JP2002066966A - Carrying robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a carrying robot capable of reducing any time lag or shake generated when a holding arm for holding a work W is turned, omitting any troublesome and complicated work during the assembly, and suppressing generation of the out-gas during the use in a super-high vacuum. SOLUTION: This carrying robot comprises a first link mechanism 18 which successively connects a second arm 5 and the holding arm 6 to a tip side of a first arm 4 with the rotational torque applied thereto from a drive motor 3, a planetary gear mechanism 12 for turning the second arm 5 in an interlocking manner with the link motion of the first link mechanism 18, and a second link mechanism 19 for turning the holding are 6 by the link motion while in an interlocking manner with the first link mechanism 18 as the second arm 5 is turned.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer robot for transferring an object to be transferred such as a semiconductor substrate or a glass substrate while holding the object at a leading end thereof. The present invention relates to a transfer robot configured such that a second arm and a holding arm on the tip side thereof respectively pivot.

[0002]

2. Description of the Related Art Conventionally, when loading and unloading an object such as a semiconductor substrate or a glass substrate at a predetermined station, three arms are flexibly connected to each other, and a base end is operated by a single drive motor. With the turning of the arm, a transfer robot configured to turn the intermediate arm and the tip arm at predetermined angular magnifications in opposite directions is used.

[0003] As shown in FIGS. 4 and 5, this transfer robot has a bearing 52 mounted on a fixed shaft 51 fixed to a base 50.
A first arm 53 rotatably held through
A bearing 55 is attached to the intermediate shaft 54 fixed to the distal end of the arm 53.
A second arm 56 pivotally held through
A bearing 58 is attached to a tip shaft 57 fixed to the tip of the arm 56.
And a holding arm 59 that is rotatably held through the holding arm 59, and is configured such that the transported object W is suction-held at the tip end of the holding arm 59 by a negative pressure or the like.

[0004] A first timing belt 63 is wound around a driving pulley 61 of a driving motor 60 fixed to the base 50 and a first pulley 62 fixed to a base end of the first arm 53. At the same time, the second timing belt 66 is wound around the fixed pulley 64 on the fixed shaft 51 and the second pulley 65 fixed to the base end of the second arm 56, and is fixed to the intermediate shaft 54. The third timing belt 69 is wound around the intermediate pulley 67 and the third pulley 68 fixed to the base end of the holding arm 59.

In this case, the number of teeth of the fixed pulley 64 is set to twice the number of teeth of the second pulley 65, whereas the number of teeth of the intermediate pulley 67 is 1 / th of the number of teeth of the third pulley 68. It is set to 2. Further, the first arm 53 and the second arm 5
6 are set to be substantially the same.

Accordingly, as shown in FIG.
When the rotation torque from 0 is applied and the first arm 53 turns clockwise by α °, the second arm 56 turns counterclockwise with respect to the first arm 53 by 2α °,
The holding arm 59 moves clockwise with respect to the second arm 56 by α.
° turn. As a result, the holding arm 59 moves back and forth along a straight line while maintaining a constant directivity.

[0007]

According to the conventional transfer robot exemplified above, the arms 53, 56, and 59 have to be lengthened in order to respond to the recent demand for larger substrates. As a result, the second and third timing belts 66 and 69 are inevitably elongated. In addition to the elasticity of the timing belts 66 and 69, a time delay occurs after the first arm 53 starts turning and before the holding arm 59 starts turning. There is a drawback that the posture of the arm 59 is disturbed and the image is uneven. In addition, if the time-dependent change of the timing belts 66 and 69, that is, the relaxation due to the elongation, is considered, such a problem becomes more remarkable.

In addition, when assembling this type of transfer robot, it is necessary to adjust the tension of the timing belt, which leads to an increase in the number of man-hours, and the operation of adjusting the tension is extremely troublesome and complicated. In addition, there is a problem that workability is deteriorated and maintenance and inspection are difficult.

Further, this kind of transfer robot is often used in a high vacuum or an ultra-high vacuum, and in such a case, a large amount of outgas is generated from a long timing belt, There is a problem that the vacuum atmosphere is hindered.

The transfer robot according to the present invention has been made in view of the above circumstances, and reduces a time delay and a glitch generated when the holding arm is turned as much as possible. To improve
Further, it is a technical object to prevent a vacuum atmosphere from being impaired when used in an ultra-high vacuum or the like.

[0011]

In order to achieve the above-mentioned technical object, the present invention holds a second arm and an object to be transported at a distal end side of a first arm to which rotational torque is applied from a driving source. A transfer arm configured to sequentially connect the holding arm and the first arm to one side, wherein the second arm turns to the other side and the holding arm turns to one side with the turning of the first arm to one side; A first link mechanism that performs a link operation with the turning of the arm, an angle conversion mechanism that turns the second arm in conjunction with the link operation of the first link mechanism, and a first link mechanism that rotates with the turning of the second arm. And a second link mechanism that rotates the holding arm by performing a link operation while being linked.

According to such a configuration, the rotational torque is applied from the drive source and the first arm turns, whereby
The first link mechanism performs a link operation, and the angle conversion mechanism operates in conjunction with the link operation, whereby the second arm turns. Then, the first arm is turned by turning the second arm.
The second link mechanism operates in link with the link mechanism,
The holding arm turns with this link operation. Therefore, the power transmission mechanism for rotating the second arm and the holding arm with the rotation of the first arm is composed of the first and second link mechanisms and the angle conversion mechanism. Power is appropriately transmitted from the first arm to the second arm and the holding arm without using.

Preferably, the first arm and the second arm have substantially the same length, and the second arm pivots at twice the angle magnification with respect to the first arm. On the other hand, the holding arm is configured to pivot at an angular magnification of 1/2. In this case, the “substantial length” refers to the dimension between the pivot centers of each arm. According to such a configuration,
In the process of turning the second arm and the holding arm with the turning of the first arm, the holding arm moves along a straight line with respect to the traveling direction while maintaining the state of pointing in the traveling direction. Will go.

[0014] Preferably, the angle conversion mechanism doubles the speed of rotation of the input vehicle in the same direction as the input vehicle that rotates in the direction opposite to the turning direction of the first arm with the link operation of the first link mechanism. And an output wheel for transmitting the power to the second arm. According to such a configuration, when the first arm turns, the input vehicle is moved to the first position by the link operation of the first link mechanism.
The input vehicle rotates by a predetermined angle in the direction opposite to the turning direction of the arm, and the output vehicle transmits the rotation of the input vehicle to the second arm at twice the speed in the same direction. Therefore, the second arm is
The arm turns by a double angle in the direction opposite to the turning direction of the arm.

[0015] Preferably, the angle conversion mechanism is constituted by a planetary mechanism. More preferably, the input wheel is constituted by an internal gear held rotatably on the first arm, and the output wheel is held by the first arm rotatably and rotatable integrally with the second arm. It consists of. According to such a configuration, power transmission from the first arm to the second arm is reliably performed, and the layout is advantageous.

The first link mechanism preferably includes a base link fixed to a pivot shaft of the first arm, and a first intermediate link fixed to an intermediate shaft rotatably disposed coaxially with the output vehicle. , A base link and a first connection link connecting the first intermediate link. The second link mechanism is preferably a second intermediate link fixed to the intermediate shaft, a distal link formed integrally with the holding arm and rotatably held by the second arm, a second intermediate link and a distal end. And a second connection link connecting the links. And
The input vehicle is connected to the first connection link.

According to such a configuration, the first arm pivots, so that the base end link,
The first connecting link and the first intermediate link cause a relative position change. Then, as the relative position between the first connecting link and the first arm changes, the input vehicle connected to the first connecting link rotates, and the rotation of the input vehicle is doubled by the output vehicle. The power is transmitted to the second arm.

On the other hand, the link operation of the first link mechanism including the base link, the first connecting link, and the first intermediate link is as follows.
It is directly transmitted to the link operation of the second link mechanism including the second intermediate link, the second connecting link, and the distal link.
This is because both the first intermediate link and the second intermediate link are fixed to the intermediate shaft. Since the distal link of the second link mechanism is formed integrally with the holding arm, the holding arm pivots with the link operation of the second link mechanism.

In this case, since the proximal link is fixed to the pivot axis of the first arm, even if the first arm pivots,
The absolute angle of the proximal link does not change. For this reason, even when the first and second link mechanisms perform a link operation, the proximal link and the first intermediate link maintain the parallel state,
In addition, if the second intermediate link and the distal link are configured to maintain the parallel state, the holding arm always points in a fixed direction.

Therefore, it is preferable that the proximal link and the first intermediate link are arranged in parallel with the same size, and that the second intermediate link and the distal link are arranged in parallel with the same size. According to such a configuration, both the first and second link mechanisms perform a parallel link operation,
The directivity of the holding arm can be kept constant.

More preferably, a straight line from a connecting portion between the input vehicle and the first connection link to a rotation center of the input vehicle, the base end link and the intermediate link are arranged in parallel with the same dimensions. According to such a configuration, with the relative angle change of the base link and the intermediate link with respect to the first arm, the input vehicle is appropriately rotated by that angle, and the link operation of the first link mechanism and the input vehicle Interlocking with rotation is performed smoothly.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic perspective view showing the appearance of a transfer robot according to an embodiment of the present invention. As shown in the figure,
The transfer robot 1 includes a drive motor 3 fixedly installed on a base 2, a first arm 4 to which rotational torque is applied from the drive motor 3, and a second arm rotatably connected to a distal end of the first arm 4. 5 and a holding arm 6 that is pivotally connected to the distal end of the second arm 5. At the tip of the holding arm 6, a suction hole 6a for applying a suction holding force by a negative pressure to a transferred object W such as a semiconductor substrate (including a DVD original plate and a CD original plate) or a glass substrate is formed. ing. The base 2 can move back and forth, right and left, and can also turn horizontally.

FIG. 2 is a longitudinal sectional view showing the internal structure of the transfer robot 1. As shown in the figure, the first arm 4 is rotatably held via a bearing 8 on a swivel shaft 7 fixed to the base 2 upright. In this embodiment, as a driving means for rotating the first arm 4, a first pulley 9 fixed to the first arm 4, a driving pulley 10 fixed to the driving shaft 3 a of the driving motor 3, and both pulleys And a timing belt 11 wound around 9 and 10. Instead of the first pulley 9, the driving pulley 10, and the timing belt 11, a gear train mechanism, a friction wheel train mechanism, or the like may be employed.

At the tip of the first arm 4, an internal gear (internal gear) 12a and an external gear (on
2b is provided. The internal gear 12 a is rotatably held on the first arm 4 via a bearing 13, and the external gear 12 b is rotatably held on the first arm 4 via a bearing 14. It is fitted and fixed to the shaft 15. The output shaft 15 is fixed to the second arm 5.

The number of teeth of the internal gear 12a is
Is set to twice the number of teeth. Also, the internal gear 12a
Is meshed with the external gear 12b on the distal end side of the first arm 4. Further, the internal gear 12a has two divided gears 12a1 and 12a2 of the same specification divided in the thickness direction.
And the two split gears 12a1, 1
A so-called scissor gear is provided between 2a2 and an elastic body such as a coil spring for urging the two to rotate relative to each other. Then, the two divided gears 12
The back gear is removed as much as possible by the external gear 12b meshing with the a1 and 12a2.

A tip shaft 16 is fixed to the tip of the second arm 5, and the holding arm 6 is rotatably held on the tip shaft 16 via a bearing 17. Note that the substantial length of the first arm 4 and the second arm 5, that is, the distance between the centers of rotation of both ends of both arms 4 and 5, are set to be the same.

On the other hand, the transfer robot 1 has a first link mechanism 18 that performs a link operation with the turning of the first arm 4.
And a second link mechanism 19 that performs a link operation while interlocking with the first link mechanism 18 with the turning of the second arm 5.

As shown in FIG. 1, the first link mechanism 18 includes a base link 20 fixed to the pivot 7 and an output shaft 1.
5 the first intermediate link 2 fixed to the intermediate shaft 21 coaxial with
2 and a first connection link 23 that connects the distal ends of the base link 20 and the intermediate link 22. In this case, the intermediate shaft 21 is rotatably fitted into the hollow portion of the output shaft 15, and the first intermediate link 22 projects outward through a notch 24 formed in the output shaft 15. The base end link 20 is inclined by a predetermined angle on the turning surface of the first arm 4 with respect to a straight line (reference line A in FIG. 3) along the direction in which the transferred object W is to be moved.

The proximal link 20 and the first intermediate link 22 are arranged in parallel with the same dimensions. The first connection link 23 and the internal gear 12 a are rotatably connected via a pin member 25. In this case, the pin member 2
The straight line connecting the rotation center 5 and the rotation center of the internal gear 12a, the proximal link 20 and the first intermediate link 22 are arranged in parallel with the same dimensions.

The second link mechanism 19 includes a first intermediate link 2
2 fixed to the intermediate shaft 21 at a predetermined angular interval from the second shaft 21.
An intermediate link 26, a distal link 27 integrally formed with the holding arm 6, and a second connecting link 28 for connecting the respective distal ends of the second intermediate link 26 and the distal link 27. . In this case, the second intermediate link 26 and the tip link 27 are arranged in parallel with the same dimensions.

According to the transfer robot 1 having the above configuration, the rotational torque of the drive motor 3 is controlled by the timing belt 11.
3 is transmitted to the first arm 4 via the
As shown in FIG. 3, the first arm 4 moves β from the reference line A clockwise.
In the case where the second arm 5 turns by 2 ° in the counterclockwise direction with respect to the first arm 4 by the operation of the first link mechanism 18 and the planetary gear mechanism 12, the second link mechanism The operation 19 causes the holding arm 6 to pivot clockwise by β ° with respect to the second arm 5.

More specifically, the first arm 4 moves β
When turning, the first connecting link 23 moves with the linking operation of the first link mechanism 18, thereby rotating the internal gear 12 a of the planetary gear mechanism 12 in the counterclockwise direction by β °. The external gear 12b meshing with the second arm 5 rotates counterclockwise by 2β °, whereby the second arm 5 turns 2β ° counterclockwise with respect to the first arm 4.

On the other hand, when the first arm 4 and the second arm 5 turn in opposite directions, the first link mechanism 18
And the second link mechanism 19 performs a parallel link operation. In this case, since the proximal link 20 is fixed to the base 2 and the first intermediate link 22 and the second intermediate link 26 are integrated, the proximal link 20 is integrated with the distal link 27 of the second link mechanism 19. The formed holding arm 6 does not change its angle from the initial state.

That is, even if the first link mechanism 18 and the second link mechanism 19 perform a link operation with the turning of the first arm 4 and the second arm 5, the base link 20 and the first intermediate link 22 are always parallel. , And the second intermediate link 26 and the tip link 27 are also always kept parallel, so that the tip link 27 does not change its angle. As a result, the holding arm 6 always points in a fixed direction. And the first
Since the arm 4 and the second arm 5 have substantially the same length, the holding arm 6 moves in a straight line along the reference line A shown in FIG.

In the above-described embodiment, the planetary gear mechanism 1 composed of two gears serves as an angle conversion mechanism for rotating the second arm 5 in conjunction with the link operation of the first link mechanism 18.
Although 2 is used, an angle conversion mechanism including three or more gears or two or more friction wheels may be used.

Further, in the above-described embodiment, the suction hole 6a for sucking and holding the transferred object by the negative pressure is formed at the tip of the holding arm 6, but such a suction hole 6a is not formed. A structure in which the transferred object W is simply placed on the holding arm 6 may be employed.

[0038]

According to the transfer robot of the present invention, the first link mechanism that performs a link operation in accordance with the rotation of the first arm, and the angle by which the second arm rotates in conjunction with the link operation of the first link mechanism. Since the conversion mechanism and the second link mechanism for linking and rotating the holding arm in conjunction with the first link mechanism with the rotation of the second arm are provided, the second arm and the second arm are rotated with the rotation of the first arm. Since the power transmission mechanism for rotating the holding arm includes the first and second link mechanisms and the angle conversion mechanism, a long timing belt as in the related art is not required.

As a result, the turning of the first arm is immediately and accurately transmitted to the holding arm, and the power is transmitted as compared with the case where the power is transmitted by the timing belt.
Time delays and unevenness are less likely to occur when the holding arm is turned, and troublesome and complicated belt tension adjustment work is not required, reducing the number of work steps during assembly, improving work efficiency, and facilitating maintenance and inspection. It is planned. Further, when used in an ultra-high vacuum or the like, the generation of outgas can be suppressed as much as possible, and the problem of hindering the vacuum atmosphere is avoided.

In this case, the substantial lengths of the first arm and the second arm are set to be the same, and the second arm is rotated at twice the angle magnification with respect to the first arm, and is rotated with respect to the second arm. If the holding arm is configured to rotate at a half angle magnification, the holding arm always points in its own traveling direction when the second arm and the holding arm rotate with the rotation of the first arm. In this state, the object is moved along a straight line with respect to the traveling direction, so that the object can be conveyed without any trouble even in a narrow space.

Further, the input vehicle which rotates the angle conversion mechanism in the direction opposite to the turning direction of the first arm in accordance with the link operation of the first link mechanism, and the rotation of the input vehicle is doubled in the same direction. And an output wheel transmitting to the second arm,
By the operation of the input vehicle and the output vehicle, the second arm
The arm is turned by a double angle in a direction opposite to the turning direction of the arm, and thus functions properly as a speed increasing mechanism.

Further, if the angle conversion mechanism is constituted by a planetary mechanism, the angle conversion mechanism can be compactly and appropriately arranged with respect to the arm.

Further, the input wheel is constituted by an internal gear rotatably held by the first arm, and the output wheel is constituted by external teeth rotatably held by the first arm and rotatable integrally with the second arm. If the gears are used, the power transmission from the first arm to the second arm is reliably performed, and the layout is advantageous.

On the other hand, the first link mechanism includes a base end link fixed to a pivot shaft of the first arm, a first intermediate link fixed to an intermediate shaft rotatably disposed coaxially with the output vehicle, and A second link mechanism formed of a base link and a first link linking the first intermediate link, wherein the second link mechanism is formed integrally with a second intermediate link fixed to the intermediate shaft, and the holding arm; The first link mechanism is constituted by a front link rotatably held by the first link mechanism and a second connection link connecting the second intermediate link and the front link to connect the input vehicle to the first connection link. The input vehicle can be rotated in conjunction with the link operation of (1), and both link operations of the first link mechanism and the second link mechanism can be linked accurately.

The base link and the first intermediate link are
By arranging the second intermediate link and the tip link in parallel with the same dimensions and in parallel with the same dimensions,
Both of the second link mechanisms perform a parallel link operation, so that the directivity of the holding arm can be maintained constant.

Furthermore, if the straight line from the connecting portion between the input vehicle and the first connecting link to the rotation center of the input vehicle and the base end link and the intermediate link are arranged in parallel with the same dimensions, the first
The link operation of the link mechanism and the rotation of the input vehicle can be smoothly linked.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating a schematic overall configuration of a transfer robot according to an embodiment of the present invention.

FIG. 2 is a vertical sectional side view of a main part showing an internal structure of the transfer robot according to the embodiment of the present invention.

FIG. 3 is a schematic plan view illustrating an operation of the transfer robot according to the embodiment of the present invention.

FIG. 4 is a perspective view illustrating a schematic configuration of a conventional transfer robot.

FIG. 5 is a vertical sectional side view showing an internal structure of a conventional transfer robot.

FIG. 6 is a schematic plan view showing the operation of a conventional transfer robot.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Conveyance robot 2 Base 3 Drive motor (drive source) 4 1st arm 5 2nd arm 6 Holding arm 12 Planetary gear mechanism (angle conversion mechanism) 12a Internal gear (input wheel) 12b External gear (output wheel) 15 Output Shaft 18 First link mechanism 19 Second link mechanism 20 Base end link 21 Intermediate shaft 22 First intermediate link 23 First connection link 25 Pin member (connection between first connection link and input vehicle) 26 Second intermediate link 27 Tip link 28 Second link W

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3F060 AA01 AA07 CA24 DA10 EA01 EB02 EB12 EC02 EC12 FA02 GA05 GA13 GB02 GB06 GB12 GB21 GD14 5F031 CA02 CA05 FA01 FA02 GA08 GA43 GA47 LA07 LA13 LA14

Claims (8)

[Claims] 1. A first motor to which a rotational torque is applied from a driving source.
A second arm and a holding arm for holding an object to be transported are sequentially connected to the distal end of the arm, and with the first arm turning to one side, the second arm turns to the other side; In a transfer robot configured so that the holding arm pivots to one side, a first link mechanism that performs a link operation in accordance with the rotation of the first arm, and the second link mechanism that operates in conjunction with the link operation of the first link mechanism An angle conversion mechanism for rotating the arm and a second link mechanism for rotating the holding arm by performing a link operation while interlocking with the first link mechanism with the rotation of the second arm. Transfer robot. 2. The apparatus according to claim 1, wherein the first arm and the second arm have substantially the same length, and the second arm pivots at twice the angle magnification with respect to the first arm, and 2. The transfer robot according to claim 1, wherein the holding arm is configured to pivot at an angular magnification of 1/2 with respect to the arm. 3. An input vehicle, wherein the angle conversion mechanism rotates in a direction opposite to a turning direction of the first arm with a link operation of the first link mechanism, and the rotation of the input vehicle is doubled in the same direction. 3. The transfer robot according to claim 1, further comprising: an output vehicle configured to increase the speed and transmit the speed to the second arm. 4. 4. The transfer robot according to claim 1, wherein the angle conversion mechanism is a planetary mechanism. 5. The input wheel is an internal gear that is rotatably held by the first arm, and the output wheel is rotatably held by the first arm and rotates integrally with the second arm. 4. A possible external gear.
Or the transfer robot according to 4. 6. A first link mechanism, wherein the first link mechanism is fixed to a pivot shaft of the first arm and a first intermediate fixed to an intermediate shaft rotatably arranged coaxially with the output wheel. A link, and a first connection link connecting the base link and the first intermediate link, wherein the second link mechanism is integrated with a second intermediate link fixed to the intermediate shaft and the holding arm. And a second link connecting the second intermediate link and the tip link. The input vehicle is configured to be connected to the first link. The transfer robot according to any one of claims 3 to 5, wherein the transfer robot is connected to the transfer robot. 7. The base link and the first intermediate link are arranged in parallel with the same dimensions, and the second intermediate link and the distal link are arranged in parallel with the same dimensions. The transfer robot according to claim 6, wherein 8. A straight line extending from a connecting portion between the input vehicle and the first connection link to a rotation center of the input vehicle, and the base end link and the intermediate link are arranged in parallel with the same dimensions. The transfer robot according to claim 6, wherein: