CN104647363B - The control method of industrial robot, industrial robot and the indicating means of industrial robot - Google Patents

The control method of industrial robot, industrial robot and the indicating means of industrial robot Download PDF

Info

Publication number
CN104647363B
CN104647363B CN201510028045.4A CN201510028045A CN104647363B CN 104647363 B CN104647363 B CN 104647363B CN 201510028045 A CN201510028045 A CN 201510028045A CN 104647363 B CN104647363 B CN 104647363B
Authority
CN
China
Prior art keywords
arm
hand
industrial robot
center
drive motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510028045.4A
Other languages
Chinese (zh)
Other versions
CN104647363A (en
Inventor
矢泽隆之
田中慎浩
渡边洋和
增泽佳久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of CN104647363A publication Critical patent/CN104647363A/en
Application granted granted Critical
Publication of CN104647363B publication Critical patent/CN104647363B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

The application provides a kind of moving direction regardless of hand when taking out of conveying object, can suppress the position deviation of the conveying object moved into while revise its industrial robot tilted, the control method of industrial robot and indicating means of industrial robot.Industrial robot comprises: hand; Have and hand is supported to second arm that can rotate and the arm the second arm being supported to first arm that can rotate; For the first drive motor making arm flexible; For making hand relative to the second arm the second drive motor in relative rotation; And the Poewr transmission mechanism of power for the power that transmits the first drive motor and the second drive motor.Poewr transmission mechanism with hand in the mode of movement substantially linearly under the state of prescribed direction by the power transmission of the first drive motor to arm and hand, and with hand relative to the second arm in relative rotation mode by the power transmission of the second drive motor to hand.

Description

The control method of industrial robot, industrial robot and the indicating means of industrial robot
Patent application of the present invention is international application no is PCT/JP2011/065195, international filing date is on July 1st, 2011, enter the divisional application that the application number of National Phase in China is 201180034062.9, name is called the application for a patent for invention of " control method of industrial robot, industrial robot and the indicating means of industrial robot ".
Technical field
The present invention relates to a kind of industrial robot that the conveying object of regulation is carried.In addition, the invention still further relates to control method and the indicating means of above-mentioned industrial robot.
Background technology
At present, there will be a known a kind of industrial robot (such as with reference to patent document 1) carrying the glass substrate of liquid crystal display.The industrial robot recorded in patent document 1 comprises: the hand loaded for glass substrate; For the arm that hand is installed in the mode that can rotate; And the main part that for arm is installed in the mode that can rotate.Arm is made up of the first arm and the second arm.Main part is configured on pallet, and linearly can move along prescribed direction.In this industrial robot, arm stretches in the mode of hand in linearly movement under the state of prescribed direction.In addition, this industrial robot makes hand move up in the side orthogonal relative to the moving direction of pallet with main part usually, to be taken out of by the glass substrate be configured in box.
In the industrial robot described in patent document 1, be installed on hand for the sensor detected the inclination of the glass substrate be configured in box in horizontal plane.In addition, when the inclination being configured at the glass substrate in box is detected by sensor, this industrial robot makes main part move towards prescribed direction relative to pallet, and arm to be circled round ormal weight relative to main part, suppress with the position deviation on the moving direction of main part of the glass substrate being moved to regulation move-in position to taking out of from box, and the inclination of glass substrate is revised.In this condition, arm is stretched to take out of glass substrate in box, main part is moved in the opposite direction, and arm is circled round in the opposite direction, after have modified inclination and position deviation, glass substrate is moved into the move-in position of regulation.
Prior art document
Patent document
Patent document 1: Japanese Patent Laid-Open 2003-117862 publication
Summary of the invention
Invent technical problem to be solved
In the industrial robot described in patent document 1, main part can be made to move relative to pallet, therefore, can suppress glass substrate with main part relative to the position deviation on the moving direction of pallet, while revise the inclination of glass substrate.But, in this industrial robot, if such as hand is linearly mobile to take out of the glass substrate in box on the moving direction of main part relative to pallet, then be difficult to while suppress the position deviation of glass substrate on the direction orthogonal relative to the moving direction of pallet with main part, revise the inclination of glass substrate.That is, in this industrial robot, according to the moving direction of hand when taking out of glass substrate, be difficult to the position deviation suppressing glass substrate, revise the inclination of glass substrate on one side rightly.
Therefore, the technical problem of the present invention industrial robot that is to provide a kind of moving direction regardless of hand when taking out of conveying object, the position deviation of the conveying object moved into can be suppressed to revise it tilt.
The technical scheme that technical solution problem adopts
For solving the problems of the technologies described above, the feature of industrial robot of the present invention comprises: hand, and this hand loads conveying object; Arm, this arm has the second arm of being supported in its front by hand and can rotating and the base end side of the second arm is supported to these at least two arms of the first arm that can rotate in its front; First drive motor, this first drive motor is used for arm is stretched; Second drive motor, this second drive motor is used for hand is relatively rotated relative to the second arm; And Poewr transmission mechanism, this Poewr transmission mechanism is for the power of the power and the second drive motor that transmit the first drive motor, Poewr transmission mechanism with hand in the mode of carrying out action under the state of prescribed direction substantially linearly by the power transmission of the first drive motor to arm and hand, and with hand relative to the second arm in relative rotation mode by the power transmission of the second drive motor to hand.
Industrial robot of the present invention comprises: for making hand relative to the second arm the second drive motor in relative rotation; And the Poewr transmission mechanism of power for the power that transmits the first drive motor and the second drive motor, Poewr transmission mechanism with hand relative to the second arm in relative rotation mode by the power transmission of the second drive motor to hand.Therefore, in the present invention, regardless of the moving direction of hand when taking out of conveying object, hand can be made freely to relatively rotate relative to the second arm.Therefore, in the present invention, regardless of the moving direction of hand when taking out of conveying object, when detecting the inclination of conveying object, if make hand relatively rotate relative to the second arm, and such as make the main part of industrial robot rotate, then the position deviation of the conveying object moved into can be suppressed to revise it.
In addition, in the present invention, even if not used for the travel mechanism making the main part of industrial robot towards prescribed direction movement, the position deviation of the conveying object moved into also can be suppressed to revise it.Therefore, in the present invention, even if the position deviation of the conveying object moved into can be suppressed to revise it, industrial robot also can be made miniaturized.In addition, in the present invention, with prior art like that in the position deviation of the conveying object suppressing to move into while revise when it tilts and make the main part of industrial robot compare towards the situation of prescribed direction movement, the pitch time during inclination revising conveying object can be shortened.
In addition, in the present invention, Poewr transmission mechanism with hand in the mode of movement substantially linearly under the state of prescribed direction by the power transmission of the first drive motor to arm and hand, therefore, if make the second drive motor be in halted state, then when making the industrial robot emergent stopping in action, hand can stop after moving ormal weight substantially linearly under the state of prescribed direction.That is, if make the second drive motor be in halted state, even if then make the industrial robot emergent stopping in action, also can maintain the state of hand towards certain orientation, therefore, the disorder of the posture of industrial robot when emergent stopping can be suppressed.Therefore, in the present invention, even if make industrial robot emergent stopping, what also can prevent the peripheral equipment of hand and industrial robot does not expect that position is collided.
In the present invention, it is preferable that, the second drive motor is installed on the first arm, and Poewr transmission mechanism comprises: the second reductor, this the second reductor is configured at the linking part of the first arm and the second arm, and transmits the power of the first drive motor to this second reductor; 3rd reductor, the 3rd reductor and the second drive motor link; First belt wheel, this first belt wheel is configured at the base end side of the second arm and is fixed on the efferent of the 3rd reductor; Second belt wheel, this second belt wheel is configured at the front of the second arm and is fixed on the base end side of hand; And driving-belt, this driving-belt is set up in the first belt wheel and the second belt wheel.According to said structure, then can by the structure relative simplicity of Poewr transmission mechanism.
In the present invention, such as, the efferent of the second reductor is held in the front of the first arm in the mode that can rotate, and be fixed on the base end side of the second arm, the input part of the second reductor is held in the efferent of the second reductor in revolvable mode, the efferent of the 3rd reductor is held in the front of the first arm in the mode that can rotate, the input part of the 3rd reductor is held in the efferent of the 3rd reductor in revolvable mode.
In the present invention, it is preferable that, the input part of the second reductor and efferent are formed as roughly tubular, be configured with the input part of the second reductor in the inner circumferential side of the efferent of the second reductor, be configured with the efferent of the 3rd reductor in the mode of the inner circumferential side of the input part through the second reductor.According to said structure, then the situation being configured at the outside of the second reductor with the efferent of the 3rd reductor compares, and the linking part of the first arm and the second arm can be made miniaturized.
In the present invention, it is preferable that, the second drive motor is installed on the second arm, and Poewr transmission mechanism comprises: the second reductor, this the second reductor is configured at the linking part of the first arm and the second arm, and transmits the power of the first drive motor to this second reductor; 3rd reductor, the 3rd reductor has sun gear, planetary gear, internal gear and planetary gear is held in revolvable pinion frame, and links with the second drive motor; 4th reductor, the 4th reductor is configured at the linking part of the second arm and hand; First belt wheel, this first belt wheel is configured at the base end side of the second arm and is fixed on the input part of the second reductor; Second belt wheel, this second belt wheel is configured at the front of the second arm and is fixed on the input part of the 4th reductor; 3rd belt wheel, the 3rd belt wheel is fixed on sun gear; 4th belt wheel, the 4th belt wheel is fixed on pinion frame; 5th belt wheel, the 5th belt wheel is fixed on internal gear; 6th belt wheel, the 6th belt wheel is fixed on the rotating shaft of the second drive motor; First driving-belt, this first driving-belt is set up in the first belt wheel and the 3rd belt wheel; Second driving-belt, this second driving-belt is set up in the second belt wheel and the 4th belt wheel; And the 3rd driving-belt, the 3rd driving-belt is set up in the 5th belt wheel and the 6th belt wheel.According to said structure, be then configured with the 4th reductor at the linking part of the second arm and hand, therefore, the rigidity of the linking part of the second arm and hand can be improved.Therefore, in order to suppress the position deviation of conveying object to revise it, even if utilizing the power of the second drive motor to make hand relative under the second arm in relative rotation situation, hand also can be made to rotate rightly.
In the present invention, such as, the efferent of the second reductor is held in the front of the first arm in the mode that can rotate, and be fixed on the base end side of the second arm, the input part of the second reductor is held in the efferent of the second reductor in revolvable mode, the efferent of the 4th reductor is held in the front of the second arm in the mode that can rotate, and be fixed on the base end side of hand, the input part of the 4th reductor is held in the efferent of the 4th reductor in revolvable mode, internal gear is held in the second arm in the mode that can rotate.
In the present invention, also following structure can be adopted: the second drive motor is installed on the second arm, Poewr transmission mechanism comprises: the second reductor, and this second reductor is configured at the linking part of the first arm and the second arm, and transmits the power of the first drive motor to this second reductor; 3rd reductor, 3rd reductor has the first angular wheel, the second angular wheel, triconic gear and retaining member and links with the second drive motor, second angular wheel and triconic gear engage with the first angular wheel and opposite each other, and the first angular wheel is held in and can rotates by retaining member; 4th reductor, the 4th reductor is configured at the linking part of the second arm and hand; First belt wheel, this first belt wheel is configured at the base end side of the second arm and is fixed on the input part of the second reductor; Second belt wheel, this second belt wheel is configured at the front of the second arm and is fixed on the input part of the 4th reductor; 3rd belt wheel, the 3rd belt wheel is fixed on the second angular wheel; 4th belt wheel, the 4th belt wheel is fixed on triconic gear; 5th belt wheel, the 5th belt wheel is fixed on retaining member; 6th belt wheel, the 6th belt wheel is fixed on the rotating shaft of the second drive motor; First driving-belt, this first driving-belt is set up in the first belt wheel and the 3rd belt wheel; Second driving-belt, this second driving-belt is set up in the second belt wheel and the 4th belt wheel; And the 3rd driving-belt, the 3rd driving-belt is set up in the 5th belt wheel and the 6th belt wheel.Even if in this case, owing to being configured with the 4th reductor at the linking part of the second arm and hand, therefore, the rigidity of the linking part of the second arm and hand also can be improved.Therefore, in order to suppress the position deviation of conveying object to revise it, even if utilizing the power of the second drive motor to make hand relative under the second arm in relative rotation situation, hand also can be made to rotate rightly.
In the present invention, such as, the efferent of the second reductor is held in the front of the first arm in the mode that can rotate, and be fixed on the base end side of the second arm, the input part of the second reductor is held in the efferent of the second reductor in revolvable mode, the efferent of the 4th reductor is held in the front of the second arm in the mode that can rotate, and be fixed on the base end side of hand, the input part of the 4th reductor is held in the efferent of the 4th reductor in revolvable mode, retaining member is held in the second arm in the mode that can rotate.
In the present invention, such as, industrial robot comprises the arm supporting member being supported to by the base end side of the first arm and can rotating, first drive motor is installed on the first arm or arm supporting member, Poewr transmission mechanism also comprises the first reductor, and this first reductor is configured at the linking part of arm supporting member and the first arm and links with the first drive motor.
In the present invention, such as, the efferent of the first reductor is held in the base end side of the first arm in the mode that can rotate, and is fixed on arm supporting member, and the input part of the first reductor is held in the efferent of the first reductor in revolvable mode.
In the present invention, it is preferable that, the second drive motor comprises the brake that the rotating shaft of the second drive motor is stopped.According to said structure, then, when usually carrying conveying object, the rotating shaft of the second drive motor can be reliably made to stop.Therefore, when making the industrial robot emergent stopping in action, the hand of substantially linear movement can be made reliably towards prescribed direction.Therefore, when making industrial robot emergent stopping, what reliably can prevent the peripheral equipment of hand and industrial robot does not expect that position is collided.
In the present invention, industrial robot comprises: arm supporting member, and the base end side of the first arm is supported to can rotates using above-below direction as the axis of rotating by this arm supporting member, cyclotron mechanism, the axis that this cyclotron mechanism is used for using above-below direction as convolution makes arm supporting member circle round, and control part, this control part controls industrial robot, and when arm extends, hand enters can accommodate in the resettlement section of conveying object, when arm shrinks, conveying object is taken out of from resettlement section, if the end being configured at the inboard of resettlement section of conveying object is set to inboard end when conveying object being contained in resettlement section, when conveying object being contained in resettlement section, the end being configured at the position in the outer part of resettlement section of conveying object is set to outboard end, and be set to datum line through the center of inboard end of conveying object and the line at the center of outboard end when conveying object being contained in resettlement section, then be stretched under the state that the conveying object be contained in resettlement section can be loaded into the position of hand at arm, when observing from above-below direction, the center of rotation being configured at the hand of the linking part of the second arm and hand is configured on datum line, and the center of the leading section of hand is configured on datum line, under the state that the radius of gyration being contracted to industrial robot when utilizing cyclotron mechanism to circle round at arm is minimum position (radius of gyration of the robot when utilizing cyclotron mechanism to circle round be minimum position there is hand state under), when observing from above-below direction, the centre of gyration of arm supporting member is configured on the hand center line that the center of rotation of hand is connected with the center of the leading section of hand, and the center taking out of the inboard end of object taken out of is configured on datum line, control part utilizes cyclotron mechanism that arm supporting member is circled round, and hand is rotated while make arm stretch, to carry conveying object.
According to said structure, even if then such as when can in the horizontal direction the industrial robot of movement hand towards the moving direction of industrial robot move carry conveying object, the centre of gyration at the center and arm supporting member that are contained in the conveying object of resettlement section produces deviation on the direction orthogonal with the moving direction of industrial robot, also in resettlement section, can take out of conveying object rightly.In addition, such as, even if when industrial robot can not move in the horizontal direction, be contained in the center of the conveying object of resettlement section and the centre of gyration of arm supporting member produces deviation on the direction orthogonal towards the direction of resettlement section movement with hand, also in resettlement section, conveying object can be taken out of rightly.
In the present invention, it is preferable that, industrial robot comprises: arm supporting member, and the base end side of the first arm is supported to can rotates using above-below direction as the axis of rotating by this arm supporting member, cyclotron mechanism, the axis that this cyclotron mechanism is used for using above-below direction as convolution makes arm supporting member circle round, and control part, this control part controls industrial robot, and when arm extends, hand enters can accommodate in the resettlement section of conveying object, when arm shrinks, conveying object is taken out of from resettlement section, if the end being configured at the inboard of resettlement section of conveying object is set to inboard end when conveying object being contained in resettlement section, when conveying object being contained in resettlement section, the end being configured at the position in the outer part of resettlement section of conveying object is set to outboard end, and be set to datum line through the center of inboard end of conveying object and the line at the center of outboard end when conveying object being contained in resettlement section, then when control part indicates industrial robot, be stretched under the state that the conveying object be contained in resettlement section can be loaded into the position of hand at arm, when observing from above-below direction, if the center being configured at the center of rotation of the hand of the linking part of the second arm and hand and the leading section of hand is configured on datum line, and the centre of gyration of the arm supporting member utilizing cyclotron mechanism to circle round is not configured on the hand center line that the center of rotation of hand is connected with the center of the leading section of hand, industrial robot is then made to carry out action, with while the center maintaining the center of rotation of hand and the leading section of hand is configured in the state on datum line, while the centre of gyration of arm supporting member is configured on hand center line.According to said structure, even if hand then can be made freely to relatively rotate relative to the second arm, the instruction operation of industrial robot also easily can be carried out.
Industrial robot of the present invention, the base end side of the first arm is supported to the arm supporting member that can rotate by the axis namely comprised using above-below direction as rotation and the industrial robot being used for the cyclotron mechanism that the axis using above-below direction as convolution makes arm supporting member circle round it is preferable that according to following control method controlled, this control method is as follows: time in the resettlement section accommodating conveying object if conveying object be contained in, the end being configured at the inboard of resettlement section of conveying object is set to inboard end, when conveying object being contained in resettlement section, the end being configured at the position in the outer part of resettlement section of conveying object is set to outboard end, and be set to datum line through the center of inboard end of conveying object and the line at the center of outboard end when conveying object being contained in resettlement section, then arm is stretched to the position that the conveying object being contained in resettlement section can be loaded into hand, during to observe from above-below direction, the center of rotation of the hand being configured at the linking part of the second arm and hand is configured on datum line, and by the center configuration of the leading section of hand on datum line, the radius of gyration that arm is contracted to industrial robot when utilizing cyclotron mechanism to circle round is minimum position (radius of gyration that hand moves to industrial robot when utilizing cyclotron mechanism to circle round is minimum position), during to observe from above-below direction, the centre of gyration of the arm supporting member circled round utilizing cyclotron mechanism is configured on the hand center line that the center of rotation of hand is connected with the center of the leading section of hand, and by the taken out of center configuration taking out of the inboard end of object on datum line, utilize cyclotron mechanism that arm supporting member is circled round, and hand is rotated while make arm stretch, to carry conveying object.
According to said structure, even if then such as when can in the horizontal direction the industrial robot of movement hand towards the moving direction of industrial robot move carry conveying object, the centre of gyration at the center and arm supporting member that are contained in the conveying object of resettlement section produces deviation on the direction orthogonal with the moving direction of industrial robot, also in resettlement section, can take out of conveying object rightly.In addition, such as, even if when industrial robot can not move in the horizontal direction, be contained in the center of the conveying object of resettlement section and the centre of gyration of arm supporting member produces deviation on the direction orthogonal towards the direction of resettlement section movement with hand, also in resettlement section, conveying object can be taken out of rightly.
Industrial robot of the present invention, namely comprise the arm supporting member that to be supported to by the base end side of the first arm using above-below direction as axis of rotating and can to rotate and be used for it is preferable that using above-below direction as the cyclotron mechanism industrial robot that the axis of circling round makes arm supporting member circle round and to be instructed to by following indicating means, this indicating means is as follows: time in the resettlement section accommodating conveying object if conveying object be contained in, the end being configured at the inboard of resettlement section of conveying object is set to inboard end, when conveying object being contained in resettlement section, the end being configured at the position in the outer part of resettlement section of conveying object is set to outboard end, and be set to datum line through the center of inboard end of conveying object and the line at the center of outboard end when conveying object being contained in resettlement section, then be stretched under the state that the conveying object be contained in resettlement section can be loaded into the position of hand at arm, when observing from above-below direction, if the center being configured at the center of rotation of the hand of the linking part of the second arm and hand and the leading section of hand is configured on datum line, and the centre of gyration of the arm supporting member utilizing cyclotron mechanism to circle round is not configured on the hand center line that the center of rotation of hand is connected with the center of the leading section of hand, industrial robot is then made to carry out action, with while the center maintaining the center of rotation of hand and the leading section of hand is configured in the state on datum line, while the centre of gyration of arm supporting member is configured on hand center line.According to said structure, even if hand then can be made freely to relatively rotate relative to the second arm, the instruction operation of industrial robot also easily can be carried out.
In the indicating means of industrial robot of the present invention, it is preferable that, be stretched under the state that the conveying object be contained in resettlement section can be loaded into the position of hand at arm, hand rotated, while make conveying object and hand towards aliging.According to said structure, then make comparing towards the situation of aliging of conveying object and hand with using cyclotron mechanism etc., can easily make conveying object and hand towards aliging.
Invention effect
As mentioned above, in industrial robot of the present invention, regardless of the moving direction of hand when taking out of conveying object, the position deviation of the conveying object moved into can be suppressed to revise it.
Accompanying drawing explanation
Fig. 1 is the top view of the industrial robot of embodiment of the present invention.
Fig. 2 is the side view representing industrial robot from the E-E direction of Fig. 1.
Fig. 3 is the block diagram of the control part representing the industrial robot shown in Fig. 1 and the various motor be connected with control part.
Fig. 4 is the schematic diagram of the structure of Poewr transmission mechanism for illustration of embodiment of the present invention.
Fig. 5 is the enlarged drawing in the F portion of Fig. 4.
Fig. 6 be for illustration of the hand when inclination of the substrate of the industrial robot shown in Fig. 1 and mounting substrate between the top view of relation.
Fig. 7 is the top view of the indicating means for illustration of the industrial robot shown in Fig. 1.
Fig. 8 is the top view of the effect for illustration of the industrial robot shown in Fig. 1.
Fig. 9 is the schematic diagram of the structure of Poewr transmission mechanism for illustration of another embodiment of the present invention.
Figure 10 is the enlarged drawing in the G portion of Fig. 9.
Figure 11 is the schematic diagram of the structure for illustration of the reductor shown in Figure 10 and periphery thereof.
Figure 12 is the schematic diagram for illustration of the reductor of another embodiment of the present invention and the structure of periphery thereof.
Figure 13 is the top view of the control method of industrial robot for illustration of another embodiment of the present invention.
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are described.
(schematic configuration of industrial robot)
Fig. 1 is the top view of the industrial robot 1 of embodiment of the present invention.Fig. 2 is the side view representing industrial robot 1 from the E-E direction of Fig. 1.Fig. 3 is the block diagram of the control part 20 representing the industrial robot 1 shown in Fig. 1 and the various motor be connected with control part 20.In the following description, using mutually orthogonal 3 directions as X-direction, Y-direction and Z-direction.In the present embodiment, Z-direction is consistent with above-below direction.In addition, in the following description, using X-direction as fore-and-aft direction, using Y-direction as left and right directions.
The industrial robot 1 (hereinafter referred to as " robot 1 ") of present embodiment is the articulated robot for the carrying of carrying the glass substrate 2 (hereinafter referred to as " substrate 2 ") of conveying object and liquid crystal display.As shown in Figure 1 and Figure 2, robot 1 comprises: two hands 3 that substrate 2 loads; Two arms 4 that each hand 3 in front and two hands 3 links; To the main part 5 that two arms 4 support; And be supported to by main part 5 can the substructure member 6 of (being specifically left and right directions) movement in the horizontal direction.Main part 5 comprises: the arm supporting member 7 supported the base end side of two arms 4; The fixing lift component 8 that also can move up and down of for arm supporting member 7; Being supported to by supporting member 8 can the cylindrical component 9 of movement in the vertical direction; The base station 10 that the end portion forming main part 5 also can move horizontally relative to substructure member 6; And to fix for the lower end of cylindrical component 9 and can carry out relative to base station 10 the convolution component 11 that circles round.
Main part 5 can move in the lateral direction relative to substructure member 6, and robot 1 comprises the horizontal mobile mechanism that can make main part 5 movement in the lateral direction.This horizontal mobile mechanism comprises the horizontal drive motor 12 (with reference to Fig. 3) for making main part 5 movement in the lateral direction.Lift component 8 can move in the vertical direction relative to cylindrical component 9, and robot 1 comprises the elevating mechanism that lift component 8 is elevated.This elevating mechanism comprises the lifting drive motor 13 (with reference to Fig. 3) for making lift component 8 be elevated.Convolution component 11 can be axially circle round with above-below direction relative to base station 10, and robot 1 comprises the cyclotron mechanism together with hand 3, arm 4, arm supporting member 7, lift component 8 and cylindrical component 9, convolution component 11 being circled round.This cyclotron mechanism comprises the convolution drive motor 14 (with reference to Fig. 3) for making convolution component 11 circle round.
The base end side of hand 3 is can link the front that above-below direction carries out as the axis of rotating mode and the arm 4 rotated.Hand 3 in the same manner as the industrial robot recorded with above-mentioned patent document 1 be provided with sensor (not shown), and this sensor is used for detecting the inclination (specifically substrate 2 is relative to the inclination taking out of direction of the substrates such as fore-and-aft direction 2) of the substrate 2 of collecting in the resettlement section (such as box) of accommodating at substrate 2.
Arm 4 comprises the first arm 15 and these two arms of the second arm 16, and can stretch relative to main part 5.The base end side of the first arm 15 is can be supported on the front of arm supporting member 7 as the mode that the axis of rotating carries out rotating by above-below direction.The base end side of the second arm 16 is can be supported on the front of the first arm 15 as the mode that the axis of rotating carries out rotating by above-below direction.The base end side of hand 3 is supported on the front of the second arm 16 in the mode that can rotate.First arm 15 and the second arm 16 are formed as hollow form.
The base end side of arm supporting member 7 is fixed on lift component 8.In the present embodiment, two hands, 3, two arms 4 and two arm supporting members 7 are configured to overlapping in the vertical direction.That is, the robot 1 of present embodiment is the robot of Dual-arm.
In robot 1, supporting member 8 moves up and down relative to cylindrical component 9 together with hand 3 and arm 4 etc.In addition, arm 4 stretches relative to main part 5.Specifically, arm 4 is stretching towards the mode of linearity movement under the state of prescribed direction with hand 3.In addition, base station 10 moves horizontally relative to substructure member 6.In addition, the component 11 that circles round circles round relative to base station 10.By the combination of above-mentioned action, substrate 2 is carried from the resettlement section that substrate 2 is accommodated towards job position substrate 2 being carried out to regulation operation by robot 1.In the present embodiment, when arm 4 extends, hand 3 enters in resettlement section, and when arm 4 shrinks, the substrate 2 being loaded into hand 3 is taken out of by from resettlement section.
As shown in Figure 3, Figure 4, the robot 1 of present embodiment comprises: for the first drive motor 21 making arm 4 flexible; For making hand 3 relative to the second arm 16 second drive motor 22 in relative rotation; And for the Poewr transmission mechanism 23 of the power that transmits the first drive motor 21 and the second drive motor 22.As shown in Figure 3, the first drive motor 21 and the second drive motor 22 are connected with the control part 20 controlled robot 1.In addition, horizontal drive motor 12, lifting drive motor 13 and convolution drive motor 14 are also connected with control part 20.
(structure of Poewr transmission mechanism and periphery thereof)
Fig. 4 is the schematic diagram of the structure of Poewr transmission mechanism 23 for illustration of embodiment of the present invention.Fig. 5 is the enlarged drawing in the F portion of Fig. 4.
First drive motor 21 is installed on the first arm 15.Specifically, in the position that the linking part apart from the first arm 15 and the second arm 16 is closer, the first drive motor 21 is installed on the first arm 15.The rotating shaft of the first drive motor 21 is fixed with belt wheel 24.
Second drive motor 22 is also installed on the first arm 15.Specifically, than the position of the first drive motor 21 closer to the linking part of the first arm 15 and the second arm 16, the second drive motor 22 is installed on the first arm 15.This second drive motor 22 is motor of band brake.That is, the second drive motor 22 comprises the brake that its rotating shaft is stopped.The rotating shaft of the second drive motor 22 is fixed with belt wheel 25.
Power drive mechanism 23 comprises: be configured at the linking part of arm supporting member 7 and the first arm 15 and the reductor 26 as the first reductor linked with the first drive motor 21; Be configured at the linking part of the first arm 15 and the second arm 16 and the reductor 27 as the second reductor linked with the first drive motor 21; And the reductor 28 as the 3rd reductor to link with the second drive motor 22.
Reductor 26 comprises: input part 30; Efferent 31; And efferent 31 is held in revolvable clamping flange 32.Clamping flange 32 is fixed on the base end side of the first arm 15.Efferent 31 is held in the base end side of the first arm 15 in the mode that can rotate by clamping flange 32.In addition, efferent 31 is fixed on the front of arm supporting member 7.Input part 30 is held in the inner circumferential side of the efferent 31 being formed as tubular in revolvable mode.Belt wheel 33 is fixed with in one end (being upper end in the example shown in Figure 4) of input part 30.Belt wheel 33 is configured at the inside of the base end side of the first arm 15.Be fixed on the first drive motor 21 rotating shaft belt wheel 24 and belt wheel 33 is added is provided with driving-belt 34.The power being passed to the first drive motor 21 of input part 30 via driving-belt 34 and belt wheel 33 etc. is decelerated and is passed to efferent 31.In addition, belt wheel 33 also can be integrally formed with input part 30.
Reductor 27 comprises: input part 35; Efferent 36; And efferent 36 is held in revolvable clamping flange 37.Clamping flange 37 is fixed on the front of the first arm 15.In the example shown in Fig. 4, Fig. 5, clamping flange 37 is fixed on the upper surface side of the front of the first arm 15.Efferent 36 is held in the front of the first arm 15 in the mode that can rotate by clamping flange 37.In addition, efferent 36 is fixed on the base end side of the second arm 16.Input part 35 is held in the inner circumferential side of the efferent 36 being formed as tubular in revolvable mode.Belt wheel 38 is fixed with in one end of input part 35.Belt wheel 38 is configured at the inside of the front of the first arm 15.Be fixed on the first drive motor 21 rotating shaft belt wheel 24 and belt wheel 38 is added is provided with driving-belt 39.The power being passed to the first drive motor 21 of input part 35 via driving-belt 39 and belt wheel 38 etc. is decelerated and is passed to efferent 36.In addition, belt wheel 38 also can be integrally formed with input part 35.
Reductor 28 comprises: input part 40; Efferent 41; And efferent 41 is held in revolvable clamping flange 42.Clamping flange 42 is fixed on the front of the first arm 15.In the example shown in Fig. 4, Fig. 5, clamping flange 42 is fixed on the lower face side of the front of the first arm 15.Efferent 41 is held in the front of the first arm 15 in the mode that can rotate by clamping flange 42.The belt wheel 43 as the first belt wheel is fixed with in one end (being upper end in the example shown in Fig. 4, Fig. 5) of efferent 41.Belt wheel 43 is configured at the inside of the base end side of the second arm 16.In addition, efferent 41 is configured to the inner circumferential side of the input part 35 of the reductor 27 by being formed as tubular.Input part 40 is held in another side of efferent 41 in revolvable mode.Input part 40 is fixed with belt wheel 44.Be fixed on the second drive motor 22 rotating shaft belt wheel 25 and belt wheel 44 is added is provided with driving-belt 45.The power being passed to the second drive motor 22 of input part 40 via driving-belt 45 and belt wheel 44 etc. is decelerated and is passed to efferent 41.In addition, belt wheel 44 also can be integrally formed with input part 40.
The belt wheel 46 as the second belt wheel is configured with in the inside of the front of the second arm 16.That is, the second arm 16 with the linking part of hand 3 are configured with belt wheel 46.Belt wheel 46 is fixed on the base end side of hand 3.At belt wheel 43 with belt wheel 46 is added is provided with driving-belt 47.
In the present embodiment, when the first drive motor 21 drives, arm 4 stretches.In addition, in the present embodiment, set the diameter of the length of the first arm 15, the length of the second arm 16, the speed reducing ratio of reductor 26,27 and belt wheel 24,33,38,43,46, to utilize the power of the first drive motor 21, hand 3 is linearly being moved under the state of prescribed direction.Such as, set the diameter of the length of the first arm 15, the length of the second arm 16, the speed reducing ratio of reductor 26,27 and belt wheel 24,33,38,43,46, to utilize the power of the first drive motor 21 to make hand 3 linearly move along the longitudinal direction under the state of prescribed direction, or hand 3 is linearly being moved under the state of left and right directions in left-right direction.
In addition, in the present embodiment, when the second drive motor 22 drives, even if the first drive motor 21 stops, hand 3 also can relatively rotate relative to the second arm 16.
(control method of industrial robot)
Fig. 6 be for illustration of the hand 3 when the inclination of the substrate 2 of the industrial robot 1 shown in Fig. 1 and mounting substrate 2 between the top view of relation.
In the robot 1 formed like that above, when taking out of the substrate 2 being contained in resettlement section, first control part 20 makes the first drive motor 21 drive, and to make arm 4 stretch, and utilizes the sensor being located at hand 3 to detect the inclination that substrate 2 takes out of direction relative to it.Now, be applied with braking to the second drive motor 22, the rotating shaft of the second drive motor 22 stops.
If do not detected the inclination (if or the inclination of substrate 2 be in below setting) of substrate 2 by the tilt detection action of this substrate 2, then control part 20 makes the first drive motor 21 drive again, make arm 4 flexible to take out of substrate 2 from resettlement section, and the substrate 2 taken out of is moved into the job position of regulation.When arm 4 stretches, hand 3 is linearly moving along the longitudinal direction under the state of fore-and-aft direction, or is linearly moving in left-right direction under the state of left and right directions.In addition, now, the state of the hand 3 in resettlement section during mounting substrate 2 is the state shown in the double dot dash line of Fig. 6.That is, now, hand 3 and substrate 2 to take out of direction almost parallel.In addition, now, be applied with braking to the second drive motor 22, the rotating shaft of the second drive motor 22 stops.
On the other hand, if gone out the inclination (if or the substrate 2 detected be tilted beyond setting) of substrate 2 by the tilt detection motion detection of substrate 2, then in order to suppress substrate 2 taking out of the position deviation on roughly orthogonal direction, direction with it, and revise the inclination of substrate 2, control part 20 makes the second drive motor 22 drive, ormal weight is rotated relative to the second arm 16 to make hand 3, and convolution drive motor 14 is driven, rotate ormal weight to make convolution component 11 relative to base station 10.
Carry out under the state that this action both can have been shunk at arm 4, carry out under the state also can extended at arm 4.When carrying out this action under the state that arm 4 shrinks, after having carried out this action, control part 20 applies braking to make the second drive motor 22 stop and making convolution drive motor 14 stop, the first drive motor 21 is made to drive in this case, extend to make arm 4, then, lifting drive motor 13 is driven, substrate 2 is loaded into hand 3 in resettlement section.Now, the state of the hand 3 in resettlement section during mounting substrate 2 is the state shown in the solid line of Fig. 6.That is, now, hand 3 takes out of direction degree identical with the inclination of substrate 2 at a slant relative to substrate 2.
In addition, if revise the inclination of substrate 2 and carry out making hand 3 rotate ormal weight under the state of extending at arm 4 and make convolution component 11 rotate the action of ormal weight, then control part 20 is under the state making the second drive motor 22 and convolution drive motor 14 stop, the first drive motor 21 is made to drive arm 4 is extended, then, the second drive motor 22 is made to drive to make hand 3 rotate ormal weight, and make convolution drive motor 14 drive to make convolution component 11 rotate ormal weight, then, lifting drive motor 13 is made to drive, in resettlement section, substrate 2 is loaded into hand 3.Now, the state of the hand 3 in resettlement section during mounting substrate 2 is the state shown in the solid line of Fig. 6.
When substrate 2 being loaded into hand 3 in resettlement section, control part 20 makes the second drive motor 22 drive, ormal weight is rotated towards the direction contrary with rotation direction just now to make hand 3, and convolution drive motor 14 is driven, rotate ormal weight to make convolution component 11 towards the direction contrary with rotation direction just now.Like this, in resettlement section, the state of the hand 3 of mounting substrate 2 just becomes the state shown in double dot dash line of Fig. 6, can substrate 2 with the inclination revising the substrate 2 being contained in resettlement section under its repressed state of position deviation taking out of orthogonal direction, direction.
Then, under the state making the second drive motor 22 and convolution drive motor 14 stop, control part 20 makes the first drive motor 21 drive hand 3 is shunk, thus from resettlement section, take out of substrate 2.When arm 4 shrinks, hand 3 is linearly moving along the longitudinal direction under the state of fore-and-aft direction, or is linearly moving in left-right direction under the state of left and right directions.In addition, then, control part 20 makes driving such as convolution drive motor 14 grade, after compulsory exercise has been carried out to robot 1, under the state making the second drive motor 22 and convolution drive motor 14 stop, make the first drive motor 21 drive arm 4 is stretched, thus substrate 2 is moved into job position.Now, hand 3 is linearly moving along the longitudinal direction under the state of fore-and-aft direction, or is linearly moving in left-right direction under the state of left and right directions.
In addition, when the tilt detection motion detection by substrate 2 goes out the inclination of substrate 2, also ormal weight can be rotated making according to the inclination of substrate 2 hand 3 relative to the second arm 16 and under the state making convolution component 11 rotate ormal weight relative to base station 10, substrate 2 is taken out of from resettlement section, then, make hand 3 rotate ormal weight in the opposite direction, and make convolution component 11 rotate ormal weight in the opposite direction, subsequently, substrate 2 is moved into job position.In this case, when substrate 2 is with when moving into job position under its repressed state of position deviation taking out of orthogonal direction, direction, the inclination being contained in the substrate 2 of resettlement section is revised.In addition, when the tilt detection motion detection by substrate 2 goes out the inclination of substrate 2, can also, while make hand 3 rotate ormal weight relative to the second arm 16 according to the inclination of substrate 2 and make convolution component 11 rotate ormal weight relative to base station 10, arm 4 be stretched.
(indicating means of industrial robot)
Fig. 7 is the top view of the indicating means for illustration of the industrial robot 1 shown in Fig. 1.Below, the indicating means of (under the state of namely extending at the arm 4) robot 1 in resettlement section linearly movement comes carrying substrate 2 on fore-and-aft direction (X-direction) to hand 3 is described.The instruction of robot 1 is that the instruction operating terminal (programmable device (teachingpendant)) connected by operator's use & Control portion 20 carries out.
In addition, substrate 2 is formed as rectangular tabular, in the following description, 2a is held as inboard in the end being configured at the substrate 2 of the inboard of resettlement section when substrate 2 is contained in resettlement section, is configured at the end of the substrate 2 in the outside of resettlement section as outboard end 2b when substrate 2 is contained in resettlement section.In addition, the line through the inboard end center C10 of 2a and the center C20 of outboard end 2b when being contained in resettlement section by substrate 2 is as datum line LB.When the instruction operation of robot 1, substrate 2 is contained in resettlement section under the state do not tilted relative to fore-and-aft direction, datum line LB and fore-and-aft direction almost parallel.
When indicating the robot 1 in resettlement section when linearly movement comes carrying substrate 2 along the longitudinal direction towards the hand 3 under the state of fore-and-aft direction, first, as shown in Fig. 7 (A), make arm 4 be stretched to the position that the substrate 2 be contained in resettlement section can be loaded into hand 3, and hand 3 is entered in resettlement section.Then, when observing from above-below direction, be roughly parallel to the mode of datum line LB (namely hand centre line L H is roughly parallel to fore-and-aft direction) with the hand centre line L H connected by center (being more specifically the center of the leading section of the hand 3 on the direction orthogonal with the direction that the hand fork extends) C2 being configured at the second arm 16 and the center of rotation C1 of the hand 3 of the linking part of hand 3 and the leading section of hand 3, the second drive motor 22 driven hand 3 is rotated.That is, while make hand 3 rotate, make substrate 2 and hand 3 towards aliging.
Then, as shown in Fig. 7 (B), Fig. 7 (C), when observing from above-below direction, horizontal drive motor 12, convolution drive motor 14 and/or the first drive motor 21 are driven makes hand 3 move in the lateral direction, with while maintain the almost parallel state of hand centre line L H and datum line LB, make the distance L2 (namely hand centre line L H is overlapping with datum line LB) that the distance L1 between an end face of the substrate 2 on left and right directions and one end of hand 3 equals between the other end of the substrate 2 on left and right directions and the other end of hand 3.In addition, hand 3 is moved in the longitudinal direction, become assigned position to make the substrate 2 on fore-and-aft direction with the relative position of hand 3.That is, when observing from above-below direction, carry out micromotion in the mode that hand centre line L H is overlapping with datum line LB, thus carry out the contraposition of substrate 2 and hand 3.
Now, the centre of gyration C3 that the centre of gyration C3 that may produce the convolution component 11 utilizing cyclotron mechanism to circle round as shown in Fig. 7 (B) is not configured in the state on hand centre line L H and the component 11 that circles round as Suo Shi Fig. 7 (C) is configured in the state on hand centre line L H.In the present embodiment, when the centre of gyration C3 of the component 11 that circles round is configured on hand centre line L H, the instruction operation of robot 1 in resettlement section is terminated.
On the other hand, when the centre of gyration C3 of the component 11 that circles round is not configured on hand centre line L H, horizontal drive motor 12, convolution drive motor 14 and/or the first drive motor 21 is made to drive Lai Shi robot 1 action, with while maintain the hand centre line L H state overlapping with datum line LB, while be configured on hand centre line L H by the centre of gyration C3 of convolution component 11, then terminate the instruction operation of robot 1 in resettlement section.By carrying out above-mentioned instruction operation, hand 3 is linearly moving along the longitudinal direction under the state of fore-and-aft direction, thus can carrying substrate 2 rightly.
In addition, in the present embodiment, when observing from above-below direction, micromotion is carried out in the mode that hand centre line L H is overlapping with datum line LB, after the contraposition having carried out substrate 2 and hand 3, if the centre of gyration C3 of convolution component 11 is not configured on hand centre line L H, then control part 20 automatically makes horizontal drive motor 12, convolution drive motor 14 and/or the first drive motor 21 drive Lai Shi robot 1 action, with while maintain the hand centre line L H state overlapping with datum line LB, while the centre of gyration C3 of convolution component 11 is configured on hand centre line L H.In addition, in the present embodiment, when the centre of gyration C3 of the component 11 that circles round is configured on hand centre line L H, as shown in Fig. 7 (C), the center of rotation C4 being configured at the first arm 15 of the linking part of arm supporting member 7 and the first arm 15 is also configured on hand centre line L H.
(main efficacy results of present embodiment)
As mentioned above, in the present embodiment, when the second drive motor 22 drives, hand 3 relatively rotates relative to the second arm 16.Therefore, in the present embodiment, regardless of the moving direction of the hand 3 when taking out of substrate 2 in resettlement section, hand 3 can be made freely to relatively rotate relative to the second arm 16.That is, even if the moving direction of the hand 3 when taking out of substrate 2 in resettlement section is such as fore-and-aft direction or left and right directions, hand 3 also can be made freely to relatively rotate relative to the second arm 16.Therefore, in the present embodiment, when detecting the inclination of substrate 2, regardless of the moving direction of the hand 3 when taking out of substrate 2, hand 3 can be made to relatively rotate relative to the second arm 16, and convolution component 11 is relatively rotated relative to base station 10, thus suppress the position deviation of substrate 2, while revise the inclination of substrate 2.
In addition, in the present embodiment, when while suppress the position deviation of substrate 2, while when revising the inclination of substrate 2, move in the lateral direction without the need to making the main part 5 of robot 1, therefore, with prior art like that when the situation of main part 5 movement in the lateral direction of the inclination Shi Shi robot 1 revising substrate 2 compares, the pitch time during inclination revising substrate 2 can be shortened.Namely, when suppressing the position deviation of substrate 2 while the main part 5 of revising the inclination Shi Shi robot 1 of substrate 2 moves in left-right direction, the main part 5 of Xu Shi robot 1 moves to the state shown in solid line significantly from the state shown in the double dot dash line of Fig. 8, but in the present embodiment, move without the need to making main part 5, therefore, correspondingly pitch time can be shortened.
In the present embodiment, when from resettlement section towards job position carrying substrate 2, braking is applied to the second drive motor 22, utilize the power of the first drive motor 21 that arm 4 is stretched, linearly moving under the state of prescribed direction to make hand 3.Therefore, if at carrying substrate 2 Shi Shi robot 1 emergent stopping, then hand 3 can stop after moving ormal weight substantially linearly under the state of prescribed direction.That is, even if make robot 1 emergent stopping in action, also can maintain the state of hand 3 towards certain orientation, therefore, the disorder of the posture of robot 1 when emergent stopping can be suppressed.Therefore, in the present embodiment, even if make robot 1 emergent stopping, what also can prevent the peripheral equipment of hand 3 and robot 1 does not expect that position is collided.
In the present embodiment, the efferent 41 of the reductor 28 linked with the second drive motor 22 is fixed with belt wheel 43, is fixed with belt wheel 46 at the base end side of hand 3, at belt wheel 43 with belt wheel 46 is added is provided with driving-belt 47.Therefore, can by the structure relative simplicity of Poewr transmission mechanism 23.In addition, in the present embodiment, efferent 41 is configured to the inner circumferential side of the input part 35 of the reductor 27 by being formed as tubular, therefore, the situation being configured at the outside of reductor 27 with efferent 41 compares, can by miniaturized for the linking part of the first arm 15 and the second arm 16.
In the present embodiment, when robot 1 in resettlement section when linearly movement comes carrying substrate 2 along the longitudinal direction to hand 3 indicates, be stretched under the state that the substrate 2 be contained in resettlement section can be loaded into the position of hand 3 at arm 4, when observing from above-below direction, in the mode that hand centre line L H and datum line LB is almost parallel, second drive motor 22 is driven, thus by substrate 2 and hand 3 towards aliging.Therefore, in the present embodiment, easily make substrate 2 and hand 3 towards aliging.
Namely, such as when convolution drive motor 14 is driven carry out substrate 2 and hand 3 towards when aliging, distance between the front end of centre of gyration C3 and hand 3 is elongated, therefore, the front end of hand 3 is large relative to the mobile quantitative change of the rotation amount of convolution drive motor 14, be difficult to make substrate 2 and hand 3 towards aliging.On the other hand, in the present embodiment, second drive motor 22 is driven make substrate 2 and hand 3 towards aliging, distance between the center of rotation C1 of hand 3 and the front end of hand 3 shortens, therefore, the front end of hand 3 can be suppressed relative to the amount of movement of the rotation amount of the second drive motor 22, easily make substrate 2 and hand 3 towards aliging.
In the present embodiment, during the instruction of the robot 1 in the resettlement section when carrying out hand 3 linearity moving carrying substrate 2 along the longitudinal direction, observe from above-below direction, micromotion is carried out in the mode that hand centre line L H is overlapping with datum line LB, after the contraposition having carried out substrate 2 and hand 3, if the centre of gyration C3 of convolution component 11 is not configured on hand centre line L H, then make horizontal drive motor 12, convolution drive motor 14 and/or the first drive motor 21 drive Lai Shi robot 1 action, with while maintain the hand centre line L H state overlapping with datum line LB, while centre of gyration C3 is configured on hand centre line L H.Therefore, even if hand 3 can be made freely to relatively rotate relative to the second arm 16, do not need the instruction operation of the complexity of robot 1 yet, thus easily can carry out instruction operation.
In addition, in the present embodiment, control part 20 automatically makes horizontal drive motor 12, convolution drive motor 14 and/or the first drive motor 21 drive Lai Shi robot 1 action, with while maintain the hand centre line L H state overlapping with datum line LB, while centre of gyration C3 is configured on hand centre line L H, therefore, the instruction operation of operator becomes more easy.
(variation 1 of Poewr transmission mechanism)
Fig. 9 is the schematic diagram of the structure of Poewr transmission mechanism 53 for illustration of another embodiment of the present invention.Figure 10 is the enlarged drawing in the G portion of Fig. 9.Figure 11 is the schematic diagram of the structure for illustration of the reductor 58 shown in Figure 10 and periphery thereof.
In the above-described embodiment, the second arm 16 with the linking part of hand 3 are configured with belt wheel 46.In addition, such as, shown in Fig. 9, the reductor 50 as the 4th reductor also can be configured with on the second arm 16 with the linking part of hand 3.In this case, the rigidity of the linking part of the second arm 16 and hand 3 can be improved.Therefore, in order to suppress the position deviation of substrate 2 to revise it, even if utilizing the power of the second drive motor 22 to make hand 3 relative under the second arm 16 in relative rotation situation, hand 3 also can be made to rotate rightly.
In the variation 1 shown in Fig. 9 ~ Figure 11, be provided with Poewr transmission mechanism 53 to replace above-mentioned Poewr transmission mechanism 23.Below, the structure of Poewr transmission mechanism 53 is described.In addition, in the following description, to marking identical symbol with the structure of the Poewr transmission mechanism 53 that the structure of Poewr transmission mechanism 23 shares and omitting or simplify its explanation.
Except reductor 50, Poewr transmission mechanism 53 also comprises above-mentioned reductor 26 and reductor 27.In addition, Poewr transmission mechanism 53 comprises the reductor 58 as the 3rd reductor linked with the second drive motor 22.In variation 1, the first drive motor 21 is installed on the first arm 15 in the same manner as above-mentioned embodiment.In addition, in this variation 1, the second drive motor 22 is installed on the second arm 16.This second drive motor 22 is configured at the inside of the base end side of the second arm 16.
As mentioned above, reductor 27 comprises input part 35, efferent 36 and clamping flange 37.In the above-described embodiment, be not fixed with belt wheel at the other end of input part 35, but in this variation 1, be fixed with the belt wheel 60 as the first belt wheel at the other end of input part 35.
As shown in figure 11, reductor 58 is the planet-gear speed reducers having sun gear 62, multiple planetary gear 63, internal gear 64 and planetary gear 63 is held in revolvable pinion frame 65.Reductor 58 is configured at the inside of the second arm 16.Sun gear 62 is fixed with the belt wheel 66 as the 3rd belt wheel.Pinion frame 65 is fixed with the belt wheel 67 as the 4th belt wheel.Internal gear 64 is installed on the second arm 16 by bearing 68, can rotate relative to the second arm 16.That is, internal gear 64 is held in the second arm 16 in the mode that can rotate.Internal gear 64 is fixed with the belt wheel 69 as the 5th belt wheel.In addition, belt wheel 69 also can be integrally formed with internal gear 64.
Reductor 50 comprises: input part 70; Efferent 71; And efferent 71 is held in revolvable clamping flange 72.Clamping flange 72 is fixed on the front of the second arm 16.Efferent 71 is held in the front of the second arm 16 in the mode that can rotate by clamping flange 72.The base end side of hand 3 is fixed in one end of efferent 71.Input part 70 is held in another side of efferent 71 in revolvable mode.Input part 70 is fixed with the belt wheel 73 as the second belt wheel.Belt wheel 73 is configured at the inside of the front of the second arm 16.In addition, belt wheel 73 also can be integrally formed with input part 70.
Be fixed on reductor 27 input part 35 belt wheel 60 and be fixed on the added driving-belt 74 be provided with as the first driving-belt of belt wheel 66 of sun gear 62 of reductor 58.Be fixed on reductor 50 input part 70 belt wheel 73 and be fixed on the added driving-belt 75 be provided with as the second driving-belt of belt wheel 67 of pinion frame 65 of reductor 58.Be fixed on the second drive motor 22 rotating shaft the belt wheel 76 as the 6th belt wheel and be fixed on the added driving-belt 77 be provided with as the 3rd driving-belt of belt wheel 69 of internal gear 64 of reductor 58.
In this variation 1, set the diameter etc. of the length of the first arm 15, the length of the second arm 16, the speed reducing ratio of reductor 26,27,50,58 and belt wheel 24,33,38,60,66,67,73, to utilize the power of the first drive motor 21, hand 3 is linearly being moved under the state of prescribed direction.In addition, in this variation 1, when the second drive motor 22 drives, internal gear 64 rotates and planetary gear 63 is rotated, therefore, the power of the second drive motor 22 via pinion frame 65, belt wheel 67,73, driving-belt 75 and reductor 50 and be passed to hand 3, thus hand 3 is relatively rotated relative to the second arm 16.In addition, in this variation 1, also the same with above-mentioned embodiment, when the tilt detection motion detection by substrate 2 goes out the inclination of substrate 2, in order to suppress the position deviation of substrate 2 while revise the inclination of substrate 2, robot 1 makes the second drive motor 22 drive, and to make hand 3 rotate ormal weight relative to the second arm 16, and makes convolution component 11 rotate ormal weight relative to base station 10.
(variation 2 of Poewr transmission mechanism)
Figure 12 is the schematic diagram for illustration of the reductor 88 of another embodiment of the present invention and the structure of periphery thereof.
In variation 1, planet-gear speed reducer and reductor 58 are linked by driving-belt 77 and the second drive motor 22.In addition, such as shown in Figure 12, also the reductor 88 comprising the first angular wheel 81, the second angular wheel 82 engaged with the first angular wheel 81 and triconic gear 83 and the first angular wheel 81 is held in revolvable retaining member 84 can be linked by driving-belt 77 and the second drive motor 22.
In reductor 88, the second angular wheel 82 is configured to relative in the vertical direction with triconic gear 83.In addition, above-mentioned belt wheel 66 is fixed on the second angular wheel 82 by axle 85, and above-mentioned belt wheel 67 is fixed on triconic gear 83 by axle 85.First angular wheel 81 is fixed on the axle 86 be configured as axis using horizontal direction, and axle 86 is held in retaining member 84 in revolvable mode.Retaining member 84 is installed on the second arm 16 by bearing 87, can rotate relative to the second arm 16.That is, retaining member 84 is held in the second arm 16 in the mode that can rotate.Retaining member 84 is fixed with the belt wheel 89 as the 5th belt wheel.Be fixed on the second drive motor 22 rotating shaft belt wheel 76 and belt wheel 89 is added is provided with driving-belt 77.In addition, belt wheel 89 also can be integrally formed with retaining member 84.
In this variation 2, set the diameter etc. of the length of the first arm 15, the length of the second arm 16, the speed reducing ratio of reductor 26,27,50 and belt wheel 24,33,38,60,66,67,73, to utilize the power of the first drive motor 21, hand 3 is linearly being moved under the state of prescribed direction.In addition, in this variation 2, when the second drive motor 22 drives, retaining member 84 rotates and the first angular wheel 81 is rotated, therefore, the power of the second drive motor 22 via triconic gear 83, belt wheel 67,73, driving-belt 75 and reductor 50 and be passed to hand 3, thus hand 3 is relatively rotated relative to the second arm 16.
(variation of the control method of industrial robot)
Figure 13 is the top view of the control method of industrial robot 1 for illustration of another embodiment of the present invention.
In the above-described embodiment, under the state making the second drive motor 22 and convolution drive motor 14 stop, control part 20 makes the first drive motor 21 drive hand 4 is shunk, thus carries substrate 2.In addition, such as when (Y-direction) moves carrying substrate 2 to hand 3 in left-right direction, and convolution component 11 centre of gyration C3 along the longitudinal direction from the situation of the off-centring of resettlement section (namely, as shown in figure 13 convolution component 11 centre of gyration C3 be not configured in be contained in resettlement section and relative to left and right directions tilt substrate 2 datum line LB on situation) under, control part 20 also can while make the second drive motor 22 and convolution drive motor 14 drive, while make the first drive motor 21 drive, to stretch carrying substrate 2 to make arm 4.
In this case, as shown in Figure 13 (A), be stretched under the state that the substrate 2 be contained in resettlement section can be loaded into the position of hand 3 at arm 4, when observing from above-below direction, the center of rotation C1 of hand 3 is configured on datum line LB, and the center C2 of the leading section of hand 3 is configured on datum line LB.In addition, as shown in Figure 13 (B), under the state that the radius of gyration of the robot 1 that arm 4 is contracted to when circling round centered by the centre of gyration C3 of the component 11 that circles round is minimum position (radius of gyration of the robot 1 when circling round centered by centre of gyration C3 be minimum position there is hand 3 state under), when observing from above-below direction, hand centre line L H is configured with centre of gyration C3, and is configured on datum line LB by the center C10 of the inboard end 2a of substrate 2 taken out of.In addition, control part 20 makes convolution component 11 circle round and hand 3 is rotated, while make arm 4 stretch, with carrying substrate 2.
In this case, even if circle round the centre of gyration C3 of component 11 movement comes carrying substrate 2 in left-right direction along the longitudinal direction from the off-centring of resettlement section at hand 3, also substrate 2 can be taken out of rightly from resettlement section.In addition, in this case, when making robot 1 carry out action between the state that the state that arm 4 extends and arm 4 are shunk, it is ideal for making robot 1 carry out action by PTP action (point-to-point action).When being made robot 1 action by PTP action, compare with the situation making robot 1 carry out action by interpolation action, the vibration of hand 3 can be suppressed.But, also can make robot 1 action in the mode of center C10 movement on datum line LB of the inboard end 2a of substrate 2 by interpolation action.
(other embodiment)
Above-mentioned embodiment is the example in the preferred embodiment of the present invention, but the present invention is not limited thereto, and can carry out various distortion and implement in the scope not changing the technology of the present invention thought.
In the above-described embodiment, robot 1 comprises the substructure member 6 supported main part 5, but robot 1 also can not comprise substructure member 6.That is, main part 5 also can be to move in the lateral direction.Even if in this case, also by making according to the inclination of substrate 2 hand 3 rotate ormal weight relative to the second arm 16 and making convolution component 11 rotate ormal weight relative to base station 10, the position deviation of substrate 2 is suppressed to revise its inclination.Therefore, in this case, even if the position deviation of substrate 2 can be suppressed to revise it, Ye Nengshi robot 1 is miniaturized.
In addition, even if can not move in left-right direction at main part 5 and the centre of gyration C3 of the component 11 that circles round along the direction orthogonal with the moving direction of hand 3 from the off-centring of resettlement section, as shown in figure 13, by while make the second drive motor 22 and convolution drive motor 14 drive, while make the first drive motor 21 drive, arm 4 is stretched, also can take out of substrate 2 rightly from resettlement section.
In the above-described embodiment, the first drive motor 21 is installed on the first arm 15.In addition, such as, the first drive motor 21 also can be installed on arm supporting member 7.In this case, be fixed with belt wheel at the other end (being lower end in the example shown in Fig. 4) of the input part 30 of reductor 26, be provided with driving-belt at this belt wheel with the belt wheel of the rotating shaft being installed on the first drive motor 21 is added.In addition, driving-belt is provided with at the belt wheel 33 of the input part 30 being fixed on reductor 26 with the belt wheel 38 of the input part 35 being fixed on reductor 27 is added.
In the above-described embodiment, the base end side of arm 4 is supported on the front of arm supporting member 7 in the mode that can rotate.In addition, such as, the base end side of arm 4 also can be supported on convolution component 11 in the mode that can rotate.Convolution component 11 in this situation the base end side of arm 4 is supported to the arm supporting member that can rotate.
In the above-described embodiment, arm 4 is made up of the first arm 15 and these two arms of the second arm 16, but arm 4 also can be made up of the arm of more than three.In addition, in the above-described embodiment, robot 1 is the so-called double arm robot comprising two hands 3 and two arms 4, but robot 1 also can be the single armed humanoid robot comprising a hand 3 and an arm 4.In addition, in the above-described embodiment, be substrate 2 by the conveying object that robot 1 is carried, but also can be the semiconductor wafer etc. beyond substrate 2 by the conveying object that robot 1 is carried.
(symbol description)
1 robot (industrial robot)
2 substrates (glass substrate, conveying object)
2a inboard end
2b outboard end
3 hands (hand)
4 arms
7 arm supporting members
15 first arms
16 second arms
20 control parts
21 first drive motors
22 second drive motors
23,53 Poewr transmission mechanisms
26 reductors (the first reductor)
27 reductors (the second reductor)
28 reductors (the 3rd reductor)
30 input parts (input part of the first reductor)
31 efferents (efferent of the first reductor)
35 input parts (input part of the second reductor)
36 efferents (efferent of the second reductor)
40 input parts (input part of the 3rd reductor)
41 efferents (efferent of the 3rd reductor)
43 belt wheels (the first belt wheel)
46 belt wheels (the second belt wheel)
47 driving-belts
50 reductors (the 4th reductor)
58 reductors (the 3rd reductor)
60 belt wheels (the first belt wheel)
62 sun gears
63 planetary gears
64 internal gears
65 pinion frames
66 belt wheels (the 3rd belt wheel)
67 belt wheels (the 4th belt wheel)
69 belt wheels (the 5th belt wheel)
70 input parts (input part of the 4th reductor)
71 efferents (efferent of the 4th reductor)
73 belt wheels (the second belt wheel)
74 driving-belts (the first driving-belt)
75 driving-belts (the second driving-belt)
76 belt wheels (the 6th belt wheel)
77 driving-belts (the 3rd driving-belt)
81 first angular wheels
82 second angular wheels
83 triconic gears
84 retaining members
88 reductors (the 3rd reductor)
89 belt wheels (the 5th belt wheel)
The center of rotation of C1 hand
The center of the leading section of C2 hand
C3 centre of gyration
The center (center of the inboard end of conveying object) of C10 inboard end
The center (center of the outboard end of conveying object) of C20 outboard end
LB datum line
LH hand center line

Claims (10)

1. an industrial robot, is characterized in that, comprising:
Hand, this hand loads conveying object;
Arm, this arm has the second arm of being supported in its front by described hand and can rotating and the base end side of described second arm is supported to these at least two arms of the first arm that can rotate in its front;
First drive motor, this first drive motor is used for described arm is stretched;
Second drive motor, this second drive motor is used for described hand is relatively rotated relative to described second arm; And
Poewr transmission mechanism, this Poewr transmission mechanism for the power of the power and described second drive motor that transmit described first drive motor,
Described Poewr transmission mechanism is carrying out the mode of action substantially linearly by the power transmission of described first drive motor extremely described arm and described hand with described hand under the state of prescribed direction, and with described hand relative to described second arm in relative rotation mode by the power transmission of described second drive motor to described hand
Described second drive motor is installed on described second arm,
Described Poewr transmission mechanism comprises:
Second reductor, this second reductor is configured at the linking part of described first arm and described second arm, and transmits the power of described first drive motor to this second reductor;
3rd reductor, 3rd reductor has the first angular wheel, the second angular wheel, triconic gear and retaining member and links with described second drive motor, described second angular wheel and described triconic gear engage with described first angular wheel and opposite each other, and described first angular wheel is held in and can rotates by described retaining member;
4th reductor, the 4th reductor is configured at the linking part of described second arm and described hand;
First belt wheel, this first belt wheel is configured at the base end side of described second arm and is fixed on the input part of described second reductor;
Second belt wheel, this second belt wheel is configured at the front of described second arm and is fixed on the input part of described 4th reductor;
3rd belt wheel, the 3rd belt wheel is fixed on described second angular wheel;
4th belt wheel, the 4th belt wheel is fixed on described triconic gear;
5th belt wheel, the 5th belt wheel is fixed on described retaining member;
6th belt wheel, the 6th belt wheel is fixed on the rotating shaft of described second drive motor;
First driving-belt, this first driving-belt is set up in described first belt wheel and described 3rd belt wheel;
Second driving-belt, this second driving-belt is set up in described second belt wheel and described 4th belt wheel; And
3rd driving-belt, the 3rd driving-belt is set up in described 5th belt wheel and described 6th belt wheel.
2. industrial robot as claimed in claim 1, is characterized in that,
The efferent of described second reductor is held in the front of described first arm in the mode that can rotate, and is fixed on the base end side of described second arm,
The input part of described second reductor is held in the efferent of described second reductor in revolvable mode,
The efferent of described 4th reductor is held in the front of described second arm in the mode that can rotate, and is fixed on the base end side of described hand,
The input part of described 4th reductor is held in the efferent of described 4th reductor in revolvable mode,
Described retaining member is held in described second arm in the mode that can rotate.
3. industrial robot as claimed in claim 1, is characterized in that,
Described industrial robot comprises the base end side of described first arm is supported to the arm supporting member that can rotate,
Described first drive motor is installed on described first arm or described arm supporting member,
Described Poewr transmission mechanism also comprises the first reductor, and this first reductor is configured at the linking part of described arm supporting member and described first arm and links with described first drive motor.
4. industrial robot as claimed in claim 3, is characterized in that,
The efferent of described first reductor is held in the base end side of described first arm in the mode that can rotate, and is fixed on described arm supporting member,
The input part of described first reductor is held in the efferent of described first reductor in revolvable mode.
5. industrial robot as claimed in claim 1, is characterized in that,
Described second drive motor comprises the brake that the rotating shaft of described second drive motor is stopped.
6. industrial robot as claimed in claim 1, is characterized in that,
Described industrial robot comprises:
Arm supporting member, the base end side of described first arm is axially supported to can rotates using above-below direction as what rotate by this arm supporting member;
Cyclotron mechanism, the axis that this cyclotron mechanism is used for using above-below direction as convolution makes described arm supporting member circle round; And
Control part, this control part controls described industrial robot,
And when described arm extends, described hand enters can accommodate in the resettlement section of described conveying object, when described arm shrinks, described conveying object is taken out of from described resettlement section,
If the end being configured at the inboard of described resettlement section of described conveying object is set to inboard end when described conveying object being contained in described resettlement section, when described conveying object being contained in described resettlement section, the end being configured at the outside of described resettlement section of described conveying object is set to outboard end, and the line through the center of described inboard end and the center of described outboard end when described conveying object being contained in described resettlement section is set to datum line
Then be stretched under the state that the described conveying object be contained in described resettlement section can be loaded into the position of described hand at described arm, when observing from above-below direction, the center of rotation being configured at the described hand of the linking part of described second arm and described hand is configured on described datum line, and the center of the leading section of described hand is configured on described datum line
Under the state that the radius of gyration of the described industrial robot be contracted to when utilizing described cyclotron mechanism to circle round at described arm is minimum position, when observing from above-below direction, the centre of gyration of described arm supporting member is configured on the hand center line that the center of rotation of described hand is connected with the center of the leading section of described hand, and the center taking out of the described inboard end of object described in taking out of is configured on described datum line
Described control part utilizes described cyclotron mechanism that described arm supporting member is circled round, and makes the rotation of described hand that described arm is stretched, to carry described conveying object.
7. industrial robot as claimed in claim 1, is characterized in that,
Described industrial robot comprises:
Arm supporting member, the base end side of described first arm is axially supported to can rotates using above-below direction as what rotate by this arm supporting member;
Cyclotron mechanism, the axis that this cyclotron mechanism is used for using above-below direction as convolution makes described arm supporting member circle round; And
Control part, this control part controls described industrial robot,
And when described arm extends, described hand enters can accommodate in the resettlement section of described conveying object, when described arm shrinks, described conveying object is taken out of from described resettlement section,
If the end being configured at the inboard of described resettlement section of described conveying object is set to inboard end when described conveying object being contained in described resettlement section, when described conveying object being contained in described resettlement section, the end being configured at the outside of described resettlement section of described conveying object is set to outboard end, and the line through the center of described inboard end and the center of described outboard end when described conveying object being contained in described resettlement section is set to datum line
Then when described control part indicates described industrial robot, be stretched under the state that the described conveying object be contained in described resettlement section can be loaded into the position of described hand at described arm, when observing from above-below direction, the center being configured at the center of rotation of the described hand of the linking part of described second arm and described hand and the leading section of described hand is configured on described datum line, if and the centre of gyration of the described arm supporting member utilizing described cyclotron mechanism to circle round is not configured on the hand center line that the center of rotation of described hand is connected with the center of the leading section of described hand, described industrial robot is then made to carry out action, with while the center maintaining the center of rotation of described hand and the leading section of described hand is configured in the state on described datum line, while the centre of gyration of described arm supporting member is configured on described hand center line.
8. a control method for industrial robot, this industrial robot is industrial robot according to claim 1, and it comprises:
Arm supporting member, the base end side of described first arm is axially supported to can rotates using above-below direction as what rotate by this arm supporting member; And
Cyclotron mechanism, the axis that this cyclotron mechanism is used for using above-below direction as convolution makes described arm supporting member circle round,
The feature of the control method of described industrial robot is,
If the end being configured at the inboard of described resettlement section of described conveying object is set to inboard end when described conveying object being contained in the resettlement section accommodating described conveying object, when described conveying object being contained in described resettlement section, the end being configured at the outside of described resettlement section of described conveying object is set to outboard end, and the line through the center of described inboard end and the center of described outboard end when described conveying object being contained in described resettlement section is set to datum line
Then described arm is stretched to the position that the described conveying object being contained in described resettlement section can be loaded into described hand, during to observe from above-below direction, the center of rotation of the described hand being configured at the linking part of described second arm and described hand is configured on described datum line, and by the center configuration of the leading section of described hand on described datum line
The radius of gyration of the described industrial robot that described arm is contracted to when utilizing described cyclotron mechanism to circle round is minimum position, during to observe from above-below direction, the centre of gyration of the described arm supporting member circled round utilizing described cyclotron mechanism is configured on the hand center line that the center of rotation of described hand is connected with the center of the leading section of described hand, and the center configuration of the described inboard end of object is taken out of on described datum line described in taken out of
Utilize cyclotron mechanism that described arm supporting member is circled round, and make the rotation of described hand that described arm is stretched, to carry described conveying object.
9. an indicating means for industrial robot, this industrial robot is industrial robot according to claim 1, and it comprises:
Arm supporting member, the base end side of described first arm is axially supported to can rotates using above-below direction as what rotate by this arm supporting member; And
Cyclotron mechanism, the axis that this cyclotron mechanism is used for using above-below direction as convolution makes described arm supporting member circle round,
The feature of the indicating means of described industrial robot is,
If the end being configured at the inboard of described resettlement section of described conveying object is set to inboard end when described conveying object being contained in the resettlement section accommodating described conveying object, when described conveying object being contained in described resettlement section, the end being configured at the outside of described resettlement section of described conveying object is set to outboard end, and the line through the center of described inboard end and the center of described outboard end when described conveying object being contained in described resettlement section is set to datum line
Then be stretched under the state that the described conveying object be contained in described resettlement section can be loaded into the position of described hand at described arm, when observing from above-below direction, the center being configured at the center of rotation of the described hand of the linking part of described second arm and described hand and the leading section of described hand is configured on described datum line, if and the centre of gyration of the described arm supporting member utilizing described cyclotron mechanism to circle round is not configured on the hand center line that the center of rotation of described hand is connected with the center of the leading section of described hand, described industrial robot is then made to carry out action, with while the center maintaining the center of rotation of described hand and the leading section of described hand is configured in the state on described datum line, while the centre of gyration of described arm supporting member is configured on described hand center line.
10. the indicating means of industrial robot as claimed in claim 9, is characterized in that,
Be stretched under the state that the described conveying object be contained in described resettlement section can be loaded into the position of described hand at described arm, described hand rotated, while make described conveying object and described hand towards aliging.
CN201510028045.4A 2010-07-14 2011-07-01 The control method of industrial robot, industrial robot and the indicating means of industrial robot Active CN104647363B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010159770 2010-07-14
JP2010-159770 2010-07-14
CN201180034062.9A CN102985231B (en) 2010-07-14 2011-07-01 Industrial robot, method for controlling industrial robot, and method for teaching industrial robot

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201180034062.9A Division CN102985231B (en) 2010-07-14 2011-07-01 Industrial robot, method for controlling industrial robot, and method for teaching industrial robot

Publications (2)

Publication Number Publication Date
CN104647363A CN104647363A (en) 2015-05-27
CN104647363B true CN104647363B (en) 2016-04-20

Family

ID=45469325

Family Applications (3)

Application Number Title Priority Date Filing Date
CN201180034062.9A Active CN102985231B (en) 2010-07-14 2011-07-01 Industrial robot, method for controlling industrial robot, and method for teaching industrial robot
CN201510028120.7A Active CN104626133B (en) 2010-07-14 2011-07-01 Industrial robot, the control method of industrial robot and the indicating means of industrial robot
CN201510028045.4A Active CN104647363B (en) 2010-07-14 2011-07-01 The control method of industrial robot, industrial robot and the indicating means of industrial robot

Family Applications Before (2)

Application Number Title Priority Date Filing Date
CN201180034062.9A Active CN102985231B (en) 2010-07-14 2011-07-01 Industrial robot, method for controlling industrial robot, and method for teaching industrial robot
CN201510028120.7A Active CN104626133B (en) 2010-07-14 2011-07-01 Industrial robot, the control method of industrial robot and the indicating means of industrial robot

Country Status (5)

Country Link
JP (1) JP5798118B2 (en)
KR (1) KR101452650B1 (en)
CN (3) CN102985231B (en)
TW (1) TWI572467B (en)
WO (1) WO2012008321A1 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6035063B2 (en) * 2012-06-29 2016-11-30 株式会社ダイヘン Substrate transfer device
WO2014024690A1 (en) * 2012-08-09 2014-02-13 日本電産サンキョー株式会社 Industrial robot
JP6051021B2 (en) 2012-08-09 2016-12-21 日本電産サンキョー株式会社 Industrial robot and control method for industrial robot
JP5927724B2 (en) * 2012-09-06 2016-06-01 本田技研工業株式会社 Mobile device
CN104271321B (en) * 2013-01-07 2016-04-20 日本电产三协株式会社 Industrial robot
KR101458697B1 (en) * 2013-04-19 2014-11-05 현대중공업 주식회사 Apparatus and Method for Transferring Substrate
KR101597776B1 (en) * 2014-01-13 2016-02-25 주식회사 에스에프에이 Substrate transfer robot
JP2015178161A (en) * 2014-03-19 2015-10-08 株式会社安川電機 Transfer robot and transfer system
JP6918698B2 (en) * 2016-07-28 2021-08-11 日本電産サンキョー株式会社 Industrial robot
JP6786291B2 (en) * 2016-07-28 2020-11-18 日本電産サンキョー株式会社 Industrial robot
JP2018089765A (en) * 2016-12-07 2018-06-14 日本電産サンキョー株式会社 Industrial robot
CN106956290B (en) * 2017-04-17 2019-09-10 京东方科技集团股份有限公司 Mechanical arm and its operating method, robot arm device and display panel production equipment
JP6495405B1 (en) * 2017-09-29 2019-04-03 株式会社バンダイ Robot equipment
US10995237B2 (en) 2017-12-29 2021-05-04 Industrial Technology Research Institute Polyimide hybrid material, precursor solution and manufacture method thereof
TWI703188B (en) * 2017-12-29 2020-09-01 財團法人工業技術研究院 Polyimide hybrid material, precursor solution and manufacture method thereof
JP7191564B2 (en) * 2018-07-03 2022-12-19 日本電産サンキョー株式会社 industrial robot
KR102528650B1 (en) 2018-12-21 2023-05-03 호코스 가부시키가이샤 Work loading and unloading device
JP2022076060A (en) * 2020-11-09 2022-05-19 日本電産サンキョー株式会社 Teaching method for industrial robot
JP2022083199A (en) * 2020-11-24 2022-06-03 日本電産サンキョー株式会社 Industrial robot

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62144186U (en) * 1986-03-06 1987-09-11
JPH01240288A (en) * 1988-03-18 1989-09-25 Mitsubishi Electric Corp Robot for industry
JPH04315593A (en) * 1991-04-12 1992-11-06 Matsushita Electric Ind Co Ltd Industrial robot
JPH09162257A (en) * 1995-12-05 1997-06-20 Metsukusu:Kk Thin-type substrate transfer device
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP3955499B2 (en) * 2001-08-07 2007-08-08 日本電産サンキョー株式会社 Hand positioning method and apparatus
JP3881579B2 (en) * 2002-03-29 2007-02-14 日本電産サンキョー株式会社 Arm drive device
JP2005005608A (en) * 2003-06-13 2005-01-06 Ebara Corp Teaching apparatus for substrate transfer robot and teaching method
JP4731267B2 (en) * 2005-09-29 2011-07-20 日本電産サンキョー株式会社 Robot hand and workpiece transfer robot using the same
JP4605560B2 (en) * 2005-12-05 2011-01-05 日本電産サンキョー株式会社 Industrial robot
JP5124096B2 (en) * 2006-03-03 2013-01-23 川崎重工業株式会社 Clean space robot system
JP5016302B2 (en) * 2006-12-01 2012-09-05 日本電産サンキョー株式会社 Arm drive device and industrial robot
JP4970128B2 (en) * 2007-04-27 2012-07-04 日本電産サンキョー株式会社 Industrial robot and collective processing device
JP5280132B2 (en) * 2008-08-26 2013-09-04 日本電産サンキョー株式会社 Industrial robot
JP5178432B2 (en) * 2008-09-26 2013-04-10 日本電産サンキョー株式会社 Industrial robot

Also Published As

Publication number Publication date
CN104626133B (en) 2016-08-24
CN102985231A (en) 2013-03-20
TW201208839A (en) 2012-03-01
CN102985231B (en) 2015-06-10
CN104626133A (en) 2015-05-20
CN104647363A (en) 2015-05-27
JP5798118B2 (en) 2015-10-21
WO2012008321A1 (en) 2012-01-19
KR20130031335A (en) 2013-03-28
JPWO2012008321A1 (en) 2013-09-09
KR101452650B1 (en) 2014-10-22
TWI572467B (en) 2017-03-01

Similar Documents

Publication Publication Date Title
CN104647363B (en) The control method of industrial robot, industrial robot and the indicating means of industrial robot
JP6110636B2 (en) Industrial robot
CN102161438B (en) Conveying device
CN104723332B (en) A kind of direct-drive type may be reversed wafer transfer robot
CN105966495B (en) Orthogonal two-way truck and its control method
CN106737600A (en) A kind of seven freedom transfer robot containing ball-screw moving platform
CN202805210U (en) Arm structure of robot and robot
CN105359639A (en) Component mounting device
CN109230399B (en) Conveying device and conveying system
CN105835050A (en) Three-degree-of-freedom rope driven series robot device
CN108698773B (en) Robot for carrying substrate
CN202592382U (en) Automatic mechanical gripper device
CN103302510B (en) Can be floated containing two the parallel institution of staggered rotating shaft
KR20080090303A (en) Cocentric double axis mechanism having bevel gears
CN106005096A (en) Single-driven omni-directional type AGV device
KR20170084388A (en) Robot for transferring substrate
CN109352674A (en) The double clip claw mechanisms of I-beam wheel
KR20160005647A (en) Workpiece conveying apparatus
CN210102067U (en) Winding machine top broken film lifting device
JP6509152B2 (en) Traveling device
CN201374322Y (en) Translating and overturning type wafer automatic conveying device
CN104260080B (en) The built-in parallel robot of Three Degree Of Freedom bar
KR102314364B1 (en) Robot for transferring substrate
CN220431561U (en) Reversing device and conveying equipment
CN110001822A (en) Turnover mechanism and handling device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant