JPH08279543A - Parallelizing of link arm surface of cassette loader - Google Patents

Abstract

PURPOSE: To make it possible to parallelize link arm surfaces by everybody simply, rapidly and accurately. CONSTITUTION: A surface parallelizing jig 4, which is formed by slidingly providing reference brackets 3 having each tapered surface 3A in the vertical directions on a reference bar 2 in such a way as to be able to slide in the width direction, is mounted to the fronts of link arm mounting parts of a cassette loader of a semiconductor manufacturing device and U-shaped clamps 6, which respectively have a tapered inner face 6A, are respectively fitted simultaneously into the tapered surfaces 3A of the brackets 3 and link arms 5 from over the link arms 5 of a vertical superposition arrangement, whereby the brackets 3 are made to slide, are pressed on the link arms 5 of the vertical superposition arrangement and link arm surfaces 5A are parallelized.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for parallelizing a link arm surface of a cassette loader (cassette transfer robot) of a semiconductor manufacturing apparatus such as a vertical diffusion / CVD apparatus.

[0002]

2. Description of the Related Art Generally, in order to move a link arm of a cassette loader in a straight line to convey a cassette, it is necessary to arrange the parallel-arranged link arms in parallel. FIG. 3 is a perspective view showing an example of a conventional method. This conventional method uses the flat bar 8 and each worker loosens the mechanical lock 7 and presses the flat bar 8 against the front face of the link arm mounting housing 1, and the operator visually confirms that two vertical stacks are provided. The parallelism of the surface 5A of the link arm 5 is made by aligning with the flat bar 8. After performing parallel alignment, the mechanical lock 7 is tightened.

[0003]

However, in the above-mentioned conventional method, since each operator visually parallels the link arm surfaces 5A, the parallel alignment of the link arm surfaces in the vertically stacked arrangement can be achieved. This is extremely difficult and requires a large number of man-hours, and there is a problem that the work of each worker varies and it is not possible to perform parallel plane alignment accurately.

[0004]

In order to solve the above-mentioned problems, the method of the present invention, as shown in FIG. 1, has a vertical direction on a reference bar 2 in front of a link arm mounting portion 1 of a cassette loader of a semiconductor manufacturing apparatus. A surface parallelizing jig 4 formed by sliding a reference bracket 3 having a tapered surface 3A slidably in the width direction is attached, and a U-shaped clamp 6 having a tapered inner surface 6A is attached from above the vertically stacked link arm 5. The tapered surface 3A of the reference bracket 3 and the link arm 5
It is characterized in that the reference bracket 3 is slid and pressed against the link arm 5 in the vertically overlapped arrangement by simultaneously fitting the two in parallel with each other to parallelize the link arm surface 5A.

[0005]

[Operation] With such a configuration, the reference bar 2 of the surface parallelizing jig 4 is fixed to the link arm attachment portion 1, and the taper surface 3A of the reference bracket 3 and the link arm 5 in the vertically overlapping arrangement are simultaneously mounted. When the U-shaped clamp 6 is fitted, the reference bracket 3 is attached to the tapered surface 3A and the U-shaped clamp 6
By sliding contact of the taper inner surface 6A of the above, it slides on the reference bar 2 and is pressed against the vertically stacked link arm 5,
The link arm surface 5A is parallelized.

[0006]

FIG. 1 is a perspective view showing an embodiment of the method of the present invention. In this embodiment, two reference brackets 3 each having a tapered surface 3A on the reference bar 2 in the vertical direction can be slid in the width direction on the front surface of the link arm mounting housing 1 of the cassette loader (cassette transfer robot) of the semiconductor manufacturing apparatus. Are mounted side by side, and the U-shaped clamp 6 having a tapered inner surface 6A on one surface from above the two vertically upper and lower link arms 5 is fitted into the tapered surface 3A of the reference bracket 3 and the link arm 5 at the same time. 3 is slid and pressed against the vertically stacked link arm 5 to parallelize the link arm surface 5A.

In the above structure, the reference bar 2 of the plane parallelizing jig 4 is fixed to the link arm mounting housing 1,
When the mechanical lock 7 for linking the shaft of the link arm 5 is loosened so that the arms are free from each other, and the U-shaped clamp 6 is simultaneously fitted into the taper surface 3A of the reference bracket 3 and the link arm 5 which is vertically overlapped, the reference bracket 3 becomes The taper surface 3A and the taper inner surface 6A of the U-shaped clamp 6 slide on the reference bar 2 and are pressed against the link arm 5 in a vertically overlapping arrangement, so that the link arm surface 5A is parallelized. become. As a result, the surfaces 5A of the two vertically upper and lower link arms 5 are aligned in parallel by pressing the reference surface of the reference bracket 3. After performing parallel alignment, tighten the Mecha Lock 7.

As shown in FIG. 2 (A), when the plane parallelism is not provided, the front and rear L ₁ and L ₂ dimensions (between pitches) are not equal, and the cassette is adjusted using this unadjusted link arm. A state in which the link arm is stroked in parallel and at a right angle (moved straight) for transporting cannot be surely performed, but plane parallelism is provided as shown in FIG. 2B using the present embodiment method. Then, the front and rear L ₁ and L ₂ dimensions become equal, and by using this adjusted link arm, it is possible to reliably perform the operation of making strokes in parallel and at a right angle.

[0009]

As described above, according to the method of the present invention, since the surface parallelization is performed using the surface parallelization jig and the U-shaped clamp, anyone can easily and accurately perform parallelization of the link arm surface. Can be done. Further, since the surface parallelizing jig is provided with the reference bracket having the taper surface in the vertical direction, it is possible to absorb the subtle variations in the mounting position that occur when the arms are mounted, and to parallelize the plurality of vertically stacked link arms. Moreover, the operation of making a stroke at a right angle can be reliably realized.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the method of the present invention.

FIGS. 2A and 2B are a plan view showing a state where the link arms are not parallel to each other and a plan view showing a state where the link arms are also parallel to each other. FIG.

FIG. 3 is a perspective view showing an example of a conventional method.

[Explanation of reference symbols] 1 link arm attachment part (housing) 2 reference bar 3 reference bracket 3A taper surface 4 surface parallelizing jig 5 link arm 5A link arm surface 6 U-shaped clamp 6A taper inner surface 7 mechanical lock

Claims (1)

[Claims] 1. A surface parallelizing jig having a reference bracket having a vertical tapered surface on a reference bar slidably slidably in the width direction on the front face of a link arm mounting portion of a cassette loader for a semiconductor manufacturing apparatus. By mounting the U-shaped clamp having the tapered inner surface from above the link arm in the vertically stacked arrangement at the same time to the tapered surface of the reference bracket and the link arm, the reference bracket is slid and pressed against the vertically stacked link arm, A method for parallelizing the link arm surfaces of a cassette loader, which comprises parallelizing the link arm surfaces.