KR20240118680A - Robot system and method for controlling industrial robot - Google Patents

Abstract

Even if the horizontal distance between the rotation center of the first distal arm and the rotation center of the first hand is shorter than the horizontal distance between the rotation center of the common arm and the rotation center of the first distal arm, the first hand A robot system capable of preventing interference between each device of the robot system and the object mounted on a first hand when transporting the object is provided.
In the robot system 1, the first delivery position, which is the position of the first hand 6 when delivering the conveyed object 2 to the receiving unit 3, and the first reference position 6B When the hand 6 moves, the first hand 6 is arranged at the first reference position 6B so that the trajectory of the first hand center C1 swings to both sides in the Y direction with respect to the system reference line CL3 when viewed from the up and down directions. When the first hand reference line CL1 is tilted with respect to the system reference line CL3, the common arm driving mechanism and the first distal arm driving mechanism are driven.

Description

Robot system and control method of industrial robot {ROBOT SYSTEM AND METHOD FOR CONTROLLING INDUSTRIAL ROBOT}

The present invention relates to a robot system including a receiving portion in which an object to be transported is accommodated, and an industrial robot to transport the object to be transported. Additionally, the present invention relates to a control method of an industrial robot that transfers the object to be transported to a receiving unit in which the object to be transported is accommodated.

Conventionally, industrial robots that transport glass substrates for liquid crystal displays are known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 includes a first hand and a second hand on which a glass substrate is mounted, an arm to which the first hand and the second hand are rotatably connected to the distal end, and the proximal end of the arm to be rotatable. It is provided with a connected main body and an arm drive mechanism that expands and contracts the arm in a horizontal direction with respect to the main body. The arm includes a first distal arm portion to which the first hand is rotatably connected to the distal end side, a second distal arm portion to which the second hand is rotatably connected to the distal end side, a proximal end side of the first distal arm portion, and It is composed of a common arm portion rotatably connected to the main body along with the proximal end side of the second distal arm portion being rotatably connected.

In the industrial robot described in Patent Document 1, the common arm portion is formed in a substantially V shape. The central portion of the common arm portion, which is formed in a substantially V shape, is rotatably connected to the main body portion. The proximal end of the first distal arm is rotatably connected to one distal end of the common arm formed in a substantially V shape, and the proximal end of the second distal arm is rotatably connected to the distal end of the other common arm. It is connected. The arm driving mechanism includes a common arm driving mechanism that rotates the common arm with respect to the main body, and a first tip that rotates the first distal arm with respect to the common arm and rotates the first hand with respect to the first distal arm. It is provided with a side arm driving mechanism and a second distal arm driving mechanism that rotates the second distal arm with respect to the common arm and rotates the second hand with respect to the second distal arm.

In the industrial robot described in Patent Document 1, the rotation center of the common arm with respect to the main body is referred to as the first rotation center, the rotation center of the first distal arm with respect to the common arm is referred to as the second rotation center, and the rotation center of the common arm with respect to the common arm is referred to as the second rotation center. The rotation center of the second distal arm is referred to as the third rotation center, the rotation center of the first hand relative to the first distal arm is referred to as the fourth rotation center, and the rotation center of the second hand relative to the second distal arm is referred to as the fourth rotation center. is called the fifth rotation center, the horizontal distance between the first rotation center and the second rotation center is called the distance between the first centers, and the horizontal distance between the first rotation center and the third rotation center is called the second center distance. Let's say it is a distance, the horizontal distance between the second rotation center and the fourth rotation center is called the distance between the third centers, and the horizontal distance between the third rotation center and the fifth rotation center is called the fourth center-to-center distance, The distance between the first center, the distance between the second center, the distance between the third center, and the distance between the fourth center are equal.

The industrial robot described in Patent Document 1 extends and contracts the arm to transport a glass substrate to a receiving portion in which the glass substrate is accommodated, such as a glass substrate manufacturing device. In this industrial robot, when transporting a glass substrate to the receiving portion of the glass substrate by the first hand, the common arm driving mechanism and the first distal arm driving mechanism are in a state in which the second distal arm driving mechanism is stopped. runs. At this time, the common arm driving mechanism and the first distal arm driving mechanism are controlled so that the first hand moves linearly while facing a certain direction (i.e., with the first hand maintaining a constant posture).

In addition, the center of the glass substrate accommodated in the normal position of the accommodating part when viewed from the vertical direction is called the center of the accommodating part side substrate, and an imaginary line connecting the first rotation center when viewed from the up and down direction and the center of the accommodating part side substrate is the system reference line. In this case, the common arm drive mechanism and the first distal arm drive mechanism are controlled so that the center trajectory of the glass substrate mounted on the first hand overlaps the system reference line when viewed from the vertical direction. Specifically, the rotation angle of the common arm with respect to the main body portion and the rotation angle of the first hand with respect to the first distal arm portion become equal, and the rotation angle of the first distal arm portion with respect to the common arm portion is equal to the rotation angle of the first distal arm portion with respect to the main body portion. The common arm driving mechanism and the first distal arm driving mechanism are controlled so that the rotation angle of the common arm is doubled.

Similarly, in the industrial robot described in Patent Document 1, when transporting a glass substrate to the receiving portion of the glass substrate by the second hand, the common arm drive mechanism and the second arm drive mechanism are 2 The tip side arm driving mechanism is driven. At this time, the common arm driving mechanism and the second distal arm driving mechanism are controlled so that the second hand moves linearly while facing a certain direction.

Also, at this time, the common arm driving mechanism and the second distal arm driving mechanism are controlled so that the center trajectory of the glass substrate mounted on the second hand overlaps the system reference line when viewed from the vertical direction. Specifically, the rotation angle of the common arm with respect to the main body portion and the rotation angle of the second hand with respect to the second distal arm portion become equal, and the rotation angle of the second distal arm portion with respect to the common arm portion is equal to the rotation angle of the second distal arm portion with respect to the main body portion. The common arm driving mechanism and the second distal arm driving mechanism are controlled so that the rotation angle of the common arm is doubled.

Japanese Patent Publication No. 2021-13961

In the industrial robot described in Patent Document 1, as described above, the distance between the first centers, the distance between the second centers, the distance between the third centers, and the distance between the fourth centers are equal. In this industrial robot, in order to prevent interference between the first tip arm and the second tip arm, the first tip arm is disposed above the second tip arm. Therefore, in the case of this industrial robot, there is a risk that the industrial robot will become larger in the vertical direction. Additionally, in the case of this industrial robot, since the first distal arm is disposed above the second distal arm, a cylindrical rotation axis is disposed at the connection portion of the first distal arm and the common arm. There is a risk that the rigidity of the connection portion between the distal arm portion and the common arm portion may decrease.

Therefore, the present inventor made the third center-to-center distance and the fourth center-to-center distance shorter than the first center-to-center distance and the second center-to-center distance, so that the first distal end arm portion and the second distal end arm portion were the same in the vertical direction. We are considering placing it in that location. On the other hand, if the distance between the third centers is shorter than the distance between the first centers, the arm is stretched so that the center trace of the glass substrate mounted on the first hand overlaps the system reference line when viewed from the vertical direction, This makes it difficult to transport the glass substrate. Likewise, if the fourth center-to-center distance is shorter than the second center-to-center distance, the arm is stretched and retracted so that the center trace of the glass substrate mounted on the second hand overlaps the system baseline when viewed from the vertical direction, and the second hand It becomes difficult to transport the glass substrate.

In addition, the inventor of the present application provides a common arm drive mechanism and a first tip side so that when transporting a glass substrate by the first hand to the receiving portion of the glass substrate, the first hand moves in a state facing a certain direction as in the prior art. Controlling the arm driving mechanism was examined. However, assuming that the direction of the system baseline is the front-to-back direction, and the direction perpendicular to the up-down direction and the front-back direction is the left-right direction, when the first hand moves while facing a certain direction, when viewed from the up-down direction, the first hand Through examination by the present inventor, it was revealed that the center trajectory of the glass substrate mounted on the hand and the amount of deviation in the left and right directions with respect to the system reference line increase.

Additionally, when viewed from the vertical direction, if the center trajectory of the glass substrate mounted on the first hand and the amount of deviation in the left and right directions with respect to the system baseline become large, each device constituting the glass substrate manufacturing system, etc. The risk of substrate interference increases. Similarly, when the second hand moves in a certain direction, when viewed from the up and down directions, the center trajectory of the glass substrate mounted on the second hand and the amount of deviation in the left and right directions with respect to the system baseline increase, and the amount of deviation of the glass substrate increases. It has been revealed through examination by the present inventor that there is an increased risk of interference between each device constituting the manufacturing system and the glass substrate mounted on the second hand.

Therefore, the object of the present invention is to provide a robot system that includes a receiving portion in which the conveying object is accommodated and an industrial robot that transfers the conveying object to the accommodating portion, and the rotation center of the common arm with respect to the main body portion and the common arm The horizontal distance between the rotational center of the first distal arm with respect to the common arm and the rotational center of the first hand with respect to the first distal arm is shorter than the horizontal distance between the rotational center of the first distal arm with respect to the common arm. Also, the distance in the horizontal direction between the rotation center of the common arm with respect to the main body portion and the rotation center of the second distal end arm with respect to the common arm is greater than the rotation center of the second distal arm with respect to the common arm and the second distal end with respect to the common arm. Even if the horizontal distance of the rotation center of the second hand with respect to the arm is short, each device of the robot system, etc. is mounted on the first hand and the second hand when transporting the object with the first hand and the second hand. The goal is to provide a robot system that can prevent interference with objects being transported.

In addition, the object of the present invention is to provide a control method for an industrial robot used in a robot system while transporting the object to be transported to a receiving portion in which the object to be transported is accommodated. The rotation center of the common arm with respect to the main body and the common arm are The horizontal distance between the rotational center of the first distal arm with respect to the common arm and the rotational center of the first hand with respect to the first distal arm is shorter than the horizontal distance between the rotational center of the first distal arm with respect to the In addition, the horizontal distance between the rotation center of the common arm portion with respect to the main body portion and the rotation center of the second distal end arm portion with respect to the common arm portion is greater than the rotation center of the second distal arm portion with respect to the common arm portion and the second distal end portion. Even if the horizontal distance of the rotation center of the second hand with respect to the side arm is short, each device of the robot system, etc. when transporting the object to be transported by the first hand and the second hand The object is to provide a control method for an industrial robot that makes it possible to prevent interference with a mounted transport object.

In order to solve the above problem, the robot system of one aspect of the present invention is a horizontal robot system that performs at least one of carrying out the conveying object from the accommodating portion and loading the conveying object into the accommodating portion, and a receiving portion in which the conveying object is accommodated. Equipped with an articulated industrial robot, the industrial robot includes a first hand and a second hand on which the object to be transported is mounted, an arm on which the first hand and the second hand are rotatably connected to the distal end, and a base end of the arm. It is provided with a main body part whose sides are rotatably connected, an arm drive mechanism that expands and contracts the arm in a horizontal direction with respect to the main body part, and a control part that controls the industrial robot, and the arm has a first hand that can be rotated toward the distal end side. The first distal end arm is connected, the second distal arm is rotatably connected to the distal end, and the proximal end of the first distal arm and the proximal end of the second distal arm are at different positions. It is provided with a common arm portion that is rotatably connected and rotatably connected to the main body portion, the arm drive mechanism comprising: a common arm portion drive mechanism that rotates the common arm portion relative to the main body portion with the vertical direction as the axis of rotation; A first distal arm drive mechanism that rotates the first distal arm with respect to the common arm in the direction of the axis of rotation and rotates the first hand with respect to the first distal arm, and an axis of rotation in the vertical direction. and a second distal arm drive mechanism that rotates the second distal arm with respect to the common arm and rotates the second hand with respect to the second distal arm in the same direction, and provides a first hand when viewed from the vertical direction. and the shape of the second hand is a long side shape with a predetermined direction as the longitudinal direction, the rotation center of the common arm with respect to the main body is referred to as the first rotation center, and the rotation of the first distal arm with respect to the common arm is The center is called the second rotation center, the rotation center of the second tip arm with respect to the common arm is called the third rotation center, and the rotation center of the first hand with respect to the first tip arm is called the fourth rotation center, The rotation center of the second hand with respect to the second distal arm is referred to as the fifth rotation center, the distance in the horizontal direction between the first rotation center and the second rotation center is referred to as the distance between the first centers, and the first rotation center and the second rotation center are referred to as the distance between the first centers. The horizontal distance between the third rotation centers is called the distance between the second centers, the horizontal distance between the second and fourth rotation centers is called the third center-to-center distance, and the distance between the third and fifth rotation centers is called the distance between the third centers. The distance in the horizontal direction is called the fourth center-to-center distance, the short direction of the first hand perpendicular to the long direction of the first hand when viewed from the up and down directions is called the first short direction, and the short direction of the second hand when viewed from the up and down directions is called the first short direction. The short direction of the second hand perpendicular to the long direction is called the second short direction, the center line of the first short direction of the first hand when viewed from the up and down direction is called the first hand reference line, and the center line of the first short direction when viewed from the up and down direction is called the first hand reference line. The center line of the second short direction of the two hands is called the second hand reference line, the rotational speed of the common arm with respect to the main body is called the common arm rotational speed, and the rotational speed of the first tip side arm with respect to the common arm is called the first tip. Let it be called the side arm rotational speed, and the rotational speed of the second distal arm with respect to the common arm is called the second distal arm rotational speed, and be the center of the conveyed object mounted at the normal position of the first hand when viewed from the vertical direction. is called the first hand center, the center of the conveyed object placed at the normal position of the second hand when viewed from the vertical direction is called the second hand center, and the center of the transported object placed at the normal position of the receiving part is called the vertical direction. The center when viewed is called the center of the receiver, the imaginary line connecting the first rotation center and the center of the receiver when viewed from the up and down directions is called the system baseline, and the direction of the system baseline is called the front-to-back direction. The direction perpendicular to the direction is referred to as the left and right direction, the position of the first hand when delivering the object to be conveyed to the receiving section with the first arm side spread is referred to as the first delivery position, and the second distal end side is referred to as the left and right direction. The position of the second hand when delivering the object to be transported to the receiving unit with the arm side unfolded is called the second delivery position, and the arm is moved to a predetermined state so that the first hand and the second hand approach the main body. If the position of the first hand when it is shriveled is called the first reference position, and the position of the second hand when the first hand is placed at the first reference position is called the second reference position, then the distance between the first centers is The distance between the second centers is equal, the distance between the third centers is shorter than the distance between the first centers, the distance between the fourth centers is shorter than the distance between the second centers, and the first delivery position and the first When the first hand moves between the reference positions, the ratio of the common arm rotation speed and the first distal arm rotation speed is constant, and when the second hand moves between the second transmission position and the second reference position, The ratio of the common arm rotation speed and the second distal arm rotation speed is constant, and when the first hand is placed at the first delivery position, the system reference line and the first hand reference line overlap when viewed from the vertical direction, When the second hand is placed at the second delivery position, when viewed from the up and down direction, the system reference line and the second hand reference line overlap, and the control unit moves up and down when the first hand moves between the first delivery position and the first reference position. Viewed from the direction, the first hand reference line is tilted with respect to the system reference line when the first hand is placed at the first reference position so that the trajectory of the center of the first hand swings in both left and right directions with respect to the system reference line, and a common When the arm drive mechanism and the first distal arm drive mechanism are driven, and the second hand moves between the second delivery position and the second reference position, when viewed from the vertical direction, the trajectory of the center of the second hand is aligned with the system reference line. When the second hand is disposed at the second reference position, the second hand reference line is tilted with respect to the system reference line so as to swing in both left and right directions, and the common arm drive mechanism and the second distal arm drive mechanism are driven. It is characterized by

In the robot system of this form, when the first hand moves between the first delivery position and the first reference position, the control unit causes the trajectory of the center of the first hand to swing in both left and right directions with respect to the system baseline when viewed from the up and down directions. Thus, when the first hand is disposed at the first reference position, the first hand reference line is tilted with respect to the system reference line, and the common arm driving mechanism and the first distal arm driving mechanism are driven. Therefore, according to the present inventor's examination, in this form, even if the distance between the third centers is shorter than the distance between the first centers, when viewed from the vertical direction, the first hand is between the first delivery position and the first reference position. It is possible to reduce the amount of deviation in the left and right directions with respect to the trajectory of the center of the first hand and the system baseline when moving. Therefore, in this form, even if the distance between the third centers is shorter than the distance between the first centers, there is interference between each device of the robot system and the object to be transported on the first hand when the object to be transported is transported by the first hand. It becomes possible to prevent.

Additionally, in this aspect, the control unit causes the trajectory of the center of the second hand to swing to both sides in the left and right directions with respect to the system reference line when viewed from the up and down directions when the second hand moves between the second delivery position and the second reference position. , when the second hand is disposed at the second reference position, the second hand reference line is tilted with respect to the system reference line, and the common arm drive mechanism and the second distal arm drive mechanism are driven. Therefore, according to the present inventor's examination, in this form, even if the fourth center-to-center distance is shorter than the second center-to-center distance, when viewed from the vertical direction, the second hand is between the second delivery position and the second reference position. It is possible to reduce the amount of deviation in the left and right directions with respect to the trajectory of the center of the second hand and the system baseline when moving. Therefore, in this embodiment, even if the fourth center-to-center distance is shorter than the second center-to-center distance, interference between each device of the robot system and the conveyed object mounted on the second hand when the conveyed object is transported by the second hand. It becomes possible to prevent.

In this aspect, for example, the first tip side arm portion and the second tip side arm portion are arranged at the same position in the vertical direction. Additionally, in this embodiment, for example, the external shape of the common arm portion when viewed from the vertical direction is in the shape of an isosceles triangle.

In addition, in order to solve the above problem, the industrial robot control method of one aspect of the present invention includes a first hand and a second hand on which the transport object is mounted, and the first hand and the second hand can be rotated toward the front end side. It is provided with a connected arm, a main body portion to which the proximal end of the arm is rotatably connected, and an arm drive mechanism that expands and contracts the arm in a horizontal direction with respect to the main body portion, and carries out the conveyed object from a receiving portion in which the conveyed object is accommodated. A horizontal multi-joint type industrial robot that performs at least one of the following: and loading an object to be transported into a receiving unit, wherein the arm includes a first arm on the distal end of which the first hand is rotatably connected to the distal end, and a second hand on the distal end. The second distal arm portion rotatably connected to the side, the proximal end side of the first distal arm portion, and the proximal end side of the second distal arm portion are rotatably connected to the main body at different positions. It has a common arm, and the arm drive mechanism includes a common arm drive mechanism that rotates the common arm with respect to the main body with the vertical direction as the axis of rotation, and a first arm with respect to the common arm with the vertical direction as the axis of rotation. A first distal arm driving mechanism that rotates the distal arm and rotates the first hand relative to the first distal arm, and rotates the second distal arm with respect to the common arm with the vertical direction as the axis of rotation. and a second arm drive mechanism that rotates the second hand relative to the second arm, and the shapes of the first hand and the second hand when viewed from the top and bottom have a predetermined longitudinal direction. It has a long side shape, and the rotation center of the common arm with respect to the main body portion is referred to as the first rotation center, the rotation center of the first distal arm portion with respect to the common arm portion is referred to as the second rotation center, and the rotation center with respect to the common arm portion is referred to as the second rotation center. 2 The rotation center of the distal arm is referred to as the third rotation center, the rotation center of the first hand relative to the first distal arm is referred to as the fourth rotation center, and the rotation center of the second hand relative to the second distal arm is referred to as the fourth rotation center. It is called the fifth rotation center, the horizontal distance between the first rotation center and the second rotation center is called the first center-to-center distance, and the horizontal distance between the first rotation center and the third rotation center is the second center-to-center distance. Let's say, the horizontal distance between the second rotation center and the fourth rotation center is called the third center-to-center distance, the horizontal distance between the third rotation center and the fifth rotation center is called the fourth center-to-center distance, and the top and bottom The short direction of the first hand, which is perpendicular to the long direction of the first hand when viewed from the direction, is called the first short direction, and the short direction of the second hand, which is perpendicular to the long direction of the second hand when viewed from the top and bottom direction, is called the second short direction. It is called the short direction, and the center line of the first short direction of the first hand when viewed from the up and down direction is called the first hand reference line, and the center line of the second short direction of the second hand when viewed from the up and down direction is called the second hand reference line. Let's say, the rotation speed of the common arm with respect to the main body is called the common arm rotation speed, the rotation speed of the first tip side arm with respect to the common arm is called the first tip side arm rotation speed, and the second tip with respect to the common arm is called the rotation speed. Let the rotational speed of the side arm be the rotational speed of the second distal arm, let the center of the conveyed object mounted at the normal position of the first hand be the center of the first hand when viewed from the vertical direction, and let the normal position of the second hand be the center of the first hand. The center of the conveyed object placed in the position when viewed from the vertical direction is called the second hand center, and the center of the conveyed object accommodated in the normal position of the receiving portion when viewed from the vertical direction is called the receiving portion center, and The virtual line connecting the first center of rotation and the center of the receiver when viewed is called the system baseline, the direction of the system baseline is called the front-to-back direction, the direction perpendicular to the up-down direction and the front-back direction is called the left-right direction, and the first tip is called the left-right direction. The position of the first hand when delivering the conveyed object to the receiving unit with the side arm side unfolded is referred to as the first delivery position, and the conveyed object is delivered to the receiving unit with the second distal arm side unfolded. The position of the second hand when performing is called the second delivery position, and the position of the first hand when the arm is retracted to a predetermined state so that the first hand and the second hand approach the main body is called the first reference position. If the position of the second hand when the first hand is placed at the first reference position is called the second reference position, the distance between the first centers and the distance between the second centers are equal, and the distance between the second centers is equal, and the distance between the first centers is equal to the third center. The distance between centers is shorter than the distance between first centers, and the distance between fourth centers is shorter than the distance between second centers, and when the first hand moves between the first delivery position and the first reference position, the common arm rotates. The ratio of the speed and the first arm rotation speed is constant, and when the second hand moves between the second delivery position and the second reference position, the ratio of the common arm rotation speed and the second tip arm rotation speed is constant. is constant, and when the first hand is placed at the first delivery position, when viewed from the vertical direction, the system baseline and the first hand baseline overlap, and when the second hand is placed at the second delivery position, This is a control method of an industrial robot in which a system reference line and a second hand reference line overlap when viewed from the up and down direction, and when the first hand moves between the first delivery position and the first reference position, when viewed from the up and down direction, the center of the first hand The common arm driving mechanism and the first distal arm portion tilt the first hand reference line with respect to the system reference line when the first hand is disposed at the first reference position so that the trajectory swings in both left and right directions with respect to the system reference line. When driving the drive mechanism and moving the second hand between the second delivery position and the second reference position, when viewed from the up and down directions, the trajectory of the center of the second hand swings to both sides in the left and right directions with respect to the system reference line, When the second hand is disposed at the second reference position, the second hand reference line is tilted with respect to the system reference line and the common arm driving mechanism and the second distal arm driving mechanism are driven.

In the industrial robot control method of this aspect, when the first hand moves between the first delivery position and the first reference position, the trajectory of the center of the first hand swings to both sides in the left and right directions with respect to the system baseline when viewed from the up and down directions. , when the first hand is disposed at the first reference position, the first hand reference line is tilted with respect to the system reference line, and the common arm driving mechanism and the first distal arm driving mechanism are driven. Therefore, according to the present inventor's examination, in this embodiment, even if the distance between the third centers is shorter than the distance between the first centers, when viewed from the vertical direction, the first hand is between the first delivery position and the first reference position. It is possible to reduce the amount of deviation in the left and right directions of the trajectory centered on the first hand when moving with respect to the system baseline. Therefore, in this embodiment, even if the third center-to-center distance is shorter than the first center-to-center distance, interference between each device of the robot system and the conveyed object mounted on the first hand when the conveyed object is transported by the first hand. It becomes possible to prevent.

Additionally, in this embodiment, when the second hand moves between the second delivery position and the second reference position, the trajectory of the center of the second hand swings to both sides in the left and right directions with respect to the system baseline when viewed from the up and down directions. When the hand is placed at the second reference position, the second hand reference line is tilted with respect to the system reference line, and the common arm drive mechanism and the second distal arm drive mechanism are driven. Therefore, according to the present inventor's examination, in this embodiment, even if the distance between the fourth centers is shorter than the distance between the second centers, when viewed from the vertical direction, the second hand is between the second delivery position and the second reference position. It is possible to reduce the amount of deviation in the left and right directions with respect to the trajectory of the center of the second hand and the system baseline when moving. Therefore, in this embodiment, even if the fourth center-to-center distance is shorter than the second center-to-center distance, interference between each device of the robot system and the conveyed object mounted on the second hand when the conveyed object is transported by the second hand. It becomes possible to prevent.

As described above, in the present invention, in the robot system including a receiving portion in which the conveying object is accommodated and an industrial robot that transfers the conveying object to the accommodating portion, the rotation center of the common arm with respect to the main body portion and the common arm portion The horizontal distance between the rotational center of the first distal arm with respect to the common arm and the rotational center of the first hand with respect to the first distal arm is shorter than the horizontal distance between the rotational center of the first distal arm with respect to the common arm. Also, the distance in the horizontal direction between the rotation center of the common arm with respect to the main body portion and the rotation center of the second distal end arm with respect to the common arm is greater than the rotation center of the second distal arm with respect to the common arm and the second distal end with respect to the common arm. Even if the horizontal distance of the rotation center of the second hand with respect to the arm is short, each device of the robot system, etc. is mounted on the first hand and the second hand when transporting the object with the first hand and the second hand. It becomes possible to prevent interference with objects being transported.

In addition, when an industrial robot is controlled by the control method of the present invention, the first tip with respect to the common arm is greater than the horizontal distance between the rotation center of the common arm with respect to the main body and the rotation center of the first tip side arm with respect to the common arm. The horizontal distance between the rotational center of the side arm and the rotational center of the first hand with respect to the first distal arm is shortened, and also, the rotational center of the common arm with respect to the main body and the second distal arm with respect to the common arm are shortened. Even if the horizontal distance between the rotation center of the second distal arm with respect to the common arm and the rotation center of the second hand with respect to the second distal arm is shorter than the horizontal distance of the rotation center of the first hand, When transporting an object to be transported by the second hand, it is possible to prevent interference with each device of the robot system, etc., of the object to be transported, which is mounted on the first hand and the second hand.

1 is a plan view for explaining the configuration of a robot system according to an embodiment of the present invention.
FIG. 2 is a plan view for explaining the configuration of the robot system shown in FIG. 1.
FIG. 3 is a perspective view of the industrial robot shown in FIG. 1.
FIG. 4 is a perspective view of the industrial robot shown in FIG. 1.
FIG. 5 is a rear view of the industrial robot shown in FIG. 4.
FIG. 6 is a block diagram for explaining the configuration of the industrial robot shown in FIG. 3.
FIG. 7 is a diagram for explaining an example of the trajectory of the center of the first hand shown in FIG. 1 when it moves between the first delivery position and the first reference position.
FIG. 8 is a diagram for explaining a comparative example of the trajectory of the center of the first hand shown in FIG. 1 when it moves between the first delivery position and the first reference position.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention will be described with reference to the drawings.

(Configuration of the robot system)

1 and 2 are plan views for explaining the configuration of the robot system 1 according to an embodiment of the present invention. Figures 3 and 4 are perspective views of the industrial robot 4 shown in Figure 1. FIG. 5 is a rear view of the industrial robot 4 shown in FIG. 4. FIG. 6 is a block diagram for explaining the configuration of the industrial robot 4 shown in FIG. 3.

The robot system 1 of this form includes a receiving portion 3 in which a semiconductor wafer 2 (hereinafter referred to as “wafer 2”) as a transport object is accommodated, and a wafer 2 relative to the receiving portion 3. ) is a semiconductor manufacturing system equipped with a horizontal articulated industrial robot 4 (hereinafter referred to as “robot 4”) for transporting. The wafer 2 is formed in the shape of a thin disk. The accommodating portion 3 of this form is, for example, a FOUP in which a plurality of wafers 2 are accommodated at a constant pitch in the vertical direction (vertical direction). Therefore, in the following description, the accommodating portion 3 is referred to as “FOUP(3)”. The robot system 1, in addition to the FOUP 3 and the robot 4, is equipped with various processing devices for manufacturing semiconductors.

The robot 4 performs at least one of unloading the wafer 2 from the FOUP 3 and loading the wafer 2 into the FOUP 3 . The robot 4 includes hands 6 and 7 on which the wafer 2 is mounted, an arm 8 to which the hands 6 and 7 are rotatably connected to the distal end, and a proximal end of the arm 8. It is provided with a main body portion (9) that is rotatably connected. The robot 4 of this form is provided with four hands 6 arranged in an overlapping state in the vertical direction and four hands 7 arranged in an overlapping state in the vertical direction. The hand 6 of this embodiment is the first hand, and the hand 7 is the second hand.

In addition, the robot 4 includes a control unit 10 that controls the robot 4, an arm drive mechanism 11 that expands and contracts the arm 8 in the horizontal direction with respect to the main body 9, and a main body 9 ) is provided with a lifting mechanism (not shown) that raises and lowers the hands 6 and 7 and the arm 8 relative to ). The arm 8 includes a distal arm portion 13 to which the hand 6 is rotatably connected to the distal end, a distal arm portion 14 to which the hand 7 is rotatably connected to the distal end, and a distal end arm portion 14 to which the hand 7 is rotatably connected to the distal end. The proximal end side of the arm portion 13 and the proximal end side of the distal arm portion 14 are rotatably connected at different positions and are provided with a common arm portion 15 rotatably connected to the main body portion 9. The arm 8 of this form is composed of distal arm portions 13 and 14 and a common arm portion 15. The distal end arm 13 of this embodiment is the first distal arm, and the distal end arm 14 is the second distal arm.

The shape of the hands 6 and 7 when viewed from the vertical direction is a long side shape with a predetermined direction as the longitudinal direction. Specifically, the shape of the hands 6 and 7 when viewed from the vertical direction is Y-shaped, and the distal end portions of the hands 6 and 7 are bifurcated. The hand 6 and the hand 7 are formed in substantially the same shape. The wafer 2 is mounted on the tip side portion of the hands 6 and 7. The hands 6 and 7 are provided with positioning members for horizontally positioning the wafer 2 mounted on the hands 6 and 7. The four hands 6 are fixed to the hand fixing member 16 at regular intervals in the vertical direction. The proximal end of the hand 6 is fixed to the hand fixing member 16. The four hands 7 are fixed to the hand fixing member 17 at regular intervals in the vertical direction. The proximal end of the hand 7 is fixed to the hand fixing member 17 .

The hand fixing member 16 is rotatably connected to the distal end side of the distal end arm portion 13. That is, the four hands 6 are rotatably connected to the distal end of the distal end arm 13 via the hand fixing members 16. The hand fixing member 17 is rotatably connected to the distal end side of the distal end arm portion 14. That is, the four hands 7 are rotatably connected to the distal end of the distal end arm 14 via the hand fixing members 17. Each of the four hands 6 and the four hands 7 are alternately arranged in the up and down directions.

In the following description, as shown in FIGS. 1 and 2, the center of the wafer 2 mounted at the normal position (design position) of the hand 6 when viewed from the vertical direction is referred to as the first hand center C1. Let's say, the center of the wafer 2 mounted at the normal position (design position) of the hand 7 when viewed from the vertical direction is called the second hand center C2, and the normal position of the FOUP 3 (design position) Let us assume that the center of the wafer 2 accommodated in the upper position when viewed from the vertical direction is the FOUP center C3. The wafer 2 mounted at the normal position of the hand 6 is positioned in the horizontal direction by the positioning member of the hand 6, and the wafer 2 mounted at the normal position of the hand 7 is , is positioned in the horizontal direction by the positioning member of the hand 7. The FOUP center C3 of this form is the center of the receiving portion.

In addition, in the following description, the short direction of the hand 6 orthogonal to the long direction of the hand 6 when viewed from the vertical direction is referred to as the first short direction, and the first short direction of the hand 6 when viewed from the vertical direction is referred to as the first short direction. Let's call the center line in the short direction the first hand baseline CL1. In addition, the short direction of the hand 7 that is perpendicular to the long direction of the hand 7 when viewed from the vertical direction is referred to as the second short direction, and the center line of the second short direction of the hand 7 when viewed from the vertical direction is defined as the second short direction. Let's call the second hand baseline CL2. When viewed from the vertical direction, the first hand center C1 is on the first hand reference line CL1, and the second hand center C2 is on the second hand reference line CL2.

The tip arm portions 13 and 14 are disposed lower than the hands 6 and 7. The tip side arm portion 13 and the tip side arm portion 14 are arranged at the same position in the vertical direction. The common arm portion 15 is disposed lower than the distal end arm portions 13 and 14. Additionally, the common arm portion 15 is disposed above the main body portion 9. The main body portion 9 is formed in a cylindrical shape. The distal end arm portions 13 and 14 are elongated and substantially rectangular in shape when viewed from the vertical direction and are formed in the shape of a block with a thin vertical thickness. The vertical thickness of the distal arm portions 13 and 14 is constant. The tip side arm portions 13 and 14 are formed in a hollow shape. The tip side arm portion 13 and the tip side arm portion 14 are formed in the same shape.

The common arm portion 15 is formed in the shape of a block whose outer shape is an isosceles triangle when viewed from the top and bottom. That is, the external shape of the common arm portion 15 when viewed from the vertical direction is in the shape of an isosceles triangle. The vertical thickness of the common arm portion 15 is constant. The common arm portion 15 is formed in a hollow shape. The length of the base of the common arm portion 15 forming this equilateral triangle shape is longer than the outer diameter of the main body portion 9 forming a cylindrical shape. The proximal end of the distal arm 13 is rotatably connected to a corner of the common arm 15 forming an isosceles triangle, where one hypotenuse and the base intersect, and the proximal end of the distal arm 14 is isosceles. The common arm portion 15 forming a triangular shape is rotatably connected to a corner portion where the hypotenuse and base of the other side intersect. The central portion of the common arm portion 15 is rotatably connected to the main body portion 9.

The arm drive mechanism 11 includes a common arm drive mechanism 19 that rotates the common arm 15 relative to the main body 9 with the vertical direction as the axis of rotation, and a common arm drive mechanism 19 that rotates the common arm 15 with respect to the main body 9 with the vertical direction as the axis of rotation. A distal arm drive mechanism (20) that rotates the distal arm portion (13) relative to the common arm portion (15) and rotates the hand (6) relative to the distal arm portion (13), and an axial direction of rotation in the vertical direction. It is provided with a distal arm driving mechanism 21 that rotates the distal arm 14 with respect to the common arm 15 and rotates the hand 7 with respect to the distal arm 14. The arm drive mechanism 11 of this embodiment is comprised of a common arm drive mechanism 19 and a distal arm drive mechanism 20, 21. The distal arm driving mechanism 20 of this embodiment is a first distal arm driving mechanism, and the distal arm driving mechanism 21 is a second distal arm driving mechanism.

In the following description, as shown in FIGS. 1 and 5, the rotation center of the common arm 15 with respect to the main body 9 is referred to as the first rotation center C6, and the distal arm portion with respect to the common arm 15 is referred to as the first rotation center C6. Let the rotation center of (13) be the second rotation center C7, the rotation center of the distal arm 14 with respect to the common arm 15 be the third rotation center C8, and let the hand with respect to the distal arm 13 ( Let the rotation center of 6) be the fourth rotation center C9, the rotation center of the hand 7 with respect to the distal arm 14 be the fifth rotation center C10, and the first rotation center C6 and the second rotation center C7. Let the horizontal distance between the first centers be L1, the horizontal distance between the first rotation center C6 and the third rotation center C8 be the second center-to-center distance L2, and the second rotation center C7 and the fourth rotation center C8. Let the horizontal distance of C9 be the third center-to-center distance L3, and the horizontal distance between the third rotation center C8 and the fifth rotation center C10 be the fourth center-to-center distance L4.

In addition, in the following description, the virtual line connecting the first rotation center C6 and the FOUP center C3 when viewed from the top and bottom is referred to as the system baseline CL3, and the direction of the system baseline CL3 (X direction in Figs. 1 and 2) is referred to as Let's call it the front-back direction, and let's say the direction perpendicular to the up-down direction and the front-back direction (the Y direction in Figs. 1 and 2) is the left-right direction. The FOUP 3 and the main body 9 are arranged at a predetermined distance in the front-back direction. The FOUP 3 is formed with two side walls that are parallel in the left and right directions. The wafer 2 is accommodated between two side walls.

The third center-to-center distance L3 is shorter than the first center-to-center distance L1. The fourth center-to-center distance L4 is shorter than the second center-to-center distance L2. Additionally, the distance between the first centers L1 and the distance between the second centers L2 are equal, and the distance between the third centers L3 and the distance between the fourth centers L4 are equal. In the first short direction, the fourth rotation center C9 is shifted from the first hand reference line CL1. In the second short direction, the fifth rotation center C10 is shifted from the second hand reference line CL2. The distance between the fourth rotation center C9 and the first hand reference line CL1 in the first minor direction and the distance between the fifth rotation center C10 and the second hand reference line CL2 in the second minor direction are equal.

The common arm drive mechanism 19 includes a motor 24 and a power transmission mechanism that transmits the power of the motor 24 to the common arm 15. The power transmission mechanism consists of a reducer, pulley, and belt. The motor 24 and the power transmission mechanism are arranged inside the main body portion 9. The distal arm driving mechanism 20 includes a motor 25 and a power transmission mechanism that transmits the power of the motor 25 to the distal arm 13 and the hand 6. The power transmission mechanism consists of a reducer, pulley, and belt. The motor 25 and the power transmission mechanism are disposed inside the distal arm portion 13 and the common arm portion 15. The distal arm driving mechanism 21 includes a motor 26 and a power transmission mechanism that transmits the power of the motor 26 to the distal arm 14 and the hand 7. The power transmission mechanism consists of a reducer, pulley, and belt. The motor 26 and the power transmission mechanism are disposed inside the distal arm portion 14 and the common arm portion 15.

Motors 24 to 26 are servo motors. Each of the motors 24 to 26 is provided with a rotary encoder for detecting the respective rotation positions of the motors 24 to 26. The motors 24 to 26 and the rotary encoder are electrically connected to the control unit 10. The control unit 10 controls the motors 24 to 26 based on the detection results of the rotary encoder. Additionally, the control unit 10 drives one of the two motors 25 and 26 and the motor 24 when the arm 8 extends and retracts. That is, during the stretching operation of the arm 8, the control unit 10 drives the motor 25 and the motor 24 with the motor 26 stopped, or with the motor 25 stopped. The motor 26 and motor 24 are driven.

The position of the hand 6 when delivering the wafer 2 to the FOUP 3 with the tip arm 13 side unfolded is referred to as the first delivery position 6A (see FIG. 1), and the main body If the position of the hand 6 when the arm 8 is retracted to a predetermined state so that the hands 6 and 7 approach the portion 9 is referred to as the first reference position 6B (see FIGS. 2 and 4) ), when conveying the wafer 2 to the FOUP 3 by the hand 6, the hand 6 moves between the first transfer position 6A and the first reference position 6B. When the hand 6 is placed at the first delivery position 6A, the first hand center C1 and the FOUP center C3 coincide when viewed from the vertical direction.

In addition, the position of the hand 7 when delivering the wafer 2 to the FOUP 3 with the tip arm 14 side unfolded is referred to as the second delivery position 7A (see FIG. 3). , If the position of the hand 7 when the hand 6 is placed at the first reference position 6B is the second reference position 7B (see FIG. 4), the FOUP (3) is moved by the hand 7. When transporting the wafer 2, the hand 7 moves between the second transfer position 7A and the second reference position 7B. When the hand 7 is placed at the second delivery position 7A, the second hand center C2 and the FOUP center C3 coincide when viewed from the vertical direction.

In this form, in a state where the hand 6 is placed at the first reference position 6B and the hand 7 is placed at the second reference position 7B, the common arm drive mechanism 19 drives the main body. When the arm (8) and the hands (6, 7) rotate with respect to the part (9), the turning radius of the arm (8) and the hands (6, 7) around the first rotation center C6 is minimized. The cancer (8) shrinks to its location. That is, the position of the hand 6 when the arm 8 is retracted to the position where the turning radius of the arm 8 and the hands 6 and 7 around the first rotation center C6 is minimum is the first reference. This is the position 6B, and the position of the hand 7 is the second reference position 7B.

The rotational speed of the common arm 15 with respect to the main body 9 is referred to as the common arm rotational speed, and the rotational speed of the distal arm 13 with respect to the common arm 15 is referred to as the first distal arm rotational speed, If the rotational speed of the distal arm 14 with respect to the common arm 15 is the (second) distal arm rotational speed, the hand 6 is positioned between the first delivery position 6A and the first reference position 6B. When moving, the ratio of the rotational speed of the common arm portion and the rotational speed of the first distal arm portion is constant. Additionally, when the hand 7 moves between the second delivery position 7A and the second reference position 7B, the ratio of the common arm rotation speed and the second distal arm rotation speed is constant. For example, the rotational speed of the first distal arm and the rotational speed of the second distal arm are approximately 1.5 to 2.5 times the rotational speed of the common arm.

Additionally, when the hand 6 moves between the first delivery position 6A and the first reference position 6B, the common arm rotation speed and the first distal arm rotation speed are constant. Similarly, when the hand 7 moves between the second delivery position 7A and the second reference position 7B, the common arm rotation speed and the second distal arm rotation speed are constant. In this form, the common arm rotation speed when the hand 6 moves between the first delivery position 6A and the first reference position 6B, and the second delivery position 7A and the second reference position 7B The rotational speed of the common arm portion when the hand 7 moves between them is equalized.

As shown in Fig. 1, when the hand 6 is disposed at the first delivery position 6A, the system reference line CL3 and the first hand reference line CL1 overlap when viewed from the vertical direction. Similarly, when the hand 7 is placed at the second delivery position 7A, the system reference line CL3 and the second hand reference line CL2 overlap when viewed from the vertical direction. When the hand 6 is placed at the first reference position 6B and the hand 7 is placed at the second reference position 7B, when viewed from the vertical direction, the hand 6 and the hand 7 overlap. There is (see Figures 2 and 4).

Additionally, when the hand 6 is placed at the first reference position 6B and the hand 7 is placed at the second reference position 7B, when viewed from the vertical direction, the first hand reference line is relative to the system reference line CL3. CL1 is tilted (see Figure 2). Similarly, when the hand 6 is placed at the first reference position 6B and the hand 7 is placed at the second reference position 7B, when viewed from the vertical direction, the second hand reference line is relative to the system reference line CL3. CL2 is tilted. When the hand 6 is placed at the first reference position 6B and the hand 7 is placed at the second reference position 7B, when viewed from the vertical direction, the first hand reference line CL1 and the second hand reference line CL2 are overlapping.

(Control method of industrial robot)

FIG. 7 is a diagram for explaining an example of the trajectory of the first hand center C1 when the hand 6 shown in FIG. 1 moves between the first delivery position 6A and the first reference position 6B.

When the hand 6 moves between the first delivery position 6A and the first reference position 6B, the control unit 10 determines the trajectory of the first hand center C1 left and right with respect to the system baseline CL3 when viewed from the up and down directions. With the first hand reference line CL1 tilted with respect to the system reference line CL3 when the hand 6 is placed in the first reference position 6B so as to swing to both sides of the direction (i.e., the first hand reference line CL1 with respect to the front-back direction) By tilting (see FIG. 2), the common arm drive mechanism 19 and the distal arm drive mechanism 20 are driven. That is, when the hand 6 moves between the first delivery position 6A and the first reference position 6B, the control unit 10 controls the first hand center C1 to the left and right with respect to the system baseline CL3 when viewed from the up and down directions. When the hand 6 is placed at the first reference position 6B so as to move in both directions, the first hand reference line CL1 is tilted with respect to the system reference line CL3, and the motors 24 and 25 are driven and controlled.

For example, the control unit 10 controls the trajectory of the first hand center C1 when the hand 6 moves between the first delivery position 6A and the first reference position 6B to be curve CV1 in FIG. , when the hand 6 is disposed at the first reference position 6B, the first hand reference line CL1 is tilted with respect to the system reference line CL3, and the common arm drive mechanism 19 and the distal arm drive mechanism 20 are operated. It runs. In Fig. 7, the position of “0” on the vertical axis indicates the position of the system baseline CL3 in the left and right directions. In addition, if one point on the first hand reference line CL1 located at the same position as the fourth rotation center C9 in the longitudinal direction of the hand 6 is referred to as point P1 (see FIGS. 1 and 2), the curve CV2 in FIG. 7 is , This is the trajectory of the point P1 when viewed from the vertical direction when the hand 6 moves between the first delivery position 6A and the first reference position 6B.

In the example shown in FIG. 7, when the hand 6 is placed at the first reference position 6B when viewed from the vertical direction, the first hand center C1 located on one side of the system reference line CL3 in the left and right directions is the hand center C1. As (6) moves toward the first delivery position 6A, it moves further to one side in the left and right direction, and then moves to the other side in the left and right direction relative to the system baseline CL3. Additionally, when the hand 6 reaches the first delivery position 6A, the first hand center C1 is placed on the system baseline CL3. At this time, point P1 is also placed on the system baseline CL3.

Additionally, in the example shown in FIG. 7, when the hand 6 moves between the first delivery position 6A and the first reference position 6B, the left and right directions of the first hand center C1 with respect to the system baseline CL3 The amount of shake (displacement amount) A1 on one side and the amount of shake A2 on the other side in the left and right directions of the first hand center C1 with respect to the system reference line CL3 are almost equal. That is, in the example shown in FIG. 7, the control unit 10 sets the shaking amount A1 and shaking amount A2 when the hand 6 moves between the first delivery position 6A and the first reference position 6B to approximately To become equal, when the hand 6 is disposed at the first reference position 6B, the first hand reference line CL1 is tilted with respect to the system reference line CL3, and the common arm drive mechanism 19 and the distal arm drive mechanism ( 20).

Likewise, the control unit 10 determines that when the hand 7 moves between the second delivery position 7A and the second reference position 7B, the trajectory of the second hand center C2 is aligned with the system reference line CL3 when viewed from the vertical direction. The second hand reference line CL2 is tilted with respect to the system reference line CL3 when the hand 7 is disposed at the second reference position 7B so as to swing to both left and right directions, and the common arm drive mechanism 19 and the tip are The side arm driving mechanism 21 is driven.

For example, the control unit 10 determines that the trajectory of the second hand center C2 when the hand 7 moves between the second delivery position 7A and the second reference position 7B is the same as the curve CV1 in FIG. When the hand 7 is placed at the second reference position 7B so as to form a curve, the second hand reference line CL2 is tilted with respect to the system reference line CL3, and the common arm drive mechanism 19 and the distal arm drive mechanism ( 21). In addition, in this case, if one point on the second hand reference line CL2 disposed at the same position as the fifth rotation center C10 in the longitudinal direction of the hand 7 is referred to as point P2 (see FIG. 2), the second delivery position ( When the hand 7 moves between the second reference position 7A) and the second reference position 7B, the trajectory of the point P2 when viewed from the vertical direction becomes the same curve as the curve CV2 in FIG. 7.

(main effect of this form)

As explained above, in this form, when the hand 6 moves between the first delivery position 6A and the first reference position 6B, the control unit 10 moves the first hand center C1 when viewed from the vertical direction. When the hand 6 is placed at the first reference position 6B, the first hand reference line CL1 is tilted with respect to the system reference line CL3 so that the trajectory swings to both left and right directions with respect to the system reference line CL3, and the common arm portion The drive mechanism 19 and the distal arm drive mechanism 20 are driven.

Therefore, according to the present inventor's examination, in this form, even if the third center-to-center distance L3 is shorter than the first center-to-center distance L1, when viewed from the vertical direction, the first delivery position 6A and the first reference position ( It is possible to reduce the trajectory of the first hand center C1 when the hand 6 moves between 6B) and the amount of shaking A1 and A2 in the left and right directions with respect to the system reference line CL3. Therefore, in this form, even if the third center-to-center distance L3 is shorter than the first center-to-center distance L1, the robot system 1 such as FOUP 3 when transporting the wafer 2 with the hand 6 It is possible to prevent interference between each device and the wafer 2 mounted on the hand 6.

Additionally, in this form, the control unit 10 controls the trajectory of the second hand center C2 when viewed from the vertical direction when the hand 7 moves between the second delivery position 7A and the second reference position 7B. When the hand 7 is disposed at the second reference position 7B so as to swing in both left and right directions with respect to the system reference line CL3, the second hand reference line CL2 is tilted with respect to the system reference line CL3, and the common arm drive mechanism ( 19) and the distal arm drive mechanism 21 are driven.

Therefore, according to the present inventor's examination, in this form, even if the fourth center-to-center distance L4 is shorter than the second center-to-center distance L2, when viewed from the vertical direction, the second delivery position 7A and the second reference position ( 7B) It is possible to reduce the amount of shaking in the left and right directions with respect to the trajectory of the second hand center C2 and the system reference line CL3 when the hand 7 moves between them. Therefore, in this form, even if the fourth center-to-center distance L4 is shorter than the second center-to-center distance L2, the robot system 1 such as FOUP 3 when transporting the wafer 2 with the hand 7 It is possible to prevent interference between each device and the wafer 2 mounted on the hand 7.

Incidentally, in the robot system 1, when the hand 6 moves between the first delivery position 6A and the first reference position 6B, the hand 6 moves while facing in a certain direction ( Specifically, when the hand 6 is placed at the first reference position 6B (so that the hand 6 moves with the long direction of the hand 6 and the front-back direction matching), it is placed on the system reference line CL3. 1 When the hand reference line CL1 is overlapped and the common arm drive mechanism 19 and the distal arm drive mechanism 20 are driven, for example, when viewed from the top and bottom direction, the first delivery position 6A and the first reference position The trajectory of the first hand center C1 when the hand 6 moves between (6B) becomes curve CV11 in FIG. 8.

As shown in Fig. 8, when viewed from the vertical direction, when the hand 6 moves between the first delivery position 6A and the first reference position 6B, the trajectory of the first hand center C1 is the system baseline CL3 Rather, it only sways in the left and right directions. The amount of shaking A11 in the left and right directions of the first hand center C1 relative to the system reference line CL3 is larger than the amount of shaking A1 and A2 described above. In addition, the curve CV12 in FIG. 8 is obtained from the vertical direction when the hand 6 moves between the first delivery position 6A and the first reference position 6B so that the trajectory of the first hand center C1 becomes curve CV11. This is the trajectory of point P1 as seen.

(Other Embodiments)

Although the above-described form is an example of a suitable form of the present invention, it is not limited to this and various modifications and implementations are possible without changing the gist of the present invention.

In the above-mentioned form, the amount of shaking A1 on one side in the left and right directions of the first hand center C1 with respect to the system reference line CL3 and the amount of play A2 on the other side in the left and right directions of the first hand center C1 with respect to the system reference line CL3 are almost equal. However, the amount of shaking A1 may be larger than the amount of shaking A2, or the amount of shaking A1 may be smaller than the amount of shaking A2. In addition, in the above-described form, the external shape of the common arm portion 15 when viewed from the vertical direction may be V-shaped, rectangular, or trapezoidal.

In the form described above, the number of hands 6 that the robot 4 has may be five or more, or one. Likewise, the number of hands 7 that the robot 4 has may be five or more, or one. Additionally, in the above-described form, the wafer 2 may be accommodated in a receiving portion other than the FOUP 3. For example, the wafer 2 may be accommodated in various processing devices for manufacturing semiconductors. Additionally, in the above-described form, the robot 4 may transport objects other than the wafer 2. For example, the robot 4 may transport a glass substrate for a liquid crystal display. The robot system 1 in this case is a liquid crystal display manufacturing system.

1: Robotic system
2: Wafer (semiconductor wafer, object to be transported)
3: FOUP (receptor)
4: Robot (industrial robot)
6: Hand (1st hand)
6A: first delivery position
6B: First reference position
7: Hand (2nd hand)
7A: Second delivery position
7B: Second reference position
8: cancer
9: main body
10: control unit
11: Arm driving mechanism
13: Distal arm portion (first distal arm portion)
14: Distal arm portion (second distal arm portion)
15: Common dark part
19: Common arm driving mechanism
20: Distal end arm driving mechanism (first distal arm driving mechanism)
21: Distal end arm driving mechanism (second distal arm driving mechanism)
C1: Center of first hand
C2: Center of the second hand
C3: FOUP center (receptor center)
C6: First rotation center
C7: Second Circular Center
C8: Third Circular Center
C9: Fourth Circular Center
C10: Fifth Assembly Center
CL1: 1st hand baseline
CL2: Second hand baseline
CL3: System Baseline
L1: Distance between first centers
L2: Distance between second centers
L3: Distance between third centers
L4: Distance between fourth centers
X: Front-to-back direction
Y: left and right direction

Claims (4)

It is provided with a horizontal articulated industrial robot that carries out at least one of carrying out the transport object from the accommodation unit and loading the transport object into the accommodation unit, and an accommodating part in which the transport object is stored,
The industrial robot includes a first hand and a second hand on which the transport object is mounted, an arm to which the first hand and the second hand are rotatably connected to a distal end, and a proximal end of the arm to be rotatable. It has a main body part connected to it, an arm driving mechanism that expands and contracts the arm in a horizontal direction with respect to the main body part, and a control part that controls the industrial robot,
The arm includes a first distal arm portion rotatably connected to the distal end of the first hand, a second distal arm portion rotatably connected to the distal end of the second hand, and a first distal arm portion. The proximal end side of and the proximal end side of the second distal arm portion are rotatably connected to each other at different positions, and a common arm portion is rotatably connected to the main body portion,
The arm driving mechanism includes a common arm driving mechanism that rotates the common arm with respect to the main body with the vertical direction as the axis of rotation, and a common arm driving mechanism that rotates the common arm with respect to the common arm with the vertical direction as the axis of rotation. a first distal arm driving mechanism that rotates the side arm and rotates the first hand relative to the first distal arm, and an upward and downward direction is the axis of rotation, and the second distal arm is positioned relative to the common arm. a second distal arm driving mechanism that rotates the arm portion and rotates the second hand relative to the second distal arm portion;
The shapes of the first hand and the second hand when viewed from the top and bottom have a long side shape with a predetermined direction as the longitudinal direction,
The rotation center of the common arm with respect to the main body portion is referred to as a first rotation center, the rotation center of the first tip side arm portion with respect to the common arm portion is referred to as a second rotation center, and the second tip with respect to the common arm portion is referred to as a second rotation center. The rotation center of the side arm is referred to as a third rotation center, the rotation center of the first hand relative to the first distal arm portion is referred to as a fourth rotation center, and the rotation center of the second hand relative to the second distal arm portion is referred to as the fourth rotation center. The center is called the fifth rotation center, the horizontal distance between the first rotation center and the second rotation center is called the first center-to-center distance, and the horizontal distance between the first rotation center and the third rotation center is is called the second center-to-center distance, the horizontal distance between the second rotation center and the fourth rotation center is called the third center-to-center distance, and the horizontal distance between the third rotation center and the fifth rotation center is is called the fourth center-to-center distance, the short direction of the first hand perpendicular to the long direction of the first hand when viewed from the up and down directions is called the first short direction, and the long direction of the second hand when viewed from the up and down directions is called the first short direction. The short direction of the second hand perpendicular to the direction is called the second short direction, and the center line of the first short direction of the first hand when viewed from the up and down direction is called the first hand reference line, and the center line when viewed from the up and down direction is called the first hand reference line. The center line of the second short direction of the second hand is referred to as a second hand reference line, the rotational speed of the common arm with respect to the main body is referred to as a common arm rotational speed, and the rotational speed of the common arm with respect to the common arm is referred to as a second hand reference line. Let the rotational speed be the rotational speed of the first distal arm, let the rotational speed of the second distal arm with respect to the common arm be the second distal arm rotational speed, and let the rotational speed of the second distal arm be mounted at a regular position on the first hand. The center of the conveyed object when viewed from the vertical direction is called the first hand center, and the center of the conveyed object mounted at the normal position of the second hand when viewed from the vertical direction is called the second hand center, The center of the conveyed object accommodated in the normal position of the receiving unit when viewed from the vertical direction is referred to as the center of the receiving section, and an imaginary line connecting the first rotation center and the center of the receiving section when viewed from the vertical direction is the system reference line. The direction of the system reference line is called the front-back direction, the direction perpendicular to the up-down direction and the front-back direction is called the left-right direction, and the conveyed object is transferred to the receiving unit in a state in which the first arm side at the front end is spread. Let the position of the first hand when delivering is referred to as the first delivery position, and the position of the second hand when delivering the object to be conveyed to the receiving unit with the second distal end arm side unfolded is referred to as the first delivery position. It is called a second delivery position, and the position of the first hand when the arm is retracted to a predetermined state so that the first hand and the second hand approach the main body is called a first reference position, and the position of the first hand is called a first reference position. If the position of the second hand when the first hand is placed at the first reference position is referred to as the second reference position,
The distance between the first centers and the distance between the second centers are equal,
The distance between the third centers is shorter than the distance between the first centers,
The distance between the fourth centers is shorter than the distance between the second centers,
When the first hand moves between the first delivery position and the first reference position, the ratio of the common arm rotation speed and the first distal arm rotation speed is constant,
When the second hand moves between the second delivery position and the second reference position, the ratio of the common arm rotation speed and the second distal arm rotation speed is constant,
When the first hand is placed at the first delivery position, when viewed from the top and bottom, the system reference line and the first hand reference line overlap,
When the second hand is disposed at the second delivery position, the system reference line and the second hand reference line overlap when viewed from the upper and lower directions,
The control unit is configured to cause, when the first hand moves between the first delivery position and the first reference position, the trajectory of the center of the first hand to swing to both sides in the left and right directions with respect to the system reference line when viewed from the up and down directions. , when the first hand is disposed at the first reference position, tilting the first hand reference line with respect to the system reference line and driving the common arm driving mechanism and the first distal arm driving mechanism, and further , so that when the second hand moves between the second delivery position and the second reference position, the trajectory of the center of the second hand swings to both sides in the left and right directions with respect to the system reference line, when viewed from the up and down directions. A robot characterized in that, when two hands are disposed at the second reference position, the second hand reference line is tilted with respect to the system reference line and the common arm driving mechanism and the second distal arm driving mechanism are driven. system. The robot system according to claim 1, wherein the first distal arm portion and the second distal distal arm portion are disposed at the same position in the vertical direction. The robot system according to claim 1 or 2, wherein the external shape of the common arm portion is in the shape of an isosceles triangle when viewed from the vertical direction. A first hand and a second hand on which the conveyed object is mounted, an arm to which the first hand and the second hand are rotatably connected to a distal end, and a main body to which a proximal end of the arm is rotatably connected, An arm driving mechanism is provided for stretching and contracting the arm in a horizontal direction with respect to the main body portion, and at least one of unloading of the conveying object from a receiving portion in which the conveying object is accommodated and loading of the conveying object into the accommodating portion is provided. It is a horizontal multi-joint industrial robot that performs
The arm includes a first distal arm portion rotatably connected to the distal end of the first hand, a second distal arm portion rotatably connected to the distal end of the second hand, and a first distal arm portion. The proximal end side of and the proximal end side of the second distal arm portion are rotatably connected to each other at different positions, and a common arm portion is rotatably connected to the main body portion,
The arm driving mechanism includes a common arm driving mechanism that rotates the common arm with respect to the main body with the vertical direction as the axis of rotation, and a common arm driving mechanism that rotates the common arm with respect to the common arm with the vertical direction as the axis of rotation. a first distal arm driving mechanism that rotates the side arm and rotates the first hand relative to the first distal arm, and an upward and downward direction is the axis of rotation, and the second distal arm is positioned relative to the common arm. a second distal arm driving mechanism that rotates the arm portion and rotates the second hand relative to the second distal arm portion;
The shapes of the first hand and the second hand when viewed from the top and bottom include a long side shape with a predetermined direction as the longitudinal direction,
The rotation center of the common arm with respect to the main body portion is referred to as a first rotation center, the rotation center of the first tip side arm portion with respect to the common arm portion is referred to as a second rotation center, and the second tip with respect to the common arm portion is referred to as a second rotation center. The rotation center of the side arm is referred to as a third rotation center, the rotation center of the first hand relative to the first distal arm portion is referred to as a fourth rotation center, and the rotation center of the second hand relative to the second distal arm portion is referred to as the fourth rotation center. The center is called the fifth rotation center, the horizontal distance between the first rotation center and the second rotation center is called the first center-to-center distance, and the horizontal distance between the first rotation center and the third rotation center is is called the second center-to-center distance, the horizontal distance between the second rotation center and the fourth rotation center is called the third center-to-center distance, and the horizontal distance between the third rotation center and the fifth rotation center is is called the fourth center-to-center distance, the short direction of the first hand perpendicular to the long direction of the first hand when viewed from the up and down directions is called the first short direction, and the long direction of the second hand when viewed from the up and down directions is called the first short direction. The short direction of the second hand perpendicular to the direction is called the second short direction, and the center line of the first short direction of the first hand when viewed from the up and down direction is called the first hand reference line, and when viewed from the up and down direction, the center line of the first short direction of the first hand is called the first hand reference line. Let the center line of the second short direction of the second hand be a second hand reference line, the rotational speed of the common arm with respect to the main body portion be called a common arm rotational speed, and the first tip side with respect to the common arm. Let the rotation speed of the arm part be the first tip side arm rotation speed, and let the rotation speed of the second tip arm part with respect to the common arm part be the second tip side arm rotation speed, and be mounted at a normal position of the first hand. The center of the conveyed object viewed from the vertical direction is called the first hand center, and the center of the conveyed object mounted at the normal position of the second hand is called the second hand center, The center of the conveyed object accommodated in the normal position of the accommodating section when viewed from the vertical direction is called the center of the accommodating section, and an imaginary line connecting the first rotation center and the center of the accommodating section when viewed from the up and down direction is called the system. It is called a reference line, the direction of the system reference line is called the front-back direction, the direction perpendicular to the up-down direction and the front-back direction is called the left-right direction, and the conveying object relative to the receiving unit is called the left-right direction in a state where the first arm side at the front end is spread. The position of the first hand at the time of delivery is referred to as the first delivery position, and the position of the second hand at the time of delivery of the object to be conveyed to the receiving unit with the second arm side at the distal end unfolded. is referred to as a second delivery position, and the position of the first hand when the arm is retracted to a predetermined state so that the first hand and the second hand approach the main body is referred to as a first reference position, and If the position of the second hand when the first hand is placed at the first reference position is referred to as the second reference position,
The distance between the first centers and the distance between the second centers are equal,
The distance between the third centers is shorter than the distance between the first centers,
The distance between the fourth centers is shorter than the distance between the second centers,
When the first hand moves between the first delivery position and the first reference position, the ratio of the common arm rotation speed and the first distal arm rotation speed is constant,
When the second hand moves between the second delivery position and the second reference position, the ratio of the common arm rotation speed and the second distal arm rotation speed is constant,
When the first hand is placed at the first delivery position, when viewed from the top and bottom, the system reference line and the first hand reference line overlap,
A method of controlling an industrial robot in which the system reference line and the second hand reference line overlap when the second hand is disposed at the second delivery position when viewed from an upward and downward direction,
When the first hand moves between the first delivery position and the first reference position, when viewed from the up and down directions, the trajectory of the center of the first hand swings to both sides in the left and right directions with respect to the system baseline. When the hand is disposed at the first reference position, the first hand reference line is tilted with respect to the system reference line, and the common arm driving mechanism and the first distal arm driving mechanism are driven, and the second arm driving mechanism is driven. When the second hand moves between the delivery position and the second reference position, the trajectory of the center of the second hand swings to both sides in the left and right directions with respect to the system reference line when viewed from the up and down directions. A control method for an industrial robot, comprising: tilting the second hand reference line with respect to the system reference line when placed at a second reference position, and driving the common arm driving mechanism and the second distal arm driving mechanism. .

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