TW200833611A - Method of increasing purity of ultrapure water and apparatus therefor - Google Patents

Method of increasing purity of ultrapure water and apparatus therefor

Info

Publication number
TW200833611A
TW200833611A TW096141005A TW96141005A TW200833611A TW 200833611 A TW200833611 A TW 200833611A TW 096141005 A TW096141005 A TW 096141005A TW 96141005 A TW96141005 A TW 96141005A TW 200833611 A TW200833611 A TW 200833611A
Authority
TW
Taiwan
Prior art keywords
ultrapure water
ion exchange
metal ions
exchange resin
purity
Prior art date
Application number
TW096141005A
Other languages
Chinese (zh)
Other versions
TWI549912B (en
Inventor
Hideki Kobayashi
Kunihiro Hayakawa
Masanobu Osawa
Original Assignee
Kurita Water Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurita Water Ind Ltd filed Critical Kurita Water Ind Ltd
Publication of TW200833611A publication Critical patent/TW200833611A/en
Application granted granted Critical
Publication of TWI549912B publication Critical patent/TWI549912B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/16—Feed pretreatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/025—Reverse osmosis; Hyperfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/027—Nanofiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/145—Ultrafiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/147—Microfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/14—Pleat-type membrane modules
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage
    • C02F9/20—Portable or detachable small-scale multistage treatment devices, e.g. point of use or laboratory water purification systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/04—Specific process operations in the feed stream; Feed pretreatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/16—Flow or flux control
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water

Landscapes

  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nanotechnology (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Clinical Laboratory Science (AREA)
  • Health & Medical Sciences (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Filtering Materials (AREA)

Abstract

A method of increasing the purity of ultrapure water, in which any impurities contained in ultrapure water can be stably removed to a high degree within a limited space over a prolonged period of time; and an apparatus therefor. Ultrapure water introduced in ultrapure water purity increasing apparatus (10) passes through ion exchange resin layer (5) within inferior compartment (1a). In this stage, metal ions, etc. contained in the ultrapure water are removed by the ion exchange resin. Thereafter, the ultrapure water passes through perforated plate (4), flows into superior compartment (1b) and permeates ion exchange filter (6). In this stage, any metal ions, etc. remaining unremoved by the ion exchange resin layer (5) are removed. That is, metal ions are removed to a certain extent by the ion exchange resin, so that it is satisfactory for the ion exchange filter provided downstream thereof to remove an extremely small amount of metal ions. Consequently, reaching of the ion exchange filter to breakthrough within a short period of time can be prevented, thereby attaining increasing of the purity of ultrapure water over a prolonged period of time.
TW096141005A 2006-10-31 2007-10-31 High purity method and apparatus for ultra pure water TWI549912B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006296123 2006-10-31

Publications (2)

Publication Number Publication Date
TW200833611A true TW200833611A (en) 2008-08-16
TWI549912B TWI549912B (en) 2016-09-21

Family

ID=39344167

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096141005A TWI549912B (en) 2006-10-31 2007-10-31 High purity method and apparatus for ultra pure water

Country Status (6)

Country Link
US (1) US9156001B2 (en)
EP (1) EP2085363A4 (en)
JP (1) JP5326572B2 (en)
KR (1) KR101098068B1 (en)
TW (1) TWI549912B (en)
WO (1) WO2008053826A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI728078B (en) * 2016-03-25 2021-05-21 日商栗田工業股份有限公司 Ultrapure water manufacturing system

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CN101939262A (en) * 2007-11-06 2011-01-05 栗田工业株式会社 Process and apparatus for producing ultrapure water, and method and apparatus for cleaning electronic component members
JP5670069B2 (en) * 2010-03-03 2015-02-18 三浦工業株式会社 Pure water production system
JP5630056B2 (en) * 2010-03-31 2014-11-26 栗田工業株式会社 Method for evaluating influence of cleaning water on substrate to be cleaned, water quality setting method based on this evaluation method, and ultrapure water production system for obtaining water having the set water quality
EP2844374B1 (en) * 2012-05-01 2018-09-19 Entegris, Inc. Organic solvent purifier and method of using
US9607864B2 (en) * 2012-05-23 2017-03-28 Stmicroelectronics, Inc. Dual medium filter for ion and particle filtering during semiconductor processing
JP6019909B2 (en) * 2012-08-09 2016-11-02 住友電気工業株式会社 Liquid filtration device and ballast water treatment device using the same
KR102027026B1 (en) * 2013-07-24 2019-09-30 쿠리타 고교 가부시키가이샤 Ultrapure water production system, ultrapure water production supply system, and method for cleaning same
WO2016190507A1 (en) * 2015-05-27 2016-12-01 전북대학교 산학협력단 Adsorption apparatus comprising high-rate adsorption filter
KR101792959B1 (en) * 2016-12-21 2017-11-03 전북대학교산학협력단 Adsorbent apparatus comprising ion exchange bed for high rate of adsorption
CN106809907B (en) * 2016-12-25 2020-04-21 重庆杰鑫直饮水净化设备有限公司 A clarification plant for drinking water
JP6299912B1 (en) * 2017-03-30 2018-03-28 栗田工業株式会社 Apparatus for producing a diluted chemical solution capable of controlling pH and redox potential
JP6299913B1 (en) * 2017-03-30 2018-03-28 栗田工業株式会社 pH / redox potential adjustment water production equipment
JP6350706B1 (en) * 2017-03-30 2018-07-04 栗田工業株式会社 Water quality adjustment water production equipment
US10688441B2 (en) * 2017-04-19 2020-06-23 Mann+Hummel Gmbh Integrated ultrafiltration membrane and ion-exchange filtration system
CN111001444B (en) * 2018-10-08 2022-05-17 金川集团股份有限公司 Ion exchange resin tower
JP6900975B2 (en) * 2019-06-12 2021-07-14 栗田工業株式会社 pH adjusted water production equipment
CN111592139A (en) * 2020-05-11 2020-08-28 金汝 Vertical breathing type sewage treatment multiple filtering plate
CN115477366B (en) * 2022-10-20 2023-11-28 重庆海通环保科技有限公司 Anti-pollution reverse osmosis membrane device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI728078B (en) * 2016-03-25 2021-05-21 日商栗田工業股份有限公司 Ultrapure water manufacturing system

Also Published As

Publication number Publication date
JPWO2008053826A1 (en) 2010-02-25
TWI549912B (en) 2016-09-21
EP2085363A4 (en) 2011-01-26
US20100044311A1 (en) 2010-02-25
KR101098068B1 (en) 2011-12-26
KR20090082179A (en) 2009-07-29
US9156001B2 (en) 2015-10-13
EP2085363A1 (en) 2009-08-05
WO2008053826A1 (en) 2008-05-08
JP5326572B2 (en) 2013-10-30

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