JP5245757B2 - 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置 - Google Patents

防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置 Download PDF

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Publication number
JP5245757B2
JP5245757B2 JP2008297260A JP2008297260A JP5245757B2 JP 5245757 B2 JP5245757 B2 JP 5245757B2 JP 2008297260 A JP2008297260 A JP 2008297260A JP 2008297260 A JP2008297260 A JP 2008297260A JP 5245757 B2 JP5245757 B2 JP 5245757B2
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Japan
Prior art keywords
roller
seal belt
opening
seal
substrate transfer
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Expired - Fee Related
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JP2008297260A
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English (en)
Japanese (ja)
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JP2009173444A (ja
JP2009173444A5 (enrdf_load_stackoverflow
Inventor
謙太郎 田中
智 末吉
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2008297260A priority Critical patent/JP5245757B2/ja
Priority to KR1020080122220A priority patent/KR101076481B1/ko
Priority to TW97148771A priority patent/TW200944459A/zh
Priority to CN2008101765895A priority patent/CN101471274B/zh
Publication of JP2009173444A publication Critical patent/JP2009173444A/ja
Publication of JP2009173444A5 publication Critical patent/JP2009173444A5/ja
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Publication of JP5245757B2 publication Critical patent/JP5245757B2/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2008297260A 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置 Expired - Fee Related JP5245757B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008297260A JP5245757B2 (ja) 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置
KR1020080122220A KR101076481B1 (ko) 2007-12-27 2008-12-04 방진 기구를 구비한 기판 반송 장치 및 시스템, 이들을 이용한 반도체 제조 장치
TW97148771A TW200944459A (en) 2007-12-27 2008-12-15 Substrate conveying system and semiconductor manufacturing apparatus using the same
CN2008101765895A CN101471274B (zh) 2007-12-27 2008-12-25 基板搬运系统及利用其的半导体制造装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007336296 2007-12-27
JP2007336296 2007-12-27
JP2008297260A JP5245757B2 (ja) 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置

Publications (3)

Publication Number Publication Date
JP2009173444A JP2009173444A (ja) 2009-08-06
JP2009173444A5 JP2009173444A5 (enrdf_load_stackoverflow) 2011-06-23
JP5245757B2 true JP5245757B2 (ja) 2013-07-24

Family

ID=40828586

Family Applications (1)

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JP2008297260A Expired - Fee Related JP5245757B2 (ja) 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置

Country Status (3)

Country Link
JP (1) JP5245757B2 (enrdf_load_stackoverflow)
CN (1) CN101471274B (enrdf_load_stackoverflow)
TW (1) TW200944459A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101773169B1 (ko) * 2016-02-12 2017-08-31 현대로보틱스주식회사 기판 반송용 로봇

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5304601B2 (ja) * 2009-11-10 2013-10-02 株式会社安川電機 アーム機構およびそれを備えた真空ロボット
JP5480605B2 (ja) * 2009-12-01 2014-04-23 東京エレクトロン株式会社 基板搬送装置および基板処理システム
KR101477835B1 (ko) * 2010-07-15 2014-12-30 현대중공업 주식회사 랙-피니언 구동형 로봇용 승강 조립체의 오염 정화 유닛
JP2013153108A (ja) * 2012-01-26 2013-08-08 Yaskawa Electric Corp 基板位置決め装置
JP5663638B2 (ja) * 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置
JP6220197B2 (ja) * 2013-09-09 2017-10-25 川崎重工業株式会社 ロボット
JP6839993B2 (ja) * 2017-02-09 2021-03-10 日本電産サンキョー株式会社 搬送システム
CN112147133A (zh) * 2019-06-28 2020-12-29 尤妮佳股份有限公司 评价湿片材是否会发生黄变的评价方法
CN115818254B (zh) * 2023-02-16 2023-05-02 秦皇岛市奥晶玻璃制品有限公司 一种电磁屏蔽玻璃加工上料装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04300194A (ja) * 1991-03-28 1992-10-23 Yamaha Corp 直動機構の防塵装置
JP3113411B2 (ja) * 1992-03-18 2000-11-27 東京エレクトロン株式会社 洗浄装置
JPH08279545A (ja) * 1995-04-06 1996-10-22 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP2007303523A (ja) * 2006-05-10 2007-11-22 Nsk Ltd アクチュエータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101773169B1 (ko) * 2016-02-12 2017-08-31 현대로보틱스주식회사 기판 반송용 로봇

Also Published As

Publication number Publication date
CN101471274A (zh) 2009-07-01
TWI369330B (enrdf_load_stackoverflow) 2012-08-01
JP2009173444A (ja) 2009-08-06
TW200944459A (en) 2009-11-01
CN101471274B (zh) 2010-08-18

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