200849450 九、發明說明 【發明所屬之技術領域】 本發明是關於被使用在半導體製造裝置及基板檢查裝 置，而在該裝置中搬運所謂半導體、液晶、及光罩的基板 的基板搬運機器人。 【先前技術】 在半導體製造裝置等中，藉由昨今的微細化的進步， 提昇對於被使用於它的搬運機器人的基板的搬運精度或搬 運時的軌跡精度的要求是較高。尤其是對於晶盒進行搬運 基板之際，晶盒與基板之間隙極狹小時，則軌跡精度被要 求很高。 例如搬運曝光裝置的光罩之際，收納它的盒與光罩之 間隙，是極狹小（間隙是單側約1 mm左右）。亦即，欲 搬運（出入）到那裏之際，若自動旋臂的運動的軌跡精度 不高，則有盒與光罩干擾之虞。一方面，依傳統的連桿機 器人（藉由旋臂的旋轉運動，俾將搬運物的裝載部作成直 線運動而將搬運物予以搬運的機器人）的構成的軌跡精度 的實力，因應於此種要求是嚴酷，又，也必須提昇搬運速 度時，則習知的連桿機器人就無法對應。 如此，爲了高精度地搬運基板，會考慮到將直動導軸 裝載於習知的連桿機器人的旋臂前端。亦即，以連桿式旋 臂的移動進行大槪的搬運，之後，藉由再使用旋臂前端的 直動導軸，可提高軌跡精度，考量將如上述的光罩對於盒 -4 - 200849450 不會干擾地可加以搬運的構成。 如上述地，在連桿機器人的旋臂前端又具備直動導軸 者’有例如專利文獻1的構成。在專利文獻1中，揭示著 在該直動導軸（直動軸）附近具備驅動用電動機等的驅動 部，惟直動軸是作爲用以縮小作業半徑的構成。目的雖有 所同者，而若具備直動軸，則有提昇上述搬運軌跡者。 又’組合水平多關節式的旋臂運動與直動軸者，有如 栽利文獻2的構成。在專利文獻2中，包括直動軸的機構 構成與旋臂前端可分離，而僅在把旋臂前端合體在旋臂被 合體在該機構作成提昇旋臂運動的正確性。 專利文獻1:日本特開2004-106167號公報 專利文獻2:日本特開2005-236306號公報 【發明內容】 考慮到欲提昇軌跡精度，則容易地想到若如上述專利 文獻等地在連桿機器人具備直動軸，就可達成該精度。 又，考慮該構成，如專利文獻1地，在連桿機器人的 前端具備直動軸’又在該直動軸附近配置直動軸的驅動部 ，爲一般性構成。但是，在該構成中，直動軸附近的尺寸 當然變大。又，直動軸的驅動用電動機配置於直動軸附近 之故’因而必須將驅動用電動機等的驅動用電纜插通於各 種部位（尤其是旋臂內），而在如連桿機器人的旋臂關節 般地有扭轉動作的部位插通電纜時，則也有斷線的可能性 而在信賴性上有問題。又，直動軸的驅動用電動機配置於 -5- 200849450 直動軸附近，則旋臂所驅動的負荷變大之故，因而旋臂的 高剛性化成爲必需’也必須增大驅動旋臂的電動機容量等 0 一方面，專利文獻2是可分離直動軸之故，因而沒有 如專利文獻1的問題，惟僅在可得到直動軸機構的補助的 部位才提昇連桿機器人的軌跡精度。 如此，本發明的目的是在於解決上述的習知問題點， 提供以小型的直動軸提昇搬運軌跡精度的機器人。亦即， 在被使用於半導體製造裝置或基板檢查裝置的搬運機器人 中，提供在旋臂具有小型的直動軸就可廣泛範圍內以高速 且高軌跡精度可進行搬運基板的機器人作爲目的。 爲了解決上述問題，本發明是如下地所構成者。 申請專利範圍第1項所述的發明，是一種搬運機器人 ，是具備：裝載基板的末端操作裝置，及複數旋臂轉動自 如地互相被連結，在上述複數旋臂中最前端的旋臂設有上 述末端操作裝置的旋臂部，及收納旋轉驅動上述複數旋臂 的電動機的本體部，及對於上述最前端的旋臂直線狀地驅 動上述末端操作裝置的直動機構部，驅動上述旋臂部與上 述直動機構部而將上述基板搬運至所期望的位置的搬運機 器人，其特徵爲：上述直動機構部是由：被裝載於上述最 前端的旋臂的第1及第2滑輪，及被捲裝於上述第1及第 2滑輪的皮帶，及被設置於上述皮帶近旁的導向導件，及 被連結於上述導向導件與上述皮帶，而且裝載上述末端操 作裝置的末端操作裝置裝載部所構成，將旋轉上述第1或 -6 - 200849450 第2滑輪的直動機構驅動用電動機設於上述本體部。 申請專利範圍第2項所述的發明，是申請專利範圍第 1項所述的搬運機器人’其中，將上述直動機橇驅動用電 動機設於上述最則端的S疋臂以外的旋臂內部，以代替上述 本體部。 申請專利範圍第3項所述的發明，是申請專利範圍第 1項或弟2項所述的搬連機器人，其中，上述直動機構驅 動用電動機，是經由分別被收容於上述複數旋臂的直動機 構驅動用滑輪及皮帶，進行旋轉上述第1或第2滑輪。 申請專利範圍第4項所述的發明是申請專利範圍第3 項所述的搬運機器人，其中，將旋轉驅動上述複數旋臂的 電動機的旋轉予以傳動的旋臂驅動用滑輪，是在上述複數 旋臂的各該基端側與前端側的連結軸中，作成與上述直動 機構驅動用滑輪成爲同軸的構成。 申請專利範圍第5項所述的發明是申請專利範圍第1 項所述的搬運機器人，其中，藉由將上述最前端的旋臂與 對於上述最前端的旋臂的基端側所連結的旋臂施以旋轉的 方向及旋轉速度，及旋轉上述第1或第2滑輪的方向及旋 轉速度成爲一致，一面維持上述末端操作裝置對於上述最 前端的旋臂的相對性位置，一面將上述最前端的旋臂對於 上述最前端的旋臂的基端側所連結的旋臂朝所期望的位置 予以旋轉。 申請專利範圍第6項所述的發明是一種機器人系統， 其特徵爲具備：申請專利範圍第1項所述的搬運機器人， -7- 200849450 及控制上述搬運機器人的控制器。 申請專利範圍第7項所述的發明，是一種半導體製造 裝置或基板檢查裝置，其特徵爲具備：申請專利範圍第6 項所述的機器人系統。 依照申請專利範圍第1項或第2項所述的發明，將驅 動直動軸的電動機配置於從機器本體部或與直動軸遠離的 旋臂內部之故，因而可小型地構成直動軸，可進行廣泛範 圍內依高速又高軌跡精度的搬運。 又，若將驅動直動軸的電動機配置於本體部，則與在 直動軸附近配置電動機的機器人相比較，不必在旋臂內佈 置電纜之故，因而可解決電纜斷線等的問題，而提昇信賴 性。 依照申請專利範圍第3項的發明，使用滑輪與皮帶來 將直動機構驅動用電動機的旋轉傳動至直動機構部，而將 此些收納於各旋臂內部之故，因而可抑制將從此些所發生 的粉塵流出至外部。 依照申請專利範圍第4項所述的發明，將直動機構用 滑輪與旋臂驅動用滑輪，在各旋臂的連結軸中，上下相連 般地構成同軸之故，因而把旋臂部全體成爲小型。 依照申請專利範圍第5項所述的發明，一面維持端操 作裝置對於最前端的旋臂的相對性位置，一面可將最前端 的旋臂對於最前端的旋臂的基端側所連結的旋臂朝所期望 的位置予以旋轉。 依照申請專利範圍第6項及第7項所述的發明，可構 -8 - 200849450 築高精度軌跡而直動機構部小型的機器人系統或製造裝置 檢查裝置。 【實施方式】 以下，針對於本發明的實施形態參照圖式加以說明。 實施例1 本發明的具直動軸的搬運機器人，是在機器人的最前 端的旋臂內具有直線狀地引導末端操作裝置的直動軸，構 成能以優異精度進行搬運裝載於末端操作裝置上的晶圓及 基板。以下，說明本發明的具體性構成例。 本發明的搬運機器人90是如第2圖所示地，大致由 本體部9 1，及旋轉自如地被連結於本體部91的複數旋臂 所成的旋臂部92，及被裝載於旋臂部92的最前端的旋臂 的直動機構部93，及藉由直動機構部93直線狀地被引導 的末端操作裝置94所構成。95是被裝載於末端操作裝置 94而被搬運的基板95。又，第2 ( a)圖是表示機器人的 前視圖，第2 ( b )圖是表示側面圖。 以下，以第1圖來說明各部的詳細。第1圖是表示本 發明的搬運機器人的側斷面圖。末端操作裝置94的圖示 是被省略。 針對於本體部91的構成加以說明。本體部9 1是相當 於圓筒或長方體狀地所形成的機器人胴體的部分。 在形成本體部9 1的機殼4 1的內部，收納有旋轉旋臂 -9 - 200849450 部92及直動機構部93的電動機5、6、7、8。在各電動機 5〜8裝設有適當的減速機，而電動機輸出軸滑輪1、2、3 、4分別被連接於其輸出軸。又，在此些滑輪分別捲裝有 皮帶9、10、11、12。又，在第1圖中未被圖示，也有此 些電動機全套與上下移動旋臂部92的機構（上下移動機 構）被收容於機殼41的內部的情形。或是，作成上下移 動機構施以上下本體部9 1與旋臂部92也可以。又，電動 機5、6、7、8是將在各電動機內的編碼器的資訊送出到 未圖示的控制器，一方面電源被供應而該旋轉被控制。因 此，搬運機器人是與該未圖示的控制器一起被使用作爲機 器人系統，而上述電動機是以控制器被控制。俾將旋臂部 9 2與直動機構部9 3操作至所期望位置而進行搬運基板9 5 〇 針對於旋臂部9 2的構成加以說明’旋臂部9 2是連結 有複數旋臂的水平關節型的連桿式旋臂。旋臂部9 2是大 致上由第1旋臂20與第2旋臂29與第3旋臂37與直動 機構部9 3與末端操作裝置9 4所構成。各旋臂是收納以下 所說明滑輪或皮帶的方式箱般形狀地所形成’而其上部以 蓋部所覆蓋。又，以下所說明的各滑輪’當然由未圖示的 軸承等被支撐成可適當地旋轉作爲前提。 第1旋臂2 0的基端側是對於機殼4 1以未圖示的軸承 被支撐成可旋轉。第1旋臂2 0基端側的旋轉中心，成爲 旋臂部9 2的旋轉中心。又’第1旋臂2 0的基端側是被連 結於設於機殼4 1的內部的第1旋臂驅動用滑輪1 6 ’而第 -10- 200849450 1旋臂驅動用滑輪1 6是被捲裝於上述皮帶1 2。 旋臂2 0是藉由上述電動機8的旋轉而被旋轉。 第2旋臂29的基端側，是以未圖示的軸承 被支撐於第1旋臂2 0的前端側。第2旋臂2 9的 被連結於內設在第1旋臂2 0內部的前端側的第 動用滑輪A23，而在第2旋臂驅動用滑輪A23捲 2 6。又，在第1旋臂2 0的基端側內部設有第2 用滑輪B19，而皮帶26也被捲裝於此。 第2旋臂驅動用滑輪B 1 9是與此成爲同軸的 設於機殼41的內部的第2旋臂驅動用滑輪C 1 3 柱所連結。又，第2旋臂驅動用滑輪C1 3，是被 述皮帶10。因此，第2旋臂29是藉由上述電動 轉進行旋轉。 第3旋臂3 7的基端側，是以未圖示的軸承 被支撐於第2旋臂29的前端側。第3旋臂3 7的 被連結於內設在第2旋臂29內部的前端側的第 動用滑輪A33，而在第3旋臂驅動用滑輪A3 3捲 3 1。又，在第2旋臂29的基端側內部設有第3 用滑輪B28，而皮帶31也被捲裝於此。 第3旋臂驅動用滑輪B28是與此成爲同軸的 設於第1旋臂20的前端側內部的第3旋臂驅 C2 1以棒狀支柱所連結。又，第3旋臂驅動用滑 是被捲裝於皮帶24。又，被內設於第1旋臂20 的第3旋臂驅動用滑輪ΕΠ7也捲裝有皮帶24。 因此第1 可旋轉地 基端側是 2旋臂驅 裝有皮帶 旋臂驅動 方式，與 以棒狀支 捲裝於上 機6的旋 可旋轉地 基端側是 3旋臂驅 裝有皮帶 旋臂驅動 方式，與 動用滑輪 輪 C21， 的基端側 第3旋臂 -11 - 200849450 驅動用滑輪D 1 7是與此成爲同軸的方式’與設於機殻4 1 的內部的第3旋臂驅動用滑輪E 1 5以棒狀支柱所連結。又 ，在第3旋臂驅動用滑輪1 5捲裝有上述皮帶1 1。因此’ 第3旋臂3 7是藉由上述電動機7的旋轉進行旋轉。 藉由以上的構成，旋臂部92的各旋臂（第1旋臂20 ，第2旋臂29，第3旋臂3 7 )是在各該基端側藉由上述 電動機被轉動。 針對於直動機構部93加以說明。直動機構部93是將 末端操作裝置94 一面朝第3旋臂37的延伸方向精密地引 導一面予以驅動的機構。 末端操作裝置94是被固定於末端操作裝置裝載部40 的一端。末端操作裝置裝載部40的另一端，是被連接於 被收容於第3旋臂的延伸方向的導向導件3 9。導向導件 3 9是例如精密的線性導件，由引導構件與被引導構件所引 導的滑輪組3 5所構成的公知者。又，在第3旋臂3 7的側 面，如第2 ( b )圖所示地，設有朝延伸方向設有較長的開 口 42。經由該側面的開口 42使得末端操作裝置裝載部40 的另一端連接固定於滑輪組3 5。開口 42是在第3旋臂3 7 的側面或上面都可以，惟從該開口飛散來自導向導件3 9 或下述的直動機構驅動用滑輪等的可動部的粉塵之故，因 而儘量減小開□，且從基板（搬運物）遠離的位置較佳。 又，末端操作裝置裝載部40是與末端操作裝置94 一體地 形成也可以。 一方面，在第3旋臂3 7的前端側內部，設有直動機 -12- 200849450 構驅動用滑輪A3 8。又，在第3旋臂3 7的基端側內部 設有直動機構驅動用滑輪B34。在此些滑輪間捲裝有皮 3 6。在皮帶3 6直線狀地拉上之間的空間設有上述導向 件39。又，末端操作裝置裝載部40，是如上述地被連 於滑輪組3 5，而且也被連接於皮帶3 6的直線狀地拉上 分。 直動機構驅動用滑輪B34是與它成爲同軸的方式， 棒狀支柱被連結於內設於第2旋臂29的前端側的直動 構驅動用滑輪C32。在直動機構驅動用滑輪C32捲裝有 帶3 0。又，在第2旋臂29的基端側設有直動機構驅動 滑輪D27，而皮帶30是也被捲裝於它。又，直動機構 動用滑輪D 2 7是與它成爲同軸的方式，以棒狀支柱被連 於內設於第1旋臂20的前端側的直動機構驅動用滑 E22。在直動機構驅動用滑輪E22捲裝有皮帶25。又， 第1旋臂20的基端側設有直動機構驅動用滑輪F 1 8， 皮帶25是也被捲裝於它。直動機構驅動用滑輪F1 8是 它成爲同軸的方式，以棒狀支柱被連結於設於機殻4 1 部的直動機構驅動用滑輪G 1 4。在直動機構驅動用滑 G14捲裝有上述皮帶9。因此，末端操作裝置裝載部40 末端操作裝置94是藉由上述電動機5的旋轉，被皮帶 拉上，一面引導至導向導件3 9，一面朝第3旋臂3 7的 伸方向直線狀地精密地移動。 如上述地，在本發明中直動機構部93的導向導件 被收容於第3旋臂3 7。又，藉由導向導件3 9將直線狀 帶 導 接 部 以 機 皮 用 驅 結 輪 在 而 與 內 輪 及 36 延 39 精 -13- 200849450 密地引導的末端操作裝置裝載部40及末端操作裝置94予 以驅動的滑輪及皮帶部被收容於旋臂，又，驅動此些的直 動機構驅動用電動機被收於本體部9 1。 進行有關於以上的構成的補足說明。 在本實施例中，可抑制在半導體製造中被嫌棄的粉塵 發生之故，因而如上述地各旋臂是以蓋部所封閉。藉由此 ，導向導件3 9等也被收容於第3旋臂3 7的內部，惟並不 一定採用被收容的形態。 又，例如第3旋臂驅動用滑輪B28與直動機構驅動用 滑輪D27是設成在第2旋臂29的基端側成爲同軸之故， 因而連結第3旋臂驅動用滑輪B28與第3旋臂驅動用滑輪 C21的棒狀支柱，及連結直動機構驅動用滑輪D27與直動 機構驅動用滑輪E22的棒狀支柱是當然成爲同軸，惟此些 支柱是將連結直動機構驅動用滑輪D27與直動機構驅動用 滑輪E22的棒狀支柱形成圓筒狀，而在其內部插入連結第 3旋臂驅動用滑輪B 2 8與第3旋臂驅動用滑輪C 2 1的棒狀 支柱，而以未圖示的旋轉軸承支撐著各該支柱。各旋臂的 基端部的同樣的構成也成爲上述所說明的構造。 又，在本實施例中，說明第1至第3旋臂及裝載於第 3旋臂的直動機構的構成，惟旋臂數是並不被限定於此者 〇 又，驅動直動機構的電動機5是表示被收納於本體部 91的例子，惟將它例如設於第1旋臂2 0的基端側內部等 旋臂的內部也可以。若將最前端的旋臂的第3旋臂3 7的 -14- 200849450 直動機構部小型地形成作爲目的，則如此地設於具直動機 構部的最前端的旋臂以外的旋臂內部也可以。但是，如下 述地電動機5的電纜類成爲存在於可動部的旋臂內之故， 因而增加電纜斷線的危險性。 針對於以上所說明的本發明的搬運機器人90的動作 ，以第3圖及第4圖加以說明。控制機器人的動作爲上述 的控制器。以下，針對於控制器的控制加以說明。 首先，未變更末端操作裝置94對於第3旋臂3 7的相 對性位置，將第3旋臂3 7對於第2旋臂29進行旋轉的動 作，亦即針對於在第3圖所示的動作加以說明。此時的動 作是直動機構驅動用滑輪C32與第3旋臂驅動用滑輪A3 3 ，以同方向、同速度、同角度協調地旋轉方式，使得電動 機5與電動機7進行動作也可以。依照該動作，如第3圖 所示地，將第3旋臂3 7上的移動件（末端操作裝置裝載 部4 0與末端操作裝置94 )，一面維持與第3旋臂3 7的相 對性前後位置，一面可變更第3旋臂3 7的方向。 又’在維持各旋臂的姿勢狀態下，對於第3旋臂3 7 進行移動移動件的動作，亦即針對於第4圖所示的動作加 以說明。此時的動作是未使得第1旋臂2 〇、第2旋臂2 9 、第3旋臂3 7，亦即未進行旋轉電動機6、7、8，而仍維 持各旋臂的姿勢狀態（姿勢）之下，藉由轉動直動機構驅 動用滑輪C3 2 (旋轉電動機5 )，使得第3旋臂3 7上的移 動件，對於第3旋臂3 7可進行朝其延伸方向的前後地動 作0 -15- 200849450 又，針對於該直動機構驅動用滑輪C32與第3旋臂驅 動用滑輪A3 3，不一定滑輪的齒數或直徑是作成相同，若 滑輪3 2與滑輪3 3的旋轉方向與旋轉速度與旋轉角度相同 ，則上述動作可成立。 又，在進行旋臂92的旋轉動作（對於第3旋臂3 7未 移動各旋臂的姿勢及直動機構，而對於本體部9 1旋轉此 些全部的動作）或伸縮動作（擴展各旋臂互相形成的角度 的動作）時，則與習知的控制方法相同之故，因而對此點 未特別地加以說明，惟直動機構部93的直動機構驅動用 滑輪C32，是如上述地必須協調於驅動第3旋臂37的第3 旋臂驅動用滑輪A3 3的旋轉。 若使用以上所說明的本發明的搬運機器人90及控制 器’則例如在末端操作裝置94裝載光罩而進行搬運之際 ’即使收納它的盒與光罩之間隙極狹小，藉由上述直動機 構部的作用，也不會干擾盒與光罩而可搬運光罩。 又’依照本發明以習知的連桿機器人的搬運速度可將 搬運物予以搬運’而欲將搬運物精密地予以搬運時，則使 用直動機構部而以高精度的軌跡可搬運到目的部位。 又’依照本發明，可將驅動直動機構部的零件（皮帶 或滑輪）都收納在旋臂內部之故，因而將粉塵飛散於周圍 的情形也較少。 又’依照本發明的直動機構部的構成，也不會如習知 地使得直動機構部成爲很大構成之故，因而對於驅動部的 負擔也較少’驅動部本體也可構成較小，而可作成控制性 -16- 200849450 優異的機器人。 又，若將直動機構部的電動機收納於本體部內部，則 電纜類也不會佈滿旋臂部。亦即，在如旋臂的可動部沒有 驅動直動機構部的電纜類之故，因而在電纜斷線上可提昇 信賴性。 【圖式簡單說明】 第1圖是表示本發明的搬運機器人的側斷面圖。 第2圖是表示本發明的搬運機器人的前視圖（a )與 側面圖（b )。 第3圖是表示僅旋轉本發明的搬運機器人的第3旋臂 時的說明圖。 第4圖是表示僅動作本發明的搬運機器人的直動機構 部時的說明圖。 【主要元件符號說明】 1、2、3、4 :電動機輸出軸滑輪 5、6、7、8 :電動機 9、 10、 11、 12、 24、 25、 26、 30、 31、 36:皮帶[Technical Field] The present invention relates to a substrate transfer robot that is used in a semiconductor manufacturing apparatus and a substrate inspection apparatus, and in which a substrate such as a semiconductor, a liquid crystal, or a photomask is transported. [Prior Art] In semiconductor manufacturing equipment and the like, the improvement in the precision of the substrate used in the transfer robot or the trajectory accuracy during transportation has been high by the progress of the miniaturization of the prior art. In particular, when the substrate is transported by the crystal cassette, the gap between the crystal cassette and the substrate is extremely narrow, and the track accuracy is required to be high. For example, when the reticle of the exposure apparatus is transported, the gap between the case in which it is housed and the reticle is extremely narrow (the gap is about 1 mm on one side). That is, if the trajectory of the movement of the automatic arm is not high when it is to be carried (in and out) there, there is a case where the box interferes with the reticle. On the other hand, the strength of the trajectory accuracy of the conventional link robot (the robot that transports the transported object by the rotational movement of the swing arm and the loading portion of the transported object) is adapted to this requirement. It is harsh, and when it is necessary to increase the handling speed, the conventional connecting rod robot cannot correspond. As described above, in order to convey the substrate with high precision, it is considered that the linear motion guide shaft is mounted on the tip end of the arm of the conventional link robot. That is to say, the movement of the link type arm is carried out, and then the track accuracy can be improved by using the direct drive guide shaft at the front end of the arm, considering the mask as described above for the box-4 - 200849450 It can be handled without disturbing. As described above, in the distal end of the arm of the connecting rod robot, the direct acting guide shaft is further provided, for example, in the configuration of Patent Document 1. Patent Document 1 discloses that a drive unit such as a drive motor is provided in the vicinity of the linear motion guide shaft (linear motion shaft), and the linear motion shaft is configured to reduce the working radius. Although the purpose is the same, if there is a direct-acting axis, the above-mentioned handling trajectory is improved. Further, the combination of the horizontal articulated arm movement and the linear motion axis is similar to the composition of the Japanese Patent Document 2. In Patent Document 2, the mechanism including the linear motion shaft is separable from the front end of the arm, and the correctness of the movement of the lifting arm is achieved only by combining the front end of the arm and the arm in the mechanism. In the case of the trajectory accuracy, it is easy to think of a link robot as in the above-mentioned patent documents, etc., in the case of the trajectory accuracy. With a linear motion axis, this accuracy can be achieved. Further, in consideration of this configuration, as in Patent Document 1, a drive unit in which a linear motion shaft is provided at the tip end of the link robot and a linear motion shaft is disposed in the vicinity of the linear motion shaft is a general configuration. However, in this configuration, the size in the vicinity of the linear motion axis naturally becomes large. Further, since the driving motor for the linear motion shaft is disposed in the vicinity of the linear motion shaft, it is necessary to insert a driving cable such as a driving motor into various parts (especially in the arm), and to rotate in, for example, a connecting rod robot. When a cable having a twisting action in the arm joint is inserted into the cable, there is a possibility that the cable is broken and there is a problem in reliability. Further, since the driving motor for the linear motion shaft is disposed in the vicinity of the linear motion axis of -5 to 200849450, the load driven by the spiral arm is increased, so that the rigidity of the spiral arm is required to be increased, and the driving arm must be increased. Motor capacity and the like On the one hand, Patent Document 2 is a separable linear motion axis, and thus there is no problem as in Patent Document 1, but the trajectory accuracy of the link robot is improved only in a portion where the assistance of the linear motion mechanism can be obtained. As described above, an object of the present invention is to solve the above-mentioned conventional problems and to provide a robot that improves the accuracy of a conveyance path with a small linear motion axis. In other words, in the transfer robot used for the semiconductor manufacturing apparatus or the substrate inspection apparatus, it is an object to provide a robot that can transport a substrate at a high speed and high trajectory accuracy over a wide range of the spiral arm having a small linear motion axis. In order to solve the above problems, the present invention is constituted as follows. The invention according to claim 1 is a transport robot including an end operation device for loading a substrate, and a plurality of spiral arms rotatably coupled to each other, and a spiral arm at a foremost end among the plurality of spiral arms is provided a swing arm portion of the end operation device, a main body portion that houses the motor that rotationally drives the plurality of swing arms, and a linear motion portion that drives the end operation device linearly with respect to the foremost end arm to drive the arm portion a transport robot that transports the substrate to a desired position with the linear motion mechanism portion, wherein the linear motion mechanism portion is a first and a second pulley that is mounted on the foremost end of the arm, and a belt that is wound around the first and second pulleys, a guide that is disposed near the belt, and a terminal that is coupled to the guide and the belt and that is loaded with the end effector In the configuration, the motor for driving the linear motion mechanism that rotates the first or -6 - 200849450 second pulley is provided in the main body portion. The invention described in claim 2 is the transport robot according to the first aspect of the present invention, wherein the motor for driving the direct-drive sled is provided inside the arm other than the S-arm of the most end, Instead of the above body portion. The invention of claim 3, wherein the motor for driving the linear motion mechanism is accommodated in the plurality of arms, respectively, in the connection robot according to the first or second aspect of the invention. The linear motion mechanism drives a pulley and a belt to rotate the first or second pulley. The invention described in claim 4 is the transport robot according to the third aspect of the invention, wherein the pulley for driving the arm that rotationally drives the rotation of the motor of the plurality of arms is in the plurality of rotations Each of the base end side and the front end side connecting shaft of the arm is configured to be coaxial with the linear motion mechanism driving pulley. The invention described in claim 5 is the transport robot according to the first aspect of the invention, wherein the distal end of the swing arm and the base end side of the distal end of the swing arm are coupled to each other. The arm is rotated in the direction and the rotational speed, and the direction in which the first or second pulley is rotated and the rotational speed are matched, and the distal end is maintained while maintaining the relative position of the distal end operating device to the distal end of the arm. The spiral arm rotates the spiral arm connected to the proximal end side of the foremost end arm to a desired position. The invention described in claim 6 is a robot system characterized by comprising: a transfer robot according to claim 1 of the patent application, -7-200849450, and a controller for controlling the transfer robot. The invention according to claim 7 is a semiconductor manufacturing apparatus or a substrate inspection apparatus, comprising: the robot system according to claim 6 of the patent application. According to the invention of claim 1 or 2, the motor for driving the linear motion shaft is disposed inside the arm body from the main body portion or the linear motion axis, so that the linear motion shaft can be configured in a small size. It can carry a wide range of high speed and high trajectory accuracy. Further, when the motor for driving the linear motion shaft is disposed in the main body portion, it is not necessary to arrange a cable in the arm in comparison with the robot in which the motor is disposed in the vicinity of the linear motion shaft, so that problems such as cable breakage can be solved. Improve trust. According to the invention of claim 3, the rotation of the motor for driving the linear motion mechanism is transmitted to the linear motion mechanism portion by the pulley and the leather belt, and the light is accommodated in the inner side of each of the spiral arms, thereby suppressing from this. The dust that has occurred flows out to the outside. According to the invention of the fourth aspect of the invention, the pulley for the linear motion mechanism and the pulley for driving the arm are coaxially connected to each other in the connecting shaft of each of the arms, so that the entire arm portion is formed. Small. According to the invention of claim 5, while maintaining the relative position of the end operating device to the foremost end of the arm, the front end of the arm can be coupled to the base end of the foremost end of the arm. The arm is rotated towards the desired position. According to the invention described in the sixth and seventh aspects of the patent application, it is possible to construct a small robot system or a manufacturing device inspection device with a high-precision trajectory and a linear motion mechanism. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. [Embodiment 1] A transfer robot having a direct-acting shaft according to the present invention is a linear motion shaft that linearly guides an end operating device in a swing arm at the foremost end of the robot, and is configured to be transported to the end operating device with excellent precision. Wafers and substrates. Hereinafter, a specific configuration example of the present invention will be described. As shown in Fig. 2, the transport robot 90 of the present invention is substantially provided by the main body portion 191 and the arm portion 92 formed by a plurality of spiral arms that are rotatably coupled to the main body portion 91, and is mounted on the arm. The linear motion mechanism portion 93 of the distal end of the portion 92 and the distal operation mechanism 94 that is linearly guided by the linear motion mechanism portion 93 are configured. 95 is a substrate 95 that is loaded on the end operation device 94 and transported. Further, Fig. 2(a) is a front view showing the robot, and Fig. 2(b) is a side view. Hereinafter, the details of each part will be described with reference to Fig. 1 . Fig. 1 is a side sectional view showing a transport robot according to the present invention. The illustration of the end effector 94 is omitted. The configuration of the main body portion 91 will be described. The body portion 9 1 is a portion corresponding to a robot body formed by a cylinder or a rectangular parallelepiped. Inside the casing 4 1 forming the main body portion 91, the motors 5, 6, 7, and 8 of the rotary arm -9 - 200849450 portion 92 and the linear motion mechanism portion 93 are accommodated. An appropriate reduction gear is mounted to each of the motors 5 to 8, and the motor output shaft pulleys 1, 2, 3, and 4 are respectively connected to the output shafts thereof. Further, the pulleys are respectively wound with belts 9, 10, 11, and 12. Further, although not shown in the first drawing, a plurality of motors and a mechanism for moving the arm portion 92 up and down (up and down moving mechanism) are housed inside the casing 41. Alternatively, the upper and lower moving mechanisms may be applied to the upper body portion 91 and the arm portion 92. Further, the motors 5, 6, 7, and 8 send information of the encoders in the respective motors to a controller (not shown), and the power is supplied while the rotation is controlled. Therefore, the transport robot is used as a robot system together with the controller (not shown), and the motor is controlled by the controller. The operation of transporting the substrate 9 5 to the desired position is performed by the operation of the arm portion 9 2 and the linear motion mechanism portion 9 3 , and the configuration of the arm portion 9 2 is described. The arm portion 9 2 is connected to a plurality of arms. Horizontal articulated link arm. The arm portion 92 is substantially composed of the first arm 20, the second arm 29, the third arm 37, the linear motion mechanism portion 913, and the end operating device 94. Each of the arms is formed in a shape like a case in which the pulley or the belt described below is housed, and the upper portion is covered by the cover. Further, it is a matter of course that each of the pulleys ‘described below is supported by a bearing or the like (not shown) so as to be appropriately rotatable. The proximal end side of the first arm 20 is supported by the housing 4 1 so as to be rotatable by a bearing (not shown). The center of rotation of the proximal end side of the first arm 20 is the center of rotation of the arm portion 92. Further, the proximal end side of the first arm 20 is connected to the first arm driving pulley 1 6 ' provided inside the casing 41, and the -10-200849450 1 arm driving pulley 16 is It is wound on the above belt 1 2 . The arm 20 is rotated by the rotation of the motor 8 described above. The proximal end side of the second arm 29 is supported by a distal end side of the first arm 20 by a bearing (not shown). The second arm 2 is connected to the first pulley on the distal end side of the first arm 20, and the second pulley 27 is wound on the second arm. Further, a second pulley B19 is provided inside the proximal end side of the first arm 20, and the belt 26 is also wound therein. The second arm driving pulley B 1 9 is connected to the second arm driving pulley C 1 3 column provided inside the casing 41 coaxially therewith. Further, the second arm driving pulley C1 3 is the belt 10 described above. Therefore, the second arm 29 is rotated by the above-described electric rotation. The proximal end side of the third arm 37 is supported by the distal end side of the second arm 29 by a bearing (not shown). The third arm 3 7 is connected to the first pulley 333 that is provided on the distal end side of the inside of the second arm 29, and is wound by the third arm driving pulley A3. Further, a third pulley B28 is provided inside the proximal end side of the second arm 29, and the belt 31 is also wound therein. The third arm driving pulley B28 is coaxial with the third arm driving C2 1 provided inside the distal end side of the first arm 20, and is connected by a rod-shaped strut. Further, the third arm driving slide is wound around the belt 24. Moreover, the third arm driving pulley ΕΠ7 which is provided in the first arm 20 is also wound around the belt 24. Therefore, the end side of the first rotatable foundation is a two-armed arm drive with a belt arm driving mode, and the side of the rotary rotatable base mounted on the upper machine 6 in a rod-shaped branch is a three-leg arm drive with a belt arm drive. In the same manner, the third end arm of the driving pulley C21, the third arm -11 - 200849450, the driving pulley D 1 7 is coaxial with the same, and the third arm driving for the inside of the casing 4 1 The pulley E 1 5 is connected by a rod-shaped pillar. Further, the belt 11 is mounted on the third arm driving pulley 15 5 . Therefore, the third arm 37 is rotated by the rotation of the motor 7. According to the above configuration, each of the arms (the first arm 20, the second arm 29, and the third arm 3 7) of the arm portion 92 is rotated by the motor on each of the base ends. The linear motion mechanism unit 93 will be described. The linear motion mechanism unit 93 is a mechanism that drives the end operation device 94 while being precisely guided toward the extending direction of the third spiral arm 37. The end operating device 94 is fixed to one end of the end effector mounting portion 40. The other end of the end effector mounting portion 40 is connected to a guide member 39 that is accommodated in the extending direction of the third arm. The guide member 39 is, for example, a well-known linear guide, which is composed of a guide member and a pulley block 35 guided by the guided member. Further, on the side of the third arm 37, as shown in Fig. 2(b), a long opening 42 is provided in the extending direction. The other end of the end effector loading portion 40 is connected and fixed to the pulley block 35 via the opening 42 on the side. The opening 42 may be provided on the side surface or the upper surface of the third arm 37, but the dust from the movable portion of the guide member 39 or the following linear motion mechanism driving pulley or the like is scattered from the opening, and thus is minimized. The opening is small and the position away from the substrate (moving object) is preferable. Further, the end effector mounting portion 40 may be integrally formed with the end operating device 94. On the other hand, inside the front end side of the third arm 37, a linear drive -12-200849450 structure drive pulley A3 8 is provided. Further, a linear motion mechanism driving pulley B34 is provided inside the proximal end side of the third arm 37. A skin 36 is wound between the pulleys. The above-described guide member 39 is provided in a space between the belts 36 which are linearly pulled up. Further, the end effector mounting portion 40 is connected to the pulley block 35 as described above, and is also linearly coupled to the belt 36. The linear drive mechanism pulley B34 is coaxial with the pulley B34, and the rod-shaped support is coupled to the linear drive pulley C32 which is provided on the distal end side of the second swing arm 29. The belt 30 is wound around the linear motion drive pulley C32. Further, a linear motion mechanism driving pulley D27 is provided on the proximal end side of the second arm 29, and the belt 30 is also wound around it. Further, the linear motion mechanism movable pulley D 2 7 is coaxial with the pulley D 2 , and is connected to the linear motion mechanism driving slide E22 which is provided on the distal end side of the first spiral arm 20 . A belt 25 is wound around the linear motion drive pulley E22. Further, the base end side of the first arm 20 is provided with a linear motion mechanism driving pulley F 1 8 , and the belt 25 is also wound around it. The linear motion mechanism driving pulley F1 8 is a coaxial type, and is connected to the linear motion mechanism driving pulley G 1 4 provided in the casing 4 1 by a rod-shaped pillar. The belt 9 is mounted on the slide G14 of the linear motion mechanism. Therefore, the end operating device loading unit 40 end operating device 94 is pulled by the belt by the rotation of the motor 5, and is guided to the guide member 3, and linearly toward the extending direction of the third arm 37. Move with precision. As described above, in the present invention, the guide member of the linear motion mechanism portion 93 is housed in the third spiral arm 37. Moreover, the end belt operating portion loading portion 40 and the end portion of the linear belt guide portion are guided by the guide member 39 with the inner belt and the inner wheel and the 36-39-200849450. The pulley and the belt portion that are driven by the device 94 are housed in the swing arm, and the motor for driving the linear motion mechanism that drives the motor is received in the main body portion 91. A supplementary explanation regarding the above configuration is performed. In the present embodiment, it is possible to suppress the occurrence of dust which is disused in the manufacture of semiconductors, and thus, as described above, each of the spiral arms is closed by the lid portion. Thereby, the guide member 39 and the like are also housed inside the third arm 37, but it is not always required to be accommodated. In addition, for example, the third arm driving pulley B28 and the linear motion driving pulley D27 are coaxial with each other on the proximal end side of the second arm 29, and thus the third arm driving pulley B28 and the third are coupled. The rod-shaped pillar of the pulley driving pulley C21 and the rod-shaped pillar that connects the linear motion mechanism driving pulley D27 and the linear motion mechanism driving pulley E22 are of course coaxial, but these pillars are connected to the linear motion mechanism driving pulley. D27 and a rod-shaped stay of the linear motion-drive pulley E22 are formed in a cylindrical shape, and a rod-shaped support that connects the third arm drive pulley B 28 and the third arm drive pulley C 2 1 is inserted into the rod-shaped support. Further, each of the pillars is supported by a rotary bearing (not shown). The same configuration of the base end portion of each of the arms is also the structure described above. Further, in the present embodiment, the configurations of the first to third arm and the linear motion mechanism mounted on the third arm will be described, but the number of the arms is not limited thereto, and the linear motion mechanism is driven. The electric motor 5 is an example of being housed in the main body portion 91, and may be provided, for example, inside the spiral arm such as the inner end side of the first arm 20. When the 14-200849450 linear motion mechanism of the third arm 3 7 of the foremost arm is formed in a small size, it is provided inside the arm other than the arm of the distal end of the linear motion mechanism. Also. However, since the cable of the motor 5 is present in the arm of the movable portion as described below, the risk of cable breakage is increased. The operation of the transport robot 90 of the present invention described above will be described with reference to Figs. 3 and 4 . The motion of the control robot is the above controller. Hereinafter, the control of the controller will be described. First, the third arm #7 is rotated about the second arm 29 without changing the relative position of the end operating device 94 to the third arm 37, that is, the operation shown in FIG. Explain. In this case, the linear motion mechanism drive pulley C32 and the third arm drive pulley A3 3 may be rotated in the same direction, at the same speed, and at the same angle, so that the motor 5 and the motor 7 may be operated. According to this operation, as shown in Fig. 3, the movable member (the end effector mounting portion 40 and the end operating device 94) on the third arm 37 is maintained in relation to the third arm 37. The direction of the third arm 37 can be changed in the front and rear positions. Further, in the state in which the arms are maintained, the third arm 3 7 is moved to move, that is, the operation shown in Fig. 4 is explained. At this time, the first arm 2 〇, the second arm 2 9 , and the third arm 3 7 are not operated, that is, the rotating motors 6 , 7 , and 8 are not rotated, and the posture states of the arms are maintained ( Under the posture, by rotating the linear motion mechanism driving pulley C3 2 (rotary motor 5), the moving member on the third spiral arm 37 can be moved forward and backward with respect to the third spiral arm 37. In addition, the number of teeth or the diameter of the pulley is not necessarily the same, and the rotation of the pulley 3 2 and the pulley 33 is the same for the linear motion drive pulley C32 and the third radial drive pulley A3 3 . The above action can be established if the direction is the same as the rotation speed and the rotation angle. Further, the rotation operation of the arm 92 is performed (the third arm 37 is not moved by the posture of the arm and the linear motion mechanism, and the main body portion 9 1 is rotated for all of the operations) or the expansion and contraction operation (expansion of each rotation) The operation of the angles at which the arms are formed at the same time is the same as the conventional control method. Therefore, the point is not particularly described. However, the linear motion mechanism driving pulley C32 of the linear motion mechanism portion 93 is as described above. It is necessary to coordinate the rotation of the third arm driving pulley A3 3 that drives the third arm 37. When the transfer robot 90 and the controller ' of the present invention described above are used, for example, when the end effector 94 is loaded with a photomask and transported, the gap between the cartridge and the photomask that accommodates it is extremely narrow, and the above-described direct motion The function of the mechanism department does not interfere with the case and the mask and can carry the mask. Further, according to the present invention, the conveyed object can be conveyed at the conveyance speed of the conventional connecting rod robot. When the conveyed object is to be accurately conveyed, the straight moving mechanism portion can be used to carry the conveyed object to the target portion with high precision. . Further, according to the present invention, the components (belts or pulleys) for driving the linear motion mechanism portion can be housed inside the spiral arm, and thus the dust is scattered around. Further, the configuration of the linear motion mechanism portion according to the present invention does not have a large configuration of the linear motion mechanism portion as in the prior art, and therefore the load on the drive portion is also small. , can be made into a control -16- 200849450 excellent robot. Further, when the motor of the linear motion mechanism unit is housed inside the main body portion, the cable does not cover the arm portion. That is, in the movable portion such as the arm, there is no cable for driving the linear motion mechanism portion, so that reliability can be improved on the cable breakage line. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side sectional view showing a transfer robot of the present invention. Fig. 2 is a front view (a) and a side view (b) showing the transfer robot of the present invention. Fig. 3 is an explanatory view showing a state in which only the third arm of the transport robot of the present invention is rotated. Fig. 4 is an explanatory view showing a state in which only the linear motion mechanism of the transport robot of the present invention is operated. [Description of main component symbols] 1, 2, 3, 4: Motor output shaft pulleys 5, 6, 7, 8: Motors 9, 10, 11, 12, 24, 25, 26, 30, 31, 36: Belt
1 3 :第2旋臂驅動用滑輪C 1 4 :驅動用滑輪g 1 5 :第3旋臂驅動用滑輪E 1 6 :第1旋臂驅動用滑輪 1 7 :第3旋臂驅動用滑輪D -17- 2008494501 3 : 2nd arm driving pulley C 1 4 : Driving pulley g 1 5 : 3rd arm driving pulley E 1 6 : 1st arm driving pulley 1 7 : 3rd arm driving pulley D -17- 200849450
1 8 :直動機構驅動用滑輪F1 8 : Pulley F for direct drive mechanism drive
1 9 :第2旋臂驅動用滑輪B 2 0 :第1旋臂1 9 : 2nd arm driving pulley B 2 0 : 1st arm
2 1 :第3旋臂驅動用滑輪C2 1 : 3rd arm drive pulley C
22 :直動機構驅動用滑輪E22: Pulley E driving pulley E
23 :第2旋臂驅動用滑輪A 27 :直動機構驅動用滑輪D 2 8 :第3旋臂驅動用滑輪B 2 9 :第2旋臂 3 2 :直動機構驅動用滑輪C 3 3 :第3旋臂驅動用滑輪A 3 4 :直動機構驅動用滑輪B 3 5 :滑輪組 3 7 :第3旋臂 3 8 :直動機構驅動用滑輪A 3 9 :導向導件 40 :末端操作裝置裝載部 41 :機殼 42 :開口 90 :搬運機器人 9 1 :本體部 92 :旋臂部 9 3 :直動機構部 94 :末端操作裝置 -18 200849450 95 :基板（搬運物） -1923: The second arm driving pulley A 27 : The linear motion driving pulley D 2 8 : The third arm driving pulley B 2 9 : The second arm 3 2 : The linear motion driving pulley C 3 3 : Third arm driving pulley A 3 4 : Linear motion mechanism driving pulley B 3 5 : Pulley unit 3 7 : Third arm 3 8 : Linear motion mechanism driving pulley A 3 9 : Guide member 40 : End operating device Loading unit 41: casing 42: opening 90: conveying robot 9 1 : main body portion 92 : arm portion 9 3 : linear motion mechanism portion 94 : end operating device -18 200849450 95 : substrate (moving object) -19