TW200944459A - Substrate conveying system and semiconductor manufacturing apparatus using the same - Google Patents
Substrate conveying system and semiconductor manufacturing apparatus using the same Download PDFInfo
- Publication number
- TW200944459A TW200944459A TW97148771A TW97148771A TW200944459A TW 200944459 A TW200944459 A TW 200944459A TW 97148771 A TW97148771 A TW 97148771A TW 97148771 A TW97148771 A TW 97148771A TW 200944459 A TW200944459 A TW 200944459A
- Authority
- TW
- Taiwan
- Prior art keywords
- roller
- opening
- belt
- sealing belt
- substrate
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 59
- 239000004065 semiconductor Substances 0.000 title claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 238000007789 sealing Methods 0.000 claims abstract description 57
- 239000000428 dust Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 239000000314 lubricant Substances 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007336296 | 2007-12-27 | ||
| JP2008297260A JP5245757B2 (ja) | 2007-12-27 | 2008-11-20 | 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200944459A true TW200944459A (en) | 2009-11-01 |
| TWI369330B TWI369330B (enrdf_load_stackoverflow) | 2012-08-01 |
Family
ID=40828586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW97148771A TW200944459A (en) | 2007-12-27 | 2008-12-15 | Substrate conveying system and semiconductor manufacturing apparatus using the same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5245757B2 (enrdf_load_stackoverflow) |
| CN (1) | CN101471274B (enrdf_load_stackoverflow) |
| TW (1) | TW200944459A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI506716B (zh) * | 2009-12-01 | 2015-11-01 | Tokyo Electron Ltd | Substrate handling device and substrate processing system |
| US10083851B2 (en) | 2013-09-09 | 2018-09-25 | Kawasaki Jukogyo Kabushiki Kaisha | Robot with inner and outer belt sections |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5304601B2 (ja) * | 2009-11-10 | 2013-10-02 | 株式会社安川電機 | アーム機構およびそれを備えた真空ロボット |
| KR101477835B1 (ko) * | 2010-07-15 | 2014-12-30 | 현대중공업 주식회사 | 랙-피니언 구동형 로봇용 승강 조립체의 오염 정화 유닛 |
| JP2013153108A (ja) * | 2012-01-26 | 2013-08-08 | Yaskawa Electric Corp | 基板位置決め装置 |
| JP5663638B2 (ja) * | 2012-10-11 | 2015-02-04 | 株式会社ティーイーエス | 基板移送装置 |
| KR101773169B1 (ko) * | 2016-02-12 | 2017-08-31 | 현대로보틱스주식회사 | 기판 반송용 로봇 |
| JP6839993B2 (ja) * | 2017-02-09 | 2021-03-10 | 日本電産サンキョー株式会社 | 搬送システム |
| CN112147133A (zh) * | 2019-06-28 | 2020-12-29 | 尤妮佳股份有限公司 | 评价湿片材是否会发生黄变的评价方法 |
| CN115818254B (zh) * | 2023-02-16 | 2023-05-02 | 秦皇岛市奥晶玻璃制品有限公司 | 一种电磁屏蔽玻璃加工上料装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04300194A (ja) * | 1991-03-28 | 1992-10-23 | Yamaha Corp | 直動機構の防塵装置 |
| JP3113411B2 (ja) * | 1992-03-18 | 2000-11-27 | 東京エレクトロン株式会社 | 洗浄装置 |
| JPH08279545A (ja) * | 1995-04-06 | 1996-10-22 | Dainippon Screen Mfg Co Ltd | 基板搬送装置 |
| JP2007303523A (ja) * | 2006-05-10 | 2007-11-22 | Nsk Ltd | アクチュエータ |
-
2008
- 2008-11-20 JP JP2008297260A patent/JP5245757B2/ja not_active Expired - Fee Related
- 2008-12-15 TW TW97148771A patent/TW200944459A/zh not_active IP Right Cessation
- 2008-12-25 CN CN2008101765895A patent/CN101471274B/zh not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI506716B (zh) * | 2009-12-01 | 2015-11-01 | Tokyo Electron Ltd | Substrate handling device and substrate processing system |
| US10083851B2 (en) | 2013-09-09 | 2018-09-25 | Kawasaki Jukogyo Kabushiki Kaisha | Robot with inner and outer belt sections |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5245757B2 (ja) | 2013-07-24 |
| CN101471274A (zh) | 2009-07-01 |
| TWI369330B (enrdf_load_stackoverflow) | 2012-08-01 |
| JP2009173444A (ja) | 2009-08-06 |
| CN101471274B (zh) | 2010-08-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |