CN208529106U - A kind of wafer handling machinery arm - Google Patents

Abstract

The utility model discloses a kind of wafer handling machinery arms, are related to semiconductor device transportation art.Including main body and handling device, the main body includes the fixing seat of bracket and setting on the bracket, is rotatably connected to rotation seat in the fixing seat, and the rotating mechanism for driving the rotation seat rotation is additionally provided in the main body；The handling device includes the slide bar being threaded through on the rotation seat, the slide bar sets at least to three, the axis of multiple slide bars is parallel to each other, and is parallel to the pivot center of the rotation seat, the outside for the plane that the axis of at least one slide bar is formed in remaining described slide bar；The handling device further includes the connection pedestal and connection pedestal for being separately positioned on the slide bar both ends, and the connection pedestal is additionally provided with the elevating mechanism for driving the handling device lifting for installing the carrying head on the connection pedestal.The possibility for reducing handling device shaking, increases the machining accuracy of wafer.

Description

A kind of wafer handling machinery arm

Technical field

The utility model relates to semiconductor device transportation art, espespecially a kind of wafer handling machinery arm.

Background technique

Wafer refers to silicon wafer used in silicon semiconductor production of integrated circuits, since its shape is circle, therefore referred to as wafer； It can be processed on silicon and is fabricated to various circuit component structures, and become the IC product for having specific electrical functionality.

Wafer needs to carry out the change of position by mechanical arm in manufacture process；But in existing manipulator In the structure of arm, lead screw and two slide bars form a plane, therefore cause mechanical arm during vertical direction movement, The constraint that the mechanical arm of shipping wafers is subject to is less, and stability is lower, there is the phenomenon that rocking swing, is unfavorable for mechanical arm Wafer is transported into specific position, reduces the machining accuracy of wafer.

Summary of the invention

The purpose of the utility model is to provide a kind of wafer handling machinery arms, increase the pact between slide bar and rotation seat Beam reduces the possibility of handling device shaking, is conducive to mechanical arm for wafer and transports specific position, increase wafer Machining accuracy.

The technical scheme that the utility model is provided is as follows:

A kind of wafer handling machinery arm, including main body and handling device, the main body include bracket and are arranged described Fixing seat on bracket is rotatably connected to rotation seat in the fixing seat, is additionally provided in the main body for driving the rotation The rotating mechanism of seat rotation；The handling device includes the slide bar being threaded through on the rotation seat, and the slide bar is set at least to Three, the axis of multiple slide bars is parallel to each other, and is parallel to the pivot center of the rotation seat, the axis of at least one slide bar The outside for the plane that line is formed in remaining described slide bar；The handling device further includes the company for being separately positioned on the slide bar both ends Pedestal and connection pedestal are connect, the connection pedestal is additionally provided on the connection pedestal for driving for installing the carrying head The elevating mechanism of the handling device lifting.

In the present embodiment, by least three slide bars disposed in parallel, since the axis of at least one slide bar is in remaining cunning The axis in the outside for the plane that bar is formed, i.e., all slide bars at least can not have three slide bars same in the same plane A triangle is capable of forming in one plane, all slide bars can make up stable structure, and elevating mechanism is in driving handling device During lifting, increase the constraint between slide bar and rotation seat, reduces the possibility of handling device shaking, be conducive to manipulator Wafer is transported specific position by arm, increases the machining accuracy of wafer.

Further, the rotation seat is equipped with the axle sleeve passed through for the slide bar, the internal diameter of the axle sleeve and the cunning The diameter of bar is identical.

In the present embodiment, by the setting of axle sleeve, the constraint between rotation seat and slide bar is further increased, is increased every Constraint of a slide bar in slipping reduces the possibility that handling device shakes in lifting process.

Further, the axis is set on the rotation seat close to the side of the connection pedestal, and the axle sleeve is far from institute The one end for stating rotation seat is additionally provided with locating snap ring, and the locating snap ring is flexible material.

In the present embodiment, when lifting device is in lifting process, and connection pedestal is close to the side of rotation seat, locating snap ring Setting, reduce impact of the connection pedestal to rotation seat, reduce the possibility of rotation seat damage, increase the safety of rotation seat Property.

Further, the connection pedestal offers the first limiting slot close to the side of rotation seat, and the slide bar is close to connection One end of pedestal is connected in first limiting slot；The side that the linker seats against nearly rotation seat offers the second limit Slot, the slide bar are connected in second limiting slot close to one end of connection pedestal；First limiting slot, the second limit Slot and the slide bar are interference fit.

In the present embodiment, slide bar grafting and can be fixed in the first limiting slot and the second limiting slot, realize linker Seat, connection pedestal and slide bar are detachably connected.

Further, first limiting slot offers the first connectivity slot far from the side of rotation seat；Second limiting slot Side far from rotation seat offers the second connectivity slot.

In the present embodiment, when slide bar is plugged in the first limiting slot and the second limiting slot, the first limiting slot or the second limit Gas in the slot of position can be overflowed out of the first connectivity slot or the second connectivity slot, reduce gas residue in connection pedestal, connection In gap between pedestal and slide bar, connection pedestal and the possibility for connecting pedestal shake are reduced, connection pedestal and company are increased Connect the stability of pedestal.

Further, the rotating mechanism includes the rotating wheel of setting on the body, and the axis of the rotating wheel is parallel In the pivot center of the rotation seat；The rotating mechanism further includes the rotation being set on the rotating wheel and the rotation seat Belt, and the rotating belt is connected on the rotating wheel and the rotation seat；It is additionally provided in the fixing seat for driving First rotary electric machine of the rotating wheel rotation.

In the present embodiment, by the setting of the first rotary electric machine, first motor rotation is able to drive rotating wheel and rotates, and by It is parallel to the pivot center of rotation seat in the axis of rotating wheel, rotating wheel is set in and is able to drive with the rotating belt on rotation seat Rotation seat rotation, realizes the rotation of rotation seat, realizes the steering of handling device.

Further, the tensioning wheel for being connected on the rotating belt, the tensioning wheel are additionally provided in the fixing seat Axis be parallel to the axis of the rotating wheel.

In the present embodiment, the setting of tensioning wheel increases the tension of rotating belt, reduces rotating belt relative to rotation The possibility that seat or rotating wheel skid, increases the stability of rotating belt transmitting effect.

Further, the fixing seat is equipped with tension-adjusting gear, and the tension-adjusting gear includes being arranged described solid Slipping block in reservation, the spacing between the slipping block and the axis of the rotating belt is adjustable, also sets on the slipping block There is the regulating wheel for being connected on the rotating belt, the axis of the regulating wheel is parallel to the axis of the rotating wheel.

In this implementation, by the setting of tension-adjusting gear, the tension of rotating belt is further had adjusted, reduces rotation The possibility that belt skids relative to rotation seat or rotating wheel, also reduces the possibility that rotating belt is damaged by overtension, increases The stability of rotating belt transmitting effect.

Further, the elevating mechanism includes the lead screw being arranged on the connection pedestal, and the threads of lead screw is connected to On rotation seat, the lead screw is rotatably connected on the connection pedestal far from one end of connection pedestal, on the connection pedestal also Equipped with for driving the second rotary electric machine of the lead screw rotation.

In the present embodiment, the rotation of the second rotary electric machine can drive lead screw to rotate, since threads of lead screw is connected to rotation seat On, and rotation seat is rotatably connected in fixing seat, the height on rotation seat vertical direction determines, therefore, lead screw rotates interface band Dynamic handling device lifting, realizes the variation of lifting device height.

Further, the rotation seat is equipped with the thread bush for being threaded on the lead screw.

In the present embodiment, by the setting of thread bush, the constraint between rotation seat and lead screw is further increased, is increased Constraint of the handling device in slipping reduces the possibility that handling device shakes in lifting process.

Compared with prior art, a kind of wafer handling machinery arm provided by the utility model has the advantages that

1, increase the constraint between slide bar and rotation seat, reduce the possibility of handling device shaking, be conducive to mechanical arm Wafer is transported into specific position, increases the machining accuracy of wafer.

2, by the setting of axle sleeve, the constraint between rotation seat and slide bar is further increased, each slide bar is increased and exists Constraint in slipping reduces the possibility that handling device shakes in lifting process.

3, by the setting of the first rotary electric machine, first motor rotation is able to drive rotating wheel rotation, and due to rotating wheel Axis be parallel to the pivot center of rotation seat, the rotating belt being set on rotating wheel and rotation seat is able to drive rotation seat and turns It is dynamic, the rotation of rotation seat is realized, the steering of handling device is realized.

4, by the setting of tension-adjusting gear, the tension of rotating belt is further had adjusted, reduces rotating belt phase For the possibility that rotation seat or rotating wheel skid, the possibility that rotating belt is damaged by overtension is also reduced, rotation is increased The stability of belt transport effect.

Detailed description of the invention

Below by clearly understandable mode, preferred embodiment is described with reference to the drawings, to a kind of wafer conveying robot Above-mentioned characteristic, technical characteristic, advantage and its implementation of arm are further described.

Fig. 1 is a kind of structural schematic diagram of wafer handling machinery arm of the utility model；

Fig. 2 is enlarged drawing at the A of Fig. 1；

Fig. 3 is the structural schematic diagram of handling device in a kind of wafer handling machinery arm of the utility model；

Fig. 4 is enlarged drawing at the B of Fig. 1；

Fig. 5 is the partial structure diagram of handling device in the utility model another kind wafer handling machinery arm；

Fig. 6 is the structural schematic diagram that pedestal is connected in another wafer handling machinery arm of the utility model；

Fig. 7 is the structural schematic diagram that pedestal is connected in another wafer handling machinery arm of the utility model；

Fig. 8 is the status diagram that belt is moved in another wafer handling machinery arm transfer of the utility model.

Drawing reference numeral explanation: 11. brackets, 12. fixing seats, 121. dovetail grooves, 122. locking holes, 13. rotation seats, 131. is sliding Hole, 132. lift spans, 133. wire holes, 14. first rolling bearings, 21. rotating wheels, 22. rotating belts, 23. first rotation electricity Machine, 24. tensioning wheels, 25. slipping blocks, 26. regulating wheels, 27. waist-shaped holes, 31. slide bars, 32. connection pedestals, 321. second limits Slot, 322. second connectivity slots, 33. connection pedestals, 331. first limiting slots, 332. first connectivity slots, 34. lead screws, 35. second turns Dynamic bearing, 36. first rotating wheels, 37. second rotating wheels, 38. second rotary electric machines, 39. transmission belts, 40. conduits, 41. Axle sleeve, 42. first connecting plates, 43. locating snap rings, 44. thread bush, 45. second connecting plates.

Specific embodiment

In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, attached drawing will be compareed below Illustrate specific embodiment of the present utility model.It should be evident that the accompanying drawings in the following description is only the one of the utility model A little embodiments for those of ordinary skill in the art without creative efforts, can also be according to these Attached drawing obtains other attached drawings, and obtains other embodiments.

To make simplified form, part relevant to the utility model is only schematically shown in each figure, they are not Represent its practical structures as product.In addition, there is identical structure or function in some figures so that simplified form is easy to understand The component of energy, only symbolically depicts one of those, or only marked one of those.Herein, "one" is not only It indicates " only this ", can also indicate the situation of " more than one ".

According to a kind of embodiment provided by the utility model, in conjunction with shown in Fig. 1 to Fig. 4, a kind of wafer handling machinery arm, Including being used to support main body on the ground, main body includes multiple fixing seats 12 bracket 11 and be arranged on bracket 11, multiple Bracket 11 is preferably aluminum profile, and is connected between multiple brackets 11 by corner brace；Fixing seat 12 is fixedly connected on bracket 11 most Upper end, and bracket 11 is capable of fixing the corner for being connected to fixing seat 12.

Main body further includes the rotation seat 13 being arranged in fixing seat 12, and rotation seat 13 is discoid, and the axis of rotation seat 13 Line direction is vertically arranged, and rotation seat 13 can be rotatably connected in fixing seat 12 along its axis direction, is additionally provided with and is used in main body The rotating mechanism for driving rotation seat 13 to rotate.

Preferably, the first rolling bearing 14 is additionally provided between rotation seat 13 and fixing seat 12, rotation seat 13 can pass through One rolling bearing 14 is connected in fixing seat 12, is increased the constraint between rotation seat 13 and fixing seat 12, is reduced rotation seat 13 possibility beated in fixing seat 12 increase the stability that rotation seat 13 rotates in fixing seat 12.

Rotating mechanism includes the rotating wheel 21 being arranged in main body, and rotating wheel 21 is vertically arranged, i.e. the axis of rotating wheel 21 It is parallel to the axis of rotation seat 13；Rotating mechanism further includes the rotating belt 22 being set on rotating wheel 21 and rotation seat 13, is turned The inside of dynamic belt 22 can be connected to the outside of rotating wheel 21 and swivel base.

Fixing seat 12 is equipped with the first rotary electric machine 23, and rotating wheel 21 is fixedly connected on the output shaft of the first rotary electric machine 23 On, and the rotation of the first rotary electric machine 23 is able to drive the rotation of rotating wheel 21；Preferably, rotating wheel 21 is belt pulley, rotating belt 22 be synchronous belt.First rotary electric machine 23 is able to drive the rotation of rotating wheel 21, and turns since the axis of rotating wheel 21 is parallel to The pivot center of dynamic seat 13, the rotating belt 22 being set on rotating wheel 21 and rotation seat 13 are able to drive the rotation of rotation seat 13, The rotation for realizing rotation seat 13 realizes the steering of handling device.

Mechanical arm further includes the handling device being arranged in main body, and handling device includes the cunning being threaded through on rotation seat 13 Bar 31, slide bar 31 sets at least to three, and multiple slide bars 31 are parallel to each other, and is also provided on rotation seat 13 and wears for slide bar 31 The slide opening 131 crossed, slide opening 131 is vertically arranged the through-hole on rotation seat 13, and each slide opening 131 can correspond to a slide bar 31, the aperture of slide opening 131 be greater than or slightly larger than slide bar 31 diameter.

The outside for the plane that the axis of at least one slide bar 31 is formed in remaining slide bar 31, i.e., the axis of all slide bars 31 is not At least there can be three slide bars 31 in the same plane and be capable of forming a triangle, all slide bars in the same plane 31 can make up stable structure.

Handling device includes the connection pedestal 33 of the connection pedestal 32 and lower end of upper end, and the upper end of each slide bar 31 can It is fixedly connected on connection pedestal 32, the lower end of each slide bar 31, which is capable of fixing, to be connected on connection pedestal 33, for carrying The carrying head of wafer can be mounted on connection pedestal 32.

Handling device further includes that connection pedestal 32 is arranged in and connects the lead screw 34 between pedestal 33, and the axis of lead screw 34 is flat Row is in the axis of slide bar 31, and the upper end of lead screw 34 can be rotatably connected on connection pedestal 32, and the lower end of lead screw 34 can rotate It is connected on connection pedestal 33, lift span 132 is offered on rotation seat 13, lead screw 34 can be threaded in lift span 132； Preferably, it is equipped with the second rolling bearing 35 on connection pedestal 32 and connection pedestal 33, lead screw 34 can be connected by connection bearing It connects on connection pedestal 32 and connection pedestal 33.

The lower end of lead screw 34 can pass through connection pedestal 33, and the lower end of lead screw 34 is additionally provided with the second rotating wheel 37；Connect bottom It is additionally provided with the second rotary electric machine 38 for driving lead screw 34 to rotate on seat 33, is also fixed on the output shaft of the second rotary electric machine 38 It is connected with the first rotating wheel 36, is arranged with transmission belt 39 on the first rotating wheel 36 and the second rotating wheel 37.Second rotary electric machine 38 rotations drive the rotation of the first rotating wheel 36, then drive the rotation of the second rotating wheel 37 by transmission belt 39, finally realize The rotation of lead screw 34；Since lead screw 34 is threaded on rotation seat 13, and rotation seat 13 is rotatably connected in fixing seat 12, is turned Height on dynamic 13 vertical direction of seat determines that therefore, lead screw 34 rotates interface and drives handling device lifting, realizes lifting device The variation of height.

Elevating mechanism increases the constraint between slide bar 31 and rotation seat 13, subtracts during driving handling device lifting The possibility that small handling device shakes, is conducive to mechanical arm for wafer and transports specific position, increase the processing of wafer Precision.

Preferably, handling device further includes the conduit 40 being arranged between connection pedestal 32 and connection pedestal 33, electric wire The upper and lower ends of pipe 40 are respectively fixedly connected on connection pedestal 32 and connection pedestal 33, are also provided with conduit on rotation seat 13 40 wire holes 133 passed through, the aperture of wire hole 133 are greater than the outer diameter of conduit 40.

According to another embodiment provided by the utility model, as shown in figure 5, a kind of wafer handling machinery arm, the On the basis of a kind of embodiment, rotation seat 13 is equipped with the axle sleeve 41 passed through for slide bar 31, the internal diameter and slide bar 31 of axle sleeve 41 Diameter it is identical, axle sleeve 41 can be fixed on rotation seat 13 by the first connecting plate 42 and bolt close to the side of rotation seat 13 On.

Preferably, rotation seat 13 is arranged in close to the side of connection pedestal 32 in axle sleeve 41, i.e. axle sleeve 41 is arranged in rotation seat 13 upside, the upper end of axle sleeve 41 are additionally provided with locating snap ring 43, and locating snap ring 43 is flexible material.When lifting device is in lifting process In, the setting of locating snap ring 43 reduces impact of the lifting device to rotation seat 13, reduces the possibility of the damage of rotation seat 13, increases The safety for having added rotation seat 13 is conducive to the long-time service of rotation seat 13.

The thread bush 44 for being threaded on lead screw 34 is additionally provided on rotation seat 13, thread bush 44 is close to rotation seat 13 Side can be fixed on rotation seat 13 by the second connecting plate 45 and bolt.By the setting of thread bush 44, further increase Add the constraint between rotation seat 13 and lead screw 34, increased constraint of the handling device in slipping, reduces carrying dress Set the possibility shaken in lifting process.

According to another embodiment provided by the utility model, in conjunction with shown in Fig. 1, Fig. 6 and Fig. 7, a kind of wafer carrying implement Tool arm connects pedestal 33 close to the side of rotation seat 13 and offers the first limiting slot on the basis of the first embodiment 331, slide bar 31 is connected in first limiting slot 331 close to one end of connection pedestal 33；Pedestal 32 is connected close to rotation The side of seat 13 offers the second limiting slot 321, and slide bar 31 is connected to second limit close to one end of connection pedestal 32 In slot 321；First limiting slot 331, the second limiting slot 321 and the slide bar 31 are interference fit.

The lower end of slide bar 31 can be closely plugged in the first limiting slot 331, and the upper end of slide bar 31 can be closely plugged on In second limiting slot 321, realize connection pedestal 32, connection pedestal 33 and slide bar 31 are detachably connected, facilitate linker Seat 32, the replacement for connecting pedestal 33 and slide bar 31.

Preferably, the first limiting slot 331 offers the first connectivity slot 332 far from the side of rotation seat 13；Second limiting slot 321 sides far from rotation seat 13 offer the second connectivity slot 322.The first limiting slot 331 and the second limit are plugged in slide bar 31 When in the slot 321 of position, the gas in the first limiting slot 331 or the second limiting slot 321 can be from the first connectivity slot 332 or the second connection It is overflowed in slot 322, reduces gas residue in the gap between connection pedestal 32, connection pedestal 33 and slide bar 31, reduce Connect pedestal 32 and the possibility for connecting the shake of pedestal 33, the stability for increasing connection pedestal 32 and connecting pedestal 33.

According to another embodiment provided by the utility model, in conjunction with shown in Fig. 1 and Fig. 8, a kind of wafer conveying robot Arm is additionally provided with the tensioning wheel 24 for being connected on rotating belt 22 on the basis of the first embodiment in fixing seat 12, The axis of bearing up pulley 24 is parallel to the axis of the rotating wheel 21, i.e. tensioning wheel 24 is vertically arranged in fixing seat 12, tensioning wheel 24 It is connected to the inner or outer side of rotating belt 22.

By the setting of tensioning wheel 24, the tension of rotating belt 22 is increased, reduces rotating belt 22 relative to rotation The possibility that seat 13 or rotating wheel 21 skid, increases the stability of 22 transmitting effect of rotating belt.

According to the improvement of the present embodiment, fixing seat 12 is equipped with tension-adjusting gear, and tension-adjusting gear includes that setting exists Slipping block 25 in fixing seat 12, slipping block 25 are the striped blocks of inverted trapezoidal, and offer in fixing seat 12 for slipping block 25 The dovetail groove 121 of sliding, the spacing between slipping block 25 and the axis of rotating belt 22 can pass through the sliding tune of slipping block 25 Section.

It is also provided with waist-shaped hole 27 on slipping block 25, the locking hole being connected to waist-shaped hole 27 is also provided in dovetail groove 121 122, locking hole 122 is threaded hole, and bolt can pass through waist-shaped hole 27 and be threaded in threaded hole 122, and by slipping block 25 It is fixed in fixing seat 12.

The regulating wheel 26 for being connected on rotating belt 22 is additionally provided on slipping block 25, regulating wheel 26 is connected to rotation skin With 22 inner or outer side；The axis of regulating wheel 26 is parallel to the axis of rotating wheel 21, i.e. regulating wheel 26 is vertically arranged in On slipping block 25.

By the setting of tension-adjusting gear, the tension of rotating belt 22 is further had adjusted, reduces rotating belt 22 Relative to the possibility that rotation seat 13 or rotating wheel 21 skid, the possibility that rotating belt 22 is damaged by overtension is also reduced, is increased The stability of 22 transmitting effect of rotating belt is added.

It should be noted that above-described embodiment can be freely combined as needed.The above is only the utility model Preferred embodiment, it is noted that for those skilled in the art, do not departing from the utility model principle Under the premise of, several improvements and modifications can also be made, these improvements and modifications also should be regarded as the protection scope of the utility model.

Claims (10)

1. a kind of wafer handling machinery arm, which is characterized in that including main body and handling device, the main body includes bracket and sets Fixing seat on the bracket is set, rotation seat is rotatably connected in the fixing seat, is additionally provided in the main body for driving The rotating mechanism of the rotation seat rotation；

The handling device includes the slide bar being threaded through on the rotation seat, and the slide bar sets at least to three, multiple described The axis of slide bar is parallel to each other, and is parallel to the pivot center of the rotation seat, and the axis of at least one slide bar is described in remaining The outside for the plane that slide bar is formed；

The handling device further includes the connection pedestal and connection pedestal for being separately positioned on the slide bar both ends, the connection pedestal Head is carried for installing, the elevating mechanism for driving the handling device lifting is additionally provided on the connection pedestal.

2. a kind of wafer handling machinery arm according to claim 1, it is characterised in that:

The rotation seat is equipped with the axle sleeve passed through for the slide bar, the diameter phase of the internal diameter of the axle sleeve and the slide bar Together.

3. a kind of wafer handling machinery arm according to claim 2, it is characterised in that:

The axis be set on the rotation seat close to it is described connection pedestal side, the axle sleeve far from the rotation seat one End is additionally provided with locating snap ring, and the locating snap ring is flexible material.

4. a kind of wafer handling machinery arm according to claim 1, it is characterised in that:

The connection pedestal offers the first limiting slot close to the side of rotation seat, and the slide bar is close to one end of connection pedestal It is connected in first limiting slot；

The side that the linker seats against nearly rotation seat offers the second limiting slot, and the slide bar is close to one end of connection pedestal It is connected in second limiting slot；

First limiting slot, the second limiting slot and the slide bar are interference fit.

5. a kind of wafer handling machinery arm according to claim 4, it is characterised in that:

First limiting slot offers the first connectivity slot far from the side of rotation seat；Second limiting slot is far from rotation seat Side offers the second connectivity slot.

6. a kind of wafer handling machinery arm according to claim 1, it is characterised in that:

The rotating mechanism includes the rotating wheel of setting on the body, and the axis of the rotating wheel is parallel to the rotation seat Pivot center；

The rotating mechanism further includes the rotating belt being set on the rotating wheel and the rotation seat, and the rotating belt It is connected on the rotating wheel and the rotation seat；

The first rotary electric machine for driving the rotating wheel rotation is additionally provided in the fixing seat.

7. a kind of wafer handling machinery arm according to claim 6, it is characterised in that:

The tensioning wheel for being connected on the rotating belt is additionally provided in the fixing seat, the axis of the tensioning wheel is parallel to The axis of the rotating wheel.

8. a kind of wafer handling machinery arm according to claim 6, it is characterised in that:

The fixing seat is equipped with tension-adjusting gear, and the tension-adjusting gear includes sliding arranged on the fixing seat Block, the spacing between the slipping block and the axis of the rotating belt is adjustable, is additionally provided on the slipping block for being connected to Regulating wheel on the rotating belt, the axis of the regulating wheel are parallel to the axis of the rotating wheel.

9. a kind of wafer handling machinery arm according to claim 1, it is characterised in that:

The elevating mechanism includes the lead screw being arranged on the connection pedestal, and the threads of lead screw is connected on rotation seat, institute It states lead screw to be rotatably connected on the connection pedestal far from one end of connection pedestal, be additionally provided on the connection pedestal for driving Second rotary electric machine of the lead screw rotation.

10. a kind of wafer handling machinery arm according to claim 9, it is characterised in that:

The rotation seat is equipped with the thread bush for being threaded on the lead screw.