JP2006159318A - Carrier robot and its carrying method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrier robot capable of carrying out high speed substrate carriage by reducing inaccuracy of stopping positional precision and action delay of a carrier arm and to provide its carrying method. <P>SOLUTION: This carrier robot is furnished with a first arm 11 on a roughly central part of which a first drive shaft 14 is provided and which is supported free to revolve within a horizontal surface around the first drive shaft as its revolving center, second and third arms 6a, 6b provided with second and third drive shafts 9a, 9b on roughly both end parts of the first arm and supported within a horizontal surface free to revolve around the second and third drive shafts as their revolving centers and work supporting parts 3a, 3b supported within a horizontal surface free to revolve around roughly head end parts of the second and third arms as their revolving centers, and second and third driving sources 15a, 15b to revolve the second and third drive shafts are respectively provided between the second drive shaft 9a and the first drive shaft 14 and between the third drive shaft 9b and the first drive shaft 14. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a transfer robot for transferring a flat object such as a semiconductor wafer, a liquid crystal glass substrate, or a plasma display substrate.

  Substrate transportation in manufacturing processes using flat wafers (hereinafter collectively referred to as substrates) such as semiconductor wafers, liquid crystal glass substrates, and plasma display substrates is usually performed in a clean room in a highly clean environment as follows. Has been done.

  A cassette containing a plurality of unprocessed substrates is carried into a predetermined position in the clean room. Each unprocessed substrate is taken out from the cassette by a substrate transfer robot installed in the clean room, and is carried into a processing apparatus or an inspection apparatus in the clean room. The processed substrate that has undergone the predetermined process is again taken out of the processing apparatus and the inspection apparatus by the substrate transfer robot, and is carried into the cassette. Finally, the cassette is carried out of the clean room. Such a series of operations is repeated for each cassette.

In the substrate transfer robot, it is important to improve productivity by exchanging unprocessed substrates and processed substrates in a short time. Various transfer robots are proposed in Patent Documents 1 to 4 described later.

  FIG. 5 is a perspective view of the articulated conveyance device disclosed in Patent Document 1. As shown in FIG.

In FIG. 5, a first multi-joint drive unit 31 and a second multi-joint drive unit 32 are provided above both ends of the common drive unit 33 via a drive shaft. A drive control unit 34 is provided below the common drive unit 33. The drive control unit 34 applies a turning force to the common drive unit 33 and also applies a rotational force to each of the first drive shaft 33C and the second drive shaft 33D that are concentric shaft mechanisms. The rotational force is transmitted to the first multi-joint drive unit 31 and the second multi-joint drive unit 32 by two power transmission timing belt / pulley mechanisms 35 and 36.
In the case of Patent Document 2, rotational power is applied to the lower end portions of the respective long axes via gears by two drive sources corresponding to the drive control means of Patent Document 1 provided in the casing. This rotational force is transmitted to two intermediate arms corresponding to the articulated drive section of Patent Document 1 through belt / pulley transmission means provided at the upper end of the long shaft.

  In the case of Patent Literature 3, the rotational force of the drive source corresponding to the drive control means of Patent Literature 1 provided in the base portion corresponds to the articulated drive portion of Patent Literature 1 by a gear train formed by a plurality of gears. It is transmitted to the first arm and the second arm.

Further, in Patent Document 4, as one example, a transfer robot having a configuration in which a drive source is directly connected to support shafts at both ends of a first arm corresponding to the common drive unit of Patent Document 1 via a speed reducer. Is disclosed. By this drive source, the second arm corresponding to the articulated drive part of Patent Document 1 is rotated by coaxial drive.
JP 7-171778 A JP-A-10-58359 JP 2002-172572 A Japanese Patent Laid-Open No. 10-163296

However, in a transfer robot that has been increased in size with an increase in the size of the substrate, if the substrate transfer speed is increased to a predetermined level or more, the rotation operation of the transfer arm is delayed. Moreover, the problem that the stop position accuracy of a conveyance arm deteriorates has arisen.
In the case of the device proposed in Patent Document 1, the multi-joint drive units 31 and 32 are provided above both ends of the common drive unit 33, and the drive control means 34 is provided below the common drive unit 33. The distance between the drive control unit 34 and the multi-joint drive units 31 and 32 is long. Therefore, it is necessary to transmit the rotational force through a large number of members.

  As a result, residual stress such as extension of the power transmission belt or torsion of the long drive shafts 33C and 33D accumulates, causing a delay in the rotational operation of the multi-joint drive units 31 and 32, and deteriorating stop position accuracy. There is. Further, the concentric shaft mechanism has a problem that it is complicated and expensive.

  In the case of Patent Document 2, the rotational force applied to the lower end portion of the long shaft is transmitted to the intermediate arm via the belt / pulley transmission means provided at the upper end portion of the long shaft. There are many parts for transmitting the rotational force. For this reason, as the substrate transport speed increases, a delay in the rotation operation occurs, and the stop position accuracy deteriorates. Moreover, since there are many parts, there exists a problem that cost is high and also weight will become large.

  In the case of Patent Document 3, since the gear train drive mechanism formed of a plurality of gears is provided, the problems of the extension of the power transmission belt and the twist of the rotating shaft are solved. However, such a gear drive mechanism always has a mechanical “play”, so that the stop position accuracy of the first and second arms is deteriorated. Further, since the gear train is heavy, the rotational moment becomes large, and there is a problem in performing high-speed conveyance driving.

  Further, in the case of the above-described embodiment disclosed in Patent Document 4, since the second arm can be rotated by a drive source directly connected, operation delay due to extension of the power transmission belt and torsion of the drive shaft is eliminated. However, since heavy driving sources are provided at both ends of the first arm, the rotational moment of the first arm increases, causing the first arm to turn at a high speed, and suddenly stop at a stop position with a predetermined accuracy. It becomes difficult to make. As a result, there is a problem that the operation delay of the second arm occurs and the stop position accuracy also deteriorates.

  The present invention has been made in view of the above-described conventional problems, and reduces the inaccuracy of the stop position accuracy of the transfer arm and the operation delay of the transfer arm due to the high-speed rotation, and the rotation operation performance of the transfer arm. The purpose is to provide a transfer robot that can increase the speed and transfer a high-speed substrate.

  In order to achieve the above object, in the first aspect of the invention, a first drive shaft (14) is provided at a substantially central portion, and the first drive shaft (14) is the center of rotation and the horizontal plane. A first arm (11) rotatably supported within the first arm (11), and second and third drive shafts (9a, 9b) provided at substantially both ends of the first arm (11). Second and third arms (6a, 6b) supported rotatably in a horizontal plane with the second and third drive shafts (9a, 9b) as pivot centers, and the second and third arms (6a, 6b) and a work support portion (3a, 3b) supported so as to be rotatable in a horizontal plane with the substantially distal end portion as a rotation center, the second and third drive shafts (9a, 6b) are provided. The second and third drive sources (15a, 15b) for rotating 9b) include a second drive shaft (9a) and a first drive shaft ( It is characterized in that each is provided between the 4) and between the third drive shaft (9b) and the first drive shaft (14).

  The second invention is the first invention, wherein the second and third reducers (19a, 19b) for reducing the drive speeds of the second and third drive sources (15a, 15b) are the second and third reducers. It is characterized by being directly connected to the drive shaft (9a, 9b).

  The third invention is characterized in that, in the first invention or the second invention, the second and third drive shafts (14, 9a, 9b) are formed hollow.

  In a fourth aspect based on the third aspect, the first drive source (16) for driving the first drive shaft (14) is provided in the body part (2), and the interior of the body part (2). A part of the wiring led from the outside, and at least the second arm (6a), the third arm (6b), the second drive source (15a), the third drive source (15b) ) And a work support part (3a, 3b), and a wiring case (22) for guiding the wiring is provided.

  A fifth invention is a transfer method using the transfer robot (1a) according to the first invention, wherein the first arm (11), the second arm (6a), the second arm (6a), and a work support section are provided. (3a) The respective bending angles of the first arm (11) and the third arm (6b), and the third arm (6b) and the workpiece support (3b) are set to 175 degrees or less. It is characterized by.

  According to the first invention, as shown in FIG. 1, heavy drive sources 15a and 15b are provided between the second drive shaft 9a and the first drive shaft 14 and between the third drive shaft 9b and the first drive shaft. 14, the rotational moment of the first arm 11 is smaller than in the prior art. Therefore, the first arm 11 can be rotated at a high speed, and the stop position accuracy due to a sudden stop can be improved. In addition, the rotational force of the second and third drive sources 15a and 15b is transmitted to the second and third drive shafts 9a and 9b only through the short timing belts 13a and 13b, respectively. Rotation delay of the second and third arms 6a and 6b due to the backlash or the like is reduced. As a result of the above, the transfer robot can transfer the substrate at high speed.

  According to the second invention, as shown in FIG. 2, since the speed reducers 19a and 19b are directly connected to the second and third drive shafts (9a and 9b), the torque of the drive sources 15a and 15b increases. . Therefore, the second and third arms 6a and 6b can be stably rotated at high speed and suddenly stopped, so that the high-speed substrate transfer of the transfer robot becomes possible.

  Further, according to the third invention, as shown in FIGS. 3 and 4, the first drive shaft 14, the second drive shaft 9a, and the third drive shaft 9b are formed in a hollow shape. Vacuum pipes, sensor signal wires, power lines for supplying power to the drive sources 15a and 15b, and the like can be stored in the hollow portion. Therefore, even if the rotation speed and the number of rotations of these drive shafts are increased, there is no possibility of damaging the stored piping and wiring for a long period of time.

  According to the fourth invention, as shown in FIGS. 3 and 4, the wiring case 22 is provided above the first drive source 16 in the body part 2, so that the upper side of the body part 2 is provided. In addition, a part of the wiring drawn out when the first arm 11 rotates can be accommodated, and the wiring can be further guided to the upper side of the body portion 2.

  According to the fifth invention, when each arm and the work support part are returned to the position of the previous process, for example, in the next process, a smooth rotation operation becomes possible. Accordingly, the workpiece transfer speed can be increased and the stop position accuracy can be improved, so that the high-speed transfer performance of the transfer robot can be stably improved as a whole.

  Embodiments of a transfer robot and a transfer method according to the present invention will be described below with reference to the drawings.

  FIG. 1 is a perspective view for explaining an embodiment of a transfer robot according to the present invention.

  FIG. 1 shows a state in which the transfer robot 1a is waiting, and a first drive shaft 14 serving as a rotation center is provided at the center of the body part 2 indicated by a dotted line of the transfer robot 1a. A first arm 11 that is rotatably supported in a horizontal plane is provided at the upper end of one drive shaft 14. The first arm 11 has a shape in which both wings are bent by bending around the first drive shaft 14.

  A first drive source 16 for rotating the first drive shaft 14 is directly connected to the lower side of the first drive shaft 14, and is driven by the first drive source 16 to the first drive shaft 14. A force is applied, and the first arm 11 is rotated.

  Above both ends of the first arm 11, second and third drive shafts 9a and 9b whose outer circumferences are covered with support cylinders 10a and 10b are erected in the vertical direction. Further, second and third arms 6a and 6b that are rotatably supported in a horizontal plane with the drive shafts 9a and 9b as the rotation center are provided at the upper ends of the drive shafts 9a and 9b, respectively. . The lengths of the second and third drive shafts 9a and 9b are different, and the second and third arms 6a and 6b are arranged so as not to interfere with each other. In the present embodiment, the second arm 6a is disposed on the upper side and the third arm 6b is disposed on the lower side.

  Workpiece support shafts 4a and 4b are provided at substantially distal ends of the second and third arms 6a and 6b. The length (interaxial distance) between the second drive shaft 9a and the workpiece support shaft 4a is equal to the length between the second drive shaft 9a and the first drive shaft 14. Similarly, the length of the third drive shaft 9b and the work support shaft 4b is equal to the length of the third drive shaft 9b and the first drive shaft 14.

  Work support portions 3a and 3b that are rotatably supported in a horizontal plane with the support shafts 4a and 4b as rotation centers are provided. The work support portions 3a and 3b are arranged at different heights so as not to interfere with each other. In this embodiment, the work support part 3a is arranged on the upper side and the work support part 3b is arranged on the lower side. Therefore, when the workpiece support portion 3a and the workpiece support portion 3b are projected onto a plane, the projections can be reciprocated on the same straight line. In addition, adjustment in the height direction (hereinafter referred to as the Z-axis direction) of the workpiece support portion in FIG. 1 is performed using a Z-axis vertical mechanism (not shown).

  A pulley 5 a is fixed to the work support shaft 4 a, and a pulley 8 a is fixed to the support cylinder 10 a connected to the first arm 11. The pulley 5a and the pulley 8a are connected via a timing belt 7a. Similarly, a pulley 5b is fixed to the workpiece support shaft 4b, and a pulley 8b is fixed to the support cylinder 10b connected to the first arm 11. The pulley 5b and the pulley 8b are connected via a timing belt 7b. The work support portions 3a and 3b are rotated by rotating the pulleys 5a and 5b via the timing belt and rotating the support shafts 4a and 4b connected thereto.

  The second drive source 15 a is provided on the lower surface side of the first arm 11 at a substantially central portion between the second drive shaft 9 a and the first drive shaft 14.

  The rotation shaft of the second drive source 15a is arranged so as to protrude vertically upward on the upper surface side of the first arm 11, and a pulley 17a is provided at the tip thereof. A pulley 12a is also provided at the lower end of the second drive shaft 9a, and the pulley 17a and the pulley 12a are connected by a timing belt 13a. When the second drive source 15a rotates, the drive shaft 9a rotates through the timing belt 13a, and the second arm 6a rotates through the drive shaft 9a.

  Similarly, the third drive source 15 b is provided on the lower surface side of the first arm 11 at a substantially central portion between the third drive shaft 9 b and the first drive shaft 14.

  The rotation shaft of the drive source 15b is arranged so as to protrude vertically upward on the upper surface side of the first arm 11, and a pulley 17b is provided at the tip thereof. A pulley 12b is also provided at the lower end of the third drive shaft 9b, and the pulley 17b and the pulley 12b are connected by a timing belt 13b. When the third drive source 15b rotates, the drive shaft 9b rotates via the timing belt 13b, and further, the third arm 6b rotates via the drive shaft 9b.

  According to the transport robot 1a having the above-described configuration, the drive source 15a is disposed at substantially the center between the first drive shaft 14 and the second drive shaft 9a, and the drive source 15b is provided with the first drive shaft 14 and the second drive shaft. Since the shaft 9b is arranged at substantially the center, the rotational moment of the first arm 11 is smaller than in the case where the drive source is arranged at both ends of the first arm as in the invention of Patent Document 4. . Therefore, the first arm 11 can be rotated at a high speed and can be suddenly stopped at a stop position with a predetermined accuracy.

  Also, since the drive sources 15a, 15b and the second and third drive shafts 9a, 9b are connected by belt-pulley transmission means having a length shorter than the conventional length, the second and third arms It is possible to reduce the delay in the rotation operations 6a and 6b and improve the stop position accuracy.

  In the case of the present embodiment, when the first arm 11 is rotated, the work support portions 3 a and 3 b are folded so as to overlap each other on the body portion 2, thereby turning the first arm 11. And the area occupied by rotation can be reduced. As a result, the rotational moment of the first arm 11 is reduced, and rotation in a narrow space (for example, in a clean booth containing the substrate storage cassette and the transfer robot of the present invention) is facilitated.

  As described above, the transfer robot 1a according to the present invention improves the high-speed rotation performance and stop position accuracy of the first arm 11, and at the same time improves the rotation operation performance of the second and third arms 6a and 6b. As a whole, the transfer performance of the transfer robot 1a is improved. Further, the first arm 11 can be easily rotated in a narrow space.

  In the case of the present embodiment, the first arm 11 has a length (inter-axis distance) from the second drive shaft 9a to the first drive shaft 14 and a third drive shaft 9b to the first drive shaft 14. Are preferably equal, but the lengths may be different.

  In the present embodiment, the first arm 11 is bent around the first drive shaft 14, but the second drive shaft 9a, the first drive shaft 14, and the third drive shaft 9b are connected to each other. The connecting line may be linear. Although the bending angle of the first arm 11 is arbitrary, when the workpiece is placed on the workpiece support portion 3a and the workpiece support portion 3b, the center of gravity of each workpiece is the rotation center of the first arm 11. It is preferable that the first drive shaft 14 is arranged vertically.

  In FIG. 1, the workpiece support 3a is connected to the upper end of the second arm 6a, but the workpiece support 3a may be suspended below the distal end of the second arm 6a by the support shaft 4a. As the distance between the workpiece support portion 3a and the workpiece support portion 3b becomes narrower, the time for moving up and down the Z-axis becomes shorter, so that the throughput increases. Also, if the distance between the work support portions 3a and 3b is adjusted to the height of the shelf of the substrate storage cassette, the next substrate can be taken out or stored without changing the Z-axis position. Increases throughput. The same applies to the second and third embodiments described below.

In addition, the position where the second and third drive sources 15a and 15b are provided is located below the first arm 11 in this embodiment, but may be provided above the first arm 11 depending on circumstances.

  In the first embodiment, the drive source 15a is substantially at the center of the first drive shaft 14 and the second drive shaft 9a, and the drive source 15b is approximately the first drive shaft 14 and the second drive shaft 9b. Centered. However, the positions of the drive source 15a and the drive source 15b are not limited to the center, and the drive source is set to a suitable position in consideration of the weight of the drive source, the magnitude of the rotational moment, the length of the transmission belt, and the like. Can be arranged. In order to reduce the rotational moment of the first arm 11, the second and third drive sources 15 a and 15 b are preferably arranged at positions closer to the first drive shaft 14.

  In the present invention, in order to transport the workpiece in the vertical direction, for example, a known lifting mechanism such as a vertically-arranged ball screw lifting mechanism, a vertical rotation type bending mechanism, etc. can be installed, and the workpiece can move horizontally. It may be equipped with a horizontal movement mechanism.

  In the first embodiment, the transport performance is improved by reducing the rotational moment of the first arm 11 provided in the transport robot 1a. However, the rotational operation performance of the second and third arms 6a and 6b is further improved. The conveyance performance can also be improved.

  FIG. 2 is a perspective view for explaining a second embodiment of the transfer robot according to the present invention.

  In FIG. 2, the basic structure of the transfer robot 1b is substantially the same as that of the first embodiment, and parts having common functions are given the same numbers. The transfer robot 1b is significantly different from the transfer robot 1a in that the rotational power of the drive sources 15a and 15b is applied to the second and third drive shafts 9a and 9b via the reduction gears.

  As shown in FIG. 2, the second drive source 15 a is provided at a substantially central portion between the second drive shaft 9 a and the first drive shaft 14 on the lower surface side of the first arm 11. Unlike the case of the first embodiment, the rotation shaft of the drive source 15a is arranged so as to protrude vertically downward at the lower end portion, and a pulley 17a is provided at the tip portion thereof. Further, the speed reducer 19a is provided on the lower surface side of the first arm 11 in such a manner that the speed reducer 19a is directly connected to the lower end portion of the second drive shaft 9a. A pulley 20a is provided at the tip of the rotating shaft that protrudes vertically downward from the lower end of the speed reducer 19a. The pulley 17a and the pulley 20a are connected by a timing belt 13a.

  As the second drive source 15a rotates, the speed reducer 19a rotates via the timing belt 13a, and the second arm 6a rotates via the drive shaft 9a directly connected to the speed reducer 19a. To do.

  Similarly, the third drive source 15 b is provided on the lower surface side of the first arm 11 at a substantially central portion between the third drive shaft 9 b and the first drive shaft 14. Unlike the case of the first embodiment, the rotation shaft of the drive source 15b is arranged so as to protrude vertically downward at the lower end portion, and a pulley 17b is provided at the tip portion. Further, the speed reducer 19b is provided on the lower surface side of the first arm 11 in a mode in which the speed reducer 19b is directly connected to the lower end portion of the third drive shaft 9b. A pulley 20b is provided at the tip of the rotating shaft that protrudes vertically downward from the lower end of the speed reducer 19b. The pulley 17b and the pulley 20b are connected by a timing belt 13b.

  As the third drive source 15b rotates, the speed reducer 19b rotates via the timing belt 13b, and the third arm 6b rotates via the drive shaft 9b directly connected to the speed reducer 19b. To do.

  According to the transfer robot 1b of the present embodiment, the speed reducers 19a and 19b are directly connected to the second and third drive shafts 9a and 9b, respectively, so that the torque of the second and third drive shafts 9a and 9b is increased. . Therefore, the second and third drive shafts 9a and 9b can be stably rotated at a high speed and stopped with stop position accuracy. As a result, the rotational operation performance of the second and third arms 6a and 6b can be improved, so that the high-speed transport performance and the rotational position accuracy of the transport robot 1b can be improved.

  In the case of the second embodiment, even if the weight is smaller than that of the drive sources 15a and 15b, the reduction gears 19a and 19b are provided at both ends of the first arm 11, so that the rotational moment of the first arm 11 is implemented. It becomes larger than the case of Example 1, and the rotational performance of the first arm 11 is lowered. On the other hand, since a large torque is given to the reduction gear, the rotational operation performance of the second and third arms 6a and 6b can be further improved.

  As described above, the transfer robot 1a according to the first embodiment and the transfer robot 1b according to the second embodiment have features. In practice, the transfer robot 1a and the transfer robot 1b can be appropriately selected and used according to various substrate transfer modes. For example, when the second and third arms 6a and 6b are frequently used for loading and unloading the substrate, the substrate can be transferred at a higher speed by using the transfer robot 1b.

  The transport robot is provided with a plurality of signal or drive electrical wiring and vacuum piping for substrate adsorption. The electrical wiring and piping around the drive shaft, which rotates at high speed, is accompanied by rotation. It is easily damaged because it is repeatedly deformed. Therefore, it is required to improve the transport performance of the transport robot and at the same time improve the durability of the electrical wiring and piping.

  FIG. 3 is a conceptual diagram including a partially cutaway cross-sectional view for explaining the third embodiment.

  FIG. 4 is a partially cutaway cross-sectional view for further explaining the third embodiment.

  In FIG. 3, the configuration of the transfer robot 1c is basically the same as the configuration of the transfer robot 1b. The difference is that a speed reducer 26 is directly connected to the lower part of the first drive shaft 11, and the speed reducer 26 is connected to the first drive source 16 via a timing belt 27.

  In FIG. 3, the central portions of the first drive shaft 14, the second drive shaft 9a, the third drive shaft 9b, the speed reducers 19a and 19b, and the speed reducer 26 are all hollow. Moreover, the electric wiring and piping of the transfer robot 1c are bundled as bundled wires 21a and 21b.

  The bundled wire 21a is drawn rightward in the drawing from the upper end of the hollow portion of the first drive shaft 14, and passes through the hollow portion from below the speed reducer 19a and the second drive shaft 9a directly connected to the speed reducer 19a. , And led up to the upper side of the drive shaft 9a. Furthermore, the bundled wire 21a is guided to the workpiece support portion 3a side.

  Similarly, the bundled wire 21b is pulled out from the upper end of the hollow portion of the first drive shaft 14 in the left direction in the figure, and the hollow portion from below the third drive shaft 9b directly connected to the speed reducer 19b and the speed reducer 19b. Is led to the upper side of the drive shaft 9b. Further, the bundled wire 21b is guided to the workpiece support portion 3b side.

  Further, a wiring case 22 is provided above the first drive source 16 inside the body portion 2. The wiring case 22 accommodates a part of the wiring to be communicated with the upper side of the body part 2, and can guide the wiring to the upper part of the body part 2.

  4A is a cross-sectional view taken along line AA of the wiring case 22 in FIG.

In FIG. 4A, the wiring case 22 is disposed below the first drive shaft 14. A wiring case drive shaft 23 is formed in a region below the first drive shaft 14 so as to partially share the first drive shaft 14, and the drive shaft 23 is formed at the center of the wiring case 22. Has been placed.
The wiring guided from above the first drive shaft 14 to the lower end of the wiring case drive shaft 23 through the hollow portion is drawn out and fixed to the fixing portion 24 on the outer surface of the wiring case drive shaft 23. . Further, the wiring is formed in a spiral shape with a gap from the fixing portion 24, further led to the outside of the wiring case 22, and fixed to the fixing portion 25 on the outer surface of the wiring case 22.

  As a result, the spiral wiring in the wiring case 22 spreads around the support shaft 23 or wraps around each time the first drive shaft 14 rotates left and right. Therefore, even if the first drive shaft 14 is rotated at a high speed, the spiral wiring does not cause abrupt deformation, so that damage to the wiring around the first drive shaft 14 can be reduced. . In addition, a part of the wiring and piping can be guided through the hollow portion of the first drive shaft 11 and below the body portion 2.

  FIG. 4B is a partially cutaway cross-sectional view of the third drive shaft 9b in part B of FIG.

  In FIG. 4B, the central portion of the third drive shaft 9b covered with the support cylinder 10b is hollow, and the central portion of the speed reducer 19b is also hollow. The bundled wire 21b is guided upward from the lower side of the drawing so as to penetrate the hollow portion of the speed reducer 19b and the hollow portion of the drive shaft 9b. Therefore, even if the third drive shaft 9b is rotated at a high speed, the bundled wire 21b accommodated in the hollow portion does not particularly deform rapidly.

  As described above, according to the third embodiment, the wiring and piping arranged around the drive shaft are avoided from being damaged due to the high-speed rotation operation of the drive shaft. Can be used.

  Below, the Example of the conveyance method using the conveyance robot of this invention is described.

  In the transfer robot 1a of the first embodiment, the first arm 11 and the second arm 6a, the second arm 6a and the work support portion 3a are used to move the work mounted on the work support portion 3a to the maximum extent. The bending angles of the first arm 11 and the third arm 6b, and the third arm 6b and the work support portion 3b may be 180 degrees (in the opposite direction). The bending angle here is an angle that determines the relative position of the arm and the arm or the arm and the workpiece. A bending angle of 180 degrees is an arrangement state in which they are opposite to each other starting from a shared axis, and a bending angle of 0 degrees is an arrangement state in which they overlap each other.

  However, in practice, it is more preferable that the respective bending angles are in the range of up to about 175 degrees, preferably up to 170 degrees. Further, the two bending directions may be the same direction or may be opposite to each other, but the same bending angle is preferable because the latter can move the workpiece further to the far side. .

  According to the conveying method of conveying the workpiece at the bending angle, when the arms and the workpiece are returned to the position of the previous step in the next step, for example, a smooth rotation operation can be started. Accordingly, the workpiece transfer speed can be increased and the stop position accuracy can be improved, so that the high-speed transfer performance of the transfer robot can be stably improved as a whole.

  In the present embodiment, the case where the transfer robot 1a is used has been described, but the transfer method of the present invention can be applied to other transfer robots.

  The present invention can be used not only for manufacturing a semiconductor substrate or a liquid crystal display substrate, but can also be applied to a transfer device with a high-speed rotation operation.

It is a perspective view for demonstrating the 1st conveyance robot which concerns on this invention. It is a perspective view for demonstrating the 2nd conveyance robot which concerns on this invention. It is a conceptual diagram for demonstrating the Example which made the drive shaft hollow in the conveyance robot which concerns on this invention. It is sectional drawing for demonstrating the 3rd drive shaft formed in the hollow which concerns on this invention. It is a perspective view of the articulated conveyance apparatus proposed conventionally.

Explanation of symbols

1a, 1b, 1c Transport robot 2 Body 6a Second arm 6b Third arm 9a Second drive shaft 9b Third drive shaft 10a, 10b Support cylinder 11 First arm 12a, 12b Pulley 13a, 13b Timing Belt 14 1st drive shaft 15a 2nd drive source 15b 3rd drive source 16 1st drive source 17a, 17b Pulley 18a, 18b Shaft 19a, 19b Reducer 20a, 20b Pulley 21a, 21b Bundle wire 22 Wiring case 23 Wiring case drive shaft 26 Reducer

Claims (5)

A first arm (11) provided with a first drive shaft (14) in a substantially central portion and supported so as to be rotatable in a horizontal plane with the first drive shaft (14) as a rotation center. ,
Second and third drive shafts (9a, 9b) are provided at substantially both ends of the first arm (11), and the second and third drive shafts (9a, 9b) are used as pivot centers. Second and third arms (6a, 6b) supported rotatably in a horizontal plane;
Work support portions (3a, 3b) supported so as to be rotatable in a horizontal plane with the substantially distal ends of the second and third arms (6a, 6b) as the rotation center are provided,
The second and third drive sources (15a, 15b) for rotating the second and third drive shafts (9a, 9b) are the second drive shaft (9a) and the first drive shaft (14). And a third drive shaft (9b) and a first drive shaft (14).   The second and third speed reducers (19a, 19b) that reduce the drive speed of the second and third drive sources (15a, 15b) are directly connected to the second and third drive shafts (9a, 9b). The transfer robot according to claim 1, wherein the transfer robot is provided.   The transport robot according to claim 1 or 2, wherein the first, second and third drive shafts (14, 9a, 9b) are formed hollow.   A first drive source (16) for driving the first drive shaft (14) is provided in the body part (2), and a part of the wiring led from the outside is provided in the body part (2). And at least the second arm (6a), the third arm (6b), the second drive source (15a), the third drive source (15b), and the work support portions (3a, 3b). The transfer robot according to claim 3, further comprising a wiring case (22) for guiding the wiring to any one of the above. The transfer method using the transfer robot (1a) according to claim 1, wherein the first arm (11), the second arm (6a), the second arm (6a), the work support part (3a), the first arm Each of the arm (11) and the third arm (6b), and the third arm (6b) and the work support portion (3b) have respective bending angles set to 175 degrees or less. Transport method.

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