KR102588614B1 - Industrial robot and manufacturing system - Google Patents

Abstract

The present invention provides an industrial robot that can shorten the tact time in a manufacturing system in which an industrial robot is used and miniaturize a transfer chamber in which the hand, arm, etc. are placed, even if the length of the hand is long.
The industrial robot 1 includes arms 14, 15 to which the hands 12, 13 are rotatably connected to the distal ends, and an arm support portion 16 to which the proximal ends of the arms 14, 15 are rotatably connected. The arm support portion 16 includes a swing arm 17 rotatably connected to the distal end, and a main body portion 18 to which the proximal end of the swing arm 17 is rotatably connected. If the rotation center of the swing arm 17 with respect to the main body 18 is the arm rotation center C4, the arms 14 and 15 rotate together with the swing arm 17 when the swing arm 17 rotates. The stretching operation is performed so that the maximum rotation radius about the arm rotation center C4 of the portion becomes smaller.

Description

Industrial robots and manufacturing systems {INDUSTRIAL ROBOT AND MANUFACTURING SYSTEM}

The present invention relates to an industrial robot that transports objects to be transported. Additionally, the present invention relates to a manufacturing system equipped with such an industrial robot.

Conventionally, industrial robots that transport panel materials are known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 includes a support unit installed to be capable of going up and down, an arm unit installed in the support unit, and a hand unit installed in the arm unit. The support unit includes a column portion that can be raised and lowered and rotatably installed, a base portion that extends in one direction in the horizontal direction from the column portion, and a head portion that is rotatably supported on the distal end of the base portion. The arm unit is provided with a pair of multi-joint arms, and the proximal end side of the pair of multi-joint arms is rotatably connected to the head portion. The hand unit is provided with two hands rotatably connected to each distal end side of a pair of articulated arms.

Additionally, the industrial robot described in Patent Document 1 is used in a panel processing device. In this panel processing apparatus, the support unit, arm unit, and hand unit are arranged inside the transfer chamber. The transfer chamber is formed to have a substantially rectangular shape when viewed from the vertical direction, and the support unit, arm unit, and hand unit have the center of rotation of the pillar portion of the support unit and the center of the transfer chamber when viewed from the vertical direction. They are arranged to match.

Around the transfer chamber, a panel supply unit, a plurality of panel processing units, and a panel unloading unit are arranged so as to surround the transfer chamber. Specifically, a panel supply unit is disposed on one longitudinal side of the transfer chamber, which has a substantially rectangular shape when viewed from the top and bottom, and a panel unloading unit is disposed on the other longitudinal side of the transfer chamber. Additionally, two panel processing units are disposed on one side of the transfer chamber in the short direction so as to be adjacent to each other in the longitudinal direction of the transfer chamber, and on the other side of the short direction of the transfer chamber, two panel processing units are disposed adjacent to each other in the longitudinal direction of the transfer chamber. This is arranged. Additionally, one panel processing unit is disposed at one corner of the transfer chamber, which has a substantially rectangular shape when viewed from the top and bottom direction. The panel supply section is provided with a supply port for panel material. The panel processing unit is provided with ports for carrying in and out of panel materials. The panel carrying out section is provided with a carrying out port for the panel material. The supply port, loading/unloading port, and loading/unloading port are connected to the transfer chamber.

The industrial robot described in Patent Document 1 performs a lifting and rotating operation of the pillar section, a rotating operation of the head section, and an extension/contracting operation of the multi-joint arm, and transports panel materials to the panel supply section, the panel processing unit, and the panel delivery section. do it Additionally, when the head portion rotates with respect to the base portion, the multi-joint arm is shortened so that the rotation radius of the rotating portion becomes smaller.

Japanese Patent Publication No. 2014-73558

In the industrial robot described in Patent Document 1, the length of the hand is set according to the depth of the panel supply unit, panel processing unit, and panel delivery unit in order to appropriately convey the panel material to the panel supply unit, panel processing unit, and panel delivery unit. . Accordingly, as the depth of the panel supply unit, panel processing unit, and panel unloading unit increases, the length of the hand becomes longer.

On the other hand, when using the industrial robot described in Patent Document 1 to transport panel materials between two panel processing units adjacent to each other in the longitudinal direction of the transfer chamber, in order to shorten the tact time in the panel processing device, the transfer It is desirable to rotate the support unit while matching the short direction of the chamber and the longitudinal direction of the hand. In other words, after the panel material is taken out from one of the two panel processing units adjacent to the longitudinal direction of the transfer chamber, since the short direction of the transfer chamber and the longitudinal direction of the hand match, this panel material is transferred to the other panel processing unit. When loading into a panel processing unit, if the support unit is rotated with the short direction of the transfer chamber aligned with the longitudinal direction of the hand, it becomes possible to shorten the tact time in the panel processing device.

However, in the industrial robot described in Patent Document 1, when the support unit is rotated with the longitudinal direction of the elongated hand aligned with the short direction of the transfer chamber, the panel material mounted on the hand or the connection between the hand and the transfer chamber may be damaged. To prevent interference with the wall, the transfer chamber must be made large in the short direction of the transfer chamber. That is, in the industrial robot described in Patent Document 1, when the length of the hand is increased and the support unit is rotated with the short direction of the transfer chamber aligned with the longitudinal direction of the hand, the transfer chamber becomes large. .

Therefore, the object of the present invention is to make it possible to shorten the tact time in a manufacturing system where an industrial robot is used even if the length of the hand is long, and to miniaturize the transfer chamber in which the hand, arm, etc. are placed inside. The goal is to provide industrial robots that are capable of doing so. Additionally, the object of the present invention is to provide a manufacturing system equipped with such an industrial robot.

In order to solve the above problem, the industrial robot of the present invention includes two hands on which objects to be transported are mounted, and two arms in which each of the two hands is rotatably connected to the front end with the vertical direction as the axis of rotation. , an arm support portion in which the proximal end sides of the two arms are rotatably connected with the vertical direction as the axis of rotation, and a swing arm in which the arm support portion is rotatably connected to the distal end side with the vertical direction as the axis of rotation; A main body portion is provided where the proximal end sides of the swing arms are rotatably connected with the vertical direction being the axis of rotation, and the proximal end sides of the two arms are connected to the arm support portion in a state adjacent to each other, and the arms are rotatable relative to each other. It is a multi-joint arm having at least two arm parts that are connected, and is capable of stretching between a position where the tip of the hand is extended so as to be spaced apart from the arm support part and a position where the tip of the hand is contracted so that it is close to the arm support part, and is attached to the main body. If the rotation center of the swing arm relative to the arm is referred to as the arm rotation center, the arm extends and contracts so that the maximum rotation radius of the arm rotation center of the part that rotates with the swing arm becomes smaller when the swing arm rotates with respect to the main body. It is characterized by

In the present invention, for example, the hand, arm, arm support, and swing arm are disposed inside a transfer chamber that has a substantially rectangular shape when viewed from the top and bottom.

In the industrial robot of the present invention, if the rotation center of the swing arm with respect to the main body is referred to as the arm rotation center, the arm rotates with respect to the arm rotation center of the part that rotates with the swing arm when the swing arm rotates with respect to the main body. The stretching operation is performed so that the maximum rotation radius becomes smaller. Therefore, in the present invention, even if the length of the hand is increased, the transfer chamber is miniaturized, and the swing arm is rotated with the longitudinal direction of the hand aligned with any direction, the arm is mounted on the hand by the stretching motion. It is possible to prevent interference with the inner wall surface of the transfer chamber, such as objects to be transported or hands.

For example, in the case where the hand, arm, arm support, and swing arm are arranged inside a transfer chamber that has a substantially rectangular shape when viewed from the top and bottom, even if the length of the hand becomes longer, the short direction of the transfer chamber Even if the transfer chamber is miniaturized, and the swing arm is rotated with the short direction of the transfer chamber aligned with the longitudinal direction of the hand, the inner wall of the transfer chamber, such as the hand or the object to be transported, is moved by the stretching motion of the arm. It becomes possible to prevent interference with Therefore, in the present invention, for example, a hand, an arm, an arm supporter, and a swing arm are disposed inside a transfer chamber that has a substantially rectangular shape when viewed in the vertical direction, and the shape when viewed in the vertical direction is In the case where a plurality of process chambers are arranged around the transfer chamber so as to be adjacent to the longitudinal direction of the transfer chamber, which has a roughly rectangular shape, it is possible to shorten the tact time in a manufacturing system in which an industrial robot is used even if the length of the hand is long. This makes it possible to miniaturize the transfer chamber in which the hand, arm, etc. are placed.

The industrial robot of the present invention can be used in a manufacturing system equipped with a transfer chamber. In this manufacturing system, the direction parallel to the short side of the transfer chamber, which has a substantially rectangular shape when viewed from the top and bottom, is referred to as the first direction, and the direction parallel to the long side of the transfer chamber orthogonal to the first direction is referred to as the second direction. Let's say it is a direction, and if one side of the first direction is called the third direction side, and the side opposite to the third direction side is called the fourth direction side, the swing arm has the distal end of the hand disposed on the third direction side and the hand The arm rotates with respect to the main body portion with the proximal end side disposed on the fourth direction side, or with the distal end side of the hand disposed on the fourth direction side and the proximal end side of the hand disposed on the third direction side. , When the swing arm rotates with respect to the main body, it is preferable to perform an expansion/contraction movement in the first direction.

With this configuration, even if the length of the hand becomes longer, even if the transfer chamber is miniaturized in the short direction of the transfer chamber, and even if the swing arm is rotated with the short direction of the transfer chamber aligned with the longitudinal direction of the hand, the arm can expand and contract. This makes it possible to prevent interference with the inner wall surface of the transfer chamber by objects to be transported, the hand, etc. mounted on the hand. In other words, even if the length of the hand becomes longer or the transfer chamber is miniaturized in the short direction of the transfer chamber, it is possible to rotate the swing arm while matching the short direction of the transfer chamber and the longitudinal direction of the hand. Therefore, when a plurality of process chambers are arranged around the transfer chamber so as to be adjacent to each other in the longitudinal direction of the transfer chamber, it becomes possible to shorten the tact time in the manufacturing system even if the length of the hand becomes longer, and the transfer chamber It becomes possible to miniaturize the transfer chamber in the short direction.

In the present invention, it is preferable that the arm continuously expands and contracts so that the position of the hand in the first direction remains constant when the swing arm rotates with respect to the main body. With this configuration, it becomes possible to stabilize the state of the object being transported on the hand when the swing arm is rotating with respect to the main body.

In the present invention, the rotation center of the arm support with respect to the swing arm is referred to as the support rotation center, and the trajectory of the support rotation center when viewed from the up and down directions when the swing arm is rotated around the arm rotation center is a virtual circle. In this case, the swing arm rotates with respect to the main body so that the center line of the transfer chamber intersects the virtual circle in the first direction when viewed from the up and down direction, and the swing arm rotates with respect to the transfer chamber in the first direction when viewed from the up and down direction. The rotation with respect to the main body portion is started from the state in which the intersection of the center line and the virtual circle and the rotation center of the support portion coincide, and the arm moves the conveyed object in a state in which the conveyed object is mounted on the hand at the start of the rotation of the swing arm. It is preferable that the rotation radius with respect to the rotation center of the support portion on the distal end side of the included hand is reduced to a position where the rotation radius with respect to the rotation center of the support portion on the proximal end side of the hand is equal. With this configuration, it becomes possible to further miniaturize the transfer chamber in the first direction.

In the present invention, for example, the arm rotation center is disposed on the fourth direction side of the center of the transfer chamber in the first direction, and the distance between the support rotation center and the arm rotation center when viewed from the vertical direction is the first direction. It is longer than the distance between the center of the transfer chamber and the arm rotation center, and the swing arm is an arc that forms a part of an imaginary circle when viewed from the up and down directions, and is located on the third direction side than the center of the transfer chamber in the first direction. The swing arm rotates with respect to the main body in a range where the rotation center of the support part passes over the circular arc, and the distal end of the hand is disposed on the third direction side and the proximal end of the hand is disposed on the fourth direction side. During this rotation, the arm first contracts after the start of rotation of the swing arm, and then extends, with the distal end of the hand disposed on the fourth direction side and the proximal end side of the hand disposed on the third direction side. When the swing arm rotates with respect to the main body, the arm first extends and then contracts after the swing arm starts to rotate.

As described above, in the present invention, even if the length of the hand becomes longer, it is possible to shorten the tact time in a manufacturing system where an industrial robot is used, and it is also possible to miniaturize the transfer chamber in which the hand, arm, etc. are placed inside. It becomes possible.

1 is a plan view showing a state in which an industrial robot according to an embodiment of the present invention is built into a manufacturing system.
FIG. 2 is a front view of the industrial robot shown in FIG. 1.
FIG. 3 is a side view of the industrial robot shown in FIG. 1.
FIG. 4 is a top view of the industrial robot shown in FIG. 1.
Fig. 5 is a plan view for explaining the operation of the swing arm shown in Fig. 4, etc.;
FIG. 6 is a plan view for explaining the operation of an industrial robot in the manufacturing system shown in FIG. 1.
FIG. 7 is a plan view for explaining the operation of an industrial robot in the manufacturing system shown in FIG. 1.
FIG. 8 is a plan view for explaining the operation of an industrial robot in the manufacturing system shown in FIG. 1.
FIG. 9 is a plan view for explaining the operation of an industrial robot in the manufacturing system shown in FIG. 1.
FIG. 10 is a plan view for explaining the operation of an industrial robot in the manufacturing system shown in FIG. 1.
FIG. 11 is a plan view for explaining the operation of an industrial robot in the manufacturing system shown in FIG. 1.
FIG. 12 is a plan view for explaining the operation of an industrial robot in the manufacturing system shown in FIG. 1.
FIG. 13 is a plan view for explaining the operation of an industrial robot in the manufacturing system shown in FIG. 1.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention will be described with reference to the drawings.

(Configuration of industrial robots and manufacturing systems)

Figure 1 is a plan view showing a state in which an industrial robot 1 according to an embodiment of the present invention is built into a manufacturing system 3. FIG. 2 is a front view of the industrial robot 1 shown in FIG. 1. FIG. 3 is a side view of the industrial robot 1 shown in FIG. 1. FIG. 4 is a plan view of the industrial robot 1 shown in FIG. 1. FIG. 5 is a plan view for explaining the operation of the swing arm 17 shown in FIG. 4, etc.

The industrial robot 1 of this form (hereinafter referred to as “robot 1”) is, for example, a glass substrate 2 for an organic EL (organic electroluminescence) display (hereinafter referred to as “substrate ( 2) It is a robot for returning goods. This robot 1 is a horizontal articulated robot that is incorporated and used in the organic EL display manufacturing system 3.

The manufacturing system 3 includes a transfer chamber 4 (hereinafter referred to as “chamber 4”) and a plurality of process chambers 5 to 9 (hereinafter referred to as “chambers”) arranged to surround the chamber 4. 5 to 9)”) are provided. The manufacturing system 3 of this type has five chambers 5 to 9. The chambers 4 to 9 are vacuum chambers, and the interiors of the chambers 4 to 9 are vacuum. Inside the chamber 4, a part of the robot 1 is placed. When the fork portion 21, which will be described later and which constitutes the robot 1, is introduced into the chambers 5 to 9, the robot 1 transports the substrate 2 between the plurality of chambers 5 to 9. Various devices and the like are disposed in the chambers 5 to 9, and the substrate 2 transported by the robot 1 is accommodated. Additionally, in the chambers 5 to 9, various processes are performed on the substrate 2.

The chamber 4 is formed in a substantially rectangular box shape when viewed from the top and bottom directions. Hereinafter, the direction parallel to the short side of the chamber 4, which has a substantially rectangular shape when viewed from the top and bottom (the The direction parallel to the long side (Y direction in FIG. 1) is called the “left and right direction.” In addition, one side in the front-back direction (the direction side) is called the “right” side, and the side opposite to the right (Y2 direction side in FIG. 1) is called the “left” side. In this form, the front-back direction (X direction) is the first direction, the left-right direction (Y direction) is the second direction, the inside (X2 direction side) is the third direction, and the front (X1 direction side) is the fourth direction. It is the side.

Chamber 5 is arranged on the left side of chamber 4. Additionally, the chamber 5 is arranged so that the center of the chamber 5 coincides with the center of the chamber 4 in the front-back direction. The chambers 6 and 7 are located in front of the chamber 4, and the chambers 8 and 9 are located inside the chamber 4. Additionally, the chamber 6 and chamber 7 are arranged adjacent to each other in the left and right directions, and the chamber 8 and chamber 9 are arranged adjacent to each other in the left and right directions. The chamber 6 and the chamber 8 are arranged at the same position in the left and right directions, and the chamber 7 and the chamber 9 are arranged at the same position in the left and right directions. Additionally, the chambers 6 and 8 are located to the left of the chambers 7 and 9. A gate is formed in each of the chambers 5 to 9 and at a connection portion of the chamber 4.

In this form, as shown in FIG. 5, the distance between the center line CL1 of the chamber 4 and the inner wall surface of the front of the chamber 4 in the front-back direction when viewed from the up and down directions (i.e., the distance between the center line CL1 and the chamber 4) (4) Distance between L1 and the center line CL2 of the chambers 6 and 8 in the left and right directions and the left inner wall surface of the chamber 4) L2 in the left and right directions The distance L3 between the center line CL3 of the chambers 7 and 9 and the inner wall surface on the right side of the chamber 4 is equal.

The robot 1 includes two hands 12 and 13 on which the substrate 2 is mounted, an arm 14 on which the hand 12 is rotatably connected to the distal end, and the hand 13 is attached to the distal end. An arm 15 that is rotatably connected, an arm support portion 16 that is rotatably connected to the proximal ends of the arms 14, 15, and a swing arm ( 17) and a main body portion 18 to which the proximal end side of the swing arm 17 is rotatably connected. Hands 12 and 13, arms 14 and 15, arm support 16 and swing arm 17 are disposed above the main body 18. The upper end sides of the hands 12 and 13, arms 14 and 15, arm support 16, swing arm 17 and main body 18 are disposed inside the chamber 4.

The hands 12 and 13 have a base portion 20 connected to the arms 14 and 15 and a fork portion 21 on which the substrate 2 is mounted. The fork portion 21 is fixed to the base portion 20 so as to protrude from the base portion 20 in the horizontal direction. The substrate 2 is mounted on the tip side of the fork portion 21. That is, the substrate 2 is mounted on the distal ends of the hands 12 and 13. In this form, the depth of the chambers 5 to 9 is increased, and the length of the fork portion 21 is long. That is, the length of the hands 12 and 13 is long. Additionally, in this form, the hand 12 is disposed above the hand 13.

The arms 14 and 15 are multi-joint arms composed of two arm parts, a first arm part 22 and a second arm part 23, which are connected to each other so that relative rotation is possible. The proximal end side of the first arm portion 22 is rotatably connected to the arm support portion 16 with the vertical direction as the axis of rotation. The proximal end side of the first arm portion 22 of the arm 14 and the proximal end side of the first arm portion 22 of the arm 15 are connected to the arm support portion 16 while being adjacent to each other in the horizontal direction. That is, the proximal end sides of the two arms 14 and 15 are connected to the arm support portion 16 while being adjacent to each other. Additionally, the arm 14 and the arm 15 are arranged adjacent to each other and at the same position in the vertical direction.

To the distal end of the first arm 22, the proximal end of the second arm 23 is rotatably connected with the vertical direction being the axis of rotation. At the distal end of the second arm portion 23, hands 12 and 13 are connected so as to be rotatable with the vertical direction being the axis of rotation. In the horizontal direction, the distance between the center of rotation of the first arm 22 with respect to the arm support 16 and the center of rotation of the second arm 23 with respect to the first arm 22, and The distance between the center of rotation of the second arm 23 with respect to (22) and the center of rotation of the hands 12 and 13 with respect to the second arm 23 is equal.

The arms 14 and 15 have a position where the tip of the hand 12 and 13 is stretched to be spaced apart from the arm support 16 (see FIGS. 6 and 7, etc.), and the tip of the hand 12 and 13 is positioned at the arm support ( It is capable of being expanded and contracted between the positions where it is reduced to approach 16) (see FIG. 1). An arm drive mechanism that expands and contracts each of the arms 14 and 15 is connected to each of the arms 14 and 15. The arm driving mechanism expands and contracts the arms 14 and 15 so that the hands 12 and 13 move linearly while facing in a certain direction. In this form, when the stretching amounts of the arms 14 and 15 are equal, the hands 12 and 13 overlap in the vertical direction. Also, at this time, when viewed from the vertical direction, the arms 14 and 15 are arranged in line symmetry.

The arm support portion 16 is formed in a disk shape. This arm support portion 16 is rotatably connected to the distal end of the swing arm 17 with the vertical direction being the axis of rotation. As shown in FIG. 4, when viewed from the vertical direction, the support rotation center C1 is the center of rotation of the arm support 16 with respect to the swing arm 17, and the first arm of the arm 14 with respect to the arm support 16 An isosceles triangle is formed by connecting the arm rotation center C2, which is the rotation center of the arm portion 22, and the arm rotation center C3, which is the rotation center of the first arm portion 22 of the arm 15 with respect to the arm support portion 16. A rotation mechanism that rotates the arm support portion 16 is connected to the arm support portion 16. Additionally, the arm support portion 16 may be formed in a polygonal plate shape, such as a triangular plate shape or a square plate shape, or may be formed in an elliptical plate shape, etc.

The swing arm 17 is comprised of one arm portion whose shape is oval when viewed from the up and down directions. The proximal end side of the swing arm 17 is rotatably connected to the main body 18 with the vertical direction being the axis of rotation. The main body 18 is provided with a case body 24 formed in a hollow shape. In the case body 24, a rotation mechanism for rotating the swing arm 17 and a lifting mechanism for raising and lowering the swing arm 17 are accommodated.

In this form, as shown in FIG. 4, the arms 14 and 15 are the hands 12 and 13 including the substrate 2 in a state in which the substrate 2 is mounted on the hands 12 and 13. The rotation radius (more specifically, the maximum rotation radius on the front end side of the hands 12 and 13 including the substrate 2) with respect to the support rotation center C1 on the distal end side of the proximal end side of the hands 12 and 13 is greater than R1. It is possible to reduce the rotation radius (more specifically, the maximum rotation radius on the proximal end side of the hands 12 and 13) R2 with respect to the support rotation center C1 to a position where it increases.

In addition, as shown in FIG. 5, the arm rotation center C4, which is the center of rotation of the swing arm 17 with respect to the main body 18, when viewed from the vertical direction, is disposed at the center of the chamber 4 in the left and right directions. It is arranged ahead of the center of the chamber 4 in the anteroposterior direction. In addition, when viewed from the vertical direction, the distance between the arm rotation center C4 and the support rotation center C1 is the distance L5 between the center of the chamber 4 in the front-back direction and the arm rotation center C4 (i.e., the chamber in the front-back direction ( It is longer than the distance L5) between the center line CL1 in 4) and the arm rotation center C4. Therefore, in this form, if the trajectory of the support rotation center C1 when viewed from the vertical direction when the swing arm 17 is rotated around the arm rotation center C4 is a virtual circle, the swing arm 17 is , When viewed from the vertical direction, the center line CL1 of the chamber 4 in the front-back direction rotates with respect to the main body 18 so that this virtual circle intersects.

In addition, in this form, as shown in FIG. 5, the swing arm 17 is an arc CA forming a part of this virtual circle when viewed from the up and down directions, and is located inside the center of the chamber 4 in the front-back direction. The support rotation center C1 rotates around the arm rotation center C4 in the range where the support rotation center C1 passes over the circular arc CA. In addition, in this form, when viewed from the vertical direction, one of the two intersection points (that is, both end points of the circular arc CA) between the center line CL1 of the chamber 4 in the front-back direction and this virtual circle, and in the left and right directions The intersection points of the center line CL2 and the center line CL1 of the chambers 6 and 8 coincide with each other, and the other side of the two intersection points between the center line CL1 and this virtual circle and the intersections of the chambers 7 and 9 in the left and right directions. The intersection point of the center line CL3 and the center line CL1 coincides.

(Industrial robot movement)

6 to 13 are plan views for explaining the operation of the industrial robot 1 in the manufacturing system 3 shown in FIG. 1.

In the manufacturing system 3, for example, when loading the substrate 2 into the chamber 5 or unloading the substrate 2 from the chamber 5, as shown in FIG. 6, when viewed from the vertical direction , the intersection of the center line CL1 and the center line CL2 coincides with the support rotation center C1, and the distal ends of the hands 12 and 13 are placed on the left and the proximal ends of the hands 12 and 13 are placed on the right. , at least one of the arm 14 and the arm 15 expands and contracts to load the substrate 2 into the chamber 5 or unload the substrate 2 from the chamber 5 .

In addition, for example, when the substrate 2 is subsequently loaded into or unloaded from the chamber 8, the arms 14 and 15 are reduced in a state of FIG. 6. The arm support portion 16 rotates 90° around the support portion rotation center C1 in a clockwise direction (hereinafter, this direction is referred to as “clockwise”). At this time, even if the arm support portion 16 rotates around the support rotation center C1, the distal ends of the hands 12 and 13 reach a position where they do not interfere with the left inner wall surface and the inner inner wall surface of the chamber 4. Arms 14 and 15 are reduced. Specifically, as shown in FIG. 1, the rotation radius R1 with respect to the support rotation center C1 on the distal end side of the hands 12 and 13 and the rotation radius with respect to the support rotation center C1 on the proximal end side of the hands 12 and 13. The arms 14 and 15 are shortened to a position where R2 becomes equal. Afterwards, as shown in FIG. 7, at least one of the arm 14 and the arm 15 expands and contracts to load the substrate 2 into the chamber 8 or remove the substrate 2 from the chamber 8. take it out

In addition, for example, when the substrate 2 is loaded into the chamber 9 or the substrate 2 is unloaded from the chamber 9, as shown in FIG. 1, the turning radius R1 and the turning radius R2 With the arms 14 and 15 reduced to the position where the (17) Starts rotating clockwise. Additionally, the swing arm 17 rotates to a position where the intersection of the center line CL1 and the center line CL3 coincides with the support rotation center C1. At this time, the swing arm 17 rotates with respect to the main body 18 with the distal ends of the hands 12 and 13 disposed inward and the proximal ends of the hands 12 and 13 disposed in the front.

Also, at this time, the arms 14 and 15 perform an extension/contraction operation so that the maximum rotation radius of the portion that rotates together with the swing arm 17 with respect to the arm rotation center C4 becomes smaller. Specifically, when the swing arm 17 rotates with respect to the main body 18, the distal ends of the hands 12 and 13, including the substrate 2, do not interfere with the inner wall surface of the chamber 4. , the arms 14 and 15 perform expansion and contraction movements in the forward and backward directions. That is, when the swing arm 17 is rotated, the arms 14 and 15 are expanded and contracted in the front and rear directions so that the distal ends of the hands 12 and 13 do not interfere with the inner wall surface of the chamber 4. At this time, the arms 14 and 15 first contract after the swing arm 17 starts to rotate, and then expand. Also, at this time, the arms 14 and 15 continuously expand and contract so that the positions of the hands 12 and 13 in the front-back direction are kept constant.

More specifically, after the swing arm 17 starts rotating until the centers of the hands 12 and 13 in the left and right directions reach the arm rotation center C4 in the left and right directions (i.e., in the left and right directions) (until the centers of the hands 12 and 13 reach the center of the chamber 4 in the left and right directions), so that the positions of the hands 12 and 13 in the front and rear directions are kept constant, The arms 14 and 15 are continuously reduced from the position where the turning radius R1 and the turning radius R2 become equal (see FIG. 1) to the position where the turning radius R2 becomes larger than the turning radius R1 (see FIG. 8). Additionally, between the centers of the hands 12 and 13 in the left and right directions passing the arm rotation center C4 in the left and right directions until the swing arm 17 stops rotating, the hands in the front and rear directions So that the positions of (12, 13) are kept constant, the arms (14, 15) are continuously extended from a position where the turning radius R2 becomes larger than the turning radius R1 to a position where the turning radius R1 becomes equal to the turning radius R2.

Afterwards, as shown in FIG. 9, at least one of the arm 14 and the arm 15 expands and contracts to load the substrate 2 into the chamber 9 or remove the substrate 2 from the chamber 9. take it out Also, after that, for example, when loading the substrate 2 into the chamber 8 or unloading the substrate 2 from the chamber 8, similarly, the rotation radius R1 and the rotation radius R2 are equal to the position. With the arms 14 and 15 reduced, when viewed from the top and bottom, the clock in Figure 6 rotates around the arm rotation center C4 from the position where the intersection of the center line CL1 and the center line CL3 coincides with the support rotation center C1. The swing arm 17 starts rotating in the opposite direction (hereinafter, this direction is referred to as “counterclockwise”). Additionally, the swing arm 17 rotates to a position where the intersection of the center line CL1 and the center line CL2 coincides with the support rotation center C1.

At this time, the arms 14 and 15 extend and contract in the forward and backward directions so that the distal ends of the hands 12 and 13 containing the substrate 2 do not interfere with the inner wall surface of the chamber 4. Specifically, as described above, from the time the swing arm 17 starts to rotate until the centers of the hands 12 and 13 in the left and right directions reach the arm rotation center C4 in the left and right directions. , so that the positions of the hands 12, 13 in the front-back direction are kept constant, the arms 14, 15 are moved from a position where the turning radius R1 and the turning radius R2 are equal to a position where the turning radius R2 is larger than the turning radius R1. decreases continuously. Additionally, between the centers of the hands 12 and 13 in the left and right directions passing the arm rotation center C4 in the left and right directions until the swing arm 17 stops rotating, the hands in the front and rear directions So that the positions of (12, 13) are kept constant, the arms (14, 15) are continuously extended from a position where the turning radius R2 becomes larger than the turning radius R1 to a position where the turning radius R1 becomes equal to the turning radius R2.

Additionally, for example, after loading the substrate 2 into the chamber 5 or unloading the substrate 2 from the chamber 5, the substrate 2 is loaded into the chamber 6 or the substrate 2 is removed from the chamber 6. When carrying out 2), the arm support part 16 rotates 90° counterclockwise around the support part rotation center C1. At this time, even if the arm support part 16 rotates around the support rotation center C1, the distal ends of the hands 12 and 13 are rotated so that they do not interfere with the left inner wall surface and the front inner wall surface of the chamber 4. The arms 14 and 15 are shortened to a position where the radius R1 and the rotation radius R2 become equal. After that, as shown in FIG. 10, at least one of the arm 14 and the arm 15 expands and contracts to load the substrate 2 into the chamber 6 or remove the substrate 2 from the chamber 6. take it out

In addition, for example, when the substrate 2 is loaded into the chamber 7 or the substrate 2 is unloaded from the chamber 7, as shown in FIG. 11, the turning radius R1 and the turning radius R2 With the arms 14 and 15 reduced to the position where the (17) The meeting begins in a clockwise direction. Additionally, the swing arm 17 rotates to a position where the intersection of the center line CL1 and the center line CL3 coincides with the support rotation center C1. At this time, the swing arm 17 rotates with respect to the main body 18 with the distal ends of the hands 12 and 13 positioned in front and the proximal ends of the hands 12 and 13 positioned inward.

Also, at this time, the arms 14 and 15 perform an extension/contraction operation so that the maximum rotation radius of the portion that rotates together with the swing arm 17 with respect to the arm rotation center C4 becomes smaller. Specifically, when the swing arm 17 rotates with respect to the main body 18, the proximal ends of the hands 12, 13 do not interfere with the inner wall surface of the chamber 4, so that the arms 14, 15 ) performs an stretching operation in the front-back direction. At this time, the arms 14 and 15 first extend and then contract after the swing arm 17 starts to rotate. Also, at this time, the arms 14 and 15 continuously expand and contract so that the positions of the hands 12 and 13 in the front-back direction are kept constant.

More specifically, after the swing arm 17 starts to rotate until the centers of the hands 12 and 13 in the left and right directions reach the arm rotation center C4 in the left and right directions, there are So that the positions of the hands 12 and 13 in the arm are kept constant, from the position where the turning radius R1 and the turning radius R2 are equal (see FIG. 11) to the position where the turning radius R1 becomes larger than the turning radius R2 (see FIG. 12) (14, 15) increases continuously. Additionally, between the centers of the hands 12 and 13 in the left and right directions passing the arm rotation center C4 in the left and right directions until the swing arm 17 stops rotating, the hands in the front and rear directions So that the positions of (12, 13) are kept constant, the arms (14, 15) are continuously reduced from a position where the turning radius R1 becomes larger than the turning radius R2 to a position where the turning radius R1 becomes equal to the turning radius R2.

After that, as shown in FIG. 13, at least one of the arm 14 and the arm 15 expands and contracts to load the substrate 2 into the chamber 7 or remove the substrate 2 from the chamber 7. take it out Additionally, after that, for example, when loading the substrate 2 into the chamber 6 or unloading the substrate 2 from the chamber 6, similarly, the arm is moved to the position where the rotation radius R1 and the rotation radius R2 become equal. With (14, 15) reduced, when viewed from the top and bottom, from the position where the intersection of center line CL1 and center line CL3 coincides with the support rotation center C1, swing arm ( 17) This meeting begins. Additionally, the swing arm 17 rotates to a position where the intersection of the center line CL1 and the center line CL2 coincides with the support rotation center C1.

At this time, the arms 14 and 15 extend and contract in the forward and backward directions so that the proximal ends of the hands 12 and 13 do not interfere with the inner wall surface of the chamber 4. Specifically, as described above, after the swing arm 17 starts to rotate until the centers of the hands 12 and 13 in the left and right directions reach the arm rotation center C4 in the left and right directions. , so that the positions of the hands 12, 13 in the front-back direction are kept constant, the arms 14, 15 are moved from a position where the turning radius R1 and the turning radius R2 are equal to a position where the turning radius R1 is larger than the turning radius R2. increases continuously. Additionally, between the centers of the hands 12 and 13 in the left and right directions passing the arm rotation center C4 in the left and right directions until the swing arm 17 stops rotating, the hands in the front and rear directions So that the positions of (12, 13) are kept constant, the arms (14, 15) are continuously reduced from a position where the turning radius R1 becomes larger than the turning radius R2 to a position where the turning radius R1 becomes equal to the turning radius R2.

In this way, in this form, the swing arm 17 rotates around the arm rotation center C4 with the distal ends of the hands 12 and 13 disposed inward and the proximal ends of the hands 12 and 13 disposed in the front. When rotating, the arms 14 and 15 first contract after the swing arm 17 starts to rotate, and then expand. In addition, when the swing arm 17 rotates around the arm rotation center C4 in a state where the distal end sides of the hands 12 and 13 are disposed in front and the proximal end sides of the hands 12 and 13 are disposed inward, the arm (14, 15) first increases and then decreases after the swing arm 17 starts to rotate.

In addition, in this form, when viewed from the top and bottom, the intersection of center line CL1 and center line CL2 and the support rotation center C1 coincide, or the intersection of center line CL1 and center line CL3 coincide with the support rotation center C1. From there, the swing arm 17 starts to rotate. That is, in this form, when viewed from the vertical direction, the intersection point of the virtual circle, which is the trajectory of the support rotation center C1 when the swing arm 17 is rotated around the arm rotation center C4, and the center line CL1, and the support rotation center From the state where C1 coincides, the swing arm 17 starts to rotate with respect to the main body portion 18.

In addition, for example, after loading the substrate 2 into the chamber 9 or unloading the substrate 2 from the chamber 9, loading the substrate 2 into the chamber 7 or removing the substrate from the chamber 7 ( In the case of carrying out 2), the arm support portion 16 is rotated 180° clockwise with the arms 14 and 15 reduced to the position where the rotation radius R1 and the rotation radius R2 become equal. After that, as shown in FIG. 13, at least one of the arm 14 and the arm 15 expands and contracts to load the substrate 2 into the chamber 7 or remove the substrate 2 from the chamber 7. take it out

(main effect of this form)

As explained above, in this form, when viewed from the top and bottom, the position at which the intersection of center line CL1 and center line CL2 coincides with the support rotation center C1, and the intersection between center line CL1 and center line CL3 and the support rotation center C1 coincide with each other, This is a case where the swing arm 17 rotates around the arm rotation center C4, and the distal ends of the hands 12 and 13 are placed inward and the proximal ends of the hands 12 and 13 are placed in the front. When the swing arm 17 rotates in this state, the distal ends of the hands 12 and 13, including the substrate 2, do not interfere with the inner wall surface of the chamber 4. ) When the swing arm 17 rotates with the distal ends of the hands 12 and 13 positioned in front and the proximal ends of the hands 12 and 13 positioned inward, the proximal ends of the hands 12 and 13 are positioned in the chamber 4. The arms 14 and 15 extend and contract in the forward and backward directions so as not to interfere with the inner wall surface of the arm.

Therefore, in this form, even if the length of the hands 12 and 13 is long and the chamber 4 is miniaturized in the front-back direction, the front-back direction, which is the short direction of the chamber 4, and the hands 12, 13 Even if the swing arm 17 is rotated with the longitudinal directions of the It becomes possible to prevent interference with the inner wall surface. Therefore, in this form, even if the length of the hands 12 and 13 is long and the chamber 4 is miniaturized in the front-back direction, the hands 12 and 13 can swing with the longitudinal direction and the front-back direction aligned. By rotating the arm 17, it becomes possible to transport the substrate 2 between the chamber 8 and the chamber 9 or between the chamber 6 and the chamber 7 in a short time. As a result, in this form, even if the length of the hands 12 and 13 is long, it is possible to reduce the size of the chamber 4 in the front-back direction and shorten the tact time in the manufacturing system 3.

In this form, when viewed from the top and bottom, the intersection of center line CL1 and center line CL2 and the support rotation center C1 coincide, or the intersection of center line CL1 and center line CL3 coincide with the support rotation center C1, The arm support portion 16 is rotating around the support rotation center C1, and at this time, the arms 14 and 15 are shortened to a position where the rotation radius R1 and the rotation radius R2 are equal. In addition, in this form, when the swing arm 17 starts to rotate, the support rotation center C1 is disposed on the center line CL1 of the chamber 4 in the front-back direction when viewed from the vertical direction, and the arms 14 and 15 ) is reduced to the position where the turning radius R1 and the turning radius R2 become equal. Therefore, in this form, it becomes possible to further miniaturize the chamber 4 in the front-back direction.

In this form, the arms 14 and 15 continuously extend and contract so that the positions of the hands 12 and 13 in the front-back direction remain constant when the swing arm 17 rotates. Therefore, in this form, it is possible to stabilize the state of the substrate 2 mounted on the hands 12 and 13 when the swing arm 17 is rotating.

(Other Embodiments)

Although the above-described form is an example of a suitable form of the present invention, it is not limited to this, and various modifications and implementations are possible without changing the gist of the present invention.

In the form described above, the arm rotation center C4 is located at the center of the chamber 4 in the left-right direction. However, the arm rotation center C4 may be located at a position shifted from the center of the chamber 4 in the left-right direction. In addition, in the above-described form, the arm rotation center C4 is disposed ahead of the center of the chamber 4 in the front-back direction, but the arm rotation center C4 is at a position coincident with the center of the chamber 4 in the front-back direction. It may be arranged in or may be arranged inside the center of the chamber 4 in the front-back direction. In addition, in the form described above, when viewed from the vertical direction, the distance between the arm rotation center C4 and the support rotation center C1 is longer than the distance L5 between the center of the chamber 4 and the arm rotation center C4 in the front-back direction. The distance between the arm rotation center C4 and the support rotation center C1 may be equal to the distance L5 or may be shorter than the distance L5.

In the above-described form, the arms 14 and 15 are continuously positioned so that the positions of the hands 12 and 13 in the front-back direction are kept constant when the swing arm 17 rotates with respect to the main body 18. A stretching motion is being performed. In addition, for example, when the swing arm 17 is rotated, the arms 14 and 15 are positioned at the distal ends of the hands 12 and 13 including the substrate 2 or at the proximal ends of the hands 12 and 13. The stretching operation may be performed intermittently so as not to interfere with the inner wall surface of the chamber 4. In addition, the arms 14, 15, immediately after the start of rotation of the swing arm 17, the distal end side of the hand 12, 13 containing the substrate 2 or the proximal end side of the hand 12, 13 is in the chamber 4. ) and may be reduced (or extended) to a position that does not interfere with the inner wall surface of the inside, and may be extended (or reduced) to the original position just before the rotation of the swing arm 17 is completed. In addition, the arms 14 and 15, at a predetermined timing after the start of rotation of the swing arm 17, are positioned at the distal ends of the hands 12 and 13 including the substrate 2 or at the proximal ends of the hands 12 and 13. It may be reduced (or extended) to a position that does not interfere with the inner wall surface of the chamber 4, and may be extended (or reduced) to its original position at a predetermined timing before the rotation of the swing arm 17 is completed. .

In the form described above, the arms 14 and 15 are shortened to a position where the rotation radius R1 and the rotation radius R2 become equal when the swing arm 17 starts to rotate. In addition, for example, when the width of the chamber 4 in the front-back direction is relatively wide, the arms 14, 15 have a rotation radius R2 at the start of rotation of the swing arm 17. It may be reduced to a position where it becomes larger than R1, or it may be reduced to a position where the turning radius R1 becomes larger than the turning radius R2. Also in this case, the arms 14 and 15 extend and contract when the swing arm 17 rotates.

In the form described above, the chamber 4 is formed to have a substantially rectangular shape when viewed from the top and bottom, with the left and right directions being the longitudinal direction. In addition, for example, the chamber 4 may be formed to have a substantially rectangular shape with the front-to-back direction as the longitudinal direction when viewed from the vertical direction, or may be formed to have a substantially square shape when viewed from the vertical direction. It's okay. In addition, in the above-described form, the distance L1 between the front inner wall surface of the chamber 4 and the center line CL1, the distance L2 between the left inner wall surface of the chamber 4 and the center line CL2, and the inner wall surface on the right side of the chamber 4 Although the distance L3 between the wall surface and the center line CL3 is equal, the distance L1 and the distance L2 may be different, the distance L1 and the distance L3 may be different, or the distance L2 and the distance L3 may be different. In addition, in the form described above, the manufacturing system 3 is provided with five chambers (process chambers) 5 to 9, but the number of process chambers provided by the manufacturing system 3 may be four or less. , there may be 6 or more.

In the above-described form, the arms 14 and 15 are composed of two arm parts, the first arm part 22 and the second arm part 23, but the arms 14 and 15 are composed of three or more arm parts. It may be composed of an arm portion. In addition, in the above-described form, the object to be transported by the robot 1 is the substrate 2 for an organic EL display, but the object to be transported by the robot 1 may be a glass substrate for a liquid crystal display, or a semiconductor wafer. etc. may also be used.

1: Robot (industrial robot)
2: Substrate (glass substrate, conveyed object)
3: Manufacturing system
4: Chamber (transfer chamber)
12, 13: Hand
14, 15: Arm
16: arm support
17: swing arm
18: main body
22: First arm portion (arm portion)
23: Second arm portion (arm portion)
C1: Center of rotation of support
C4: Center of arm rotation
CA: Wonho
CL1: Center line of the transfer chamber in the first direction
L5: Distance between the center of the transfer chamber and the arm rotation center in the first direction
R1: Rotation radius about the rotation center of the support portion on the distal end of the hand
R2: Rotation radius about the rotation center of the support portion on the proximal end side of the hand
X: first direction
X1: Fourth direction side
X2: Third direction side
Y: second direction

Claims (6)

Two hands on which the conveyed object is mounted, two arms each of which is rotatably connected to the distal end with the up-down direction as the axis of rotation, and two arms with the up-down direction as the axis of rotation. an arm support portion to which the proximal end of the arm is rotatably connected, a swing arm to which the arm support portion is rotatably connected to a distal end with an upward and downward direction as the axis of rotation, and An industrial robot having a main body to which the proximal end of the swing arm is rotatably connected,
Provided with a transfer chamber having a rectangular shape when viewed from the top and bottom,
Proximal end sides of the two arms are connected to the arm support portion while adjacent to each other,
The arm is a multi-joint arm having at least two arm parts connected to each other so as to be rotatable relative to each other, and the tip of the hand is extended to be spaced apart from the arm support portion and the tip of the hand is reduced to be close to the arm support portion. It is possible to expand and contract between positions,
Inside the transfer chamber, the hand, the arm, the arm support, and the swing arm are disposed,
When viewed from the top and bottom, a direction parallel to the short side of the transfer chamber forming a rectangular shape is referred to as a first direction, and a direction parallel to the long side of the transfer chamber orthogonal to the first direction is referred to as a second direction. , if one side of the first direction is referred to as the third direction side, and the side opposite to the third direction side is referred to as the fourth direction side,
The swing arm is operated in a state where the distal end of the hand is disposed on the third direction side and the proximal end side of the hand is disposed on the fourth direction side, or, the distal end side of the hand is disposed on the fourth direction side. is disposed and rotates with respect to the main body portion in a state in which the proximal end side of the hand is disposed on the third direction side,
The arm is continuously expanded and contracted in the first direction so that the position of the hand in the first direction is kept constant when the swing arm rotates with respect to the main body. system. According to paragraph 1,
The rotation center of the swing arm relative to the main body is referred to as the arm rotation center,
The rotation center of the arm support with respect to the swing arm is referred to as the support rotation center, and the trajectory of the support rotation center when viewed from the up and down directions when the swing arm is rotated around the arm rotation center is a virtual circle. If so,
The swing arm rotates with respect to the main body portion so that the center line of the transfer chamber intersects the virtual circle in the first direction when viewed from the top and bottom direction, and the swing arm rotates in the first direction when viewed from the top and bottom direction. Initiating rotation of the main body from a state where the intersection of the center line of the transfer chamber and the virtual circle coincides with the center of rotation of the support,
At the start of rotation of the swing arm, the arm is configured to have a rotation radius with respect to the rotation center of the support portion on the distal end side of the hand including the conveying object in a state in which the conveyed object is mounted on the hand and the proximal end side of the hand. A manufacturing system, characterized in that the rotation radius with respect to the rotation center of the support portion is reduced to a position where it becomes equal. According to paragraph 2,
The arm rotation center is disposed closer to the fourth direction than the center of the transfer chamber in the first direction,
When viewed from the vertical direction, the distance between the center of rotation of the support portion and the center of rotation of the arm is longer than the distance between the center of the transfer chamber and the center of rotation of the arm in the first direction,
The swing arm is an arc that forms part of the virtual circle when viewed from the top and bottom, and is a range in which the center of rotation of the support passes over the arc on a side of the third direction rather than the center of the transfer chamber in the first direction. Meeting with respect to the main body,
When the swing arm rotates with respect to the main body in a state where the distal end of the hand is disposed on the third direction side and the proximal end side of the hand is disposed on the fourth direction side, the arm is the swing arm. After the meeting began, it first decreased, then increased,
When the swing arm rotates with respect to the main body in a state where the distal end of the hand is disposed on the fourth direction side and the proximal end side of the hand is disposed on the third direction side, the arm is the swing arm. A manufacturing system characterized by first increasing and then decreasing after the start of the meeting. delete delete delete

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