses raw materials such as polyurethane, polyester.
Below, use Fig. 3～5 to describe the detailed formation of the coupling part of supporting member 4 and pillar 9 in detail.Fig. 3 (a) is the part figure that observes supporting member 4 in Fig. 2 from the B direction.Fig. 3 (b) is the C-C cutaway view in Fig. 3 (a).That is, Fig. 3 (b) is illustrated in directly over the supporting member 4 cutaway view when the top of pillar 9 is observed.Fig. 4 is the D-D cutaway view in Fig. 3 (b).Fig. 5 is the E-E cutaway view in Fig. 3 (b).In each figure of Fig. 3～5, for marking identical symbol with the same section of Fig. 1, Fig. 2.
As shown in Figure 5, in supporting member 4, be provided with the rotation motor 31 of above-mentioned explanation.On rotation motor 31, be connected with decelerator 32, on its output shaft, be connected with pinion 33.Pinion 33 is meshed with the tooth bar 34 of pillar 9 inside.Output shaft is inserted into pillar 9 inside from peristome 12a.In addition, shown in Fig. 3 (b),, be provided with fixing ways 4a by peristome 12a, 12b for supporting member 4 in the inside of pillar 9.Because ways 4a is subject to supporting member 4 fully, therefore come down to identical member.The output shaft of above-mentioned decelerator 32 and pinion 33 protrude in face with supporting member 4 opposite sides by the through hole that is arranged at ways 4a, and with tooth bar 34 engagements.Equally, on the face opposite with the supporting member 4 of ways 4a, be provided with line slideway 22 along the bearing of trend of pillar 9, the line slideway slide block 22a of this line slideway 22 is connected with ways 4a.That is, according to above formation, peristome 12a is that the power of decelerator 32 or rotation motor 31 etc. is used to carry out opening up and down, about 12b be that supporting member 4 is used to be connected that line slideway slide block 22a goes up and carry out opening up and down supported the time.
Below, the formation that seals belt 5 is elaborated.Shown in Fig. 3 (b), 3 sealings of 3 peristomes, the 12 existence belts 5 at pillar 9 cover from its inside.At first, the sealing belt 5b that covers left and right sides peristome 12b in the middle of 3 peristomes 12 is described.About the formation of sealing belt 5b of 2 peristome 12b identical.As previously mentioned, the end of sealing belt 5b is fixed on the ceiling face of pillar 9 inside, covers the sagging sealing belt 5b in peristome 12b ground from here, is wrapped in rotation as shown in Figure 4 and is arranged on freely on first roller 35 on the ways 4a and turns back back.And sealing belt 5b be wrapped in same rotation be arranged on freely than first roller 35 more near on second roller 36 on the ways 4a of line slideway 22 1 sides and to directly over turn back back.The 3rd roller 37 same rotations that relative second roller 36 has a certain angle directly over second roller 36 are arranged on the top of ways 4a freely, sealing belt 5b is wrapped on the 3rd roller 37 when being twisted, and turns back back to the direction of peristome 12b.And sealing belt 5b is parallel to the 3rd roller 37, and is arranged on the 4th roller 38 on the ways 4a, the sagging direction of turning back back once more freely by same rotation.Belt 5b is by being wrapped in above-mentioned first roller 35～the 4th roller 38 respectively in sealing, constitutes spiral helicine path and in the side of sagging direction by ways 4a.In addition at this moment, the relative peristome 12b of sealing belt 5b has certain angle.In the bottom of ways 4a, relative with the 4th roller 38 on top, the rotation of the 5th roller 39 is arranged on the ways 4a freely, and sealing belt 5b is wrapped on the 5th roller 39 and turns back back.Than the 5th roller 39 more near a side of line slideway 22, rotation relatively is provided with the 6th roller 40 freely and with the 3rd roller 37 on ways 4a equally, sealing belt 5a by 40 packages of the 6th roller become to directly over turn back back.Directly over the 6th roller to, same rotation is provided with seven roller 41 relative with second roller 36 freely on ways 4a, package was turned back back on the 7th roller 41 and to peristome 12b when sealing belt 5b was twisted once more.And sealing belt 5b is parallel to the 7th roller 41, and package is for turning back back at the 8th roller 42 relative with first roller 35, and sagging once more and covering peristome 12b.Belt 5b is by being wrapped in respectively on above-mentioned the 5th roller 39～the 8th roller 42 in sealing, constitutes helical-like path same when being wrapped in first roller 35～the 4th roller 38.And as mentioned above, the other end of sealing belt 5b is fixed on the bottom surface of pillar 9 inside.
Below, the sealing belt 5a that covers the peristome 12a of central authorities in the middle of 3 peristomes 12 is described.The package structure of sealing belt 5a pair roller is roughly the same with above-mentioned sealing belt 5b in fact.But as Fig. 4, shown in Figure 5, the output shaft of rotation motor 31, decelerator 32, pinion 33 are given prominence in the approximate centre of ways 4a by through hole 43 from supporting member 4 sides.That is, the output shaft of rotation motor 31 and ways 4a similarly are present in the scope that the sealing belt 5a that is wrapped in first roller 35～the 8th roller 42 surrounded.
Dust-proof mechanism according to the sealing belt of the present invention of above explanation, about pillar 9 inside, because the sealing belt 5 closely fixing with respect to peristome 12 hung down, so can under the situation that does not have big gap for peristome 12, belt be hung down.Therefore, can make the pillar 9 inner dust that produce be difficult for dispersing from the gap of sealing belt and peristome.
In addition, because sealing belt 5 counter roller package curls, therefore the inner face (faces towards pillar 9 inboards) of sealing belt contact with roller all the time, can prevent owing to wear and tear and be involved in the stained of sealing belt 5 outsides that take place attached to the foreign matter that seals belt 5 outsides.In addition, because the sealing belt 5a of the opening 12a of the central portion of covering pillar 9 by under the pinion 33, therefore, can prevent because the lubricant water clock of lubricant transfer pinion 33 and tooth bar 34 causes attached to sealing belt 5a first-class stained.
In addition, as shown in Figure 4, even planning to be provided with a plurality of arms that move up and down, constitute and make under these situations about moving up and down freely mutually, according to the present invention,, then also constitute easily if connect to multilayer the supporting member 4 (ways 4a) of same formation as shown in Figure 6.
Claims (9)
1. substrate transfer apparatus, it is characterized by, possess: when supporting the arm of mounting substrate, be connected the guiding mechanism that is arranged in the described pillar by the linearity peristome that is arranged on the pillar outside, and the supporting member that moves at the opening of described peristome according to described guiding mechanism; And seal described peristome and isolate the inside and outside sealing belt of described pillar, even constitute described supporting member owing to described guiding mechanism moves, the inside of described pillar is not exposed to the outside owing to described sealing belt yet, when the two ends of described sealing belt are fixed on described pillar inside, be wrapped on the roller that is supported in described supporting member rotationally, and open and put up the described peristome of sealing.
2. substrate transfer apparatus according to claim 1 is characterized by, described roller by: described relatively peristome is configured in first roller of opening the position of the described sealing belt of frame with an end of described sealing belt jointly across the gap of approximate equality; Observe from described peristome, be configured in more inboard than described first roller time, the described sealing belt of being turned back back by the described first roller package to described sealing belt one distolateral turn back back second roller of the described sealing belt of package; Be configured to relative second roller and on the length direction of described pillar, have certain angle, and the 3rd roller of turning back back to described peristome side from the sealing belt of described second roller; Be configured to be parallel to described the 3rd roller, and the 4th roller that described sealing belt is turned back back with respect to the length direction of described peristome with having certain angle; Be configured to be parallel to described the 4th roller, and the 5th roller that described sealing belt is turned back back to the inboard of described peristome; Be configured to be parallel to described the 5th roller, and than described the 5th roller more by inboard the time, the 6th roller that described sealing belt package one-tenth is turned back back to an end a direction of described sealing belt; Be configured to relative the 6th roller and have certain angle at the length direction of described pillar, and the 7th roller of turning back back to described peristome side from the described sealing belt of described the 6th roller; And when the described sealing belt package from described the 7th roller become to turn back back, described relatively peristome was configured in the 8th roller formation of opening the position of the described sealing belt of frame with the other end of described sealing belt jointly across the gap of approximate equality.
3. substrate transfer apparatus according to claim 1, it is characterized by, reaching from described the 5th roller to the eight rollers from described first roller to the, four rollers, by the described sealing belt of helically package, the one side that only makes described sealing belt all the time with contact from described first roller to described the 8th roller.
4. substrate transfer apparatus according to claim 1 is characterized by, and described gap is set to, even described supporting member moves, described sealing belt does not contact with described peristome yet.
5. substrate transfer apparatus according to claim 1, it is characterized by, described peristome is arranged at described pillar outer opening in parallel to each other by 3 and is constituted, in 1 opening in the middle of described 3 openings, the output shaft that rotates the drive division that drives described supporting member according to described guiding mechanism passes through, in remaining 2 opening, the described supporting member that is connected described guiding mechanism passes through.
6. substrate transfer apparatus according to claim 5 is characterized by, and is provided with described sealing belt separately in described 3 openings.
7. substrate transfer apparatus, it is characterized by, in the described substrate transfer apparatus of claim 1, described guiding mechanism is connected a plurality of described supporting members, when the two ends of described sealing belt are fixed on described pillar inside, be wrapped on the roller that is supported in described a plurality of supporting members respectively rotationally, and open and put up the described peristome of sealing.
8. a substrate conveying system is characterized by, and possesses the substrate transfer apparatus of claim 1 and the controller of the described substrate transfer apparatus of control.
9. a semiconductor-fabricating device is characterized by, and possesses the described substrate conveying system of claim 8.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007336296 | 2007-12-27 | ||
| JP2007-336296 | 2007-12-27 | ||
| JP2007336296 | 2007-12-27 | ||
| JP2008297260A JP5245757B2 (en) | 2007-12-27 | 2008-11-20 | Substrate transfer apparatus and system provided with dustproof mechanism, and semiconductor manufacturing apparatus using them |
| JP2008297260 | 2008-11-20 | ||
| JP2008-297260 | 2008-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101471274A true CN101471274A (en) | 2009-07-01 |
| CN101471274B CN101471274B (en) | 2010-08-18 |
Family
ID=40828586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101765895A Expired - Fee Related CN101471274B (en) | 2007-12-27 | 2008-12-25 | Substrate conveying system and semiconductor manufacturing apparatus using the same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5245757B2 (en) |
| CN (1) | CN101471274B (en) |
| TW (1) | TW200944459A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102069492A (en) * | 2009-11-10 | 2011-05-25 | 株式会社安川电机 | Arm mechanism and vacuum robot with the mechanism |
| CN103227135A (en) * | 2012-01-26 | 2013-07-31 | 株式会社安川电机 | Substrate positioning device |
| CN103730398A (en) * | 2012-10-11 | 2014-04-16 | 株式会社Tes | Apparatus for transferring substrate |
| CN110291029A (en) * | 2017-02-09 | 2019-09-27 | 日本电产三协株式会社 | Handling system |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5480605B2 (en) * | 2009-12-01 | 2014-04-23 | 東京エレクトロン株式会社 | Substrate transfer apparatus and substrate processing system |
| KR101477835B1 (en) * | 2010-07-15 | 2014-12-30 | 현대중공업 주식회사 | Purification Unit of Air Pollution for Clean Robot With the Rack-Pinion Moving Assembly |
| JP6220197B2 (en) * | 2013-09-09 | 2017-10-25 | 川崎重工業株式会社 | robot |
| KR101773169B1 (en) * | 2016-02-12 | 2017-08-31 | 현대로보틱스주식회사 | Robot for transferring substrate |
| CN115818254B (en) * | 2023-02-16 | 2023-05-02 | 秦皇岛市奥晶玻璃制品有限公司 | Electromagnetic shielding glass processing loading attachment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04300194A (en) * | 1991-03-28 | 1992-10-23 | Yamaha Corp | Dust protective device for direct acting mechanism |
| JP3113411B2 (en) * | 1992-03-18 | 2000-11-27 | 東京エレクトロン株式会社 | Cleaning equipment |
| JPH08279545A (en) * | 1995-04-06 | 1996-10-22 | Dainippon Screen Mfg Co Ltd | Wafer transfer device |
| JP2007303523A (en) * | 2006-05-10 | 2007-11-22 | Nsk Ltd | Actuator |
-
2008
- 2008-11-20 JP JP2008297260A patent/JP5245757B2/en not_active Expired - Fee Related
- 2008-12-15 TW TW97148771A patent/TW200944459A/en not_active IP Right Cessation
- 2008-12-25 CN CN2008101765895A patent/CN101471274B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102069492A (en) * | 2009-11-10 | 2011-05-25 | 株式会社安川电机 | Arm mechanism and vacuum robot with the mechanism |
| CN102069492B (en) * | 2009-11-10 | 2013-09-04 | 株式会社安川电机 | Arm mechanism and vacuum robot with the mechanism |
| CN103227135A (en) * | 2012-01-26 | 2013-07-31 | 株式会社安川电机 | Substrate positioning device |
| CN103730398A (en) * | 2012-10-11 | 2014-04-16 | 株式会社Tes | Apparatus for transferring substrate |
| CN103730398B (en) * | 2012-10-11 | 2015-05-06 | 株式会社Tes | Apparatus for transferring substrate |
| CN110291029A (en) * | 2017-02-09 | 2019-09-27 | 日本电产三协株式会社 | Handling system |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200944459A (en) | 2009-11-01 |
| JP5245757B2 (en) | 2013-07-24 |
| JP2009173444A (en) | 2009-08-06 |
| CN101471274B (en) | 2010-08-18 |
| TWI369330B (en) | 2012-08-01 |
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