CN105313113B - Industrial robot - Google Patents
Industrial robot Download PDFInfo
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- CN105313113B CN105313113B CN201510390910.XA CN201510390910A CN105313113B CN 105313113 B CN105313113 B CN 105313113B CN 201510390910 A CN201510390910 A CN 201510390910A CN 105313113 B CN105313113 B CN 105313113B
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Abstract
A kind of industrial robot, the shared arm connected with the base end side for two arms in the way of it can rotate, even in having assembled after industrial robot, also easily an arm individually can be adjusted relative to the gradient of horizontal direction and another arm relative to the gradient of horizontal direction.Industrial robot has：Hand (4,5)；The arm (6) of end side is connected to for hand (4)；The arm (7) of end side is connected to for hand (5)；The shared arm connected for the base end side of arm (6,7) in the way of it can rotate；And for sharing the body that arm is connected in the way of it can rotate.Shared arm has：The basal part being connected with body；For the first arm connecting portion of the base end side connection of arm (6)；And the second arm connecting portion of the base end side connection for arm (7), basal part is fixed in a detachable manner with the first arm connecting portion and the second arm connecting portion of the formation of base part body.
Description
Technical field
The present invention relates to a kind of industrial robot, the industrial robot, which has, rotatably connects two
The shared arm of the base end side of arm.
Background technology
A kind of in the past known industrial robot for carrying semiconductor crystal wafer (referring for example to patent document 1).Patent document 1
Described industrial robot has：First hand and the second hand, first hand and the second hand load half
Semiconductor wafer；First arm, end side of first hand rotatably with first arm is connected；Second arm
Portion, end side of second hand rotatably with second arm is connected；Arm is shared, the shared arm is supplied
The base end side of the base end side of first arm and the second arm is rotatably connected；And body, the body
Portion is rotatably connected for sharing arm.Also, the industrial robot has：First rotating mechanism, described
One rotating mechanism makes the first hand be rotated relative to the first arm, and the first arm is rotated relative to shared arm；And the
Two rotating mechanisms, second rotating mechanism makes the second hand be rotated relative to the second arm, and makes the second arm relative to altogether
Rotated with arm.
First rotating mechanism has：Solid rotary shaft, the solid rotary shaft constitutes a part for body；Motor, institute
Stating motor rotates solid rotary shaft；First belt wheel, the first belt wheel configuration is sharing the inside of arm and is being fixed on solid
The upper end side of rotary shaft；First fixing axle, first fixing axle is fixed on shared arm；Second belt wheel, second belt wheel
The base end side for remained by the first fixing axle and can rotate and be configured at the inside of shared arm, being fixed on the first arm；Band, institute
Band is stated to be set up by the first belt wheel and the second belt wheel；3rd belt wheel, the 3rd belt wheel be fixed on the upper end side of the first fixing axle and
Configuration is in the inside of the first arm；Second fixing axle, second fixing axle is fixed on the end side of the first arm；4th band
Wheel, the 4th belt wheel remained by the second fixing axle can rotate and be configured at the inside of the first arm, be fixed on it is first-hand
Portion；And band, the band is by the 3rd belt wheel and the erection of the 4th belt wheel.
Equally, the second rotating mechanism has：Hollow rotating shaft, the hollow rotating shaft constitutes a part for body；Horse
Reach, the motor rotates hollow rotating shaft；5th belt wheel, the 5th belt wheel configuration is sharing the inside of arm and is being fixed on
The upper end side of hollow rotating shaft；3rd fixing axle, the 3rd fixing axle is fixed on shared arm；6th belt wheel, the described 6th
Belt wheel is remained the base end side that can be rotated and be configured at the inside of shared arm, be fixed on the second arm by the 3rd fixing axle；
Band, the band is set up by the 5th belt wheel and the 6th belt wheel；7th belt wheel, the 7th belt wheel is fixed on the upper end of the second fixing axle
Side and the inside for being configured at the second arm；4th fixing axle, the 4th fixing axle is fixed on the end side of the second arm；8th
Belt wheel, the 8th belt wheel is remained by the 4th fixing axle and can rotate and be configured at the inside of the second arm, be fixed on second
Hand；And band, the band is by the 7th belt wheel and the erection of the 8th belt wheel.
Patent document 1：International Publication No. 2009/028178
In the industrial robot described in patent document 1, the second band of the base end side due to being fixed on the first arm
The first fixing axle that wheel is fixed in shared arm is remained and can rotated, therefore after industrial robot has been assembled, can
Gradient of the arm relative to horizontal direction is shared by adjustment, to adjust gradient of first arm relative to horizontal direction.
Also, in the industrial robot, shared arm is fixed in due to being fixed on the 6th belt wheel of base end side of the second arm
The 3rd fixing axle remain and can rotate, therefore after industrial robot has been assembled, adjustment can be passed through and share arm phase
For the gradient of horizontal direction, to adjust gradient of second arm relative to horizontal direction.
But, in the industrial robot, because the first fixing axle and the 3rd fixing axle are fixed on shared arm, because
If this first arm of adjustment changes relative to the gradient of horizontal direction, the second arm relative to the gradient of horizontal direction
Become, if the second arm of adjustment is relative to the gradient of horizontal direction, the first arm changes relative to the gradient of horizontal direction
Become.That is, in the industrial robot, it is difficult to after industrial robot has been assembled, to the first arm relative to water
Square to gradient and the second arm individually adjusted relative to the gradient of horizontal direction.
The content of the invention
Therefore, problem of the invention provides following this industrial robot：The industrial robot has to turn
Dynamic mode connects the shared arm of the base end side of the first arm and the base end side of the second arm, industrial even in having assembled
After robot, gradient and the second arm that also can easily to the first arm relative to horizontal direction is relative to level side
To gradient individually adjusted.
In order to solve above-mentioned problem, industrial robot of the invention is characterised by that the industrial robot has：The
One hand and the second hand, first hand and second hand load conveying object；First arm, it is first-hand
End side of the portion rotatably with first arm is connected；Second arm, side of second hand that can rotate
Formula is connected with the end side of second arm；Arm is shared, the shared arm supplies the base end side and second of the first arm
The base end side of arm is rotatably connected；And body, what the body supplied shared arm to rotate
Mode is connected, and shared arm has：Basal part, the basal part is connected with the body；First arm connecting portion, described
One arm connecting portion is connected for the base end side of first arm；And the second arm connecting portion, the second arm connecting portion
For the base end side connection of second arm, basal part, the first arm connecting portion and the second arm coupling part body are formed, the
One arm connecting portion and the second arm connecting portion are fixed on basal part in a detachable manner.
In the industrial robot of the present invention, the basal part that be connected with body, the base end side connection for the first arm
The first arm connecting portion and for the second arm base end side connect the second arm coupling part body formed, the first arm connect
Socket part and the second arm connecting portion are fixed on basal part in a detachable manner.Therefore, in the present invention, in assembling completion
After industry robot, even if by being adjusted to the first arm connecting portion relative to the fixed position of basal part and gradient,
To adjust gradient of first arm relative to horizontal direction, it will not also change inclination of second arm relative to horizontal direction
Degree.Also, after industrial robot has been assembled, even if passing through the fixed bit to the second arm connecting portion relative to basal part
Put and be adjusted with gradient, to adjust gradient of second arm relative to horizontal direction, will not also change the first arm phase
For the gradient of horizontal direction.Therefore, in the present invention, also can be easily even in having assembled after industrial robot
Gradient and the second arm to the first arm relative to horizontal direction are individually adjusted relative to the gradient of horizontal direction
It is whole.
In the present invention, for example, basal part is formed as shape when from above-below direction in elongated rectangular
The shape that rectangular-shape, the first arm connecting portion and the second arm connecting portion are formed as when from above-below direction is in substantially
The bulk of L-shaped, when from above-below direction, the first arm connecting portion is fixed on one end of the length direction of basal part, second
Arm connecting portion is fixed on the other end of the length direction of basal part.If the first arm connection when from above-below direction
Portion and the generally L-shaped shape of shape of the second arm connecting portion, then in the situation using the integrally manufactured shared arm of machining
Under, it is possible to exist for manufacturing the problem of size of the material needed for shared arm becomes big, but in the present invention, due to base
Bottom, the first arm connecting portion and the second arm coupling part body are formed, therefore are sharing arm using machining manufacture
When, it can reduce for manufacturing the material needed for shared arm.Therefore, it is possible to share arm with low cost manufacture.
In the present invention, industrial robot for example with：First motor, first motor make the first hand relative to
First arm is rotated, and the first arm is rotated relative to shared arm；And second motor, second motor makes second-hand
Portion is rotated relative to the second arm, and the second arm is rotated relative to shared arm, and the first motor is fixed on the first arm company
Socket part, the second motor is fixed on the second arm connecting portion.In this case, with the first motor and the second motor configurations at this
The situation of the inside in body portion is compared, and can simplify the structure of the Poewr transmission mechanism of the first motor and the power of the second motor is passed
Pass the structure of mechanism.
Also, in such a situation it is preferred to industrial robot has：First reductor, first reducing gear into
As the coupling part between the first arm and shared arm the first joint portion and be connected with the first motor；And second slow down
Machine, second reducing gear is into the second joint portion as the coupling part between the second arm and shared arm and with second
Motor is connected, when from above-below direction, the axle center of the first motor and the axis deviation of the first reductor, the axle of the second motor
The axis deviation of the heart and the second reductor.If so constituted, with the first motor and the situation of the first reductor arranged coaxial
Compare, it is possible to increase the configuration free degree of the first motor.Also, with the second motor and the situation phase of the second reductor arranged coaxial
Than, it is possible to increase the configuration free degree of the second motor.Also, if so constituted, then the first reductor and the second reductor be such as
Fruit is the hollow reducer for being centrally formed with through hole in their radial direction, then can be by air hose or distribution cable in insertion
Pass through in hole.
In the present invention, when from above-below direction, if by with being formed as the short of elongated rectangular basal part
Side is parallel and straight line via shared arm relative to the center of rotation of body is as imaginary line, then from above-below direction
During observation, such as the first arm connecting portion is formed as symmetrical relative to imaginary line line with the second arm connecting portion.
In the present invention, it is preferred to which industrial robot has：First motor, first motor make the first hand relative to
First arm is rotated, and the first arm is rotated relative to shared arm；And second motor, second motor makes second-hand
Portion is rotated relative to the second arm, and the second arm is rotated relative to shared arm, and the first motor is fixed on the first arm company
Socket part, the second motor is fixed on the second arm connecting portion, at least one of at least a portion of the first motor and the second motor
Divide and protruded from the lower surface of shared arm towards downside, and when from above-below direction, the first motor and the second motor
Configure than position of the body by the outer circumferential side of body.
If so constituted, because the first motor is fixed on the first arm connecting portion, the second motor is fixed on the second arm
Portion's connecting portion, therefore compared with the first motor and the second motor configurations are in the situation of the inside of body, body can be reduced
The height in portion.Also, if so constitute, then due at least a portion and at least a portion of the second motor of the first motor
Protruded from the lower surface of shared arm towards downside, therefore common arm is integrally provided in the first motor entirety and the second motor
The situation of the inside in portion is compared, and can reduce the height of shared arm.If moreover, so constituted, due to from upper and lower
To during observation, the first motor and the second motor configurations are than position of the body by the outer circumferential side of body, therefore with first
Motor and the second motor, can be by between body and shared arms in the vertical direction compared with the overlapping situation of body
Distance in the vertical direction reduces.The minimum altitude that can pass through therefore, it is possible to reduce the first hand and the second hand (passes through
Line).
In the present invention, it is preferred to when from above-below direction, by the first arm relative to shared arm center of rotation,
Share arm linear relative to what the center of rotation of shared arm was sequentially connected relative to the center of rotation of body, the second arm
As V words., can be overlapping in the vertical direction by the first hand and the second hand if so constituted.Therefore, by first
Hand moves into the direction for the action for taking out of conveying object and the direction for the action for taking out of conveying object is moved into by the second hand
In the case of for equidirectional, for example, after the release of conveying object is taken out of by the first hand, even if making to share arm
Do not rotated relative to body, can also start to move into the action of conveying object by the second hand.The result is that can shorten
The productive temp time of industrial robot.
Invention effect
As described above, in the present invention, industrial robot is with the base end side and the second arm for supplying the first arm
The shared arm that base end side is rotatably connected, also can be easily even in having assembled after industrial robot
Gradient and the second arm to the first arm relative to horizontal direction are individually adjusted relative to the gradient of horizontal direction
It is whole.
Brief description of the drawings
Fig. 1 is the stereogram of the industrial robot involved by embodiments of the present invention.
Fig. 2 is the top view of the industrial robot shown in Fig. 1.
Fig. 3 is the front view of the industrial robot shown in Fig. 1.
Fig. 4 is the sectional view for illustrating the shared arm shown in Fig. 1 and the structure of drive mechanism.
Fig. 5 is the top view of the shared arm shown in Fig. 1.
(symbol description)
1 robot (industrial robot)
4 hands (the first hand)
5 hands (the second hand)
6 arms (the first arm)
7 arms (the second arm)
8 share arm
9 bodies
14 joint portions (the first joint portion)
15 joint portions (second joint portion)
20 basal parts
21 first arm connecting portions
22 second arm connecting portions
27 motors (the first motor)
28 reductors (the first reductor)
29 motors (the second motor)
30 reductors (the second reductor)
C1 shares the center of rotation of arm
The center of rotation of the arms of C2 first
The center of rotation of the arms of C3 second
L1 imaginary lines
The length direction of X basal parts
Embodiment
Hereinafter, embodiments of the present invention are illustrated referring to the drawings.
(schematic configuration of industrial robot)
Fig. 1 is the stereogram of the industrial robot 1 involved by embodiments of the present invention.Fig. 2 is the industry shown in Fig. 1
With the top view of robot 1.Fig. 3 is the front view of the industrial robot 1 shown in Fig. 1.
The industrial robot 1 (hereinafter referred to as " robot 1 ") of present embodiment is for carrying as conveying object
The robot of semiconductor crystal wafer (omitting diagram), the robot 1, which is assembled into the manufacture system for the semiconductor for omitting diagram, to be made
With.The robot 1 has：Two hands 4,5, two hands 4,5 load semiconductor crystal wafer；Arm 6, hand 4 is with can
The mode of rotation is connected with the end side of the arm 6；Arm 7, the end of hand 5 rotatably with the arm 7
Side is connected；Arm 8 is shared, the shared arm 8 is rotatably connected for the base end side of arm 6,7；And this
Body portion 9, the body 9 is rotatably connected for sharing arm 8.
Hand 4 is configured in the position than hand 5 on the lower.Arm 6 is configured in the position than hand 4 on the lower.Arm 7 is matched somebody with somebody
Put in the position more upper than hand 5.Arm 8 is shared to configure in the position than arm 6 on the lower.Also, arm 8 is shared to configure
In the position more upper than body 9.The hand 4 of present embodiment is the first hand, and hand 5 is the second hand, and arm 6 is the
One arm, arm 7 is the second arm.
Body 9 is shaped generally as cylindrical shape.The body 9 has：Upper bodies portion 12；And lower body portion 13,
Upper bodies portion 12 is remained and can moved up and down by the lower body portion 13.Being configured with the inside in upper bodies portion 12 makes
Share the rotating mechanism (omitting diagram) of the rotation of arm 8 and make to share arm 8 and the lifting of the lifting of rotating mechanism one
Mechanism (omits diagram).The elevating mechanism that being configured with the inside in lower body portion 13 lifts upper bodies portion 12 (saves sketch map
Show).
The shape that shared arm 8 is formed as when from above-below direction is in elongated generally rectangular bulk.And
Share arm 8 and be formed as hollow form.Outer path length of the length of shared arm 8 when from above-below direction than body 9.Arm
Portion 6,7 is formed as bulk of shape when from above-below direction in the thickness of thin of elongated oblong shape and above-below direction.
In the present embodiment, the length of arm 6 and the equal length of arm 7.Also, arm 6,7 is formed as hollow form.This embodiment party
The arm 6,7 and shared arm 8 of formula are formed by machining.
The base end side of arm 6 is rotatably connected to a side of shared arm 8, and the shared arm 8 exists
Shape when from above-below direction is in elongated generally rectangular, and the base end side of arm 7 is rotatably connected to
Share the another side of arm 8.Coupling part between arm 6 and shared arm 8 turns into joint portion 14.Arm 7 and common arm
Coupling part between portion 8 turns into joint portion 15.The joint portion 14 of present embodiment is the first joint portion, and joint portion 15 is second
Joint portion.
Also, robot 1 has：Drive mechanism 16 (reference picture 4), the drive mechanism 16 makes hand 4 relative to arm 6
Rotate and arm 6 is rotated relative to shared arm 8；And drive mechanism 17 (reference picture 4), the drive mechanism 17 makes hand
5 rotate relative to arm 7 and arm 7 is rotated relative to shared arm 8.Hereinafter, the concrete structure to shared arm 8 and drive
The structure of motivation structure 16,17 is illustrated.
(structure for sharing arm and drive mechanism)
Fig. 4 is the sectional view for illustrating the shared arm 8 shown in Fig. 1 and the structure of drive mechanism 16,17.Fig. 5 is
The top view of shared arm 8 shown in Fig. 1.
Sharing arm 8 has：Basal part 20, the basal part 20 is connected with body 9；First arm connecting portion 21, institute
The base end side that the first arm connecting portion 21 is stated for arm 6 is connected；And the second arm connecting portion 22, the second arm connecting portion
22 supply the base end side of arm 7 to connect.Basal part 20, the first arm connecting portion 21 and the split of the second arm connecting portion 22 are formed,
It is integrated by the way that basal part 20, the first arm connecting portion 21 and the second arm connecting portion 22 are fixed, so as to constitute altogether
With arm 8.In the present embodiment, the first arm connecting portion 21 and the second arm connecting portion 22 are solid in a detachable manner
Due to basal part 20.Also, formed as described above, sharing arm 8 by machining, the basal part 20 of the shared arm 8 of composition,
First arm connecting portion 21 and the second arm connecting portion 22 are formed by machining.
The shape that basal part 20 is formed as when from above-below direction is in the thickness of elongated rectangle and above-below direction
Thin bulk.The output shaft of hollow reducer is fixed with the center of basal part 20, the hollow reducer constitutes configuration upper
The rotating mechanism of the inside of side body 12.If as shown in figure 5, shape during with from above-below direction is in elongated rectangular
The length direction (direction parallel with the long side of basal part 20, Fig. 5 X-direction) of the basal part 20 of shape be left and right directions, with
The short side direction (direction parallel with the short side of basal part 20, Fig. 5 Y-direction) of the orthogonal basal part 20 of left and right directions is front and rear
Direction, then the two ends of basal part 20 in the lateral direction, which are respectively formed with, is used to fix the first arm connecting portion 21 and second
The fixed part 20a of arm connecting portion 22.Fixed part 20a upper surface is than the part in addition to fixed part 20a of basal part 20
Upper surface is low.In addition, in the following description, using Fig. 5 Y1 directions side as " preceding " side, using Y2 directions side as " rear " side.
As shown in figure 5, the first arm connecting portion 21 and the second arm connecting portion 22 are formed as from above-below direction
When the generally L-shaped shape of shape bulk.One end that first arm connecting portion 21 is fixed on the left and right directions of basal part 20, the
The other end that two arm connecting portions 22 are fixed on the left and right directions of basal part 20.Also, as shown in figure 5, from above-below direction
During observation, if will be parallel with fore-and-aft direction and by sharing straight line of the arm 8 relative to the center of rotation C1 of body 9
As imaginary line L1, then when being looked up from upper and lower, the first arm connecting portion 21 is formed as with the second arm connecting portion 22
It is symmetrical relative to imaginary line L1 lines.
As shown in figure 4, substantially cylindric cylinder portion 21a is formed with the first arm connecting portion 21, in the connection of the second arm
Portion 22 is formed with substantially cylindric cylinder portion 22a.A cylinder portion 21a part is protruded than basal part 20 towards downside.Cylinder portion 22a ratios
Basal part 20 is towards upwardly projecting.Also, cylinder portion 21a, 22a a part are protruded than the rear end face of basal part 20 towards rear side,
First arm connecting portion 21 and the second arm connecting portion 22 are as described above, being formed as shape when from above-below direction and being in
The bulk of substantially L-shaped.Also, because a cylinder portion 21a part is protruded towards rear side, cylinder portion 22a is towards upwardly projecting, therefore
Shape when from fore-and-aft direction of first arm connecting portion 21 and the second arm connecting portion 22 also generally L-shaped shape.
Also, it is formed with the first arm connecting portion 21 and the second arm connecting portion 22 and is placed in consolidating for basal part 20
Determine portion 20a fixation by fixed part 21b, 22b.It is being placed in by fixed part 21b, 22b in the state of fixed part 20a, using many
Individual screw 24 is fixed on fixed part 20a in a detachable manner.Also, led between fixed part 21b, 22b and fixed part 20a
Alignment pin 25 is crossed to be positioned (reference picture 4).
(that is, solid in the first arm connecting portion 21 in the state of fixed part 20a is fixed in by fixed part 21b
In the state of basal part 20), in the vertical direction, the upper surface of the first arm connecting portion 21 and the upper surface of basal part 20
It is substantially uniform.Also, it is fixed in by fixed part 21b in the state of fixed part 20a, in the longitudinal direction, the first arm connects
The front end face of the front end face of socket part 21 and basal part 20 is substantially uniform, by the rear end of fixed part 21b rear end face and basal part 20
Face is substantially uniform.
Equally, (that is, in the second arm connecting portion in the state of fixed part 20a is fixed in by fixed part 22b
22 are fixed in the state of basal part 20), in the vertical direction, under the lower surface and basal part 20 of the second arm connecting portion 22
Surface is substantially uniform.Also, it is fixed in by fixed part 22b in the state of fixed part 20a, in the longitudinal direction, the second arm
The front end face of the front end face of portion's connecting portion 22 and basal part 20 is substantially uniform, by fixed part 22b rear end face and basal part 20
Rear end face is substantially uniform.
Drive mechanism 16 has：Motor 27, the motor 27 make hand 4 rotated relative to arm 6 and make arm 6 relative to
Arm 8 is shared to rotate；And reductor 28, the reductor 28 is connected with motor 27.Drive mechanism 17 has：Motor 29, institute
Stating motor 29 makes hand 5 be rotated relative to arm 7 and arm 7 is rotated relative to shared arm 8；And reductor 30, it is described
Reductor 30 is connected with motor 29.Motor 29 is the motor with the similar shape of motor 27 and same specification.Reductor 30 is and reductor
The reductor of 28 similar shapes and same specification.The motor 27 of present embodiment is the first motor, and motor 29 is the second motor.Also,
Reductor 28 is the first reductor, and reductor 30 is the second reductor.
Reductor 28 is the hollow reducer for being centrally formed with through hole in its radial direction.The reductor 28 with its axle center with
The mode that the cylinder portion 21a of first arm connecting portion 21 axle center is consistent is configured.The axle center of reductor 28 is with arm 6 relative to shared
The center of rotation C2 of arm 8 is consistent, and reductor 28 constitutes joint portion 14.Motor 27 is fixed on the first arm connecting portion 21.Also,
Motor 27 is configured in the position than the forward side of reductor 28.That is, when from above-below direction, the axle center of motor 27 with
The axis deviation of reductor 28.Also, the majority of motor 27 is protruded than the lower end of the first arm connecting portion 21 towards downside.
That is, the majority of motor 27 is protruded from the lower surface of shared arm 8 towards downside.Also, seen from above-below direction
When examining, motor 27 is configured in the position for the outer circumferential side that body 9 is leaned on than body 9, as shown in figure 3, motor in the horizontal direction
27 majority is overlapping with body 9.
The output shaft of motor 27 is fixed with belt wheel (omitting diagram) towards upwardly projecting in the output shaft.As shown in figure 4,
Belt wheel 33 is fixed with the lower end side of the input shaft of reductor 28.Belt wheel 33 configures the cylinder portion 21a in the first arm connecting portion 21
Inside.The belt wheel and belt wheel 33 that band (omitting diagram) is fixed in the output shaft of motor 27 are set up.In the output of reductor 28
Axle is fixed with the base end side of arm 6, and the housing of reductor 28 is fixed on a portion 21a inner circumferential side.In the input shaft of reductor 28
Upper end side be fixed with belt wheel 34.Belt wheel 34 is configured in the inside of the base end side of arm 6.Configuration is fixed with hand 4 in arm
The belt wheel (omitting diagram) of the inside of the end side in portion 6.Band 35 is set up by the belt wheel with belt wheel 34.In addition, being fixed on hand 4
The fixing axle that belt wheel is rotatably fixed in the end side of arm 6 is kept.
Reductor 30 is the hollow reducer for being centrally formed with through hole in its radial direction.The reductor 30 with its axle center with
The mode that the cylinder portion 22a of second arm connecting portion 22 axle center is consistent is configured.The axle center of reductor 30 is with arm 7 relative to shared
The center of rotation C3 of arm 8 is consistent, and reductor 30 constitutes joint portion 15.Motor 29 is fixed on the second arm connecting portion 22.Also,
Motor 29 is configured in the position than the forward side of reductor 30.That is, when from above-below direction, the axle center of motor 29 with
The axis deviation of reductor 30.Also, a part for the lower end side of motor 29 is than under the lower end direction of the second arm connecting portion 22
Side is protruded.That is, a part for the lower end side of motor 29 is protruded from the lower surface of shared arm 8 towards downside.Also,
When from above-below direction, motor 29 is configured in the position for the outer circumferential side that body 9 is leaned on than body 9, as shown in figure 3, in water
Square upwards motor 29 lower end side a part it is overlapping with body 9.
The output shaft of motor 29 is fixed with belt wheel (omitting diagram) towards upwardly projecting in the output shaft.As shown in figure 4,
Belt wheel 36 is fixed with the lower end side of the input shaft of reductor 30.Belt wheel 36 configures the cylinder portion 22a in the second arm connecting portion 22
Inside.The belt wheel and belt wheel 36 that band (omitting diagram) is fixed in the output shaft of motor 29 are set up.In the output of reductor 30
Axle is fixed with the base end side of arm 7, and the housing of reductor 30 is fixed on a portion 22a inner circumferential side.In the input shaft of reductor 30
Upper end side be fixed with belt wheel 37.Belt wheel 37 is configured in the inside of the base end side of arm 7.Configuration is fixed with arm 7 in hand 5
End side inside belt wheel (omit diagram).Band 38 is set up by the belt wheel and belt wheel 37.In addition, being fixed on the band of hand 5
The fixing axle that wheel is rotatably fixed in the end side of arm 7 is kept.
In the present embodiment, as shown in figure 5, when from above-below direction, center of rotation C1, center of rotation C2 and
Center of rotation C3 is not configured on the same line.That is, when from above-below direction, by center of rotation C2, rotation
It is linear as V words that heart C1 and center of rotation C3 are sequentially connected.That is, the robot 1 of present embodiment is so-called
Boomerang humanoid robot.Also, in the present embodiment, arm 6,7 end side configuration most rear side in the state of (Fig. 1,
State shown in Fig. 2), hand 4 is completely overlapped in the vertical direction with hand 5.
In addition, as described above, motor 29 is the motor with the similar shape of motor 27 and same specification, reductor 30 is and reductor
The reductor of 28 similar shapes and same specification.Also, each part of the grade of belt wheel 33 of drive mechanism 16 is constituted with constituting drive mechanism
Each part of 17 grade of belt wheel 36 is similar shape and same specification.That is, in the present embodiment, drive mechanism 16 and driving
Mechanism 17 is made up of general part.Also, the drive mechanism 16 in the present embodiment, being made up of general part and driving
Mechanism 17 is configured with the state staggered in the vertical direction.That is, in the present embodiment, drive mechanism 16 and driving machine
Structure 17 is each other by their configuration height of change by generalization.
(main efficacy results of present embodiment)
As described above, in the present embodiment, basal part 20, the first arm connecting portion for sharing arm 8 are constituted
21 and the split of the second arm connecting portion 22 formed, the first arm connecting portion 21 and the second arm connecting portion 22 are can dismount
Mode be fixed on basal part 20.Therefore, in the present embodiment, after robot 1 has been assembled, even if by adjusting the first arm
Portion's connecting portion 21 adjusts gradient of the arm 6 relative to horizontal direction relative to the fixed position of basal part 20 and gradient,
Also gradient of the arm 7 relative to horizontal direction will not be changed.Also, after robot 1 has been assembled, even if passing through adjustment second
Arm connecting portion 22 adjusts inclination of the arm 7 relative to horizontal direction relative to the fixed position of basal part 20 and gradient
Degree, will not also change gradient of the arm 6 relative to horizontal direction.Therefore, in the present embodiment, even in having assembled machine
After people 1, gradient and arm 7 inclining relative to horizontal direction that also can easily to arm 6 relative to horizontal direction
Gradient is individually adjusted.
Also, in the present embodiment, due to basal part 20, the first arm connecting portion 21,22 points of the second arm connecting portion
Body is formed, even if therefore being formed in the way of cylinder portion 21a, 22a a part are protruded than the rear end face of basal part 20 towards rear side
Arm 8 is shared, but as long as the elongated basal part 20 of left and right directions is formed as into rectangular-shape.Therefore, in present embodiment
In, compared with the integrally formed situation of the shared arm 8 manufactured by machining, it can reduce for manufacturing shared arm 8
The size of required material, the result is that the manufacturing cost of shared arm 8 can be reduced.
In the present embodiment, motor 27 is fixed on the first arm connecting portion 21, and motor 29 is fixed on the connection of the second arm
Portion 22.Therefore, in the present embodiment, compared with the configuration of motor 27,29 is in the situation of the inside of body 9, drive can be simplified
The structure of motivation structure 16,17.That is, in the configuration of motor 27,29, it is necessary to share in the case of the inside of body 9
The inside of arm 8 is provided for after the power of motor 27,29 is transmitted in the outside from body 9 in the lateral direction further
The structure of rear side is delivered to, but in the present embodiment, as long as the belt wheel 33,36 for setting the power of transmission motor 27,29 is
Can.Therefore, in the present embodiment, compared with the configuration of motor 27,29 is in the situation of the inside of body 9, driving can be simplified
The structure of mechanism 16,17.
Also, in the present embodiment, because motor 27 is fixed on the first arm connecting portion 21, motor 29 is fixed on second
Arm connecting portion 22, therefore compared with the configuration of motor 27,29 is in the situation of the inside of body 9, the height of body 9 can be reduced
Degree.Also, in the present embodiment, due to motor 27 majority and motor 29 lower end side a part from common arm
The lower surface in portion 8 is protruded towards downside, therefore compared with the situation that motor 27,29 is integrally provided in the inside of shared arm 8, energy
Enough reductions share the height of arm 8.Moreover, in the present embodiment, because when from above-below direction, motor 27,29 is matched somebody with somebody
Put in the position for the outer circumferential side that body 9 is leaned on than body 9, and in the horizontal direction, the majority and motor of motor 27
A part for 29 lower end side is overlapping with body 9, thus with the feelings overlapping with body 9 in the vertical direction of motor 27,29
Condition is compared, and in the vertical direction can be shortened the distance between body 9 and shared arm 8.Therefore, in present embodiment
In, the minimum altitude that hand 4,5 can pass through can be reduced (by line).
In the present embodiment, axle center and the axis deviation of motor 27 of the reductor 28 of joint portion 14 are constituted.Therefore, exist
In present embodiment, compared with the situation of motor 27 and the arranged coaxial of reductor 28, it is possible to increase the configuration free degree of motor 27.
Equally, in the present embodiment, the axle center due to the reductor 30 that constitutes shutdown portion 15 and the axis deviation of motor 29, therefore with
Motor 29 is compared with the situation of the arranged coaxial of reductor 30, it is possible to increase the configuration free degree of motor 29.Also, in this embodiment party
In formula, due to the axis deviation of axle center and the motor 27 of reductor 28, therefore, it is possible to using air hose and distribution cable in
Passed through in the through hole of the reductor 28 of empty reductor.Equally, in the present embodiment, the axle center due to reductor 30 and motor
29 axis deviation, therefore, it is possible to the passing through in the reductor 30 as hollow reducer using the air hose and distribution cable of cooling
Passed through in through hole.
In the present embodiment, hand 4 is configured in the upside of arm 6, and hand 5 is configured in the downside of arm 7.Therefore, exist
In present embodiment, it can prevent arm 6 from interfering with arm 7, and can be between constriction hand 4 and hand 5 in the vertical direction
Interval.Also, in the present embodiment, due to can be between constriction hand 4 and hand 5 in the vertical direction interval, because
This can reduce the minimum altitude that hand 5 of the configuration in the upside of hand 4 can pass through (by line).
In the present embodiment, when from above-below direction, by arm 6 relative to shared arm 8 center of rotation C2,
Arm 8 is shared to be sequentially connected relative to the center of rotation C3 of shared arm 8 relative to center of rotation C1, the arm 7 of body 9
It is linear to turn into V words.Therefore, in the present embodiment, as described above, arm 6,7 end side configuration most rear side state
Under, hand 4 is completely overlapped in the vertical direction with hand 5.Therefore, in the present embodiment, partly lead moving into take out of by hand 4
In the case that the direction of the action of body wafer and the direction for moving into the action for taking out of semiconductor crystal wafer by hand 5 are in equidirectional,
For example after the release of semiconductor crystal wafer is taken out of by hand 4, even if making shared arm 8 not rotated relative to body 9,
The action of semiconductor crystal wafer can be started to be moved into by hand 5.As a result, in the present embodiment, robot 1 can be shortened
Productive temp time.
(other embodiment)
Above-mentioned embodiment is an example of the preferred embodiment of the present invention, but is not limited to this, constant
Various modifications can be implemented in the range of purport more of the invention.
In the above-described embodiment, the first arm connecting portion 21 and the second arm connecting portion 22 are formed as above and below
The generally L-shaped bulk of shape when direction is observed.It can also be the first arm connecting portion 21 and the shape of the second arm connecting portion 22
It is in the bulk of generally rectangular grade as shape when from above-below direction.In this case, such as shape of arm 8 is shared
It is in elongated generally rectangular bulk as shape when from above-below direction.Also, in this case, from upper
During lower direction observation, center of rotation C1, center of rotation C2, center of rotation C3 can also be configured on the same line.Also, common arm
The shape that portion 8 may be alternatively formed to when from above-below direction is in generally V-shaped shape.
In the above-described embodiment, motor 27 is fixed on the first arm connecting portion 21, and motor 29 is fixed on the second arm company
Socket part 22.The configuration of motor 27,29 is may also be in the inside of body 9.Also, in the above-described embodiment, the one of motor 27,29
Partly protruded from the lower surface of shared arm 8 towards downside, but may also be motor 27,29 and be integrally provided in the interior of shared arm 8
Portion.Moreover, in the above-described embodiment, when from above-below direction, the configuration of motor 27,29 is leaning on body 9 than body 9
Outer circumferential side position, but may also be motor 27,29 and configured in mode overlapping with body 9 in the vertical direction.
In the above-described embodiment, arm 6,7 can be also made up of two arms that can mutually rotate.Also, above-mentioned
In embodiment, the first arm connecting portion 21 and the second arm connecting portion 22 are formed as symmetrical relative to imaginary line L1 lines, but the
One arm connecting portion 21 may be alternatively formed to not symmetrical relative to imaginary line L1 lines with the second arm connecting portion 22.Also, above-mentioned
In embodiment, when from above-below direction, the axle center of motor 27 and the axis deviation of reductor 28, but motor 27 is with slowing down
Machine 28 also can arranged coaxial.Equally in the above-described embodiment, when from above-below direction, the axle center of motor 29 and reductor
30 axis deviation, but motor 29 also can arranged coaxial with reductor 30.Also, in the above-described embodiment, removed by robot 1
The conveying object of fortune be semiconductor crystal wafer, but robot 1 can also carry glass substrate of liquid crystal display etc. other carrying
Object.
Claims (7)
1. a kind of industrial robot, it is characterised in that the industrial robot includes：
First hand and the second hand, first hand and second hand load conveying object；
First arm, first hand is rotatably connected to the end side of first arm；
Second arm, second hand is rotatably connected to the end side of second arm；
Arm is shared, the shared arm is for the base end side of first arm and the base end side of second arm with can
The mode of rotation is connected；And
Body, the body is rotatably connected for the shared arm,
The shared arm has：
Basal part, the basal part is connected with the body；
First arm connecting portion, the first arm connecting portion is connected for the base end side of first arm；And
Second arm connecting portion, the second arm connecting portion is connected for the base end side of second arm,
The basal part, the first arm connecting portion and the second arm coupling part body are formed,
The first arm connecting portion and the second arm connecting portion are fixed on the basal part in a detachable manner.
2. industrial robot according to claim 1, it is characterised in that
The shape that the basal part is formed as when from above-below direction is in elongated rectangular rectangular-shape,
The shape that the first arm connecting portion and the second arm connecting portion are formed as when from above-below direction is in
The bulk of substantially L-shaped,
When from above-below direction, the first arm connecting portion is fixed on one end of the length direction of the basal part, institute
State the other end that the second arm connecting portion is fixed on the length direction of the basal part.
3. industrial robot according to claim 2, it is characterised in that
The industrial robot has：
First motor, first motor makes first hand be rotated relative to first arm, and makes first arm
Portion is rotated relative to the shared arm；And
Second motor, second motor makes second hand be rotated relative to second arm, and makes second arm
Portion is rotated relative to the shared arm,
First motor is fixed on the first arm connecting portion, and second motor is fixed on the second arm connection
Portion.
4. industrial robot according to claim 3, it is characterised in that
The industrial robot has：
First reductor, first reducing gear is into being used as the coupling part between first arm and the shared arm
The first joint portion, and be connected with first motor；And
Second reductor, second reducing gear is into being used as the coupling part between second arm and the shared arm
Second joint portion, and be connected with second motor,
When from above-below direction, the axle center of first motor and the axis deviation of first reductor, described second
The axle center of motor and the axis deviation of second reductor.
5. the industrial robot according to any one of claim 2 to 4, it is characterised in that
When from above-below direction, if by parallel with the short side for being formed as the elongated rectangular basal part and
Via the straight line of the center of rotation of the shared arm relative to the body as imaginary line,
Then when from above-below direction, the first arm connecting portion is formed as relative to institute with the second arm connecting portion
State imaginary line line symmetrical.
6. the industrial robot according to any one of Claims 1-4, it is characterised in that
The industrial robot has：
First motor, first motor makes first hand be rotated relative to first arm, and makes first arm
Portion is rotated relative to the shared arm；And
Second motor, second motor makes second hand be rotated relative to second arm, and makes second arm
Portion is rotated relative to the shared arm,
First motor is fixed on the first arm connecting portion, and second motor is fixed on the second arm connection
Portion,
The following table of at least a portion of first motor and at least a portion of second motor from the shared arm
Protruded facing to downside, and when from above-below direction, first motor and second motor configurations are than institute
State position of the body by the outer circumferential side of the body.
7. the industrial robot according to any one of Claims 1-4, it is characterised in that
When from above-below direction, center of rotation, the common arm by first arm relative to the shared arm
Portion is sequentially connected relative to the center of rotation of the body, second arm relative to the center of rotation of the shared arm
It is linear turn into V words.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014142529A JP6606319B2 (en) | 2014-07-10 | 2014-07-10 | Industrial robot |
| JP2014-142529 | 2014-07-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105313113A CN105313113A (en) | 2016-02-10 |
| CN105313113B true CN105313113B (en) | 2017-09-01 |
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ID=55232138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510390910.XA Active CN105313113B (en) | 2014-07-10 | 2015-07-06 | Industrial robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6606319B2 (en) |
| KR (1) | KR102339973B1 (en) |
| CN (1) | CN105313113B (en) |
| TW (1) | TWI641459B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022066842A (en) * | 2020-10-19 | 2022-05-02 | 日本電産サンキョー株式会社 | Industrial robot |
| JP2022083199A (en) * | 2020-11-24 | 2022-06-03 | 日本電産サンキョー株式会社 | Industrial robot |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100586665C (en) * | 2004-10-04 | 2010-02-03 | 本田技研工业株式会社 | Processing and transferring apparatus |
| CN101790441A (en) * | 2007-08-31 | 2010-07-28 | 日本电产三协株式会社 | Industrial robot |
| CN202781188U (en) * | 2012-09-27 | 2013-03-13 | 济南时代试金试验机有限公司 | Joint structure for industrial robot |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6016378A (en) * | 1983-06-13 | 1985-01-28 | 日本リモテツク株式会社 | Remote manipulator |
| JP2519808Y2 (en) * | 1987-04-28 | 1996-12-11 | 株式会社 アイチコーポレーション | Aerial work vehicle equipped with a manipulator |
| JP2580489B2 (en) * | 1993-11-04 | 1997-02-12 | 株式会社ハイテック・プロダクト | Articulated transfer device, control method thereof, and semiconductor manufacturing device |
| JPH08279543A (en) * | 1995-04-06 | 1996-10-22 | Kokusai Electric Co Ltd | Parallelizing of link arm surface of cassette loader |
| JPH10163296A (en) * | 1996-11-27 | 1998-06-19 | Rootsue Kk | Board carrying equipment |
| US6155768A (en) * | 1998-01-30 | 2000-12-05 | Kensington Laboratories, Inc. | Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput |
| JP4682378B2 (en) * | 2000-12-05 | 2011-05-11 | 川崎重工業株式会社 | Double arm and robot with the same |
| TW200618964A (en) * | 2004-10-14 | 2006-06-16 | Toshiba Machine Co Ltd | Industrial robot |
| US8950998B2 (en) * | 2007-02-27 | 2015-02-10 | Brooks Automation, Inc. | Batch substrate handling |
-
2014
- 2014-07-10 JP JP2014142529A patent/JP6606319B2/en active Active
-
2015
- 2015-06-24 TW TW104120366A patent/TWI641459B/en active
- 2015-07-06 CN CN201510390910.XA patent/CN105313113B/en active Active
- 2015-07-09 KR KR1020150097794A patent/KR102339973B1/en active IP Right Grant
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100586665C (en) * | 2004-10-04 | 2010-02-03 | 本田技研工业株式会社 | Processing and transferring apparatus |
| CN101790441A (en) * | 2007-08-31 | 2010-07-28 | 日本电产三协株式会社 | Industrial robot |
| CN202781188U (en) * | 2012-09-27 | 2013-03-13 | 济南时代试金试验机有限公司 | Joint structure for industrial robot |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201607709A (en) | 2016-03-01 |
| JP6606319B2 (en) | 2019-11-13 |
| TWI641459B (en) | 2018-11-21 |
| KR102339973B1 (en) | 2021-12-16 |
| KR20160007420A (en) | 2016-01-20 |
| JP2016016498A (en) | 2016-02-01 |
| CN105313113A (en) | 2016-02-10 |
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