TWI641459B - Industrial robot - Google Patents

Abstract

An industrial robot having a common arm to which a base end side of two arms is rotatably coupled, and even after assembling an industrial robot, it is possible to easily tilt one of the arms with respect to a horizontal direction and The inclination of one arm with respect to the horizontal direction is individually adjusted. The industrial robot 1 includes: the hands 4 and 5; the arm 6 of the hand 4 connected to the distal end side; the arm 7 of the hand 5 connected to the distal end side; and the common arm of the proximal end side of the arms 6 and 7 rotatably coupled 8; and a body portion 9 to which the common arm 8 is rotatably coupled. The common arm 8 includes a base portion 20 coupled to the main body portion 9 , a first arm connecting portion 21 to which the base end side of the arm 6 is coupled, and a second arm connecting portion 22 to which the base end side of the arm 7 is coupled, and a base The first arm connecting portion 21 and the second arm connecting portion 22, which are formed as different bodies, are detachably fixed to the base portion 20.

Description

Industrial robot

The present invention relates to an industrial robot having a common arm to which a base end side of two arms is rotatably coupled.

An industrial robot that transports a semiconductor wafer has been known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 includes a first hand and a second hand, and a semiconductor wafer is mounted thereon. The first arm has a first hand and a second arm rotatably coupled to the distal end side. A second hand is rotatably coupled to the side, and a common arm is rotatably coupled to a proximal end side of the first arm and a proximal end side of the second arm, and a body portion rotatably coupled to the common arm. Further, the industrial robot includes: a first turning mechanism that rotates the first hand with respect to the first arm and rotates the first arm with respect to the common arm; and a second rotating mechanism that makes the second hand relatively The second arm rotates and rotates the second arm relative to the common arm.

The first rotating mechanism includes a solid rotating shaft that constitutes a part of the main body portion, a motor that rotates the solid rotating shaft, and a first pulley that is disposed inside the common arm and that is fixed to the upper end side of the solid rotating shaft; The shaft is fixed to the common arm; the second pulley is rotatably held by the first fixed shaft and disposed inside the common arm and fixed to the base end side of the first arm; and the belt is mounted on the first pulley and the first pulley 2 pulley; the third pulley is fixed to the upper end side of the first fixed shaft and disposed inside the first arm; the second fixed shaft is fixed to the front end side of the first arm; and the fourth pulley is rotatably held The second fixed shaft is disposed inside the first arm and fixed to the first hand; and the belt is mounted on the third pulley and the fourth pulley.

Similarly, the second rotating mechanism has a hollow rotating shaft that constitutes a part of the main body portion, a motor that rotates the hollow rotating shaft, and a fifth pulley that is disposed inside the common arm and is fixed to the upper end side of the hollow rotating shaft; a fixed shaft that is fixed to the common arm, and a sixth pulley that is rotatably held by the third fixed shaft and disposed inside the common arm and fixed to the base end side of the second arm; and the belt is erected on the fifth pulley And a sixth pulley; the seventh pulley is fixed to the upper end side of the second fixed shaft and disposed inside the second arm; the fourth fixed shaft is fixed to the front end side of the second arm; and the eighth pulley is rotatable The ground is held on the fourth fixed shaft and disposed inside the second arm and fixed to the second hand; and the belt is placed on the seventh pulley and the eighth pulley.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] International Publication No. 2009/028178

In the industrial robot described in Patent Document 1, the second pulley fixed to the proximal end side of the first arm is rotatably held by the first fixed shaft fixed to the common arm, so that after the industrial robot is assembled The inclination of the first arm with respect to the horizontal direction can be adjusted by adjusting the inclination of the common arm with respect to the horizontal direction. Further, in the industrial robot, since the sixth pulley fixed to the proximal end side of the second arm is rotatably held by the third fixed shaft fixed to the common arm, after the industrial robot is assembled, the robot can be borrowed. The inclination of the second arm with respect to the horizontal direction is adjusted by adjusting the inclination of the common arm with respect to the horizontal direction.

However, in this industrial robot, since the first fixed shaft and the third fixed shaft are fixed to the common arm, if the inclination of the first arm with respect to the horizontal direction is adjusted, the inclination of the second arm with respect to the horizontal direction is also There is a change. When the inclination of the second arm with respect to the horizontal direction is adjusted, the inclination of the first arm with respect to the horizontal direction changes. In other words, in the industrial robot, it is difficult to individually adjust the inclination of the first arm with respect to the horizontal direction and the inclination of the second arm with respect to the horizontal direction after assembling the industrial robot.

Therefore, the object of the present invention is to provide an industrial robot having a common arm in which the base end side of the first arm and the base end side of the second arm are rotatably coupled, even after the industrial robot is assembled. The inclination of the first arm with respect to the horizontal direction and the inclination of the second arm with respect to the horizontal direction can be easily adjusted individually.

In order to solve the problem, the industrial robot according to the present invention includes: a first hand and a second hand, and a first object is mounted on the distal end side of the first arm; a second arm having a second hand portion rotatably coupled to the distal end side, a common arm rotatably coupled to a proximal end side of the first arm and a proximal end side of the second arm, and a body portion rotatably coupled thereto The common arm includes a base portion that is coupled to the main body portion, a first arm connecting portion that is coupled to a proximal end side of the first arm, and a second arm connecting portion that is coupled to a proximal end side of the second arm The base portion, the first arm connecting portion, and the second arm connecting portion are formed in different bodies, and the first arm connecting portion and the second arm connecting portion are detachably fixed to the base portion.

In the industrial robot according to the present invention, the base portion connected to the main body portion, the first arm connecting portion that connects the proximal end side of the first arm, and the second arm connecting portion that connects the proximal end side of the second arm are formed. The first arm connecting portion and the second arm connecting portion are detachably fixed to the base portion. Therefore, in the present invention, after the industrial robot is assembled, even if the fixed position and the inclination of the first arm connecting portion with respect to the base portion are adjusted, the inclination of the first arm with respect to the horizontal direction is adjusted. The inclination of the second arm with respect to the horizontal direction does not change. Further, after the industrial robot is assembled, even if the fixed position and the inclination of the second arm connecting portion with respect to the base portion are adjusted, the inclination of the second arm with respect to the horizontal direction is adjusted, and the first arm is opposed to the first arm. The inclination in the horizontal direction does not change. Therefore, in the present invention, even after the industrial robot is assembled, the inclination of the first arm with respect to the horizontal direction and the inclination of the second arm with respect to the horizontal direction can be easily adjusted individually.

In the present invention, for example, the base portion is formed in a shape when viewed from the up and down direction. In the rectangular parallelepiped shape, the first arm connecting portion and the second arm connecting portion are formed in a substantially L-shaped block shape when viewed from the vertical direction, and the first arm connecting portion is fixed to the base when viewed from the vertical direction. One end of the longitudinal direction of the portion, the second arm connecting portion is fixed to the other end of the base portion in the longitudinal direction. When the shape of the first arm connecting portion and the second arm connecting portion when viewed from the up-and-down direction is substantially L-shaped, when the common arm is integrally manufactured by cutting, the size of the material required for manufacturing the common arm is changed. In the present invention, since the base portion, the first arm connecting portion, and the second arm connecting portion are formed in different bodies, when the common arm is manufactured by cutting, the need for manufacturing the common arm can be reduced. The size of the material. Therefore, the common arm can be manufactured at low cost.

In the present invention, the industrial robot includes, for example, a first motor that rotates the first hand with respect to the first arm and rotates the first arm with respect to the common arm, and a second motor that causes the second hand The second arm is rotated relative to the common arm, and the first motor is fixed to the first arm connecting portion, and the second motor is fixed to the second arm connecting portion. In this case, the configuration of the power transmission mechanism of the first motor and the configuration of the power transmission mechanism of the second motor can be simplified as compared with the case where the first motor and the second motor are disposed inside the main body portion.

Moreover, in this case, it is preferable that the industrial robot includes a first reduction gear that is configured as a first joint portion that is a connection portion between the first arm and the common arm and that is coupled to the first motor, and a second reduction gear. The second joint portion that is the connection portion between the second arm and the common arm is connected to the second motor. When viewed from the up-and-down direction, the axis of the first motor is offset from the axis of the first reduction gear, and the second motor The axis of the shaft deviates from the axis of the second reduction gear. According to this configuration, the degree of freedom in arrangement of the first motor can be improved as compared with the case where the first motor and the first reduction gear are disposed coaxially. Moreover, the degree of freedom in arrangement of the second motor can be improved as compared with the case where the second motor and the second reduction gear are disposed coaxially. In addition, the first reduction gear or the second reduction gear can pass the air pipe or the distribution cable through the through hole as long as it is a hollow reduction gear having a through hole formed in the center of the radial direction.

In the present invention, the base portion of the elongated rectangular shape when viewed in the up and down direction When the straight line parallel to the short side and the straight line of the common arm with respect to the center of rotation of the main body portion is an imaginary line, the first arm connecting portion and the second arm connecting portion are formed to be opposite to the imaginary line when viewed from the up and down direction. Line symmetry.

In the present invention, it is preferable that the industrial robot includes a first motor that rotates the first hand with respect to the first arm and rotates the first arm with respect to the common arm, and a second motor that makes the second motor The hand rotates relative to the second arm, and the second arm rotates relative to the common arm. The first motor is fixed to the first arm connecting portion, and the second motor is fixed to the second arm connecting portion. At least a part of the first motor and the first motor At least a part of the motor protrudes from the lower surface of the common arm toward the lower side, and when viewed from the up-and-down direction, the first motor and the second motor are disposed closer to the outer peripheral side of the main body than the main body.

According to this configuration, since the first motor is fixed to the first arm connecting portion and the second motor is fixed to the second arm connecting portion, the first motor and the second motor can be lowered as compared with the case where the first motor and the second motor are disposed inside the main body portion. The height of the body. Further, in this configuration, at least a part of the first motor and at least a part of the second motor protrude from the lower surface of the common arm toward the lower side, so that the entire first motor and the second motor are disposed on the common arm. The height of the shared arm can be reduced compared to the internal case. In addition, when the first motor and the second motor are disposed on the outer peripheral side of the main body portion from the main body portion, the first motor and the second motor are vertically opposed to the main body. The distance between the main body portion and the common arm in the vertical direction can be made closer than when the portions overlap. Therefore, the minimum height (passing line) accessible to the first hand and the second hand can be reduced.

In the present invention, it is preferable that the center of rotation of the first arm with respect to the common arm, the center of rotation of the common arm with respect to the body portion, and the center of rotation of the second arm with respect to the common arm are sequentially connected when viewed from the up-and-down direction. The line is formed as a V word. According to this configuration, the first hand and the second hand can be overlapped in the vertical direction. Therefore, when the direction of the operation of loading and unloading the object to be transported by the first hand is the same as the direction of the operation of loading and unloading the object to be transported by the second hand, for example, the object to be transported is carried out by the first hand. End of action Thereafter, even if the common arm is not rotated with respect to the main body portion, the operation of moving the object to be transported by the second hand can be started. As a result, the industrial robot production time can be shortened.

As described above, in the present invention, the industrial robot has a common arm that rotatably connects the proximal end side of the first arm and the proximal end side of the second arm, and can easily be used even after the industrial robot is assembled. The inclination of the first arm with respect to the horizontal direction and the inclination of the second arm with respect to the horizontal direction are individually adjusted.

1‧‧‧Robots (industrial robots)

4‧‧‧Hands (1st hand)

5‧‧‧Hands (2nd hand)

6‧‧‧ Arm (1st arm)

7‧‧‧ Arm (2nd arm)

8‧‧‧Shared arm

9‧‧‧ Body Department

12‧‧‧Upper body part

13‧‧‧Bottom body

14‧‧‧ Joints (Part 1)

15‧‧‧ Joints (2nd Joint)

16‧‧‧Drive mechanism

17‧‧‧ drive mechanism

20‧‧‧ base

20a‧‧‧Fixed Department

21‧‧‧1st arm joint

21a‧‧‧ Tube

21b‧‧‧Fixed Department

22‧‧‧2nd arm joint

22a‧‧‧ Tube

22b‧‧‧Fixed Department

24‧‧‧ screws

25‧‧‧Locating pin

27‧‧‧Motor (1st motor)

28‧‧‧Reducer (1st reducer)

29‧‧‧Motor (2nd motor)

30‧‧‧Reducer (2nd reducer)

33‧‧‧ pulley

34‧‧‧ pulley

35‧‧‧With

36‧‧‧ pulley

37‧‧‧ pulley

38‧‧‧With

C1‧‧‧The center of rotation of the shared arm

C2‧‧‧The center of rotation of the first arm

C3‧‧‧Rotation center of the second arm

L1‧‧‧ imaginary line

X‧‧‧The length of the base

Y‧‧‧ direction

Y1‧‧‧ direction

Y2‧‧‧ direction

Fig. 1 is a perspective view of an industrial robot according to an embodiment of the present invention.

2 is a plan view of the industrial robot shown in FIG. 1.

Fig. 3 is a front view of the industrial robot shown in Fig. 1.

Fig. 4 is a cross-sectional view for explaining the configuration of the common arm and the drive mechanism shown in Fig. 1.

Figure 5 is a plan view of the shared arm shown in Figure 1.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

(summary structure of industrial robot)

Fig. 1 is a perspective view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a plan view of the industrial robot 1 shown in FIG. 1. Fig. 3 is a front view of the industrial robot 1 shown in Fig. 1.

The industrial robot 1 (hereinafter referred to as "robot 1") of the present embodiment is a robot for transporting a semiconductor wafer (not shown) as a transfer target, and the robot 1 is incorporated in a manufacturing system of a semiconductor (not shown). use. The robot 1 includes two hand portions 4 and 5 on which a semiconductor wafer is mounted, and an arm 6 having a hand 4 rotatably coupled to a distal end side thereof, and an arm 7 having a hand portion 5 rotatably coupled to a distal end side thereof; An arm 8 rotatably coupled to a proximal end side of the arms 6, 7 and a body portion 9 rotatably coupled to the common arm 8.

The hand 4 is disposed at a position lower than the hand 5 . The arm 6 is disposed on the lower side of the hand 4 The location. The arm 7 is disposed at a position above the hand 5 . The common arm 8 is disposed at a position lower than the arm 6. Further, the common arm 8 is disposed at a position above the main body portion 9. The hand 4 of the present embodiment is the first hand, the hand 5 is the second hand, the arm 6 is the first arm, and the arm 7 is the second arm.

The body portion 9 is formed in a substantially cylindrical shape. The main body portion 9 includes an upper main body portion 12 and a lower main body portion 13 that holds the upper main body portion 12 so as to be movable up and down. A rotation mechanism (not shown) for rotating the common arm 8 and an elevating mechanism (not shown) for moving the common arm 8 together with the rotation mechanism are disposed inside the upper main body portion 12. An elevating mechanism (not shown) that elevates and lowers the upper main body portion 12 is disposed inside the lower main body portion 13.

The common arm 8 is formed in a block shape which is elongated and substantially rectangular when viewed from the up and down direction. Further, the common arm 8 is formed in a hollow shape. The length of the common arm 8 when viewed from the up and down direction is longer than the outer diameter of the body portion 9. The arms 6 and 7 are formed in an elongated elliptical shape when viewed from the up-and-down direction and have a thin block shape in the vertical direction. In the present embodiment, the length of the arm 6 is equal to the length of the arm 7. Further, the arms 6 and 7 are formed in a hollow shape. The arms 6 and 7 of the present embodiment have the same length. Further, the arms 6 and 7 are formed in a hollow shape. The arms 6 and 7 and the common arm 8 of the present embodiment are formed by cutting.

The proximal end side of the arm 6 is rotatably coupled to one end side of the common rectangular arm 8 which is elongated and substantially rectangular in shape when viewed from the upper and lower directions, and the proximal end side of the arm 7 is rotatably coupled to the other end side of the common arm 8 . The joint portion between the arm 6 and the common arm 8 serves as the joint portion 14. The joint portion between the arm 7 and the common arm 8 serves as the joint portion 15. The joint portion 14 of the present embodiment is a first joint portion, and the joint portion 15 is a second joint portion.

Further, the robot 1 includes a drive mechanism 16 (see FIG. 4) that rotates the hand 4 with respect to the arm 6 and rotates the arm 6 with respect to the common arm 8; and a drive mechanism 17 (see FIG. 4) that makes the hand 5 rotates relative to the arm 7 and rotates the arm 7 relative to the common arm 8. Hereinafter, the specific configuration of the common arm 8 and the configuration of the drive mechanisms 16 and 17 will be described.

(Composition of shared arm and drive mechanism)

Figure 4 is a cross-sectional view showing the configuration of the common arm 8 and the driving mechanisms 16, 17 shown in Figure 1. view. Figure 5 is a plan view of the common arm 8 shown in Figure 1.

The common arm 8 includes a base portion 20 that is coupled to the main body portion 9 , a first arm connecting portion 21 that is coupled to the proximal end side of the arm 6 , and a second arm connecting portion 22 that is coupled to the proximal end side of the arm 7 . The base portion 20, the first arm connecting portion 21, and the second arm connecting portion 22 are formed in different bodies, and the base portion 20, the first arm connecting portion 21, and the second arm connecting portion 22 are fixed and integrated to constitute a common Arm 8. In the present embodiment, the first arm connecting portion 21 and the second arm connecting portion 22 are detachably fixed to the base portion 20. Further, as described above, the common arm 8 is formed by cutting, and the base portion 20, the first arm connecting portion 21, and the second arm connecting portion 22 constituting the common arm 8 are formed by cutting.

The base portion 20 is formed in an elongated rectangular shape when viewed from the up-and-down direction and has a thin block shape in the vertical direction. An output shaft of the hollow reducer is fixed to the center of the base portion 20, and an output shaft of the hollow reducer constitutes a rotation mechanism disposed inside the upper body portion 12. As shown in Fig. 5, the longitudinal direction of the base portion 20 having a rectangular shape when viewed from the upper-lower direction (the direction parallel to the long side of the base portion 20, the X direction in Fig. 5) is set to the left-right direction, The short side direction of the base portion 20 orthogonal to the left-right direction (the direction parallel to the short side of the base portion 20, the Y direction in FIG. 5) is the front-rear direction, and the both ends of the base portion 20 in the left-right direction are formed. The fixing portions 20a for fixing the first arm connecting portion 21 and the second arm connecting portion 22 are respectively fixed. The upper surface of the fixing portion 20a is lower than the upper surface of the portion of the base portion 20 excluding the fixing portion 20a. In addition, in the following description, the Y1 direction side of FIG. 5 is the "front" side, and the Y2 direction side is the "rear" side.

As shown in FIG. 5, the first arm connecting portion 21 and the second arm connecting portion 22 are formed in a block shape having a substantially L shape when viewed from the vertical direction. The first arm connecting portion 21 is fixed to one end of the base portion 20 in the left-right direction, and the second arm connecting portion 22 is fixed to the other end of the base portion 20 in the left-right direction. Further, as shown in FIG. 5, when a straight line parallel to the front-rear direction when viewed from the up-and-down direction and a straight line passing through the center of rotation C1 of the common arm 8 with respect to the main body portion 9 are taken as the imaginary line L1, when viewed from the up-and-down direction, The first arm connecting portion 21 and the second arm connecting portion 22 are formed. It is symmetrical with respect to the imaginary line L1.

As shown in FIG. 4, a substantially cylindrical tubular portion 21a is formed in the first arm connecting portion 21, and a substantially cylindrical tubular portion 22a is formed in the second arm connecting portion 22. One portion of the tubular portion 21a protrudes toward the lower side from the base portion 20. The tubular portion 22a protrudes toward the upper side from the base portion 20. In addition, one of the tubular portions 21a and 22a protrudes toward the rear side from the rear end surface of the base portion 20, and the first arm connecting portion 21 and the second arm connecting portion 22 are formed in a substantially L shape when viewed from the vertical direction as described above. Blocky. In addition, since one portion of the tubular portion 21a protrudes toward the rear side and the tubular portion 22a protrudes toward the upper side, the shape of the first arm connecting portion 21 and the second arm connecting portion 22 when viewed from the front-rear direction is also substantially L-shaped.

Further, the first arm connecting portion 21 and the second arm connecting portion 22 are formed with fixed portions 21b and 22b that are placed and fixed to the fixing portion 20a of the base portion 20. The fixed portions 21b and 22b are detachably fixed to the fixed portion 20a by a plurality of screws 24 while being placed on the fixed portion 20a. Further, the fixed portions 21b and 22b and the fixed portion 20a are positioned by the positioning pins 25 (see FIG. 4).

In a state where the fixed portion 21b is fixed to the fixing portion 20a (that is, in a state where the first arm connecting portion 21 is fixed to the base portion 20), the upper surface and the base of the first arm connecting portion 21 are vertically positioned. The upper surface of the portion 20 is substantially uniform. Further, in a state in which the fixed portion 21b is fixed to the fixing portion 20a, the front end surface of the first arm connecting portion 21 substantially coincides with the front end surface of the base portion 20 in the front-rear direction, and the rear end surface of the fixed portion 21b and the rear end surface of the base portion 20 It is roughly the same.

Similarly, in a state where the fixed portion 22b is fixed to the fixed portion 20a (that is, in a state where the second arm connecting portion 22 is fixed to the base portion 20), the lower surface of the second arm connecting portion 22 is in the vertical direction. The lower surface of the base portion 20 is substantially uniform. Further, in a state in which the fixed portion 22b is fixed to the fixed portion 20a, the front end surface of the second arm connecting portion 22 substantially coincides with the front end surface of the base portion 20 in the front-rear direction, and the rear end surface of the fixed portion 22b and the rear end surface of the base portion 20 It is roughly the same.

The drive mechanism 16 includes a motor 27 that rotates the hand 4 with respect to the arm 6 and rotates the arm 6 with respect to the common arm 8 and a speed reducer 28 that is coupled to the motor 27. The drive mechanism 17 includes a motor 29 that rotates the hand 5 with respect to the arm 7 and rotates the arm 7 with respect to the common arm 8 and a speed reducer 30 that is coupled to the motor 29. The motor 29 is a motor of the same shape and the same size as the motor 27. The speed reducer 30 is a speed reducer of the same shape and the same size as the speed reducer 28. The motor 27 of the present embodiment is a first motor, and the motor 29 is a second motor. Further, the speed reducer 28 is the first speed reducer, and the speed reducer 30 is the second speed reducer.

The speed reducer 28 is a hollow speed reducer in which a through hole is formed in the center of the radial direction. The speed reducer 28 is disposed such that its axial center coincides with the axial center of the tubular portion 21a of the first arm connecting portion 21. The axis of the reducer 28 and the arm 6 coincide with the center of rotation C2 of the common arm 8, and the reducer 28 constitutes the joint portion 14. The motor 27 is fixed to the first arm coupling portion 21 . Further, the motor 27 is disposed at a position closer to the front side than the speed reducer 28. That is, the axis of the motor 27 is deviated from the axis of the reducer 28 when viewed from the up and down direction. Further, the majority of the motor 27 protrudes toward the lower side from the lower end of the first arm connecting portion 21. That is, most of the motor 27 protrudes from the lower surface of the common arm 8 toward the lower side. Moreover, when viewed from the up-down direction, the motor 27 is disposed on the outer peripheral side of the main body portion 9 from the main body portion 9, and as shown in FIG. 3, the large portion of the motor 27 overlaps the main body portion 9 in the horizontal direction.

An output shaft of the motor 27 protrudes upward, and a pulley (not shown) is fixed to the output shaft. As shown in FIG. 4, a pulley 33 is fixed to the lower end side of the input shaft of the reduction gear 28. The pulley 33 is disposed inside the tubular portion 21 a of the first arm connecting portion 21 . A belt (not shown) is placed on the pulley and the pulley 33 fixed to the output shaft of the motor 27. The base end side of the arm 6 is fixed to the output shaft of the speed reducer 28, and the housing of the speed reducer 28 is fixed to the inner peripheral side of the cylindrical portion 21a. A pulley 34 is fixed to the upper end side of the input shaft of the speed reducer 28. The pulley 34 is disposed inside the base end side of the arm 6. A pulley (not shown) disposed inside the front end side of the arm 6 is fixed to the hand 4 . A belt 35 is placed on the pulley and the pulley 34. Further, the pulley fixed to the hand 4 is rotatably held by a fixed shaft fixed to the front end side of the arm 6.

The speed reducer 30 is a hollow speed reducer in which a through hole is formed in the center of the radial direction. The speed reducer 30 is disposed such that its axial center coincides with the axial center of the tubular portion 22a of the second arm connecting portion 22. The axis of the reducer 30 coincides with the center C3 of the arm 7 with respect to the rotation of the common arm 8, and the reduction gear 30 constitutes the joint portion 15. The motor 29 is fixed to the second arm coupling portion 22 . Further, the motor 29 is disposed at a position closer to the front side than the speed reducer 30. That is, the axis of the motor 29 is deviated from the axis of the reducer 30 when viewed from the up and down direction. Further, one of the lower end sides of the motor 29 protrudes toward the lower side from the lower end of the second arm connecting portion 22. That is, one portion of the lower end side of the motor 29 protrudes from the lower surface of the common arm 8 toward the lower side. Moreover, when viewed from the up-down direction, the motor 29 is disposed on the outer peripheral side of the main body portion 9 from the main body portion 9, and as shown in FIG. 3, one portion of the lower end side of the motor 29 is overlapped with the main body portion 9 in the horizontal direction.

The output shaft of the motor 29 protrudes upward, and a pulley (not shown) is fixed to the output shaft. As shown in FIG. 4, a pulley 36 is fixed to the lower end side of the input shaft of the speed reducer 30. The pulley 36 is disposed inside the tubular portion 22a of the second arm coupling portion 22. A belt (not shown) is placed on the pulley and the pulley 36 fixed to the output shaft of the motor 29. The base end side of the arm 7 is fixed to the output shaft of the speed reducer 30, and the housing of the speed reducer 30 is fixed to the inner peripheral side of the cylindrical portion 22a. A pulley 37 is fixed to the upper end side of the input shaft of the speed reducer 30. The pulley 37 is disposed inside the base end side of the arm 7. A pulley (not shown) disposed inside the front end side of the arm 7 is fixed to the hand 5 . A belt 38 is placed on the pulley and pulley 37. Further, the pulley fixed to the hand 5 is rotatably held by a fixed shaft fixed to the front end side of the arm 7.

In the present embodiment, as shown in FIG. 5, when viewed from the up-and-down direction, the rotation center C1, the rotation center C2, and the rotation center C3 are not disposed on the same straight line. That is, when viewed from the up-and-down direction, the line connecting the rotation center C1, the rotation center C2, and the rotation center C3 in this order is formed into a V shape. That is, the robot 1 of the present embodiment is a so-called boomerang type robot. Further, in the present embodiment, the distal end portions of the arms 6 and 7 are disposed on the rearmost side (the state shown in Figs. 1 and 2), and the hand 4 and the hand 5 are completely overlapped in the vertical direction.

Further, as described above, the motor 29 is a motor of the same shape and the same size as the motor 27, and the speed reducer 30 is a speed reducer of the same shape and the same size as the speed reducer 28. Further, each component such as the pulley 33 constituting the drive mechanism 16 and the components such as the pulley 36 constituting the drive mechanism 17 have the same shape and the same specifications. That is, in the present embodiment, the drive mechanism 16 and the drive mechanism 17 are constituted by shared components. Further, in the present embodiment, the drive mechanism 16 composed of the shared components and the drive mechanism 17 are disposed in a state of being displaced in the vertical direction. That is, in the present embodiment, the drive mechanism 16 and the drive mechanism 17 are shared by changing the arrangement height.

(Main effects of this embodiment)

As described above, in the present embodiment, the base portion 20, the first arm connecting portion 21, and the second arm connecting portion 22 constituting the common arm 8 are formed in different bodies, and the first arm connecting portion 21 and the second arm connecting portion are formed. 22 is detachably fixed to the base portion 20. Therefore, in the present embodiment, after the robot 1 is assembled, even if the fixed position and inclination of the first arm connecting portion 21 with respect to the base portion 20 are adjusted, the inclination of the arm 6 with respect to the horizontal direction is adjusted, and the arm is adjusted. 7 The inclination with respect to the horizontal direction does not change. Further, after the robot 1 is assembled, even if the fixed position and the inclination of the second arm connecting portion 22 with respect to the base portion 20 are adjusted, the inclination of the arm 7 with respect to the horizontal direction is adjusted, and the arm 6 is horizontal with respect to the horizontal direction. The inclination will not change. Therefore, in the present embodiment, even after the robot 1 is assembled, the inclination of the arm 6 with respect to the horizontal direction and the inclination of the arm 7 with respect to the horizontal direction can be easily adjusted individually.

Further, in the present embodiment, since the base portion 20, the first arm connecting portion 21, and the second arm connecting portion 22 are formed in different bodies, even if one of the tubular portions 21a and 22a is closer to the rear side than the rear end surface of the base portion 20 The common arm 8 is formed in a protruding manner, and the base portion 20 elongated in the left-right direction may be formed in a rectangular parallelepiped shape. Therefore, in the present embodiment, the size of the material required for manufacturing the common arm 8 can be reduced as compared with the case where the common arm 8 manufactured by the cutting process is integrally formed, and as a result, the manufacture of the common arm 8 can be reduced. cost.

In the present embodiment, the motor 27 is fixed to the first arm connecting portion 21, and the motor 29 is fixed to The second arm connecting portion 22 is provided. Therefore, in the present embodiment, the configuration of the drive mechanisms 16 and 17 can be simplified as compared with the case where the motors 27 and 29 are disposed inside the main body portion 9. In other words, when the motors 27 and 29 are disposed inside the main body portion 9, the power of the motors 27 and 29 is transmitted from the main body portion 9 to the outer side in the left-right direction, and then needs to be further provided inside the common arm 8 for transmission to the inside. In the configuration of the rear side, in the present embodiment, the pulleys 33 and 36 for transmitting the power of the motors 27 and 29 may be provided. Therefore, in the present embodiment, the configuration of the drive mechanisms 16 and 17 can be simplified as compared with the case where the motors 27 and 29 are disposed inside the main body portion 9.

Further, in the present embodiment, since the motor 27 is fixed to the first arm connecting portion 21 and the motor 29 is fixed to the second arm connecting portion 22, the motor 27 and 29 can be disposed inside the main body portion 9. The height of the body portion 9 is lowered. Further, in the present embodiment, since most of the motor 27 and one of the lower end sides of the motor 29 protrude from the lower surface of the common arm 8 toward the lower side, the entire motor 27 and 29 are disposed inside the common arm 8. In contrast, in the present embodiment, the motors 27 and 29 are disposed closer to the outer peripheral side of the main body portion 9 than the main body portion 9 when viewed from the vertical direction, and are horizontally oriented. The upper half of the motor 27 and the lower end side of the motor 29 overlap with the main body portion 9, so that the main body portion 9 can be moved in the up and down direction as compared with the case where the motors 27 and 29 overlap the main body portion 9 in the up and down direction. It is close to the distance of the common arm 8. Therefore, in the present embodiment, the minimum height (passing line) at which the hands 4, 5 can be approached can be reduced.

In the present embodiment, the axis of the reduction gear 28 constituting the joint portion 14 is deviated from the axis of the motor 27. Therefore, in the present embodiment, the degree of freedom in arrangement of the motor 27 can be improved as compared with the case where the motor 27 and the speed reducer 28 are disposed coaxially. Similarly, in the present embodiment, since the axis of the speed reducer 30 constituting the shutdown unit 15 is deviated from the axis of the motor 29, the motor 29 can be improved as compared with the case where the motor 29 and the speed reducer 30 are disposed coaxially. Configuration freedom. Further, in the present embodiment, since the axial center of the reduction gear 28 is deviated from the axial center of the motor 27, the air tube or the distribution cable can be passed through the through hole of the reduction gear 28 as the hollow reduction gear. Similarly, in the present embodiment, the axis of the reducer 30 and the shaft of the motor 29 are the same. Since the heart is deviated, the air tube or the wiring cable for cooling can be passed through the through hole of the speed reducer 30 which is a hollow reducer.

In the present embodiment, the hand 4 is disposed on the upper side of the arm 6, and the hand 5 is disposed on the lower side of the arm 7. Therefore, in the present embodiment, the arm 6 can be prevented from interfering with the arm 7, and the distance between the hand 4 and the hand 5 can be narrowed. Further, in the present embodiment, since the distance between the hand 4 and the hand 5 in the upper and lower directions can be narrowed, the minimum height (passing line) at which the hand 5 disposed on the upper side of the hand 4 can be lowered can be reduced.

In the present embodiment, when viewed from the up-and-down direction, the center of rotation C2 of the arm 6 with respect to the common arm 8, the center of rotation C1 of the common arm 8 with respect to the body portion 9, and the center of rotation C3 of the arm 7 with respect to the common arm 8 The lines that are sequentially connected are formed into V characters. Therefore, in the present embodiment, as described above, in the state in which the front ends of the arms 6 and 7 are disposed on the rear side, the hand 4 and the hand 5 are completely overlapped in the vertical direction. Therefore, in the present embodiment, when the direction in which the operation of loading and unloading the semiconductor wafer by the hand 4 is performed in the same direction as the direction in which the operation of loading and unloading the semiconductor wafer by the hand 5 is performed, for example, the hand 4 is carried out. After the operation of the semiconductor wafer is completed, even if the common arm 8 is not rotated with respect to the main body portion 9, the operation of loading the semiconductor wafer into the hand 5 can be started. As a result, in the present embodiment, the production time of the robot 1 can be shortened.

(Other embodiments)

The above-described embodiments are an example of a preferred embodiment of the present invention, and are not limited thereto, and various modifications can be made without departing from the spirit and scope of the invention.

In the above-described embodiment, the first arm connecting portion 21 and the second arm connecting portion 22 are formed in a block shape having a substantially L shape when viewed from the vertical direction. The first arm connecting portion 21 and the second arm connecting portion 22 may be formed in a block shape having a substantially rectangular shape when viewed from the vertical direction. In this case, the common arm 8 is formed, for example, in a shape of a block having a shape that is elongated and substantially rectangular when viewed from the up-and-down direction. Moreover, in this case, when viewed from the up-down direction, the rotation center C1, the rotation center C2, and the rotation center C3 may be arranged on the same straight line. Again The arm 8 may be formed in a substantially V shape when viewed from the up and down direction.

In the above embodiment, the motor 27 is fixed to the first arm connecting portion 21, and the motor 29 is fixed to the second arm connecting portion 22. In addition to this, the motors 27 and 29 may be disposed inside the main body portion 9. Further, in the above embodiment, one of the motors 27 and 29 protrudes from the lower surface of the common arm 8 toward the lower side, but the entire motor 27 and 29 may be disposed inside the common arm 8. Further, in the above-described embodiment, the motors 27 and 29 are disposed closer to the outer peripheral side of the main body portion 9 than the main body portion 9 when viewed from the up-and-down direction, but the motors 27 and 29 may be connected to the main body portion 9 in the up-and-down direction. Configured in an overlapping manner.

In the above embodiment, the arms 6, 7 may be constituted by two arms that are rotatable relative to each other. Further, in the above-described embodiment, the first arm connecting portion 21 and the second arm connecting portion 22 are formed to be line symmetrical with respect to the imaginary line L1, but the first arm connecting portion 21 and the second arm connecting portion 22 may be formed not. It is symmetrical with respect to the imaginary line L1. Further, in the above embodiment, the axial center of the motor 29 is deviated from the axial center of the speed reducer 30 when viewed from the vertical direction, but the motor 29 and the speed reducer 30 may be disposed coaxially. Similarly, in the above embodiment, the axial center of the motor 29 is offset from the axial center of the reduction gear 30 when viewed from the up-and-down direction, but the motor 29 and the reduction gear 30 may be disposed coaxially. Further, in the above-described embodiment, the object to be transported by the robot 1 is a semiconductor wafer, but the robot 1 can also transport another object to be transported such as a glass substrate for a liquid crystal display.

Claims (6)

An industrial robot comprising: a first hand and a second hand, wherein a first object is mounted on a distal end side of the first arm; and a front end of the second arm; The second hand is rotatably coupled to the second hand; the common arm is rotatably coupled to the proximal end side of the first arm and the proximal end side of the second arm; and the main body portion is rotatably coupled to the above In the common arm, the common arm has a base portion that is coupled to the main body portion, the first arm connecting portion is coupled to a proximal end side of the first arm, and the second arm connecting portion is coupled to the second arm The base end portion, the first arm connecting portion, and the second arm connecting portion are formed in different shapes, and the first arm connecting portion and the second arm connecting portion are detachably fixed to the base portion. The base portion is formed in a rectangular parallelepiped shape in a shape of a rectangular shape when viewed from the up-and-down direction, and the first arm connecting portion and the second arm connecting portion are formed in a block shape having a substantially L shape when viewed from the vertical direction. When viewed from the up and down direction, the first arm is connected Fixed to the bottom of the longitudinal direction of the base end of the second arm coupling portion is fixed to the other end of the longitudinal direction of said bottom base. An industrial robot according to claim 1, comprising: a first motor that rotates the first hand with respect to the first arm, and rotates the first arm with respect to the common arm; and a second motor Rotating the second hand relative to the second arm and rotating the second arm relative to the common arm The first motor is fixed to the first arm connecting portion, and the second motor is fixed to the second arm connecting portion. The industrial robot according to claim 2, comprising: a first reduction gear that constitutes a first joint portion that is a connection portion between the first arm and the common arm, and that is coupled to the first motor; and a second reduction gear And a second joint portion that is a connecting portion between the second arm and the common arm, and is coupled to the second motor, and the axial center of the first motor and the first reduction gear are viewed from a top direction The axis of the second motor is deviated from the axis of the second reducer. The industrial robot according to any one of claims 1 to 3, wherein a straight line parallel to a short side of the base portion which is elongated in a rectangular shape when viewed from an up-and-down direction is formed by the common arm relative to the body When the straight line of the rotation center of the part is an imaginary line, the first arm connecting portion and the second arm connecting portion are formed to be symmetrical with respect to the imaginary line when viewed from the up and down direction. An industrial robot according to claim 1, comprising: a first motor that rotates the first hand with respect to the first arm, and rotates the first arm with respect to the common arm; and a second motor Rotating the second hand with respect to the second arm and rotating the second arm with respect to the common arm, the first motor is fixed to the first arm connecting portion, and the second motor is fixed to the second arm At least a part of the first motor and at least a part of the second motor project from the lower surface of the common arm toward the lower side, and the first motor and the second motor are disposed in the connecting portion. The body portion is located at a position on the outer peripheral side of the body portion. The industrial robot of claim 1, wherein the above-mentioned The first arm is formed in a V shape with respect to the rotation center of the common arm, the rotation center of the common arm with respect to the main body portion, and the line in which the second arm is sequentially coupled to the rotation center of the common arm.