JPS6248038A - Industrial robot - Google Patents
Industrial robotInfo
- Publication number
- JPS6248038A JPS6248038A JP18910385A JP18910385A JPS6248038A JP S6248038 A JPS6248038 A JP S6248038A JP 18910385 A JP18910385 A JP 18910385A JP 18910385 A JP18910385 A JP 18910385A JP S6248038 A JPS6248038 A JP S6248038A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- base
- hand
- axis
- moving mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は産業用ロボットに関し、%に半導体製造用カセ
ットのハンドリングロボット!関する。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to an industrial robot, particularly a cassette handling robot for semiconductor manufacturing! related.
(従来技術)
従来、この棟の半導体関係のカセットのクリーンルーム
内でのハンドリングは人手による作業ニ頼っていたり、
自動化されても専用機的なものであった。通常カセット
は他の装置から受は取った後回転させて一定方向に向き
を変え、他の場所へ移載するが、従来の自動ハンドリン
グ装置ではカセットの回転機構はそれぞれの必要なステ
ーション毎に個別的に設けていた。(Prior art) In the past, handling of semiconductor-related cassettes in this building's clean room relied on manual labor.
Even if it was automated, it was still a dedicated machine. Normally, cassettes are picked up from other equipment, rotated, turned in a certain direction, and transferred to another location, but in conventional automatic handling equipment, the cassette rotation mechanism is separate for each required station. It was set up as follows.
(発明が解決しようとする問題点)
上述した従来の人手に二る作業は、クリーン度の高いク
リーンルーム内では発塵の点で問題があり、さらに人件
費の高騰から製品コストが高い等の問題があった。又、
専用機の場合(−′i、カセットの回転機構をステーシ
ョンごとに設けるため、復雑化し設備費が高くなること
と、フレキシビリティがなく設置潤整に時間がかかり、
相手装絆側のレイアウト変更にも対処できない等の問題
があった。(Problems to be solved by the invention) The above-mentioned conventional labor-intensive work has problems in terms of dust generation in a highly clean room, and also has problems such as high product costs due to rising labor costs. was there. or,
In the case of a dedicated machine (-'i, since the cassette rotation mechanism is provided for each station, it becomes complicated and equipment costs are high, and there is no flexibility and it takes time to arrange the installation.
There were also problems such as not being able to deal with layout changes on the other side's bond side.
(問題点を解決するための手段)
本発明の産業用ロボットは、半導体製造用カセットを移
載するためカセットをチャックする機構およびカセット
内のウェハの取り出しを容易にする90°回転機構を有
するハンド部と、レール上を自走する本体部とから構成
され、前記本体部はラックおよびピニオン、DCサーボ
モータ駆動により長距離走行を可能と1−たX軸走行機
構と、DCサーボモータとボールネジを使用した前後方
向に移動するY (it移動機構と、ボールネジ駆動で
上下する2軸上下動機構とを備え、x、y、z軸はサー
ボコントロールされており、これによって動作範囲内で
3次元の空間における半導体製造用カセットの多ポイン
トの位置決めが可能となるように構成したものである。(Means for Solving the Problems) The industrial robot of the present invention has a hand that has a chuck mechanism for transferring a semiconductor manufacturing cassette and a 90° rotation mechanism that facilitates taking out a wafer from the cassette. The main body consists of a rack and pinion, an X-axis traveling mechanism capable of long-distance travel by driving a DC servo motor, and a DC servo motor and a ball screw. It is equipped with a Y (IT moving mechanism) that moves in the front-rear direction and a 2-axis vertical movement mechanism that moves up and down by a ball screw drive, and the x, y, and z axes are servo controlled, and this allows three-dimensional movement within the operating range. The structure is such that it is possible to position a semiconductor manufacturing cassette at multiple points in space.
(実施例) 次に本発明について図面を参照して説明する。(Example) Next, the present invention will be explained with reference to the drawings.
図面は本発明の実施例の斜視図である。本体部は、ベー
ス1に固定した2本の直線ガイドレール2の上をX軸ベ
ース41’(固定されたベアリング3が、X軸駆動モー
タ5の出力軸に設けたピニオン29とベース1に固定さ
t″L、タラツク8とのかみ合いにより左右に走行する
X軸走行機構部と、直線ガイドレール6とベアリング7
が滑合L Y軸ベース9がYl紬駆動モータ13により
前後移動するYIpH+移・動機構部と、z qih駆
動モータ10て連結したボールネジ30てよりZ輔支柱
11にガイドさハ。The drawing is a perspective view of an embodiment of the invention. The main body is connected to the X-axis base 41' (the fixed bearing 3 is fixed to the pinion 29 provided on the output shaft of the X-axis drive motor 5 and the base 1) on the two linear guide rails 2 fixed to the base 1. X-axis travel mechanism that travels left and right through engagement with the tarrack 8, the linear guide rail 6, and the bearing 7
The Y-axis base 9 is guided to the Z support column 11 by a ball screw 30 connected to the YIpH+ movement mechanism section which is moved back and forth by the Yl pongee drive motor 13 and the Z qih drive motor 10.
Z@移動体12が上下運動をするZLIIIl上下!7
!/I機構部とから構成されている。ハンド部は7 j
・由q動体12に請合したハンドベース141/cより
支持されて1g1r記本体部の上部に取り付けら几る。Z@The moving body 12 moves up and down ZLIII1 up and down! 7
! /I mechanism section. The hand part is 7j
- It is supported by the hand base 141/c attached to the moving body 12 and is attached to the upper part of the main body part 1g1r.
ハンド回転モータ15はカセット19を回転するアクチ
ェータであって、タイミングプーリ25からタイミング
ベルト17でよりタイミングプーリ18に伝達され、チ
ャック21が回転することによりカセット19を矢印A
の方向に回転させる。カセット19のチャッキングは、
支持側板26と支持側板27をエアシリンダ16により
開閉することにより行われる。The hand rotation motor 15 is an actuator that rotates the cassette 19, and is transmitted from the timing pulley 25 to the timing pulley 18 via the timing belt 17, and as the chuck 21 rotates, the cassette 19 is rotated by the arrow A.
Rotate in the direction of. Chucking of cassette 19 is
This is done by opening and closing the support side plates 26 and 27 using the air cylinder 16.
図示の状態は、相手11411装置23からウェハ20
の入ったカセット19をチャッキングして上昇した状態
を示したものであり、次のステップとして本体部が移動
し、位置決めガイド24と届慟してカセット28の状態
Yc置く。図示実施例からも明らかなように、本発明で
は本体部のY軸、Y軸。In the illustrated state, the wafer 20 is transferred from the counterpart device 11411 to the device 23.
The figure shows the state in which the cassette 19 containing the cassette 28 has been chucked and raised.As the next step, the main body moves and is placed in the position Yc of the cassette 28 in contact with the positioning guide 24. As is clear from the illustrated embodiment, in the present invention, the Y-axis and the Y-axis of the main body.
Z軸方向の動作駆動機構は、)・ンド部の回転、チャッ
キング動作、駆動機構の位置、いいかえればカセットの
ハンドリング面の位置よりも下方位置にある。The movement drive mechanism in the Z-axis direction is located at a position below the position of the drive mechanism for rotation and chucking of the cassette section, or in other words, the position of the handling surface of the cassette.
(発明の効果)
以上説明したように本発明の産業用ロボットは、長距離
を走行可能な+4造で動作範囲内の3次元の空間を11
E確に位置決め可能と(−1Ij(7,動部を低い位置
に配置した本体部と半導体製造用でウエノ・の入ったカ
セットのチャッキング及び回転機能を有するハンド部と
で構成したので、数mに及ぶ装2゛(上のカセットがイ
多+i&可能であり、またダウンフロ一式のクリーンル
ーム内ではウエノ1に対しダストの付着を防止できる効
果がある。又本発明の産業用ロボットにより、長時間無
人運転が可能となり省人効果がもたらされる。さらに・
・ンド部に回転機能を備えることにより、相手装+1”
L 1j:lの各ステーンヨンごとにカセット回転機構
を設ける必要がなく、設備全体のコスト低減ができる等
の効果がある。(Effects of the Invention) As explained above, the industrial robot of the present invention is a +4 structure that can travel long distances and can operate in a three-dimensional space within its operating range.
It is possible to accurately position (-1Ij (7) It is composed of a main body with moving parts located at a low position and a hand part that has the function of chucking and rotating cassettes containing wafer for semiconductor manufacturing, so The upper cassette can be used for up to 2 m (the upper cassette can be used for up to 2 m), and in a down-flow clean room, it is effective in preventing dust from adhering to Ueno 1. Also, the industrial robot of the present invention can be used for long periods of time. Unmanned operation becomes possible, resulting in labor-saving effects.Furthermore,
・By equipping the end part with a rotation function, the opponent's weapon +1"
There is no need to provide a cassette rotation mechanism for each stainless steel of L 1j:l, and the cost of the entire equipment can be reduced.
図面は本発明の実施例に係る産業用ロボットの。
斜視図である。
1・・・ベース、 2・・・i 、w カイ
トレール、3.7・・・ベアリング、 4・・・X
紬ヘーx、5・・・X !l1l−11=−タ、
6・・・[α・腺ガイドレール、8・・・ラック、
9・・Y索出ベース、10・・・ZIIlh
モータ、 11・・・Z矧1支柱、12・・・Z軸
移動体、 13・・・Y軸モータ、14・・・ハン
ド取付ベース、
15・・・ハンド回転モータ、
16・・・エアシリンダ、
17・・・タイミングベルト、
18.25・・・タイミングプーリ。
19.28・・・カセット、 20・・・ウェハ、2
1・・・チャック、 22・・・アジャスタ。
23・・・相手側装置、 24・・・位置決め)J
イド、26・・・支持側板、27・・・支持側板。
29・・・ピニオン、 30・・・ボールネジ。The drawing shows an industrial robot according to an embodiment of the present invention. FIG. 1...base, 2...i, w kite rail, 3.7...bearing, 4...X
Tsumugi hee x, 5...X! l1l-11=-ta,
6... [α・gland guide rail, 8... rack,
9...Y index base, 10...ZIIlh
Motor, 11...Z-1 pillar, 12...Z-axis moving body, 13...Y-axis motor, 14...hand mounting base, 15...hand rotation motor, 16...air cylinder , 17...Timing belt, 18.25...Timing pulley. 19.28...Cassette, 20...Wafer, 2
1...Chuck, 22...Adjuster. 23...Mate device, 24...Positioning)J
ID, 26...Supporting side plate, 27...Supporting side plate. 29...Pinion, 30...Ball screw.
Claims (1)
いて、前記カセットのチャッキング機構および回転機構
を有するハンド部と、レール上をラックおよびピニオン
機構により自走する本体部とを有し、前記本体部は前後
移動機構および上下移動機構を有し、前記ハンド部以外
の駆動系を前記半導体製造用カセットのハンドリング面
よりも低い位置に設けたことを特徴とする産業用ロボッ
ト。An industrial robot for transferring cassettes for semiconductor manufacturing, comprising: a hand section having a chucking mechanism and a rotation mechanism for the cassette; and a main body section that is self-propelled on a rail by a rack and pinion mechanism; An industrial robot having a longitudinal movement mechanism and a vertical movement mechanism, wherein a drive system other than the hand section is provided at a position lower than the handling surface of the semiconductor manufacturing cassette.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18910385A JPS6248038A (en) | 1985-08-28 | 1985-08-28 | Industrial robot |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18910385A JPS6248038A (en) | 1985-08-28 | 1985-08-28 | Industrial robot |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6248038A true JPS6248038A (en) | 1987-03-02 |
Family
ID=16235406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18910385A Pending JPS6248038A (en) | 1985-08-28 | 1985-08-28 | Industrial robot |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6248038A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5536128A (en) * | 1988-10-21 | 1996-07-16 | Hitachi, Ltd. | Method and apparatus for carrying a variety of products |
US6923085B2 (en) | 2001-03-13 | 2005-08-02 | Denso Corporation | Self-moved robot |
US7108121B2 (en) | 2003-03-12 | 2006-09-19 | Seiko Epson Corporation | Intermediate product transferring apparatus and carrying system having the intermediate product transferring apparatus |
US7182201B2 (en) | 2003-03-12 | 2007-02-27 | Seiko Epson Corporation | Wafer carrying apparatus and wafer carrying method |
US7308757B2 (en) | 2003-03-10 | 2007-12-18 | Seiko Epson Corporation | Intermediate product manufacturing apparatus, and intermediate product manufacturing method |
JP2017041490A (en) * | 2015-08-18 | 2017-02-23 | 株式会社テックインテック | Conveyance device and control method |
US20210332259A1 (en) * | 2018-10-16 | 2021-10-28 | Dow Global Technologies Llc | Aqueous dispersion of polymeric particles |
-
1985
- 1985-08-28 JP JP18910385A patent/JPS6248038A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5536128A (en) * | 1988-10-21 | 1996-07-16 | Hitachi, Ltd. | Method and apparatus for carrying a variety of products |
US6923085B2 (en) | 2001-03-13 | 2005-08-02 | Denso Corporation | Self-moved robot |
US7308757B2 (en) | 2003-03-10 | 2007-12-18 | Seiko Epson Corporation | Intermediate product manufacturing apparatus, and intermediate product manufacturing method |
US7108121B2 (en) | 2003-03-12 | 2006-09-19 | Seiko Epson Corporation | Intermediate product transferring apparatus and carrying system having the intermediate product transferring apparatus |
US7182201B2 (en) | 2003-03-12 | 2007-02-27 | Seiko Epson Corporation | Wafer carrying apparatus and wafer carrying method |
JP2017041490A (en) * | 2015-08-18 | 2017-02-23 | 株式会社テックインテック | Conveyance device and control method |
US20210332259A1 (en) * | 2018-10-16 | 2021-10-28 | Dow Global Technologies Llc | Aqueous dispersion of polymeric particles |
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