CN206982659U - Industrial robot - Google Patents
Industrial robot Download PDFInfo
- Publication number
- CN206982659U CN206982659U CN201720319953.3U CN201720319953U CN206982659U CN 206982659 U CN206982659 U CN 206982659U CN 201720319953 U CN201720319953 U CN 201720319953U CN 206982659 U CN206982659 U CN 206982659U
- Authority
- CN
- China
- Prior art keywords
- component
- convolution
- base station
- arm
- convolution component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 claims description 15
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 20
- 239000000758 substrate Substances 0.000 description 7
- 230000003028 elevating effect Effects 0.000 description 3
- 230000008450 motivation Effects 0.000 description 3
- 239000004576 sand Substances 0.000 description 3
- 238000005266 casting Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/08—Programme-controlled manipulators characterised by modular constructions
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A kind of industrial robot, it is the articulated type industrial robot for including convolution component, above-mentioned convolution component supports to the lower end of cylindrical component, and base station can be rotationally connected with, arm is kept into and can lifted via arm supporting member by above-mentioned cylindrical component, and above-mentioned industrial robot can improve the torsional rigidity of convolution component.In above-mentioned industrial robot, the base end side of convolution component (18) can be rotationally connected with base station (6), the front of convolution component is fixed with the lower end side of cylindrical component, and arm is kept into and can lifted via arm supporting member by above-mentioned cylindrical component.The thickness of the cardinal extremity part (18b) of the thickness ratio convolution component (18) of the middle body (18a) of convolution component (18) is big.In above-mentioned industrial robot, the connecting portion of convolution component (18) and base station (6) is made up of decelerator (30), decelerator is directly connected to motor (29), and above-mentioned motor (29) is used to make convolution component (18) rotate relative to base station (6).
Description
Technical field
It the utility model is related to a kind of articulated type industrial robot.
Background technology
All the time, it is known that a kind of horizontal articulated robot for carrying workpiece (for example, referring to patent document 1).Specially
Robot described in sharp document 1 includes：Hand, the hand are kept to workpiece；Arm, hand can be rotationally connected with the arm；Branch
Bearing member, the supporting member support to arm；Supporting member is supported to and can lifted by post, the post；Pedestal, the pedestal supply post
Lower end fix；And base station, pedestal can be rotationally connected with the base station.Pedestal when from above-below direction is shaped as
Generally rectangular, a side of pedestal can be rotationally connected with base station.The other end of pedestal is fixed for the lower end side of post.Pedestal
Another side part thickness ratio pedestal an one end side portion thickness it is big.
In the robot described in patent document 1, the connecting portion of pedestal and base station is made up of decelerator.Above-mentioned decelerator
Via band connection in motor, as the motor rotates, pedestal can rotate relative to base station.Motor is configured at the interior of pedestal
Portion.In addition, motor is configured at the another side part that thickness becomes big pedestal.In the upper surface of pedestal formed with for by electricity
Motivation is configured at the relatively large opening portion of the inside of pedestal.Opening portion is formed at the other end sidepiece that thickness becomes big pedestal
The upper surface divided.In addition, the covered covering in opening portion.
Patent document 1：Japanese Patent Laid-Open 2009-269126 publications
In the robot described in patent document 1, become the upper surface shape of the another side part of big pedestal in thickness
Into the relatively large opening portion having for configuring motor.Therefore, in the case of above-mentioned robot, although pedestal is another
The thickness of one end side portion becomes big, and the torsional rigidity of pedestal may still reduce.If in addition, pedestal torsional rigidity reduce, Gu
Easily tilted when action of the post in robot of pedestal, therefore, arm or hand easily produce vibration during the action of robot, its
As a result it is that the responsiveness for improving robot becomes more difficult.
Utility model content
Therefore, problem of the present utility model is to provide a kind of industrial robot, and it is to include the horizontal more of component of circling round
Joint type industrial robot, the convolution component supports to the lower end of cylindrical component, and can be rotationally connected with base
Arm is kept into and can lifted via arm supporting member by platform, the cylindrical component, and above-mentioned industrial robot can improve convolution component
Torsional rigidity.
In order to solve above-mentioned problem, industrial robot of the present utility model is characterised by, including：Hand, the hand are loaded and removed
Transport object；Arm, hand are connected to the front of the arm；Arm supporting member, the base end side of arm can be rotationally connected with the arm branch
Bearing member；Arm supporting member is kept into and can lifted by cylindrical component, the cylindrical component；Circle round component, and the convolution component is to post
The lower end side of shape component is supported；Base station, convolution component can be rotationally connected with the base station；And rotating mechanism, this turn
Motivation structure makes convolution component be rotated relative to base station, and convolution component when from above-below direction is shaped as rectangle or oval
Shape, if the long side direction of convolution component during by from above-below direction is set to first direction, convolution component in first party
A upward side is connected to base station, and the another side in a first direction for the component that circles round is fixed with the lower end of cylindrical component
Side, one end sidepiece of the first direction of the thickness ratio convolution component of the above-below direction of the middle body of the first direction for the component that circles round
The thickness of the above-below direction divided is big, and rotating mechanism includes：Motor, the motor are configured at the inside of convolution component；Decelerator,
The decelerator form convolution component and base station connecting portion, and by motor be rotated in deceleration after transmitted, motor
It is directly connected to decelerator.
In industrial robot of the present utility model, the thickness of the above-below direction of the middle body of the first direction for the component that circles round
The thickness for spending the above-below direction of an one end side portion of the first direction than the component that circles round is big.In addition, in the utility model, convolution
One side of the first direction of component is connected to base station, and the connecting portion of circle round component and base station is made up of decelerator.In addition, at this
In utility model, motor is directly connected to decelerator, relative with the decelerator of the connecting portion of base station with formation convolution component
Nearer position is configured with motor.That is, in the utility model, closer to convolution component first direction it is one end,
The inside of convolution component is configured with motor.
Therefore, in the utility model, formed without becoming the middle body of first direction of big convolution component in thickness
For configuring the opening portion of motor, or even in convolution component first direction middle body formed with opening portion, also can
Reduce the size for the opening portion for being formed at middle body.Thus, in the utility model, it can ensure that thickness becomes big middle body
Rigidity, its result be can improve convolution component torsional rigidity.
In the utility model, for example, forming or being fixed with gear on the output shaft of motor, decelerator includes and tooth
Take turns the input gear of engagement.In addition, in the utility model, decelerator is, for example, planet-cycloid reducer.
As described above, in the utility model, in the articulated type industrial robot including circling round component, can carry
The torsional rigidity of height convolution component, wherein, the convolution component supports to the lower end of cylindrical component, and can be rotationally
Base station is connected to, arm is kept into and can lifted via arm supporting member by the cylindrical component.
Brief description of the drawings
Fig. 1 is the top view of the industrial robot of the utility model embodiment.
Fig. 2 is the side view of the industrial robot shown in Fig. 1.
Fig. 3 is the rearview of the bottom of the industrial robot shown in Fig. 1.
Fig. 4 is the sectional view for being illustrated to the internal structure of the base station shown in Fig. 3 and the connecting portion of convolution component.
Fig. 5 is the top view of the convolution base end side of component shown in Fig. 4, motor and decelerator.
Symbol description
1 robot；
2 substrates；
3 hands；
4 arms；
6 base stations；
15 supporting members；
16 lift components；
17 cylindrical components；
18 convolution components；
18a middle bodies；
18b cardinal extremities part；
24 rotating mechanisms；
29 motor；
29a gears；
30 decelerators；
31 input gears.
Embodiment
Hereinafter, referring to the drawings, embodiment of the present utility model is illustrated.
(schematic configuration of industrial robot)
Fig. 1 is the top view of the industrial robot 1 of the utility model embodiment.Fig. 2 is the industrial robot shown in Fig. 1
1 side view.Fig. 3 is the rearview of the bottom of the industrial robot 1 shown in Fig. 1.
The industrial robot 1 (call in the following text " robot 1 ") of present embodiment is for carrying the liquid crystal as conveying object
The horizontal articulated robot of the glass substrate 2 (call in the following text " substrate 2 ") of display.Above-mentioned robot 1 includes：Two hands 3,
Two above-mentioned hands 3 load substrate 2；Two arms 4, the front of two said arm 4 are connected to two hands 3；Main part 5, should
Main part 5 supports to two arms 4；And base station 6, the base station 6 support to main part 5.Hand 3 can be connected rotationally
In the front of arm 4.The base end side of arm 4 can be rotationally connected with main part 5.Main part 5 can be rotationally connected with base station
6。
Arm 4 is made up of the first arm 8 and second arm 9 the two arms, and flexible relative to main part 5.First arm 8
Base end side can be rotationally connected with main part 5.The base end side of second arm 9 can be rotationally connected with the first arm 8
Front.Hand 3 can be rotationally connected with the front of the second arm 9.
Main part 5 includes：Two supporting members 15, two supporting members 15 are carried out to the base end side of two arms 4 respectively
Supporting；Lift component 16, the lift component 16 is fixed for two supporting members 15, and can be moved up and down；Cylindrical component 17,
Lift component 16 is kept into and can lifted by the cylindrical component 17；And convolution component 18, the convolution component 18 is to cylindrical component 17
Lower end side supported, and base station 6 can be rotationally connected with.
The base end side (that is, the base end side of the first arm 8) of arm 4 can be rotationally connected with the front of supporting member 15.
The base end side of supporting member 15 is fixed on lift component 16.In the present embodiment, by supporting member 15 and the structure of lift component 16
Into arm supporting member, the base end side of arm 4 can be rotationally connected with the arm supporting member.Cylindrical component 17 is by being fixed on convolution structure
The two post portions of the second post portion 20 that first post portion 19 of part 18 and be kept into lift component 16 can lift are formed.Second post
Portion 20 is held in the first post portion 19 in a manner of it can lift.In addition, cylindrical component 17 can also be made up of a post portion.
As shown in Fig. 2 in one arm 4 in two arms 4, supporting member 15, the first arm are configured with successively from downside
Portion 8, the second arm 9 and hand 3, in another arm 4, it is configured with supporting member 15, the first arm 8, second successively from upside
Arm 9 and hand 3.In addition, in the present embodiment, two hands 3, two arms 4 and two supporting members 15 are with the vertical direction
Overlapping mode configures.That is, the robot 1 of present embodiment is double arm robot.
In robot 1, the second post portion 20 moves up and down relative to the first post portion 19, and lift component 16 is relative to the second post
Portion 20 moves up and down together with hand 3 and the grade of arm 4.In addition, arm 4 is flexible relative to main part 5.Specifically, arm 4 is so that hand 3 exists
The mode linearly moved in the state of towards fixed-direction is stretched.In addition, convolution component 18 rotates relative to base station 6.It is logical
The combination of above-mentioned action is crossed, so as to the carrying substrate 2 of robot 1.
The robot 1 of present embodiment includes making (the reference picture of rotating mechanism 24 that convolution component 18 rotates relative to base station 6
4).Hereinafter, the structure to the component 18 that circles round, the structure of connecting portion and the structure of rotating mechanism 24 of base station 6 and convolution component 18
Illustrate.In addition, robot 1 include making the telescopic arm of arm 4 and make arm drive mechanism (not shown) that hand 3 rotates relative to arm 4,
Make the elevating mechanism (not shown) and make elevating mechanism 16 relative to second that the second post portion 20 lifts relative to the first post portion 19
The elevating mechanism (not shown) that post portion 20 lifts.
(structure, the structure of connecting portion and the structure of rotating mechanism of base station and convolution component of convolution component)
Fig. 4 is the section view for being illustrated to the internal structure of the base station 6 shown in Fig. 3 and the connecting portion of convolution component 18
Figure.Fig. 5 is the top view of the convolution base end side of component 18 shown in Fig. 4, motor 29 and decelerator 30.
Convolution component 18 is formed as being shaped as rectangle or the bulk of Long Circle when from above-below direction.In addition, return
Rotation component 18 is shaped generally as cuboid.If the long side direction of the convolution component 18 during by from above-below direction is set to first party
To then as shown in figure 3, a side of the convolution component 18 of first direction is connected to base station 6.That is, the cardinal extremity of convolution inner member 18
Side can be rotationally connected with base station 6.Convolution component 18 is configured at the position more upper than base station 6.The convolution structure of first direction
The another side of part 18 is fixed with the lower end side of cylindrical component 17.That is, it is fixed with cylindrical component in the front of convolution component 18
17 lower end side.Specifically, the upper surface of the front of convolution component 18 is fixed in the lower surface in the first post portion 19.
The middle body 18a of the first direction of convolution component 18 thickness (thickness of above-below direction) is than convolution component 18
The thickness (thickness of above-below direction) of one one end side portion of first direction is big.That is, the thickness ratio convolution component 18 of middle body 18a
Cardinal extremity part 18b thickness it is big.In addition, the another side of the first direction of middle body 18a thickness ratio convolution component 18
Partial thickness (thickness of above-below direction) is big.That is, the fore-end 18c's of the thickness ratio convolution component 18 of middle body 18a
Thickness is big.
As shown in Figure 4, Figure 5, on the 18b of cardinal extremity part formed with the upper table from cardinal extremity part 18b downwards side depression
Recess 18d.The motor 29 described hereinafter for forming rotating mechanism 24 is configured among recess 18d.Recess 18d is from upside quilt
Lid 25 covers.The thinning fore-end 18c of thickness upper surface is fixed in the lower surface in the first post portion 19.The front end of first direction
Part 18c width and the width in the first post portion 19 of first direction are roughly equal.
Convolution component 18 is for example formed by aluminium alloy.In addition, convolution component 18 is formed as hollow form.Present embodiment is returned
Rotation component 18 is formed by having used the casting of sand mold, the leakage formed with the inside for leading to convolution component 18 on convolution component 18
The less opening portion 18e of sand.Opening portion 18e is formed at multiple positions of the upper surface of convolution component 18, and is formed at
Multiple positions of the lower surface of convolution component 18.Opening portion 18e covered 25 is formed as the laminal grade of lid 26 covering.In addition,
In Fig. 1, the diagram of lid 26 is eliminated.
If the direction orthogonal with above-below direction and first direction is set into second direction, in the convolution component of second direction
18 center is formed with the rib (not shown) for being formed as flat reinforcement.Above-mentioned rib is formed at the interior of convolution component 18
The whole region of the above-below direction in portion.In addition, the thickness direction that above-mentioned ribbed turns into rib is consistent with second direction.It is in addition, above-mentioned
Rib becomes big middle body 18a at least formed on thickness.
Rotating mechanism 24 includes motor 29 and forms the decelerator 30 of base station 6 and the connecting portion for the component 18 that circles round.In electricity
Gear 29a is formed directly with the output shaft of motivation 29.Or the output shaft on the output shaft of motor 29 with motor 29
In concentrically fixed gear 29a.Motor 29 is configured at the inside of convolution component 18.Specifically, motor 29 is configured at
Among recess 18d.That is, motor 29 is configured at cardinal extremity part 18b.In addition, motor 29 is with the output shaft side that side protrudes down
Formula is fixed on cardinal extremity part 18b.Motor 29 is configured at position of the center than decelerator 30 by the another side of first direction.
When from above-below direction, motor 29 is overlapping with decelerator 30.
Decelerator 30 makes the rotational deceleration of motor 29 and transmitted.The decelerator 30 of present embodiment is cycloidal-pin wheel
Decelerator.Cardinal extremity part 18b is fixed in the output section of decelerator 30 from downside.By the input unit of decelerator 30 and decelerator 30
The housing that output section is supported to the decelerator 30 that can be rotated is fixed on the central part of base station 6 from upside.Decelerator 30 with it is electronic
Machine 29 is directly connected to.Specifically, the input unit of decelerator 30 includes input gear 31, and gear 29a engages with input gear 31.
Cardinal extremity part 18b is fixed on alternatively, it is also possible to the housing of decelerator 30, the center of base station 6 is fixed in the output section of decelerator 30
Portion.In addition, decelerator 30 can also be the decelerator beyond planet-cycloid reducer.
As shown in figure 5, in the present embodiment, by the curved surface 18f of concave curved planar, plane plane 18g, plane
Plane 18h and plane plane 18j forms the boundary face between middle body 18a and cardinal extremity part 18b, wherein, above-mentioned curved surface
18f forms the side of the recess 18d of first direction another side, and above-mentioned plane 18g is from the curved surface 18f of second direction one end
Extended to the side of second direction, opposite sides of the above-mentioned plane 18h from the curved surface 18f of the second direction other end to second direction
Extension, above-mentioned plane 18j are connected to the plane 18h of the second direction other end.
That is, as shown in figure 5, a part for the cardinal extremity part 18b of first direction another side enters in a first direction
Among middle body 18a.Specifically, the cardinal extremity part 18b of first direction another side, second direction core
Enter in a first direction among middle body 18a.Curved surface 18f's when from above-below direction is shaped as semicircular arc.It is flat
Face 18g, 18h are the plane orthogonal with first direction.Plane 18j is slightly slanted relative to plane 18h.Motor 29 is configured at ratio
Position of plane 18g, 18h by the another side of first direction.The center configuration of decelerator 30 in than plane 18g, 18h lean on first
The position of one side in direction.
(main efficacy results of present embodiment)
As described above, in the present embodiment, the middle body 18a of convolution component 18 thickness ratio base end part
Divide 18b thickness big.In addition, in the present embodiment, on decelerator 30 of the base station 6 with the connecting portion for the component 18 that circles round is formed
Motor 29 is directly connected to, 18b is configured with motor 29 in cardinal extremity part.Therefore, in the present embodiment, without becoming in thickness
Big middle body 18a forms the opening portion for configuring motor 29.Thus, in the present embodiment, it can ensure that thickness becomes
Big middle body 18a rigidity, its result are that can improve the torsional rigidity of convolution component 18.
(other embodiment)
Above-mentioned embodiment is one of preferred embodiment of the present utility model, but is not limited to this, can not changed
Various modifications are carried out in the range of change the utility model thought.
In the above-described embodiment, during motor 29 is configured at cardinal extremity part 18b, but motor 29 can also be configured at
Entreat the boundary portion between part 18a and cardinal extremity part 18b.In this case, can be formed in middle body 18a for configuring motor
29 opening portion, but because above-mentioned opening portion is formed at the boundary portion between middle body 18a and cardinal extremity part 18b, therefore even if
The size of above-mentioned opening portion can be also reduced formed with opening portion in middle body 18a.Thus, even in this case, also can be true
The rigidity that thickness becomes big middle body 18a is protected, its result is that can improve the torsional rigidity of convolution component 18.
In the above-described embodiment, the method beyond the casting by using sand mold forms the feelings of convolution component 18
Under condition, opening portion 18e can not also be formed on convolution component 18.In addition, in the above-described embodiment, fore-end 18c
Thickness can also be equal with middle body 18a thickness.In addition, in the above-described embodiment, can also be in a first direction
Fore-end 18c end face (other end of the first direction of convolution component 18) be fixed with the lower end side in the first post portion 19
Side.In addition, in the above-described embodiment, arm 4 can also be made up of more than three arms.
In the above-described embodiment, robot 1 is the so-called double arm robot for including two hands 3 and two arms 4,
But robot 1 can also be the single armed humanoid robot for including a hand 3 and an arm 4.In addition, in the above-described embodiment,
Base station 6 be able to can also move in the horizontal direction.In addition, in the above-described embodiment, the moving object carried by robot 1
Thing is substrate 2, but the conveying object carried by robot 1 can also be semiconductor wafer beyond substrate 2 etc..
Claims (3)
- A kind of 1. industrial robot, it is characterised in that including：Hand, the hand load conveying object；Arm, the hand are connected to the front of the arm；Arm supporting member, the base end side of the arm can be rotationally connected with the arm supporting member；The arm supporting member is kept into and can lifted by cylindrical component, the cylindrical component；Circle round component, and the convolution component supports to the lower end side of the cylindrical component；Base station, the convolution component can be rotationally connected with the base station；AndRotating mechanism, the rotating mechanism make the convolution component be rotated relative to the base station,Convolution component when from above-below direction is shaped as rectangle or Long Circle,If the long side direction of convolution component during by from above-below direction is set to first direction,A side in a first direction for the convolution component is connected to the base station,The another side in a first direction of the convolution component is fixed with the lower end side of the cylindrical component,The first direction of convolution component described in the thickness ratio of the above-below direction of the middle body of the first direction of the convolution component An one end side portion above-below direction thickness it is big,The rotating mechanism includes：Motor, the motor are configured at the inside of the convolution component；And decelerator, this subtracts Fast device forms the connecting portion of the convolution component and the base station, and by the motor be rotated in deceleration after passed Pass,The motor is directly connected to the decelerator.
- 2. industrial robot as claimed in claim 1, it is characterised in thatGear is formed or is fixed with the output shaft of the motor,The decelerator includes the input gear engaged with the gear.
- 3. industrial robot as claimed in claim 1 or 2, it is characterised in thatThe decelerator is planet-cycloid reducer.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016237675A JP2018089765A (en) | 2016-12-07 | 2016-12-07 | Industrial robot |
| JP2016-237675 | 2016-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206982659U true CN206982659U (en) | 2018-02-09 |
Family
ID=61423263
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720319953.3U Active CN206982659U (en) | 2016-12-07 | 2017-03-29 | Industrial robot |
| CN201710197256.XA Pending CN108161895A (en) | 2016-12-07 | 2017-03-29 | Industrial robot |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710197256.XA Pending CN108161895A (en) | 2016-12-07 | 2017-03-29 | Industrial robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2018089765A (en) |
| CN (2) | CN206982659U (en) |
| TW (1) | TW201822969A (en) |
| WO (1) | WO2018105284A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108161895A (en) * | 2016-12-07 | 2018-06-15 | 日本电产三协（浙江）有限公司 | Industrial robot |
| CN111319063A (en) * | 2018-12-13 | 2020-06-23 | 日本电产三协（浙江）有限公司 | Method for manufacturing robot |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022131436A (en) * | 2021-02-26 | 2022-09-07 | 日本電産サンキョー株式会社 | industrial robot |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5124096B2 (en) * | 2006-03-03 | 2013-01-23 | 川崎重工業株式会社 | Clean space robot system |
| KR100955405B1 (en) * | 2008-03-26 | 2010-04-29 | 가부시키가이샤 야스카와덴키 | Multijoint robot and method for exchanging speed reducer of multijoint robot |
| CN104647363B (en) * | 2010-07-14 | 2016-04-20 | 日本电产三协株式会社 | The control method of industrial robot, industrial robot and the indicating means of industrial robot |
| JP5578973B2 (en) * | 2010-07-16 | 2014-08-27 | 日本電産サンキョー株式会社 | Industrial robot |
| JP2018089765A (en) * | 2016-12-07 | 2018-06-14 | 日本電産サンキョー株式会社 | Industrial robot |
-
2016
- 2016-12-07 JP JP2016237675A patent/JP2018089765A/en not_active Withdrawn
-
2017
- 2017-03-29 CN CN201720319953.3U patent/CN206982659U/en active Active
- 2017-03-29 CN CN201710197256.XA patent/CN108161895A/en active Pending
- 2017-11-06 WO PCT/JP2017/039852 patent/WO2018105284A1/en active Application Filing
- 2017-11-20 TW TW106140036A patent/TW201822969A/en unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108161895A (en) * | 2016-12-07 | 2018-06-15 | 日本电产三协（浙江）有限公司 | Industrial robot |
| CN111319063A (en) * | 2018-12-13 | 2020-06-23 | 日本电产三协（浙江）有限公司 | Method for manufacturing robot |
| CN111319063B (en) * | 2018-12-13 | 2021-11-12 | 日本电产三协（浙江）有限公司 | Method for manufacturing robot |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108161895A (en) | 2018-06-15 |
| TW201822969A (en) | 2018-07-01 |
| JP2018089765A (en) | 2018-06-14 |
| WO2018105284A1 (en) | 2018-06-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206982659U (en) | Industrial robot | |
| CN105378908B (en) | Industrial robot | |
| CN104647368A (en) | Industrial robot | |
| CN103170986B (en) | The arm configuration of robot and robot | |
| TWI415778B (en) | Multi - joint robots | |
| CN110234582A (en) | Aerial transport carriage | |
| JP2009028847A (en) | Conveyer | |
| WO2010041562A1 (en) | Substrate transfer robot and system | |
| CN105008096B (en) | Industrial robot | |
| CN103247556B (en) | Handling device | |
| KR20130024855A (en) | Robot arm structure and robot | |
| JP2006102886A5 (en) | ||
| CN105856267B (en) | Industrial robot | |
| US20090003983A1 (en) | Articulated Robot | |
| KR20170084388A (en) | Robot for transferring substrate | |
| TW200909322A (en) | Substrate transporting device | |
| KR101246362B1 (en) | Apparatus for transferring substrate | |
| CN108463420A (en) | Board carrying robot | |
| CN209133483U (en) | A kind of overturning of wafer class product and horizontal handling device | |
| JP6615886B2 (en) | Component mounter head unit | |
| CN209668265U (en) | A kind of handling device | |
| CN206998965U (en) | A kind of Five-degree-of-freedmanipulator manipulator armshaft based on rotation platform | |
| KR20170084389A (en) | Robot for transferring substrate | |
| TW202033426A (en) | Transfer machine for preventing particles spreading due to lifting movement of cage | |
| KR20150080729A (en) | Apparatus for Transferring Substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |