TW200833611A - Method of increasing purity of ultrapure water and apparatus therefor - Google Patents

Method of increasing purity of ultrapure water and apparatus therefor

Info

Publication number
TW200833611A
TW200833611A TW096141005A TW96141005A TW200833611A TW 200833611 A TW200833611 A TW 200833611A TW 096141005 A TW096141005 A TW 096141005A TW 96141005 A TW96141005 A TW 96141005A TW 200833611 A TW200833611 A TW 200833611A
Authority
TW
Taiwan
Prior art keywords
ultrapure water
ion exchange
metal ions
exchange resin
purity
Prior art date
Application number
TW096141005A
Other languages
English (en)
Other versions
TWI549912B (zh
Inventor
Hideki Kobayashi
Kunihiro Hayakawa
Masanobu Osawa
Original Assignee
Kurita Water Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurita Water Ind Ltd filed Critical Kurita Water Ind Ltd
Publication of TW200833611A publication Critical patent/TW200833611A/zh
Application granted granted Critical
Publication of TWI549912B publication Critical patent/TWI549912B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/16—Feed pretreatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/025—Reverse osmosis; Hyperfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/027—Nanofiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/145—Ultrafiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/147—Microfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/14—Pleat-type membrane modules
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage
    • C02F9/20—Portable or detachable small-scale multistage treatment devices, e.g. point of use or laboratory water purification systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/04—Specific process operations in the feed stream; Feed pretreatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/16—Flow or flux control
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water

Landscapes

  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nanotechnology (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Clinical Laboratory Science (AREA)
  • Health & Medical Sciences (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Filtering Materials (AREA)
TW096141005A 2006-10-31 2007-10-31 High purity method and apparatus for ultra pure water TWI549912B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006296123 2006-10-31

Publications (2)

Publication Number Publication Date
TW200833611A true TW200833611A (en) 2008-08-16
TWI549912B TWI549912B (zh) 2016-09-21

Family

ID=39344167

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096141005A TWI549912B (zh) 2006-10-31 2007-10-31 High purity method and apparatus for ultra pure water

Country Status (6)

Country Link
US (1) US9156001B2 (zh)
EP (1) EP2085363A4 (zh)
JP (1) JP5326572B2 (zh)
KR (1) KR101098068B1 (zh)
TW (1) TWI549912B (zh)
WO (1) WO2008053826A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI728078B (zh) * 2016-03-25 2021-05-21 日商栗田工業股份有限公司 超純水製造系統

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CN101939262A (zh) * 2007-11-06 2011-01-05 栗田工业株式会社 超纯水制造方法和装置以及电子部件构件类的清洗方法和装置
JP5670069B2 (ja) * 2010-03-03 2015-02-18 三浦工業株式会社 純水製造システム
JP5630056B2 (ja) * 2010-03-31 2014-11-26 栗田工業株式会社 被洗浄基板の洗浄水の影響評価方法、この評価方法に基づく水質設定方法、及びこの設定された水質の水を得るための超純水製造システム
SG11201407134SA (en) * 2012-05-01 2014-12-30 Entegris Inc Organic solvent purifier and method of using
US9607864B2 (en) 2012-05-23 2017-03-28 Stmicroelectronics, Inc. Dual medium filter for ion and particle filtering during semiconductor processing
JP6019909B2 (ja) * 2012-08-09 2016-11-02 住友電気工業株式会社 液体濾過装置およびそれを用いたバラスト水処理装置
US10138149B2 (en) * 2013-07-24 2018-11-27 Kurita Water Industries Ltd. Ultrapure water production system, ultrapure water production feed system, and method for cleaning thereof
WO2016190507A1 (ko) * 2015-05-27 2016-12-01 전북대학교 산학협력단 고속 흡착 필터를 포함하는 흡착장치
KR101792959B1 (ko) * 2016-12-21 2017-11-03 전북대학교산학협력단 고속 이온교환층을 포함하는 흡착장치
CN106809907B (zh) * 2016-12-25 2020-04-21 重庆杰鑫直饮水净化设备有限公司 一种用于饮用水的净化设备
JP6350706B1 (ja) * 2017-03-30 2018-07-04 栗田工業株式会社 水質調整水製造装置
JP6299912B1 (ja) * 2017-03-30 2018-03-28 栗田工業株式会社 ｐＨ及び酸化還元電位を制御可能な希釈薬液の製造装置
JP6299913B1 (ja) * 2017-03-30 2018-03-28 栗田工業株式会社 ｐＨ・酸化還元電位調整水の製造装置
US10688441B2 (en) * 2017-04-19 2020-06-23 Mann+Hummel Gmbh Integrated ultrafiltration membrane and ion-exchange filtration system
CN111001444B (zh) * 2018-10-08 2022-05-17 金川集团股份有限公司 一种离子交换树脂塔
JPWO2020203142A1 (zh) * 2019-03-29 2020-10-08
JP6900975B2 (ja) * 2019-06-12 2021-07-14 栗田工業株式会社 ｐＨ調整水製造装置
CN111592139A (zh) * 2020-05-11 2020-08-28 金汝 一种垂向呼吸式污水处理多重过滤板
CN115477366B (zh) * 2022-10-20 2023-11-28 重庆海通环保科技有限公司 一种抗污染反渗透膜装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI728078B (zh) * 2016-03-25 2021-05-21 日商栗田工業股份有限公司 超純水製造系統

Also Published As

Publication number Publication date
JP5326572B2 (ja) 2013-10-30
TWI549912B (zh) 2016-09-21
US9156001B2 (en) 2015-10-13
EP2085363A1 (en) 2009-08-05
US20100044311A1 (en) 2010-02-25
KR20090082179A (ko) 2009-07-29
WO2008053826A1 (en) 2008-05-08
EP2085363A4 (en) 2011-01-26
KR101098068B1 (ko) 2011-12-26
JPWO2008053826A1 (ja) 2010-02-25

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