WO2018105284A1

WO2018105284A1 - Industrial robot

Info

Publication number: WO2018105284A1
Application number: PCT/JP2017/039852
Authority: WO
Inventors: 矢澤　隆之; 章浩池田
Original assignee: 日本電産サンキョー株式会社
Priority date: 2016-12-07
Filing date: 2017-11-06
Publication date: 2018-06-14
Also published as: JP2018089765A; CN206982659U; TW201822969A; CN108161895A

Abstract

The base end side of a swiveling member 18 of this industrial robot is rotatably connected to a base 6, while the lower end side of a columnar member for holding an arm so as to be capable of raising and lower the arm via an arm support member is affixed to the tip end side of the swiveling member 18. The thickness of the center section 18a of the swiveling member 18 is thicker than the thickness of the base end section 18b of the swiveling member 18. The connecting section between the swiveling member 18 and the base 6 in this industrial robot is configured from a reduction gear 30, and a motor 29 for rotating the swiveling member 18 relative to the base 6 is directly connected to the reduction gear 30.

Description

Industrial robot

The present invention relates to a horizontal articulated industrial robot.

Conventionally, a horizontal articulated robot that conveys a workpiece is known (for example, see Patent Document 1). A robot described in Patent Document 1 includes a hand that holds a workpiece, an arm to which the hand is rotatably connected, a support member that supports the arm, a column that supports the support member so as to be movable up and down, and a lower end of the column. And a base on which the base is rotatably connected. The shape of the pedestal when viewed from the up-down direction is a substantially rectangular shape, and one end side of the pedestal is rotatably connected to the base. The lower end side of the column is fixed to the other end of the pedestal. The thickness of the other end portion of the pedestal is greater than the thickness of the one end portion of the pedestal.

In the robot described in Patent Document 1, the connecting portion between the pedestal and the base is constituted by a speed reducer. A motor is connected to the speed reducer via a belt, and when the motor rotates, the base rotates with respect to the base. The motor is disposed inside the pedestal. Moreover, the motor is arrange | positioned at the other end side part of the base with thickness increased. A relatively large opening for arranging the motor inside the pedestal is formed on the upper surface of the pedestal. The opening is formed on the upper surface of the other end portion of the pedestal having a large thickness. The opening is covered with a cover.

JP 2009-269126 A

In the robot described in Patent Document 1, a relatively large opening for arranging the motor is formed on the upper surface of the other end portion of the pedestal having a large thickness. Therefore, in the case of this robot, there is a possibility that the torsional rigidity of the pedestal may be lowered although the thickness of the other end side portion of the pedestal is increased. In addition, if the torsional rigidity of the pedestal decreases, the column fixed to the pedestal becomes easier to tilt when the robot is operating, so the arm and hand are more likely to vibrate during the operation of the robot, thereby increasing the operating speed of the robot. Becomes difficult.

Accordingly, an object of the present invention is to provide a horizontal articulated industrial type including a pivot member that supports a lower end of a columnar member that holds an arm up and down via an arm support member and is pivotally connected to a base. An object of the present invention is to provide an industrial robot capable of increasing the torsional rigidity of a turning member.

In order to solve the above-described problems, an industrial robot of the present invention includes a hand on which an object to be transported is mounted, an arm to which the hand is connected to the distal end side, and an arm to which the base end side of the arm is rotatably connected A support member, a columnar member that holds the arm support member so as to be movable up and down, a turning member that supports the lower end side of the columnar member, a base to which the turning member is rotatably connected, and a turning member with respect to the base And the turning member has a rectangular shape or an oval shape when viewed from above and below, and the longitudinal direction of the turning member when viewed from above and below is the first direction. Direction, one end side of the swivel member in the first direction is connected to the base, the lower end side of the columnar member is fixed to the other end side of the swivel member in the first direction, and the central portion of the swivel member in the first direction The thickness in the vertical direction is the first direction of the swivel member The turning mechanism is thicker than the thickness of the one end side part, and the turning mechanism forms a connecting part between the turning member and the base disposed in the turning member and reduces the rotation of the motor. The motor is directly connected to the speed reducer.

In the industrial robot of the present invention, the thickness in the vertical direction of the central portion in the first direction of the turning member is thicker than the thickness in the vertical direction of one end side portion in the first direction of the turning member. Moreover, in this invention, the one end side of the 1st direction of a turning member is connected with the base, and the connection part of a turning member and a base is comprised by the reduction gear. In the present invention, the motor is directly connected to the speed reducer, and the motor is disposed at a position relatively close to the speed reducer that forms the connecting portion between the turning member and the base. That is, in the present invention, the motor is arranged inside the turning member at a position closer to one end of the turning member in the first direction.

Therefore, in the present invention, it is not necessary to form an opening for arranging the motor in the central portion in the first direction of the turning member having a large thickness, or the central portion in the first direction of the turning member. Even if the opening is formed, the size of the opening formed in the central portion can be reduced. Therefore, in the present invention, it is possible to ensure the rigidity of the central portion where the thickness is increased, and as a result, it is possible to increase the torsional rigidity of the turning member.

In the present invention, for example, a gear is formed or fixed on the output shaft of the motor, and the speed reducer includes an input gear that meshes with the gear. In the present invention, the reduction gear is, for example, a cyclo reduction gear.

As described above, according to the present invention, a horizontal articulated type industry that includes a pivot member that supports a lower end of a columnar member that holds an arm up and down via an arm support member and is rotatably coupled to a base. In the robot for use, the torsional rigidity of the turning member can be increased.

It is a top view of the industrial robot concerning an embodiment of the invention. It is a side view of the industrial robot shown in FIG. It is a rear view of the lower end part of the industrial robot shown in FIG. It is sectional drawing for demonstrating the internal structure of the connection part of the base shown in FIG. 3, and a turning member. It is a top view of the base end side of the turning member shown in FIG. 4, a motor, and a reduction gear.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Schematic configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a side view of the industrial robot 1 shown in FIG. FIG. 3 is a rear view of the lower end portion of the industrial robot 1 shown in FIG.

The industrial robot 1 (hereinafter referred to as “robot 1”) of the present embodiment is a horizontal multi-portion for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”), which is an object to be transported. It is an articulated robot. The robot 1 includes two hands 3 on which a substrate 2 is mounted, two arms 4 to which the two hands 3 are connected to the distal end side, and a main body 5 that supports the two arms 4. And a base 6 that supports the main body 5. The hand 3 is rotatably connected to the distal end side of the arm 4. The base end side of the arm 4 is rotatably connected to the main body 5. The main body 5 is rotatably connected to the base 6.

The arm 4 is composed of two arm parts, a first arm part 8 and a second arm part 9, and expands and contracts with respect to the main body part 5. The base end side of the first arm portion 8 is rotatably connected to the main body portion 5. The proximal end side of the second arm portion 9 is rotatably connected to the distal end side of the first arm portion 8. The hand 3 is rotatably connected to the distal end side of the second arm portion 9.

The main body 5 includes two support members 15 that support the base ends of the two arms 4, an elevating member 16 that can be moved up and down while the two support members 15 are fixed, and an elevating member 16. Are provided so as to be able to move up and down, and a revolving member 18 that supports the lower end side of the columnar member 17 and is rotatably connected to the base 6.

The proximal end side of the arm 4 (that is, the proximal end side of the first arm portion 8) is rotatably connected to the distal end side of the support member 15. The base end side of the support member 15 is fixed to the elevating member 16. In this embodiment, the support member 15 and the elevating member 16 constitute an arm support member in which the proximal end side of the arm 4 is rotatably connected. The columnar member 17 is composed of two column portions, a first column portion 19 fixed to the revolving member 18 and a second column portion 20 that holds the elevating member 16 so as to be able to move up and down. The second column part 20 is held by the first column part 19 so as to be movable up and down. Note that the columnar member 17 may be configured by a single column portion.

As shown in FIG. 2, in one arm 4 of the two arms 4, the arm support member 15, the first arm portion 8, the second arm portion 9, and the hand 3 are arranged in this order from the lower side. In the other arm 4, the arm support member 15, the first arm portion 8, the second arm portion 9, and the hand 3 are arranged in this order from the upper side. In this embodiment, the two hands 3, the two arms 4, and the two arm support members 15 are arranged so as to overlap in the vertical direction. That is, the robot 1 of this embodiment is a double arm type robot.

In the robot 1, the second column 20 moves up and down with respect to the first column 19, and the elevating member 16 moves up and down together with the hand 3 and the arm 4 with respect to the second column 20. Further, the arm 4 expands and contracts with respect to the main body 5. Specifically, the arm 4 expands and contracts so that the hand 3 moves linearly with the hand 3 facing in a certain direction. Further, the turning member 18 rotates with respect to the base 6. The robot 1 transports the substrate 2 by a combination of these operations.

The robot 1 of this embodiment includes a rotation mechanism 24 (see FIG. 4) that rotates the rotation member 18 with respect to the base 6. Hereinafter, the configuration of the turning member 18, the configuration of the connecting portion between the base 6 and the turning member 18, and the configuration of the turning mechanism 24 will be described. The robot 1 includes an arm drive mechanism (not shown) for extending and retracting the arm 4 and rotating the hand 3 with respect to the arm 4, and an elevating mechanism for moving the second column portion 20 up and down relative to the first column portion 19. (Not shown) and an elevating mechanism (not shown) for elevating the elevating member 16 with respect to the second pillar portion 20 are provided.

(Configuration of swivel member, configuration of connecting portion between base and swivel member, and configuration of rotation mechanism)
FIG. 4 is a cross-sectional view for explaining the internal structure of the connecting portion between the base 6 and the turning member 18 shown in FIG. FIG. 5 is a plan view of the base end side of the turning member 18 shown in FIG.

The swivel member 18 is formed in a block shape having a rectangular or oval shape when viewed from the vertical direction. Moreover, the turning member 18 is formed in a substantially rectangular parallelepiped shape. When the longitudinal direction of the swivel member 18 when viewed from the up-down direction is the first direction, one end side of the swivel member 18 in the first direction is connected to the base 6 as shown in FIG. That is, the base end side of the turning member 18 is rotatably connected to the base 6. The swivel member 18 is disposed above the base 6. The lower end side of the columnar member 17 is fixed to the other end side of the turning member 18 in the first direction. That is, the lower end side of the columnar member 17 is fixed to the distal end side of the turning member 18. Specifically, the lower end surface of the first column part 19 is fixed to the upper surface on the distal end side of the turning member 18.

The thickness (vertical thickness) of the central portion 18a in the first direction of the swivel member 18 is thicker than the thickness (vertical thickness) of one end side portion of the swivel member 18 in the first direction. . In other words, the thickness of the central portion 18a is thicker than the thickness of the proximal end portion 18b of the turning member 18. Further, the thickness of the central portion 18a is larger than the thickness (the thickness in the vertical direction) of the other end side portion of the turning member 18 in the first direction. That is, the thickness of the central portion 18 a is thicker than the thickness of the tip portion 18 c of the turning member 18.

As shown in FIGS. 4 and 5, the base end portion 18b is formed with a recess 18d that is recessed downward from the upper surface of the base end portion 18b. A later-described motor 29 that constitutes the rotation mechanism 24 is disposed in the recess 18d. The recess 18d is covered from above by the cover 25. The lower end surface of the first pillar portion 19 is fixed to the upper surface of the tip portion 18c having a reduced thickness. The width of the tip end portion 18c in the first direction is substantially equal to the width of the first pillar portion 19 in the first direction.

The turning member 18 is made of, for example, an aluminum alloy. Moreover, the turning member 18 is formed in a hollow shape. The revolving member 18 of this embodiment is formed by casting using a sand mold, and the revolving member 18 is formed with a small opening 18e for sand removal that communicates with the inside of the revolving member 18. The openings 18 e are formed at a plurality of locations on the upper surface of the turning member 18 and at a plurality of locations on the lower surface of the turning member 18. The opening 18e is covered with a cover 25 or a cover 26 formed in a thin plate shape. In addition, illustration of the cover 26 is abbreviate | omitted in FIG.

Assuming that the direction perpendicular to the vertical direction and the first direction is the second direction, a reinforcing rib (not shown) formed in a flat plate shape is formed at the center position of the turning member 18 in the second direction. . The rib is formed in the entire area in the vertical direction inside the turning member 18. The rib is formed so that the thickness direction of the rib matches the second direction. Further, the rib is formed at least in the central portion 18a having a large thickness.

The rotation mechanism 24 includes a motor 29 and a speed reducer 30 that constitutes a connecting portion between the base 6 and the turning member 18. A gear 29 a is directly formed on the output shaft of the motor 29. Alternatively, a gear 29 a is fixed to the output shaft of the motor 29 concentrically with the output shaft of the motor 29. The motor 29 is disposed inside the turning member 18. Specifically, the motor 29 is disposed in the recess 18d. That is, the motor 29 is disposed on the proximal end portion 18b. The motor 29 is fixed to the base end portion 18b so that the output shaft protrudes downward. The motor 29 is disposed on the other end side in the first direction from the center of the speed reducer 30. When viewed from above and below, the motor 29 overlaps the speed reducer 30.

Reduction gear 30 decelerates and transmits the rotation of motor 29. The reduction gear 30 of this form is a cyclo reduction gear. The output part of the reduction gear 30 is being fixed to the base end part 18b from the lower side. The case body of the speed reducer 30 that rotatably supports the input portion of the speed reducer 30 and the output portion of the speed reducer 30 is fixed to the center portion of the base 6 from above. A motor 29 is directly connected to the speed reducer 30. Specifically, the input unit of the speed reducer 30 includes an input gear 31, and the gear 29 a and the input gear 31 are engaged with each other. Note that the case body of the speed reducer 30 may be fixed to the base end portion 18 b, and the output portion of the speed reducer 30 may be fixed to the center portion of the base 6. Further, the speed reducer 30 may be a speed reducer other than the cyclo speed reducer.

As shown in FIG. 5, in this embodiment, the curved surface 18f having a concave curved surface that forms the side surface on the other end side of the concave portion 18d in the first direction and the one end of the curved surface 18f in the second direction from one end to the one side in the second direction. A planar plane 18g, a planar plane 18h extending from the other end of the curved surface 18f in the second direction to the other side in the second direction, and a planar plane 18j connected to the other end of the plane 18h in the second direction A boundary surface between the central portion 18a and the base end portion 18b is formed.

That is, as shown in FIG. 5, a part of the other end side of the base end portion 18b in the first direction enters the central portion 18a in the first direction. Specifically, the central portion in the second direction on the other end side of the base end portion 18b in the first direction enters the central portion 18a in the first direction. The shape of the curved surface 18f when viewed in the vertical direction is a semicircular arc. The

planes

18g and 18h are planes orthogonal to the first direction. The plane 18j is slightly inclined with respect to the plane 18h. The motor 29 is disposed on the other end side in the first direction with respect to the

planes

18g and 18h. The center of the reduction gear 30 is arrange | positioned in the one end side of a 1st direction rather than the

planes

18g and 18h.

(Main effects of this form)
As described above, in this embodiment, the thickness of the central portion 18a of the turning member 18 is larger than the thickness of the proximal end portion 18b. In this embodiment, the motor 29 is directly connected to the speed reducer 30 that constitutes the connecting portion between the base 6 and the turning member 18, and the motor 29 is disposed at the base end portion 18b. Therefore, in this embodiment, it is not necessary to form an opening for arranging the motor 29 in the central portion 18a having a large thickness. Therefore, in this embodiment, it is possible to ensure the rigidity of the central portion 18a having a large thickness, and as a result, it is possible to increase the torsional rigidity of the turning member 18.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

In the embodiment described above, the motor 29 is disposed at the proximal end portion 18b, but the motor 29 may be disposed at the boundary between the central portion 18a and the proximal end portion 18b. In this case, an opening for disposing the motor 29 may be formed in the central portion 18a, but this opening is formed at the boundary between the central portion 18a and the base end portion 18b. Even if an opening is formed in the central portion 18a, the size of the opening can be reduced. Therefore, even in this case, it is possible to ensure the rigidity of the thick central portion 18a, and as a result, it is possible to increase the torsional rigidity of the turning member 18.

In the above-described embodiment, when the turning member 18 is formed by a method other than casting using a sand mold, the opening 18e may not be formed in the turning member 18. In the embodiment described above, the thickness of the tip end portion 18c may be equal to the thickness of the central portion 18a. Moreover, in the form mentioned above, the side surface of the lower end side of the 1st pillar part 19 may be fixed to the end surface (the other end surface of the turning direction of the turning member 18) of the front-end | tip part 18c in a 1st direction. Furthermore, in the form mentioned above, the arm 4 may be comprised by the 3 or more arm part.

In the above-described form, the robot 1 is a so-called double arm type robot having two hands 3 and two arms 4, but the robot 1 has one hand 3 and one arm 4. A single arm type robot may be provided. Moreover, in the form mentioned above, the base 6 may be movable in a horizontal direction. In the above-described embodiment, the transfer target object transferred by the robot 1 is the substrate 2. However, the transfer target object transferred by the robot 1 may be a semiconductor wafer other than the substrate 2.

1 Robot (industrial robot)
2 Substrate (glass substrate, transport object)
3 Hand 4 Arm 6 Base 15 Support member (part of arm support member)
16 Elevating member (part of arm support member)
17 Columnar member 18 Revolving member 18a Center part (center part of 1st direction)
18b Base end portion (one end side portion in the first direction)
24 Rotating mechanism 29 Motor 29a Gear 30 Reduction gear 31 Input gear

Claims

A hand on which an object to be transported is mounted, an arm to which the hand is connected to the front end side, an arm support member to which the base end side of the arm is rotatably connected, and the arm support member are held up and down. A columnar member, a turning member that supports a lower end side of the columnar member, a base to which the turning member is rotatably connected, and a turning mechanism for turning the turning member with respect to the base. Prepared,
The shape of the swivel member when viewed from above and below is rectangular or oval.
When the longitudinal direction of the swivel member when viewed from the vertical direction is the first direction,
One end side of the swivel member in the first direction is connected to the base,
The lower end side of the columnar member is fixed to the other end side of the turning member in the first direction,
The vertical thickness of the central portion of the swivel member in the first direction is thicker than the vertical thickness of one end side portion of the swivel member in the first direction,
The turning mechanism includes a motor disposed inside the turning member, and a speed reducer that forms a connecting portion between the turning member and the base and transmits the rotation of the motor at a reduced speed.
The industrial robot according to claim 1, wherein the motor is directly connected to the speed reducer.
A gear is formed or fixed to the output shaft of the motor,
The industrial robot according to claim 1, wherein the speed reducer includes an input gear meshing with the gear.
3. The industrial robot according to claim 1, wherein the speed reducer is a cyclo speed reducer.