TWI750741B - Industrial robot - Google Patents

Industrial robot Download PDF

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Publication number
TWI750741B
TWI750741B TW109124605A TW109124605A TWI750741B TW I750741 B TWI750741 B TW I750741B TW 109124605 A TW109124605 A TW 109124605A TW 109124605 A TW109124605 A TW 109124605A TW I750741 B TWI750741 B TW I750741B
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arm
rotation center
center
hand
right direction
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TW109124605A
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Chinese (zh)
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TW202120278A (en
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細川正己
小林敏之
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日商日本電產三協股份有限公司
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Publication of TWI750741B publication Critical patent/TWI750741B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/02Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041Cylindrical coordinate type
    • B25J9/042Cylindrical coordinate type comprising an articulated arm
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00Manipulators not otherwise provided for
    • B25J11/0095Manipulators transporting wafers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/0014Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736Loading to or unloading from a conveyor
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742Mechanical parts of transfer devices
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766Mechanical parts of transfer devices

Abstract

本發明提供一種產業用機器人,包括具有以在左右方向上空開間隔的狀態配置的兩根支柱的門型的門型框架,即便可將搭載在手的搬送對象物在前後方向上搬送至離門型框架更遠的位置為止,也可以防止臂與支柱的干涉。在產業用機器人(1)中,若將第一臂部(10)相對於臂支撐部(5)的轉動中心設為轉動中心(C1),將第二臂部(11)相對於第一臂部(10)的轉動中心設為轉動中心(C2),將兩根支柱(16)之間的左右方向的中心位置設為支柱間中心(CL1),則當第一臂部(10)相對於臂支撐部(5)轉動且轉動中心(C2)在前後方向上配置在與轉動中心(C1)相同的位置時,轉動中心(C2)配置在與支柱間中心(CL1)相比更靠左右方向的一側的位置,另一方面,轉動中心(C1)配置在與支柱間中心(CL1)相比更靠左右方向的另一側的位置。The present invention provides an industrial robot including a portal frame having two pillars spaced apart in the left-right direction and capable of transporting an object to be carried by the hand in the front-rear direction to the door-to-door It is also possible to prevent the arm and the strut from interfering with the frame to a position farther away. In the industrial robot (1), if the rotation center of the first arm part (10) relative to the arm support part (5) is the rotation center (C1), the second arm part (11) is relative to the first arm The center of rotation of the part (10) is set as the center of rotation (C2), and the center position in the left-right direction between the two struts (16) is set as the center between the struts (CL1), when the first arm (10) is relative to the When the arm support part (5) is rotated and the rotation center (C2) is arranged at the same position as the rotation center (C1) in the front-rear direction, the rotation center (C2) is arranged in the left-right direction rather than the center (CL1) between the pillars On the other hand, the rotation center ( C1 ) is arranged at the other side in the left-right direction than the center ( CL1 ) between the struts.

Description

產業用機器人industrial robot

本發明關於一種搬送半導體晶片等搬送對象物的產業用機器人。The present invention relates to an industrial robot that transports a transport object such as a semiconductor wafer.

以往,搬送半導體晶片的搬送裝置已為人所知(例如,參照專利文獻1)。專利文獻1中記載的搬送裝置包括門型框架、及可升降地保持在門型框架的移動體。門型框架包括以在左右方向上空開間隔的狀態配置的兩個支柱、及將兩個支柱的上下的兩端部彼此連接的兩個連結部。移動體包括作為多關節臂的搬送臂、可轉動地連結在搬送臂的前端側的手(末端執行器)、以及搬送臂的基端側可轉動地連結的基座。Conventionally, a transfer apparatus for transferring semiconductor wafers has been known (for example, refer to Patent Document 1). The conveying device described in Patent Document 1 includes a portal frame and a movable body held by the portal frame so as to be able to be raised and lowered. The portal frame includes two struts that are spaced apart from each other in the left-right direction, and two connecting portions that connect upper and lower ends of the two struts to each other. The moving body includes a transfer arm as a multi-joint arm, a hand (end effector) rotatably coupled to the distal end side of the transfer arm, and a base rotatably coupled to the proximal end side of the transfer arm.

在專利文獻1中記載的搬送裝置中,搬送臂包含供基端側可轉動地連結在基座的第一臂部、及供基端側可轉動地連結在第一臂部的前端側的第二臂部。手可轉動地連結在第二臂部的前端側。在手搭載半導體晶片。基座可升降地安裝在兩個支柱。移動體在左右方向上配置在兩個支柱之間。在專利文獻1中記載的搬送裝置中,當搬送半導體晶片時,臂進行伸縮,以使手以手的前端朝向前後方向的一側的固定的姿勢在前後方向上進行直線移動。 [現有技術文獻] [專利文獻]In the transfer device described in Patent Document 1, the transfer arm includes a first arm portion rotatably coupled to the base at the proximal end side, and a first arm portion rotatably coupled to the distal end side of the first arm portion at the proximal end side. Two arms. The hand is rotatably coupled to the front end side of the second arm portion. Mount a semiconductor wafer by hand. The base is liftably mounted on two columns. The moving body is arranged between the two struts in the left-right direction. In the transfer device described in Patent Document 1, when transferring a semiconductor wafer, the arm is extended and retracted so that the hand moves linearly in the front-rear direction with a fixed posture with the tip of the hand facing the front-rear direction side. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開2013-118229號公報[Patent Document 1] Japanese Patent Laid-Open No. 2013-118229

[發明所欲解決之課題] 在如專利文獻1中記載的搬送裝置那樣的搬送裝置中,若使第一臂部及第二臂部的長度變長,則可使搬送臂伸長時的搬送臂的前後方向的長度變長,因此可將搭載在手的半導體晶片在前後方向上搬送至離門型框架更遠的位置為止。另一方面,在所述搬送裝置的情況下,若使第一臂部及第二臂部的長度變長,則當伸長的搬送臂收縮時,產生第一臂部與第二臂部的連結部分、或第二臂部與手的連結部分干涉門型框架的支柱的擔憂。[The problem to be solved by the invention] In a transfer device such as the transfer device described in Patent Document 1, if the lengths of the first arm portion and the second arm portion are increased, the length of the transfer arm in the front-rear direction when the transfer arm is extended can be increased. Therefore, the semiconductor wafer mounted on the hand can be conveyed to a position farther from the gate frame in the front-rear direction. On the other hand, in the case of the above-mentioned conveying device, if the lengths of the first arm portion and the second arm portion are increased, when the extended conveying arm contracts, the connection between the first arm portion and the second arm portion occurs. There is a concern that part, or the connecting part of the second arm and the hand, interferes with the pillars of the portal frame.

因此,本發明的課題在於提供一種產業用機器人,包括具有以在左右方向上空開間隔的狀態配置的兩根支柱的門型的門型框架,即便可將搭載在手的搬送對象物在前後方向上搬送至離門型框架更遠的位置為止,也可以防止臂與支柱的干涉。 [解決問題的技術手段]Therefore, an object of the present invention is to provide an industrial robot including a portal frame having two pillars spaced apart from each other in the left-right direction, even if the object to be transported in the hand can be carried in the front-rear direction. It is also possible to prevent the interference between the arm and the column by transferring it up to a position farther from the door frame. [Technical means to solve the problem]

為了解決所述課題,本發明的產業用機器人的特徵在於包括:手,搭載搬送對象物;臂,手可轉動地連結在所述臂的前端側,並且在水平方向上伸縮;臂支撐部,臂的基端側可轉動地連結在臂支撐部;以及門型的門型框架,可升降地保持臂支撐部;臂包括:第一臂部,基端側可轉動地連結在臂支撐部;以及第二臂部,基端側可轉動地連結在第一臂部的前端側,並且供手可轉動地連結在前端側;若將水平方向中的規定的方向設為左右方向,將與上下方向及左右方向正交的方向設為前後方向,則門型框架包括以在左右方向上空開間隔的狀態配置的兩根支柱,手及臂在左右方向上配置在兩根支柱之間,若將第一臂部相對於臂支撐部的轉動中心設為第一轉動中心,將第二臂部相對於第一臂部的轉動中心設為第二轉動中心,將手相對於第二臂部的轉動中心設為第三轉動中心,將左右方向上的兩根支柱之間的中心位置設為支柱間中心,則第一轉動中心與第二轉動中心的距離、和第二轉動中心與第三轉動中心的距離變成相等,當第一臂部相對於臂支撐部轉動且第二轉動中心在前後方向上配置在與第一轉動中心相同的位置時,第二轉動中心配置在與支柱間中心相比更靠左右方向的一側的位置,第一轉動中心配置在與支柱間中心相比更靠左右方向的另一側的位置。In order to solve the above-mentioned problems, the industrial robot of the present invention is characterized by comprising: a hand on which an object to be conveyed is mounted; an arm, the hand being rotatably connected to the front end side of the arm and extending and retracting in the horizontal direction; and an arm support portion, The base end side of the arm is rotatably connected to the arm support portion; and a portal-shaped door frame holds the arm support portion in a liftable manner; the arm includes: a first arm portion, the base end side is rotatably connected to the arm support portion; and the second arm part, the base end side is rotatably connected to the front end side of the first arm part, and the hand is rotatably connected to the front end side; The direction perpendicular to the left-right direction is defined as the front-rear direction, and the portal frame includes two pillars arranged in a spaced state in the left-right direction, and the hand and the arm are arranged between the two pillars in the left-right direction. The rotation center of the first arm portion relative to the arm support portion is referred to as the first rotation center, the rotation center of the second arm portion relative to the first arm portion is referred to as the second rotation center, and the rotation center of the hand relative to the second arm portion is referred to as the second rotation center. Set as the third rotation center, and set the center position between the two pillars in the left-right direction as the center between pillars, the distance between the first rotation center and the second rotation center, and the distance between the second rotation center and the third rotation center. When the distance becomes equal, when the first arm portion rotates relative to the arm support portion and the second rotation center is arranged at the same position as the first rotation center in the front-rear direction, the second rotation center is arranged closer to the center between the struts. As for the position on one side in the left-right direction, the first rotation center is arranged on the other side in the left-right direction than the center between the struts.

在本發明的產業用機器人中,若將第一臂部相對於臂支撐部的轉動中心設為第一轉動中心,將第二臂部相對於第一臂部的轉動中心設為第二轉動中心,將手相對於第二臂部的轉動中心設為第三轉動中心,則第一轉動中心與第二轉動中心的距離、和第二轉動中心與第三轉動中心的距離變成相等。另外,在本發明中,若將左右方向上的兩根支柱之間的中心位置設為支柱間中心,則當第一臂部相對於臂支撐部轉動且第二轉動中心在前後方向上配置在與第一轉動中心相同的位置時,第二轉動中心配置在與支柱間中心相比更靠左右方向的一側的位置,另一方面,第一轉動中心配置在與支柱間中心相比更靠左右方向的另一側的位置。In the industrial robot of the present invention, the rotation center of the first arm portion relative to the arm support portion is referred to as the first rotation center, and the rotation center of the second arm portion relative to the first arm portion is referred to as the second rotation center , and set the rotation center of the hand relative to the second arm as the third rotation center, the distance between the first rotation center and the second rotation center and the distance between the second rotation center and the third rotation center become equal. In addition, in the present invention, if the center position between the two struts in the left-right direction is defined as the center between struts, when the first arm portion rotates with respect to the arm support portion, the second rotation center is arranged in the front-rear direction at When the position is the same as the first rotation center, the second rotation center is arranged on the left-right side of the center between the struts, while the first rotation center is arranged closer than the center between the struts. The position of the other side in the left and right direction.

因此,在本發明中,即便使第一臂部及第二臂部的長度變長,使臂伸長時的臂的前後方向的長度變長,當伸長的臂收縮時,也可以防止第一臂部與第二臂部的連結部分、或第二臂部與手的連結部分干涉支柱。因此,在本發明中,即便可將搭載在手的搬送對象物在前後方向上搬送至離門型框架更遠的位置為止,也可以防止臂與支柱的干涉。Therefore, in the present invention, even if the lengths of the first arm portion and the second arm portion are increased, and the length of the arm in the front-rear direction when the arm is extended is increased, the first arm can be prevented from being contracted when the extended arm is contracted. The connecting portion of the arm portion and the second arm portion or the connecting portion of the second arm portion and the hand interferes with the strut. Therefore, in the present invention, even if the object to be conveyed mounted on the hand can be conveyed to a position farther from the portal frame in the front-rear direction, the interference between the arm and the support can be prevented.

在本發明中,優選手在收縮狀態的臂伸長時,以手的前端朝向前後方向的一側的固定的姿勢朝前後方向的一側進行直線移動,若將門型框架的前後方向的中心位置設為框架中心,則第一轉動中心配置在與框架中心相比更靠前後方向的另一側的位置。若如此構成,則例如可使搭載在手的搬送對象物及手在前後方向上退避至離搬送對象物被產業用機器人搬送的規定的裝置更遠的位置為止。In the present invention, it is preferable that when the arm in the retracted state is extended, the hand moves linearly to the front-rear direction side with the front end of the hand facing the front-rear direction side. As the frame center, the first rotation center is arranged on the other side in the front-rear direction from the frame center. With this configuration, for example, the transport object mounted on the hand and the hand can be retracted in the front-rear direction to a position farther from a predetermined device to which the transport object is transported by the industrial robot.

在本發明中,優選手的前後方向的長度比第一臂部的長度及第二臂部的長度長。若如此構成,則例如當在搬送對象物被產業用機器人搬送的規定的處理裝置的蓋形成有手可進出,但臂無法進出的大小的開口部時,可防止處理裝置的蓋與臂的干涉,並將搭載在手的搬送對象物搬送至處理裝置的更裡側為止。In this invention, it is preferable that the length of the front-back direction of a hand is longer than the length of a 1st arm part and the length of a 2nd arm part. With this configuration, for example, when the cover of a predetermined processing apparatus in which the object to be conveyed is conveyed by an industrial robot is formed with an opening of a size that allows the hand to enter and exit, but the arm cannot enter and exit, interference between the cover of the processing apparatus and the arm can be prevented. , and transport the object to be transported on the hand to the further back side of the processing device.

在本發明中,優選產業用機器人包括以可實現將上下方向作為轉動的軸方向的門型框架的轉動的方式,載置門型框架的基底構件,手在臂伸縮時,以手的前端朝向前後方向的一側的固定的姿勢在前後方向上進行直線移動,若將門型框架相對於基底構件的轉動中心設為第四轉動中心,將手的左右方向的中心位置設為手中心,則第一轉動中心配置在左右方向上與第四轉動中心錯開的位置,手中心配置在左右方向上與第四轉動中心相同的位置。In the present invention, it is preferable that the industrial robot includes a base member on which the portal frame is placed so that the portal frame can be rotated with the vertical direction as the axis direction of the rotation, and when the arm is extended and retracted, the front end of the hand faces The fixed posture of one side in the front-rear direction moves linearly in the front-rear direction. If the rotation center of the door frame relative to the base member is the fourth rotation center, and the center position of the hand in the left-right direction is the hand center, the first The first rotation center is arranged at a position shifted from the fourth rotation center in the left-right direction, and the hand center is arranged at the same position as the fourth rotation center in the left-right direction.

若如此構成,則手中心配置在左右方向上與第四轉動中心相同的位置,因此即便第一轉動中心配置在左右方向上與第四轉動中心錯開的位置,例如和手中心配置在左右方向上與第一轉動中心相同的位置的情況相比,對搬送對象物進行搬送時的產業用機器人的控制也變得容易。 [發明的效果]With this configuration, the center of the hand is arranged at the same position as the fourth rotation center in the left-right direction. Therefore, even if the first rotation center is arranged at a position shifted from the fourth rotation center in the left-right direction, for example, the center of the hand is arranged in the left-right direction. Compared with the case where the first rotation center is at the same position, the control of the industrial robot at the time of conveying the conveying object becomes easier. [Effect of invention]

如上所述,在本發明中,在包括具有以在左右方向上空開間隔的狀態配置的兩根支柱的門型的門型框架的產業用機器人中,即便可將搭載在手的搬送對象物在前後方向上搬送至離門型框架更遠的位置為止,也可以防止臂與支柱的干涉。As described above, in the present invention, in the industrial robot including the portal frame having the two pillars spaced apart from each other in the left-right direction, even if the object to be transported in the hand can be It is also possible to prevent the interference between the arm and the column even when it is conveyed to a position farther from the door frame in the front-rear direction.

以下,一邊參照圖式一邊對本發明的實施方式進行說明。Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(產業用機器人的構成) 圖1是本發明的實施方式的產業用機器人1的立體圖。圖2是圖1中所示的產業用機器人1的平面圖。圖3是圖1中所示的產業用機器人1的臂4收縮的狀態的平面圖。圖4是圖1中所示的產業用機器人1的臂4的伸縮動作的中途的狀態的平面圖。(Configuration of Industrial Robot) FIG. 1 is a perspective view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a plan view of the industrial robot 1 shown in FIG. 1 . FIG. 3 is a plan view of a state in which the arm 4 of the industrial robot 1 shown in FIG. 1 is contracted. FIG. 4 is a plan view of a state in the middle of a telescopic operation of the arm 4 of the industrial robot 1 shown in FIG. 1 .

本形態的產業用機器人1(以下,設為“機器人1”)是用於搬送作為搬送對象物的半導體晶片2(以下,設為“晶片2”)的水平多關節型的機器人。機器人1例如從對晶片2進行規定的處理的處理裝置(省略圖示)搬出晶片2、及朝處理裝置搬入晶片2。晶片2形成為圓板狀。The industrial robot 1 (hereinafter, referred to as "robot 1") of the present embodiment is a horizontal articulated robot for transporting a semiconductor wafer 2 (hereinafter, referred to as "wafer 2") as a transport object. For example, the robot 1 unloads the wafer 2 from a processing apparatus (not shown) that performs predetermined processing on the wafer 2 , and carries the wafer 2 into the processing apparatus. The wafer 2 is formed in a disk shape.

機器人1包括:手3,搭載晶片2;臂4,手3可轉動地連結在所述臂的前端側,並且在水平方向上伸縮;臂支撐部5,臂4的基端側可轉動地連結在臂支撐部5;門型的門型框架6,可升降地保持臂支撐部5;以及基底構件7,以可實現將上下方向(圖1等的Z方向)作為轉動的軸方向的門型框架6的轉動的方式,載置門型框架6。另外,機器人1包括:驅動機構(省略圖示),使臂4相對於臂支撐部5伸縮,並且使手3相對於臂4轉動;升降機構(省略圖示),使臂支撐部5相對於門型框架6升降;以及轉動機構(省略圖示),使門型框架6相對於基底構件7轉動。The robot 1 includes: a hand 3 on which a wafer 2 is mounted; an arm 4 rotatably connected to the front end side of the arm and extending and contracting in the horizontal direction; and an arm support 5 rotatably connected to the base end side of the arm 4 The arm support part 5; the gate-shaped gate frame 6 hold the arm support part 5 in a liftable manner; The door-shaped frame 6 is placed in the manner of the rotation of the frame 6 . In addition, the robot 1 includes a drive mechanism (not shown) for extending and contracting the arm 4 with respect to the arm support portion 5 and rotating the hand 3 with respect to the arm 4 , and an elevating mechanism (not shown) for causing the arm support portion 5 to rotate with respect to the arm 4 . The portal frame 6 is raised and lowered; and a turning mechanism (not shown) rotates the portal frame 6 relative to the base member 7 .

臂4包含第一臂部10與第二臂部11。第一臂部10的基端側可轉動地連結在臂支撐部5。第二臂部11的基端側可轉動地連結在第一臂部10的前端側。手3可轉動地連結在第二臂部11的前端側。手3包含搭載晶片2的手叉部12、及連結在臂4的手基部13。The arm 4 includes a first arm portion 10 and a second arm portion 11 . The proximal end side of the first arm portion 10 is rotatably coupled to the arm support portion 5 . The proximal end side of the second arm portion 11 is rotatably coupled to the distal end side of the first arm portion 10 . The hand 3 is rotatably coupled to the front end side of the second arm portion 11 . The hand 3 includes a hand fork 12 on which the wafer 2 is mounted, and a hand base 13 connected to the arm 4 .

手叉部12形成為雙叉狀,手3整體形成為大致Y形狀。手叉部12的基端部固定在手基部13的前端部。手基部13的基端側可轉動地連結在第二臂部11的前端側。手3、第二臂部11及第一臂部10從上側起以此順序配置。臂支撐部5形成為空心的塊狀。第一臂部10的基端側可轉動地連結在臂支撐部5的上表面。The hand fork portion 12 is formed in a bifurcated shape, and the entire hand 3 is formed in a substantially Y shape. The base end portion of the hand fork portion 12 is fixed to the front end portion of the hand base portion 13 . The proximal end side of the hand base portion 13 is rotatably coupled to the distal end side of the second arm portion 11 . The hand 3 , the second arm portion 11 and the first arm portion 10 are arranged in this order from the upper side. The arm support portion 5 is formed in a hollow block shape. The base end side of the first arm portion 10 is rotatably coupled to the upper surface of the arm support portion 5 .

如上所述,機器人1包括使臂4相對於臂支撐部5伸縮,並且使手3相對於臂4轉動的驅動機構。驅動機構包括配置在臂支撐部5的內部的馬達、及將馬達的動力傳達至臂4及手3的動力傳達機構。馬達配置在臂支撐部5與第一臂部10的連結部分的下側。動力傳達機構例如包括配置在臂支撐部5的內部的減速機、以及配置在臂4的內部的帶(belt)及滑輪。As described above, the robot 1 includes a drive mechanism that extends and contracts the arm 4 with respect to the arm support portion 5 and rotates the hand 3 with respect to the arm 4 . The drive mechanism includes a motor arranged inside the arm support portion 5 , and a power transmission mechanism that transmits the power of the motor to the arm 4 and the hand 3 . The motor is arranged on the lower side of the connecting portion of the arm support portion 5 and the first arm portion 10 . The power transmission mechanism includes, for example, a reduction gear arranged inside the arm support portion 5 , and a belt and a pulley arranged inside the arm 4 .

驅動機構使第一臂部10相對於臂支撐部5轉動、且使第二臂部11相對於第一臂部10轉動,並且使手3相對於第二臂部11轉動。另外,驅動機構使臂4伸縮,以使手3在朝向固定方向的狀態下進行直線移動。The drive mechanism rotates the first arm portion 10 with respect to the arm support portion 5 , rotates the second arm portion 11 with respect to the first arm portion 10 , and rotates the hand 3 with respect to the second arm portion 11 . In addition, the drive mechanism expands and contracts the arm 4 so that the hand 3 moves linearly with the hand 3 facing in a fixed direction.

在以下的說明中,將水平方向中的手3的往返移動方向(圖1等的X方向)設為前後方向,將與前後方向及上下方向正交的圖1等的Y方向設為左右方向。另外,在以下的說明中,將作為前後方向的一側的圖1等的X1方向側設為“前”側,將作為前後方向的另一側的圖1等的X2方向側設為“後”側,將作為左右方向的一側的圖1等的Y2方向側設為“左”側,將作為左右方向的另一側的圖1等的Y1方向側設為“右”側。In the following description, the reciprocating movement direction of the hand 3 in the horizontal direction (X direction in FIG. 1 and the like) is referred to as the front-rear direction, and the Y direction in FIG. 1 and the like orthogonal to the front-rear direction and the vertical direction is referred to as the left-right direction . In addition, in the following description, the side in the X1 direction of FIG. 1 and the like, which is one side in the front-rear direction, is referred to as the “front” side, and the side in the X2 direction of FIG. 1 and the like, which is the other side of the front-rear direction, is referred to as the “rear” side. ” side, the Y2 direction side in FIG. 1 etc., which is one side in the left-right direction, is referred to as the “left” side, and the Y1 direction side in FIG.

在本形態中,手3在臂4伸縮時,以手3的前端(即,手叉部12的前端)朝向前側的固定的姿勢在前後方向上進行直線移動。具體而言,手3在收縮狀態的臂4(參照圖3)伸長時,以手3的前端朝向前側的固定的姿勢朝前側進行直線移動,在伸長狀態的手3(參照圖2)收縮時,以手3的前端朝向前側的固定的姿勢朝後側進行直線移動。In this aspect, when the arm 4 is extended and retracted, the hand 3 moves linearly in the front-rear direction with the front end of the hand 3 (ie, the front end of the hand fork portion 12 ) facing the front side in a fixed posture. Specifically, when the arm 4 (refer to FIG. 3 ) in the retracted state is extended, the hand 3 moves linearly toward the front side in a fixed posture with the front end of the hand 3 facing the front side, and when the hand 3 in the extended state (refer to FIG. 2 ) is retracted , and the hand 3 moves linearly toward the rear in a fixed posture with the front end of the hand 3 facing the front.

另外,在圖2中圖示臂4最伸長且手3移動至最前側為止的狀態。對晶片2進行規定的處理的處理裝置配置在機器人1的前側,在圖2中所示的狀態下,手3配置在處理裝置中。另外,在圖3中圖示臂4收縮且手3移動至最後側為止的狀態。在本形態中,在此狀態下,門型框架6相對於基底構件7轉動。即,在此狀態下,機器人1回旋。另外,在此狀態時,機器人1的回旋半徑變成最小。In addition, in FIG. 2, the state until the arm 4 is extended most and the hand 3 is moved to the frontmost side is shown. The processing apparatus which performs predetermined processing on the wafer 2 is arrange|positioned at the front side of the robot 1, and the hand 3 is arrange|positioned in the processing apparatus in the state shown in FIG. In addition, in FIG. 3, the state until the arm 4 is retracted and the hand 3 is moved to the rearmost side is shown. In this form, in this state, the door frame 6 is rotated relative to the base member 7 . That is, in this state, the robot 1 turns. In addition, in this state, the radius of gyration of the robot 1 becomes the smallest.

門型框架6包括以在左右方向上空開間隔的狀態配置的兩根支柱16。支柱16形成為將上下方向作為長邊方向的柱狀。手3及臂4在左右方向上配置在兩根支柱16之間。另外,門型框架6包括:連結部17,將兩根支柱16的上端部彼此連接;以及框架下部18,固定兩根支柱16的下端部,並且構成門型框架6的下端部。基底構件7構成機器人1的下端部。基底構件7形成為平板狀。框架下部18可轉動地連結在基底構件7的上表面。The portal frame 6 includes two struts 16 arranged in a spaced state in the left-right direction. The support|pillar 16 is formed in the columnar shape which makes an up-down direction the longitudinal direction. The hand 3 and the arm 4 are arranged between the two struts 16 in the left-right direction. In addition, the portal frame 6 includes a connecting portion 17 that connects the upper ends of the two pillars 16 to each other, and a lower frame portion 18 that fixes the lower ends of the two pillars 16 and constitutes the lower end of the portal frame 6 . The base member 7 constitutes the lower end portion of the robot 1 . The base member 7 is formed in a flat plate shape. The frame lower portion 18 is rotatably coupled to the upper surface of the base member 7 .

如上所述,機器人1包括使臂支撐部5相對於門型框架6升降的升降機構。升降機構包括:馬達、將馬達的動力傳達至臂支撐部5的動力傳達機構、以及在上下方向上引導臂支撐部5的引導機構。升降機構的動力傳達機構例如包括配置在支柱16的內部的滾珠螺杆。或者,升降機構的動力傳達機構包括配置在支柱16的內部的帶及滑輪。引導機構包括沿著支柱16配置的導軌、及與導軌卡合併固定在臂支撐部5的導塊。As described above, the robot 1 includes the elevating mechanism that elevates and lowers the arm support portion 5 with respect to the portal frame 6 . The elevating mechanism includes a motor, a power transmission mechanism that transmits the power of the motor to the arm support portion 5 , and a guide mechanism that guides the arm support portion 5 in the up-down direction. The power transmission mechanism of the elevating mechanism includes, for example, a ball screw arranged inside the column 16 . Alternatively, the power transmission mechanism of the elevating mechanism includes a belt and a pulley arranged inside the column 16 . The guide mechanism includes a guide rail arranged along the support column 16 , and a guide block that engages with the guide rail and is fixed to the arm support portion 5 .

另外,如上所述,機器人1包括使門型框架6相對於基底構件7轉動的轉動機構。轉動機構包括馬達、及將馬達的動力傳達至框架下部18的動力傳達機構。轉動機構的動力傳達機構例如包括配置在框架下部18的內部的帶及滑輪。In addition, as described above, the robot 1 includes a turning mechanism for turning the portal frame 6 relative to the base member 7 . The rotation mechanism includes a motor and a power transmission mechanism that transmits the power of the motor to the lower frame portion 18 . The power transmission mechanism of the rotation mechanism includes, for example, a belt and a pulley arranged inside the frame lower portion 18 .

在本形態中,第一臂部10相對於臂支撐部5的轉動中心C1與第二臂部11相對於第一臂部10的轉動中心C2的距離L1(參照圖2)、和手3相對於第二臂部11的轉動中心C3與轉動中心C2的距離L2(參照圖2)變成相等。本形態的轉動中心C1是第一轉動中心,轉動中心C2是第二轉動中心,轉動中心C3是第三轉動中心。In this aspect, the distance L1 (see FIG. 2 ) between the rotation center C1 of the first arm portion 10 with respect to the arm support portion 5 and the rotation center C2 of the second arm portion 11 with respect to the first arm portion 10 is opposite to the hand 3 The distance L2 (see FIG. 2 ) between the rotation center C3 and the rotation center C2 of the second arm portion 11 becomes equal. In this embodiment, the rotation center C1 is the first rotation center, the rotation center C2 is the second rotation center, and the rotation center C3 is the third rotation center.

另外,在本形態中,如上所述,手3在臂4伸縮時,以手3的前端朝向前側的固定的姿勢在前後方向上進行直線移動,因此轉動中心C1與轉動中心C3在左右方向上經常配置在相同的位置。另外,在本形態中,第一臂部10的長度與第二臂部11的長度變成相等。另外,在臂4伸縮時,以手3的前端朝向前側的固定的姿勢在前後方向上進行直線移動的手3的前後方向的長度比第一臂部10的長度及第二臂部11的長度長。In addition, in the present embodiment, as described above, when the arm 4 is extended and retracted, the hand 3 moves linearly in the front-rear direction with the front end of the hand 3 facing the front side, so the rotation center C1 and the rotation center C3 are in the left-right direction. Often configured in the same location. In addition, in this form, the length of the 1st arm part 10 and the length of the 2nd arm part 11 become equal. In addition, when the arm 4 is extended and retracted, the length in the front-rear direction of the hand 3 , which linearly moves in the front-rear direction with the front end of the hand 3 facing the front side, is longer than the length of the first arm portion 10 and the length of the second arm portion 11 . long.

若第一臂部10相對於臂支撐部5轉動,則轉動中心C2如圖4所示,當從上下方向觀察時,在將轉動中心C1作為曲率中心,並且朝左側鼓起的半圓弧狀的假想線VL上穿過。若將左右方向上的兩根支柱16之間的中心位置設為支柱間中心CL1,則如圖4所示,當第一臂部10相對於臂支撐部5轉動且轉動中心C2在前後方向上配置在與轉動中心C1相同的位置時,轉動中心C2配置在與支柱間中心CL1相比更靠左側的位置。即,當轉動中心C2在前後方向上配置在與轉動中心C1相同的位置時,臂4以第一臂部10和第二臂部11的連結部分配置在與支柱間中心CL1相比更靠左側的位置的方式收縮。另外,此時,當從上下方向觀察時,轉動中心C1與轉動中心C3重疊。When the first arm portion 10 is rotated relative to the arm support portion 5, as shown in FIG. 4, the rotation center C2 is in a semi-circular arc shape bulging to the left with the rotation center C1 as the center of curvature when viewed from the up-down direction. traverses on the imaginary line VL. Assuming that the center position between the two pillars 16 in the left-right direction is the center between pillars CL1, as shown in FIG. When arrange|positioned at the same position as the rotation center C1, the rotation center C2 is arrange|positioned at the left side rather than the center CL1 between pillars. That is, when the rotation center C2 is arranged at the same position as the rotation center C1 in the front-rear direction, the arm 4 is arranged on the left side of the center CL1 between the struts at the connecting portion of the first arm portion 10 and the second arm portion 11 position in a way that shrinks. In addition, at this time, the rotation center C1 and the rotation center C3 overlap when viewed from the up-down direction.

另外,轉動中心C1配置在與支柱間中心CL1相比更靠右側的位置。即,臂支撐部5和第一臂部10的連結部分配置在與支柱間中心CL1相比更靠右側的位置。另外,如圖2所示,若將門型框架6的前後方向的中心位置設為框架中心CL2,則轉動中心C1配置在與框架中心CL2相比更靠後側的位置。另外,轉動中心C1在左右方向上,配置在與門型框架6相對於基底構件7的轉動中心C4錯開的位置。具體而言,轉動中心C1配置在與轉動中心C4相比更靠右側的位置。另外,轉動中心C1配置在與轉動中心C4相比更靠後側的位置。轉動中心C4配置在與支柱間中心CL1相比更靠右側的位置,並且配置在與框架中心CL2相比更靠後側的位置。本形態的轉動中心C4是第四轉動中心。Moreover, the rotation center C1 is arrange|positioned at the right side rather than the center CL1 between pillars. That is, the connection part of the arm support part 5 and the 1st arm part 10 is arrange|positioned to the right side rather than the center CL1 between pillars. Moreover, as shown in FIG. 2, if the center position of the front-back direction of the portal frame 6 is set as the frame center CL2, the rotation center C1 is arrange|positioned at the back side rather than the frame center CL2. Moreover, the rotation center C1 is arrange|positioned in the position shifted from the rotation center C4 of the portal frame 6 with respect to the base member 7 in the left-right direction. Specifically, the rotation center C1 is arranged on the right side of the rotation center C4. Moreover, the rotation center C1 is arrange|positioned at the back side rather than the rotation center C4. The rotation center C4 is arranged on the right side of the inter-pillar center CL1, and is arranged on the rear side of the frame center CL2. The rotation center C4 of this aspect is the fourth rotation center.

若將在臂4伸縮時,以手3的前端朝向前側的固定的姿勢在前後方向上進行直線移動的手3的左右方向的中心位置設為手中心CL3,則手中心CL3在左右方向上配置在與轉動中心C4相同的位置。即,在臂4伸縮時,若從上下方向觀察,則手中心CL3在轉動中心C4上穿過。When the arm 4 is extended and retracted, the hand center CL3 is arranged in the left-right direction when the center position in the left-right direction of the hand 3 that moves linearly in the front-rear direction with the front end of the hand 3 facing the front is fixed as the hand center CL3. at the same position as the center of rotation C4. That is, when the arm 4 expands and contracts, the hand center CL3 passes through the rotation center C4 when viewed from the up-down direction.

(本形態的主要效果) 如以上說明那樣,在本形態中,轉動中心C1與轉動中心C2的距離L1、和轉動中心C2與轉動中心C3的距離L2變成相等。另外,在本形態中,當第一臂部10相對於臂支撐部5轉動且轉動中心C2在前後方向上配置在與轉動中心C1相同的位置時,轉動中心C2配置在與支柱間中心CL1相比更靠左側的位置,另一方面,轉動中心C1配置在與支柱間中心CL1相比更靠右側的位置。(The main effect of this form) As described above, in this embodiment, the distance L1 between the rotation center C1 and the rotation center C2 and the distance L2 between the rotation center C2 and the rotation center C3 are equal. In addition, in this aspect, when the first arm portion 10 is rotated relative to the arm support portion 5 and the rotation center C2 is arranged at the same position as the rotation center C1 in the front-rear direction, the rotation center C2 is arranged at the same position as the center CL1 between the struts On the other hand, the rotation center C1 is located more to the right than the center CL1 between the struts.

因此,在本形態中,即便使第一臂部10及第二臂部11的長度變長,使臂4伸長時的臂4的前後方向的長度變長,當伸長的臂4收縮時,也可以防止第一臂部10與第二臂部11的連結部分、或第二臂部11與手3的連結部分干涉兩根支柱16。因此,在本形態中,即便可將搭載在手3的晶片2朝前側搬送至離門型框架6更遠的位置為止,也可以防止臂4與支柱16的干涉。Therefore, in the present embodiment, even if the lengths of the first arm portion 10 and the second arm portion 11 are increased, and the length of the arm 4 in the front-rear direction when the arm 4 is extended is increased, when the extended arm 4 is contracted, the The connection portion between the first arm portion 10 and the second arm portion 11 or the connection portion between the second arm portion 11 and the hand 3 can be prevented from interfering with the two struts 16 . Therefore, in this aspect, even if the wafer 2 mounted on the hand 3 can be transferred to a position farther from the gate frame 6 toward the front side, the arm 4 and the support column 16 can be prevented from interfering with each other.

在本形態中,轉動中心C1配置在與框架中心CL2相比更靠後側的位置。因此,在本形態中,當使臂4收縮至圖3中所示的狀態為止時,可使搭載在手3的晶片2及手3在前後方向上退避至離配置在機器人1的前側的處理裝置更遠的位置為止。因此,在本形態中,當機器人1回旋時,容易防止晶片2及手3與處理裝置的干涉。In this form, the rotation center C1 is arrange|positioned at the rear side rather than the frame center CL2. Therefore, in the present embodiment, when the arm 4 is retracted to the state shown in FIG. 3 , the wafer 2 and the hand 3 mounted on the hand 3 can be retracted in the front-rear direction away from the processing arranged on the front side of the robot 1 until the device is farther away. Therefore, in this aspect, when the robot 1 turns, it is easy to prevent the wafer 2 and the hand 3 from interfering with the processing apparatus.

在本形態中,手3的前後方向的長度比第一臂部10的長度及第二臂部11的長度長。因此,在本形態中,例如當在構成處理裝置的後表面的蓋形成有手3可進出,但臂4無法進出的大小的開口部時,可防止處理裝置的蓋與臂4的干涉,並將搭載在手3的晶片2搬送至處理裝置的更裡側(前側)為止。In this aspect, the length of the hand 3 in the front-rear direction is longer than the length of the first arm portion 10 and the length of the second arm portion 11 . Therefore, in the present embodiment, when, for example, the cover constituting the rear surface of the processing apparatus is formed with an opening of a size that allows the hand 3 to enter and exit, but the arm 4 cannot enter and exit, the interference between the cover of the processing apparatus and the arm 4 can be prevented, and the The wafer 2 mounted on the hand 3 is transported to the further back side (front side) of the processing apparatus.

在本形態中,手中心CL3在左右方向上配置在與轉動中心C4相同的位置。因此,在本形態中,即便轉動中心C1在左右方向上配置在與轉動中心C4錯開的位置,例如和手中心CL3在左右方向上配置在與轉動中心C1相同的位置的情況相比,搬送晶片2時的機器人1的控制也變得容易。In this form, the hand center CL3 is arrange|positioned at the same position as the rotation center C4 in the left-right direction. Therefore, in the present embodiment, even if the rotation center C1 is arranged at a position shifted from the rotation center C4 in the left-right direction, for example, compared with the case where the hand center CL3 is arranged at the same position as the rotation center C1 in the left-right direction, the wafer is transferred. The control of the robot 1 at 2 o'clock also becomes easy.

(其他實施方式) 所述形態是本發明的適宜的形態的一例,但並不限定於此,可在不變更本發明的主旨的範圍內實施各種變形。(Other implementations) The above-described form is an example of a suitable form of the present invention, but the present invention is not limited thereto, and various modifications can be implemented within a range that does not change the gist of the present invention.

在所述形態中,轉動中心C1也可以在前後方向上配置在與框架中心CL2相同的位置,也可以配置在與框架中心CL2相比更靠前側的位置。另外,在所述形態中,手3的前後方向的長度也可以與第一臂部10、第二臂部11的長度相同,也可以比第一臂部10、第二臂部11的長度短。In the above-mentioned form, the rotation center C1 may be arranged at the same position as the frame center CL2 in the front-rear direction, or may be arranged at a position further forward than the frame center CL2. In addition, in the above-mentioned form, the length in the front-rear direction of the hand 3 may be the same as the length of the first arm portion 10 and the second arm portion 11 , or may be shorter than the length of the first arm portion 10 and the second arm portion 11 . .

在所述形態中,轉動中心C1也可以在左右方向上配置在與轉動中心C4相同的位置,也可以配置在與轉動中心C4相比更靠左側的位置。另外,轉動中心C1也可以在前後方向上配置在與轉動中心C4相同的位置,也可以配置在與轉動中心C4相比更靠前側的位置。另外,在所述形態中,手中心CL3也可以在左右方向上配置在與轉動中心C4錯開的位置。In this aspect, the rotation center C1 may be arranged at the same position as the rotation center C4 in the left-right direction, or may be arranged at a position further to the left than the rotation center C4. In addition, the rotation center C1 may be arranged at the same position as the rotation center C4 in the front-rear direction, or may be arranged at a position further forward than the rotation center C4. In addition, in the said form, the hand center CL3 may be arrange|positioned in the position shifted from the rotation center C4 in the left-right direction.

在所述形態中,轉動中心C4也可以在左右方向上配置在與支柱間中心CL1相同的位置,也可以在前後方向上配置在與框架中心CL2相同的位置。另外,在所述形態中,轉動中心C4也可以配置在與支柱間中心CL1相比更靠左側的位置,也可以配置在與框架中心CL2相比更靠前側的位置。另外,在所述形態中,也可以藉由機器人1來搬送晶片2以外的搬送對象物。例如,也可以藉由機器人1來搬送玻璃基板。In this aspect, the rotation center C4 may be arranged at the same position as the center CL1 between the struts in the left-right direction, or may be arranged at the same position as the frame center CL2 in the front-rear direction. In addition, in the said aspect, the rotation center C4 may be arrange|positioned at the position further to the left than the center CL1 between pillars, and may be arrange|positioned at the position further to the front side than the frame center CL2. In addition, in the above-mentioned form, the transfer object other than the wafer 2 may be transferred by the robot 1 . For example, the glass substrate may be conveyed by the robot 1 .

1:機器人(產業用機器人) 2:晶片(半導體晶片、搬送對象物) 3:手 4:臂 5:臂支撐部 6:門型框架 7:基底構件 10:第一臂部 11:第二臂部 12:手叉部 13:手基部 16:支柱 17:連結部 18:框架下部 C1:轉動中心(第一轉動中心) C2:轉動中心(第二轉動中心) C3:轉動中心(第三轉動中心) C4:轉動中心(第四轉動中心) CL1:支柱間中心 CL2:框架中心 CL3:手中心 L1:第一轉動中心與第二轉動中心的距離 L2:第二轉動中心與第三轉動中心的距離 VL:假想線 X:前後方向 X1:前後方向的一側(前側) X2:前後方向的另一側(後側) Y:左右方向 Y1:左右方向的另一側(右側) Y2:左右方向的一側(左側) Z:上下方向1: Robots (industrial robots) 2: Wafer (semiconductor wafer, transfer object) 3: hand 4: Arm 5: Arm support 6: Door frame 7: Base components 10: The first arm 11: The second arm 12: Hand fork 13: Hand base 16: Pillars 17: Links 18: The lower part of the frame C1: Rotation center (first rotation center) C2: Rotation center (second rotation center) C3: Rotation center (third rotation center) C4: center of rotation (fourth center of rotation) CL1: Center between pillars CL2: Frame Center CL3: hand center L1: The distance between the first rotation center and the second rotation center L2: The distance between the second rotation center and the third rotation center VL: imaginary line X: Front and rear direction X1: One side in the front-rear direction (front side) X2: The other side in the front-rear direction (rear side) Y: left and right direction Y1: The other side in the left and right direction (right side) Y2: One side in the left and right direction (left side) Z: up and down direction

圖1是本發明的實施方式的產業用機器人的立體圖。 圖2是圖1中所示的產業用機器人的平面圖。 圖3是圖1中所示的產業用機器人的臂收縮的狀態的平面圖。 圖4是圖1中所示的產業用機器人的臂的伸縮動作的中途的狀態的平面圖。FIG. 1 is a perspective view of an industrial robot according to an embodiment of the present invention. FIG. 2 is a plan view of the industrial robot shown in FIG. 1 . FIG. 3 is a plan view of a state in which an arm of the industrial robot shown in FIG. 1 is contracted. FIG. 4 is a plan view of a state in the middle of a telescopic operation of the arm of the industrial robot shown in FIG. 1 .

1:機器人(產業用機器人) 1: Robots (industrial robots)

2:晶片(半導體晶片、搬送對象物) 2: Wafer (semiconductor wafer, transfer object)

3:手 3: hand

4:臂 4: Arm

5:臂支撐部 5: Arm support

6:門型框架 6: Door frame

7:基底構件 7: Base components

10:第一臂部 10: The first arm

11:第二臂部 11: The second arm

12:手叉部 12: Hand fork

13:手基部 13: Hand base

16:支柱 16: Pillars

17:連結部 17: Links

18:框架下部 18: The lower part of the frame

C1:轉動中心(第一轉動中心) C1: Rotation center (first rotation center)

C2:轉動中心(第二轉動中心) C2: Rotation Center (Second Rotation Center)

C3:轉動中心(第三轉動中心) C3: Rotation center (third rotation center)

C4:轉動中心(第四轉動中心) C4: center of rotation (fourth center of rotation)

CL1:支柱間中心 CL1: Center between pillars

CL3:手中心 CL3: hand center

VL:假想線 VL: imaginary line

X:前後方向 X: Front and rear direction

X1:前後方向的一側(前側) X1: One side in the front-rear direction (front side)

X2:前後方向的另一側(後側) X2: The other side in the front-rear direction (rear side)

Y:左右方向 Y: left and right direction

Y1:左右方向的另一側(右側) Y1: The other side (right side) in the left and right direction

Y2:左右方向的一側(左側) Y2: One side in the left-right direction (left side)

Z:上下方向 Z: up and down direction

Claims (3)

一種產業用機器人,其特徵在於包括:手,搭載搬送對象物;臂,所述手能夠轉動地連結在所述臂的前端側,並且在水平方向上伸縮;臂支撐部,所述臂的基端側能夠轉動地連結在所述臂支撐部;以及門型的門型框架,能夠升降地保持所述臂支撐部;所述臂包括:第一臂部,基端側能夠轉動地連結在所述臂支撐部;以及第二臂部,基端側能夠轉動地連結在所述第一臂部的前端側,並且供所述手能夠轉動地連結在前端側;若將水平方向中的規定的方向設為左右方向,將與上下方向及左右方向正交的方向設為前後方向,則所述門型框架包括以在左右方向上空開間隔的狀態配置的兩根支柱,所述手及所述臂在左右方向上配置在兩根所述支柱之間,若將所述第一臂部相對於所述臂支撐部的轉動中心設為第一轉動中心,將所述第二臂部相對於所述第一臂部的轉動中心設為第二轉動中心,將所述手相對於所述第二臂部的轉動中心設為第三轉動中心,將左右方向上的兩根所述支柱之間的中心位置設為支柱間中心,則所述第一轉動中心與所述第二轉動中心的距離、和所述第二轉動中心與所述第三轉動中心的距離變成相等,當所述第一臂部相對於所述臂支撐部轉動且所述第二轉動中心在前後方向上配置在與所述第一轉動中心相同的位置時,所述第二轉動中心配置在與所述支柱間中心相比更靠左右方向的一側的位置,所述第一轉動中心配置在與所述支柱間中心相比更靠左右方向的另一側的位置, 所述手在收縮狀態的所述臂伸長時,以所述手的前端朝向前後方向的一側的固定的姿勢朝前後方向的一側進行直線移動,若將所述門型框架的前後方向的中心位置設為框架中心,則所述第一轉動中心配置在與所述框架中心相比更靠前後方向的另一側的位置。 An industrial robot comprising: a hand on which an object to be conveyed is mounted; an arm, the hand being rotatably connected to a front end side of the arm and extending and retracting in a horizontal direction; and an arm support part on which a base of the arm is an end side is rotatably connected to the arm support part; and a portal-shaped gantry frame holds the arm support part so as to be able to move up and down; the arm includes a first arm part, and a base end side is rotatably connected to the arm support part the arm support part; and the second arm part, the base end side is rotatably connected to the front end side of the first arm part, and the hand is rotatably connected to the front end side; If the direction is the left-right direction, and the direction orthogonal to the up-down direction and the left-right direction is the front-rear direction, the door frame includes two pillars arranged in a spaced state in the left-right direction, the hand and the The arm is disposed between the two pillars in the left-right direction, and if the rotation center of the first arm portion with respect to the arm support portion is the first rotation center, the second arm portion is positioned relative to the arm support portion. The rotation center of the first arm portion is referred to as the second rotation center, the rotation center of the hand relative to the second arm portion is referred to as the third rotation center, and the center between the two pillars in the left-right direction If the position is set as the center between the pillars, the distance between the first rotation center and the second rotation center and the distance between the second rotation center and the third rotation center become equal. When the second rotation center is arranged at the same position as the first rotation center in the front-rear direction with respect to the arm support portion, the second rotation center is arranged at a higher position than the center between the struts. On one side in the left-right direction, the first rotation center is arranged on the other side in the left-right direction than the center between the struts, When the arm in the retracted state is extended, the hand moves linearly to one side in the front-rear direction with the front end of the hand facing the one side in the front-rear direction. Assuming that the center position is the center of the frame, the first rotation center is disposed on the other side in the front-rear direction from the center of the frame. 如請求項1所述的產業用機器人,其中,所述手的前後方向的長度比所述第一臂部的長度及所述第二臂部的長度長。 The industrial robot according to claim 1, wherein the length of the hand in the front-rear direction is longer than the length of the first arm portion and the length of the second arm portion. 如請求項1或2所述的產業用機器人,其中,包括以能夠實現將上下方向作為轉動的軸方向的所述門型框架的轉動的方式,載置所述門型框架的基底構件,所述手在所述臂伸縮時,以所述手的前端朝向前後方向的一側的固定的姿勢在前後方向上進行直線移動,若將所述門型框架相對於所述基底構件的轉動中心設為第四轉動中心,將所述手的左右方向的中心位置設為手中心,則所述第一轉動中心配置在左右方向上與所述第四轉動中心錯開的位置,所述手中心配置在左右方向上與所述第四轉動中心相同的位置。The industrial robot according to claim 1 or 2, comprising a base member on which the portal frame is placed so as to enable rotation of the portal frame with an up-down direction as an axis direction of rotation, wherein When the arm is extended and retracted, the hand moves linearly in the front-rear direction with the front end of the hand facing one side in the front-rear direction. The fourth rotation center is the center position of the hand in the left-right direction as the hand center, the first rotation center is located at a position shifted from the fourth rotation center in the left-right direction, and the hand center is located at the center of the hand. The same position as the fourth rotation center in the left-right direction.
TW109124605A 2019-07-31 2020-07-21 Industrial robot TWI750741B (en)

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CN103640028A (en) * 2013-11-28 2014-03-19 华南理工大学 Novel plane articulated robot structure
CN205497465U (en) * 2016-03-02 2016-08-24 江苏豪林自动化科技有限公司 Production of computer lab floor is with pile up neatly machinery hand
CN106001817A (en) * 2016-06-29 2016-10-12 北京金迈斯智能设备科技有限公司 Special robot for electrical discharge machine

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Publication number Priority date Publication date Assignee Title
JP5603314B2 (en) 2011-12-01 2014-10-08 東京エレクトロン株式会社 Conveying apparatus and substrate processing system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103640028A (en) * 2013-11-28 2014-03-19 华南理工大学 Novel plane articulated robot structure
CN205497465U (en) * 2016-03-02 2016-08-24 江苏豪林自动化科技有限公司 Production of computer lab floor is with pile up neatly machinery hand
CN106001817A (en) * 2016-06-29 2016-10-12 北京金迈斯智能设备科技有限公司 Special robot for electrical discharge machine

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