JP4302693B2 - Lid opening / closing mechanism of vacuum processing chamber and lid opening / closing method - Google Patents

Description

  The present invention relates to a vacuum processing technique, and in particular, a substrate transfer process such as a glass substrate for a flat display such as a liquid crystal display (LCD) or a plasma display, or a vacuum for performing vacuum processing such as dry etching on the glass substrate. The present invention relates to a technique effective when applied to a processing apparatus or the like.

  For example, in an LCD manufacturing process, vacuum processing such as dry etching, sputtering, and CVD (chemical vapor deposition) is frequently used for an LCD glass substrate that is a substrate to be processed.

  In a vacuum processing apparatus that performs such vacuum processing, a vacuum preliminary chamber is provided adjacent to a vacuum processing chamber that is held in a vacuum and performs the above processing, and the atmosphere in the vacuum processing chamber when a substrate to be processed is carried in and out. It has a structure that minimizes fluctuations.

  Specifically, for example, a load lock chamber having a role of an interface between the atmosphere side and the vacuum side is provided as a vacuum preparatory chamber between a cassette disposed on the atmosphere side and a vacuum processing chamber for performing an etching process or the like. It has been.

  In this load lock chamber, every time the substrate to be processed passes, the release of the atmosphere and evacuation up to the high vacuum equivalent to the vacuum processing chamber are repeated. Shortening is an important factor in improving throughput.

  For this reason, as a substrate transport device used for transporting a substrate in the load lock chamber, a device capable of suppressing the volume of the load lock chamber as an installation place is required. As such a substrate transport device, For example, a multi-joint type in which a plurality of arms are connected as shown in Patent Document 1 is known. Further, as a device capable of securing a large transport distance while minimizing as much as possible in the retracted state, a substrate transport apparatus having a multistage telescopic arm in which a plurality of arms linearly move to expand and contract has been studied.

  By the way, recently, there is a strong demand for enlargement of the LCD glass substrate, and a huge one that exceeds 1 m and reaches 2 m has appeared. For example, when transferring such a huge substrate in a horizontal direction between a vacuum processing chamber and a load lock chamber, in a multi-joint type as described in Patent Document 1, a load on which a substrate transfer device is installed. It is difficult to secure a sufficient stroke for conveyance while making the lock chamber as small as possible. Further, in the multi-stage telescopic arm as described above, the number of stacking stages of the arm has to be increased in order to ensure a necessary transport distance, and thus the height dimension of the transport device becomes large. The height of the load lock chamber in which the transfer device is installed is increased, and there is a limit to downsizing the load lock chamber.

On the other hand, in maintenance management of a vacuum processing apparatus, the lid may be removed from the base portion of the vacuum processing chamber to clean the inside. In the case of a multi-chamber system in which a plurality of vacuum processing chambers (vacuum processing devices) are arranged, if each vacuum processing chamber has a lid opening / closing mechanism, the installation floor area of each device increases and efficiency increases. bad. In particular, in a vacuum processing apparatus for processing a large substrate, since the single apparatus itself is also increased in size, if each of the vacuum processing chambers is provided with a lid opening / closing mechanism, the floor area in the multi-chamber system can be reduced. The increase is even more significant.
JP 2001-148410 A

The present invention has been made in view of such circumstances, and an object thereof is to provide a lid opening / closing mechanism and a lid opening / closing method common to a plurality of vacuum processing chambers (vacuum processing apparatuses).

In order to solve the above problems, the present invention provides a lid opening / closing mechanism for a vacuum processing chamber that opens and closes the lid in a vacuum processing chamber having a base and a lid that is detachably provided on the base. A movable carriage, a pair of support parts provided on the carriage and supporting the lid, and provided on the carriage, the pair of support parts being provided between the vacuum processing chamber and the carriage. A pair of rails for moving between, and the lid body is moved on the carriage in a state of being supported by the pair of support parts, and the lid body is moved on the carriage. A lid opening / closing mechanism for a vacuum processing chamber is provided, which is configured to rotate around a connecting line .

The present invention is also a lid opening / closing method of a vacuum processing chamber for opening and closing the lid in a vacuum processing chamber having a base and a lid that is detachably provided on the base, and is a movable carriage. The lid opening / closing mechanism according to claim 1 provided in common to the plurality of vacuum processing chambers is moved to a position facing the target vacuum processing chamber, and then the lid opening / closing is performed. A lid for a vacuum processing chamber, wherein the lid is floated upward by a mechanism so as to be separated from the base, and then the base is opened by moving the lid onto the carriage. Provide an opening and closing method.

  As described above, a common lid opening / closing mechanism is provided for a plurality of vacuum processing chambers (vacuum processing apparatuses), and the lid is opened and closed in maintenance management work, etc., thereby saving the space of the entire apparatus and the lid. Cost reduction can be realized by sharing the opening and closing mechanism.

Embodiments of the present invention will be specifically described below with reference to the accompanying drawings.
[First Embodiment]
FIG. 1 is a perspective view showing an appearance of a vacuum processing apparatus to which a substrate transfer apparatus according to a first embodiment of the present invention is applied, and FIG. 2 is an application of the substrate transfer apparatus according to the first embodiment of the present invention. FIG. 3 is a perspective view showing a substrate transfer apparatus according to the first embodiment of the present invention, and FIGS. 4 and 5 are sectional views thereof.

  As shown in FIG. 1, a vacuum processing apparatus 100 includes a vacuum processing chamber 10 for performing desired vacuum processing such as plasma etching processing and thin film formation processing on a substrate G such as a transparent LCD glass substrate in a vacuum atmosphere, A load lock chamber 20 that is connected to the vacuum processing chamber 10 and functions as a vacuum preparatory chamber, a gate valve 30 provided between the vacuum processing chamber 10 and the load lock chamber 20, the load lock chamber 20 and the outside atmosphere A gate valve 40 that separates the side transfer mechanism 50 is provided.

  As shown in FIGS. 1 and 2, a vacuum pump 60 is connected to the vacuum processing chamber 10 via an exhaust control valve 61, and vacuum exhausting to a predetermined degree of vacuum processing for the substrate G is performed. It is possible. Further, a processing gas supply unit 12 is connected to the vacuum processing chamber 10 via a gas control valve 11, and a processing gas atmosphere having a predetermined pressure can be formed inside the vacuum processing chamber 10. ing. A processing stage 13 is provided inside the vacuum processing chamber 10 and a substrate G to be processed is placed thereon.

  The vacuum processing chamber 10 is provided with a base portion 14 provided with the processing stage 13, and an electrode (not shown) for supplying reaction energy into the vacuum processing chamber 10 and the processing gas atmosphere. It is comprised with the cover body 15 provided with the gas nozzle etc. which are not shown in figure for forming. The lid body 15 is provided with a pair of support shafts 16 at symmetrical positions in order to remove the lid body 15 from the base portion 14 from the outside during maintenance work as described later.

  A vacuum pump 60 is connected to the load lock chamber 20 via an exhaust control valve 62, and vacuum exhaust is possible to a degree of vacuum equivalent to that of the vacuum processing chamber 10.

  The gate valve 30 communicates with the vacuum processing chamber 10 and the load lock chamber 20, and has an opening 31 having a size through which a substrate G supported by a substrate transfer device 70 described later can pass, and opening / closing of the opening 31. A valve body 32 that performs the operation is provided.

  The gate valve 40 communicates with the load-lock chamber 20 and the outside atmosphere side, and an opening 41 having a size through which the substrate G supported by the atmosphere-side transport mechanism 50 can pass, and opening / closing of the opening 41 A valve element 42 for performing the operation is provided.

  Inside the load lock chamber 20, a substrate transfer device 70 is provided. As shown in FIGS. 3 to 5, the substrate transfer device 70 includes a base plate 71 fixed to the bottom of the load lock chamber 20, a plurality of slide plates 72 stacked on the base plate 71 in multiple stages, and slide plates. 73 and a slide plate 74 as a substrate support on which the substrate G is placed.

  The base plate 71 is provided with a pair of slide rails 71a that support the slide plate 72 directly above and guide it in the horizontal direction. In the base plate 71, an opening 71b parallel to the slide rail 71a is formed penetrating in the height direction at an asymmetric position between the pair of slide rails 71a. The opening 71b accommodates a pair of pulleys 71c provided at both ends with the axis thereof horizontal, and a belt 71d stretched around the pulley 71c. The upper span of the belt 71d (upper belt path between the pulleys 71c) is fixed to the bottom of the upper slide plate 72 via a fixing member 71e.

  The pulley 71c is connected to the drive motor 70a via the drive belt 70b. The drive motor 70a reciprocates the belt 71d stretched around the pulley 71c, thereby applying a horizontal thrust to the upper slide plate 72 via the fixing member 71e to reciprocate on the slide rail 71a. It is possible to move.

  The slide plate 72 is provided with a pair of slide rails 72a that support the slide plate 73 directly above and guide it in the horizontal direction. In the slide plate 72, an opening 72b parallel to the slide rail 72a is formed through the height direction at a position that does not overlap with the opening 71b of the lower base plate 71 between the pair of slide rails 72a. ing. Inside the opening 72b, a pair of pulleys 72c provided at both ends with the axis thereof horizontal, and a belt 72d stretched around the pulley 72c are accommodated.

  The upper span of the belt 72d is fixed to the bottom of the upper slide plate 73 via a fixing member 72e, and the lower span (the lower belt path between the pulleys 72c) of the belt 72d is connected to the lower side via the fixing member 71f. The base plate 71 is fixed.

  On both sides of the slide plate 73, a pair of slide rails 73a for supporting the slide plate 74 directly above and guiding it in the horizontal direction are provided. In the slide plate 73, an opening 73b parallel to the slide rail 73a penetrates in the height direction so as not to overlap the opening 72b of the lower slide plate 72 between the pair of slide rails 73a. Is formed. The opening 73b accommodates a pair of pulleys 73c provided at both ends with the axis thereof horizontal, and a belt 73d stretched around the pulley 73c.

  The upper span of the belt 73d is fixed to the bottom of the upper slide plate 74 via a fixing member 73e, and the lower span of the belt 73d is fixed to the lower slide plate 72 via a fixing member 72f.

  The uppermost slide plate 74 is provided with a pair of slide bearing portions 74 b that fit into the pair of slide rails 73 a provided on both side surfaces of the lower slide plate 73. Thus, by arranging the slide rails 73a on both side surfaces of the slide plate 73, the overall height of the substrate transfer device 70 can be lowered by the height dimension of the slide rail 73a. The slide plate 74 is provided with a substantially U-shaped slide pick portion 74a that supports the lower surface of the substrate G to be placed.

  In the substrate transport apparatus 70 having the above-described configuration, when the pulley 71c of the base plate 71 is rotated clockwise by the drive motor 70a from the contracted state illustrated in FIG. 5, the fixing member is fixed to the upper span of the belt 71d. The upper slide plate 72 fixed via 71e starts to move in the right direction in FIG.

  At this time, since the belt 72d of the slide plate 72 has its lower span fixed to the lower base plate 71, the belt 72d circulates in the clockwise direction as the slide plate 72 moves relative to the lower base plate 71. The slide plate 73 fixed to the upper span via the fixing member 72e starts to move so as to extend on the slide plate 72 in the right direction in FIG.

  Further, since the belt 73d of the slide plate 73 has a lower span fixed to the lower slide plate 72 via a fixing member 72f, the belt 73d circulates in the clockwise direction as the slide plate 73 moves relative to the lower slide plate 72. The uppermost slide plate 74 fixed via the fixing member 73e of the belt 73d moves on the slide plate 73 so as to extend rightward in FIG.

  Thereby, as illustrated in FIGS. 3 and 4, the slide plates 72 to 74 are moved by the distance that the fixing members 71 e to 73 e fixed to the upper spans of the belts 71 d to 73 d move to the right end of FIG. 3. Extends in multiple stages. The extension distance (conveyance distance) becomes longer in proportion to the number of slide plates stacked.

  Further, from the extended state of FIGS. 3 and 4, the drive motor 70a is rotated in the reverse direction to rotate the individual belts 71d to 73d counterclockwise, whereby the contracted state illustrated in FIG. 5 is obtained.

  Then, the substrate transfer device 70 extends the slide plates 72 to 74 in multiple stages in the horizontal direction as described above, and carries the substrate G supported by the slide plate 74 into the vacuum processing chamber 10, and the slide plate. The unloading operation of taking out the substrate G received on the slide plate 74 in the vacuum processing chamber 10 into the load lock chamber 20 is performed by degenerating 72 to 74 in multiple stages in the horizontal direction.

  As described above, in the substrate transfer apparatus 70 of the present embodiment, the base plate 71 and the slide plates 72 to 73 stacked in multiple stages are opened so as to perform the transfer operation of the substrate G placed on the uppermost slide plate 74. The portion 71b and the openings 72b to 73b are formed, and the pulley 71c, the pulleys 72c to 73c, the belt 71d, and the belts 72d to 73d are accommodated therein. In the vertical direction, only the thickness of the slide plate is increased, and no increase in dimension in the height direction due to the thickness of the driving mechanism such as a pulley or a belt occurs.

  That is, it is possible to achieve an increase in the conveyance distance due to an increase in the number of stacked slide plates without increasing the height direction dimension.

  Further, the height dimension can be further reduced by alternately arranging the positions of the openings 71b and the openings 72b to 73b in positions that do not interfere with each other in the height direction.

  Inside the load lock chamber 20, a substrate delivery mechanism 80 including a buffer plate 81 and a buffer plate 82 and a buffer raising / lowering mechanism (not shown) for raising and lowering the buffer plates 81 and 82 is provided at a position sandwiching the substrate transfer device 70. The peripheral portion of the substrate G placed on the slide plate 74 of the substrate transport apparatus 70 is supported from below by the buffer plates 81 and 82, and the substrate G is floated from the slide plate 74, and the atmosphere A substrate transfer operation such as an operation of lowering the substrate G received from the side transport mechanism 50 onto the slide plate 74 is performed.

  The atmosphere-side transport mechanism 50 includes a transport arm 51 that can rotate and extend, and takes out an unprocessed substrate G from the transport arm 51 from a substrate rack 55 in which a plurality of substrates G are stored. The operation of passing the substrate G to the substrate transfer device 70 in the load lock chamber 20 through the valve 40 and the processed substrate G from the substrate transfer device 70 in the load lock chamber 20 and taking it out to the atmosphere side through the gate valve 40 Then, an operation of storing in the substrate rack 55 is performed.

  Next, the operation of this embodiment will be described. First, the substrate transfer device 70 is in a degenerated state in the load lock chamber 20, the valve body 32 of the gate valve 30 is closed, and the inside of the vacuum processing chamber 10 is evacuated to a required vacuum degree by the vacuum pump 60. .

  The atmosphere-side transport mechanism 50 takes out the unprocessed substrate G from the substrate rack 55 by the transport arm 51, loads it into the load lock chamber 20 through the opening 41 of the gate valve 40, and slides 74 in the substrate transport device 70. It is positioned directly above.

  Next, the buffer plates 81 and 82 rise and lift the peripheral portion of the substrate G from both sides, so that the substrate G floats from the transfer arm 51.

  Thereafter, the transfer arm 51 is pulled out to the atmosphere side and retracted to the outside of the load lock chamber 20, and then the buffer plates 81 and 82 are lowered, whereby the substrate G is moved to the slide plate 74 (slide pick unit) of the substrate transfer device 70. 74a) is moved on and placed.

  Then, the valve body 42 of the gate valve 40 is closed to make the load lock chamber 20 hermetically sealed, the exhaust control valve 62 is opened to exhaust the vacuum to the same degree as the vacuum processing chamber 10, and then the valve body 32 of the gate valve 30. open. At this time, since the load lock chamber 20 is evacuated, the degree of vacuum and the atmosphere of the vacuum processing chamber 10 are not impaired. Then, through the opening 31 of the gate valve 30, the slide plates 72 to 74 of the substrate transfer device 70 are extended in multiple stages toward the inside of the vacuum processing chamber 10 as shown in FIG. 3, and the substrate G is processed in the vacuum processing chamber 10. The slide plates 72 to 74 are retracted into the load lock chamber 20 after being carried directly above the stage 13 and placed on the processing stage 13 via a push-up pin (not shown) provided in the vacuum processing chamber 10. The valve body 32 of the gate valve 30 is closed and the vacuum processing chamber 10 is sealed.

  Thereafter, necessary gas is introduced from the processing gas supply unit 12 into the sealed vacuum processing chamber 10 to form a processing gas atmosphere, and the substrate G is subjected to necessary processing.

  After the elapse of a predetermined time, the introduction of the processing gas is stopped, the valve body 32 of the gate valve 30 is opened, and the slide plates 72 to 74 of the substrate transfer device 70 in the load lock chamber 20 are multistaged inside the vacuum processing chamber 10. The substrate G that has been processed in the vacuum processing chamber 10 is transferred from the processing stage 13 to the slide plate 74 in a procedure reverse to the above-described loading operation, the slide plates 72 to 74 are contracted, and the load lock chamber 20 After carrying out to the inside, the valve body 32 of the gate valve 30 is closed, and the vacuum processing chamber 10 is sealed.

Thereafter, the exhaust of the load lock chamber 20 is stopped, the buffer plates 81 and 82 are raised, the peripheral portion of the substrate G is supported and floated, and N ₂ or the like is introduced to obtain a pressure close to the atmosphere. The valve body 42 of the gate valve 40 is opened, the transfer arm 51 of the atmosphere-side transfer mechanism 50 is inserted below the floating substrate G, and the buffer plates 81 and 82 are lowered in this state to transfer the substrate G. Transition to the arm 51.

  Then, by pulling the transfer arm 51 to the atmosphere side, the processed substrate G is carried out from the load lock chamber 20 to the atmosphere side and stored in the substrate rack 55.

  Here, when the size of the substrate G is increased when the substrate G is taken in and out of the vacuum processing chamber 10 via the load lock chamber 20 as described above, the horizontal transfer distance via the load lock chamber 20 also increases. Although it is necessary to increase the transport distance by increasing the number of stacking stages of the slide plate of the substrate transport apparatus 70, the substrate transport apparatus 70 as in this embodiment increases the transport distance by increasing the number of stacking stages of the slide plate as described above. However, an increase in the dimension in the height direction can be suppressed.

  As a result, the volume of the load lock chamber 20 in which the substrate transfer apparatus 70 is accommodated can be reduced, the time required for evacuation of the load lock chamber 20 can be shortened, and the substrate G including the time required for exhausting the load lock chamber 20 can be reduced. Throughput in the vacuum processing step is improved.

  In particular, in the load lock chamber 20 that accommodates a large substrate G with one side exceeding 1 m, the horizontal cross-sectional area becomes large, and the reduction in the height dimension of the load lock chamber 20 has a large volume reduction effect and requires exhaust. It greatly contributes to shortening of time.

  Next, an example of the maintenance management technique of the vacuum processing apparatus 100 described above will be described. In maintenance management of the vacuum processing apparatus 100, the lid 15 may be removed from the base portion 14 of the vacuum processing chamber 10 to clean the inside.

  On the other hand, the substrate G processing step may be a multi-chamber system in which a plurality of vacuum processing chambers 10 (vacuum processing apparatuses 100) are arranged as illustrated in FIG. In that case, if each vacuum processing chamber 10 is configured to include a lid 15 opening / closing mechanism, the installation floor area of each device increases and the efficiency is poor. In particular, in the vacuum processing apparatus 100 for processing a large substrate G, the single apparatus itself is also increased in size. Therefore, if an open / close mechanism is provided for each vacuum processing chamber, the increase in the floor area in the multi-chamber system is not achieved. Even more striking.

  Therefore, in the present embodiment, as illustrated in FIG. 6, the lid opening / closing mechanism 200 common to the plurality of vacuum processing chambers 10 (vacuum processing apparatuses 100) is provided.

  That is, the lid opening / closing mechanism 200 is provided on the carriage 201 and is movable between the plurality of vacuum processing apparatuses 100 by self-propelling with the wheels 201a, and between the vertical state and the horizontal state. A pair of rails 202 provided with a bendable movable rail 202a and a movable bearing 203 moving on the rail 202 are provided.

  Then, using the common lid opening / closing mechanism 200, the lids 15 of the individual vacuum processing chambers 10 are opened and closed as shown in FIG.

  That is, first, the lid opening / closing mechanism 200 is moved to a position facing the target vacuum processing chamber 10, and the movable rail 202 a is sandwiched between the vacuum processing chamber 10 as illustrated in FIG. 7A. The pair of movable bearings 203 is fitted to the pair of support shafts 16 of the lid 15 so that the lid 15 is lifted vertically upward and separated from the base body 14.

  Thereafter, as illustrated in FIG. 7B, the movable bearing portion 203 that supports the lid 15 is moved onto the carriage 201. Thereby, the upper part of the base | substrate part 14 is open | released and maintenance operations, such as cleaning of the process stage 13 in the base | substrate part 14, are attained.

  Further, as illustrated in FIG. 7C, on the carriage 201, the lid body 15 is rotated 90 degrees so that the opening portion faces outward, and is locked at that position. 15 can be easily maintained and inspected.

  Further, as illustrated in FIG. 7D, the lid 15 exists inside the lid 15 by rotating 180 degrees so that the opening portion faces upward and locking at that position. A heavy load such as a gas supply head (not shown) can be attached and detached by a lifting crane or the like.

  In addition, the lid 15 can be attached to the base portion 14 in the reverse procedure to that described above. Moreover, after mounting | wearing, the cover body opening / closing mechanism 200 will be in a standby state like FIG. 6 which folded the movable arm 200a vertically.

  As described above, the common lid opening / closing mechanism 200 is provided for the plurality of vacuum processing chambers 10 (vacuum processing apparatuses 100), and the lid 15 is opened and closed in maintenance management work or the like, thereby saving the space of the entire apparatus. And cost reduction by sharing the lid opening / closing mechanism.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.
FIG. 8 is a vertical sectional view showing a substrate transfer apparatus according to the second embodiment of the present invention, FIG. 9 is a view showing a degenerated state of the substrate transfer apparatus according to the second embodiment of the present invention, and FIG. It is a figure which shows the expansion | extension state of the board | substrate conveyance apparatus which concerns on 2nd Embodiment. 9 and 10, both (a) is a side view and (b) is a plan view.

  The substrate transfer apparatus 170 is provided in the load lock chamber 20 of the vacuum processing apparatus 100 as in the first embodiment. The substrate transfer device 170 includes a base 171 provided at the bottom of the load lock chamber 20, a slide arm 172 slidably provided on the base 171, and a substrate slidably provided on the slide arm 172. A slide pick 173 as a support base for supporting the motor, a motor 174 that is provided below the base portion 171 and drives the slide arm 172 and the slide pick 173, and the driving force of the motor 174 is changed to the slide arm 172 and the slide pick. And a drive transmission mechanism 180 for transmitting to 173.

  The slide arm 172 has a pair of side plates 172a and 172b that are arranged vertically and face each other with a gap therebetween, and one end of the slide arm 172 has a lower portion cut out over a predetermined length. The projecting portions 172c and 172d are in the state. A drive transmission mechanism 180 is provided between the side plates 172a and 172b. Further, as shown in FIG. 8, the slide arm 172 slides on the outer surface of the pair of side plates 172 a and 172 b with respect to the base 171 and the guide mechanism 175 for sliding the slide pick 173 with respect to the slide arm 172. A guide mechanism 176 is provided. The guide mechanism 175 includes a guide rail 175a attached to the side plates 172a and 172b, and a guide member 175b attached to the slide pick 173 and slidably fitted to the guide rail 175a. The guide mechanism 176 includes a guide rail 176a attached to the side plates 172a and 172b, and a guide member 176b attached to the base portion 171 and slidably fitted to the guide rail 176a.

  The drive transmission mechanism 180 includes a slide arm drive unit 181 and a slide pick drive unit 182. The slide arm drive unit 181 is directly connected to the motor 174 and rotates horizontally, a drive pulley 183 that is wound around the drive pulley 183, and a drive belt 184 that is fixed to the side plate 172a of the slide arm 172 by fixing members 184a and 184b. And a pair of idlers 185a and 185b provided on both sides of the pulley 183. The slide pick drive unit 182 includes a pulley 187 fixed to a shaft 186 provided so as to connect the vicinity of the ends of the pair of side plates 172a and 172b opposite to the protruding portions 172c and 172d, and the pair of side plates 172a and 172b. A pulley 189 fixed to a shaft 188 provided so as to connect the central portion of the first belt 190, a first belt 190 stretched around the pulleys 187 and 189, and a lower span of the first belt 190 are connected to the base portion 171. A first locking member 191 to be stopped, a pulley 192 having a diameter larger than that of the pulley 187, which is fixed to the shaft 187 so as to be adjacent to the pulley 187, and ends of the pair of side plates 172a and 172b on the protruding portions 172c and 172d side A pulley 194 fixed to a shaft 193 provided so as to connect the vicinity, and a second belt stretched around these pulleys 192 and 194 95, and a second locking member 196 for locking the upper span of the second belt 195 to slide the pick. Further, pulleys 197 and 198 are arranged so as to guide the second belt 195 along the projecting portions 172c and 172d.

  In the substrate transport apparatus 170 configured as described above, the slide arm 172 and the slide pick 173 are driven via the drive transmission mechanism 180 by driving the motor 174 as a drive source. At that time, first, the rotational drive of the motor 174 is transmitted to the drive belt 184 via the drive pulley 183 of the slide arm drive unit 182, and the drive belt 184 is fixed to the side plate 172 a of the slide arm 172. 172 slides from the state shown in FIG.

  At this time, since the first locking member 191 of the slide pick driving unit 182 locks the lower span of the first belt 190 to the base unit 171, the first belt 190 is moved to the arrow as the slide arm 172 slides. Moving in the A direction, the pulley 187 rotates. When the pulley 187 rotates, the pulley 192 fixed to the shaft 186 rotates via the shaft 186 fixed to the pulley 187 and the second belt 195 moves in the direction of the arrow A. Accordingly, the second locking member 196 is moved. As a result, the slide pick 173 locked to the upper span of the second belt 195 moves in the direction of arrow A, so that the contracted state of FIG. 9 changes to the extended state of FIG.

  In this case, since the pulley 187 and the pulley 192 are fixed to the same shaft 186, the ratio of the moving distances of the first belt 190 and the second belt 195, that is, the slide arm 172 and the slide pick are determined by their diameter ratio. The ratio of the movement distance of 173 is determined. Here, since the pulley 192 has a larger diameter than the pulley 187, the movement distance of the slide pick 173 is longer than the movement distance of the slide arm 172. For example, if the diameter of the pulley 192 is n times the diameter of the pulley 187, the slide pick 173 is moved to the slide arm 172 when the slide arm 172 moves a distance L as shown in FIGS. It moves up by a distance of n × L, and the total movement distance of the slide pick 173 is (n × L) + L. In this case, n can be set to an arbitrary value larger than 1.

  Thus, since the slide stroke of the slide pick 173 on the slide arm 172 can be made longer than the slide stroke of the slide arm 172, the stroke of the slide arm 172 is limited because it is accommodated in the load lock chamber 20. In addition, the stroke of the slide pick 173 can be sufficiently taken by appropriately setting the diameter ratio between the pulley 187 and the pulley 192. For this reason, the slide stroke of a sufficient distance for transporting the substrate between the load lock chamber 20 and the vacuum processing chamber 10 can be ensured by only one slide arm 172 and one slide pick 173, and the first implementation. The number of stacked slide arms can be reduced as compared with a linear motion type substrate transfer apparatus using a pulley having the same size as in the embodiment, and the height dimension of the substrate transfer apparatus can be reduced accordingly.

  As a result, the volume of the load lock chamber 20 in which the substrate transfer apparatus 170 is accommodated can be reduced, and the time required for evacuation of the load lock chamber 20 can be shortened. Further, the throughput in the vacuum processing step of the substrate G is improved. In particular, in the load lock chamber 20 that accommodates a large substrate G with one side exceeding 1 m, the horizontal cross-sectional area becomes large, and the reduction in the height dimension of the load lock chamber 20 has a large volume reduction effect and requires exhaust. It greatly contributes to shortening of time.

  Note that two or more slide arms may be stacked from the viewpoint of securing a further transport distance. FIG. 11 shows an example in which another slide arm 172 ′ is provided on the slide arm 172. In this case, the slide arm 172 ′ may have the same structure as the slide arm 172, or may have the same structure as the slide plates 72 and 73 of the first embodiment. By making the slide arm 172 'the same configuration as the slide arm 172, it is possible to ensure a significantly large transport distance.

  Further, the substrate transfer apparatus of the present embodiment can be applied to a type in which slide picks are provided in two stages and the substrates can be taken in and out independently. FIG. 12 is a vertical sectional view showing such a type of substrate transfer apparatus. The substrate transfer apparatus 300 includes a lower transfer mechanism 270 and an upper transfer mechanism 270 ′.

  The lower transport mechanism 270 includes a base 271, a slide arm 272 slidably provided on the base 271, and a slide pick as a support for supporting a substrate slidably provided on the slide arm 272. 273, a motor 274 that is provided below the base portion 271 and drives the slide arm 272 and the slide pick 273, and a drive transmission mechanism 280 that transmits the driving force of the motor 274 to the slide arm 272 and the slide pick 273. It has. A guide mechanism 275 for sliding the slide pick 273 with respect to the slide arm 272 and a guide mechanism 276 for sliding the slide arm 272 with respect to the base portion 271 are provided on the outer surfaces of the pair of side plates 272a and 272b. It has been.

  The upper transport mechanism 270 ′ supports a base 271 ′, a slide arm 272 ′ slidably provided on the base 271 ′, and a substrate slidably provided on the slide arm 272 ′. A slide pick 273 ′ serving as a table, a motor 274 ′ that is provided below the base portion 271 of the lower transport mechanism 270 and drives the slide arm 272 ′ and the slide pick 273 ′, and a driving force for the slide arm 272 'And the pick 273' are provided with a first drive transmission mechanism 280 'and a second drive transmission mechanism 290 that transmits the driving force of the motor 274' to the first drive transmission mechanism 280 '. Further, on the outer surfaces of the pair of side plates 272a ′ and 272b ′, the slide arm 272 ′ slides relative to the base portion 271 ′ and the guide mechanism 275 ′ for sliding the slide pick 273 ′ relative to the slide arm 272 ′. A guide mechanism 276 'is provided. The base portion 271 ′ of the upper transport mechanism portion 270 ′ is provided on the spacer 301 provided on the lower transport mechanism portion 270.

  The drive transmission mechanism 280 of the lower conveyance mechanism section 270 and the first drive transmission mechanism 280 ′ of the upper conveyance mechanism section 270 ′ are depicted only as drive pulleys 283 and 283 ′, respectively. Since the transmission mechanism 180 has exactly the same configuration, other members are omitted.

  On the other hand, the second drive transmission mechanism 290 of the upper transport mechanism 270 ′ is provided in the base 271 of the lower transport mechanism 270 and directly connected to the motor 274 ′, and at the end in the base 271. Provided at a position corresponding to the pulley 292 provided, the belt 293 stretched around the pulleys 291 and 292, and the pulley 292 in the base portion 271 ′ of the upper transport mechanism portion 270 ′, and connected and fixed by the pulley 292 and the shaft 294 And a pulley 296 provided immediately below the drive pulley 283 ′ in the base portion 271 ′, and a belt 297 stretched around the pulleys 295 and 296. In the second drive transmission mechanism 290, the drive of the motor 274 ′ is transmitted to the drive pulley 291 and further transmitted to the pulley 292 via the belt 293. The rotational drive of the pulley 292 is transmitted to the pulley 295 via the shaft 294, and further transmitted to the pulley 296 via the belt 297, and the rotational drive of this pulley 296 is transmitted to the drive pulley 283 'of the first drive transmission mechanism 280'. Is done.

  In such a substrate transport apparatus 300, by driving the motor 274, the slide arm 272 and the slide pick 273 of the lower transport mechanism 270 are slid through the drive transmission mechanism 280, thereby causing the substrate in the upper transport mechanism 270. When the conveyance is achieved and the motor 274 ′ is driven, the slide arm 272 ′ and the slide pick 273 ′ of the upper conveyance mechanism unit 270 ′ are slid through the second drive transmission mechanism 290 and the first drive transmission mechanism 280 ′. As a result, the substrate transport by the upper transport mechanism 270 ′ is achieved completely independently of the lower transport mechanism 270.

  As described above, since the two-stage transport mechanism portion is provided and the substrates can be transported completely independently by the two slide picks, the substrate transport throughput can be significantly increased. Further, by providing the base portion 271 with a rotation function, the present invention can also be applied to a multi-chamber type processing apparatus in which a plurality of processing chambers are connected to a vacuum preliminary chamber. Furthermore, since the substrate transfer apparatus of the present embodiment is configured to have a low height by reducing the number of steps of the slide arm, the height dimension is kept relatively small even if such a two-stage transfer mechanism is provided. can do.

  It should be noted that the present invention is not limited to the above-described embodiment and can be variously modified within the scope of the idea of the present invention. For example, although a belt is used as the slide drive mechanism of the first embodiment and the drive transmission mechanism of the second embodiment, the present invention is not limited to this, and other transmission means such as a chain, a link, and a gear may be used.

  Further, although the case where a flat display substrate such as an LCD or a plasma display is used as the substrate has been described, the present invention can also be applied to other large substrates.

  As described above, the substrate transfer apparatus of the present invention is suitable as a substrate transfer apparatus installed in a vacuum preliminary chamber adjacent to a vacuum processing chamber in a vacuum processing apparatus.

The perspective view which shows the external appearance of the vacuum processing apparatus with which the substrate conveying apparatus which concerns on the 1st Embodiment of this invention is applied. Sectional drawing which shows the vacuum preliminary | backup chamber and vacuum processing chamber in the vacuum processing apparatus with which the substrate conveying apparatus which concerns on the 1st Embodiment of this invention is applied. 1 is a perspective view showing a substrate transfer apparatus according to a first embodiment of the present invention. Sectional drawing which shows the board | substrate conveyance apparatus which concerns on the 1st Embodiment of this invention. Sectional drawing which shows the board | substrate conveyance apparatus which concerns on the 1st Embodiment of this invention. FIG. 2 is an external perspective view showing an example of a configuration of a multi-chamber system including the vacuum processing apparatus of FIG. 1. FIG. 7 is an external perspective view showing the operation of the multi-chamber system of FIG. 6. The vertical sectional view showing the substrate transfer device concerning a 2nd embodiment of the present invention. The side view and top view which show the degenerated state of the board | substrate conveyance apparatus which concerns on the 2nd Embodiment of this invention. The side view and top view which show the expansion | extension state of the board | substrate conveyance apparatus which concerns on the 2nd Embodiment of this invention. The side view which shows the modification of the board | substrate conveyance apparatus which concerns on the 2nd Embodiment of this invention. The vertical sectional view which shows the example which applied the board | substrate conveyance apparatus which concerns on the 2nd Embodiment of this invention to the board | substrate conveyance apparatus of the type which can provide a slide pick in two steps | paragraphs and can each take in / out a board | substrate independently.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Vacuum processing chamber 14 ... Base | substrate part 15 ... Cover body 16 ... Support shaft 20 ... Load lock chamber 30, 40 ... Gate valve 50 ... Atmosphere side conveyance mechanism 60 ... Vacuum pumps 70, 170, 300... Substrate transport device 70 a... Drive motor 70 b... Drive belt 71... Base plate 71 a, 72 a to 73 a. 71e …… Fixing members 72, 73, 74 …… Slide plates 72b to 73b …… Openings 72e to 73e, 72f to 73f …… Fixing member 74a …… Slide pick portion 74b …… Slide bearing portion 100 …… Vacuum processing apparatus 171, 271, 271 ′, base portions 172, 272, 272 ′, slide arms 173, 273, 273 ′, etc. Slide picks 174, 273, 274 ′ …… Motors 180, 280 …… Drive transmission mechanism 181 …… Slide arm drive 182 …… Slide pick drive 183 …… Drive pulley 184 …… Drive belt 186 …… Shaft 187 …… Pulley (first pulley)
190... First belt 191... First locking member 192... Pulley (second pulley)
195... Second belt 196... Second locking member 270... Lower transport mechanism 270 ′ Upper transport mechanism 280 ′ First drive transmission mechanism 290.

Claims (8)

A vacuum processing chamber lid opening / closing mechanism for opening and closing the lid in a vacuum processing chamber having a base and a lid detachably provided on the base,
A movable carriage,
A pair of support portions provided on the carriage and supporting the lid;
A pair of rails provided on the carriage for moving the pair of support portions between the vacuum processing chamber and the carriage;
Moving the lid on the carriage in a state of being supported by the pair of support portions;
A lid opening / closing mechanism for a vacuum processing chamber, wherein the lid is configured to rotate on a line connecting the pair of support portions on the carriage .   The lid opening / closing mechanism of the vacuum processing chamber according to claim 1, wherein the lid opening / closing mechanism of the vacuum processing chamber is provided in common to the plurality of vacuum processing chambers.   3. The lid opening / closing mechanism of the vacuum processing chamber according to claim 1, wherein the support portion floats in a vertical direction while supporting the lid, and is separated from the base portion. 4.   The vacuum according to any one of claims 1 to 3, wherein the support part is configured to open the base part by moving the support body while supporting the lid. A lid opening / closing mechanism for the processing chamber. The pair of rails includes a movable part that can be bent between a vertical state and a horizontal state, and the movable part can be rotated to a horizontal position so as to sandwich the vacuum processing chamber. The lid opening / closing mechanism for a vacuum processing chamber according to any one of claims 1 to 4. The lid opening / closing mechanism for a vacuum processing chamber according to any one of claims 1 to 5 , wherein the support portion is fitted to a support shaft provided on the lid. A lid opening / closing method of a vacuum processing chamber for opening / closing the lid in a vacuum processing chamber having a base portion and a lid provided detachably on the base portion,
The lid opening / closing mechanism according to claim 1, comprising a movable carriage and provided in common to the plurality of vacuum processing chambers, is moved to a position facing the target vacuum processing chamber,
Next, the lid body is lifted upward by the lid opening / closing mechanism and separated from the base portion,
Next, the lid body opening / closing method of the vacuum processing chamber, wherein the lid body is moved onto the carriage to open the base portion. 8. The method of opening and closing a lid in a vacuum processing chamber according to claim 7 , wherein the lid is locked at a position rotated by 90 degrees or a position rotated by 180 degrees .

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