TW200904924A - Adhesive composition, adhesive sheet and production process for semiconductor device - Google Patents

Adhesive composition, adhesive sheet and production process for semiconductor device Download PDF

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Publication number
TW200904924A
TW200904924A TW097111228A TW97111228A TW200904924A TW 200904924 A TW200904924 A TW 200904924A TW 097111228 A TW097111228 A TW 097111228A TW 97111228 A TW97111228 A TW 97111228A TW 200904924 A TW200904924 A TW 200904924A
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TW
Taiwan
Prior art keywords
adhesive
wafer
adhesive layer
substrate
weight
Prior art date
Application number
TW097111228A
Other languages
English (en)
Chinese (zh)
Inventor
Isao Ichikawa
Naoya Saiki
Hironori Shizuhata
Original Assignee
Lintec Corp
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Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of TW200904924A publication Critical patent/TW200904924A/zh

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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J163/00Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D133/00Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Coating compositions based on derivatives of such polymers
    • C09D133/04Homopolymers or copolymers of esters
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    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836Wafer tapes, e.g. grinding or dicing support tapes
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    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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  • Adhesives Or Adhesive Processes (AREA)
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW097111228A 2007-03-29 2008-03-28 Adhesive composition, adhesive sheet and production process for semiconductor device TW200904924A (en)

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TWI651380B (zh) * 2016-10-05 2019-02-21 南韓商Lg化學股份有限公司 半導體裝置用黏著樹脂組成物、半導體裝置用黏著膜、及切割晶粒接合膜

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TWI651380B (zh) * 2016-10-05 2019-02-21 南韓商Lg化學股份有限公司 半導體裝置用黏著樹脂組成物、半導體裝置用黏著膜、及切割晶粒接合膜

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