KR20130024855A - Robot arm structure and robot - Google Patents

Abstract

PURPOSE: An arm structure of a robot and a robot are provided to minify minimum rotating diameter of the robot. CONSTITUTION: An arm structure of a robot and a robot comprise a first arm part(22), a second arm part(23), a middle link part(25b), a first link part(25a), and a second link part(25c). The first arm part is rotatably connected to a base end part with respect to a fixed base part(21). The second arm part is rotatably connected to the base end part with respect to front end part of the first arm part and is rotatably connected to a driving base part(24) with respect to the front end part. The middle link part is axis supported in a connection shaft(P3) the first arm part and the second arm part on coaxial. The first link part forms a first parallel link mechanism between the first arm part, the middle link part, and a fixed base part. The second link part forms a second parallel link mechanism between the second arm part, the middle link part, and the driving base part. The distance to the connection shaft of the first arm part and the second arm part from the connection shaft(P7) of the second link part and the middle link part is shorter than the connection shaft of the first arm part and the second arm part from the connection shaft of the first link part and the middle link part.

Description

Arm structure and robot of robot {ROBOT ARM STRUCTURE AND ROBOT}

The disclosed embodiment relates to an arm structure of a robot and a robot.

Background Art Conventionally, a horizontal articulated robot is known as a robot for transporting a workpiece such as a glass substrate or a semiconductor wafer. The horizontal articulated robot is a robot having a telescopic arm in which two arm parts are connected via a joint, and linearly moves an end effector provided at the tip of the telescopic arm by rotating each arm part. In addition, the horizontal articulated robot is configured to be rotatable about a pivot axis in which the base portion that supports the stretching arm is vertical.

In such a horizontal articulated robot, a link mechanism is provided to operate in accordance with the rotational motion of each arm so that the direction of the end effector mounted on the distal end of the telescopic arm does not change due to the rotational motion of the arm member. Regulates

For example, Patent Literature 1 uses two parallel link mechanisms, a first parallel link mechanism that follows the rotational motion of the arm portion on the proximal side, and a second parallel link mechanism that follows the rotational motion of the arm portion on the proximal side. An arm structure for regulating the rotation of the end effector is disclosed.

Japanese Patent No. 4295788

However, in the above-described prior art, there is room for further improvement in that the minimum turning diameter of the robot is made small. The minimum turning diameter of the robot is the minimum turning radius of the horizontal articulated robot when the base portion rotates about the turning axis.

For example, in the above-described prior art, the link width of the first parallel link mechanism and the link width of the second parallel link mechanism are made the same. The link width refers to the width of links provided in parallel with the arm member. Therefore, when the robot becomes large, the link width of the second parallel link mechanism also becomes large, and accordingly, the minimum turning diameter becomes large.

An object of one embodiment is to provide an arm structure of a robot and a robot capable of reducing the minimum turning diameter of the robot.

The arm structure of the robot of one embodiment of the embodiment includes a first arm portion, a second arm portion, an intermediate link portion, a first link portion, and a second link portion. The first arm portion is rotatably connected to the proximal end with respect to the fixed base portion. The proximal end is rotatably connected to the distal end of the first arm, and the second arm portion is rotatably connected to the movable base at the distal end. The intermediate link portion is axially coaxial with the connecting axis of the first arm portion and the second arm portion. The first link portion forms a first parallel link mechanism between the first arm portion and the intermediate link portion and the fixed base portion. The second link portion forms a second parallel link mechanism between the second arm portion and the intermediate link portion and the movable base portion. The distance from the connecting axis of the second link portion and the intermediate link portion to the connecting axis of the first arm portion and the second arm portion is from the connecting axis of the first link portion and the intermediate link portion to the connecting axis of the first arm portion and the second arm portion. Shorter than

According to one aspect of the embodiment, the arm structure of the robot and the robot which can reduce the minimum turning diameter of the robot can be provided.

1 is a schematic perspective view of a robot according to the present embodiment;
2A is a schematic plan view showing a minimum pivot diameter of a robot when a parallel link mechanism similar to the conventional one is employed;
2B is a schematic plan view showing the minimum pivot diameter of the robot according to the present embodiment;
3 is a schematic side view illustrating a state in which a robot is installed in a vacuum chamber;
4 is a schematic side view of the periphery of the thick portion;
5 is a schematic plan view of the periphery of a thick portion.

EMBODIMENT OF THE INVENTION Hereinafter, with reference to an accompanying drawing, embodiment of the arm structure of a robot disclosed herein, and a robot is described in detail. The present invention is not limited to the embodiments shown below.

First, the structure of the robot which concerns on this embodiment is demonstrated using FIG. 1 is a schematic perspective view of a robot according to an embodiment.

As shown in FIG. 1, the robot 1 is a horizontal articulated robot provided with two expansion arms which expand and contract in the horizontal direction. Specifically, the robot 1 includes a body portion 10 and an arm unit 20.

The trunk portion 10 is a unit provided below the arm unit 20. The trunk | drum 10 is equipped with the lifting device in the cylindrical housing 11, and raises and lowers the arm unit 20 along a perpendicular direction using this lifting device.

The lifting device includes, for example, a motor, a ball screw, a ball nut, and the like, and lifts and lowers the lifting flange portion 15 along the vertical direction by converting the rotational motion of the motor into a linear motion. As a result, the arm unit 20 fixed on the lifting flange portion 15 moves up and down.

The flange part 12 is formed in the upper part of the housing 11. The robot 1 is in the state provided in the vacuum chamber by the flange part 12 being fixed to the vacuum chamber. Installation of the robot 1 in the vacuum chamber will be described with reference to FIG. 3.

The arm unit 20 is a unit that connects to the trunk portion 10 via the lifting flange portion 15. Specifically, the arm unit 20 includes a fixed base portion 21, a first arm portion 22, a second arm portion 23, a movable base portion 24, and an auxiliary arm portion 25. It is provided.

The fixed base portion 21 is rotatably supported with respect to the lifting flange portion 15. The fixed base part 21 is equipped with the turning device which consists of a motor, a reducer, etc., and rotates using this turning device.

Specifically, the turning device inputs the rotation of the motor via the transmission belt with respect to the reduction gear whose output shaft is fixed to the trunk portion 10. As a result, the fixed base portion 21 rotates in the horizontal direction with the output shaft of the reducer as the pivot axis.

To the upper part of the fixed base part 21, the base end of the 1st arm part 22 is rotatably connected through a speed reducer. Moreover, the base end part of the 2nd arm part 23 is rotatably connected to the upper end part of the 1st arm part 22 via a speed reducer.

The robot 1 synchronously operates the reduction gear provided in the base end of the 1st arm part 22, and the reduction gear provided in the front end of the 1st arm part 22 using one motor, and the 2nd arm part 23 is carried out synchronously. ) Move the tip of the line linearly.

Specifically, in the robot 1, the amount of rotation of the second arm portion 23 relative to the first arm portion 22 is twice the amount of rotation of the first arm portion 22 relative to the fixed base portion 21. The first arm part 22 and the second arm part 23 are rotated as much as possible. For example, when the 1st arm part 22 rotated (alpha) degree with respect to the fixed base part 21, the robot 1 has the 2nd arm part 23 with respect to the 1st arm part 22, for example. The first arm portion 22 and the second arm portion 23 are rotated to rotate 2 [deg.]. As a result, the tip portion of the second arm portion 23 moves linearly.

Further, from the viewpoint of contamination prevention in the vacuum chamber and the like, a driving mechanism such as a speed reducer or a motor is housed inside the first arm portion 22 maintained at atmospheric pressure. As a result, even when the robot 1 is placed under a reduced pressure environment, it is possible to prevent drying of lubricating oil such as grease, and to prevent contamination in the vacuum chamber due to dusting.

The movable base portion 24 is rotatably connected to the upper end of the second arm portion 23. This movable base part 24 is a member which moves according to the rotational motion of the 1st arm part 22 and the 2nd arm part 23, and is equipped with the end effector 24a for holding a workpiece in the upper part.

The auxiliary arm portion 25 moves in conjunction with the rotational operations of the first arm portion 22 and the second arm portion 23 so that the end effector 24a during movement always faces a predetermined direction. ) Is a link mechanism that regulates the rotation.

Specifically, the auxiliary arm portion 25 includes a first link portion 25a, an intermediate link portion 25b, and a second link portion 25c.

The base end portion of the first link portion 25a is rotatably connected to the fixed base portion 21, and is rotatably connected to the tip portion of the intermediate link portion 25b at the tip portion. In addition, the intermediate link portion 25b has a proximal end axially coaxial with a connecting axis of the first arm portion 22 and the second arm portion 23, and the distal end portion is rotatable with the distal end portion of the first link portion 25a. Is connected.

The second link portion 25c is rotatably connected to the intermediate link portion 25b at the proximal end, and rotatably connected to the proximal end of the movable base 24 at the distal end. Moreover, the movable base part 24 is rotatably connected with the front-end | tip part of the 2nd arm part 23 in the front end part, and is rotatably connected with the 2nd link part 25c in the base end part.

The first link portion 25a forms a first parallel link mechanism together with the fixed base portion 21, the first arm portion 22, and the intermediate link portion 25b. That is, when the first arm portion 22 rotates about the proximal end, the first link portion 25a and the intermediate link portion 25b are parallel to the first arm portion 22 and the fixed base portion 21, respectively. Rotate while maintaining state.

Moreover, the 2nd link part 25c forms the 2nd parallel link mechanism with the 2nd arm part 23, the movable base part 24, and the intermediate link part 25b. That is, when the second arm portion 23 rotates about the proximal end, the second link portion 25c and the movable base portion 24 are parallel to the second arm portion 23 and the intermediate link portion 25b, respectively. Rotate while maintaining one state.

The intermediate link portion 25b rotates while being in parallel with the fixed base portion 21 by the first parallel link mechanism. For this reason, the movable base part 24 of a 2nd parallel link mechanism also rotates, maintaining the state parallel to the fixed base part 21. FIG. As a result, the end effector 24a mounted on the upper portion of the movable base portion 24 moves linearly while maintaining the state parallel to the fixed base portion 21.

In this way, the robot 1 uses the two parallel link mechanisms of the first parallel link mechanism and the second parallel link mechanism to keep the direction of the end effector 24a constant. Therefore, for example, compared to the case where a pulley or a transmission belt is provided in the second arm portion and the direction of the end effector is maintained in a certain direction using these pulleys or the transmission belt, oscillation caused by the pulley or the transmission belt can be suppressed. have.

Moreover, since the rigidity of the whole arm can be improved by the auxiliary arm part 25, the vibration at the time of the operation of the end effector 24a can be reduced. Therefore, as compared with the case where the direction of the end effector is maintained in a constant direction by using a pulley or a transmission belt, the oscillation caused by the vibration during the operation of the end effector 24a can also be suppressed.

Here, as shown in FIG. 1, in the robot 1 which concerns on this embodiment, the connection position of the 2nd link part 25c and the intermediate link part 25b is not the tip part of the intermediate link part 25b, We decided to arrange in the middle part. Thereby, in the robot 1 which concerns on this embodiment, since the link width of the 2nd link mechanism, ie, the width between the 2nd arm part 23 and the 2nd link part 25c, becomes small, the robot 1 The minimum turning diameter of) can be made small.

Hereinafter, this point will be described in more detail. Here, the minimum turning diameter is the minimum turning radius of the robot 1 rotating about the turning axis provided in the fixed base portion 21. In addition, below, the attitude | position of the robot 1 whose rotation radius centering on a pivot axis becomes the minimum is called minimum rotation attitude.

First, the minimum turning diameter of the robot 2 in the case of employ | adopting the same parallel link mechanism as before, is demonstrated using FIG. 2A. FIG. 2A is a schematic plan view showing a minimum turning diameter of the robot 2 when the same parallel link mechanism as in the prior art is adopted.

In addition, below, let the advancing direction of a movable base part be an X-axis direction, and the direction orthogonal to an X-axis direction in a horizontal direction shall be Y-axis direction. In addition, the direction orthogonal to the X-axis direction and the Y-axis direction, ie, the vertical direction, is taken as the Z-axis direction.

In addition, below, when demonstrating the relative positional relationship of each component of a robot, although a direction may be shown up and down, right and left, and back and forth, the reference | standard of each direction shall be the case where a robot is installed in a horizontal plane. Specifically, in FIG. 2A, the positive and negative directions of the X-axis are respectively front and rear of the robot 2, and the positive and negative directions of the Y-axis are respectively right and left, The positive direction and the negative direction of the Z axis are above and below the robot 2. In addition, in FIG. 2A, the end effector is abbreviate | omitted and shown.

As shown in FIG. 2A, in the robot 2 employing the same parallel link mechanism, the second link portion 25c 'has a connecting shaft between the first link portion 25a and the intermediate link portion 25b'. It is connected coaxially with (P5).

The second parallel link mechanism is formed by the second arm portion 23, the movable base portion 24 ', the second link portion 25c' and the intermediate link portion 25b '. For this reason, the distance from the connecting shaft P3 with the 2nd arm part 23 in the movable base part 24 'to the connecting shaft P6 with the 2nd link part 25c' is the intermediate link part 25b '. It is equal to the distance from the connecting shaft P2 with the 2nd arm part 23 in () to the connecting axis P5 of the 2nd link part 25c '.

Therefore, when the distance from the connecting shaft P1 with the 1st arm part 22 in the fixed base part 21 to the connecting shaft P4 with the 1st link part 25a is set to L1, the connecting shaft P2 ), The distance from the coupling shaft P3 to the coupling shaft P6 is L1.

The robot 2 rotates about the turning axis O by the turning device provided in the stationary base part 21. At this time, the robot 2 rotates in a state in which the rotation radius around the pivot axis O is minimum, that is, the minimum swing attitude is taken.

Specifically, the fixed base part 21 moves the movable base part 24 'within the posture of the telescopic arm provided in the left side of the robot 2 shown in FIG. 2A, specifically, the movable range of the movable base part 24'. The posture positioned at the rearmost side of the robot is the minimum swinging posture of the robot 2.

As shown in FIG. 2A, when the robot 2 takes a minimum swinging posture, the base end portion of the movable base 24 ′ protrudes to the rear of the robot 2. The distance from the base end of the movable base portion 24 'to the pivot axis O becomes the minimum pivot diameter of the robot 2. The circle R1 shown in FIG. 2A is a circle which the base end of the movable base part 24 'draws when the robot 2 which took the minimum rotational attitude rotates about the revolving axis O. As shown in FIG.

In addition, the attitude | position of the telescopic arm provided in the right side of the robot 2 is a posture which positioned the movable base part 24 'in the front of the fixed base part 21 within the movable range of the movable base part 24'. .

In recent years, the robot which conveys these workpieces is also enlarged with the enlargement of the workpiece | work, such as a glass substrate and a semiconductor wafer. The distance L1 from the connecting shaft P1 to the connecting shaft P4 becomes longer as the robot becomes larger. For this reason, the larger the robot is, the longer the distance from the connecting shaft P3 to the connecting shaft P6 is, and there is a concern that the minimum turning diameter is increased.

So, in the robot 1 which concerns on this embodiment, in the intermediate part of the intermediate link part 25b whose distance from the connection axis P2 is shorter than the connection axis P5, it is intermediate | middle with the 2nd link part 25c. It is assumed that the link portion 25b is connected. Thereby, the length of the movable base part 24 can be shortened and the minimum turning diameter of the robot 1 can be made small.

Here, the specific structure of the parallel link mechanism which concerns on this embodiment, and the minimum turning diameter of the robot 1 which concerns on this embodiment are demonstrated using FIG. 2B. FIG. 2B is a schematic plan view illustrating the minimum turning diameter of the robot 1 according to the present embodiment. In addition, in FIG. 2B, the end effector 24a is abbreviate | omitted and shown.

As shown in FIG. 2B, the connecting axis P7 of the 2nd link part 25c and the intermediate link part 25b is provided in the intermediate part of the intermediate link part 25b. Specifically, the connecting shaft P7 is provided at a position where the distance from the connecting shaft P7 to the connecting shaft P2 is shorter than the distance L1 from the connecting shaft P5 to the connecting shaft P2. In other words, when the distance from the connecting shaft P2 to the connecting shaft P7 is L2, L2 is shorter than the distance L1 from the connecting shaft P2 to the connecting shaft P5.

As for the movable base part 24, the distance from the connection axis P3 with the 2nd arm part 23 to the connection axis P6 with the 2nd link part 25c is 2nd in the intermediate link part 25b. It is formed so that it may become equal to the distance L2 from the connection axis P2 with the arm part 23 to the connection axis P7 with the 2nd link part 25c. For this reason, the distance from the connecting shaft P3 to the connecting shaft P6 becomes L2 shorter than the distance L1 from the connecting shaft P3 to the connecting shaft P6 in the conventional robot 2.

By shortening the distance from the connecting shaft P3 to the connecting shaft P6, the amount of protrusion of the base end portion of the movable base portion 24 toward the robot 1 back can be reduced. As a result, the distance from the base end of the movable base portion 24 to the pivot axis O, that is, the minimum pivot diameter of the robot 1 is reduced.

The circle R2 shown in FIG. 2B is a circle which the base end part of the movable base part 24 draws, when the robot 1 which took the minimum rotational attitude rotates about the revolving axis | shaft O. As shown to FIG. As shown in FIG. 2B, the circle R2 is smaller than the circle R1 drawn by the proximal end of the movable base portion 24 ′ of the robot 2.

Thus, in the robot 1 which concerns on this embodiment, since the link width of the 2nd parallel link mechanism was made small and the amount of protrusion of the base end part of the movable base part 24 to the robot 1 back is reduced, The minimum turning diameter of the robot 1 can be made small.

2B, the 2nd link part 25c is arrange | positioned outside the fixed base part 21 rather than the 2nd arm part 23, when the robot 1 takes the minimum rotational attitude | position. do. For this reason, the structure which makes the minimum turning diameter of the robot 1 small can be easily implement | achieved by making the link width of a 2nd parallel link mechanism small.

That is, for example, the 1st arm part 22 is arrange | positioned inside the fixed base part 21 rather than the 1st link part 25a, and the 2nd arm part 23 is fixed base than the 2nd link part 25c. It is assumed that it is disposed outside the portion 21. In this case, when the minimum turning diameter of the robot 1 is to be reduced, the rotation axis of the second arm part 23 is provided at a position different from the rotation axis of the first arm part 22, and the first arm part 22 is provided. And a configuration for synchronously rotating the second arm portion 23 may be complicated.

On the other hand, in the robot 1 which concerns on this embodiment, the link width of a 2nd parallel link mechanism can be made small, keeping the 1st arm part 22 and the 2nd arm part 23 connected coaxially. Can be. For this reason, the structure which makes the minimum turning diameter of the robot 1 small can be easily implement | achieved by making the link width of a 2nd parallel link mechanism small.

Moreover, in the robot 1 which concerns on this embodiment, since the link width of the 1st parallel link mechanism was made into the conventional link width, and only the link width of the 2nd parallel link mechanism was made to be small, while maintaining the rigidity of an telescopic arm. The minimum turning diameter of the robot 1 can be made small.

By the way, the robot 1 which concerns on this embodiment is arrange | positioned in the vacuum chamber hold | maintained in reduced pressure state by the vacuum pump etc.

Hereinafter, the state which installed the robot 1 in the vacuum chamber is demonstrated using FIG. FIG. 3: is a schematic side view which shows the state which installed the robot 1 in the vacuum chamber.

As shown in FIG. 3, the robot 1 has a flange 12 formed in the trunk portion 10 via a sealing member with respect to an edge portion of the opening 31 formed in the bottom of the vacuum chamber 30. It is fixed. As a result, the vacuum chamber 30 is in a sealed state, and the inside is kept in a reduced pressure state by a decompression device such as a vacuum pump. In addition, the housing 11 of the body portion 10 protrudes from the lower portion of the vacuum chamber 30 and is located in a space in the support portion 35 that supports the vacuum chamber 30.

The robot 1 executes the conveyance work of the work in this vacuum chamber 30. For example, the robot 1 moves the end effector 24a linearly using the 1st arm part 22 and the 2nd arm part 23, and the vacuum chamber 30 passes through the gate valve which is not shown in figure. The work is taken out from the other vacuum chamber connected with

Subsequently, after returning the end effector 24a, the robot 1 rotates the fixed base part 21 about the pivot axis O, and arm unit 20 with respect to the other vacuum chamber used as a conveyance destination of a workpiece | work. ) Is perfection. And the robot 1 carries in a workpiece into the other vacuum chamber used as the destination of a workpiece | work by linearly moving the end effector 24a using the 1st arm part 22 and the 2nd arm part 23. As shown in FIG. .

In order to facilitate the maintenance of the reduced pressure state of the vacuum chamber 30, it is preferable to form the vacuum chamber 30 as small as possible. The size of the vacuum chamber 30 is determined according to the minimum turning diameter of the robot 1. For this reason, by reducing the minimum turning diameter as in the robot 1 according to the present embodiment, the vacuum chamber 30 can be miniaturized, and the vacuum pressure reduction state of the vacuum chamber 30 can be easily maintained.

The size of the vacuum chamber 30 is also determined according to the height dimension of the robot 1. For this reason, it is also preferable to suppress the height dimension of the robot 1 small.

In the robot 1 which concerns on this embodiment, as shown to FIG. 1 and FIG. 2B, the intermediate | middle link part 25b is between the 1st arm part 22 and the 2nd arm part 23 in a perpendicular direction. Prepared. Moreover, the 1st link part 25a and the 2nd link part 25c are each provided in the position which overlaps with the 1st arm part 22 and the 2nd arm part 23 in a perpendicular direction. The first link portion 25a is connected to the lower portion of the intermediate link portion 25b, and the second link portion 25c is connected to the upper portion of the intermediate link portion 25b.

By arranging the 1st link part 25a, the intermediate link part 25b, and the 2nd link part 25c as mentioned above, in the robot 1 which concerns on this embodiment, the height dimension of an telescopic arm can be suppressed small. have. Therefore, since the height dimension of the robot 1 becomes small, the vacuum chamber 30 can be miniaturized and the decompression state of the vacuum chamber 30 can be easily maintained.

Thus, since the robot 1 which concerns on this embodiment made the minimum revolving diameter and height dimension small, the vacuum chamber 30 can be miniaturized.

In addition, a recess is formed in the bottom surface of the vacuum chamber 30, and the site | part of the robot 1 which protrudes below another with the fixed base part 21 and the lifting flange part 15 is accommodated in such a recessed part. do. In this way, by forming the vacuum chamber 30 in accordance with the shape of the robot 1, the inside of the vacuum chamber 30 can be miniaturized.

By the way, as shown to FIG. 1 and FIG. 3, in the 2nd arm part 23, the thick part 23a (thick portion) is formed in the 2nd arm part 23 from the base end part to the intermediate part compared with the tip part. do. Thus, by forming the thick part 23a with respect to the 2nd arm part 23, the rigidity of the 2nd arm part 23 can be improved.

Here, the thick part 23a formed in the 2nd arm part 23 is demonstrated more concretely using FIG. 4 and FIG. 4 is a schematic side view around the thick portion 23a. 5 is a schematic plan view around the thick part 23a.

The upper surface 231 of the thick portion 23a is formed at a position higher than the upper surface of the distal end of the second arm portion 23. Specifically, as shown in FIG. 4, the upper surface 231 of the thick portion 23a is higher than the lower surface 242 of the end effector 24a and more than the work holding surface 241 of the end effector 24a. It is formed at a height located below.

Thus, the thick part 23a is formed as thick as possible in the range which does not interfere with the workpiece | work mounted on the workpiece holding surface 241. As shown in FIG. For this reason, the rigidity of the 2nd arm part 23 can be improved, without disturbing the conveyance work of a workpiece | work.

5 is a schematic plan view around the thick portion 23a. 5, the movable range of the movable base part 24 is shown. Specifically, the state in which the movable base part 24 is located at the rearmost side of the fixed base part 21 is shown by the dotted line, and the state in which it is located at the most front side is shown by the solid line, respectively.

As shown in FIG. 5, the second arm portion 23 moves from the position indicated by the dotted line to the position indicated by the solid line, and accordingly, the movable base portion 24 also moves from the position indicated by the dotted line to the position indicated by the solid line. do.

The thicker portion 23a has a proximal end than the position where the movable base portion 24 moving in accordance with the rotational motion of the first arm portion 22 and the second arm portion 23 passes over the second arm portion 23. It is formed in the area of the side. Thereby, since the thick part 23a does not contact the movable base part 24 during the movement of the movable base part 24, a 2nd arm part does not interfere with the conveyance operation of a workpiece | work. The stiffness of (23) can be improved.

Moreover, inside the base end part of the 2nd arm part 23, the connector which connects the wiring from the end effector 24a is arrange | positioned. In the robot 1 which concerns on this embodiment, since the thick part 23a is formed in the base end part of the 2nd arm part 23, sufficient wiring space can be ensured in the base end part of the 2nd arm part 23. As shown in FIG. Therefore, unnecessary load on the wiring from the end effector 24a can be prevented.

As described above, the robot according to the present embodiment includes a first arm portion, a second arm portion, an intermediate link portion, a first link portion, and a second link portion. The first arm portion is rotatably connected to the proximal end with respect to the fixed base portion. A proximal end is rotatably connected with respect to the front-end | tip part of a 1st arm part, and a 2nd arm part is rotatably connected with a movable base part in a front-end | tip part. The intermediate link portion is axially coaxial with the connecting axis of the first arm portion and the second arm portion. The first link portion forms a first parallel link mechanism between the first arm portion and the intermediate link portion and the fixed base portion. The second link portion forms a second parallel link mechanism between the second arm portion and the intermediate link portion and the movable base portion.

The distance from the connecting axis of the second link portion and the intermediate link portion to the connecting axis of the first arm portion and the second arm portion is determined by the connecting axis of the first arm portion and the second arm portion from the connecting axis of the first link portion and the intermediate link portion. Shorter than the distance to. Therefore, the minimum turning diameter of the robot can be made small.

In addition, although the above-mentioned embodiment demonstrated the example when the robot is a conveyance robot which conveys a workpiece | work, the robot may be a robot which performs work other than conveyance of a workpiece | work. In addition, although the above-mentioned embodiment demonstrated the example in the case where a robot is provided in a vacuum chamber, the chamber in which a robot is installed may be chambers other than a vacuum chamber.

New effects or modifications can be easily derived by those skilled in the art. For this reason, by the present invention, a wide range of forms is not limited to the specific details and representative embodiments described above and described. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

1: Robot 10: Body
11 housing 12 flange portion
15: lifting flange portion 20: arm unit
21: fixed base portion 22: first arm portion
23: second arm 23a: thick portion
24: movable base portion 24a: end effector
242: when the end effector 25: secondary arm
25a: first link portion 25b: intermediate link portion
25c: second link portion 30: vacuum chamber
231 thick top surface 241 workpiece surface

Claims (8)

A first arm portion having a proximal end rotatably connected to the fixed base portion,
A second arm portion having a proximal end rotatably connected with respect to a distal end of the first arm portion, the second arm portion rotatably connected to a movable base portion at the distal end portion;
An intermediate link portion coaxially axially coaxial with the connecting axis of the first arm portion and the second arm portion;
A first link portion for forming a first parallel link mechanism between the first arm portion, the intermediate link portion, and the fixed base portion;
And a second link portion for forming a second parallel link mechanism between the second arm portion, the intermediate link portion, and the movable base portion,
The distance from the connecting axis of the second link portion and the intermediate link portion to the connecting axis of the first arm portion and the second arm portion is equal to the first arm portion and the connecting axis of the first link portion and the intermediate link portion. Shorter than the distance to the connecting axis of the second arm portion
Arm structure of the robot. The method of claim 1,
The second link portion is disposed outside the fixed base portion than the second arm portion when the robot takes a minimum swinging posture with a minimum rotation radius around a pivot axis parallel to the vertical direction. doing
Arm structure of the robot. 3. The method according to claim 1 or 2,
The intermediate link portion is provided between the first arm portion and the second arm portion,
The first link portion is provided at a position overlapping with the first arm portion in the vertical direction, and connected to the lower portion in the vertical direction of the intermediate link portion.
The second link portion is provided at a position overlapping with the second arm portion in the vertical direction, and is connected to the upper portion in the vertical direction of the intermediate link portion.
Arm structure of the robot. The method according to any one of claims 1 to 3,
The second arm portion has a thickness in the vertical direction that is thicker than the tip portion.
Arm structure of the robot. The method of claim 4, wherein
The movable base portion is rotatably connected with respect to the upper end portion of the second arm portion, and has an end effector for holding the workpiece thereon,
The said thick part has the said upper surface located in the perpendicular direction more than the lower surface of the said end effector, and below the workpiece surface of the said end effector in the perpendicular direction, It is characterized by the above-mentioned.
Arm structure of the robot. The method according to claim 4 or 5,
The thick portion is formed in an area on the proximal end side of the second arm portion rather than a position where the movable base portion moving in accordance with the rotational motion of the first arm portion and the second arm portion passes over the second arm portion. Characterized
Arm structure of the robot. Fixed base,
A first arm portion having a proximal end rotatably connected to the fixed base portion;
A second arm portion having a proximal end rotatably connected with respect to a distal end of the first arm portion,
A movable base portion rotatably connected to a distal end portion of the second arm portion,
An intermediate link portion coaxially axially coaxial with the connecting axis of the first arm portion and the second arm portion;
A first link portion for forming a first parallel link mechanism between the first arm portion, the intermediate link portion, and the fixed base portion;
And a second link portion for forming a second parallel link mechanism between the second arm portion, the intermediate link portion, and the movable base portion,
The distance from the connecting axis of the second link portion and the intermediate link portion to the connecting axis of the first arm portion and the second arm portion is equal to the first arm portion and the connecting axis of the first link portion and the intermediate link portion. Shorter than the distance to the connecting axis of the second arm portion
robot. The method of claim 7, wherein
The fixed base portion has a rotating portion that rotates about a pivot axis parallel to the vertical direction, characterized in that
robot.

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